EP3702622C0 - Vakuumsystem - Google Patents

Vakuumsystem

Info

Publication number
EP3702622C0
EP3702622C0 EP19159473.8A EP19159473A EP3702622C0 EP 3702622 C0 EP3702622 C0 EP 3702622C0 EP 19159473 A EP19159473 A EP 19159473A EP 3702622 C0 EP3702622 C0 EP 3702622C0
Authority
EP
European Patent Office
Prior art keywords
vacuum system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19159473.8A
Other languages
English (en)
French (fr)
Other versions
EP3702622A1 (de
EP3702622B1 (de
Inventor
Jan Hofmann
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19159473.8A priority Critical patent/EP3702622B1/de
Priority to JP2020022274A priority patent/JP6921253B2/ja
Publication of EP3702622A1 publication Critical patent/EP3702622A1/de
Application granted granted Critical
Publication of EP3702622C0 publication Critical patent/EP3702622C0/de
Publication of EP3702622B1 publication Critical patent/EP3702622B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/33—Retaining components in desired mutual position with a bayonet coupling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/36—Retaining components in desired mutual position by a form fit connection, e.g. by interlocking

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP19159473.8A 2019-02-26 2019-02-26 Vakuumsystem Active EP3702622B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19159473.8A EP3702622B1 (de) 2019-02-26 2019-02-26 Vakuumsystem
JP2020022274A JP6921253B2 (ja) 2019-02-26 2020-02-13 真空システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19159473.8A EP3702622B1 (de) 2019-02-26 2019-02-26 Vakuumsystem

Publications (3)

Publication Number Publication Date
EP3702622A1 EP3702622A1 (de) 2020-09-02
EP3702622C0 true EP3702622C0 (de) 2026-02-25
EP3702622B1 EP3702622B1 (de) 2026-02-25

Family

ID=65598562

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19159473.8A Active EP3702622B1 (de) 2019-02-26 2019-02-26 Vakuumsystem

Country Status (2)

Country Link
EP (1) EP3702622B1 (de)
JP (1) JP6921253B2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12421826B1 (en) 2024-08-30 2025-09-23 Schlumberger Technology Corporation Sealing device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2017480A1 (de) * 2007-06-15 2009-01-21 VARIAN S.p.A. Geteilte Verbindung für Vakuumpumpen und Verfahren zur Gewinnung der besagten Verbindung
DE102009013244A1 (de) * 2009-03-14 2010-09-16 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
GB2516969B (en) * 2013-08-09 2017-04-19 Edwards Ltd Vacuum system securing devices
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve

Also Published As

Publication number Publication date
EP3702622A1 (de) 2020-09-02
JP2020139499A (ja) 2020-09-03
JP6921253B2 (ja) 2021-08-18
EP3702622B1 (de) 2026-02-25

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