EP3698115A1 - Leak detector for checking the sealing tightness of an object to be tested - Google Patents

Leak detector for checking the sealing tightness of an object to be tested

Info

Publication number
EP3698115A1
EP3698115A1 EP18769750.3A EP18769750A EP3698115A1 EP 3698115 A1 EP3698115 A1 EP 3698115A1 EP 18769750 A EP18769750 A EP 18769750A EP 3698115 A1 EP3698115 A1 EP 3698115A1
Authority
EP
European Patent Office
Prior art keywords
pump
primary vacuum
vacuum pump
leak detector
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18769750.3A
Other languages
German (de)
French (fr)
Other versions
EP3698115B1 (en
Inventor
Julien COULOMB
Cyrille Nomine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Publication of EP3698115A1 publication Critical patent/EP3698115A1/en
Application granted granted Critical
Publication of EP3698115B1 publication Critical patent/EP3698115B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/223—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for pipe joints or seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps

Definitions

  • Leak detector for checking the tightness of an object to be tested
  • the present invention relates to a leak detector for checking the tightness of an object to be tested.
  • a so-called sprinkler leak detection technique consists in evacuating the gas inside an object to be tested to a low pressure by means of a leak detector. An atmosphere enriched with tracer gas is then created around the object by spraying. The leak detector checks whether tracer gas can be found in the aspirated gases.
  • This method makes use of the detection of the passage of the tracer gas through any leaks of the object to be tested.
  • Helium or hydrogen is generally used as a tracer gas because these gases pass through small leaks more easily than other gases, because of the small size of their molecules and their high velocities.
  • the leak detector comprises a pumping system that can be composed of a primary vacuum pump and a turbomolecular vacuum pump mounted upstream and in series of the primary vacuum pump .
  • the turbomolecular vacuum pump is first isolated from the object under test to lower the pressure in the object to be tested by the primary vacuum pump and then placed in communication with the object to be tested after the pressure has passed a threshold low.
  • the maximum vacuum pressure reached by the pumping system must be as low as possible in order to obtain a good measurement sensitivity.
  • the pumping rate of the primary vacuum pump must be sufficient to quickly drop in pressure inside the object to be tested and as low as possible.
  • one solution is to use a primary vacuum pump having a larger number of pump stages connected in series. This configuration does not however make it possible to improve the pumping rate during the evacuation.
  • One solution to increase the pumping rate is to connect a second primary vacuum pump in parallel with the first. This solution, however, does not allow to lower the limit vacuum pressure. This can generate significant background noise, making detections of weak helium signals difficult.
  • the pumping performance of primary vacuum pumps can deteriorate with aging, increasing the attainable limit vacuum pressures. This can prevent the crossing of the low pressure threshold allowing tilting of the pump on the turbomolecular vacuum pump.
  • One solution is to use an additional turbomolecular vacuum pump, interposed between the main turbomolecular vacuum pump and the primary vacuum pump.
  • This additional turbomolecular vacuum pump is placed in communication with the object to be tested as soon as the object is placed under vacuum at atmospheric pressure.
  • This solution can however be relatively expensive.
  • the recurrent air inlets to be absorbed by the additional turbomolecular vacuum pump can be sources of malfunctions.
  • One of the aims of the present invention is to propose a leak detector that makes it possible to achieve a low limit vacuum pressure while having a large pumping rate at atmospheric pressure, which is robust over time, with a cost and a controlled space. .
  • the subject of the invention is a leak detector for checking the tightness of an object to be tested, the leak detector comprising:
  • a pumping device comprising:
  • a first primary vacuum pump comprising a first drive motor, at least a first and a second pump stage connected in series between an inlet and a discharge,
  • At least one second primary vacuum pump comprising a second drive motor, at least a first and a second pump stage connected in series between an inlet and a discharge, the inputs of the primary vacuum pumps being connected in parallel to the detection input via a first isolation valve,
  • turbomolecular vacuum pump having a discharge connected between the first isolation valve and the inlet of the primary vacuum pumps by a second isolation valve
  • a gas detector connected to the turbomolecular vacuum pump, characterized in that the discharge of the at least one second primary vacuum pump is connected to the first primary vacuum pump, between two series pumping stages of the first primary vacuum pump.
  • the idea underlying the invention is to innovatively use primary vacuum pumps conventionally used for discharging gases to be pumped at ambient pressure, by connecting the discharge of one of the primary vacuum pumps between stages of pumping the other.
  • the connection of the second primary vacuum pump between the pumping stages of the first primary vacuum pump makes it possible to benefit both from the pumping rate of the first pumping stages of the at least two primary vacuum pumps and from a lowering of the limit vacuum pressure resulting from the pump stages of the second vacuum pump and the last pump stage (s) of the first primary vacuum pump.
  • the pumping is effective through the pumping stages of the second primary vacuum pump to which is added the at least one last pumping stage of the first primary vacuum pump successive (s) at the connection of the delivery of the second primary vacuum pump.
  • This arrangement is counterintuitive. Instead, it would have been thought that the resulting vacuum vacuum pressure would be identical to that obtained with a single primary vacuum pump.
  • the limit vacuum pressure in the object to be tested can therefore be lowered. This makes it possible to reduce the background noise in tracer gas and thus allows a significant improvement in the measurement sensitivity.
  • the lowering of the limit vacuum pressure also makes it possible to obtain a margin with respect to the performance losses that can be caused by the aging of the primary vacuum pumps. This gives a better robustness compared to the aging of the pumps.
  • the discharge of the at least one second primary vacuum pump is connected between the penultimate pump stage and the last pump stage of the first primary vacuum pump
  • the at least two primary vacuum pumps are membrane-type
  • the membranes of the pumping stages of the first primary vacuum pump are configured to be driven in motion by means of of the first drive motor and the diaphragms of the pump stages of the second primary vacuum pump are configured to be driven by the second drive motor,
  • the at least two primary vacuum pumps are screw or spiral
  • the at least two primary vacuum pumps comprise two rotors, for example of the ROOTS type,
  • the at least two primary vacuum pumps comprise two rotors configured to be driven to rotate synchronously in opposite directions in each pumping stage
  • the rotors of the first primary vacuum pump are configured to be driven by the first drive motor
  • the rotors of the second primary vacuum pump are configured to be driven by the second drive motor
  • the at least two primary vacuum pumps have identical pump stage configurations
  • At least one primary vacuum pump comprises at least two first pumping stages connected in parallel,
  • At least one primary vacuum pump comprises at least three pump stages connected in series,
  • the leak detector comprises a purge device configured to supply a purge gas between two pumping stages of the second primary vacuum pump.
  • Figure 1 shows a schematic view of a leak detector according to a first embodiment.
  • FIG. 2 represents a graph showing the pressure drop in an object to be tested (in mbar) connected to the leak detector, obtained as a function of time (in seconds) for, on the one hand, two membrane primary vacuum pumps according to FIG. (Curve A) and secondly, two diaphragm vacuum pumps having common inputs and outputs (curve B), for pumping at maximum rotational speeds and for pumping at reduced rotational speeds.
  • Figure 3 shows a schematic view of a leak detector according to another embodiment.
  • primary vacuum pump is defined as a volumetric vacuum pump, which sucks, transfers and then delivers a gas to be pumped.
  • a primary vacuum pump is configured to discharge a gas to be pumped at ambient pressure.
  • upstream an element which is placed before another in relation to the direction of flow of the gas.
  • downstream means an element placed after another with respect to the direction of flow of the gas to be pumped, the element situated upstream being at a lower pressure than the element situated downstream.
  • the "minimum vacuum” defines the minimum pressure obtained by a vacuum pump when no gas flow is introduced, except for any parasitic and negligible gas flows.
  • Figure 1 shows a leak detector 1 for checking the tightness of an object to be tested such as by spraying tracer gas.
  • the leak detector 1 comprises a detection input 2 intended to be connected to an object to be tested, a pumping device 3 and a gas detector 4.
  • the pumping device 3 comprises a first primary vacuum pump 5, at least one second primary vacuum pump 6, a turbomolecular vacuum pump 7, a first and second isolation valve 8, 9 and at least one sampling valve 10a. , 10b.
  • the gas detector 4 is connected to the turbomolecular vacuum pump 7, for example to its suction 1 1.
  • the gas detector 4 comprises for example a mass spectrometer.
  • the discharge 17 of the turbomolecular vacuum pump 7 is connected to the inlets 12, 14 of the primary vacuum pumps 5, 6 via the second isolation valve 9.
  • the detection input 2 of the leak detector 1 is for example connected to an intermediate stage of the turbomolecular vacuum pump 7, via at least one sampling valve 10a, 10b.
  • the pumping device 3 comprises, for example, at least two sampling valves 10a, 10b, each valve 10a, 10b being connected to an intermediate stage distinct from the turbomolecular vacuum pump 7 so as to be able to adapt the sampling flow to the rate level. leakage, the sampling valve 10a, 10b being connected to a branch of a line of the vacuum line 16 arranged between the detection input 2 and the first isolation valve 8.
  • the second isolation valve 9 is connected to the vacuum line 16 between the first isolation valve 8 and the inlets 12, 14 of the primary vacuum pumps 5, 6.
  • the closure of the sampling valves 10a, 10b and, optionally, of the second isolation valve 9, allows emptying of the test object connected to the detection input 2 by the primary vacuum pumps 5, 6, when the opening of the first isolation valve 8.
  • the first primary vacuum pump 5 comprises at least a first pump stage T1, T2 and a second pump stage T3, connected in series one after the other between an inlet 12 and a discharge 13 of the first vacuum pump. primary 5 and in which a gas to be pumped can circulate.
  • the first primary vacuum pump 5 comprises a first drive motor 21.
  • the pump stages T1, T2, T3, T4 of the first primary vacuum pump 5 are arranged in a first housing 22 of the first primary vacuum pump 5 .
  • the second primary vacuum pump 6 comprises at least a first pump stage TT, 12 'and a second pump stage T3', connected in series one after the other between an inlet 14 and a discharge 15 of the second pump primary vacuum 6 and in which a gas to be pumped can circulate.
  • the second primary vacuum pump 6 comprises a second drive motor 23.
  • the pump stages TT, ⁇ 2 ', ⁇ 3', T4 'of the second primary vacuum pump 6 are arranged in a second casing 24 of the second pump. primary vacuum 6.
  • the first and second drive motors 21, 23 are independent of one another.
  • Each pump stage T1 -T4, TT-T4 ' comprises a respective input and output.
  • the pumping stages of the same primary vacuum pump can be connected in parallel, the inputs being connected together and the outputs being connected together.
  • the pumping stages of the same primary vacuum pump can be connected in series one after the other by respective inter-stage channels connecting the output (or discharge) of the preceding pumping stage or the output common several stages of pumping preceding the entry (or aspiration) of the next floor or the common entrance of several pumping stages that follow.
  • the pump stages T1 -T4, TT-T4 'of the same primary vacuum pump have a generated volume, that is to say a volume of gas pumped, decreasing (or equal) with the pump stages mounted in series, the first pump stage (s) T1, T2, T1 ', 12' having the highest generated flow rate and the last pump stage T4, T4 'having the lowest generated flow rate.
  • the first primary vacuum pump 5 comprises two first pump stages T1, T2 connected in parallel. These first pump stages T1, T2 are connected in series and upstream of a second pump stage T3, mounted in series and upstream of a third pump stage T4.
  • the second primary vacuum pump 6 comprises two first pump stages TT, T2 'connected in parallel. These two first pumping stages TT, T2 'are connected in series and upstream of a second pumping stage T3', connected in series and upstream of a third pumping stage T4 '.
  • the inlets 12, 14 of the primary vacuum pumps 5, 6 are connected in parallel with the detection input 2 via lines of a vacuum line 16 of the pump device 3, via the first isolation valve 8.
  • the primary vacuum pumps 5, 6 are membrane.
  • Each pumping stage comprises a membrane driven by an eccentric such that the movement of the membrane accompanied by inlet and outlet valves allows the pumping of a gas.
  • the eccentrics moving the membranes of the pump stages T1 -T4 are rotated by the first drive motor 21.
  • the eccentrics moving the membranes of the pumping stages T -T4 ' are rotated by the second drive motor 23.
  • the two primary vacuum pumps 5, 6 are two diaphragm vacuum pumps with identical pumping stage configurations: the pumping rates are equivalent, each primary vacuum pump having three pumping stages in series, the first stage of pumping having two pumping stages in parallel.
  • the discharge 15 of the second primary vacuum pump 6 is connected to the first primary vacuum pump 5, between two pumping stages T3, T4 in series with the first primary vacuum pump 5, such as between the penultimate pumping stage T3 and the last pumping stage T4.
  • the discharge 15 is thus for example connected to the last inter-stage channel of the first primary vacuum pump 5.
  • the idea underlying the invention is to innovatively use primary vacuum pumps conventionally used for discharging gases to be pumped at ambient pressure, by connecting the discharge of one of the primary vacuum pumps between stages of pumping the other.
  • the connection of the second primary vacuum pump 6 between the pumping stages T3, T4 of the first primary vacuum pump 5 makes it possible to benefit from both a doubled pumping rate and a lowering of the limit vacuum pressure.
  • the pumping is effective through the three pumping stages T -T4 'of the second primary vacuum pump 6, to which is added the last pumping stage T4 of the first primary vacuum pump 5.
  • This layout is counterintuitive. Instead, it would have been thought that the resulting vacuum vacuum pressure would be identical to that obtained with a single primary vacuum pump.
  • the leak detector 1 may comprise a purge device 18 configured to supply a purge gas between two pumping stages ⁇ 3 ', T4' of the second primary vacuum pump 6, such as between the penultimate stage of pumping. T3 'and the last pump stage T4'.
  • a single purge device 18 serves to purge both the last pump stage T4 'of the second primary vacuum pump 6 and the last pump stage T4 of the first primary vacuum pump 5.
  • a pressure sensor may be arranged in the vacuum line 16 to measure the pressure in the pipes connecting the at least one sampling valve 10a, 10b, the isolation valves 8, 9 and the detection inlet 2.
  • the isolation valves 8, 9 and sampling valves 10a, 10b are for example solenoid valves controllable by a control unit of the leak detector 1.
  • the control unit of the leak detector 1 comprises one or more controllers or microcontrollers or computers, comprising memories and programs adapted to control the solenoid valves 8, 9, 10a, 10b, in particular as a function of the pressure measured in the vacuum line. 16, and to manage a user interface of the leak detector 1, such as a remote control and / or a control panel.
  • the user starts a measurement cycle.
  • the leak detector 1 then benefits from the pumping rate of the two primary vacuum pumps 5, 6 equivalent to four pumping stages T1, T2, T1 ', T2' sucking in parallel in the object to be tested.
  • the first isolation valve 8 When the pressure measured in the vacuum line 16 becomes less than or equal to a low pressure threshold, for example less than or equal to 500 Pa (or 5mbar), the first isolation valve 8 is closed.
  • the second isolation valve 9 as well as one of the sampling solenoid valves 10a, 10b are controlled in opening in order to put the turbomolecular vacuum pump 7 and the gas detector 4 in communication with the input of the detector 2.
  • the leak detector 1 then benefits from the pumping rate of the two primary vacuum pumps 5, 6 equivalent to five pumping stages TT, ⁇ 2 ', ⁇ 3', ⁇ 4 ', T4 in series.
  • the user can search for leaks by spraying tracer gas around the object to be tested.
  • the gas detector 4 measures an increase in tracer gas in the presence of a leakage of the object to be tested.
  • the leak detector 1 can also be used to perform a tightness test of an object to be tested by the so-called "sniffing" test.
  • the object to be tested is previously filled tracer gas, for example pressurized.
  • a sniffer probe is connected to the detection input 2 of the leak detector 1 to suck the surrounding gas from the object under test. A part of the gases thus collected, possibly containing the tracer gas revealing a leak, is then analyzed by the gas detector 4.
  • the leak detector 1 When the leak detector 1 is no longer used, for example beyond a predefined period, it can provide a standby mode (or "stand-by" in English) in which the speed of rotation of the pumps is reduced with a primary vacuum 5, 6. The reduction in the rotational speed of the primary vacuum pumps 5, 6 makes it possible to reduce the electrical consumption of the leak detector 1 during the period of non-use.
  • This mode can be triggered manually or can be detected and controlled by the control unit.
  • FIG. 2 illustrates the pumping performance obtained on the one hand for two diaphragm primary vacuum pumps 5, 6 such as those described previously with the repression. 15 of the second primary vacuum pump 6 connected between the penultimate pump stage T3 and the last pump stage T4 of the first primary vacuum pump 5 (curve A) and, on the other hand, for two primary vacuum pumps membrane in conventional use having common inputs and common backs (curve B).
  • Curves A, B show a pressure drop in an object to be tested as a function of time on the one hand, a pump obtained at maximum speeds of rotation V1 of the primary vacuum pumps and, on the other hand, for a pump obtained at reduced rotation speeds V2 (of the order of 8 to 9% of the maximum rotational speed).
  • the pumping rate is the same for the primary vacuum pumps 5, 6 according to the invention as for two primary vacuum pumps connected in parallel with one another. common repression.
  • the leak detector 1 according to the invention thus benefits from the pumping rate of the first pumping stages T1, T2, TV, T2 'of the two primary vacuum pumps 5, 6.
  • the connection of the discharge 15 of the second primary vacuum pump 6 between the second-last pumping stage T3 and the last pumping stage T4 of the first primary vacuum pump 5 does not lower the pumping performance of the two primary vacuum pumps 5, 6 for high pressures.
  • the limit vacuum pressure obtained with the primary vacuum pumps 5, 6 according to the invention reaches 0.5mbar while the pressure stabilizes around a limit vacuum pressure of about 1 mbar with primary vacuum pumps with common discharge.
  • the limit vacuum pressure can thus be lowered by a factor of two.
  • the limit vacuum pressure in the object to be tested can therefore be lowered. This makes it possible to reduce the background noise in tracer gas and thus allows a significant improvement in the measurement sensitivity.
  • the lowering of the limit vacuum pressure also makes it possible to obtain a margin with respect to the performance losses that can be induced by the aging of the primary vacuum pumps 5, 6. This gives a better robustness compared to the aging of the pumps. .
  • FIG. 3 illustrates another embodiment in which the first and second primary vacuum pumps 19, 20 comprise two rotors driven to rotate synchronously in opposite directions in each pump stage T1-T2, TT-T2 '.
  • the primary vacuum pumps 19, 20 comprise for example five pump stages connected in series.
  • the shafts carrying the rotors extend into the pump stages T1-T5 connected in series one after the other. They are driven by a first drive motor 25 of the first primary vacuum pump 19.
  • the pump stages T1-T5 are arranged in a first housing 26 of the first primary vacuum pump 19.
  • the shafts carrying the rotors extend into the pumping stages T-T5 'connected in series one after the other. They are driven by a second drive motor 27 of the second primary vacuum pump 20.
  • the pump stages TT-T5 ' are arranged in a second casing 28 of the second primary vacuum pump 20.
  • the rotors have, for example, lobes of identical profiles, such as "Roots" type ("eight" or "bean” shaped section). The rotors are angularly offset and driven to rotate synchronously in opposite directions in each stage.
  • the discharge 15 of the second primary vacuum pump 20 is connected to the first primary vacuum pump 19, between two pumping stages T4, T5 in series with the first primary vacuum pump 19, such as between the penultimate pump stage T4 and the last pump stage T5.
  • the connection of the second primary vacuum pump 20 between the pumping stages T4, T5 of the first primary vacuum pump 19 makes it possible to benefit from both a double pumping rate and a lowering of the limit vacuum pressure.
  • the pumping is effective through the five pump stages TT-T5 'of the second primary vacuum pump 20, to which is added the last pump stage T5 of the first primary vacuum pump 19.
  • the invention is also applicable to other types of multi-stage primary vacuum pumps comprising two rotors, such as "Claw” type or a similar principle of volumetric vacuum pump, such as a vacuum pump. spiral (called “Scroll” in English) or screw.

Abstract

The invention relates to a leak detector (1) for checking the sealing tightness of an object to be tested, said leak detector (1) comprising: a detection inlet (2) to be connected to an object to be tested; a first pumping device (3) comprising (i) a first rough vacuum pump (5; 19) comprising a first drive motor (21, 25), at least a first pumping stage (T1, T2) and a second pumping stage (T3) mounted in series between an inlet (12) and an outlet (13), (ii) at least one second rough vacuum pump (6; 20) comprising a second drive motor (23, 27), at least a first pumping stage (T1', T2') and a second pumping stage (Τ3') mounted in series between an inlet (14) and an outlet (15), the inlets (12, 14) of the rough vacuum pumps (5, 6; 19, 20) being connected in parallel to the detection inlet (2) by means of a first isolation valve (8), and (iii) a turbomolecular pump (7) having an outlet (17) connected between the first isolation valve (8) and the inlets (12, 14) of the rough vacuum pumps (5, 6; 19, 20) by means of a second isolation valve (9); and a gas detector (4) connected to the turbomolecular pump (7). The leak detector is characterised in that the outlet (15) of the at least one second rough vacuum pump (6; 20) is connected to the first rough vacuum pump (5; 19), between two in-series pumping stages (T3, T4; T4, T5) of the first rough vacuum pump (5; 19).

Description

Détecteur de fuites pour le contrôle de l'étanchéité d'un objet à tester Leak detector for checking the tightness of an object to be tested
La présente invention se rapporte à un détecteur de fuites pour le contrôle de l'étanchéité d'un objet à tester. The present invention relates to a leak detector for checking the tightness of an object to be tested.
Une technique de détection de fuites dite par aspersion consiste à évacuer le gaz à l'intérieur d'un objet à tester jusqu'à une pression faible au moyen d'un détecteur de fuites. On crée ensuite une atmosphère enrichie de gaz traceur autour de l'objet par aspersion. Le détecteur de fuites vérifie si du gaz traceur peut être retrouvé dans les gaz aspirés.  A so-called sprinkler leak detection technique consists in evacuating the gas inside an object to be tested to a low pressure by means of a leak detector. An atmosphere enriched with tracer gas is then created around the object by spraying. The leak detector checks whether tracer gas can be found in the aspirated gases.
Cette méthode fait appel à la détection du passage du gaz traceur à travers les éventuelles fuites de l'objet à tester. On utilise généralement l'hélium ou l'hydrogène comme gaz traceur car ces gaz traversent les petites fuites plus aisément que les autres gaz, du fait de la petite taille de leurs molécules et de leurs grandes vitesses de déplacement.  This method makes use of the detection of the passage of the tracer gas through any leaks of the object to be tested. Helium or hydrogen is generally used as a tracer gas because these gases pass through small leaks more easily than other gases, because of the small size of their molecules and their high velocities.
Pour descendre la pression dans l'objet à tester, le détecteur de fuites comporte un système de pompage pouvant être composé d'une pompe à vide primaire et d'une pompe à vide turbomoléculaire montée en amont et en série de la pompe à vide primaire. La pompe à vide turbomoléculaire est d'abord isolée de l'objet à tester pour abaisser la pression dans l'objet à tester par la pompe à vide primaire puis mise en communication avec l'objet à tester après que la pression a franchi un seuil bas.  To lower the pressure in the object to be tested, the leak detector comprises a pumping system that can be composed of a primary vacuum pump and a turbomolecular vacuum pump mounted upstream and in series of the primary vacuum pump . The turbomolecular vacuum pump is first isolated from the object under test to lower the pressure in the object to be tested by the primary vacuum pump and then placed in communication with the object to be tested after the pressure has passed a threshold low.
La pression de vide limite atteinte par le système de pompage doit être la plus basse possible afin d'obtenir une bonne sensibilité de mesure. En outre, le débit de pompage de la pompe à vide primaire doit être suffisant pour descendre rapidement en pression à l'intérieur de l'objet à tester et le plus bas possible.  The maximum vacuum pressure reached by the pumping system must be as low as possible in order to obtain a good measurement sensitivity. In addition, the pumping rate of the primary vacuum pump must be sufficient to quickly drop in pressure inside the object to be tested and as low as possible.
Pour abaisser la pression de vide limite, une solution consiste à utiliser une pompe à vide primaire ayant un nombre plus important d'étages de pompage montés en série. Cette configuration ne permet cependant pas d'améliorer le débit de pompage lors de la mise sous vide.  In order to lower the limit vacuum pressure, one solution is to use a primary vacuum pump having a larger number of pump stages connected in series. This configuration does not however make it possible to improve the pumping rate during the evacuation.
Pour augmenter le débit de pompage, une solution consiste à raccorder une deuxième pompe à vide primaire en parallèle de la première. Cette solution ne permet toutefois pas d'abaisser la pression de vide limite. Celle-ci peut générer un bruit de fond important, rendant les détections de faibles signaux d'hélium difficiles.  One solution to increase the pumping rate is to connect a second primary vacuum pump in parallel with the first. This solution, however, does not allow to lower the limit vacuum pressure. This can generate significant background noise, making detections of weak helium signals difficult.
Par ailleurs, les performances de pompage des pompes à vide primaires, notamment celles à membranes, peuvent se dégrader avec leur vieillissement, augmentant les pressions de vide limite atteignables. Cela peut empêcher le franchissement du seuil bas de pression permettant le basculement du pompage sur la pompe à vide turbomoléculaire. Moreover, the pumping performance of primary vacuum pumps, particularly those with membranes, can deteriorate with aging, increasing the attainable limit vacuum pressures. This can prevent the crossing of the low pressure threshold allowing tilting of the pump on the turbomolecular vacuum pump.
Une solution consiste à utiliser une pompe à vide turbomoléculaire additionnelle, interposée entre la pompe à vide turbomoléculaire principale et la pompe à vide primaire. Cette pompe à vide turbomoléculaire additionnelle est mise en communication avec l'objet à tester dès la mise sous vide de l'objet à la pression atmosphérique. Cette solution peut cependant être relativement onéreuse. De plus, les entrées d'air à répétition devant être absorbées par la pompe à vide turbomoléculaire additionnelle peuvent être des sources de dysfonctionnements.  One solution is to use an additional turbomolecular vacuum pump, interposed between the main turbomolecular vacuum pump and the primary vacuum pump. This additional turbomolecular vacuum pump is placed in communication with the object to be tested as soon as the object is placed under vacuum at atmospheric pressure. This solution can however be relatively expensive. In addition, the recurrent air inlets to be absorbed by the additional turbomolecular vacuum pump can be sources of malfunctions.
Un des buts de la présente invention est de proposer un détecteur de fuites permettant d'atteindre une basse pression de vide limite tout en présentant un débit de pompage important à pression atmosphérique, qui soit robuste dans le temps, avec un coût et un encombrement maîtrisés.  One of the aims of the present invention is to propose a leak detector that makes it possible to achieve a low limit vacuum pressure while having a large pumping rate at atmospheric pressure, which is robust over time, with a cost and a controlled space. .
A cet effet, l'invention a pour objet un détecteur de fuites pour le contrôle de l'étanchéité d'un objet à tester, le détecteur de fuites comprenant :  For this purpose, the subject of the invention is a leak detector for checking the tightness of an object to be tested, the leak detector comprising:
- une entrée de détection destinée à être raccordée à un objet à tester, a detection input intended to be connected to an object to be tested,
- un dispositif de pompage comportant : a pumping device comprising:
- une première pompe à vide primaire comportant un premier moteur d'entraînement, au moins un premier et un deuxième étages de pompage montés en série entre une entrée et un refoulement, a first primary vacuum pump comprising a first drive motor, at least a first and a second pump stage connected in series between an inlet and a discharge,
- au moins une deuxième pompe à vide primaire comportant un deuxième moteur d'entraînement, au moins un premier et un deuxième étages de pompage montés en série entre une entrée et un refoulement, les entrées des pompes à vide primaire étant raccordées en parallèle à l'entrée de détection via une première vanne d'isolation, at least one second primary vacuum pump comprising a second drive motor, at least a first and a second pump stage connected in series between an inlet and a discharge, the inputs of the primary vacuum pumps being connected in parallel to the detection input via a first isolation valve,
- une pompe à vide turbomoléculaire ayant un refoulement raccordé entre la première vanne d'isolation et les entrées des pompes à vide primaire par une deuxième vanne d'isolation,  a turbomolecular vacuum pump having a discharge connected between the first isolation valve and the inlet of the primary vacuum pumps by a second isolation valve,
- un détecteur de gaz raccordé à la pompe à vide turbomoléculaire, caractérisé en ce que le refoulement de la au moins une deuxième pompe à vide primaire est raccordé à la première pompe à vide primaire, entre deux étages de pompage en série de la première pompe à vide primaire. a gas detector connected to the turbomolecular vacuum pump, characterized in that the discharge of the at least one second primary vacuum pump is connected to the first primary vacuum pump, between two series pumping stages of the first primary vacuum pump.
L'idée à la base de l'invention est d'utiliser de façon innovante des pompes à vide primaire classiquement utilisées pour refouler des gaz à pomper à pression ambiante, en raccordant le refoulement d'une des pompes à vide primaire entre des étages de pompage de l'autre. Le raccordement de la deuxième pompe à vide primaire entre les étages de pompage de la première pompe à vide primaire permet de bénéficier à la fois du débit de pompage des premiers étages de pompage des au moins deux pompes à vide primaires et d'un abaissement de la pression de vide limite résultant des étages de pompage de la deuxième pompe à vide et du(es) dernier(s) étage(s) de pompage de la première pompe à vide primaire. En effet, en vide limite, le pompage est effectif à travers les étages de pompage de la deuxième pompe à vide primaire auxquels s'ajoute le au moins un dernier étage de pompage de la première pompe à vide primaire successif(s) au raccordement du refoulement de la deuxième pompe à vide primaire. Cet agencement est contre-intuitif. On aurait plutôt pensé que la pression de vide limite obtenue serait identique à celle obtenue avec une seule pompe à vide primaire.  The idea underlying the invention is to innovatively use primary vacuum pumps conventionally used for discharging gases to be pumped at ambient pressure, by connecting the discharge of one of the primary vacuum pumps between stages of pumping the other. The connection of the second primary vacuum pump between the pumping stages of the first primary vacuum pump makes it possible to benefit both from the pumping rate of the first pumping stages of the at least two primary vacuum pumps and from a lowering of the limit vacuum pressure resulting from the pump stages of the second vacuum pump and the last pump stage (s) of the first primary vacuum pump. Indeed, in vacuum limit, the pumping is effective through the pumping stages of the second primary vacuum pump to which is added the at least one last pumping stage of the first primary vacuum pump successive (s) at the connection of the delivery of the second primary vacuum pump. This arrangement is counterintuitive. Instead, it would have been thought that the resulting vacuum vacuum pressure would be identical to that obtained with a single primary vacuum pump.
La pression de vide limite dans l'objet à tester peut donc être abaissée. Cela permet de réduire le bruit de fond en gaz traceur et donc permet une amélioration significative de la sensibilité de mesure.  The limit vacuum pressure in the object to be tested can therefore be lowered. This makes it possible to reduce the background noise in tracer gas and thus allows a significant improvement in the measurement sensitivity.
L'abaissement de la pression de vide limite permet en outre d'obtenir une marge par rapport aux pertes de performances pouvant être induites par le vieillissement des pompes à vide primaires. On obtient donc une meilleure robustesse par rapport au vieillissement des pompes.  The lowering of the limit vacuum pressure also makes it possible to obtain a margin with respect to the performance losses that can be caused by the aging of the primary vacuum pumps. This gives a better robustness compared to the aging of the pumps.
Selon une ou plusieurs caractéristiques du détecteur de fuites, prises seules ou en combinaison :  According to one or more characteristics of the leak detector, taken alone or in combination:
- le refoulement de la au moins une deuxième pompe à vide primaire est raccordé entre l'avant-dernier étage de pompage et le dernier étage de pompage de la première pompe à vide primaire,  the discharge of the at least one second primary vacuum pump is connected between the penultimate pump stage and the last pump stage of the first primary vacuum pump,
- les au moins deux pompes à vide primaire sont à membrane,  the at least two primary vacuum pumps are membrane-type,
- les membranes des étages de pompage de la première pompe à vide primaire sont configurées pour être entraînées en mouvement au moyen du premier moteur d'entraînement et les membranes des étages de pompage de la deuxième pompe à vide primaire sont configurées pour être mises en mouvement au moyen du second moteur d'entraînement,the membranes of the pumping stages of the first primary vacuum pump are configured to be driven in motion by means of of the first drive motor and the diaphragms of the pump stages of the second primary vacuum pump are configured to be driven by the second drive motor,
- les au moins deux pompes à vide primaire sont à vis ou à spirale, the at least two primary vacuum pumps are screw or spiral,
- les au moins deux pompes à vide primaire comportent deux rotors, par exemple de type ROOTS,  the at least two primary vacuum pumps comprise two rotors, for example of the ROOTS type,
- les au moins deux pompes à vide primaire comportent deux rotors configurés pour être entraînés pour tourner de façon synchronisée en sens inverse dans chaque étage de pompage,  the at least two primary vacuum pumps comprise two rotors configured to be driven to rotate synchronously in opposite directions in each pumping stage,
- les rotors de la première pompe à vide primaire sont configurés pour être entraînés par le premier moteur d'entraînement, les rotors de la deuxième pompe à vide primaire sont configurés pour être entraînés par le deuxième moteur d'entraînement,  the rotors of the first primary vacuum pump are configured to be driven by the first drive motor, the rotors of the second primary vacuum pump are configured to be driven by the second drive motor,
- les au moins deux pompes à vide primaire présentent des configurations d'étages de pompage identiques,  the at least two primary vacuum pumps have identical pump stage configurations,
- au moins une pompe à vide primaire comporte au moins deux premiers étages de pompage montés en parallèle,  at least one primary vacuum pump comprises at least two first pumping stages connected in parallel,
- au moins une pompe à vide primaire comporte au moins trois étages de pompage montés en série,  at least one primary vacuum pump comprises at least three pump stages connected in series,
- le détecteur de fuites comporte un dispositif de purge configuré pour fournir un gaz de purge entre deux étages de pompage de la deuxième pompe à vide primaire.  the leak detector comprises a purge device configured to supply a purge gas between two pumping stages of the second primary vacuum pump.
D'autres avantages et caractéristiques apparaîtront à la lecture de la description suivante d'un mode de réalisation particulier de l'invention, mais nullement limitatif, ainsi que des dessins annexés sur lesquels : Other advantages and features will appear on reading the following description of a particular embodiment of the invention, but in no way limiting, as well as the appended drawings in which:
Figure 1 représente une vue schématique d'un détecteur de fuites selon un premier exemple de réalisation.  Figure 1 shows a schematic view of a leak detector according to a first embodiment.
Figure 2 représente un graphique montrant la descente en pression dans un objet à tester (en mbar) raccordé au détecteur de fuites, obtenue en fonction du temps (en secondes) pour d'une part, deux pompes à vide primaire à membrane selon l'invention (courbe A) et d'autre part, deux pompes à vide primaire à membrane ayant des entrées communes et des sorties communes (courbe B), pour un pompage à des vitesses de rotation maximales et pour un pompage à des vitesses de rotation réduites. FIG. 2 represents a graph showing the pressure drop in an object to be tested (in mbar) connected to the leak detector, obtained as a function of time (in seconds) for, on the one hand, two membrane primary vacuum pumps according to FIG. (Curve A) and secondly, two diaphragm vacuum pumps having common inputs and outputs (curve B), for pumping at maximum rotational speeds and for pumping at reduced rotational speeds.
Figure 3 représente une vue schématique d'un détecteur de fuites selon un autre exemple de réalisation.  Figure 3 shows a schematic view of a leak detector according to another embodiment.
Sur ces figures, les éléments identiques portent les mêmes numéros de référence.  In these figures, the identical elements bear the same reference numbers.
Les réalisations suivantes sont des exemples. Bien que la description se réfère à un ou plusieurs modes de réalisation, ceci ne signifie pas nécessairement que chaque référence concerne le même mode de réalisation, ou que les caractéristiques s'appliquent seulement à un seul mode de réalisation. De simples caractéristiques de différents modes de réalisation peuvent également être combinées ou interchangées pour fournir d'autres réalisations.  The following achievements are examples. Although the description refers to one or more embodiments, this does not necessarily mean that each reference relates to the same embodiment, or that the features apply only to a single embodiment. Simple features of different embodiments may also be combined or interchanged to provide other embodiments.
On définit par pompe à vide primaire, une pompe à vide volumétrique, qui aspire, transfère puis refoule un gaz à pomper. En utilisation classique, une pompe à vide primaire est configurée pour pouvoir refouler un gaz à pomper à pression ambiante.  The term "primary vacuum pump" is defined as a volumetric vacuum pump, which sucks, transfers and then delivers a gas to be pumped. In conventional use, a primary vacuum pump is configured to discharge a gas to be pumped at ambient pressure.
On entend par « en amont », un élément qui est placé avant un autre par rapport au sens de circulation du gaz. A contrario, on entend par « en aval », un élément placé après un autre par rapport au sens de circulation du gaz à pomper, l'élément situé en amont étant à une pression plus basse que l'élément situé en aval.  The term "upstream", an element which is placed before another in relation to the direction of flow of the gas. Conversely, "downstream" means an element placed after another with respect to the direction of flow of the gas to be pumped, the element situated upstream being at a lower pressure than the element situated downstream.
On définit par « vide limite », la pression minimale obtenue par une pompe à vide lorsqu'aucun flux de gaz n'est introduit, excepté ceux d'éventuels flux de gaz parasites et négligeables.  The "minimum vacuum" defines the minimum pressure obtained by a vacuum pump when no gas flow is introduced, except for any parasitic and negligible gas flows.
La Figure 1 montre un détecteur de fuites 1 pour le contrôle de l'étanchéité d'un objet à tester tel que par aspersion de gaz traceur. Figure 1 shows a leak detector 1 for checking the tightness of an object to be tested such as by spraying tracer gas.
Le détecteur de fuites 1 comporte une entrée de détection 2 destinée à être raccordée à un objet à tester, un dispositif de pompage 3 et un détecteur de gaz 4.  The leak detector 1 comprises a detection input 2 intended to be connected to an object to be tested, a pumping device 3 and a gas detector 4.
Le dispositif de pompage 3 comporte une première pompe à vide primaire 5, au moins une deuxième pompe à vide primaire 6, une pompe à vide turbomoléculaire 7, une première et deuxième vannes d'isolation 8, 9 et au moins une vanne de prélèvement 10a, 10b. Le détecteur de gaz 4 est raccordé à la pompe à vide turbomoléculaire 7, par exemple à son aspiration 1 1. Le détecteur de gaz 4 comporte par exemple un spectromètre de masse. The pumping device 3 comprises a first primary vacuum pump 5, at least one second primary vacuum pump 6, a turbomolecular vacuum pump 7, a first and second isolation valve 8, 9 and at least one sampling valve 10a. , 10b. The gas detector 4 is connected to the turbomolecular vacuum pump 7, for example to its suction 1 1. The gas detector 4 comprises for example a mass spectrometer.
Le refoulement 17 de la pompe à vide turbomoléculaire 7 est raccordé aux entrées 12, 14 des pompes à vide primaire 5, 6 via la deuxième vanne d'isolation 9.  The discharge 17 of the turbomolecular vacuum pump 7 is connected to the inlets 12, 14 of the primary vacuum pumps 5, 6 via the second isolation valve 9.
L'entrée de détection 2 du détecteur de fuites 1 est par exemple raccordée à un étage intermédiaire de la pompe à vide turbomoléculaire 7, via au moins une vanne de prélèvement 10a, 10b. Le dispositif de pompage 3 comporte par exemple au moins deux vannes de prélèvement 10a, 10b, chaque vanne 10a, 10b étant raccordée à un étage intermédiaire distinct de la pompe à vide turbomoléculaire 7 de manière à pouvoir adapter le flux de prélèvement au niveau du taux de fuites, la vanne de prélèvement 10a, 10b étant raccordée sur une dérivation d'une canalisation de la ligne de vide 16 agencée entre l'entrée de détection 2 et la première vanne d'isolation 8.  The detection input 2 of the leak detector 1 is for example connected to an intermediate stage of the turbomolecular vacuum pump 7, via at least one sampling valve 10a, 10b. The pumping device 3 comprises, for example, at least two sampling valves 10a, 10b, each valve 10a, 10b being connected to an intermediate stage distinct from the turbomolecular vacuum pump 7 so as to be able to adapt the sampling flow to the rate level. leakage, the sampling valve 10a, 10b being connected to a branch of a line of the vacuum line 16 arranged between the detection input 2 and the first isolation valve 8.
La deuxième vanne d'isolation 9 est raccordée à la ligne de vide 16 entre la première vanne d'isolation 8 et les entrées 12, 14 des pompes à vide primaire 5, 6.  The second isolation valve 9 is connected to the vacuum line 16 between the first isolation valve 8 and the inlets 12, 14 of the primary vacuum pumps 5, 6.
La fermeture des vannes de prélèvement 10a, 10b et éventuellement, de la deuxième vanne d'isolation 9, permet le vidage de l'objet à tester raccordé à l'entrée de détection 2 par les pompes à vide primaire 5, 6, lors de l'ouverture de la première vanne d'isolation 8.  The closure of the sampling valves 10a, 10b and, optionally, of the second isolation valve 9, allows emptying of the test object connected to the detection input 2 by the primary vacuum pumps 5, 6, when the opening of the first isolation valve 8.
La première pompe à vide primaire 5 comporte au moins un premier étage de pompage T1 , T2 et un deuxième étage de pompage T3, montés en série les uns à la suite des autres entre une entrée 12 et un refoulement 13 de la première pompe à vide primaire 5 et dans lesquels un gaz à pomper peut circuler. La première pompe à vide primaire 5 comporte un premier moteur d'entraînement 21. Les étages de pompage T1 , T2, T3, T4 de la première pompe à vide primaire 5 sont agencés dans un premier carter 22 de la première pompe à vide primaire 5.  The first primary vacuum pump 5 comprises at least a first pump stage T1, T2 and a second pump stage T3, connected in series one after the other between an inlet 12 and a discharge 13 of the first vacuum pump. primary 5 and in which a gas to be pumped can circulate. The first primary vacuum pump 5 comprises a first drive motor 21. The pump stages T1, T2, T3, T4 of the first primary vacuum pump 5 are arranged in a first housing 22 of the first primary vacuum pump 5 .
La deuxième pompe à vide primaire 6 comporte au moins un premier étage de pompage TT, 12' et un deuxième étage de pompage T3', montés en série les uns à la suite des autres entre une entrée 14 et un refoulement 15 de la deuxième pompe à vide primaire 6 et dans lesquels un gaz à pomper peut circuler. La deuxième pompe à vide primaire 6 comporte un second moteur d'entraînement 23. Les étages de pompage TT, Τ2', Τ3', T4' de la seconde pompe à vide primaire 6 sont agencés dans un second carter 24 de la deuxième pompe à vide primaire 6. Les premier et second moteurs d'entraînement 21 , 23 sont indépendants l'un de l'autre. The second primary vacuum pump 6 comprises at least a first pump stage TT, 12 'and a second pump stage T3', connected in series one after the other between an inlet 14 and a discharge 15 of the second pump primary vacuum 6 and in which a gas to be pumped can circulate. The second primary vacuum pump 6 comprises a second drive motor 23. The pump stages TT, Τ2 ', Τ3', T4 'of the second primary vacuum pump 6 are arranged in a second casing 24 of the second pump. primary vacuum 6. The first and second drive motors 21, 23 are independent of one another.
Chaque étage de pompage T1 -T4, TT-T4' comprend une entrée et une sortie respectives.  Each pump stage T1 -T4, TT-T4 'comprises a respective input and output.
Les étages de pompage d'une même pompe à vide primaire peuvent être raccordés en parallèle, les entrées étant raccordées entre elles et les sorties étant raccordées entre elles.  The pumping stages of the same primary vacuum pump can be connected in parallel, the inputs being connected together and the outputs being connected together.
Les étages de pompage d'une même pompe à vide primaire peuvent être raccordées en série les uns à la suite des autres par des canaux inter-étages respectifs raccordant la sortie (ou le refoulement) de l'étage de pompage qui précède ou la sortie commune de plusieurs étages de pompage qui précédent, à l'entrée (ou l'aspiration) de l'étage qui suit ou à l'entrée commune de plusieurs étages de pompage qui suivent.  The pumping stages of the same primary vacuum pump can be connected in series one after the other by respective inter-stage channels connecting the output (or discharge) of the preceding pumping stage or the output common several stages of pumping preceding the entry (or aspiration) of the next floor or the common entrance of several pumping stages that follow.
Les étages de pompage T1 -T4, TT-T4' d'une même pompe à vide primaire présentent un volume engendré, c'est-à-dire un volume de gaz pompé, décroissant (ou égal) avec les étages de pompage montés en série, le(s) premier(s) étage(s) de pompage T1 , T2, T1 ', 12' présentant le débit engendré le plus élevé et le dernier étage de pompage T4, T4' présentant le débit engendré le plus faible.  The pump stages T1 -T4, TT-T4 'of the same primary vacuum pump have a generated volume, that is to say a volume of gas pumped, decreasing (or equal) with the pump stages mounted in series, the first pump stage (s) T1, T2, T1 ', 12' having the highest generated flow rate and the last pump stage T4, T4 'having the lowest generated flow rate.
Dans cet exemple de réalisation, la première pompe à vide primaire 5 comporte deux premiers étages de pompage T1 , T2 montés en parallèle. Ces premiers étages de pompage T1 , T2 sont montés en série et en amont d'un deuxième étage de pompage T3, monté en série et en amont d'un troisième étage de pompage T4.  In this embodiment, the first primary vacuum pump 5 comprises two first pump stages T1, T2 connected in parallel. These first pump stages T1, T2 are connected in series and upstream of a second pump stage T3, mounted in series and upstream of a third pump stage T4.
La deuxième pompe à vide primaire 6 comporte deux premiers étages de pompage TT, T2' montés en parallèle. Ces deux premiers étages de pompage TT, T2' sont montés en série et en amont d'un deuxième étage de pompage T3', monté en série et en amont d'un troisième étage de pompage T4'.  The second primary vacuum pump 6 comprises two first pump stages TT, T2 'connected in parallel. These two first pumping stages TT, T2 'are connected in series and upstream of a second pumping stage T3', connected in series and upstream of a third pumping stage T4 '.
Les entrées 12, 14 des pompes à vide primaire 5, 6 sont raccordées en parallèle à l'entrée de détection 2 par des canalisations d'une ligne de vide 16 du dispositif de pompage 3, via la première vanne d'isolation 8.  The inlets 12, 14 of the primary vacuum pumps 5, 6 are connected in parallel with the detection input 2 via lines of a vacuum line 16 of the pump device 3, via the first isolation valve 8.
Dans ce premier exemple de réalisation, les pompes à vide primaire 5, 6 sont à membrane. Chaque étage de pompage comporte une membrane entraînée par un excentrique de sorte que le mouvement de la membrane accompagné de clapets d'entrée et de sortie permette le pompage d'un gaz. Dans la première pompe à vide primaire 5, les excentriques mettant en mouvement les membranes des étages de pompage T1 -T4 sont entraînés en rotation par le premier moteur d'entraînement 21. In this first embodiment, the primary vacuum pumps 5, 6 are membrane. Each pumping stage comprises a membrane driven by an eccentric such that the movement of the membrane accompanied by inlet and outlet valves allows the pumping of a gas. In the first primary vacuum pump 5, the eccentrics moving the membranes of the pump stages T1 -T4 are rotated by the first drive motor 21.
Dans la deuxième pompe à vide primaire 6, les excentriques mettant en mouvement les membranes des étages de pompage T -T4' sont entraînés en rotation par le deuxième moteur d'entraînement 23.  In the second primary vacuum pump 6, the eccentrics moving the membranes of the pumping stages T -T4 'are rotated by the second drive motor 23.
Les deux pompes à vide primaire 5, 6 sont deux pompes à vide à membranes présentant des configurations d'étages de pompage identiques : les débits de pompage sont équivalents, chaque pompe à vide primaire présentant trois étages de pompage en série, le premier étage de pompage présentant deux étages de pompage en parallèle.  The two primary vacuum pumps 5, 6 are two diaphragm vacuum pumps with identical pumping stage configurations: the pumping rates are equivalent, each primary vacuum pump having three pumping stages in series, the first stage of pumping having two pumping stages in parallel.
Le refoulement 15 de la deuxième pompe à vide primaire 6 est raccordé à la première pompe à vide primaire 5, entre deux étages de pompage T3, T4 en série de la première pompe à vide primaire 5, tel qu'entre l'avant-dernier étage de pompage T3 et le dernier étage de pompage T4. Le refoulement 15 est ainsi par exemple raccordé au dernier canal inter-étage de la première pompe à vide primaire 5.  The discharge 15 of the second primary vacuum pump 6 is connected to the first primary vacuum pump 5, between two pumping stages T3, T4 in series with the first primary vacuum pump 5, such as between the penultimate pumping stage T3 and the last pumping stage T4. The discharge 15 is thus for example connected to the last inter-stage channel of the first primary vacuum pump 5.
L'idée à la base de l'invention est d'utiliser de façon innovante des pompes à vide primaire classiquement utilisées pour refouler des gaz à pomper à pression ambiante, en raccordant le refoulement d'une des pompes à vide primaire entre des étages de pompage de l'autre. Le raccordement de la deuxième pompe à vide primaire 6 entre les étages de pompage T3, T4 de la première pompe à vide primaire 5 permet de bénéficier à la fois d'un débit de pompage doublé et d'un abaissement de la pression de vide limite. En effet, en vide limite, le pompage est effectif à travers les trois étages de pompage T -T4' de la deuxième pompe à vide primaire 6 auxquels s'ajoute le dernier étage de pompage T4 de la première pompe à vide primaire 5. Cet agencement est contre-intuitif. On aurait plutôt pensé que la pression de vide limite obtenue serait identique à celle obtenue avec une seule pompe à vide primaire.  The idea underlying the invention is to innovatively use primary vacuum pumps conventionally used for discharging gases to be pumped at ambient pressure, by connecting the discharge of one of the primary vacuum pumps between stages of pumping the other. The connection of the second primary vacuum pump 6 between the pumping stages T3, T4 of the first primary vacuum pump 5 makes it possible to benefit from both a doubled pumping rate and a lowering of the limit vacuum pressure. . In fact, in a limit vacuum, the pumping is effective through the three pumping stages T -T4 'of the second primary vacuum pump 6, to which is added the last pumping stage T4 of the first primary vacuum pump 5. This layout is counterintuitive. Instead, it would have been thought that the resulting vacuum vacuum pressure would be identical to that obtained with a single primary vacuum pump.
Le détecteur de fuites 1 peut comporter un dispositif de purge 18 configuré pour fournir un gaz de purge entre deux étages de pompage Τ3', T4' de la deuxième pompe à vide primaire 6, tel qu'entre l'avant-dernier étage de pompage T3' et le dernier étage de pompage T4'. Ainsi, un seul dispositif de purge 18 permet de purger à la fois le dernier étage de pompage T4' de la deuxième pompe à vide primaire 6 et le dernier étage de pompage T4 de la première pompe à vide primaire 5. Un capteur de pression peut être agencé dans la ligne de vide 16 pour mesurer la pression dans les canalisations mettant en communication la au moins une vanne de prélèvement 10a, 10b, les vannes d'isolation 8, 9 et l'entrée de détection 2. The leak detector 1 may comprise a purge device 18 configured to supply a purge gas between two pumping stages Τ3 ', T4' of the second primary vacuum pump 6, such as between the penultimate stage of pumping. T3 'and the last pump stage T4'. Thus, a single purge device 18 serves to purge both the last pump stage T4 'of the second primary vacuum pump 6 and the last pump stage T4 of the first primary vacuum pump 5. A pressure sensor may be arranged in the vacuum line 16 to measure the pressure in the pipes connecting the at least one sampling valve 10a, 10b, the isolation valves 8, 9 and the detection inlet 2.
Les vannes d'isolation 8, 9 et de prélèvement 10a, 10b sont par exemple des électrovannes pilotables par une unité de contrôle du détecteur de fuites 1 . L'unité de contrôle du détecteur de fuites 1 comporte un ou plusieurs contrôleurs ou microcontrôleurs ou ordinateurs, comportant des mémoires et programmes adaptés pour piloter les électrovannes 8, 9, 10a, 10b, notamment en fonction de la pression mesurée dans la ligne de vide 16, et pour gérer une interface utilisateur du détecteur de fuites 1 , telle qu'une télécommande et/ou un panneau de contrôle.  The isolation valves 8, 9 and sampling valves 10a, 10b are for example solenoid valves controllable by a control unit of the leak detector 1. The control unit of the leak detector 1 comprises one or more controllers or microcontrollers or computers, comprising memories and programs adapted to control the solenoid valves 8, 9, 10a, 10b, in particular as a function of the pressure measured in the vacuum line. 16, and to manage a user interface of the leak detector 1, such as a remote control and / or a control panel.
Nous allons maintenant décrire un exemple d'utilisation du détecteur de fuites 1 . We will now describe an example of use of the leak detector 1.
On considère initialement que l'objet à tester est raccordé à l'entrée de détection 2 et que les vannes d'isolation 8, 9 et de prélèvement 10a, 10b sont fermées. It is initially considered that the object to be tested is connected to the detection input 2 and that the isolation valves 8, 9 and 10a, 10b are closed.
L'utilisateur lance un cycle de mesure.  The user starts a measurement cycle.
La première vanne d'isolation 8 interposée entre l'entrée de détection 2 et les entrées 12, 14 des pompes à vide primaire 5, 6 s'ouvre.  The first isolation valve 8 interposed between the detection input 2 and the inputs 12, 14 of the primary vacuum pumps 5, 6 opens.
Le détecteur de fuites 1 bénéficie alors du débit de pompage des deux pompes à vide primaire 5, 6, équivalent à quatre étages de pompage T1 , T2, T1 ', T2' aspirant en parallèle dans l'objet à tester.  The leak detector 1 then benefits from the pumping rate of the two primary vacuum pumps 5, 6 equivalent to four pumping stages T1, T2, T1 ', T2' sucking in parallel in the object to be tested.
La pression décroit rapidement dans la ligne de vide 16.  The pressure decreases rapidly in the vacuum line 16.
Lorsque la pression mesurée dans la ligne de vide 16 devient inférieure ou égale à un seuil de basse pression, par exemple inférieur ou égal à 500Pa (ou 5mbar), la première vanne d'isolation 8 est commandée en fermeture. La deuxième vanne d'isolation 9 ainsi que de l'une des électrovannes de prélèvement 10a, 10b sont commandées en ouverture afin de mettre la pompe à vide turbomoléculaire 7 et le détecteur de gaz 4 en communication avec l'entrée du détecteur 2.  When the pressure measured in the vacuum line 16 becomes less than or equal to a low pressure threshold, for example less than or equal to 500 Pa (or 5mbar), the first isolation valve 8 is closed. The second isolation valve 9 as well as one of the sampling solenoid valves 10a, 10b are controlled in opening in order to put the turbomolecular vacuum pump 7 and the gas detector 4 in communication with the input of the detector 2.
Le détecteur de fuites 1 bénéficie alors du débit de pompage des deux pompes à vide primaire 5, 6 équivalent à cinq étages de pompage TT, Τ2', Τ3', Τ4', T4 en série.  The leak detector 1 then benefits from the pumping rate of the two primary vacuum pumps 5, 6 equivalent to five pumping stages TT, Τ2 ', Τ3', Τ4 ', T4 in series.
L'utilisateur peut faire une recherche de fuites en aspergeant du gaz traceur autour de l'objet à tester. Le détecteur de gaz 4 mesure une augmentation en gaz traceur en présence d'une fuite de l'objet à tester.  The user can search for leaks by spraying tracer gas around the object to be tested. The gas detector 4 measures an increase in tracer gas in the presence of a leakage of the object to be tested.
Le détecteur de fuites 1 peut également être utilisé pour réaliser un contrôle d'étanchéité d'un objet à tester par le test dit « de reniflage ». Pour cela, l'objet à tester est préalablement rempli en gaz traceur, par exemple pressurisé. Une sonde de reniflage est raccordée à l'entrée de détection 2 du détecteur de fuites 1 pour aspirer les gaz environnants l'objet à tester. Une partie des gaz ainsi prélevés, contenant éventuellement le gaz traceur révélateur d'une fuite, est alors analysée par le détecteur de gaz 4. The leak detector 1 can also be used to perform a tightness test of an object to be tested by the so-called "sniffing" test. For this, the object to be tested is previously filled tracer gas, for example pressurized. A sniffer probe is connected to the detection input 2 of the leak detector 1 to suck the surrounding gas from the object under test. A part of the gases thus collected, possibly containing the tracer gas revealing a leak, is then analyzed by the gas detector 4.
Lorsque le détecteur de fuites 1 n'est plus utilisé, par exemple au-delà d'une durée prédéfinie, on peut prévoir un mode de veille (ou « stand-by » en anglais) dans lequel on réduit la vitesse de rotation des pompes à vide primaire 5, 6. La diminution de la vitesse de rotation des pompes à vide primaire 5, 6 permet de réduire la consommation électrique du détecteur de fuites 1 en période d'inutilisation. Ce mode peut être déclenché manuellement ou peut être détecté et contrôlé par l'unité de contrôle.  When the leak detector 1 is no longer used, for example beyond a predefined period, it can provide a standby mode (or "stand-by" in English) in which the speed of rotation of the pumps is reduced with a primary vacuum 5, 6. The reduction in the rotational speed of the primary vacuum pumps 5, 6 makes it possible to reduce the electrical consumption of the leak detector 1 during the period of non-use. This mode can be triggered manually or can be detected and controlled by the control unit.
Les avantages apportés par l'invention peuvent être mieux compris en visualisant le graphique de la Figure 2 qui illustre les performances de pompage obtenues d'une part, pour deux pompes à vide primaire 5, 6 à membrane telles que celles décrites précédemment avec le refoulement 15 de la deuxième pompe à vide primaire 6 raccordé entre l'avant dernier étage de pompage T3 et le dernier étage de pompage T4 de la première pompe à vide primaire 5 (courbe A) et d'autre part, pour deux pompes à vide primaire à membrane en utilisation classique ayant des entrées communes et des refoulements communs (courbe B).  The advantages provided by the invention can be better understood by visualizing the graph of FIG. 2 which illustrates the pumping performance obtained on the one hand for two diaphragm primary vacuum pumps 5, 6 such as those described previously with the repression. 15 of the second primary vacuum pump 6 connected between the penultimate pump stage T3 and the last pump stage T4 of the first primary vacuum pump 5 (curve A) and, on the other hand, for two primary vacuum pumps membrane in conventional use having common inputs and common backs (curve B).
Les courbes A, B montrent une descente en pression dans un objet à tester en fonction du temps pour d'une part, un pompage obtenu à des vitesses de rotation maximale V1 des pompes à vide primaires et d'autre part, pour un pompage obtenu à des vitesses de rotation réduites V2 (de l'ordre de 8 à 9% de la vitesse de rotation maximale).  Curves A, B show a pressure drop in an object to be tested as a function of time on the one hand, a pump obtained at maximum speeds of rotation V1 of the primary vacuum pumps and, on the other hand, for a pump obtained at reduced rotation speeds V2 (of the order of 8 to 9% of the maximum rotational speed).
On constate dans cet exemple que, pour les pressions élevées, au-dessus de 3mbar, le débit de pompage est le même pour les pompes à vide primaire 5, 6 selon l'invention que pour deux pompes à vide primaire montées en parallèle avec un refoulement commun. Le détecteur de fuites 1 selon l'invention bénéficie donc du débit de pompage des premiers étages de pompage T1 , T2, TV, T2' des deux pompes à vide primaire 5, 6. Le raccordement du refoulement 15 de la deuxième pompe à vide primaire 6 entre l'avant-dernier étage de pompage T3 et le dernier étage de pompage T4 de la première pompe à vide primaire 5 n'abaisse pas les performances de pompage des deux pompes à vide primaires 5, 6 pour les pressions hautes. It can be seen in this example that, for high pressures, above 3mbar, the pumping rate is the same for the primary vacuum pumps 5, 6 according to the invention as for two primary vacuum pumps connected in parallel with one another. common repression. The leak detector 1 according to the invention thus benefits from the pumping rate of the first pumping stages T1, T2, TV, T2 'of the two primary vacuum pumps 5, 6. The connection of the discharge 15 of the second primary vacuum pump 6 between the second-last pumping stage T3 and the last pumping stage T4 of the first primary vacuum pump 5 does not lower the pumping performance of the two primary vacuum pumps 5, 6 for high pressures.
En vide limite, on constate que la pression obtenue avec les pompes à vide primaire 5, 6 à vitesse maximale V1 selon l'invention atteint OJmbar alors que la pression se stabilise autour de 2,2mbar avec des pompes à vide primaire ayant un refoulement commun. La pression de vide limite est donc abaissée d'un facteur trois environ.  In vacuum limit, it is found that the pressure obtained with the primary vacuum pumps 5, 6 at maximum speed V1 according to the invention reaches OJmbar while the pressure stabilizes around 2.2mbar with primary vacuum pumps having a common discharge . The limit vacuum pressure is thus lowered by a factor of about three.
En vitesse de rotation réduite V2, la pression de vide limite obtenue avec les pompes à vide primaire 5, 6 selon l'invention atteint 0,5mbar alors que la pression se stabilise autour d'une pression de vide limite de l'ordre de 1 mbar avec des pompes à vide primaire ayant un refoulement commun. La pression de vide limite peut donc être abaissée d'un facteur deux.  In reduced rotational speed V2, the limit vacuum pressure obtained with the primary vacuum pumps 5, 6 according to the invention reaches 0.5mbar while the pressure stabilizes around a limit vacuum pressure of about 1 mbar with primary vacuum pumps with common discharge. The limit vacuum pressure can thus be lowered by a factor of two.
La pression de vide limite dans l'objet à tester peut donc être abaissée. Cela permet de réduire le bruit de fond en gaz traceur et donc permet une amélioration significative de la sensibilité de mesure.  The limit vacuum pressure in the object to be tested can therefore be lowered. This makes it possible to reduce the background noise in tracer gas and thus allows a significant improvement in the measurement sensitivity.
L'abaissement de la pression de vide limite permet en outre d'obtenir une marge par rapport aux pertes de performances pouvant être induites par le vieillissement des pompes à vide primaires 5, 6. On obtient donc une meilleure robustesse par rapport au vieillissement des pompes.  The lowering of the limit vacuum pressure also makes it possible to obtain a margin with respect to the performance losses that can be induced by the aging of the primary vacuum pumps 5, 6. This gives a better robustness compared to the aging of the pumps. .
La Figure 3 illustre un autre mode de réalisation dans lequel la première et la deuxième pompe à vide primaire 19, 20 comportent deux rotors entraînés pour tourner de façon synchronisée en sens inverse dans chaque étage de pompage T1 -T2, TT- T2'. Les pompes à vide primaire 19, 20 comportent par exemple cinq étages de pompage montés en série. Dans la première pompe à vide primaire 19, les arbres portant les rotors s'étendent dans les étages de pompage T1 -T5 montés en série les uns à la suite des autres. Ils sont entraînés par un premier moteur d'entraînement 25 de la première pompe à vide primaire 19. En outre, les étages de pompage T1 -T5 sont agencés dans un premier carter 26 de la première pompe à vide primaire 19.  FIG. 3 illustrates another embodiment in which the first and second primary vacuum pumps 19, 20 comprise two rotors driven to rotate synchronously in opposite directions in each pump stage T1-T2, TT-T2 '. The primary vacuum pumps 19, 20 comprise for example five pump stages connected in series. In the first primary vacuum pump 19, the shafts carrying the rotors extend into the pump stages T1-T5 connected in series one after the other. They are driven by a first drive motor 25 of the first primary vacuum pump 19. In addition, the pump stages T1-T5 are arranged in a first housing 26 of the first primary vacuum pump 19.
Dans la deuxième pompe à vide primaire 20, les arbres portant les rotors s'étendent dans les étages de pompage T -T5' montés en série les uns à la suite des autres. Ils sont entraînés par un second moteur d'entraînement 27 de la deuxième pompe à vide primaire 20. En outre, les étages de pompage TT-T5' sont agencés dans un deuxième carter 28 de la deuxième pompe à vide primaire 20. Les rotors présentent par exemple des lobes de profils identiques, tels que de type « Roots » (section en forme de « huit » ou de « haricot »). Les rotors sont angulairement décalés et entraînés pour tourner de façon synchronisée en sens inverse dans chaque étage. Lors de la rotation, le gaz aspiré depuis l'aspiration est emprisonné dans le volume engendré par les rotors et le stator, puis est entraîné par les rotors vers l'étage suivant. Ces pompes à vide primaires sont dites « sèches » car en fonctionnement, les rotors tournent à l'intérieur du stator sans aucun contact mécanique avec le stator, ce qui permet l'absence totale d'huile dans les étages de pompage. In the second primary vacuum pump 20, the shafts carrying the rotors extend into the pumping stages T-T5 'connected in series one after the other. They are driven by a second drive motor 27 of the second primary vacuum pump 20. In addition, the pump stages TT-T5 'are arranged in a second casing 28 of the second primary vacuum pump 20. The rotors have, for example, lobes of identical profiles, such as "Roots" type ("eight" or "bean" shaped section). The rotors are angularly offset and driven to rotate synchronously in opposite directions in each stage. During the rotation, the gas sucked from the suction is trapped in the volume generated by the rotors and the stator, then is driven by the rotors to the next stage. These primary vacuum pumps are called "dry" because in operation, the rotors turn inside the stator without any mechanical contact with the stator, which allows the total absence of oil in the pump stages.
Comme dans le mode de réalisation précédent, le refoulement 15 de la deuxième pompe à vide primaire 20 est raccordé à la première pompe à vide primaire 19, entre deux étages de pompage T4, T5 en série de la première pompe à vide primaire 19, tel qu'entre l'avant-dernier étage de pompage T4 et le dernier étage de pompage T5.  As in the previous embodiment, the discharge 15 of the second primary vacuum pump 20 is connected to the first primary vacuum pump 19, between two pumping stages T4, T5 in series with the first primary vacuum pump 19, such as between the penultimate pump stage T4 and the last pump stage T5.
Le raccordement de la deuxième pompe à vide primaire 20 entre les étages de pompage T4, T5 de la première pompe à vide primaire 19 permet de bénéficier à la fois d'un débit de pompage doublé et d'un abaissement de la pression de vide limite. En vide limite, le pompage est effectif à travers les cinq étages de pompage TT-T5' de la deuxième pompe à vide primaire 20 auxquels s'ajoute le dernier étage de pompage T5 de la première pompe à vide primaire 19.  The connection of the second primary vacuum pump 20 between the pumping stages T4, T5 of the first primary vacuum pump 19 makes it possible to benefit from both a double pumping rate and a lowering of the limit vacuum pressure. . In limit vacuum, the pumping is effective through the five pump stages TT-T5 'of the second primary vacuum pump 20, to which is added the last pump stage T5 of the first primary vacuum pump 19.
L'invention s'applique également à d'autres types de pompes à vide primaire multi-étagées comportant deux rotors, telles que de type « Claw » ou d'un principe similaire de pompe à vide volumétrique, tel qu'une pompe à vide à spirale (appelée « Scroll » en anglais) ou à vis.  The invention is also applicable to other types of multi-stage primary vacuum pumps comprising two rotors, such as "Claw" type or a similar principle of volumetric vacuum pump, such as a vacuum pump. spiral (called "Scroll" in English) or screw.

Claims

REVENDICATIONS
1 . Détecteur de fuites (1 ) pour le contrôle de l'étanchéité d'un objet à tester, le détecteur de fuites (1 ) comprenant :  1. Leak detector (1) for checking the tightness of an object to be tested, the leak detector (1) comprising:
- une entrée de détection (2) destinée à être raccordée à un objet à tester, a detection input (2) intended to be connected to an object to be tested,
- un dispositif de pompage (3) comportant : a pumping device (3) comprising:
- une première pompe à vide primaire (5 ; 19) comportant un premier moteur d'entraînement (21 , 25), au moins un premier étage de pompage (T1 , T2) et un deuxième étage de pompage (T3) montés en série entre une entrée (12) et un refoulement (13), a first primary vacuum pump (5; 19) comprising a first drive motor (21,25), at least a first pump stage (T1, T2) and a second pump stage (T3) connected in series between an inlet (12) and a discharge (13),
- au moins une deuxième pompe à vide primaire (6 ; 20) comportant un deuxième moteur d'entraînement (23, 27), au moins un premier étage de pompage (TT, T2') et un deuxième étage de pompage (Τ3') montés en série entre une entrée (14) et un refoulement (15), les entrées (12, 14) des pompes à vide primaire (5, 6 ; 19, 20) étant raccordées en parallèle à l'entrée de détection (2) via une première vanne d'isolation (8), - at least one second primary vacuum pump (6; 20) having a second drive motor (23,27), at least a first pump stage (TT, T2 ') and a second pump stage (Τ3') in series between an inlet (14) and a discharge (15), the inlets (12, 14) of the primary vacuum pumps (5, 6; 19, 20) being connected in parallel with the detection inlet (2) via a first isolation valve (8),
- une pompe à vide turbomoléculaire (7) ayant un refoulement (17) raccordé entre la première vanne d'isolation (8) et les entrées (12, 14) des pompes à vide primaire (5, 6 ; 19, 20) par une deuxième vanne d'isolation (9),  a turbomolecular vacuum pump (7) having a discharge (17) connected between the first isolation valve (8) and the inlets (12, 14) of the primary vacuum pumps (5, 6; 19, 20) by a second isolation valve (9),
- un détecteur de gaz (4) raccordé à la pompe à vide turbomoléculaire (7), caractérisé en ce que le refoulement (15) de la au moins une deuxième pompe à vide primaire (6 ; 20) est raccordé à la première pompe à vide primaire (5 ; 19), entre deux étages de pompage (T3, T4 ; T4, T5) en série de la première pompe à vide primaire (5 ; 19).  - a gas detector (4) connected to the turbomolecular vacuum pump (7), characterized in that the discharge (15) of the at least one second primary vacuum pump (6; 20) is connected to the first pump. primary vacuum (5; 19) between two pump stages (T3, T4, T4, T5) in series with the first primary vacuum pump (5; 19).
2. Détecteur de fuites (1 ) selon la revendication précédente, caractérisé en ce que le refoulement (15) de la au moins une deuxième pompe à vide primaire (6) est raccordé entre l'avant-dernier étage de pompage (T3 ; T4) et le dernier étage de pompage (T4 ; T5) de la première pompe à vide primaire (5 ; 19).  2. Leak detector (1) according to the preceding claim, characterized in that the discharge (15) of the at least one second primary vacuum pump (6) is connected between the penultimate pump stage (T3; T4 and the last pump stage (T4; T5) of the first primary vacuum pump (5; 19).
3. Détecteur de fuites (1 ) selon l'une des revendications précédentes, caractérisé en ce que les au moins deux pompes à vide primaire (5, 6) sont à membrane, les membranes des étages de pompage (T1 -T4) de la première pompe à vide primaire (5) étant configurées pour être entraînées en mouvement au moyen du premier moteur d'entraînement (21 ), les membranes des étages de pompage (TT-T4') de la deuxième pompe à vide primaire (6) étant configurées pour être mises en mouvement au moyen du second moteur d'entraînement (23). 3. Leak detector (1) according to one of the preceding claims, characterized in that the at least two primary vacuum pumps (5, 6) are membrane, the membranes of the pump stages (T1 -T4) of the primary vacuum pump (5) being configured to be driven in motion by means of the first drive motor (21), the pump stage membranes (TT-T4 ') of the second primary vacuum pump (6) being configured to be driven by the second drive motor (23).
4. Détecteur de fuites (1 ) selon l'une des revendications 1 ou 2, caractérisé en ce que les au moins deux pompes à vide primaire (19, 20) comportent deux rotors configurés pour être entraînés pour tourner de façon synchronisée en sens inverse dans chaque étage de pompage (TT-T5', T1 -T5), les rotors de la première pompe à vide primaire (19) étant configurés pour être entraînés par le premier moteur d'entraînement (25), les rotors de la deuxième pompe à vide primaire (20) étant configurés pour être entraînés par le deuxième moteur d'entraînement (27).  4. Leak detector (1) according to one of claims 1 or 2, characterized in that the at least two primary vacuum pumps (19, 20) comprise two rotors configured to be driven to rotate synchronously in the opposite direction in each pumping stage (TT-T5 ', T1-T5), the rotors of the first primary vacuum pump (19) being configured to be driven by the first drive motor (25), the rotors of the second pump primary vacuum (20) being configured to be driven by the second drive motor (27).
5. Détecteur de fuites (1 ) selon la revendication précédente, caractérisé en ce que les rotors sont de type ROOTS.  5. Leak detector (1) according to the preceding claim, characterized in that the rotors are ROOTS type.
6. Détecteur de fuites (1 ) selon l'une des revendications 1 , 2 ou 4, caractérisé en ce que les au moins deux pompes à vide primaire sont à vis ou à spirale.  6. Leak detector (1) according to one of claims 1, 2 or 4, characterized in that the at least two primary vacuum pumps are screw or spiral.
7. Détecteur de fuites (1 ) selon l'une des revendications précédentes, caractérisé en ce que les au moins deux pompes à vide primaire (5, 6 ; 19, 20) présentent des configurations d'étages de pompage identiques.  Leak detector (1) according to one of the preceding claims, characterized in that the at least two primary vacuum pumps (5, 6; 19, 20) have identical pump stage configurations.
8. Détecteur de fuites (1 ) selon l'une des revendications précédentes, caractérisé en ce qu'au moins une pompe à vide primaire (5, 6 ; 19, 20) comporte au moins deux premiers étages de pompage (T1 , T2 ; T1 ', T2') montés en parallèle.  8. Leak detector (1) according to one of the preceding claims, characterized in that at least one primary vacuum pump (5, 6; 19, 20) comprises at least two first pump stages (T1, T2; T1 ', T2') connected in parallel.
9. Détecteur de fuites (1 ) selon l'une des revendications précédentes, caractérisé en ce qu'au moins une pompe à vide primaire (5, 6) comporte au moins trois étages de pompage (T1 -T4, TT-T4') montés en série.  9. Leak detector (1) according to one of the preceding claims, characterized in that at least one primary vacuum pump (5, 6) comprises at least three pumping stages (T1 -T4, TT-T4 ') mounted in series.
10. Détecteur de fuites (1 ) selon l'une des revendications précédentes, caractérisé en ce qu'il comporte un dispositif de purge (18) configuré pour fournir un gaz de purge entre deux étages de pompage (Τ3', T4' ; Τ4', Τ5') de la deuxième pompe à vide primaire (6 ; 20).  10. Leak detector (1) according to one of the preceding claims, characterized in that it comprises a purge device (18) configured to provide a purge gas between two pumping stages (Τ3 ', T4'; Τ4 ', Τ5') of the second primary vacuum pump (6; 20).
EP18769750.3A 2017-10-19 2018-09-24 Leak detector for checking the sealing tightness of an object to be tested Active EP3698115B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1759864A FR3072774B1 (en) 2017-10-19 2017-10-19 LEAK DETECTOR FOR CONTROLLING THE SEALING OF AN OBJECT TO BE TESTED
PCT/EP2018/075823 WO2019076583A1 (en) 2017-10-19 2018-09-24 Leak detector for checking the sealing tightness of an object to be tested

Publications (2)

Publication Number Publication Date
EP3698115A1 true EP3698115A1 (en) 2020-08-26
EP3698115B1 EP3698115B1 (en) 2022-05-18

Family

ID=60515671

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18769750.3A Active EP3698115B1 (en) 2017-10-19 2018-09-24 Leak detector for checking the sealing tightness of an object to be tested

Country Status (6)

Country Link
US (1) US11428598B2 (en)
EP (1) EP3698115B1 (en)
JP (1) JP7142089B2 (en)
CN (1) CN111213043B (en)
FR (1) FR3072774B1 (en)
WO (1) WO2019076583A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3070489B1 (en) * 2017-08-29 2020-10-23 Pfeiffer Vacuum LEAK DETECTOR AND LEAK DETECTION PROCESS FOR THE TIGHTNESS CHECK OF OBJECTS TO BE TESTED
CN112258797A (en) * 2020-11-01 2021-01-22 杭州黄俊环保科技有限公司 Automatic locking type natural gas leakage detection equipment
CN112696340A (en) * 2020-12-30 2021-04-23 广州亚俊氏电器有限公司 Vacuum pumping system and vacuum packaging machine comprising same
FR3121750B1 (en) * 2021-04-13 2023-10-13 Pfeiffer Vacuum Advanced sprinkler leak detection system
CN114439731A (en) * 2021-12-30 2022-05-06 武汉亿贝达科技有限公司 Leak detection method for KY molecular pump unit vacuum system

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3775213D1 (en) * 1987-03-27 1992-01-23 Leybold Ag LEAK DETECTOR AND OPERATING PROCEDURE THEREFOR.
DE3865012D1 (en) * 1988-06-01 1991-10-24 Leybold Ag PUMP SYSTEM FOR A LEAK DETECTOR.
FR2653558B1 (en) * 1989-10-23 1994-06-10 Cit Alcatel TRACER GAS LEAK DETECTION SYSTEM.
FR2667937B1 (en) * 1990-10-15 1995-03-10 Cit Alcatel GAS LEAK DETECTOR.
DE4140366A1 (en) * 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De LEAK DETECTOR FOR VACUUM SYSTEMS AND METHOD FOR CARRYING OUT THE LEAK DETECTOR ON VACUUM SYSTEMS
DE4228313A1 (en) * 1992-08-26 1994-03-03 Leybold Ag Counterflow leak detector with high vacuum pump
DE9405028U1 (en) * 1994-03-24 1994-06-09 Leybold Ag Test gas leak detector
DE4442174A1 (en) * 1994-11-26 1996-05-30 Leybold Ag Leak detector with vacuum pumps and operating procedures
DE19504278A1 (en) * 1995-02-09 1996-08-14 Leybold Ag Test gas leak detector
US5703281A (en) * 1996-05-08 1997-12-30 Southeastern Univ. Research Assn. Ultra high vacuum pumping system and high sensitivity helium leak detector
DE19638506A1 (en) * 1996-09-20 1998-03-26 Leybold Vakuum Gmbh Procedure for examining a plurality of similar test objects for leaks and leak detectors suitable for carrying out this procedure
DE19735250A1 (en) * 1997-08-14 1999-02-18 Leybold Vakuum Gmbh Method to operate helium leak detector
DE19962006A1 (en) * 1998-10-10 2001-06-28 Leybold Vakuum Gmbh Method to operate film leak tester; involves using form test chamber, which is evacuated using one pump, before testing using second vacuum pump and taking ambient helium concentration into account
DE50015394D1 (en) * 1999-12-22 2008-11-20 Inficon Gmbh METHOD FOR OPERATING A FOIL LEAK DETECTOR AND FILM LEAK DETECTOR SUITABLE FOR CARRYING OUT THIS PROCEDURE
WO2001046667A1 (en) * 1999-12-22 2001-06-28 Inficon Gmbh Method for operating a film leak indicator and a corresponding film leak indicator for carrying out said method
DE10156205A1 (en) * 2001-11-15 2003-06-05 Inficon Gmbh Test gas leak detector
DE10302764A1 (en) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vacuum pumping system
DE10308420A1 (en) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Test gas leak detector
DE10319633A1 (en) * 2003-05-02 2004-11-18 Inficon Gmbh Leak Detector
DE10324596A1 (en) * 2003-05-30 2004-12-16 Inficon Gmbh Leak Detector
EP1631807B1 (en) * 2003-06-11 2007-11-21 Varian, Inc. Method and apparatus for large leak testing
DE102007057944A1 (en) * 2007-12-01 2009-06-04 Inficon Gmbh Method and device for leak testing
DE102010033373A1 (en) * 2010-08-04 2012-02-09 Inficon Gmbh Leak Detector
WO2012104387A1 (en) * 2011-02-03 2012-08-09 Oerlikon Leybold Vacuum Gmbh Leakage search device
DE102011107334B4 (en) * 2011-07-14 2023-03-16 Leybold Gmbh Leak detection device and method for checking objects for leaks using a leak detection device
DE102013218506A1 (en) 2013-09-16 2015-03-19 Inficon Gmbh Sniffer leak detector with multi-stage diaphragm pump
DE102015222213A1 (en) * 2015-11-11 2017-05-11 Inficon Gmbh Pressure measurement at the test gas inlet
DE102016210701A1 (en) * 2016-06-15 2017-12-21 Inficon Gmbh Mass spectrometric leak detector with turbomolecular pump and booster pump on common shaft
CN106768685A (en) * 2016-12-05 2017-05-31 安徽皖仪科技股份有限公司 A kind of helium mass spectrometer leak detector that can aid in evacuating

Also Published As

Publication number Publication date
US11428598B2 (en) 2022-08-30
FR3072774B1 (en) 2019-11-15
CN111213043A (en) 2020-05-29
FR3072774A1 (en) 2019-04-26
JP7142089B2 (en) 2022-09-26
CN111213043B (en) 2022-10-25
WO2019076583A1 (en) 2019-04-25
US20200319053A1 (en) 2020-10-08
JP2020537750A (en) 2020-12-24
EP3698115B1 (en) 2022-05-18

Similar Documents

Publication Publication Date Title
EP3698115B1 (en) Leak detector for checking the sealing tightness of an object to be tested
EP3023766B1 (en) Method and device for measuring permeation by mass spectrometry
EP3325934B1 (en) Method for checking the tightness of sealed products and leak-detection facility
EP3676589B1 (en) Leak detector and leak detection method for leak-testing objects
EP0534824B1 (en) Tracer gas leak detector
RU2567403C2 (en) Leak detector
FR2734053A1 (en) GAS LEAK DETECTOR
EP0475246B1 (en) High flow leak detector with three molecular filters
FR2653558A1 (en) TRACER GAS LEAK DETECTION SYSTEM.
WO2019008169A1 (en) Method for detecting leakage of a hollow component and installation for implementing such a method
EP1942327B1 (en) Device and method for the quick detection of leaks
EP3795972B1 (en) Leak detection module and method for testing the airtightness of an object to be tested using a tracer gas
WO2020254043A1 (en) Dry rough vacuum pump and method for controlling the injection of a purging gas
EP3775558B1 (en) Dry-type vacuum pump
FR3092913A1 (en) Sniffer probe and leak detector
FR3112578A3 (en) Rotary vane vacuum pump, detector and freeze-drying installation
FR3121749A1 (en) Advanced sniffing leak detection system
FR3121750A1 (en) Advanced sprinkler leak detection system
FR2904689A1 (en) GAS SENSOR
FR3119209A1 (en) Dry type vacuum pump and pump unit
FR3121962A1 (en) Vacuum pump

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: UNKNOWN

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20200409

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20211223

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: FRENCH

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602018035792

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1493426

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220615

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20220518

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1493426

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220518

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220919

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220818

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220819

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220818

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220918

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602018035792

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

26N No opposition filed

Effective date: 20230221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20220924

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20220930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230524

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220924

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220930

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220924

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220924

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20230922

Year of fee payment: 6

Ref country code: DE

Payment date: 20230928

Year of fee payment: 6

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220518