EP3686430B1 - System and method for evacuating a process room - Google Patents

System and method for evacuating a process room Download PDF

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Publication number
EP3686430B1
EP3686430B1 EP19217906.7A EP19217906A EP3686430B1 EP 3686430 B1 EP3686430 B1 EP 3686430B1 EP 19217906 A EP19217906 A EP 19217906A EP 3686430 B1 EP3686430 B1 EP 3686430B1
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EP
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Prior art keywords
line valve
compressor
line
valve
external air
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EP19217906.7A
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German (de)
French (fr)
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EP3686430A1 (en
Inventor
Gunther BERMICH
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MAN Energy Solutions SE
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MAN Energy Solutions SE
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/022—Stopping, starting, unloading or idling control by means of pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/03—Stopping, starting, unloading or idling control by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0072—Installation or systems with two or more pumps, wherein the flow path through the stages can be changed, e.g. series-parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/14—Multi-stage pumps with means for changing the flow-path through the stages, e.g. series-parallel, e.g. side-loads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0269—Surge control by changing flow path between different stages or between a plurality of compressors; load distribution between compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/16—Opening or closing of a valve in a circuit

Definitions

  • the invention relates to a system for evacuating a process space.
  • the invention also relates to a method for evacuating a process space.
  • An example of a system for evacuating a process room is the document JP 2015 102036 , after which two vacuum pumps are used, which can be operated in series or in parallel.
  • the present invention is based on the object of creating a novel system and method for evacuating a process space.
  • the system according to the invention for evacuating a process space has a first compressor which can be coupled to the process space via a first supply line and from which medium removed from the process space can be discharged into the environment via a first drainage line.
  • the system according to the invention for evacuating a process space also has a second compressor which can be coupled to the process space via a second inlet line and from which medium removed from the process space can be discharged into the environment via a second drain line.
  • the system according to the invention for evacuating a process space also has a connecting line connected between the first drain line and the second feed line.
  • a first inlet line valve is integrated into the first inlet line.
  • a second inlet line valve is integrated into the second inlet line.
  • a drain line valve is integrated into the first drain line.
  • a connection line valve is integrated in the connection line.
  • the first compressor and the second compressor can be operated in parallel.
  • the first compressor and the second compressor can be operated in series.
  • the system according to the invention for evacuating a process space does not use vacuum pumps, but rather compressors.
  • the first compressor and the second compressor form a compressor group, and the two compressors can be operated in parallel as well as in series.
  • the compressors are operated in parallel above a pressure limit. When the pressure limit value is reached or not reached, the compressors are operated in series. This allows a relatively large process space to be evacuated to a high negative pressure within a short time.
  • a first external air line valve is integrated into a first external air line leading to the first compressor, a second external air line valve being integrated into a second external air line leading to the second compressor, and the first external air line valve and the second external air line valve depending on the operating conditions of the first compressor and the second compressor are controllable.
  • the external air line valves can be activated depending on the operating conditions of the compressors in order to ensure safe operation of the compressors.
  • the first feed line valve and the second feed line valve can be controlled as a function of the operating conditions of the first compressor and the second compressor.
  • the activation of the two inlet line valves depending on the operating conditions of the two compressors serves to protect electrical machines that are used to drive the compressors.
  • a first pressure sensor is assigned to the first inlet line
  • a second pressure sensor being assigned to the second inlet line
  • the second inlet line valve, the first outlet line valve and the connecting line valve all being controllable as a function of measured values from the two pressure sensors.
  • the pressure sensors can be used to easily and reliably monitor the negative pressure up to which the process space to be evacuated was evacuated. Depending on the measured values of the pressure sensors, it is then possible to switch from parallel operation of the compressors to serial operation of the compressors, for which purpose the valves are then controlled accordingly.
  • the invention relates to a system and a method for evacuating a process space, in particular a process space with a large volume.
  • a large-volume process space should be understood to mean a process space whose volume to be evacuated is in the order of magnitude of more than 10,000 m 3 , in particular more than 20,000 m 3 .
  • Figs. 1 and 2 each show a schematic block diagram of a system 10 for evacuating a process room 11 in two different operating states.
  • the system 10 for evacuating the process space 11 has a first compressor 12 and a second compressor 13.
  • the first compressor 12 is driven by an electric machine 14, which transmits drive power to the first compressor 12 via a transmission 15.
  • the second compressor 13 is also driven by an electric machine 16, which transmits drive power to the second compressor 13 via a transmission 17.
  • the first compressor 12 can be coupled to the process space 11 via a first feed line 18.
  • the second compressor 13 can be coupled to the process space 11 via a second feed line 19.
  • Medium removed from the process space 11 can be discharged from the first compressor 12 via a first discharge line 20 into the environment.
  • the medium removed from the process space 11 can be discharged into the environment via a second discharge line 21.
  • a connecting line 22 is connected between the first discharge line 20, which leads from the first compressor 12 into the environment, and the second inlet line 19, which leads from the process space 11 in the direction of the second compressor 13. Via this connecting line 22, medium can be conducted starting from the first compressor 12 in the direction of the second compressor 13.
  • a first feed line valve 23 is integrated into the first feed line 18.
  • a second feed line valve 24 is integrated into the second feed line 19.
  • a first drain line valve 25 is integrated into the first drain line 20, namely downstream of the branch of the connecting line 22 from the first drain line 20.
  • a connecting line valve 26 is integrated into the connecting line 22.
  • the connecting line 22 branches off from the first drain line 20 upstream of the first drain line valve 25 and opens downstream of the second supply line valve 24 into the second supply line 19 upstream of the second compressor 13.
  • Fig. 1 shows a state of the system 10 in which the two compressors 12, 13 are operated in parallel.
  • the first inlet line valve 23, the second inlet line valve 24 and the first outlet line valve 25 are all open, whereas the connecting line valve 26 is closed.
  • Fig. 2 shows a state of the system 10 in which the two compressors 12 and 13 are operated in series.
  • the first feed line valve 23 and the connecting line valve 26 are both open.
  • the first drain line valve 25 and the second supply line valve 24 are both closed.
  • the system 10 comprises a first external air line 27 leading to the first compressor 12, in which a first external air line valve 28 is integrated.
  • the two external air line valves 28 and 30 can be controlled as a function of the operating conditions of the two compressors 12 and 13.
  • the two inlet line valves 23 and 24 can also be controlled as a function of the operating conditions of the two compressors 12 and 13.
  • the system for evacuating a process room also has pressure sensors.
  • a first pressure sensor 31 is assigned to the first feed line 18 and a second pressure sensor 32 is assigned to the second feed line 19.
  • the pressure that prevails in the first feed line 18 leading to the first compressor 12 can be determined via the first pressure sensor 31.
  • the pressure that prevails in the second feed line 19 leading to the second compressor 13 can be determined via the second pressure sensor 32.
  • the second inlet line valve 24, the first outlet line valve 25 and the connecting line valve 26 can be controlled as a function of the measured values of the two pressure sensors 31 and 32.
  • both compressors 12, 13 are initially operated in parallel up to a pressure limit value. In parallel operation of the two compressors 12, 13 they provide a large suction volume or delivery volume, this parallel operation being maintained during evacuation as long as the pressure in at least one of the two inlet lines 18, 19 is greater than the pressure limit value.
  • the method for evacuating the process space 11 is carried out using the system described above. Then, when both compressors 12, 13 are operated in parallel, the first inlet line valve 23, the second inlet line valve 24 and the first outlet line valve 25 are all opened, whereas the connecting line valve 26 is closed. Then, when the two compressors 12, 13 are operated in series, the first inlet line valve 23 and the connecting line valve 26 are both opened, whereas the second inlet line valve 24 and the first outlet line valve 25 are both closed.
  • the external air line valve 30 integrated in the second external air line 29 is preferably opened in order to mix the medium already passed through the first compressor 12 with external air upstream of the second compressor 13.
  • the second compressor 13 can then be operated at an optimal operating point, on the one hand to lead a sufficiently high flow rate via the second compressor 13 and on the other hand to keep the temperature of the medium carried via the second compressor 13 below a temperature limit value.
  • the following preferably applies: 1.0 V 1.7.
  • V 1.0 applies.
  • the external air line valve 28 is preferably opened to protect the compressor in order to always lead a sufficiently large delivery rate via the compressor 12.
  • the external air line valve 30 is opened in order to always lead a sufficiently large amount of air via the second compressor 13.
  • the feed line valves 23, 24 can be controlled depending on the power consumption of the compressors 12, 13.
  • the first inlet line valve 23 can be closed more strongly in order to provide motor protection for the electrical machine 14.
  • the second feed line valve 24 can be closed more strongly in order to provide motor protection for the electrical machine 16 of the second compressor 13.
  • the compressor protection and the motor protection are advantageous in order to avoid damage to the compressors 12, 13 and the electrical machines 14, 16 during evacuation operation.
  • the process space 11 is initially evacuated up to a pressure limit value in parallel operation of the two compressors 12, 13 (see FIG Fig. 1 ).
  • the parallel operation of the compressors 12, 13 switches to serial operation of the compressors 12, 13 (see Fig. 2 ) changed in order to enable an even greater evacuation of the process space 12.
  • the two compressors 12, 13 can be radial compressors.
  • radial compressors that can provide a flow rate of 1400 m 3 / min.
  • a total delivery rate of 2800 m 3 / min can then be evacuated from the process space 11 by them. This is preferably done until a pressure limit value is reached, which is, for example, -63 kPa.
  • the two compressors are switched from parallel operation to serial operation in order, for example, to evacuate the process space 11 to a pressure of -85 kPa.
  • serial operation of course, a smaller delivery rate is available than in parallel operation.
  • the system according to the invention and the method according to the invention are preferably used for evacuating relatively large process spaces 11 with a volume of more than 10,000 m 3 , in particular more than 20,000 m 3 .
  • process spaces can be, for example, transport tubes with a diameter of more than 2 m and a length of more than 1 km.
  • the two compressors 11, 12 form a compressor group. There can be several such compressor groups and each compressor group can be operated in the manner described above.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Description

Die Erfindung betrifft ein System zum Evakuieren eines Prozessraums. Des Weiteren betrifft die Erfindung ein Verfahren zum Evakuieren eines Prozessraums.The invention relates to a system for evacuating a process space. The invention also relates to a method for evacuating a process space.

Aus der Praxis sind eine Vielzahl von Anwendungen bekannt, in welchen ein Prozessraum evakuiert werden muss. Hierzu kommen bislang Vakuumpumpen zum Einsatz. Dann, wenn Vakuumpumpen zur Evakuierung eines Prozessraums genutzt werden, kann dies bei Prozessräumen, die über ein großes zu evakuierendes Volumen verfügen, zu lange dauern. Es besteht daher Bedarf an einem neuartigen System und Verfahren zum Evakuieren eines Prozessraums, mithilfe dessen insbesondere große Prozessräume innerhalb kurzer Zeit zuverlässig evakuiert werden können.A large number of applications in which a process space has to be evacuated are known from practice. To date, vacuum pumps have been used for this purpose. If vacuum pumps are used to evacuate a process room, this can take too long in process rooms that have a large volume to be evacuated. There is therefore a need for a novel system and method for evacuating a process space, with the aid of which, in particular, large process spaces can be reliably evacuated within a short time.

Ein Beispiel für ein System zum Evakuieren eines Prozessraums ist das Dokument JP 2015 102036 , wonach zwei Vakuumpumpen verwendet werden, welche seriell oder parallel betrieben werden können.An example of a system for evacuating a process room is the document JP 2015 102036 , after which two vacuum pumps are used, which can be operated in series or in parallel.

Hiervon ausgehend liegt der vorliegenden Erfindung die Aufgabe zugrunde, ein neuartiges System und Verfahren zum Evakuieren eines Prozessraums zu schaffen.Proceeding from this, the present invention is based on the object of creating a novel system and method for evacuating a process space.

Diese Aufgabe wird durch ein System zum Evakuieren eines Prozessraums nach Anspruch 1 gelöst.This object is achieved by a system for evacuating a process space according to claim 1.

Das erfindungsgemäße System zum Evakuieren eines Prozessraums weist einen ersten Kompressor auf, der über eine erste Zulaufleitung mit dem Prozessraum koppelbar ist und von dem über eine erste Ablaufleitung aus dem Prozessraum entnommenes Medium in die Umgebung abführbar ist.The system according to the invention for evacuating a process space has a first compressor which can be coupled to the process space via a first supply line and from which medium removed from the process space can be discharged into the environment via a first drainage line.

Das erfindungsgemäße System zum Evakuieren eines Prozessraums weist ferner einen zweiten Kompressor auf, der über eine zweite Zulaufleitung mit dem Prozessraum koppelbar ist und von dem über eine zweite Ablaufleitung aus dem Prozessraum entnommenes Medium in die Umgebung abführbar ist.The system according to the invention for evacuating a process space also has a second compressor which can be coupled to the process space via a second inlet line and from which medium removed from the process space can be discharged into the environment via a second drain line.

Das erfindungsgemäße System zum Evakuieren eines Prozessraums weist ferner eine zwischen die erste Ablaufleitung und die zweite Zulaufleitung geschaltete Verbindungsleitung auf.The system according to the invention for evacuating a process space also has a connecting line connected between the first drain line and the second feed line.

In die erste Zulaufleitung ist ein erstes Zulaufleitungsventil integriert. In die zweite Zulaufleitung ist ein zweites Zulaufleitungsventil integriert. In die erste Ablaufleitung ist ein Ablaufleitungsventil integriert. In die Verbindungsleitung ist ein Verbindungsleitungsventil integriert.A first inlet line valve is integrated into the first inlet line. A second inlet line valve is integrated into the second inlet line. A drain line valve is integrated into the first drain line. A connection line valve is integrated in the connection line.

Dann, wenn das erste Zulaufleitungsventil, das zweite Zulaufleitungsventil und das erste Ablaufleitungsventil allesamt geöffnet sind und das Verbindungsleitungsventil geschlossen ist, sind der erste Kompressor und der zweite Kompressor parallel betreibbar. Dann, wenn das erste Zulaufleitungsventil und das Verbindungsleitungsventil beide geöffnet und das zweite Zulaufleitungsventil und das erste Ablaufleitungsventil beide geschlossen sind, sind der erste Kompressor und der zweite Kompressor seriell betreibbar.Then, when the first inlet line valve, the second inlet line valve and the first outlet line valve are all open and the connecting line valve is closed, the first compressor and the second compressor can be operated in parallel. Then, when the first inlet line valve and the connecting line valve are both open and the second inlet line valve and the first outlet line valve are both closed, the first compressor and the second compressor can be operated in series.

Das erfindungsgemäße System zum Evakuieren eines Prozessraums nutzt keine Vakuumpumpen, sondern vielmehr Kompressoren. Der erste Kompressor und der zweite Kompressor bilden dabei eine Kompressor-Gruppe, wobei die beiden Kompressoren sowohl parallel als auch seriell betrieben werden können. Oberhalb einer Druckgrenze werden die Kompressoren parallel betrieben. Mit Erreichen oder Unterschreiten des Druckgrenzwerts werden hingegen die Kompressoren seriell betrieben. Hiermit kann innerhalb kurzer Zeit ein relativ großer Prozessraum auf einen hohen Unterdruck evakuiert werden.The system according to the invention for evacuating a process space does not use vacuum pumps, but rather compressors. The first compressor and the second compressor form a compressor group, and the two compressors can be operated in parallel as well as in series. The compressors are operated in parallel above a pressure limit. When the pressure limit value is reached or not reached, the compressors are operated in series. This allows a relatively large process space to be evacuated to a high negative pressure within a short time.

Nach einer vorteilhaften Weiterbildung ist in eine zum ersten Kompressor führende erste Fremdluftleitung ein erstes Fremdluftleitungsventil integriert, wobei in eine zum zweiten Kompressor führenden zweite Fremdluftleitung ein zweites Fremdluftleitungsventil integriert ist, und wobei das erste Fremdluftleitungsventil und das zweite Fremdluftleitungsventil abhängig von Betriebsbedingungen des ersten Kompressors und des zweiten Kompressors ansteuerbar sind. Die Fremdluftleitungsventile können abhängig von Betriebsbedingungen der Kompressoren angesteuert werden, um einen sicheren Betrieb der Kompressoren zu gewährleisten.According to an advantageous development, a first external air line valve is integrated into a first external air line leading to the first compressor, a second external air line valve being integrated into a second external air line leading to the second compressor, and the first external air line valve and the second external air line valve depending on the operating conditions of the first compressor and the second compressor are controllable. The external air line valves can be activated depending on the operating conditions of the compressors in order to ensure safe operation of the compressors.

Nach einer vorteilhaften Weiterbildung sind das erste Zulaufleitungsventil und das zweite Zulaufleitungsventil abhängig von Betriebsbedingungen des ersten Kompressors und des zweiten Kompressors ansteuerbar. Die Ansteuerung der beiden Zulaufleitungsventile abhängig von Betriebsbedingungen der beiden Kompressoren dient dem Schutz von elektrischen Maschinen, die dem Antreiben der Kompressoren dienen.According to an advantageous development, the first feed line valve and the second feed line valve can be controlled as a function of the operating conditions of the first compressor and the second compressor. The activation of the two inlet line valves depending on the operating conditions of the two compressors serves to protect electrical machines that are used to drive the compressors.

Nach einer vorteilhaften Weiterbildung ist der ersten Zulaufleitung ein erster Drucksensor zugeordnet, wobei der zweiten Zulaufleitung ein zweiter Drucksensor zugeordnet ist, und wobei das zweite Zulaufleitungsventil, das erste Ablaufleitungsventil und das Verbindungsleitungsventil allesamt abhängig von Messwerten der beiden Drucksensoren ansteuerbar sind. Über die Drucksensoren kann einfach und zuverlässig überwacht werden, bis zu welchem Unterdruck der zu evakuierende Prozessraum evakuiert wurde. Abhängig von den Messwerten der Drucksensoren kann dann von dem parallelen Betrieb der Kompressoren auf den seriellen Betrieb der Kompressoren umgeschaltet werden, wozu dann die Ventile entsprechend angesteuert werden.According to an advantageous development, a first pressure sensor is assigned to the first inlet line, a second pressure sensor being assigned to the second inlet line, and the second inlet line valve, the first outlet line valve and the connecting line valve all being controllable as a function of measured values from the two pressure sensors. The pressure sensors can be used to easily and reliably monitor the negative pressure up to which the process space to be evacuated was evacuated. Depending on the measured values of the pressure sensors, it is then possible to switch from parallel operation of the compressors to serial operation of the compressors, for which purpose the valves are then controlled accordingly.

Das erfindungsgemäße Verfahren zum Evakuieren eines Prozessraums ist in Anspruch 5 definiert.The method according to the invention for evacuating a process space is defined in claim 5.

Bevorzugte Weiterbildungen der Erfindung ergeben sich aus den Unteransprüchen und der nachfolgenden Beschreibung. Ausführungsbeispiele der Erfindung werden, ohne hierauf beschränkt zu sein, an Hand der Zeichnung näher erläutert. Dabei zeigt:

Fig. 1:
ein Blockschaltbild eines erfindungsgemäßen Systems zum Evakuieren eines Prozessraums in einem ersten Betriebszustand,
Fig. 2
das System der Fig. 1 in einem zweiten Betriebszustand.
Preferred developments of the invention emerge from the subclaims and the following description. Exemplary embodiments of the invention are explained in more detail with reference to the drawing, without being restricted thereto. It shows:
Fig. 1:
a block diagram of a system according to the invention for evacuating a process room in a first operating state,
Fig. 2
the system of Fig. 1 in a second operating state.

Die Erfindung betrifft ein System sowie ein Verfahren zum Evakuieren eines Prozessraums, insbesondere eines Prozessraums mit einem großen Volumen.The invention relates to a system and a method for evacuating a process space, in particular a process space with a large volume.

Unter einem großvolumigen Prozessraum soll ein Prozessraum verstanden werden, dessen zu evakuierendes Volumen in der Größenordnung von mehr als 10000 m3, insbesondere von mehr als 20000 m3, beträgt.A large-volume process space should be understood to mean a process space whose volume to be evacuated is in the order of magnitude of more than 10,000 m 3 , in particular more than 20,000 m 3 .

Fig. 1 und 2 zeigen jeweils ein schematisiertes Blockschaltbild eines Systems 10 zur Evakuierung eines Prozessraums 11 in zwei unterschiedlichen Betriebszuständen. Figs. 1 and 2 each show a schematic block diagram of a system 10 for evacuating a process room 11 in two different operating states.

Das System 10 zur Evakuierung des Prozessraums 11 verfügt über einen ersten Kompressor 12 sowie über einen zweiten Kompressor 13.The system 10 for evacuating the process space 11 has a first compressor 12 and a second compressor 13.

Der erste Kompressor 12 wird von einer elektrischen Maschine 14 angetrieben, die über ein Getriebe 15 Antriebsleistung auf den ersten Kompressor 12 überträgt. Der zweite Kompressor 13 wird ebenfalls von einer elektrischen Maschine 16 angetrieben, die über ein Getriebe 17 Antriebsleistung auf den zweiten Kompressor 13 überträgt.The first compressor 12 is driven by an electric machine 14, which transmits drive power to the first compressor 12 via a transmission 15. The second compressor 13 is also driven by an electric machine 16, which transmits drive power to the second compressor 13 via a transmission 17.

Der erste Kompressor 12 ist über eine erste Zulaufleitung 18 an den Prozessraum 11 koppelbar. Der zweite Kompressor 13 ist über eine zweite Zulaufleitung 19 an den Prozessraum 11 koppelbar. Vom ersten Kompressor 12 aus ist aus dem Prozessraum 11 entnommenes Medium über eine erste Ablaufleitung 20 in die Umgebung abführbar. Ausgehend vom zweiten Kompressor 13 ist aus dem Prozessraum 11 entnommenes Medium über eine zweite Ablaufleitung 21 in die Umgebung abführbar.The first compressor 12 can be coupled to the process space 11 via a first feed line 18. The second compressor 13 can be coupled to the process space 11 via a second feed line 19. Medium removed from the process space 11 can be discharged from the first compressor 12 via a first discharge line 20 into the environment. Starting from the second compressor 13, the medium removed from the process space 11 can be discharged into the environment via a second discharge line 21.

Zwischen die erste Ablaufleitung 20, die vom ersten Kompressor 12 in die Umgebung führt, und die zweite Zulaufleitung 19, die vom Prozessraum 11 in Richtung auf den zweiten Kompressor 13 führt, ist eine Verbindungsleitung 22 geschaltet. Über diese Verbindungsleitung 22 kann Medium ausgehend vom ersten Kompressor 12 in Richtung auf den zweiten Kompressor 13 geführt werden.A connecting line 22 is connected between the first discharge line 20, which leads from the first compressor 12 into the environment, and the second inlet line 19, which leads from the process space 11 in the direction of the second compressor 13. Via this connecting line 22, medium can be conducted starting from the first compressor 12 in the direction of the second compressor 13.

In die erste Zulaufleitung 18 ist ein erstes Zulaufleitungsventil 23 integriert. In die zweite Zulaufleitung 19 ist ein zweites Zulaufleitungsventil 24 integriert.A first feed line valve 23 is integrated into the first feed line 18. A second feed line valve 24 is integrated into the second feed line 19.

In die erste Ablaufleitung 20 ist ein erstes Ablaufleitungsventil 25 integriert, nämlich stromabwärts der Abzweigung der Verbindungsleitung 22 von der ersten Ablaufleitung 20. In die Verbindungsleitung 22 ist ein Verbindungsleitungsventil 26 integriert. Obwohl in Fig. 1 und 2 nicht gezeigt, kann vorgesehen sein, auch in die zweite Ablaufleitung 21 ein Ablaufleitungsventil zu integrieren, welches dann als zweites Ablaufleitungsventil bezeichnet würde.A first drain line valve 25 is integrated into the first drain line 20, namely downstream of the branch of the connecting line 22 from the first drain line 20. A connecting line valve 26 is integrated into the connecting line 22. Although in Figs. 1 and 2 Not shown, provision can also be made to integrate a drain line valve into the second drain line 21, which would then be referred to as a second drain line valve.

Wie bereits ausgeführt, zweigt die Verbindungsleitung 22 stromaufwärts des ersten Ablaufleitungsventils 25 von der ersten Ablaufleitung 20 ab und mündet stromabwärts des zweiten Zulaufleitungsventils 24 in die zweite Zulaufleitung 19 stromaufwärts des zweiten Kompressors 13.As already stated, the connecting line 22 branches off from the first drain line 20 upstream of the first drain line valve 25 and opens downstream of the second supply line valve 24 into the second supply line 19 upstream of the second compressor 13.

Fig. 1 zeigt einen Zustand des Systems 10, in welchem die beiden Kompressoren 12, 13 parallel betrieben werden. In diesem Fall sind das erste Zulaufleitungsventil 23, das zweite Zulaufleitungsventil 24 und das erste Ablaufleitungsventil 25 allesamt geöffnet, wohingegen das Verbindungsleitungsventil 26 geschlossen ist. Fig. 1 shows a state of the system 10 in which the two compressors 12, 13 are operated in parallel. In this case, the first inlet line valve 23, the second inlet line valve 24 and the first outlet line valve 25 are all open, whereas the connecting line valve 26 is closed.

Fig. 2 zeigt einen Zustand des Systems 10, in welchem die beiden Kompressoren 12 und 13 seriell betrieben werden. In diesem Zustand sind dann das erste Zulaufleitungsventil 23 und das Verbindungsleitungsventil 26 beide geöffnet. Das erste Ablaufleitungsventil 25 und das zweite Zulaufleitungsventil 24 sind beide geschlossen. Fig. 2 shows a state of the system 10 in which the two compressors 12 and 13 are operated in series. In this state, the first feed line valve 23 and the connecting line valve 26 are both open. The first drain line valve 25 and the second supply line valve 24 are both closed.

Gemäß Fig. 1 und 2 umfasst das System 10 eine zu dem ersten Kompressor 12 führende erste Fremdluftleitung 27, in die ein erstes Fremdluftleitungsventil 28 integriert ist. Zum zweiten Kompressor 13 führt eine zweite Fremdluftleitung 29, in die ein zweites Fremdluftleitungsventil 30 integriert ist. Die beiden Fremdluftleitungsventile 28 und 30 sind abhängig von Betriebsbedingungen der beiden Kompressoren 12 und 13 ansteuerbar. Ebenso sind die beiden Zulaufleitungsventile 23 und 24 abhängig von Betriebsbedingungen der beiden Kompressoren 12 und 13 ansteuerbar.According to Figs. 1 and 2 the system 10 comprises a first external air line 27 leading to the first compressor 12, in which a first external air line valve 28 is integrated. A second external air line 29, into which a second external air line valve 30 is integrated, leads to the second compressor 13. The two external air line valves 28 and 30 can be controlled as a function of the operating conditions of the two compressors 12 and 13. The two inlet line valves 23 and 24 can also be controlled as a function of the operating conditions of the two compressors 12 and 13.

Das System zum Evakuieren eines Prozessraums verfügt weiterhin über Drucksensoren. Der ersten Zulaufleitung 18 ist ein erster Drucksensor 31 und der zweiten Zulaufleitung 19 ein zweiter Drucksensor 32 zugeordnet. Über den ersten Drucksensor 31 kann der Druck ermittelt werden, der in der zum ersten Kompressor 12 führenden ersten Zulaufleitung 18 herrscht. Über den zweiten Drucksensor 32 kann der Druck ermittelt werden, der in der zum zweiten Kompressor 13 führenden zweiten Zulaufleitung 19 herrscht. Abhängig von den Messwerten der beiden Drucksensoren 31 und 32 sind das zweite Zulaufleitungsventil 24, das erste Ablaufleitungsventil 25 sowie das Verbindungsleitungsventil 26 ansteuerbar.The system for evacuating a process room also has pressure sensors. A first pressure sensor 31 is assigned to the first feed line 18 and a second pressure sensor 32 is assigned to the second feed line 19. The pressure that prevails in the first feed line 18 leading to the first compressor 12 can be determined via the first pressure sensor 31. The pressure that prevails in the second feed line 19 leading to the second compressor 13 can be determined via the second pressure sensor 32. The second inlet line valve 24, the first outlet line valve 25 and the connecting line valve 26 can be controlled as a function of the measured values of the two pressure sensors 31 and 32.

Zum Evakuieren des Prozessraums 11 werden zunächst bis zu einem Druckgrenzwert beide Kompressoren 12, 13 parallel betrieben. Im Parallel-Betrieb der beiden Kompressoren 12, 13 stellen dieselben ein großes Saugvolumen bzw. Fördervolumen bereit, wobei dieser Parallel-Betrieb solange beim Evakuieren aufrechterhalten wird, solange der Druck in mindestens einer der beiden Zulaufleitungen 18, 19 größer als der Druckgrenzwert ist.To evacuate the process space 11, both compressors 12, 13 are initially operated in parallel up to a pressure limit value. In parallel operation of the two compressors 12, 13 they provide a large suction volume or delivery volume, this parallel operation being maintained during evacuation as long as the pressure in at least one of the two inlet lines 18, 19 is greater than the pressure limit value.

Dann, wenn der Druckgrenzwert erreicht oder unterschritten wird, erfolgt das Evakuieren des Prozessraums 11 ebenfalls unter Verwendung beider Kompressoren 12, 13, die dann jedoch nicht mehr parallel sondern seriell, also in einem Serie-Betrieb, betrieben werden. In diesem Fall ist zwar das Fördervolumen geringer, es ist jedoch eine noch stärkere Evakuierung des Prozessraums 11 bis auf einen Druck möglich, der unterhalb des Druckgrenzwerts liegt.When the pressure limit value is reached or undershot, the evacuation of the process space 11 also takes place using both compressors 12, 13, which are then no longer operated in parallel but in series, that is to say in series operation. In this case, although the delivery volume is lower, an even greater evacuation of the process space 11 is possible down to a pressure which is below the pressure limit value.

Das Verfahren zum Evakuieren des Prozessraums 11 erfolgt unter Verwendung des oben beschriebenen Systems. Dann, wenn beide Kompressoren 12, 13 parallel betrieben werden, werden das erste Zulaufleitungsventil 23, das zweite Zulaufleitungsventil 24 und das erste Ablaufleitungsventil 25 allesamt geöffnet, wohingegen das Verbindungsleitungsventil 26 geschlossen wird. Dann, wenn die beiden Kompressoren 12, 13 seriell betrieben werden, werden das erste Zulaufleitungsventil 23 und das Verbindungsleitungsventil 26 beide geöffnet, wohingegen das zweite Zulaufleitungsventil 24 und das erste Ablaufleitungsventil 25 beide geschlossen werden.The method for evacuating the process space 11 is carried out using the system described above. Then, when both compressors 12, 13 are operated in parallel, the first inlet line valve 23, the second inlet line valve 24 and the first outlet line valve 25 are all opened, whereas the connecting line valve 26 is closed. Then, when the two compressors 12, 13 are operated in series, the first inlet line valve 23 and the connecting line valve 26 are both opened, whereas the second inlet line valve 24 and the first outlet line valve 25 are both closed.

Es wird vorzugsweise dann vom parallelen Betrieb der beiden Kompressoren 12, 13 gemäß Fig. 1 auf den seriellen Betrieb der beiden Kompressoren 12, 13 gemäß Fig. 3 gewechselt bzw. umgeschaltet, wenn der erste Drucksensor 31 und der zweite Drucksensor 32 jeweils einen Druckmesswert liefern, der jeweils kleiner oder gleich dem Druckgrenzwert ist.It is then preferably of the parallel operation of the two compressors 12, 13 according to FIG Fig. 1 changed or switched to the serial operation of the two compressors 12, 13 according to FIG. 3 when the first pressure sensor 31 and the second pressure sensor 32 each deliver a pressure measurement value that is less than or equal to the pressure limit value.

Dann, wenn, wie in Fig. 2 gezeigt, beide Kompressoren 12, 13 seriell betrieben werden, wird das in die zweite Fremdluftleitung 29 integrierte Fremdluftleitungsventil 30 vorzugsweise geöffnet, um das bereits über den ersten Kompressor 12 geführte Medium stromaufwärts des zweiten Kompressors 13 mit Fremdluft zu mischen. Hierdurch kann dann der zweite Kompressor 13 in einem optimalen Betriebspunkt betrieben werden, um einerseits eine ausreichend hohe Fördermenge über den zweiten Kompressor 13 zu führen und andererseits die Temperatur des über den zweiten Kompressor 13 geführten Mediums unterhalb eines Temperaturgrenzwerts zu halten.Then if, as in Fig. 2 As shown, both compressors 12, 13 are operated in series, the external air line valve 30 integrated in the second external air line 29 is preferably opened in order to mix the medium already passed through the first compressor 12 with external air upstream of the second compressor 13. As a result, the second compressor 13 can then be operated at an optimal operating point, on the one hand to lead a sufficiently high flow rate via the second compressor 13 and on the other hand to keep the temperature of the medium carried via the second compressor 13 below a temperature limit value.

Vorzugsweise wird im seriellen Betrieb der beiden Kompressoren 12, 13 das zweite Fremdluftleitungsventil 30 soweit geöffnet, dass ein Verhältnis V=F22/F29 zwischen dem Förderstrom F22 in der Verbindungsleitung 22 stromabwärts des Kompressors 12 und dem über die Fremdluftleitung 29 stromabwärts des Fremdluftleitungsventils 30 geführten Förderstrom F29 gilt: 0,9≤V≤2,0. Vorzugsweise gilt: 1,0≤V ≤1,7. Besonders bevorzugt gilt V=1,0.Preferably, in serial operation of the two compressors 12, 13, the second external air line valve 30 is opened to such an extent that a ratio V = F 22 / F 29 between the delivery flow F 22 in the connecting line 22 downstream of the compressor 12 and that via the external air line 29 downstream of the external air line valve 30 guided flow rate F 29, the following applies: 0.9≤V≤2.0. The following preferably applies: 1.0 V 1.7. Particularly preferably, V = 1.0 applies.

Zur Bereitstellung eines Kompressor-Schutzes für die Kompressoren 12, 13 ist es möglich, dass die Fremdluftleitungsventile 28 und 30 abhängig von der Leistungsaufnahme der den jeweiligen Kompressor 12, 13 antreibenden elektrischen Maschine 14, 16 angesteuert werden.To provide compressor protection for the compressors 12, 13, it is possible for the external air line valves 28 and 30 to be activated depending on the power consumption of the electrical machine 14, 16 driving the respective compressor 12, 13.

Ist zum Beispiel die elektrische Leistungsaufnahme der den ersten Kompressor 12 antreibenden elektrischen Maschine 14 zu gering und kleiner als entsprechender Grenzwert, so wird zum Kompressor-Schutz vorzugsweise das Fremdluftleitungsventil 28 geöffnet, um über den Kompressor 12 stets eine ausreichend große Fördermenge zu führen. Analog wird dann, wenn die Leistungsaufnahme der den zweiten Kompressor 13 antreibenden zweiten elektrischen Maschine 16 kleiner als ein entsprechender Grenzwert ist, das Fremdluftleitungsventil 30 geöffnet, um über den zweiten Kompressor 13 stets eine ausreichend große Luftmenge zu führen.For example, if the electrical power consumption of the electrical machine 14 driving the first compressor 12 is too low and less than the corresponding limit value, the external air line valve 28 is preferably opened to protect the compressor in order to always lead a sufficiently large delivery rate via the compressor 12. Similarly, when the power consumption of the second electrical machine 16 driving the second compressor 13 is less than a corresponding limit value, the external air line valve 30 is opened in order to always lead a sufficiently large amount of air via the second compressor 13.

Ferner kann zum Motor-Schutz der den jeweiligen Kompressor 12, 13 antreibenden elektrischen Maschine 13, 14 eine Ansteuerung der Zulaufleitungsventile 23, 24 abhängig von der Leistungsaufnahme der Kompressoren 12, 13 erfolgen.Furthermore, in order to protect the motor of the electrical machine 13, 14 driving the respective compressor 12, 13, the feed line valves 23, 24 can be controlled depending on the power consumption of the compressors 12, 13.

Ist zum Beispiel die Leistungsaufnahme vom ersten Kompressor 12 antreibenden elektrischen Maschine 14 zu groß, also größer als ein entsprechender Grenzwert, so kann das erste Zulaufleitungsventil 23 stärker geschlossen werden, um einen Motor-Schutz für die elektrische Maschine 14 bereitzustellen. Auf analoge Weise kann dann, wenn die Leistungsaufnahme der den zweiten Kompressor 13 antreibenden zweiten elektrischen Maschine 16 zu groß ist, das zweite Zulaufleitungsventil 24 stärker geschlossen werden, um einen Motor-Schutz für die elektrische Maschine 16 des zweiten Kompressors 13 bereitzustellen.If, for example, the power consumption of the electrical machine 14 driving the first compressor 12 is too great, that is to say greater than a corresponding limit value, the first inlet line valve 23 can be closed more strongly in order to provide motor protection for the electrical machine 14. In an analogous manner, if the power consumption of the second electrical machine 16 driving the second compressor 13 is too great, the second feed line valve 24 can be closed more strongly in order to provide motor protection for the electrical machine 16 of the second compressor 13.

Der Kompressor-Schutz sowie der Motor-Schutz sind von Vorteil, um eine Beschädigung der Kompressoren 12, 13 sowie der elektrischen Maschinen 14, 16 im Evakuierungsbetrieb zu vermeiden.The compressor protection and the motor protection are advantageous in order to avoid damage to the compressors 12, 13 and the electrical machines 14, 16 during evacuation operation.

Wie bereits ausgeführt, erfolgt eine anfängliche Evakuierung des Prozessraums 11 bis zu einem Druckgrenzwert im Parallel-Betrieb der beiden Kompressoren 12, 13 (siehe Fig. 1). Mit Erreichen oder Unterschreiten des Druckgrenzwerts wird vom Parallel-Betrieb der Kompressoren 12, 13 auf den Seriell-Betrieb der Kompressoren 12, 13 (siehe Fig. 2) gewechselt, um eine noch stärkere Evakuierung des Prozessraums 12 zu ermöglichen.As already stated, the process space 11 is initially evacuated up to a pressure limit value in parallel operation of the two compressors 12, 13 (see FIG Fig. 1 ). When the pressure limit value is reached or not reached, the parallel operation of the compressors 12, 13 switches to serial operation of the compressors 12, 13 (see Fig. 2 ) changed in order to enable an even greater evacuation of the process space 12.

Bei den beiden Kompressoren 12, 13 kann es sich um Radialkompressoren handeln.The two compressors 12, 13 can be radial compressors.

Dazu ist es zum Beispiel möglich, Radialkompressoren zu nutzen, die eine Fördermenge von 1400 m3/min bereitstellen können.For this purpose, it is possible, for example, to use radial compressors that can provide a flow rate of 1400 m 3 / min.

Beim Parallel-Betrieb der beiden Kompressoren 12, 13 kann dann von denslebne zusammen eine Fördermenge von 2800 m3/min aus dem Prozessraum 11 evakuiert werden. Dies erfolgt vorzugsweise bis zum Erreichen eines Druckgrenzwerts, der zum Beispiel bei -63 kPa liegt.When the two compressors 12, 13 are operated in parallel, a total delivery rate of 2800 m 3 / min can then be evacuated from the process space 11 by them. This is preferably done until a pressure limit value is reached, which is, for example, -63 kPa.

Mit Unterschreiten dieses Druckgrenzwerts von -63 kPa wird dann vom Parallelbetrieb auf den Seriell-Betrieb der beiden Kompressoren umgeschaltet, um zum Beispiel den Prozessraum 11 bis zu einem Druck von -85 kPa zu evakuieren. Im Seriell-Betrieb steht dann selbstverständlich eine kleinere Fördermenge als im Parallel-Betrieb zur Verfügung.When the pressure falls below this limit value of -63 kPa, the two compressors are switched from parallel operation to serial operation in order, for example, to evacuate the process space 11 to a pressure of -85 kPa. In serial operation, of course, a smaller delivery rate is available than in parallel operation.

Es sei darauf hingewiesen, dass die obigen Zahlenbeispiele lediglich der Illustration dienen und rein exemplarischer Natur sind.It should be noted that the above numerical examples are only used for illustration and are purely exemplary in nature.

Das erfindungsgemäße System sowie das erfindungsgemäße Verfahren wird vorzugsweise zur Evakuierung relativ großer Prozessräume 11 mit einem Volumen mehr als 10000 m3, insbesondere von mehr als 20000 m3, genutzt. Bei derartigen Prozessräumen kann es sich zum Beispiel um Transportröhren mit einem Durchmesser von mehr als 2 m und einer Länge von mehr als 1 km handeln.The system according to the invention and the method according to the invention are preferably used for evacuating relatively large process spaces 11 with a volume of more than 10,000 m 3 , in particular more than 20,000 m 3 . Such process spaces can be, for example, transport tubes with a diameter of more than 2 m and a length of more than 1 km.

Wie bereits ausgeführt, bilden die beiden Kompressoren 11, 12 eine Kompressor-Gruppe. Es können mehrere solche Kompressor-Gruppen vorhanden sein und jede Kompressor-Gruppen auf die oben beschriebene Art und Weise betrieben werden.As already stated, the two compressors 11, 12 form a compressor group. There can be several such compressor groups and each compressor group can be operated in the manner described above.

BezugszeichenlisteList of reference symbols

1010
Systemsystem
1111
ProzessraumsProcess space
1212th
Kompressorcompressor
1313th
Kompressorcompressor
1414th
elektrische Maschineelectric machine
1515th
Getriebetransmission
1616
elektrische Maschineelectric machine
1717th
Getriebetransmission
1818th
ZulaufleitungFeed line
1919th
ZulaufleitungFeed line
2020th
AblaufleitungDrain line
2121st
AblaufleitungDrain line
2222nd
VerbindungsleitungConnecting line
2323
ZulaufleitungsventilInlet line valve
2424
ZulaufleitungsventilInlet line valve
2525th
AblaufleitungsventilDrain line valve
2626th
VerbindungsleitungsventilConnecting line valve
2727
FremdluftleitungExternal air line
2828
FremdluftleitungsventilExternal air line valve
2929
FremdluftleitungExternal air line
3030th
FremdluftleitungsventilExternal air line valve
3131
DrucksensorPressure sensor
3232
DrucksensorPressure sensor

Claims (7)

  1. A system (10) for evacuating a process space (11),
    having a first compressor (12), which can be coupled via a first inflow line (18) to the process space (11) and from which, via a first outflow line (20), medium taken from the process space (11) can be discharged into the surroundings,
    having a second compressor (13), which via a second inflow line (19) can be coupled to the process space (11) and from which, via a second outflow line (21), medium taken from the process space (11) can be discharged into the surroundings,
    having a connecting line (22) connected between the first outflow line (20) and the second inflow line (10),
    having a first inflow line valve (23) integrated in the first inflow line (18),
    having a second inflow line valve (24) integrated in the second inflow line (19),
    having a first outflow line valve (25) integrated in the first outflow line (20),
    having a connecting line valve (26) integrated in the connecting line (22),
    wherein in particular when the first inflow line valve (23), the second inflow line valve (24) and the first outflow line valve (25) are all open and the connecting line valve (26) is closed, the first compressor (12) and the second compressor (13) can be operated in parallel,
    wherein in particular when the first inflow line valve (23) and the connecting line valve (26) are both open and the second inflow line valve (24) and the first outflow line valve (25) are both closed, the first compressor (12) and the second compressor (13) can be operated in series, characterized in that
    the first inflow line (18) is assigned a first pressure sensor (31) and the second inflow line (19) a second pressure sensor (32),
    wherein the second inflow line valve (24), the first outflow line valve (25) and the connecting line valve (26) can all be controlled dependent on measurement values of the two pressure sensors (31, 32).
  2. The system according to Claim 1, characterized by
    a first external air line (27) leading to the first compressor (12), in which a first external air line valve (28) is integrated,
    a second external air line (29) leading to the second compressor (13), in which a second external air line valve (30) is integrated,
    wherein the first external air line valve (28) and the second external air line valve (30) can be controlled dependent on operating conditions of the first compressor (12) and of the second compressor (13).
  3. The system according to Claim 1 or 2, characterized in that the first inflow line valve (23) and the second inflow line valve (24) can be controlled dependent on operating conditions of the first compressor (12) and of the second compressor (13).
  4. A method for evacuating a process space (11),
    wherein the process space (11) is evacuated initially up to a pressure limit value using two compressors (12, 13) operated in parallel,
    wherein subsequently the process space (11) is evacuated after the pressure limit value has been reached or undershot, using the two compressors (12, 13) now operated in series, wherein the same is carried out using a system according to any one of the Claims 1 to 3,
    wherein in particular when the two compressors (12, 13) are operated in parallel, the first inflow line valve (23), the second inflow line valve (24) and the first outflow line valve (25) are all open and the connecting line valve (26) is closed,
    wherein in particular when the two compressors (12, 13) are operated in series, the first inflow line valve (23) and the connecting line valve (26) are both open and the second inflow line valve (24) and the first outflow line valve (25) are both closed,
    characterized in that the parallel operation of the two compressors (12, 13) is changed to the series operation of the two compressors (12, 13), in particular when the first pressure sensor (31) and the second pressure sensor (32) both supply a pressure measurement value each that is smaller or equal to the pressure limit value.
  5. The method according to Claim 4, characterized in that in particular when the two compressors (12, 13) are operated in series, the second external air line valve (30) is opened in order to mix the medium already conducted via the first compressor (12) with external air upstream of the second compressor (13).
  6. The method according to Claim 5, characterized in that the second external air line valve (30) is opened so far that a ratio between the flow rate in the connecting line (22) downstream of the first compressor (12) and the flow rate in the external air line (29) downstream of the external air line valve (30) is between 0.9 and 2.0.
  7. The method according to any one of the Claims 4 to 6, characterized in that
    for the compressor protection of the compressors (12, 13), dependent on the power consumption of an electric machine (14, 16) driving the respective compressor (12, 13), an external air line valve (28, 30) interacting with the respective compressor (12, 13) is controlled, and/or
    for the motor protection of the electric machine (14, 16) driving the respective compressor (12, 13), depending on the power consumption of the electric machine (14, 16) driving the respective compressor (12, 13), an inflow line valve (23, 24) interacting with the respective compressor (12, 13) is controlled.
EP19217906.7A 2019-01-24 2019-12-19 System and method for evacuating a process room Active EP3686430B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102019101769.6A DE102019101769A1 (en) 2019-01-24 2019-01-24 System and method for evacuating a process room

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EP3686430A1 EP3686430A1 (en) 2020-07-29
EP3686430B1 true EP3686430B1 (en) 2021-07-14

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US (1) US11473573B2 (en)
EP (1) EP3686430B1 (en)
CN (1) CN111502955B (en)
DE (1) DE102019101769A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11346348B2 (en) * 2019-09-04 2022-05-31 Advanced Flow Solutions, Inc. Liquefied gas unloading and deep evacuation system
GB2613287B (en) * 2020-08-26 2024-07-03 Tpe Midstream Llc Configurable fluid compression apparatus, control, and associated methods

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Publication number Priority date Publication date Assignee Title
DE8105492U1 (en) * 1981-02-27 1981-08-20 Elektro-Mechanik Gmbh, 5963 Wenden PNEUMOHYDRAULIC SUPPLY UNIT WITH A POWER-GENERATING ENGINE
DE29719775U1 (en) * 1996-12-11 1998-02-05 SGI-Prozesstechnik GmbH, 63674 Altenstadt Pressure change system for extracting oxygen from the air
US7107972B1 (en) * 2004-08-03 2006-09-19 Accessible Technologies, Inc. Multi-phase centrifugal supercharging air induction system
US7179062B1 (en) * 2005-10-21 2007-02-20 Drevitson Kyle C Integrated shop vacuum and air compressor system
GB0525517D0 (en) * 2005-12-15 2006-01-25 Boc Group Plc Apparatus for detecting a flammable atmosphere
GB201005459D0 (en) * 2010-03-31 2010-05-19 Edwards Ltd Vacuum pumping system
DE102010026648B4 (en) * 2010-07-09 2015-12-31 Gea Grasso Gmbh Refrigeration system for cooling a container
JP6078750B2 (en) * 2013-11-26 2017-02-15 オリオン機械株式会社 Suction system
CN104405637A (en) * 2014-12-18 2015-03-11 淄博昊驰泵业有限公司 Vacuum scroll compressor
CN106762538B (en) * 2017-03-29 2019-08-27 山东钢铁集团日照有限公司 Large-scale dry-type mechanical vacuum system intermediate pump stacks arrangement and replacing options

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EP3686430A1 (en) 2020-07-29
US20200240405A1 (en) 2020-07-30
US11473573B2 (en) 2022-10-18
CN111502955A (en) 2020-08-07
CN111502955B (en) 2023-06-06
DE102019101769A1 (en) 2020-07-30

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