EP3670004A1 - Ultraschall-signalwandler mit schwingungsmembran mit kapazitivem breitbandeffekt - Google Patents

Ultraschall-signalwandler mit schwingungsmembran mit kapazitivem breitbandeffekt Download PDF

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Publication number
EP3670004A1
EP3670004A1 EP19218531.2A EP19218531A EP3670004A1 EP 3670004 A1 EP3670004 A1 EP 3670004A1 EP 19218531 A EP19218531 A EP 19218531A EP 3670004 A1 EP3670004 A1 EP 3670004A1
Authority
EP
European Patent Office
Prior art keywords
membrane
ultrasonic transducer
vibrating membrane
conductive element
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19218531.2A
Other languages
English (en)
French (fr)
Inventor
Anne Ghis
Marc Delaunay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP3670004A1 publication Critical patent/EP3670004A1/de
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B06B1/0261—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken from a transducer or electrode connected to the driving transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/50—Application to a particular transducer type
    • B06B2201/51—Electrostatic transducer

Definitions

  • the invention relates to acoustic transducers in the ultrasound range, and in particular such transducers with a vibrating membrane with capacitive effect.
  • an acoustic wave is generated by the movement of a moving surface.
  • the acoustic intensity of the source is equal to the impedance of the medium multiplied by the square of the speed of the moving surface. For a given frequency, the greater the amplitude of the movements of the movable surface of the transducer, the more intense the source.
  • Ultrasonic transducers are therefore generally associated with an optimal operating frequency which is determined by the resonance of their membrane.
  • the quality coefficient of the mechanical resonator including the membrane determines the bandwidth of the transducer.
  • a bandwidth is conventionally defined by the frequencies corresponding to a halving of the acoustic intensity with respect to the resonance, on either side of this resonance frequency.
  • the widest bandwidths can be of the same order of magnitude as the resonance frequency: for example, a 1MHz resonant frequency transducer with a bandwidth of 600kHz, i.e. a bandwidth of 700kHz to 1300kHz, is considered to be a broadband transducer. Outside the bandwidth, the amplitudes of vibration can be several orders of magnitude lower than the amplitudes at resonance.
  • the invention also relates to the variants of the dependent claims. Those skilled in the art will understand that each of the features of the dependent claims and the description can be combined independently with the features of an independent claim, without constituting an intermediate generalization.
  • the object's resonant frequency is the quadratic sum of the resonant frequencies governed by each of these two behaviors.
  • the excitation circuit 2 is configured to apply between its terminals a signal such as the ratio between the total electric power applied between these terminals and the electric power applied over a frequency range between 0.9 ⁇ fr and 1.1 ⁇ fr is at least equal to 10. Thus, most of the excitation power is applied outside the resonance range.
  • the membrane 11 includes a conductive layer
  • the embodiment which follows describes a membrane 11 including a combination of a conductive layer and a layer chosen for its mechanical properties: the electrode 102 can be dispensed with by direct connection of a circuit to the conductive layer. This corresponds to the example of the figure 6 , using the membrane 11 described with reference to the figure 5 .
  • the figure 5 is a schematic sectional view along a horizontal plane of a matrix of ultrasonic transducers 1 according to the embodiment of the figure 4 .
  • the transducers can be arranged in a matrix of 500 by 500 transducers 1 along two perpendicular axes.
  • a corresponding matrix of cavities 14 is thus formed in a common layer of dielectric 132.
  • the cavities 14 of the same column of transducers 1 are placed in communication via conduits 109.
  • the transducers 1 are placed in communication with the outside by conduits 104.
  • each transducer 1 has its cavity in communication with the external face of its membrane via conduits 104 and 109 if necessary.
  • the same membrane 11 can be used to cover all of the cavities 14.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)
EP19218531.2A 2018-12-23 2019-12-20 Ultraschall-signalwandler mit schwingungsmembran mit kapazitivem breitbandeffekt Withdrawn EP3670004A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1874085A FR3090421B1 (fr) 2018-12-23 2018-12-23 Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante

Publications (1)

Publication Number Publication Date
EP3670004A1 true EP3670004A1 (de) 2020-06-24

Family

ID=67742485

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19218531.2A Withdrawn EP3670004A1 (de) 2018-12-23 2019-12-20 Ultraschall-signalwandler mit schwingungsmembran mit kapazitivem breitbandeffekt

Country Status (3)

Country Link
US (1) US11039255B2 (de)
EP (1) EP3670004A1 (de)
FR (1) FR3090421B1 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005001A1 (en) * 1998-07-23 2000-02-03 The Secretary Of State For Defence Method of manufacturing a capacitive ultrasound transducer
US20110026367A1 (en) * 2007-05-07 2011-02-03 Baumer Electric Ag Acoustic Transducer
WO2012010786A2 (fr) 2010-07-23 2012-01-26 Universite De Tours Francois Rabelais PROCEDE ET DISPOSITIF DE GENERATION D'ULTRASONS METTANT EN OEUVRE DES cMUTs, ET PROCEDE ET SYSTEME D'IMAGERIE MEDICALE.
US20170260041A1 (en) * 2016-03-10 2017-09-14 Commissariat à l'énergie atomique et aux énergies alternatives Membrane of amorphous carbon and mems including such a membrane

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005001A1 (en) * 1998-07-23 2000-02-03 The Secretary Of State For Defence Method of manufacturing a capacitive ultrasound transducer
US20110026367A1 (en) * 2007-05-07 2011-02-03 Baumer Electric Ag Acoustic Transducer
WO2012010786A2 (fr) 2010-07-23 2012-01-26 Universite De Tours Francois Rabelais PROCEDE ET DISPOSITIF DE GENERATION D'ULTRASONS METTANT EN OEUVRE DES cMUTs, ET PROCEDE ET SYSTEME D'IMAGERIE MEDICALE.
US20130116568A1 (en) * 2010-07-23 2013-05-09 Universite De Tours Francois Rabelais Method and device for generating ultrasounds implementing cmuts, and method and system for medical imaging
US20170260041A1 (en) * 2016-03-10 2017-09-14 Commissariat à l'énergie atomique et aux énergies alternatives Membrane of amorphous carbon and mems including such a membrane

Also Published As

Publication number Publication date
US20200374636A1 (en) 2020-11-26
FR3090421A1 (fr) 2020-06-26
US11039255B2 (en) 2021-06-15
FR3090421B1 (fr) 2020-12-25

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