EP3613873B1 - Dynamically impacting method for simultaneously peening and film-forming on substrate as bombarded by metallic glass particles - Google Patents

Dynamically impacting method for simultaneously peening and film-forming on substrate as bombarded by metallic glass particles Download PDF

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Publication number
EP3613873B1
EP3613873B1 EP19192330.9A EP19192330A EP3613873B1 EP 3613873 B1 EP3613873 B1 EP 3613873B1 EP 19192330 A EP19192330 A EP 19192330A EP 3613873 B1 EP3613873 B1 EP 3613873B1
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Prior art keywords
metallic glass
substrate
glass particles
film
pressure
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EP19192330.9A
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German (de)
French (fr)
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EP3613873C0 (en
EP3613873A1 (en
Inventor
Kuan-Wei Chen
Jason Shian Ching JANG
Po-Jen Wei
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Taichi Metal Material Technology Co Ltd
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Taichi Metal Material Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/02Coating starting from inorganic powder by application of pressure only
    • C23C24/04Impact or kinetic deposition of particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/08Metallic powder characterised by particles having an amorphous microstructure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/115Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by spraying molten metal, i.e. spray sintering, spray casting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/08Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools with one or more parts not made from powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/002Making metallic powder or suspensions thereof amorphous or microcrystalline
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/10Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for compacting surfaces, e.g. shot-peening
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D7/00Modifying the physical properties of iron or steel by deformation
    • C21D7/02Modifying the physical properties of iron or steel by deformation by cold working
    • C21D7/04Modifying the physical properties of iron or steel by deformation by cold working of the surface
    • C21D7/06Modifying the physical properties of iron or steel by deformation by cold working of the surface by shot-peening or the like
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/02Coating starting from inorganic powder by application of pressure only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/06Metallic powder characterised by the shape of the particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/0848Melting process before atomisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00Treatment under specific atmosphere
    • B22F2201/20Use of vacuum
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C2200/00Crystalline structure
    • C22C2200/02Amorphous

Definitions

  • US 8,323,729 to Inoue et al. disclosed a process for producing a metal member comprising a shot peening treatment, including projecting particles onto the surface of a metal material comprising an aluminum alloy using compressed gas to provide fatigue strength properties of the metal member; and a chemical conversion treatment including forming a film on the surface of the metal material by performing a chemical conversion treatment following the shot peening treatment, to provide corrosion resistance of the metal member.
  • Patent documents US 4552784 A , US 2006 166020 A1 , US 2010 279023 A , JP 4677050B1 and CN 105 112 905 B also describe similar processes for making a coating of a metallic glass material by a dynamic impact coating methods.
  • the present inventor has found the drawbacks of the conventional method, and invented a new dynamic impacting method for simultaneously peening and film-forming on a substrate of a work piece or structural object.
  • the object of the present invention is to provide a dynamic impacting method for a substrate surface.
  • a method according to claim 1 is provided. We find that the method can increase the surface hardness, fatigue resistance, fracture strength and corrosion resistance of the substrate simultaneously.
  • particles of metallic glass are provided for shot peening and film-forming on a substrate of metal or metal alloy e.g. of a work piece or an engineering structural object.
  • the process steps of the present invention comprise:
  • a raw material of metallic glass or amorphous metal alloy is prepared by adjusting a proper atomic percentage of the elements forming the metallic glass.
  • the raw material of metallic glass is then put into a vacuum furnace for melting the metallic glass and then quickly cooled and atomized such as by high-speed fluid or gas to produce metallic glass particles.
  • the metallic glass particles are then collected and classified into several grades, for instance, a particle size of 5 ⁇ 10 ⁇ m, 10-20 ⁇ m, 20-50 ⁇ m, 50-100 ⁇ m or 100-300 ⁇ m.
  • a particle size of 5 ⁇ 10 ⁇ m, 10-20 ⁇ m, 20-50 ⁇ m, 50-100 ⁇ m or 100-300 ⁇ m.
  • the metallic glass particles 1 are bombarded against a surface of the substrate 2 as shown in Fig. 1 .
  • the metallic glass particles are ejected through a nozzle or gun 11 driven by a compressed gas, desirably being or including argon, to dynamically bombard the substrate surface and thereby harden and smoothen the corrugated or rough substrate surface.
  • the substrate 2 has its upper surface portion hardened to be a hardening zone 21 as shown in Fig. 2 . Since the metallic glass particles 1 are continuously bombarded on the substrate surface, the above-mentioned corrugated or rough surface will then be smoothened by the further bombardment of metallic glass particles, forming a metallic glass thin film 10 over the hardening zone 21.
  • the hardened zone 21 can increase the hardness, fatigue resistance and fracture toughness of the substrate according to known principles, while the metallic glass thin film 10 may further increase the corrosion resistance of the substrate.
  • the described process of this invention can increase the hardness and the corrosion resistance simultaneously, rather than by the two-steps as disclosed in the prior art of US 8,323,729 as early depicted in the "Background of the Invention" of the Specification.
  • the bombardment of metallic glass particles on the substrate is further divided into two sub-steps.
  • the two sub-steps are an initial bombardment at a higher pressure for hardening the surface, in accordance with known principles, and whereby the resulting treated surface is generally roughened, and a subsequent bombardment at a lower pressure whereby the metallic glass particles combine or coalesce to form a smoother film over the roughened substrate surface.
  • the two sub-steps are as follows.
  • the metallic glass particles are bombarded against the substrate surface at a speed of at least 10 meters/second, e.g. as driven by compressed gas (such as argon gas) under a high pressure of 5-15 bars to obtain a hardened but rough substrate surface.
  • compressed gas such as argon gas
  • the metallic glass particles are further bombarded against the substrate surface by a compressed gas under a lower pressure, of 0.1-5 bars to obtain a smooth and shiny substrate surface, similar to a polishing surface.
  • the finished surface of the substrate may have hardened zone 21 and metallic glass thin film layer 10 for enhancing both hardness and corrosion resistances to be superior to the prior art.
  • the present invention can provide the following advantages over the prior art and conventional shot peening.
  • the bombardment of the metallic glass particles on the substrate surface it may render the substrate surface to be corrosion resistant in addition to the increasing of hardness, the fatigue resistance and the fracture strength.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)

Description

    BACKGROUND
  • US 8,323,729 to Inoue et al. disclosed a process for producing a metal member comprising a shot peening treatment, including projecting particles onto the surface of a metal material comprising an aluminum alloy using compressed gas to provide fatigue strength properties of the metal member; and a chemical conversion treatment including forming a film on the surface of the metal material by performing a chemical conversion treatment following the shot peening treatment, to provide corrosion resistance of the metal member.
  • In order to enable both fatigue resistance properties and corrosion resistance of the metal member, it requires two steps, namely, a first shot peening on the metal surface and then a further chemical conversion treatment for forming a protective film on the shot-peened surface.
  • So, it is a complex surface treatment with increased production cost of the metal member.
  • Patent documents US 4552784 A , US 2006 166020 A1 , US 2010 279023 A , JP 4677050B1 and CN 105 112 905 B also describe similar processes for making a coating of a metallic glass material by a dynamic impact coating methods.
  • The present inventor has found the drawbacks of the conventional method, and invented a new dynamic impacting method for simultaneously peening and film-forming on a substrate of a work piece or structural object.
  • THE INVENTION
  • The object of the present invention is to provide a dynamic impacting method for a substrate surface. According to an aspect of the present invention, a method according to claim 1 is provided. We find that the method can increase the surface hardness, fatigue resistance, fracture strength and corrosion resistance of the substrate simultaneously.
  • BRIEF DESCRIPTION OF THE DRAWINGS
    • Fig. 1 is a schematic illustration showing a dynamic impacting method as performed in the present invention.
    • Fig. 2 is a sectional illustration showing the surface of a treated substrate obtained in accordance with the method and embodying the present invention.
    DETAILED DESCRIPTION
  • In accordance with the present invention, particles of metallic glass are provided for shot peening and film-forming on a substrate of metal or metal alloy e.g. of a work piece or an engineering structural object.
  • The process steps of the present invention comprise:
  • 1. Preparation of Metallic Glass particles
  • A raw material of metallic glass or amorphous metal alloy is prepared by adjusting a proper atomic percentage of the elements forming the metallic glass.
  • The raw material of metallic glass is then put into a vacuum furnace for melting the metallic glass and then quickly cooled and atomized such as by high-speed fluid or gas to produce metallic glass particles.
  • The metallic glass particles are then collected and classified into several grades, for instance, a particle size of 5~10 µm, 10-20 µm, 20-50 µm, 50-100 µm or 100-300 µm. The smaller the particle size, in general the finer and denser the peened surface on the substrate will be.
  • 2. Bombardment of the Metallic Glass particles on the substrate
  • The metallic glass particles 1 are bombarded against a surface of the substrate 2 as shown in Fig. 1. The metallic glass particles are ejected through a nozzle or gun 11 driven by a compressed gas, desirably being or including argon, to dynamically bombard the substrate surface and thereby harden and smoothen the corrugated or rough substrate surface.
  • Substantially, the substrate 2 has its upper surface portion hardened to be a hardening zone 21 as shown in Fig. 2. Since the metallic glass particles 1 are continuously bombarded on the substrate surface, the above-mentioned corrugated or rough surface will then be smoothened by the further bombardment of metallic glass particles, forming a metallic glass thin film 10 over the hardening zone 21.
  • By means of this processing, the hardened zone 21 can increase the hardness, fatigue resistance and fracture toughness of the substrate according to known principles, while the metallic glass thin film 10 may further increase the corrosion resistance of the substrate. Comparatively, the described process of this invention can increase the hardness and the corrosion resistance simultaneously, rather than by the two-steps as disclosed in the prior art of US 8,323,729 as early depicted in the "Background of the Invention" of the Specification.
  • The bombardment of metallic glass particles on the substrate is further divided into two sub-steps. The two sub-steps are an initial bombardment at a higher pressure for hardening the surface, in accordance with known principles, and whereby the resulting treated surface is generally roughened, and a subsequent bombardment at a lower pressure whereby the metallic glass particles combine or coalesce to form a smoother film over the roughened substrate surface. The two sub-steps are as follows.
  • A. High-Pressure Bombardment
  • The metallic glass particles are bombarded against the substrate surface at a speed of at least 10 meters/second, e.g. as driven by compressed gas (such as argon gas) under a high pressure of 5-15 bars to obtain a hardened but rough substrate surface.
  • B. Low-Pressure Bombardment
  • The metallic glass particles are further bombarded against the substrate surface by a compressed gas under a lower pressure, of 0.1-5 bars to obtain a smooth and shiny substrate surface, similar to a polishing surface.
  • We find that the above bombardments may rapidly superimposedly form thin films of metallic glass on the substrate surface, thereby forming a corrosion resistant surface with smooth and shiny appearance.
  • Therefore, the finished surface of the substrate may have hardened zone 21 and metallic glass thin film layer 10 for enhancing both hardness and corrosion resistances to be superior to the prior art.
  • By bombarding metallic glass particles on a 6061 aluminum alloy substrate, we have found a surface nano-hardness of 23.41 GPa (2212 Hv) which is greatly increased in comparison with the surface untreated by metallic glass bombardment - only 1.13 GPa, (107 Hv).
  • Meanwhile, after bombardment of the metallic glass particles on a high speed steel pitch mould surface, we found a surface nano-hardness increased from 7.06 GPa (667 Hv) to 22.03 GPa (2082 Hv). Furthermore, the treated surface was not corroded or rusty (i.e. did not form oxide layer) after exposure to the air for 3 weeks.
  • The present invention can provide the following advantages over the prior art and conventional shot peening.
    1. 1. The metallic glass particles may be formed as a true spherical shape to form a smooth polishing surface after bombardment.
    2. 2. The metallic glass particles have high fracture strength, not easily broken to damage the processing surface, and the particles may also be recycled for re-use.
    3. 3. The metallic glass particles have high hardness and density to thereby increase the bombarding effect when bombardment against the substrate to form a bombarded surface with increased hardness.
    4. 4. The metallic glass particles when striking the substrate will be partially melted due to frictional heat when impacting the substrate surface at high speed of 10 m/s or higher to a temperature higher than its glass transition temperature (Tg) so as to form a thin film of metallic glass to be adhered on the substrate surface, which will be instantly cooled to a room temperature to still keep its amorphous property. This is very important since such a metallic glass thin film as formed on the substrate surface will render a better corrosion resistance of the substrate of the work piece or structural object. A production cost may then be greatly reduced.
  • Conclusively, without further treatment for corrosion resistance, the bombardment of the metallic glass particles on the substrate surface, it may render the substrate surface to be corrosion resistant in addition to the increasing of hardness, the fatigue resistance and the fracture strength.

Claims (5)

  1. A method comprising:
    A. providing metallic glass particles (1), and
    B. bombarding the metallic glass particles (1) against the surface of a substrate (2) of metal or metal alloy, to harden the surface and to form thereon a film (10) of the metallic glass for increasing corrosion resistance of the surface,
    characterized in that step B comprises
    a high-pressure bombardment step, bombarding the metallic glass particles (1) at a speed of at least 10 meters/second driven by a high-pressure gas under a pressure from 5 bars to 15 bars, to form a hardened and roughened surface of the substrate (2), and
    a low-pressure bombardment step, further bombarding the metallic glass particles (1) driven by a low-pressure gas under a pressure from 0.1 bars to 5 bars, to form a smoother film (10) of metallic glass over said roughened substrate surface to form a smooth or shiny surface on said substrate (2).
  2. A method according to Claim 1 wherein said substrate is of steel or aluminum.
  3. A method according to Claim 1 or 2 wherein said gas for driving the metallic glass particles is argon.
  4. A method according to any one of Claims 1 to 3 wherein said metallic glass particles (1) are made by melting a metallic glass raw material in a vacuum furnace and then cooling and atomizing to form the metallic glass particles (1).
  5. A method according to Claim 4 wherein said metallic glass particles (1) obtained from said vacuum furnace are collected and classified into plural particle sizes for optional or selective uses.
EP19192330.9A 2018-08-23 2019-08-19 Dynamically impacting method for simultaneously peening and film-forming on substrate as bombarded by metallic glass particles Active EP3613873B1 (en)

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US16/111,176 US10883152B2 (en) 2018-08-23 2018-08-23 Dynamically impacting method for simultaneously peening and film-forming on substrate as bombarded by metallic glass particles

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EP3613873C0 EP3613873C0 (en) 2023-06-14
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JP (1) JP7437004B2 (en)
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US11780054B2 (en) * 2021-08-18 2023-10-10 Taichi Metal Material Technology Co., Ltd. Cutting method by using particle beam of metallic glass

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TW202019621A (en) 2020-06-01
CN110857468B (en) 2022-07-01
US10883152B2 (en) 2021-01-05
JP7437004B2 (en) 2024-02-22
JP2020076146A (en) 2020-05-21
US20200063226A1 (en) 2020-02-27
EP3613873C0 (en) 2023-06-14
CN110857468A (en) 2020-03-03
EP3613873A1 (en) 2020-02-26
TWI801646B (en) 2023-05-11

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