EP3607107A1 - Solution de précurseur pour former une couche d'oxyde métallique et procédé de revêtement d'un substrat par une couche d'oxyde métallique - Google Patents
Solution de précurseur pour former une couche d'oxyde métallique et procédé de revêtement d'un substrat par une couche d'oxyde métalliqueInfo
- Publication number
- EP3607107A1 EP3607107A1 EP18717525.2A EP18717525A EP3607107A1 EP 3607107 A1 EP3607107 A1 EP 3607107A1 EP 18717525 A EP18717525 A EP 18717525A EP 3607107 A1 EP3607107 A1 EP 3607107A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- metal oxide
- solution
- coating
- precursor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 85
- 239000002243 precursor Substances 0.000 title claims abstract description 74
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 73
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 70
- 239000000758 substrate Substances 0.000 title claims abstract description 65
- 239000011248 coating agent Substances 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 43
- 230000008569 process Effects 0.000 title abstract description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 67
- 229920002451 polyvinyl alcohol Polymers 0.000 claims abstract description 44
- 239000004372 Polyvinyl alcohol Substances 0.000 claims abstract description 43
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 28
- 238000000151 deposition Methods 0.000 claims abstract description 22
- 239000012702 metal oxide precursor Substances 0.000 claims abstract description 18
- 239000002245 particle Substances 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims description 39
- 239000002904 solvent Substances 0.000 claims description 35
- 239000010936 titanium Substances 0.000 claims description 23
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 22
- 229910052719 titanium Inorganic materials 0.000 claims description 22
- 238000009210 therapy by ultrasound Methods 0.000 claims description 20
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 19
- 238000001354 calcination Methods 0.000 claims description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 11
- 229910021626 Tin(II) chloride Inorganic materials 0.000 claims description 10
- 235000011150 stannous chloride Nutrition 0.000 claims description 10
- AXZWODMDQAVCJE-UHFFFAOYSA-L tin(II) chloride (anhydrous) Chemical group [Cl-].[Cl-].[Sn+2] AXZWODMDQAVCJE-UHFFFAOYSA-L 0.000 claims description 10
- 238000000137 annealing Methods 0.000 claims description 7
- GUNJVIDCYZYFGV-UHFFFAOYSA-K antimony trifluoride Chemical compound F[Sb](F)F GUNJVIDCYZYFGV-UHFFFAOYSA-K 0.000 claims description 7
- 239000012298 atmosphere Substances 0.000 claims description 7
- 238000010981 drying operation Methods 0.000 claims description 7
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 6
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 claims description 6
- 150000001462 antimony Chemical class 0.000 claims description 5
- 229910008433 SnCU Inorganic materials 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000001698 pyrogenic effect Effects 0.000 claims description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 3
- 229910017855 NH 4 F Inorganic materials 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims description 3
- YUOWTJMRMWQJDA-UHFFFAOYSA-J tin(iv) fluoride Chemical compound [F-].[F-].[F-].[F-].[Sn+4] YUOWTJMRMWQJDA-UHFFFAOYSA-J 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 2
- -1 tin fluoride (SnF2) Chemical class 0.000 claims description 2
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 125000001153 fluoro group Chemical class F* 0.000 claims 1
- 239000000243 solution Substances 0.000 description 88
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 57
- 239000010410 layer Substances 0.000 description 37
- 229910006404 SnO 2 Inorganic materials 0.000 description 12
- 239000002253 acid Substances 0.000 description 10
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 9
- 238000001035 drying Methods 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 7
- 238000003980 solgel method Methods 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 238000003618 dip coating Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000002562 thickening agent Substances 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 230000001351 cycling effect Effects 0.000 description 5
- 239000002270 dispersing agent Substances 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000011149 active material Substances 0.000 description 4
- 239000003570 air Substances 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 239000000499 gel Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000000527 sonication Methods 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- DAMJCWMGELCIMI-UHFFFAOYSA-N benzyl n-(2-oxopyrrolidin-3-yl)carbamate Chemical compound C=1C=CC=CC=1COC(=O)NC1CCNC1=O DAMJCWMGELCIMI-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910021485 fumed silica Inorganic materials 0.000 description 3
- YADSGOSSYOOKMP-UHFFFAOYSA-N lead dioxide Inorganic materials O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002105 nanoparticle Substances 0.000 description 3
- 235000006408 oxalic acid Nutrition 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000008119 colloidal silica Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000006056 electrooxidation reaction Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 150000002221 fluorine Chemical class 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000001453 impedance spectrum Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000005499 meniscus Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 239000002957 persistent organic pollutant Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- KEQXNNJHMWSZHK-UHFFFAOYSA-L 1,3,2,4$l^{2}-dioxathiaplumbetane 2,2-dioxide Chemical compound [Pb+2].[O-]S([O-])(=O)=O KEQXNNJHMWSZHK-UHFFFAOYSA-L 0.000 description 1
- ODNBVEIAQAZNNM-UHFFFAOYSA-N 1-(6-chloroimidazo[1,2-b]pyridazin-3-yl)ethanone Chemical compound C1=CC(Cl)=NN2C(C(=O)C)=CN=C21 ODNBVEIAQAZNNM-UHFFFAOYSA-N 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000004534 enameling Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 108010025899 gelatin film Proteins 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229920001206 natural gum Polymers 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 230000009974 thixotropic effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000002525 ultrasonication Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
- C23C18/1216—Metal oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1225—Deposition of multilayers of inorganic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1229—Composition of the substrate
- C23C18/1241—Metallic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1262—Process of deposition of the inorganic material involving particles, e.g. carbon nanotubes [CNT], flakes
- C23C18/127—Preformed particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1291—Process of deposition of the inorganic material by heating of the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1295—Process of deposition of the inorganic material with after-treatment of the deposited inorganic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/34—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing fluorides or complex fluorides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/73—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/73—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
- C23C22/74—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process for obtaining burned-in conversion coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/20—Other heavy metals
- C23G1/205—Other heavy metals refractory metals
Definitions
- the present invention relates to the formation of a metal oxide coating from a precursor solution.
- This type of coating finds particularly advantageous applications in the field of electrochemistry, for example in electrodes with electrocatalytic properties or in battery electrodes.
- the invention also applies to other very varied fields, since it is necessary to modify the surface properties of a substrate, such as hardness, adhesion, corrosion resistance, thermal protection, optical reflectivity, electrical conduction ...
- Dry processes include vacuum evaporation, chemical vapor deposition (CVD) or sputtering. These vapor phase or plasma processes however require the implementation of high temperatures (generally above 1000 ° C) and the use of refractory equipment, particularly expensive.
- the sol-gel process consists of preparing a liquid solution of precursor (s) called “sol” and depositing it on a substrate so as to form a solution film.
- the sol conventionally comprises a solvent, aqueous or organic (eg ethanol, propanol), and one or more metal oxide precursors (organometallic compounds, metal salts) in the molecular state dispersed in the solvent.
- a solvent e.g ethanol, propanol
- metal oxide precursors organometallic compounds, metal salts
- the international application WO2013 / 050557 gives an example of a sol-gel process for the preparation of a metal oxide, in particular yttrium-doped zirconia (YSZ) which serves as a solid electrolyte in certain fuel cells.
- the solution film may be deposited on the substrate in various ways, in particular by spraying, by spin coating, by laminar flow coating or by soaking-shrinking. ("Dip coating").
- the latter technique consists of immersing the substrate in the precursor soil and then removing it at a constant speed.
- the solution film adheres to the substrate by capillarity and has a thickness which depends in particular on the concentration of precursors in the solution and the rate of shrinkage.
- the sol-gel process however has several limitations related to the thickness of the metal oxide layers obtained, especially when it implements the soaking-shrinking technique. Indeed, it makes it difficult to achieve thicknesses greater than one micrometer. This process generally leads to maximum thicknesses of 250 nm in monolayer, making it impossible to obtain metal oxide layers with a thickness greater than 1 ⁇ without making several successive depositions.
- This process is, for example, employed in the document ["The preparation and characterization of a tinned oxide electrodes", L. Lipp et al., Electrochimica Acta, Vol. 42, No. 7, pp. 1091 -1099, 1997] for coating a titanium substrate with an antimony-doped tin dioxide (SnO 2) layer.
- the precursor solution contains tin tetrachloride (SnCU) in aqueous solution and antimony trichloride (SbC) dissolved in isopropanol.
- SnCU tin tetrachloride
- SBC antimony trichloride
- the film of the solution is dried at 90 ° C. to evaporate the excess isopropanol and then subjected to a calcination heat treatment at 500 ° C. under oxygen to convert the tin tetrachloride to dioxide tin.
- the titanium substrate coated with the tin dioxide layer is advantageously used as an electrocatalytic electrode
- This process also requires a large number of deposition-drying-calcination cycles to achieve a layer thickness greater than one micrometer. According to the aforementioned document, 24 cycles are necessary to obtain a layer of SnO2 with a thickness of between 2.2 ⁇ and 3.4 ⁇ . Such a number of cycles has the consequence of greatly increasing the manufacturing time and production costs of the coating.
- the aim of the invention is to reduce the costs and the time required to form a metal oxide coating with a thickness greater than 1 ⁇ on a substrate, by reducing the number of successive deposition of a metal oxide precursor solution. .
- this objective is pursued by proposing a precursor solution comprising at least one metal oxide precursor, polyvinyl alcohol (PVAL) and silica in the form of particles.
- PVAL polyvinyl alcohol
- polyvinyl alcohol and silica makes it possible to obtain a more viscous precursor solution than those used in the liquid phase processes of the prior art, and therefore to achieve, by a heat treatment-deposition cycle. a monolayer of metal oxide of greater thickness. The number of cycles necessary to wait for the desired thickness of the metal oxide coating is then decreased.
- a tin dioxide (SnO2) coating with a thickness of 2.5 ⁇ can be obtained in only 1 to 3 cycles, compared with 12 cycles for the sol-gel process. and about 24 cycles for the thermal decomposition process.
- thickening agents prevents the appearance of precipitates and the transformation of the solution into gel, which would intervene if only one of these thickeners was used in a higher concentration to reach the same viscosity.
- the precursor solution according to the first aspect of the invention may also have one or more of the following characteristics, considered individually or in any technically possible combination:
- the concentration of polyvinyl alcohol in the solution is between 10 g / l and 100 g / l;
- the concentration of silica in the solution is between 5 g / l and 50 g / l;
- the metal oxide precursor is dissolved in a solvent, preferably the water ;
- the polyvinyl alcohol is in the form of particles dissolved in the solvent
- the silica particles are dispersed in the solvent
- the precursor solution further comprises an antimony salt or a fluorine salt, such as tin fluoride (SnF2), antimony fluoride (SDF3) and ammonium fluoride (NH 4 F); dissolved in the solvent;
- an antimony salt or a fluorine salt such as tin fluoride (SnF2), antimony fluoride (SDF3) and ammonium fluoride (NH 4 F); dissolved in the solvent;
- the precursor solution further comprises polyethylene oxide
- the precursor solution further comprises hydrochloric acid
- the metal oxide precursor is tin dichloride or tin tetrachloride
- the silica is in a pyrogenic or colloidal form.
- the precursor solution according to the invention consists of one or more solvents, one or more precursors of metal oxide (s) dissolved in the solvent (s), of the polyvinyl alcohol (PVAL), silica in the form of particles (preferably fumed or colloidal silica) and hydrochloric acid (HCl).
- PVAL polyvinyl alcohol
- silica in the form of particles (preferably fumed or colloidal silica) and hydrochloric acid (HCl).
- HCl hydrochloric acid
- a second aspect of the invention relates to a method of coating a substrate with a metal oxide layer. This process comprises the following steps:
- a film of a precursor solution comprising a metal oxide precursor, polyvinyl alcohol and silica in the form of particles;
- the heat treatment comprises a drying operation, so as to at least partially evaporate a solvent of the precursor solution, and a calcination operation under an oxygen-containing atmosphere to convert the precursor of metal oxide to metal oxide and remove the polyvinyl alcohol.
- the drying operation is carried out at a temperature between 80 ° C and 200 ° C.
- the calcining operation is carried out at a temperature between 400 ° C and 550 ° C.
- the coating method according to the second aspect of the invention may also have one or more of the following characteristics, considered individually or in any technically possible combination:
- the method further comprises, after the heat treatment step, a step of ultrasonic treatment of the metal oxide layer;
- the method further comprises, after the heat treatment step, a step of annealing the metal oxide layer at a temperature of between 400 ° C. and 500 ° C .;
- the deposition and heat treatment steps are carried out cyclically 2 to 4 times;
- the step of depositing the solution film is performed by dipping-withdrawal, centrifugal coating, laminar coating or doctor coating;
- the substrate is a titanium current collector arranged in the form of a sheet, a fabric or a lattice of expanded metal.
- a third aspect of the invention relates to a substrate obtainable by the above coating method, said substrate being covered with a layer consisting essentially of a metal oxide, said layer further comprising silica in proportion mass (relative to the total mass of the layer) between 0.5% and 5%.
- FIG. 2 represents the steps of a coating method according to one aspect of the invention, for coating a substrate with a metal oxide layer;
- FIG. 3 illustrates a preferred embodiment of the coating method according to the invention, from a flexible titanium substrate
- FIG. 4 represents the thickness of several metal oxide coatings obtained in a first example of implementation of the method according to the invention
- FIGS. 5A-5D are scanning electron microscope images of one of the metal oxide coatings obtained in the first exemplary implementation
- Figs. 6A-6B are energy dispersive analysis spectra showing the composition of the metal oxide coating shown in Figs. 5A-5D;
- FIGS. 7A, 7B and 7C respectively represent the evolution of the charge and discharge capacitance, the load factor and the impedance spectrum during the cycling of a lead-acid battery cell, this cell comprising a titanium substrate coated with tin dioxide, according to the first example of implementation of the method according to the invention.
- FIG. 8 represents the current and the voltage of a lead-acid battery cell, during a discharge and then a charge, this cell comprising a titanium substrate coated with tin dioxide according to a third example of setting implementation of the method according to the invention.
- Figure 1 illustrates the general principle of dip-dip technique, which can be used to deposit a precursor solution.
- the substrate 10 is soaked in a bath 1 1 containing the precursor solution, and then removed at a constant speed from this bath by pulling it vertically.
- One of the specificities of this technique is that it covers both sides of the substrate 10 simultaneously.
- the zone 10a farthest from the surface of the bath 1 1, called the wetting zone is covered with a solution film 12.
- the zone 10b located in the immediate vicinity of the surface of the bath 1 1, said meniscus zone, is surrounded by a meniscus 13 of the solution.
- the thickness h of the solution film 12 in the wetting zone 10a is given by the Landau and Levich equation:
- ⁇ is the viscosity of the precursor solution
- v the rate of shrinkage of the substrate 10
- ⁇ the surface tension of the precursor solution
- p the density of the precursor solution
- g gravitational constant
- the higher the viscosity ⁇ of the precursor solution the greater the thickness h of the film 12 covering each face of the substrate 10.
- the thickness of the metal oxide coating obtained by heat treatment of the film 12 increases with the thickness h of the film.
- the inventors have therefore undertaken to increase the viscosity ⁇ of the precursor solution, while preserving its chemical stability. They did this by adding two thickening agents to the precursor solution: polyvinyl alcohol (PVAL) and silica in particulate form. These thickeners are, unlike many others (eg carboxymethylcellulose, polyacrylic acid, gelatin, natural gum), chemically compatible with metal oxide precursors.
- the precursor solution (s) according to the invention comprises at least one solvent, preferably water, and one or more precursors of metal oxide (s) dissolved in the solvent.
- the viscosity of pure water is about 0.9 mPa.s.
- the viscosity of the solution is of the order of 1 -2 mPa.s.
- a single metal oxide precursor such as tin dichloride (SnCl 2) (precursor of tin dioxide)
- the viscosity of the solution is of the order of 1 -2 mPa.s.
- PVAL polyvinyl alcohol
- silica in a concentration of between 5 g / l and 50 g / l
- the viscosity of the solution is reaches a value between 10 mPa.s and 5000 mPa.s.
- the polyvinyl alcohol and the silica are preferably placed in solution, independently of one another, before being introduced into the precursor solution.
- Polyvinyl alcohol is a polymer that is generally in the form of a particle powder. These particles are thus dissolved in a solvent, preferably water, to form a (aqueous) solution of polyvinyl alcohol.
- the OH groups thus formed coordinate the metal ions (for example Sn (II) in the case of SnCl2) from the dissolution of the precursor and act as a catalyst for the metal oxide during the heat treatment.
- the aqueous solution of polyvinyl alcohol advantageously replaces the organic solvent (eg ethanol, propanol), which is the source of the OH groups in the metal oxide precursor solutions of the prior art. It is especially more economical.
- the silica is advantageously in the form of a powder of particles of nanometric dimensions, or "nanoparticles". Nanoparticles are particles with dimensions less than 100 nm.
- the silica is in a pyrogenic form (f-SiO 2, for "fumed silica” in English) or colloidal.
- the diameter of the (nano) silica particles is preferably between 5 nm and 60 nm.
- the pyrogenic form differs from the colloidal form by (in addition to the method of obtaining) the size (diameter) of the particles: 5 nm to 10 nm for the fumed silica and 40 nm to 60 nm for the colloidal silica.
- the silica particles are preferably dispersed in a liquid medium, ie a dispersant, to form a suspension colloidal high viscosity.
- the solvent of the polyvinyl alcohol solution and the dispersant of the colloidal suspension are preferably of the same nature as the solvent in which the (or) metal oxide precursor (s) is dissolved.
- the final precursor solution contains only one solvent / dispersant.
- This solvent / dispersant is advantageously water, more economical than all other solvents or dispersants.
- particulate silica is highly hydrophilic and the solubility of polyvinyl alcohol in water is particularly high.
- the solvent of the solution is an alcohol, for example ethanol or isopropanol.
- the polyvinyl alcohol and the silica may be directly poured into the precursor solution, that is to say without dissolution / prior suspension.
- the polyvinyl alcohol is then dissolved, and the silica dispersed, in the solvent of the metal oxide precursor.
- silica in aqueous solution forms a thixotropic gel which solidifies rapidly.
- the addition of the polyvinyl alcohol not only increases the viscosity of the precursor solution, but also prevents the formation of this gel.
- silica also has a beneficial effect on polyvinyl alcohol, since it prevents it from precipitating in the precursor solution. This particular combination of thickening agents therefore shows synergistic effects.
- Another advantage of silica is its ability to nucleate the metal oxide. Indeed, the silica particles act as nucleation sites, which promotes the formation of several small crystals of metal oxide.
- the silica also has a binding power, which improves the agglomeration of the metal oxide crystals. This results in a more dense metal oxide layer.
- An enameling effect can thus be obtained when the mixture of metal oxide (s) and silica is heated to a temperature above 400 ° C. Beyond this temperature, under an atmosphere containing oxygen, the polyvinyl alcohol (polymer) decomposes entirely.
- the addition of polyvinyl alcohol in the precursor solution makes it possible to obtain, immediately after the evaporation of the solvent, a continuous solid film which adheres strongly to the surface of the substrate.
- the polyvinyl alcohol being a nonionic polymer, it supports the high concentrations of ions present in the precursor solution (eg in the form of Sn 2+ and CI).
- a portion of the polyvinyl alcohol may be replaced by polyethylene oxide (PEO) in order to more precisely adjust the rheological properties of the solution.
- PEO polyethylene oxide
- the polyethylene oxide is in the form of a powder soluble in water.
- the precursor solution according to the invention may contain one or more precursors of the same metal oxide, or several precursors of different metal oxides. This or these precursors may be chosen from the following: tin dichloride (SnCl 2 ), tin tetrachloride (SnCU), H 2 PtCl 6 , H 2 ClC 6 , RhC, RuCl 3, As the case may be, only one metal oxide - respectively Sn0 2 , Pt0 2 , Ir0 2 , Rh0 2 , Ru0 2 - or an alloy of these metal oxides is obtained after heat treatment.
- SnCl 2 tin dichloride
- SnCU tin tetrachloride
- H 2 PtCl 6 H 2 ClC 6
- RhC RhC
- RuCl 3 As the case may be, only one metal oxide - respectively Sn0 2 , Pt0 2 , Ir0 2 , Rh0 2 , Ru0 2 - or an alloy of these metal oxides is obtained
- tin dichloride is preferable to tin tetrachloride because it has a higher boiling point (623 ° C for SnCl 2 vs. 11 ° C for SnCU), which makes it possible to carry out the heat treatment at high temperature and to obtain a better conversion efficiency of the precursor into oxide.
- the precursor solution may also contain a salt of a doping element, such as tin, antimony and fluorine, dissolved in the precursor solvent. metal oxide.
- a doping element such as tin, antimony and fluorine
- This coating method firstly comprises a step S1 of forming, on the surface of the substrate, a film of the precursor solution described above.
- the precursor solution can be deposited on the substrate by implementing one of the following liquid deposition techniques: - dip-coating ("dip coating" according to English terminology);
- dip coating dip coating
- sticky deposit dip coating
- laminar flow coating (laminar flow coating)
- doctor-blade coating (“doctor-blade coating").
- the coating process of FIG. 2 then comprises a step S2, during which the substrate coated with the solution film (or solution films, in the case of double-sided deposition) is subjected to a heat treatment.
- This heat treatment is configured to transform each film of the precursor solution into a metal oxide layer.
- the heat treatment comprises a first drying operation, preferably at a temperature between 80 ° C and 200 ° C for a period of between 1 min and 5 min. This drying operation promotes the evaporation of the solvent from the solution, avoiding thus the appearance of structural defects (dislocations for example) in the metal oxide layer.
- the heat treatment then comprises a second operation, called calcination, carried out in an oven whose atmosphere contains oxygen.
- This calcination operation is essentially intended to convert the precursor (s) of metal oxide to metal oxide, by an oxidation reaction, and to remove the polymer.
- tin dichloride SnCl2
- the reaction with oxygen is as follows:
- the calcination temperature is between 400 ° C and 550 ° C and the duration of the second operation varies between 1 min and 30 min.
- the silica is practically not removed during the heat treatment. It is therefore one of the components of the coating, consisting essentially of metal oxide (> 90% by weight).
- the mass proportion of the silica in the tin dioxide coating is between 0.5% and 5%.
- the deposition steps S1 and heat treatment S2 may be cyclically performed several times until the desired thickness of the metal oxide coating is reached. Typically, a coating thickness of between 1 ⁇ and 10 ⁇ can be obtained by 1 to 4 deposition-heat treatment cycles (depending in particular on the viscosity of the solution, the deposition mode, etc.).
- the coating process may comprise an annealing step S3 at a temperature between 400 ° C and 500 ° C.
- This annealing optional, makes it possible to stabilize and densify the metal oxide layers, in order to improve their properties, such as electrical conductivity.
- Annealing S3 is not necessarily performed under an atmosphere containing oxygen.
- the method may also comprise a step S4 in which the substrate coated with the metal oxide layer is subjected to an ultrasonic treatment.
- this ultrasonic treatment is intended to remove the most friable portion of the metal oxide layer, so as to retain only the portion the densest (in general, the one with the best electrical or mechanical properties).
- Ultrasound treatment can be performed after each heat-treatment deposition cycle, or once after the last cycle.
- This coating method notably makes it possible to form electrodes with electrocatalytic properties or battery electrodes.
- the metal oxide acts as a catalyst, for example for the production of oxygen or the electrochemical oxidation of organic pollutants (wastewater treatment).
- the metal oxide coating can be used to improve the adhesion and / or electrical conductivity of the substrate, the latter playing the current collector and / or support for an electrode active material.
- the metal oxide coating may also serve as an anticorrosive layer.
- metal oxide coatings can be used as transparent conductive oxide (OTC) layers in photovoltaic cells. They can be used for the realization of glazing with reinforced thermal insulation, because of their strong optical transmission in the visible range (> 90%) and their reflection properties in the infrared range.
- the substrate may be metal, a semiconductor material such as silicon, a metal oxide such as alumina (Al2O3) or glass.
- the substrate is preferably based on titanium. This metal is particularly suitable for forming a positive electrode current collector (cathode) because it is insensitive to corrosion (by electrolytes) under high positive potentials, unlike other materials like carbon.
- FIG. 3 illustrates a preferred embodiment of the coating method, intended more particularly for the manufacture of electrodes.
- the substrate made of titanium, is advantageously constituted by a sheet, a fabric or a metal-expanded mesh. It is in the form of a continuous and flexible strip 300.
- This strip 300 is driven by rollers 310 in an automated installation type "roll-to-roll".
- the installation comprises several successive stations responsible for performing the operations of depositing the precursor solution, drying and calcination.
- the titanium strip 300 is stored as a coil 301. This coil 301 is unrolled as the band 300 progresses in the installation.
- the first station of the installation (in the direction of progression of the band) shown in Figure 3 is that of the deposit of the precursor solution, here according to the technique of soaking-withdrawal.
- the strip 300 is immersed in a bath 320 containing the precursor solution and then removed from the bath at a constant speed, for example between 10 cm / s and 100 cm / s.
- the solution contains (in addition to polyvinyl alcohol and silica) a precursor of tin dioxide, for example tin dichloride (SnCl 2). It is therefore sought to cover each of the faces of the titanium strip with a layer of tin dioxide.
- the solution further comprises hydrochloric acid (HCl), preferably in molar excess relative to the amount of precursor in the solution, and a fluorine or antimony salt, in concentration at least ten times lower than that of the precursor. Hydrochloric acid prevents the precipitation of species with low solubility, such as Sn (OH) Cl.
- the fluorine or antimony salt acts as a doping agent to render the tin dioxide more conductive, but also as an etching agent to remove from the surface of the substrate the thin layer of titanium oxide ( ⁇ 1 nm). being formed naturally at contact with ambient air.
- the fluorine salt is preferably chosen from tin fluoride (for example SnF2) (fluorine doping), antimony fluoride (for example SbF3) (antimony doping) and ammonium fluoride (ex. NH 4 F) (fluorine doping). It is dissolved in the solvent of the solution.
- the F " ions are substituted for the O 2 ions in the Sn02 crystal lattice, while the Sb 3+ ions are substituted for the Sn 4+ ions in the layer. of SnO 2 and Ti 4+ ions at the interface between the SnO 2 layer and the substrate
- the antimony salt is preferably selected from antimony trifluoride (SbF 3) and antimony trichloride (SbCl 2).
- the titanium strip 300 then reaches a second station: that of drying. It passes advantageously in front of a first group of nozzles 330a blowing air brought to a temperature of 80 ° C and then in front of a second group of nozzles 330b blowing air heated to a temperature of 200 ° C. Drying at 80 ° C is sufficient to evaporate the solvent (water) and hydrochloric acid, while the temperature of 200 ° C corresponds approximately to the melting point of the polyvinyl alcohol. This drying operation therefore also has the effect of melting, at least partially, the polyvinyl alcohol. After passing in front of the drying nozzles, the titanium strip 300 reaches a third station corresponding to the calcination operation.
- the band 300 travels a furnace 340 in the form of a tunnel.
- the atmosphere of the furnace which contains oxygen, is brought to a temperature between 400 ° C and 550 ° C.
- the tin dioxide precursor may not completely oxidize, whereas above 600 ° C a layer of titanium oxide may appear at the interface of the substrate and of the metal oxide coating, due to the oxidation of titanium.
- the travel time t of a point of the band 300 in the tunnel, the duration of the calcination operation, is between 1 min and 5 min.
- the titanium strip 300 is wound in the form of a coil 302, in order to facilitate storage and handling.
- the coil 302 is further subjected to a densification anneal at a temperature between 400 ° C and 500 ° C.
- a densification anneal at a temperature between 400 ° C and 500 ° C.
- the sample substrates are titanium grids of rectangular format (5 ⁇ 5.5 cm 2 ) and of thickness equal to 70 ⁇ . Initially, these substrates undergo a surface treatment to remove the native titanium oxide layer. The substrates are immersed in a boiling solution of 10% oxalic acid for 30 minutes. Then, a precursor solution is deposited on one side of each substrate by brush coating.
- the composition of the precursor solution is as follows:
- This deposit is followed by a heat treatment comprising a drying phase of 20 seconds at a temperature of between 200 ° C. and 400 ° C., carried out using a heat gun, and a calcination operation at 500 ° C. for 5 min.
- This de-drying-calcination cycle is performed twice for four samples and three times for four other samples.
- all the sample substrates are subjected to annealing at 500 ° C. for 30 minutes, then to ultrasonic treatment for a period of 30 seconds, before being rinsed with demineralised water and dried at 60 ° C.
- the thickness of the tin dioxide coating obtained is measured before and after the ultrasonic treatment, from gravimetric data (for example by observing the mass gain).
- Figure 4 shows the thickness of the tin dioxide coating on each of eight samples, before and after the ultrasound treatment.
- the thickness of the four samples having undergone only two cycles of deposition-drying-calcination is, before ultrasonication treatment, between 3 ⁇ and 4 ⁇ , whereas the four other samples (with right) subjected to three cycles have a thickness, before sonication, of the order of 5-6 ⁇ .
- the ultrasonic treatment has the effect of reducing the thickness of the tin dioxide coating. However, a considerable portion of the coating, from 1 ⁇ to 4 ⁇ thick, remains attached to the substrate.
- FIGS. 5A and 5C are scanning electron microscope (SEM) images, respectively at low and high magnification levels, of the tin dioxide coating on one of the 8 samples prior to sonication.
- Figures 5B and 5D are also SEM images of the coating at low and high levels of magnification, but were taken after sonication.
- SEM scanning electron microscope
- FIG. 5A ie before the ultrasound treatment
- an excess of SnO 2 is noted inside the diamond-shaped meshes of the titanium grid. This excess of SnO 2 is, however, eliminated by sonication, as shown in Figure 5B.
- the outer portion of the coating consists essentially of agglomerated SnO 2 particles having a size of approximately 1 ⁇ .
- FIGS. 6A and 6B are energy dispersive X-ray spectrometry (EDX) spectra of the same coating, respectively measured before and after the ultrasound treatment. They give the chemical composition, as well as the distribution between the components, of the outer portion of the coating (Fig.6A) and the inner portion of the coating (Fig.6B). These spectra show that the coating consists essentially of tin (Sn) and oxygen (O), the two elements making up tin dioxide (more than 90% by weight).
- EDX energy dispersive X-ray spectrometry
- the inner portion of the coating contains more silicon (Si) and antimony (Sb) than the outer portion, which provides the coating with better electrical conductivity and better bonding to the substrate. These two properties are particularly beneficial for the performance of the substrate as a current collector in batteries.
- Figs. 7A-7C show the cycling performance of one of these titanium dioxide coated tin substrates when used as a positive current collector in a lead-acid battery cell.
- One of the samples having undergone three deposition-heat treatment cycles was covered with a layer of active material (PbO2) of 17 ⁇ in thickness and associated with a negative carbon electrode to form a lead-acid battery cell.
- PbO2 active material
- the load capacity and the discharge capacity of the cell are generally constant during the charge-discharge cycles of the cell.
- the cell obtained also tolerates the overloads well, since the load factor (see Fig.7B), set at 120%, is respected, even after about 200 cycles of charge-discharge.
- FIG. 7C shows that the impedance spectrum of the cell is globally unchanged between the beginning of cycling (cycle No. 2) and the end of cycling (No. 172). This shows that the tin dioxide coating is stable over time and does not disturb the electrical properties of the cell.
- the first heat treatment following the first solution deposit is identical to that of the first example (heat-gun drying and calcination at 500 ° C. for 5 minutes).
- the second heat treatment following the second solution deposit differs only from the first heat treatment in that it lasts 30 min, instead of 5 min.
- Ultrasonic treatment is performed after each heat treatment except for a portion of the samples (# 7 to # 12 below) that have been subjected to only one ultrasonic treatment after the second heat treatment. Table 1 below gives the thicknesses of the tin dioxide coating covering the samples, as well as the durations of the ultrasonic treatments to which they were subjected.
- the samples having undergone ultrasonic treatment after each calcination operation has a coating thickness Sn02 of between 2.2 ⁇ and 4 ⁇ for treatment times ranging from 6 to 10 min.
- the final thickness of the coating Sn02 is larger, of the order of 5-10 ⁇ .
- any of these tin dioxide coated substrates may be used as a positive current collector in a lead-acid battery cell, for example in combination with a negative carbon current collector.
- the life of such a cell exceeds 5000 cycles of charging and discharging under HRPSOC (High Rate Partial State-Of-Charge).
- HRPSOC High Rate Partial State-Of-Charge
- the energy efficiency reaches a remarkable value of 80%, despite the high voltage values obtained at the end of each partial load (about 2.8 V).
- the heat treatment following the solution deposit is identical to that of the first example (heat-gun drying and calcination at 500 ° C. for 30 minutes). Only one heat treatment-deposition cycle is performed and no annealing or ultrasonic treatment is performed after the heat treatment.
- the thicknesses of tin dioxide coating are obtained by measuring the mass gain of the samples. Table 2 below gives the thicknesses of the SnO 2 coating covering the samples.
- the SnO 2 coatings obtained in this third example of implementation all have a thickness greater than 1 ⁇ , although only one deposition-heat treatment cycle has been completed.
- Figure 9 represents the evolution of the voltage and the current of the cell using the sample "P03".
- the utilization rate of the active material is about 66.7% using a discharge current density of 5.3 mA / g.
- the cell is then charged with a current density of 26.8 mA / g until a voltage limit of 2.4 V is reached, then the charge is continued at constant voltage until 125% of the energy expended is recovered. discharge.
- the voltage behavior of the cell shown in FIG. 9 is very close to that observed with conventional lead-acid cells.
- the utilization rate of the active material here exceeds the usual level of 50%. It is therefore no longer necessary to apply a galvanic coating of lead dioxide on the tin dioxide layer to achieve such performance.
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Abstract
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1752074A FR3064010B1 (fr) | 2017-03-14 | 2017-03-14 | Solution de precurseur pour former une couche d’oxyde metallique et procede de revetement d’un substrat par une couche d’oxyde metallique |
| PCT/EP2018/056453 WO2018167178A1 (fr) | 2017-03-14 | 2018-03-14 | Solution de précurseur pour former une couche d'oxyde métallique et procédé de revêtement d'un substrat par une couche d'oxyde métallique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP3607107A1 true EP3607107A1 (fr) | 2020-02-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP18717525.2A Withdrawn EP3607107A1 (fr) | 2017-03-14 | 2018-03-14 | Solution de précurseur pour former une couche d'oxyde métallique et procédé de revêtement d'un substrat par une couche d'oxyde métallique |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP3607107A1 (fr) |
| FR (1) | FR3064010B1 (fr) |
| WO (1) | WO2018167178A1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113097228B (zh) * | 2021-03-24 | 2023-10-03 | 深圳市华星光电半导体显示技术有限公司 | 遮光基板及其制备方法和阵列基板 |
| CN118993252A (zh) * | 2024-08-14 | 2024-11-22 | 国中创业(北京)环保科技有限公司 | 一种用于工业废水处理的钛基阳极电极材料及其制备方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3779758A (en) * | 1969-03-25 | 1973-12-18 | Photocircuits Corp | Photosensitive process for producing printed circuits employing electroless deposition |
| CA1004080A (en) * | 1972-01-07 | 1977-01-25 | Eastman Kodak Company | Lithographic material |
| US4326017A (en) | 1981-01-26 | 1982-04-20 | General Electric Company | Positive electrode for lead acid battery |
| FR2853916B1 (fr) * | 2003-04-17 | 2006-02-24 | Eastman Kodak Co | Procede pour ameliorer la stabilite a l'ozone d'un materiau destine a la formation d'images par impression par jet d'encre |
| FR2869924B1 (fr) * | 2004-05-07 | 2007-08-17 | Eastman Kodak Co | Materiau destine a la formation d'images par impression par jet d'encre |
| FR2981064B1 (fr) | 2011-10-07 | 2014-11-28 | Commissariat Energie Atomique | Procede de preparation d'un materiau sur un substrat par voie sol-gel |
-
2017
- 2017-03-14 FR FR1752074A patent/FR3064010B1/fr not_active Expired - Fee Related
-
2018
- 2018-03-14 EP EP18717525.2A patent/EP3607107A1/fr not_active Withdrawn
- 2018-03-14 WO PCT/EP2018/056453 patent/WO2018167178A1/fr not_active Ceased
Non-Patent Citations (3)
| Title |
|---|
| DATABASE INSPEC [online] THE INSTITUTION OF ELECTRICAL ENGINEERS, STEVENAGE, GB; 1 January 2014 (2014-01-01), PONOMAREVA A A ET AL: "Effect of thermal annealing on the surface of sol-gel prepared oxide film studied by atomic force microscopy and Raman spectroscopy", Database accession no. 14521124 * |
| GLASS PHYSICS AND CHEMISTRY MAIK NAUKA/INTERPERIODICA PUBLISHING RUSSIA, vol. 40, no. 1, 1 January 2014 (2014-01-01), pages 99 - 105, ISSN: 1087-6596, DOI: 10.1134/S1087659614010192 * |
| See also references of WO2018167178A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR3064010B1 (fr) | 2022-11-18 |
| WO2018167178A1 (fr) | 2018-09-20 |
| FR3064010A1 (fr) | 2018-09-21 |
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