EP3548972A1 - Uhrkomponente mit verbesserten tribologischen eigenschaften sowie verfahren zur optimierung der tribologischen eigenschaften einer uhr - Google Patents
Uhrkomponente mit verbesserten tribologischen eigenschaften sowie verfahren zur optimierung der tribologischen eigenschaften einer uhrInfo
- Publication number
- EP3548972A1 EP3548972A1 EP17808909.0A EP17808909A EP3548972A1 EP 3548972 A1 EP3548972 A1 EP 3548972A1 EP 17808909 A EP17808909 A EP 17808909A EP 3548972 A1 EP3548972 A1 EP 3548972A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- substrate
- ions
- implanted
- protective layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 239000011241 protective layer Substances 0.000 claims abstract description 43
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000010410 layer Substances 0.000 claims abstract description 30
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 29
- 239000010703 silicon Substances 0.000 claims abstract description 29
- 150000002500 ions Chemical class 0.000 claims description 48
- 238000002513 implantation Methods 0.000 claims description 18
- 238000005468 ion implantation Methods 0.000 claims description 15
- 238000010849 ion bombardment Methods 0.000 claims description 5
- 238000011282 treatment Methods 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 description 6
- 230000006872 improvement Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000003993 interaction Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000013213 extrapolation Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000010979 ruby Substances 0.000 description 2
- 229910001750 ruby Inorganic materials 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- VHCQVGQULWFQTM-VOTSOKGWSA-N Rubone Chemical compound COC1=CC(OC)=CC(O)=C1C(=O)\C=C\C1=CC(OC)=C(OC)C=C1OC VHCQVGQULWFQTM-VOTSOKGWSA-N 0.000 description 1
- VHCQVGQULWFQTM-UHFFFAOYSA-N Rubone Natural products COC1=CC(OC)=CC(O)=C1C(=O)C=CC1=CC(OC)=C(OC)C=C1OC VHCQVGQULWFQTM-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- -1 nitrogen ions Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000013074 reference sample Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G04—HOROLOGY
- G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
- G04B15/00—Escapements
- G04B15/14—Component parts or constructional details, e.g. construction of the lever or the escape wheel
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/06—Oiliness; Film-strength; Anti-wear; Resistance to extreme pressure
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/06—Instruments or other precision apparatus, e.g. damping fluids
Definitions
- the present invention relates to the field of watchmaking. More particularly, it concerns a watch component intended to undergo dynamic friction and having improved tribological properties, as well as a method for optimizing the tribological properties of such a watch component.
- This material also has the advantage of interesting tribological properties, which have suggested that it would be possible to rub one on the other two silicon parts, without having to resort to lubrication. Indeed, the interaction between moving parts, which is necessary for the operation of a clock mechanism, induces friction that is harmful to the performance of the mechanism and wear parts. It is therefore necessary to lubricate the parts of the components that undergo this friction. However, the oils traditionally used age and degrade, posing problems of maintenance of the movement, in particular.
- improved tribological properties is meant a reduction in the coefficient of friction, a reduction in wear with respect to a given stress or given conditions (surface condition, hygrometry, temperature, topology, etc.).
- the present invention aims to provide an alternative to the methods proposed above, to obtain a watch component intended to undergo dynamic friction, which has improved tribological properties, including the implementation of ion implantation certain elements under special conditions.
- CH709628 did not favor, and in some cases pejorate, the tribological properties of the spiral spring. As part of a spiral spring, such adverse effects on the tribological properties are of no importance, since such components do not undergo any dynamic friction during their operation, and therefore do not suggest a solution to the aforementioned problem.
- the invention relates to a watch component intended to undergo dynamic friction during its normal operation, made based on a substrate comprising a silicon layer whose crystallographic structure comprises at least one of monocrystalline, polycrystalline or amorphous forms, said substrate being reinforced by a protective layer formed on its surface during a protective operation of the substrate, said component having at least one ionically implanted zone, this zone lying in the protective layer , in the substrate or distributed between the protective layer and the substrate.
- Distributed includes a single zone disposed astride between the protective layer and the silicon layer, that is to say shared between these two layers, or several implanted zones arranged in one and the other of the different layers respectively.
- the ionically implanted zone is shared between the substrate and the protective layer, the substrate having an implantation in ion number greater than the protective layer.
- Another independent claim relates to a watch movement comprising at least one such watch component.
- the invention finally relates to a method for optimizing the tribological properties of a watch component intended to undergo dynamic friction during its normal operation, made based on a substrate comprising a silicon layer whose crystallographic structure comprises at least one of the monocrystalline, polycrystalline or amorphous forms, said substrate being reinforced by a protective layer formed on its surface during a protective operation of the substrate, said method comprising a step of ion implantation of at least one ion, by ion bombardment on the surface of said component.
- FIG. 1 illustrates the friction measured with a watch component implanted ionically at different doses, in FIG. function of the distance (in m) traveled in contact with the component by a ruby sphere,
- FIG. 2 illustrates the evolution of the average coefficient of friction measured under the conditions of FIG. 1 for a watch component according to the invention, as a function of the implantation dose
- FIGS. 3, 4, 5 and 6 represent different possibilities. implantation in a substrate, and
- FIGS 7, 8 and 9 propose different substrate configurations that may be suitable for the implementation of the invention.
- a toothed wheel meshing with another undergoes a dynamic friction at the surfaces of contact of its teeth, which is also the case between the certain components of the exhaust, including an anchor, an anchor wheel or the part of a resonator undergoing friction, such as a plateau pin, which undergo dynamic friction where they interact with neighboring components.
- a spiral spring being integral on the one hand with its peg and on the other hand with the balance shaft, it undergoes no dynamic friction in the sense of the invention and is therefore excluded from its scope since no Relative displacement is present at the points of contact between the spring and the components with which it interacts.
- silicon layer includes substrates for which, within the layer, the silicon does not form an atomic bond with other atoms.
- the different crystallographic natures of silicon are included in the scope of the invention and dopings or possible impurities present in the substrate are also possible and encompassed within the scope of the claims.
- a single layer of silicon, forming a silicon core, is also included in the scope of protection.
- this protective layer is obtained by an effective protective operation and a natural oxidation layer is not not a protective layer within the meaning of the present application, because it does not result from a protective operation as such, performed effectively and positively.
- a protective layer made of S1O2 obtained by an oxidation step measured at least 50 nm thick, which can not be obtained with natural oxidation.
- FIG. 7 the substrate takes the form of a single layer of silicon 10, covered with a protective layer 12.
- FIG. 8 the substrate takes the form of two layers of silicon 10, separated and covered with a protective layer 12.
- the substrate comprises a core 14 covered with a silicon layer 10 whose thickness is such that its tribological properties are equivalent to those of a silicon substrate.
- the protective layer 12 covers the silicon layer.
- the thickness of the silicon layer is greater than the ion implantation depth, so that the ions do not penetrate the core.
- the invention relates to a watch component made from a substrate comprising a silicon layer whose crystallographic structure comprises at least one of polycrystalline or amorphous monocrystalline, said substrate being reinforced by a layer of protection performed on its surface during a substrate protection operation, said component having at least one implanted zone ionically, this area being in the protective layer, in the substrate or distributed between the protective layer and the substrate.
- the ionically implanted zone 16 is shared between the substrate, illustrated here in the form of a single silicon layer 10, and the protective layer 12, the substrate having an implantation (in number of ions ) greater than the protective layer.
- Figure 4 shows such a configuration. It is found, more specifically, that the ions present in the protective layer are few or very few and that they are essentially concentrated in a specific area of the substrate.
- ion bombardment for example, ion beam, MEWA - Metal Vapor Vacuum Arc
- the ion density curve as a function of the depth of the component forms a narrow Gaussian showing this concentration in a region. precise.
- the implanted area is located at least in the substrate.
- the implanted zone 16 is located only in the protective layer 12 ( Figure 5). This is particularly the case with a protective layer having a thickness greater than the implantation depth obtained with a given energy. More commonly, the implanted area is located at least in the protective layer.
- the ionically implanted zone may be located either in the protective layer only, or in the substrate only or shared between the protective layer and the substrate, that is to say in the region of the interface between the protective layer and the substrate.
- Figure 1 shows the coefficient of friction of a substrate on a ruby sphere, rolling on the substrate over a distance of 100m (abscissa). The first few centimeters of the curve correspond to a break-in and the establishment of regular conditions, and are not significant.
- Curve A is the reference curve, obtained for a substrate without ion implantation.
- Curve B is obtained for an identical substrate, implanted ionically with a dose of C ions of 2.10 17 ions / cm 2 , with an energy of 600keV.
- Curve C is obtained for an identical substrate, implanted ionically with a dose of C ions of 1.10 18 ions / cm 2 , with an energy of 600keV.
- Figure 2 shows the average coefficients of friction measured under conditions similar to those of Figure 1, except the energy which is in this case 35keV, depending on the implantation dose, and on different substrates. with a layer of S1O2 of different thickness, which explains the results not comparable directly.
- the effects obtained with a dose of 5.10 17 ions / cm 2 are already interesting.
- the values of the curve in are treated as extrapolations.
- nitrogen ions can be implanted in the protective layer, in the substrate, or in the region of the interface between the substrate and the protective layer, predominantly in the substrate, or only in the substrate if the energy is sufficient.
- ionically implanted components as proposed above, to produce components subject to repeated or significant shocks or friction, in particular the components of the escapement, in particular an anchor, an anchor wheel or part of a resonator undergoing friction, such as a plateau pin.
- ions could be implanted in order to achieve the desired effect, including ions included in the list comprising boron, argon, oxygen, carbon dioxide, fluorine, phosphorus, sulfur, neon or metal ions such as aluminum and some noble metals such as palladium, silver, gold, etc.
- the invention also relates to a watch movement comprising one or more of these components.
- the performance of a watch movement thus equipped will be improved and its power reserve, for a given barrel, increased.
- the invention also relates to the method for implanting the components described above, also defining a method for optimizing the tribological properties of a watch component as mentioned above, made based on a substrate comprising a silicon layer 10 whose crystallographic structure comprises at least one of the monocrystalline, polycrystalline or amorphous forms, said substrate being reinforced by a protective layer 12 formed on its surface during a protective operation of the substrate.
- the method comprises a step of ion implantation of at least one ion, by ion bombardment on the surface of said component.
- the implantation step may be performed with C ions at a dose greater than 5.10 17 ions / cm 2 , preferably greater than 1.10 18 ions / cm 2 and with an energy greater than 600keV, or with N ions, at a dose greater than 1.10 16 ions / cm 2 and with an energy higher than 600keV.
- Implantation is performed on the components when, after etching, they have been detached from the base wafer in which they are etched.
- the areas of the components that are relevant to treat the tribological level are the side faces that, in general in the watch industry, are those that are exposed to friction.
- the side faces are not yet defined and therefore not accessible either to perform the protection operation, fundamental in the present application.
- the components it is nevertheless possible for the components to remain integral with the wafer or part of the wafer, at least at one point, to allow batch manipulation of the components, the components being easily separable from the support. formed by the wafer, for example by breaking the junction between the wafer and the component, after the latter has undergone the protection and ion implantation operations.
- the side flanks of the components can pass anywhere in the crystallographic mesh.
- the ion implantation is directional and the ion bombardment may have a variable angle of incidence on the lateral faces of the component, a tribological improvement is obtained which is averaged over the entire lateral surface. of the component and that is significant. Therefore, the method proposed in this application is applicable with substrates of any crystallographic orientation, since at the side surfaces the part can take any crystallographic orientation.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH15872016 | 2016-12-05 | ||
PCT/EP2017/081407 WO2018104247A1 (fr) | 2016-12-05 | 2017-12-04 | Composant horloger presentant des proprietes tribologiques ameliorees et methode d'optimisation des proprietes tribologiques d'un composant horloger |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3548972A1 true EP3548972A1 (de) | 2019-10-09 |
EP3548972B1 EP3548972B1 (de) | 2022-02-02 |
Family
ID=57821718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17808909.0A Active EP3548972B1 (de) | 2016-12-05 | 2017-12-04 | Verfahren zur optimierung der tribologischen eigenschaften einer uhr |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP3548972B1 (de) |
WO (1) | WO2018104247A1 (de) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2165315B1 (es) * | 2000-03-31 | 2003-08-01 | Consejo Superior Investigacion | Procedimiento de fabricacion de capas de carburo de silicio (sic) mediante implantacion ionica de carbono y recocidos. |
DE602006004055D1 (de) * | 2005-06-28 | 2009-01-15 | Eta Sa Mft Horlogere Suisse | Verstärktes mikromechanisches teil |
WO2009043391A1 (fr) * | 2007-10-05 | 2009-04-09 | Creepservice Sarl | Ressort de barillet a grande capacite de stockage d'energie et son procede de fabrication |
CH699780B1 (fr) * | 2008-10-22 | 2014-02-14 | Richemont Int Sa | Ressort spiral de montre autocompensé. |
CH708067B1 (fr) * | 2008-10-22 | 2014-11-28 | Richemont Int Sa | Ressort spiral de montre autocompensé. |
CH705724B9 (fr) * | 2011-11-03 | 2016-05-13 | Sigatec Sa | Pièce de micromécanique, notamment pour l'horlogerie. |
CH709628B1 (fr) * | 2015-08-27 | 2016-06-15 | Csem Centre Suisse D'electronique Et De Microtechnique S A - Rech Et Développement | Ressort spiral thermocompensé pour mouvement d'horlogerie. |
-
2017
- 2017-12-04 WO PCT/EP2017/081407 patent/WO2018104247A1/fr active Application Filing
- 2017-12-04 EP EP17808909.0A patent/EP3548972B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP3548972B1 (de) | 2022-02-02 |
WO2018104247A1 (fr) | 2018-06-14 |
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