EP3500072A4 - Plasma generation device and plasma irradiation method - Google Patents

Plasma generation device and plasma irradiation method Download PDF

Info

Publication number
EP3500072A4
EP3500072A4 EP16912725.5A EP16912725A EP3500072A4 EP 3500072 A4 EP3500072 A4 EP 3500072A4 EP 16912725 A EP16912725 A EP 16912725A EP 3500072 A4 EP3500072 A4 EP 3500072A4
Authority
EP
European Patent Office
Prior art keywords
plasma
generation device
irradiation method
plasma generation
plasma irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP16912725.5A
Other languages
German (de)
French (fr)
Other versions
EP3500072B1 (en
EP3500072A1 (en
Inventor
Takahiro Jindo
Toshiyuki Ikedo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Corp filed Critical Fuji Corp
Publication of EP3500072A1 publication Critical patent/EP3500072A1/en
Publication of EP3500072A4 publication Critical patent/EP3500072A4/en
Application granted granted Critical
Publication of EP3500072B1 publication Critical patent/EP3500072B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/002—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3494—Means for controlling discharge parameters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2240/00—Testing
    • H05H2240/10—Testing at atmospheric pressure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/10—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/40—Surface treatments

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
EP16912725.5A 2016-08-11 2016-08-11 Plasma generation device and plasma irradiation method Active EP3500072B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2016/073684 WO2018029845A1 (en) 2016-08-11 2016-08-11 Plasma generation device and plasma irradiation method

Publications (3)

Publication Number Publication Date
EP3500072A1 EP3500072A1 (en) 2019-06-19
EP3500072A4 true EP3500072A4 (en) 2020-03-18
EP3500072B1 EP3500072B1 (en) 2021-06-09

Family

ID=61161955

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16912725.5A Active EP3500072B1 (en) 2016-08-11 2016-08-11 Plasma generation device and plasma irradiation method

Country Status (5)

Country Link
US (1) US11295932B2 (en)
EP (1) EP3500072B1 (en)
JP (1) JP6720313B2 (en)
CN (1) CN109565921B (en)
WO (1) WO2018029845A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6976416B2 (en) * 2018-03-20 2021-12-08 株式会社Fuji Plasma device
JP7200337B2 (en) 2018-08-02 2023-01-06 株式会社Fuji Atmospheric pressure plasma generator
EP3832697B1 (en) * 2018-08-02 2023-06-07 Fuji Corporation Atmospheric-pressure plasma generator
US20210276054A1 (en) * 2018-08-02 2021-09-09 Fuji Corporation Oil removal method, bonding method, assembly device, and atmospheric-pressure plasma device
JP7085946B2 (en) * 2018-08-28 2022-06-17 株式会社Fuji Plasma generator and heater warm-up method
CN112655280B (en) * 2018-08-28 2023-10-20 株式会社富士 Plasma generating device and plasma head cooling method
CN112753286B (en) * 2018-10-26 2023-09-05 株式会社富士 Plasma generating device
JP7461961B2 (en) * 2019-09-27 2024-04-04 株式会社Fuji Plasma generating device and plasma processing method
USD951194S1 (en) * 2019-12-03 2022-05-10 Fuji Corporation Head for an atmospheric pressure plasma equipment
NL2026249B1 (en) * 2020-08-11 2022-04-13 Log10 B V Plasma source for generating a disinfecting and/or sterilizing gas mixture

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247152A (en) * 1991-02-25 1993-09-21 Blankenship George D Plasma torch with improved cooling
EP1827060A2 (en) * 2006-02-28 2007-08-29 The Esab Group, Inc. Cooling device and system for a plasma arc torch and associated method
WO2015132853A1 (en) * 2014-03-03 2015-09-11 富士機械製造株式会社 Atmospheric pressure plasma generator, and workpiece pair processing machine
WO2016042595A1 (en) * 2014-09-16 2016-03-24 富士機械製造株式会社 Plasma gas irradiation device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2898111B2 (en) * 1991-03-06 1999-05-31 日鐵溶接工業株式会社 Plasma jet torch and plasma jet oscillating method
JP2927596B2 (en) * 1992-02-19 1999-07-28 日鐵溶接工業株式会社 Non-transfer type plasma jet oscillation method and plasma jet apparatus
JPH07164151A (en) * 1993-12-10 1995-06-27 Nippon Steel Corp Method for increasing width of plasma flame
JPH07230896A (en) * 1994-02-15 1995-08-29 Nippon Steel Weld Prod & Eng Co Ltd Plasma device
CN201830542U (en) * 2010-10-04 2011-05-11 周开根 Arc plasma gun
JP2013152913A (en) * 2012-01-25 2013-08-08 Osamu Ikeda Cooler for plasma generation device
US10115565B2 (en) * 2012-03-02 2018-10-30 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus and plasma processing method
GB2501933A (en) 2012-05-09 2013-11-13 Linde Ag device for providing a flow of non-thermal plasma
ITVI20130220A1 (en) * 2013-09-05 2015-03-06 Trafimet Spa PLASMA TORCH WITH IMPROVED COOLING SYSTEM AND RELATIVE COOLING METHOD.
CN105451427B (en) * 2015-12-25 2019-01-18 中国航天空气动力技术研究院 A kind of superelevation enthalpy electro-arc heater cathode

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247152A (en) * 1991-02-25 1993-09-21 Blankenship George D Plasma torch with improved cooling
EP1827060A2 (en) * 2006-02-28 2007-08-29 The Esab Group, Inc. Cooling device and system for a plasma arc torch and associated method
WO2015132853A1 (en) * 2014-03-03 2015-09-11 富士機械製造株式会社 Atmospheric pressure plasma generator, and workpiece pair processing machine
EP3116289A1 (en) * 2014-03-03 2017-01-11 Fuji Machine Mfg. Co., Ltd. Atmospheric pressure plasma generator, and workpiece pair processing machine
WO2016042595A1 (en) * 2014-09-16 2016-03-24 富士機械製造株式会社 Plasma gas irradiation device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2018029845A1 *

Also Published As

Publication number Publication date
US11295932B2 (en) 2022-04-05
US20210151293A1 (en) 2021-05-20
WO2018029845A1 (en) 2018-02-15
EP3500072B1 (en) 2021-06-09
CN109565921B (en) 2021-05-18
JPWO2018029845A1 (en) 2019-06-06
EP3500072A1 (en) 2019-06-19
JP6720313B2 (en) 2020-07-08
CN109565921A (en) 2019-04-02

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