EP3465732C0 - Génération non magnétique d'impulsions d'ions - Google Patents

Génération non magnétique d'impulsions d'ions

Info

Publication number
EP3465732C0
EP3465732C0 EP17726938.8A EP17726938A EP3465732C0 EP 3465732 C0 EP3465732 C0 EP 3465732C0 EP 17726938 A EP17726938 A EP 17726938A EP 3465732 C0 EP3465732 C0 EP 3465732C0
Authority
EP
European Patent Office
Prior art keywords
magnet
generating ion
ion pulses
free generating
free
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17726938.8A
Other languages
German (de)
English (en)
Other versions
EP3465732A1 (fr
EP3465732B1 (fr
Inventor
Mihail Granovskiy
Juraj Bdzoch
Sergej Uchatsch
Anton Zimare
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacom Vakuum Komponenten und Messtechnik GmbH
Original Assignee
Vacom Vakuum Komponenten und Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vacom Vakuum Komponenten und Messtechnik GmbH filed Critical Vacom Vakuum Komponenten und Messtechnik GmbH
Publication of EP3465732A1 publication Critical patent/EP3465732A1/fr
Application granted granted Critical
Publication of EP3465732C0 publication Critical patent/EP3465732C0/fr
Publication of EP3465732B1 publication Critical patent/EP3465732B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
EP17726938.8A 2016-06-07 2017-05-31 Génération non magnétique d'impulsions d'ions Active EP3465732B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016110495.7A DE102016110495B4 (de) 2016-06-07 2016-06-07 Vorrichtung und Verfahren zum Erzeugen, Speichern und Freisetzen von Ionen aus einer umgebenden Restgasatmosphäre
PCT/EP2017/063084 WO2017211627A1 (fr) 2016-06-07 2017-05-31 Génération non magnétique d'impulsions d'ions

Publications (3)

Publication Number Publication Date
EP3465732A1 EP3465732A1 (fr) 2019-04-10
EP3465732C0 true EP3465732C0 (fr) 2024-06-05
EP3465732B1 EP3465732B1 (fr) 2024-06-05

Family

ID=58873824

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17726938.8A Active EP3465732B1 (fr) 2016-06-07 2017-05-31 Génération non magnétique d'impulsions d'ions

Country Status (4)

Country Link
EP (1) EP3465732B1 (fr)
DE (1) DE102016110495B4 (fr)
PL (1) PL3465732T3 (fr)
WO (1) WO2017211627A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10928265B2 (en) 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source
RU2717352C1 (ru) * 2019-07-30 2020-03-23 федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский ядерный университет "МИФИ" (НИЯУ МИФИ) Способ охлаждения ионов
US10948456B1 (en) 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3839655A (en) * 1973-08-24 1974-10-01 Varian Associates Bayard-alpert vacuum ionization tube
JPS6084758A (ja) * 1983-10-14 1985-05-14 Seiko Instr & Electronics Ltd 熱陰極電子衝撃型イオン源
JPS6093750A (ja) * 1983-10-26 1985-05-25 Seiko Instr & Electronics Ltd 熱陰極電子衝撃型イオン源
DE3718244A1 (de) 1987-05-30 1988-12-08 Grix Raimund Speicherionenquelle fuer flugzeit-massenspektrometer
GB9304462D0 (en) 1993-03-04 1993-04-21 Kore Tech Ltd Mass spectrometer
EP0676792A3 (fr) * 1994-04-05 1996-01-10 Atomika Instr Gmbh Dispositif relatif à la technique ionique.
DE19949978A1 (de) 1999-10-08 2001-05-10 Univ Dresden Tech Elektronenstoßionenquelle
CN101303955B (zh) 2007-05-09 2010-05-26 清华大学 离子源组件
JP2015515733A (ja) * 2012-04-26 2015-05-28 レコ コーポレイションＬｅｃｏ Ｃｏｒｐｏｒａｔｉｏｎ 高速応答を有する電子衝撃イオン源

Also Published As

Publication number Publication date
EP3465732A1 (fr) 2019-04-10
WO2017211627A1 (fr) 2017-12-14
DE102016110495B4 (de) 2018-03-29
EP3465732B1 (fr) 2024-06-05
PL3465732T3 (pl) 2024-10-07
DE102016110495A1 (de) 2017-12-07

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