EP3430653B1 - Piezoelectric actuator component and production method for producing a piezoelectric actuator component - Google Patents

Piezoelectric actuator component and production method for producing a piezoelectric actuator component Download PDF

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Publication number
EP3430653B1
EP3430653B1 EP17707319.4A EP17707319A EP3430653B1 EP 3430653 B1 EP3430653 B1 EP 3430653B1 EP 17707319 A EP17707319 A EP 17707319A EP 3430653 B1 EP3430653 B1 EP 3430653B1
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layer
passivation layer
longitudinal axis
piezoelectric actuator
electrode
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German (de)
French (fr)
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EP3430653A1 (en
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Claus Zumstrull
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Vitesco Technologies GmbH
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Vitesco Technologies GmbH
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the invention relates to a piezoelectric actuator component and a manufacturing method for producing such a piezoelectric actuator component.
  • Piezoelectric actuator components are used, for example, as electronic components in actuator units for injecting fuel into a combustion chamber of a cylinder of an internal combustion engine.
  • These actuator components have at least one layer stack made up of a plurality of piezoelectric ceramic layers and a plurality of electrode layers, which are alternately stacked on top of one another along a longitudinal axis, so that an electrode layer is arranged between two ceramic layers and thus forms a so-called inner electrode.
  • These inner electrodes are electrically contacted from the outside in order to apply a voltage so that the ceramic layers can expand and contract along the longitudinal axis via the piezo effect.
  • Piezoelectric actuator components of this type are used particularly frequently as piezoactuators in order to be used as actuating elements in fuel injectors in a wide variety of engine types for motor vehicles.
  • the electrical contacting of the electrode layers as internal electrodes of such actuator components is increasing with increasing demands on the actuator component such as higher prevailing temperatures, a larger number of injections in a shorter time, higher mechanical Loads, etc., thermally, electrically and mechanically more and more heavily loaded.
  • These increased requirements and loads act both on a passivation layer, which electrically insulates every second electrode layer along the longitudinal axis, and on current-carrying contacts on every second non-electrically insulated electrode layer.
  • a fully active piezo stack with passivation is, for example, from WO 2013/017592 A1 famous.
  • the DE 10 2009 014 993 A1 discloses an electrically conductive metal layer for contacting in combination with a passivation layer, the metal layer being first applied to a structured sacrificial layer, which is then completely removed again.
  • conductive adhesive has a low current-carrying capacity and relatively poor thermal conductivity.
  • actuator components in which the electrode layers are contacted via conductive adhesive are becoming less and less able to withstand the increasing demands and loads.
  • a piezoelectric multilayer actuator is known with an insulation structure and a graded electrode made of conductive adhesive, which has different conductivities and/or mechanical properties in the area of the inner electrodes to be contacted and between them.
  • a piezostack is known, with side surfaces, a passivation layer made of ceramic being arranged on two opposite side surfaces over the respective width, and a passivation layer comprising plastic being arranged on the other two opposite side surfaces, so that all side surfaces over the respective width are provided with a passivation layer.
  • the object of the invention is therefore to propose a piezoelectric actuator component and a corresponding production method in which the disadvantages mentioned above can be overcome.
  • a manufacturing method for manufacturing such a piezoelectric actuator component is the subject of the independent claim.
  • a piezoelectric actuator component has a layer stack made of piezoelectric ceramic layers and electrode layers, which are alternately stacked on top of one another along a longitudinal axis, the layer stack having a plurality of side surfaces extending parallel to the longitudinal axis.
  • a passivation layer is provided on at least one of the side surfaces for electrically insulating every second electrode layer arranged along the longitudinal axis and a contacting layer on the at least one side surface for electrically contacting every second electrode layer that is not electrically insulated by the passivation layer, the passivation layer on each of the electrically insulated Electrode layers are at least partially covered by the contacting layer and the contacting layer is formed by a sintered silver, and the passivation layer is formed by a passivation layer material, in particular a fully imidized polyimide that is thermally stable at the sintering temperature of the sintered silver.
  • the piezoelectric actuator component can also be processed on an industrial scale.
  • the passivation layer is formed by a passivation layer material that is thermally stable up to a temperature of 350°C.
  • silver can be sintered and processed at temperatures below 350°C. If, for example, a polyimide is advantageously used as the passivation layer material, which is still thermally stable even at 350° C. when imidization is complete, this results in an advantageous temperature window in which the passivation layer material and the contacting layer material can be processed together.
  • the layer stack is preferably designed as a fully active layer stack, with all the electrode layers arranged along the longitudinal axis extending at least on the at least one side surface essentially to a surface of the layer stack.
  • Fully active layer stacks have great advantages in terms of actuation, space requirements and the overall operating behavior of a piezoelectric actuator component, since advantageously a more uniform longitudinal stretching of the ceramic layers can be achieved with the same space requirements as with partially active layer stacks.
  • a surface of the layer stack on the at least one side surface is formed essentially by flush juxtaposition of end faces of the electrode and ceramic layers stacked on top of one another that are arranged on the at least one side surface, with the surface, particularly in the area of the passivation layer, protruding freely into the layer stack extending trenches is formed.
  • the passivation layer is advantageously located directly on the surface of the layer stack, so that the fully active properties of the layer stack are not impaired by trench formation in the area of the passivation layer, because the full electrode surface can be utilized.
  • the passivation layer is configured as a through layer arranged parallel to the longitudinal axis, which has a contacting trench formed in particular by laser structuring on every second electrode layer arranged along the longitudinal axis to expose the electrode layers to be contacted.
  • the passivation layer can also be formed from individual passivation layers arranged on every second electrode layer arranged along the longitudinal axis.
  • the passivation layer By structuring the passivation layer, it is particularly easy to apply a single layer to the surface of the layer stack on the at least one side face, and then simply to expose the electrode layers to be contacted, for example by laser structuring.
  • the electrode layers can be exposed in such a way that only a partial area of the electrode layer to be contacted is exposed, and the passivation layer continues to form a continuous through layer with the exception of contacting trenches formed in this way, but it is also possible to completely expose the electrode layers so that individual passivation layers are formed on each of the Form electrode layers that should be electrically isolated.
  • the electrode layers are preferably formed with silver, in particular with a silver alloy.
  • electrode layers that are formed with or from silver, e.g. a silver alloy, are advantageously used as internal electrodes, a very good connection between the sintered silver of the contacting layer and the internal electrodes can be achieved.
  • the polyimide is preferably completely imidized as the passivation layer material before the at least one side surface is coated with the sintered silver.
  • a fully active layer stack is provided as the layer stack, in which all the electrode layers arranged along the longitudinal axis extend at least on the at least one side surface essentially up to a surface of the layer stack.
  • the structured passivation layer is coated with sintered silver in such a way that it is completely covered with the sintered silver, it is advantageous if the passivation layer extends completely over the surface of the at least one side face, so that advantageously no flashovers occur during operation of the actuator component.
  • the sintered silver forms a full-area contacting layer on the passivation layer without interruptions and without structuring, so that a simple further contacting is advantageously possible there, for example by attaching a collecting electrode.
  • FIG. 1 shows a longitudinal sectional view of a piezoelectric actuator component 10 having a layer stack 12, which is composed of piezoelectric ceramic layers 14 and electrode layers 16, along a Longitudinal axis 18 are stacked alternately, so that each electrode layer 16 is arranged between two piezoelectric ceramic layers 14.
  • the layer stack 12 has a plurality of side faces 20a - 20d which extend parallel to the longitudinal axis 18 .
  • a surface 22 of the layer stack 12 is formed on two opposite side faces 20a, c in that end faces 24 of the electrode and ceramic layers 14, 16 stacked on top of one another line up flush with one another along the longitudinal axis 18.
  • the layer stack 12 is designed as a fully active layer stack 12, i.e. the electrode layers 16 cover the respective adjacent ceramic layers 14 over the entire surface perpendicular to the longitudinal axis 18 in such a way that they extend on the side surfaces 20a - 20d of the layer stack 12 up to the surface 22. and thus protrude from the stack of layers 12 .
  • a fully active layer stack 12 has the advantage that, with a smaller space requirement, at least the same expansion behavior as or even greater expansion behavior can be achieved than with layer stacks 12 that are not fully active, i.e. in which the electrode layers 16 alternately extend from a surface 22 of the Layer stack 12 starting in the layer stack 12 are arranged set back into it.
  • a passivation layer 26 is arranged on the surface 22 on two opposite side surfaces 20a, c, over which every second layer along the longitudinal axis 18 arranged electrode layer 16 is electrically isolated from the outside.
  • a contacting layer 28 is applied to the passivation layer 26 for electrical contacting of the electrode layers 16 on the two side surfaces 20a, c.
  • this contacting layer 28 can contact the electrode layers 16 with which it is intended to contact, contacting trenches 30 are introduced in the passivation layer 26, for example by laser structuring, so that these electrode layers 16 to be contacted are exposed.
  • these contact trenches 30 can be seen from the side, in 3 in a perspective view. It is possible that the contact trenches 30, as shown in FIG 3 shown representation are structured in a passivation layer 26 formed as a through layer 32, but it is also possible that the passivation layer 26 is not formed as a continuous through layer 32, but rather that a separate individual passivation layer is applied to each electrode layer 16 to be insulated, which is not related to the adjacent individual passivation layers.
  • the contacting layer 28 is applied to the passivation layer 26 precisely in the region in which the contacting trenches 30 for exposing the electrode layers 16 to be contacted are arranged.
  • the passivation layer 26 is therefore covered by the contacting layer 28 at least in regions.
  • the passivation layer 26 does not cover the entire surface of the electrode layers 16 protruding perpendicularly to the longitudinal axis 18 on the surface 22, but rather leaves them exposed in some areas, is the contacting layer 28 is advantageously provided only in the region of the contacting trenches 30 in order to avoid a flashover between adjacent electrode layers 16.
  • the contacting layer 28 is formed by a sintered silver 34.
  • Sintered silver 34 has the advantage that it has very good thermal conductivity and very good electrical conductivity, as a result of which a contact resistance to the electrode layers 16 and the contact resistance through the contacting layer 28 can be improved. As a result, the contacting of the electrode layers 16 has overall good thermal, electrical and mechanical resistance to high loads.
  • the sintered silver 34 flows into the contacting trenches 30 and thus comes into direct contact with the exposed electrode layers 16.
  • the sintered silver 34 is then solidified by a sintering step, so that the stable contacting layer 28 is formed. Sintering usually takes place at temperatures below 350°C.
  • the passivation layer 26 Since the passivation layer 26 is already applied to the layer stack 12 before the sintering step of the sintered silver 34 , it is important that the passivation layer material 36 from which the passivation layer 26 is formed is thermally stable at the sintering temperature of the sintered silver 34 .
  • Such a fully imidized polyimide 38 is advantageously thermally stable up to a temperature of 350° C. and thus has sufficient thermal resistance to the sintering temperature of the sintered silver 34.
  • the electrode layers 16 are formed with or from a silver alloy 40.
  • FIG. 12 shows a schematic representation of a flow diagram of a manufacturing method with which the piezoelectric actuator component 10 is produced.
  • a layer stack 12 is provided, which has ceramic layers 14 and electrode layers 16 stacked alternately on top of one another along a longitudinal axis 18 .
  • the layer stack 12 is in particular a fully active layer stack 12 in which the electrode layers 16 extend up to the surface 22 of the layer stack 12 .
  • the passivation layer material 36 is then applied to at least one side surface 20 of the layer stack 12, for example a polyimide precursor from which a polyimide 38 can be formed by a polymerization reaction.
  • the passivation layer material 36 is then cured, for example when polyimide 38 is used, by complete imidization.
  • this step is only optional; it is also possible to use a lacquer that is already fully imidized, so that the imidization step does not necessarily have to take place.
  • the passivation layer 26 is then structured, for example by laser structuring, so that every second electrode layer 16 arranged along the longitudinal axis 18 is uncovered so that it can be contacted from the outside. Then, in a further step, the passivation layer 26 structured in this way is coated with a sintered silver 34 in such a way that the sintered silver 34 runs into the structured contacting trenches 30 in the passivation layer 26 . At the At the end, the sintered silver 34 is then sintered in order to harden and thus form the contacting layer 28 .

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)

Description

Die Erfindung betrifft ein piezoelektrisches Aktuatorbauelement sowie ein Herstellungsverfahren zum Herstellen eines solchen piezoelektrischen Aktuatorbauelementes.The invention relates to a piezoelectric actuator component and a manufacturing method for producing such a piezoelectric actuator component.

Piezoelektrische Aktuatorbauelemente werden beispielsweise als elektronische Bauteile in Aktuatoreinheiten zum Einspritzen von Kraftstoff in einen Brennraum eines Zylinders einer Brennkraftmaschine verwendet.Piezoelectric actuator components are used, for example, as electronic components in actuator units for injecting fuel into a combustion chamber of a cylinder of an internal combustion engine.

Diese Aktuatorbauelemente weisen zumindest einen Schichtstapel aus einer Mehrzahl an piezoelektrischen Keramikschichten und einer Mehrzahl an Elektrodenschichten auf, die abwechselnd entlang einer Längsachse übereinander gestapelt sind, sodass zwischen zwei Keramikschichten jeweils eine Elektrodenschicht angeordnet ist und somit eine sogenannte Innenelektrode bildet. Diese Innenelektroden werden von außen elektrisch ankontaktiert, um eine Spannung anzulegen, sodass sich über den Piezoeffekt die Keramikschichten entlang der Längsachse ausdehnen und zusammenziehen können. Derartige piezoelektrische Aktuatorbauelemente werden besonders häufig als Piezoaktoren verwendet, um als Betätigungselemente in Einspritzventilen der verschiedensten Motortypen für Kraftfahrzeuge zur Anwendung zu kommen.These actuator components have at least one layer stack made up of a plurality of piezoelectric ceramic layers and a plurality of electrode layers, which are alternately stacked on top of one another along a longitudinal axis, so that an electrode layer is arranged between two ceramic layers and thus forms a so-called inner electrode. These inner electrodes are electrically contacted from the outside in order to apply a voltage so that the ceramic layers can expand and contract along the longitudinal axis via the piezo effect. Piezoelectric actuator components of this type are used particularly frequently as piezoactuators in order to be used as actuating elements in fuel injectors in a wide variety of engine types for motor vehicles.

Die elektrische Kontaktierung der Elektrodenschichten als Innenelektroden solcher Aktuatorbauelemente wird mit zunehmenden Anforderungen an das Aktuatorbauelement wie beispielsweise höheren vorherrschenden Temperaturen, einer größeren Anzahl an Einspritzungen in kürzerer Zeit, höheren mechanischen Belastungen usw., thermisch, elektrisch und mechanisch immer stärker belastet. Dabei wirken diese erhöhten Anforderungen und Belastungen sowohl an einer Passivierungsschicht, die jede zweite Elektrodenschicht entlang der Längsachse elektrisch isoliert, als auch an stromführenden Ankontaktierungen jeder zweiten nicht elektrisch isolierten Elektrodenschicht.The electrical contacting of the electrode layers as internal electrodes of such actuator components is increasing with increasing demands on the actuator component such as higher prevailing temperatures, a larger number of injections in a shorter time, higher mechanical Loads, etc., thermally, electrically and mechanically more and more heavily loaded. These increased requirements and loads act both on a passivation layer, which electrically insulates every second electrode layer along the longitudinal axis, and on current-carrying contacts on every second non-electrically insulated electrode layer.

Ein vollaktiver Piezostack mit Passivierung ist beispielsweise aus der WO 2013/017592 A1 bekannt. Die DE 10 2009 014 993 A1 offenbart eine elektrisch leitende Metallschicht zur Ankontaktierung in Kombination mit einer Passivierungsschicht, wobei die Metallschicht zunächst auf eine strukturierte Opferschicht aufgebracht wird, die anschließend wieder vollständig entfernt wird.A fully active piezo stack with passivation is, for example, from WO 2013/017592 A1 famous. the DE 10 2009 014 993 A1 discloses an electrically conductive metal layer for contacting in combination with a passivation layer, the metal layer being first applied to a structured sacrificial layer, which is then completely removed again.

Ferner ist es bislang bekannt, solche Ankontaktierungen der Elektrodenschichten über einen Leitkleber zu realisieren. Leitkleber hat insgesamt eine geringe Stromtragfähigkeit und eine relativ schlechte Wärmeleitfähigkeit. Zudem besteht ein relativ hoher Übergangswiderstand zwischen dem verwendeten Leitkleber und den Elektrodenschichten.Furthermore, it has hitherto been known to realize such contacting of the electrode layers via a conductive adhesive. Overall, conductive adhesive has a low current-carrying capacity and relatively poor thermal conductivity. In addition, there is a relatively high contact resistance between the conductive adhesive used and the electrode layers.

Dadurch können Aktuatorbauelemente, bei denen die Elektrodenschichten über Leitkleber ankontaktiert werden, den zunehmenden Anforderungen und Belastungen immer schlechter standhalten.As a result, actuator components in which the electrode layers are contacted via conductive adhesive are becoming less and less able to withstand the increasing demands and loads.

Aus der DE 10 2007 004 893 A1 ist ein piezoelektrischer Vielschichtaktor bekannt mit einer Isolationsstruktur und einer gradierten Elektrode aus Leitkleber, die im Bereich der zu kontaktierenden Innenelektroden und dazwischen unterschiedliche Leitfähigkeiten und/oder mechanische Eigenschaften aufweist. Aus der WO2013017592 ist ein Piezostack bekannt, mit Seitenflächen , wobei an zwei sich gegenüberliegenden Seitenflächen über der jeweiligen Breite eine Passivierungsschicht aus Keramik angeordnet ist, an den anderen beiden sich gegenüberliegenden Seitenflächen jeweils eine Passivierungsschicht angeordnet ist, die Kunststoff umfasst, so dass alle Seitenflächen über die jeweilige Breite mit einer Passivierungsschicht versehen sind.From the DE 10 2007 004 893 A1 a piezoelectric multilayer actuator is known with an insulation structure and a graded electrode made of conductive adhesive, which has different conductivities and/or mechanical properties in the area of the inner electrodes to be contacted and between them. From the WO2013017592 a piezostack is known, with side surfaces, a passivation layer made of ceramic being arranged on two opposite side surfaces over the respective width, and a passivation layer comprising plastic being arranged on the other two opposite side surfaces, so that all side surfaces over the respective width are provided with a passivation layer.

Aufgabe der Erfindung ist es daher, ein piezoelektrisches Aktuatorbauelement und ein entsprechendes Herstellungsverfahren vorzuschlagen, bei dem die oben genannten Nachteile überwunden werden können.The object of the invention is therefore to propose a piezoelectric actuator component and a corresponding production method in which the disadvantages mentioned above can be overcome.

Diese Aufgabe wird mit einem piezoelektrischen Aktuatorbauelement mit den Merkmalen des unabhängigen Anspruches 1 gelöst.This object is achieved with a piezoelectric actuator component having the features of independent claim 1.

Ein Herstellungsverfahren zum Herstellen eines solchen piezoelektrischen Aktuatorbauelementes ist Gegenstand des nebengeordneten Anspruches.A manufacturing method for manufacturing such a piezoelectric actuator component is the subject of the independent claim.

Vorteilhafte Ausgestaltungen der Erfindung sind Gegenstand der abhängigen Ansprüche.Advantageous configurations of the invention are the subject matter of the dependent claims.

Ein piezoelektrisches Aktuatorbauelement weist einen Schichtstapel aus piezoelektrischen Keramikschichten und Elektrodenschichten auf, die abwechselnd entlang einer Längsachse übereinandergestapelt sind, wobei der Schichtstapel mehrere sich parallel zu der Längsachse erstreckende Seitenflächen aufweist. Weiter ist eine Passivierungsschicht an wenigstens einer der Seitenflächen zum elektrischen Isolieren jeder zweiten entlang der Längsachse angeordneten Elektrodenschicht und eine Kontaktierungsschicht an der wenigstens einen Seitenfläche zum elektrischen Kontaktieren jeder zweiten, nicht durch die Passivierungsschicht elektrisch isolierten Elektrodenschicht vorgesehen, wobei die Passivierungsschicht an jeder der elektrisch isolierten Elektrodenschichten zumindest bereichsweise von der Kontaktierungsschicht bedeckt ist und wobei die Kontaktierungsschicht durch ein Sintersilber gebildet ist, und wobei die Passivierungsschicht durch ein Passivierungsschichtmaterial, insbesondere durch ein vollständig imidisiertes Polyimid gebildet ist, das bei der Sintertemperatur des Sintersilbers thermisch stabil ist.A piezoelectric actuator component has a layer stack made of piezoelectric ceramic layers and electrode layers, which are alternately stacked on top of one another along a longitudinal axis, the layer stack having a plurality of side surfaces extending parallel to the longitudinal axis. Furthermore, a passivation layer is provided on at least one of the side surfaces for electrically insulating every second electrode layer arranged along the longitudinal axis and a contacting layer on the at least one side surface for electrically contacting every second electrode layer that is not electrically insulated by the passivation layer, the passivation layer on each of the electrically insulated Electrode layers are at least partially covered by the contacting layer and the contacting layer is formed by a sintered silver, and the passivation layer is formed by a passivation layer material, in particular a fully imidized polyimide that is thermally stable at the sintering temperature of the sintered silver.

Demgemäß wird vorgeschlagen, den bisher verwendeten Leitkleber durch ein gesintertes Silber zu ersetzen, das eine bessere Temperaturleitfähigkeit sowie eine bessere elektrische Leitfähigkeit aufweist als der Leitkleber, wodurch ein Übergangswiderstand zwischen der Kontaktierungsschicht und den Elektrodenschichten in dem Schichtstapel und ein Durchgangswiderstand durch die Kontaktierungsschicht verbessert wird. Dadurch, dass eine Passivierungsschicht verwendet wird, die auch bei der Sintertemperatur des Sintersilbers thermisch stabil ist, kann das piezoelektrische Aktuatorbauelement auch großtechnisch prozessiert werden.Accordingly, it is proposed to replace the previously used conductive adhesive with a sintered silver, which has better thermal conductivity and better electrical conductivity than the conductive adhesive, whereby a contact resistance between the contacting layer and the electrode layers in the layer stack and a volume resistance through the contacting layer is improved. Because a passivation layer is used that is thermally stable even at the sintering temperature of the sintered silver, the piezoelectric actuator component can also be processed on an industrial scale.

In vorteilhafter Ausgestaltung ist die Passivierungsschicht durch ein Passivierungsschichtmaterial gebildet, das bis zu einer Temperatur von 350°C thermisch stabil ist.In an advantageous embodiment, the passivation layer is formed by a passivation layer material that is thermally stable up to a temperature of 350°C.

Durch Verwendung von beispielsweise speziellen Additiven kann Silber schon bei Temperaturen unter 350° C gesintert und somit verarbeitet werden. Wird daher vorteilhaft beispielsweise ein Polyimid als Passivierungsschichtmaterial verwendet, das bei vollständiger Imidisierung auch bei 350° C thermisch noch stabil ist, ergibt sich so ein vorteilhaftes Temperaturfenster, bei dem das Passivierungsschichtmaterial und das Kontaktierungsschichtmaterial gemeinsam verarbeitet werden können.By using, for example, special additives, silver can be sintered and processed at temperatures below 350°C. If, for example, a polyimide is advantageously used as the passivation layer material, which is still thermally stable even at 350° C. when imidization is complete, this results in an advantageous temperature window in which the passivation layer material and the contacting layer material can be processed together.

Vorzugsweise ist der Schichtstapel als vollaktiver Schichtstapel ausgebildet, wobei sich alle entlang der Längsachse angeordneten Elektrodenschichten wenigstens an der wenigstens einen Seitenfläche im Wesentlichen bis zu einer Oberfläche des Schichtstapels erstrecken.The layer stack is preferably designed as a fully active layer stack, with all the electrode layers arranged along the longitudinal axis extending at least on the at least one side surface essentially to a surface of the layer stack.

Vollaktive Schichtstapel haben große Vorteile hinsichtlich der Betätigung, Raumbeanspruchung und dem gesamten Betriebsverhalten eines piezoelektrischen Aktuatorbauelementes, da vorteilhaft eine gleichmäßigere Längsstreckung der Keramikschichten bei gleicher Raumbeanspruchung wie bei teilaktiven Schichtstapel erzielt werden kann.Fully active layer stacks have great advantages in terms of actuation, space requirements and the overall operating behavior of a piezoelectric actuator component, since advantageously a more uniform longitudinal stretching of the ceramic layers can be achieved with the same space requirements as with partially active layer stacks.

In bevorzugter Ausgestaltung ist eine Oberfläche des Schichtstapels an der wenigstens einen Seitenfläche im Wesentlichen durch bündige Aneinanderreihung von an der wenigstens einen Seitenfläche angeordneten Stirnflächen der übereinandergestapelten Elektroden- und Keramikschichten ausgebildet, wobei die Oberfläche, insbesondere im Bereich der Passivierungsschicht, frei von sich in den Schichtstapel erstreckenden Gräben ausgebildet ist.In a preferred configuration, a surface of the layer stack on the at least one side surface is formed essentially by flush juxtaposition of end faces of the electrode and ceramic layers stacked on top of one another that are arranged on the at least one side surface, with the surface, particularly in the area of the passivation layer, protruding freely into the layer stack extending trenches is formed.

Vorteilhaft befindet sich so die Passivierungsschicht direkt an der Oberfläche des Schichtstapels, sodass keine Beeinträchtigung der vollaktiven Eigenschaften des Schichtstapels durch Grabenbildung im Bereich der Passivierungsschicht vorliegt, weil die volle Elektrodenfläche ausgenutzt werden kann.The passivation layer is advantageously located directly on the surface of the layer stack, so that the fully active properties of the layer stack are not impaired by trench formation in the area of the passivation layer, because the full electrode surface can be utilized.

Vorteilhaft ist die Passivierungsschicht als eine parallel zur Längsachse angeordnete Durchgangsschicht ausgebildet, die zum Freilegen der anzukontaktierenden Elektrodenschichten an jeder zweiten entlang der Längsachse angeordneten Elektrodenschicht einen, insbesondere durch Laserstrukturierung gebildeten, Kontaktierungsgraben aufweist. Alternativ kann die Passivierungsschicht auch aus an jeder zweiten entlang der Längsachse angeordneten Elektrodenschicht angeordneten Einzelpassivierungsschichten gebildet ist.Advantageously, the passivation layer is configured as a through layer arranged parallel to the longitudinal axis, which has a contacting trench formed in particular by laser structuring on every second electrode layer arranged along the longitudinal axis to expose the electrode layers to be contacted. Alternatively, the passivation layer can also be formed from individual passivation layers arranged on every second electrode layer arranged along the longitudinal axis.

Durch Strukturierung der Passivierungsschicht kann so besonders einfach eine einzelne Schicht auf die Oberfläche des Schichtstapels an der wenigstens einen Seitenfläche aufgebracht werden, und dann einfach die anzukontaktierenden Elektrodenschichten beispielsweise durch eine Laserstrukturierung freigelegt werden. Dabei können die Elektrodenschichten so freigelegt werden, dass lediglich ein Teilbereich der anzukontaktierenden Elektrodenschicht freigelegt ist, und die Passivierungssicht weiterhin mit Ausnahme von derart gebildeten Kontaktierungsgräben eine durchgehende Durchgangsschicht bildet, es ist jedoch auch möglich, die Elektrodenschichten vollständig freizulegen, sodass sich Einzelpassivierungsschichten an jeder der Elektrodenschichten bilden, die elektrisch isoliert sein soll.By structuring the passivation layer, it is particularly easy to apply a single layer to the surface of the layer stack on the at least one side face, and then simply to expose the electrode layers to be contacted, for example by laser structuring. The electrode layers can be exposed in such a way that only a partial area of the electrode layer to be contacted is exposed, and the passivation layer continues to form a continuous through layer with the exception of contacting trenches formed in this way, but it is also possible to completely expose the electrode layers so that individual passivation layers are formed on each of the Form electrode layers that should be electrically isolated.

Bevorzugt sind die Elektrodenschichten mit Silber, insbesondere mit einer Silberlegierung, gebildet.The electrode layers are preferably formed with silver, in particular with a silver alloy.

Werden vorteilhaft Elektrodenschichten als Innenelektroden verwendet, die mit oder aus Silber, z.B. einer Silberlegierung, gebildet sind, kann so eine sehr gute Verbindung zwischen dem Sintersilber der Kontaktierungsschicht und den Innenelektroden erreicht werden.If electrode layers that are formed with or from silver, e.g. a silver alloy, are advantageously used as internal electrodes, a very good connection between the sintered silver of the contacting layer and the internal electrodes can be achieved.

Ein Herstellungsverfahren zum Herstellen eines piezoelektrischen Aktuatorbauelementes weist die folgenden Schritte auf:

  • Bereitstellen eines Schichtstapels aus piezoelektrischen Keramikschichten und Elektrodenschichten, die abwechselnd entlang einer Längsachse übereinandergestapelt sind, wobei der Schichtstapel mehrere sich parallel zu der Längsachse erstreckende Seitenflächen aufweist;
  • Bilden einer elektrisch isolierenden Passivierungsschicht aus einem Passivierungsschichtmaterial an wenigstens einer der Seitenflächen, wobei das Passivierungsschichtmaterial ein Polyimid ist;
  • Strukturieren, insbesondere Laserstrukturieren, der Passivierungsschicht zum Freilegen jeder zweiten entlang der Längsachse angeordneten Elektrodenschicht an der wenigstens einen Seitenfläche;
  • Beschichten der strukturierten Passivierungsschicht mit einem Sintersilber;
  • Sintern des Sintersilbers.
A manufacturing method for manufacturing a piezoelectric actuator component has the following steps:
  • providing a layer stack of piezoelectric ceramic layers and electrode layers, which are alternately stacked on top of one another along a longitudinal axis, the layer stack having a plurality of side faces extending parallel to the longitudinal axis;
  • forming an electrically insulating passivation layer from a passivation layer material on at least one of the side surfaces, the passivation layer material being a polyimide;
  • Structuring, in particular laser structuring, of the passivation layer to expose every second electrode layer arranged along the longitudinal axis on the at least one side surface;
  • coating the patterned passivation layer with a sintered silver;
  • Sintering of the sintered silver.

Vorzugsweise wird das Polyimid als Passivierungsschichtmaterial vor dem Beschichten der wenigstens einen Seitenfläche mit dem Sintersilber vollständig imidisiert.The polyimide is preferably completely imidized as the passivation layer material before the at least one side surface is coated with the sintered silver.

In vorteilhafter Ausgestaltung wird als Schichtstapel ein vollaktiver Schichtstapel bereitgestellt, bei dem sich alle entlang der Längsachse angeordneten Elektrodenschichten wenigstens an der wenigstens einen Seitenfläche im Wesentlichen bis zu einer Oberfläche des Schichtstapels erstrecken.In an advantageous embodiment, a fully active layer stack is provided as the layer stack, in which all the electrode layers arranged along the longitudinal axis extend at least on the at least one side surface essentially up to a surface of the layer stack.

Wird die strukturierte Passivierungsschicht so mit Sintersilber beschichtet, dass sie vollflächig mit dem Sintersilber bedeckt ist, ist es vorteilhaft, wenn sich die Passivierungsschicht vollständig über die Oberfläche der wenigstens einen Seitenfläche erstreckt, sodass vorteilhaft keine Überschläge im Betrieb des Aktuatorbauelementes vorkommen.If the structured passivation layer is coated with sintered silver in such a way that it is completely covered with the sintered silver, it is advantageous if the passivation layer extends completely over the surface of the at least one side face, so that advantageously no flashovers occur during operation of the actuator component.

Vorteilhaft bildet das Sintersilber auf der Passivierungsschicht eine vollflächige Kontaktierungsschicht ohne Unterbrechungen und ohne Strukturierung, sodass dort vorteilhaft eine einfache Weiterkontaktierung zum Beispiel durch Anbringen einer Sammelelektrode möglich ist.Advantageously, the sintered silver forms a full-area contacting layer on the passivation layer without interruptions and without structuring, so that a simple further contacting is advantageously possible there, for example by attaching a collecting electrode.

Eine vorteilhafte Ausgestaltung der Erfindung wird nachfolgend anhand der beigefügten Zeichnungen näher erläutert. Darin zeigt:

Fig. 1
eine Längsschnittdarstellung eines piezoelektrischen Aktuatorbauelementes;
Fig. 2
eine um 90° gedrehte Ansicht des Aktuatorbauelementes aus Fig. 1;
Fig. 3
eine perspektivische Ansicht des Aktuatorbauelementes aus Fig. 1 und Fig. 2; und
Fig. 4
ein schematisches Flussidagramm, das die Herstellungsschritte zum Herstellen des piezoelektrischen Aktuatorbauelementes aus den Fig. 1 bis Fig. 3 darstellt.
An advantageous embodiment of the invention is explained in more detail below with reference to the accompanying drawings. It shows:
1
a longitudinal sectional view of a piezoelectric actuator component;
2
shows a 90° rotated view of the actuator component 1 ;
3
a perspective view of the actuator component 1 and 2 ; and
4
Fig. 12 is a schematic flow chart showing the manufacturing steps for manufacturing the piezoelectric actuator device of Figs Figures 1 to 3 represents.

Fig. 1 zeigt eine Längsschnittdarstellung eines piezoelektrischen Aktuatorbauelementes 10, das einen Schichtstapel 12 aufweist, welcher aus piezoelektrischen Keramikschichten 14 und Elektrodenschichten 16 aufgebaut ist, die entlang einer Längsachse 18 abwechselnd aufeinandergestapelt sind, sodass jede Elektrodenschicht 16 zwischen zwei piezoelektrischen Keramikschichten 14 angeordnet ist. 1 shows a longitudinal sectional view of a piezoelectric actuator component 10 having a layer stack 12, which is composed of piezoelectric ceramic layers 14 and electrode layers 16, along a Longitudinal axis 18 are stacked alternately, so that each electrode layer 16 is arranged between two piezoelectric ceramic layers 14.

Der Schichtstapel 12 weist mehrere Seitenflächen 20a - 20d auf, die sich parallel zu der Längsachse 18 erstrecken.The layer stack 12 has a plurality of side faces 20a - 20d which extend parallel to the longitudinal axis 18 .

An zwei sich gegenüberliegenden Seitenflächen 20a, c ist eine Oberfläche 22 des Schichtstapels 12 dadurch gebildet, dass sich Stirnflächen 24 der übereinandergestapelten Elektroden- und Keramikschichten 14, 16 entlang der Längsachse 18 bündig aneinander reihen.A surface 22 of the layer stack 12 is formed on two opposite side faces 20a, c in that end faces 24 of the electrode and ceramic layers 14, 16 stacked on top of one another line up flush with one another along the longitudinal axis 18.

Insgesamt ist der Schichtstapel 12 als vollaktiver Schichtstapel 12 ausgebildet, das heißt, die Elektrodenschichten 16 bedecken senkrecht zu der Längsachse 18 vollflächig die jeweils benachbarten Keramikschichten 14 derart, dass sie sich an den Seitenflächen 20a - 20d des Schichtstapels 12 bis zu der Oberfläche 22 erstrecken, und somit aus dem Schichtstapel 12 hervortreten. Ein vollaktiver Schichtstapel 12 hat den Vorteil, dass bei kleinerer Raumbeanspruchung wenigstens ein gleiches Ausdehnungsverhalten wie oder sogar noch ein größeres Ausdehnungsverhalten kann als bei Schichtstapeln 12 erzielt werden, die nicht vollaktiv sind, das heißt, bei denen die Elektrodenschichten 16 abwechselnd von einer Oberfläche 22 des Schichtstapels 12 ausgehend in den Schichtstapel 12 hinein zurückversetzt angeordnet sind.Overall, the layer stack 12 is designed as a fully active layer stack 12, i.e. the electrode layers 16 cover the respective adjacent ceramic layers 14 over the entire surface perpendicular to the longitudinal axis 18 in such a way that they extend on the side surfaces 20a - 20d of the layer stack 12 up to the surface 22. and thus protrude from the stack of layers 12 . A fully active layer stack 12 has the advantage that, with a smaller space requirement, at least the same expansion behavior as or even greater expansion behavior can be achieved than with layer stacks 12 that are not fully active, i.e. in which the electrode layers 16 alternately extend from a surface 22 of the Layer stack 12 starting in the layer stack 12 are arranged set back into it.

Um bei einer Ankontaktierung der Elektrodenschichten 16 von außen einen Überschlag zwischen benachbarten Elektrodenschichten 16, die unterschiedliche Potentiale aufweisen, zu vermeiden, ist an zwei sich gegenüberliegenden Seitenflächen 20a, c eine Passivierungsschicht 26 auf der Oberfläche 22 angeordnet, über die jede zweite entlang der Längsachse 18 angeordnete Elektrodenschicht 16 von außen elektrisch isoliert ist. Auf der Passivierungsschicht 26 ist zum elektrischen Kontaktieren der Elektrodenschichten 16 auf den beiden Seitenflächen 20a, c eine Kontaktierungsschicht 28 aufgebracht.In order to avoid a flashover between adjacent electrode layers 16, which have different potentials, when contact is made with the electrode layers 16 from the outside, a passivation layer 26 is arranged on the surface 22 on two opposite side surfaces 20a, c, over which every second layer along the longitudinal axis 18 arranged electrode layer 16 is electrically isolated from the outside. A contacting layer 28 is applied to the passivation layer 26 for electrical contacting of the electrode layers 16 on the two side surfaces 20a, c.

Damit diese Kontaktierungsschicht 28 die Elektrodenschichten 16 kontaktieren kann, die sie kontaktieren soll, sind in der Passivierungsschicht 26 Kontaktierungsgräben 30 eingebracht, beispielsweise durch Laserstrukturierung, sodass diese anzukontaktierenden Elektrodenschichten 16 freigelegt sind.So that this contacting layer 28 can contact the electrode layers 16 with which it is intended to contact, contacting trenches 30 are introduced in the passivation layer 26, for example by laser structuring, so that these electrode layers 16 to be contacted are exposed.

In den Längsschnittdarstellung in Fig. 1 und Fig. 2 sind diese Kontaktierungsgräben 30 von der Seite zu sehen, in Fig. 3 in einer perspektivischen Darstellung. Es ist möglich, dass die Kontaktierungsgräben 30, wie dies in der in Fig. 3 gezeigten Darstellung gezeigt ist, in einer als Durchgangsschicht 32 gebildeten Passivierungsschicht 26 einstrukturiert sind, es ist jedoch auch möglich, dass die Passivierungsschicht 26 nicht als durchgängige Durchgangsschicht 32 gebildet ist, sondern dass auf jeder zu isolierenden Elektrodenschichten 16 eine eigene Einzelpassivierungsschicht aufgebracht ist, die nicht mit den benachbarten Einzelpassivierungsschichten zusammenhängt.In the longitudinal section in 1 and 2 these contact trenches 30 can be seen from the side, in 3 in a perspective view. It is possible that the contact trenches 30, as shown in FIG 3 shown representation are structured in a passivation layer 26 formed as a through layer 32, but it is also possible that the passivation layer 26 is not formed as a continuous through layer 32, but rather that a separate individual passivation layer is applied to each electrode layer 16 to be insulated, which is not related to the adjacent individual passivation layers.

Wie in Fig. 3 zu sehen ist, ist die Kontaktierungsschicht 28 genau in dem Bereich auf die Passivierungsschicht 26 aufgebracht, in dem die Kontaktierungsgräben 30 zum Freilegen der anzukontaktierenden Elektrodenschichten 16 angeordnet sind. Die Passivierungsschicht 26 ist daher zumindest bereichsweise von der Kontaktierungsschicht 28 bedeckt.As in 3 As can be seen, the contacting layer 28 is applied to the passivation layer 26 precisely in the region in which the contacting trenches 30 for exposing the electrode layers 16 to be contacted are arranged. The passivation layer 26 is therefore covered by the contacting layer 28 at least in regions.

Wenn, wie in Fig. 3 gezeigt ist, die Passivierungsschicht 26 die senkrecht zu der Längsachse 18 an die Oberfläche 22 hervortretenden Elektrodenschichten 16 nicht vollflächig bedeckt, sondern bereichsweise freilässt, ist die Kontaktierungsschicht 28 vorteilhaft nur in dem Bereich der Kontaktierungsgräben 30 vorgesehen, um so einen Überschlag zwischen benachbarten Elektrodenschichten 16 zu vermeiden.If, as in 3 As shown, the passivation layer 26 does not cover the entire surface of the electrode layers 16 protruding perpendicularly to the longitudinal axis 18 on the surface 22, but rather leaves them exposed in some areas, is the contacting layer 28 is advantageously provided only in the region of the contacting trenches 30 in order to avoid a flashover between adjacent electrode layers 16.

In die Kontaktierungsschicht 28 werden später Weiterkontaktierungen eingelegt, beispielsweise Kontaktierungspins, über die dann von außen eine Spannung an die jeweiligen kontaktierten Elektrodenschichten 16 angelegt werden kann. Um eine besonders stabile Ankontaktierung zu erreichen, die die zunehmenden Anforderungen an piezoelektrische Aktuatorbauelemente 10, wie sie beispielsweise in Injektoren von Brennkraftmaschinen verbaut sind, erfüllen, und bei denen hohe Temperaturen und hohe mechanische Belastungen vorliegen, ist die Kontaktierungsschicht 28 durch ein Sintersilber 34 gebildet. Sintersilber 34 hat den Vorteil, dass es eine sehr gute Temperaturleitfähigkeit und eine sehr gute elektrische Leitfähigkeit hat, wodurch ein Übergangswiderstand zu den Elektrodenschichten 16 und der Durchgangswiderstand durch die Kontaktierungsschicht 28 verbessert werden kann. Dadurch weist die Ankontaktierung der Elektrodenschichten 16 insgesamt eine gute thermische, elektrische und mechanische Widerstandskraft gegen hohe Belastungen auf.Further contacts, for example contact pins, are later inserted into the contacting layer 28, via which a voltage can then be applied to the respective contacted electrode layers 16 from the outside. In order to achieve a particularly stable contacting that meets the increasing demands on piezoelectric actuator components 10, such as those installed in injectors of internal combustion engines, and where high temperatures and high mechanical loads are present, the contacting layer 28 is formed by a sintered silver 34. Sintered silver 34 has the advantage that it has very good thermal conductivity and very good electrical conductivity, as a result of which a contact resistance to the electrode layers 16 and the contact resistance through the contacting layer 28 can be improved. As a result, the contacting of the electrode layers 16 has overall good thermal, electrical and mechanical resistance to high loads.

Das Sintersilber 34 fließt in die Kontaktierungsgräben 30 und kommt so in direkten Kontakt mit den freigelegten Elektrodenschichten 16. Das Sintersilber 34 wird danach durch einen Sinterschritt verfestigt, sodass sich die stabile Kontaktierungsschicht 28 ausbildet. Das Sintern erfolgt dabei bei Temperaturen zumeist unter 350° C.The sintered silver 34 flows into the contacting trenches 30 and thus comes into direct contact with the exposed electrode layers 16. The sintered silver 34 is then solidified by a sintering step, so that the stable contacting layer 28 is formed. Sintering usually takes place at temperatures below 350°C.

Da die Passivierungsschicht 26 bereits vor dem Sinterschritt des Sintersilbers 34 auf den Schichtstapel 12 aufgebracht ist, ist es wichtig, dass das Passivierungsschichtmaterial 36, aus dem die Passivierungsschicht 26 gebildet wird, bei der Sintertemperatur des Sintersilbers 34 thermisch stabil ist. Dazu wird vorteilhaft Polyimid 38 als Passivierungsschichtmaterial 36 verwendet, das bereits vor Aufbringen des Sintersilbers 34 vollständig imidisiert ist. Das bedeutet, die Polymerisationsreaktion aus einem Polyimid-Precursor, aus dem durch die Polymerisation das Polyimid 38 gebildet wird, hat schon zuvor stattgefunden. Ein solches vollständig imidisiertes Polyimid 38 ist vorteilhaft bis zu einer Temperatur von 350° C thermisch stabil und hat somit eine ausreichende thermische Widerstandskraft gegen die Sintertemperatur des Sintersilbers 34.Since the passivation layer 26 is already applied to the layer stack 12 before the sintering step of the sintered silver 34 , it is important that the passivation layer material 36 from which the passivation layer 26 is formed is thermally stable at the sintering temperature of the sintered silver 34 . This will be beneficial Polyimide 38 used as the passivation layer material 36, which is already completely imidized before the sintered silver 34 is applied. That is, the polymerization reaction from a polyimide precursor, from which polyimide 38 is formed by polymerization, has previously occurred. Such a fully imidized polyimide 38 is advantageously thermally stable up to a temperature of 350° C. and thus has sufficient thermal resistance to the sintering temperature of the sintered silver 34.

Es ist daher möglich, durch die vorteilhafte Kombination von Sintersilber 34 als Kontaktierungsschichtmaterial und Polyimid 38 als Passivierungsschichtmaterial 36 den Schichtstapel 12 schichtweise von innen nach außen aufzubauen.It is therefore possible, through the advantageous combination of sintered silver 34 as the contacting layer material and polyimide 38 as the passivation layer material 36, to build up the layer stack 12 in layers from the inside out.

Bei bisherigen Versuchen, Sintersilber 34 als vorteilhaftes Ankontaktierungsmaterial zu verwenden, bestand die Problematik, dass die bisher verwendeten Materialien zum Bilden der Passivierungsschicht 26 thermisch nicht stabil waren, sodass aufwendige Prozessschritte angewendet werden mussten, bei denen, zum Beispiel durch Bildung entsprechender Gräben, in dem Schichtstapel 12 eine aufgebrachte Sintersilberschicht mit dem Passivierungsschichtmaterial 36 unterschichtet werden musste, um zu verhindern, dass das Passivierungsschichtmaterial 36 der Sintertemperatur des Sintersilbers 34 ausgesetzt wird. Durch Vorsehen solcher Gräben gehen jedoch die vollaktiven Eigenschaften des Schichtstapels 12 verloren. Im Gegensatz dazu können diese vollaktiven Eigenschaften bei der Verwendung von Polyimid 38 als Passivierungsschichtmaterial 36 erhalten bleiben, da dieses nicht in extra gebildete Gräben das Sintersilber 34 unterschichten muss, weil das Sintersilber 34 nach Aufbringen des Polyimides 38 aufgesintert werden kann.In previous attempts to use sintered silver 34 as an advantageous contacting material, there was the problem that the materials previously used to form the passivation layer 26 were not thermally stable, so that complex process steps had to be used in which, for example, by forming appropriate trenches in which Layer stack 12 an applied layer of sintered silver had to be layered with the passivation layer material 36 in order to prevent the passivation layer material 36 from being exposed to the sintering temperature of the sintered silver 34 . However, the fully active properties of the layer stack 12 are lost as a result of the provision of such trenches. In contrast to this, these fully active properties can be retained when polyimide 38 is used as the passivation layer material 36, since this does not have to underlay the sintered silver 34 in specially formed trenches because the sintered silver 34 can be sintered on after the polyimide 38 has been applied.

Um eine sehr gute Verbindung zwischen den Elektrodenschichten 16 und dem Sintersilber 34 als Kontaktierungsschicht 28 zu erzielen, ist es besonders vorteilhaft, wenn die Elektrodenschichten 16 mit bzw. aus einer Silberlegierung 40 gebildet sind.In order to achieve a very good connection between the electrode layers 16 and the sintered silver 34 as the contacting layer 28, it is particularly advantageous if the electrode layers 16 are formed with or from a silver alloy 40.

Fig. 4 zeigt eine schematische Darstellung eines Flussidagrammes eines Herstellungsverfahrens, mit dem das piezoelektrische Aktuatorbauelement 10 erzeugt wird. Dabei wird in einem ersten Schritt ein Schichtstapel 12 bereitgestellt, der entlang einer Längsachse 18 abwechselnd aufeinander geschichtete Keramikschichten 14 und Elektrodenschichten 16 aufweist. Dabei ist der Schichtstapel 12 insbesondere ein vollaktiver Schichtstapel 12, bei dem sich die Elektrodenschichten 16 bis an die Oberfläche 22 des Schichtstapels 12 erstrecken. 4 FIG. 12 shows a schematic representation of a flow diagram of a manufacturing method with which the piezoelectric actuator component 10 is produced. In a first step, a layer stack 12 is provided, which has ceramic layers 14 and electrode layers 16 stacked alternately on top of one another along a longitudinal axis 18 . In this case, the layer stack 12 is in particular a fully active layer stack 12 in which the electrode layers 16 extend up to the surface 22 of the layer stack 12 .

In einem zweiten Schritt wird dann auf wenigstens eine Seitenfläche 20 des Schichtstapels 12 das Passivierungsschichtmaterial 36 aufgebracht, beispielsweise ein Polyimid-Precursor, aus dem durch eine Polymerisationsreaktion ein Polyimid 38 gebildet werden kann. In einem dritten Schritt wird dann das Passivierungsschichtmaterial 36 ausgehärtet, beispielsweise bei der Verwendung von Polyimid 38 durch die vollständige Imidisierung. Dieser Schritt ist jedoch nur optional, es ist auch möglich, einen bereits voll imidisierten Lack zu verwenden, sodass der Imidisierungsschritt nicht zwingend erfolgen muss.In a second step, the passivation layer material 36 is then applied to at least one side surface 20 of the layer stack 12, for example a polyimide precursor from which a polyimide 38 can be formed by a polymerization reaction. In a third step, the passivation layer material 36 is then cured, for example when polyimide 38 is used, by complete imidization. However, this step is only optional; it is also possible to use a lacquer that is already fully imidized, so that the imidization step does not necessarily have to take place.

Danach wird die Passivierungsschicht 26 strukturiert, beispielsweise durch Laserstrukturieren, sodass jede zweite entlang der Längsachse 18 angeordnete Elektrodenschicht 16 freigelegt wird, damit sie von außen ankontaktiert werden kann. Danach wird in einem weiteren Schritt die so strukturierte Passivierungsschicht 26 mit einem Sintersilber 34 beschichtet, und zwar derart, dass das Sintersilber 34 in die strukturierten Kontaktierungsgräben 30 in der Passivierungsschicht 26 einläuft. Am Ende wird dann das Sintersilber 34 gesintert, um die Kontaktierungsschicht 28 auszuhärten und somit zu bilden.The passivation layer 26 is then structured, for example by laser structuring, so that every second electrode layer 16 arranged along the longitudinal axis 18 is uncovered so that it can be contacted from the outside. Then, in a further step, the passivation layer 26 structured in this way is coated with a sintered silver 34 in such a way that the sintered silver 34 runs into the structured contacting trenches 30 in the passivation layer 26 . At the At the end, the sintered silver 34 is then sintered in order to harden and thus form the contacting layer 28 .

Claims (9)

  1. Piezoelectric actuator component (10), comprising:
    - a layer stack (12) of piezoelectric ceramic layers (14) and electrode layers (16), which are stacked alternately one on top of the other along a longitudinal axis (18), the layer stack (12) having a number of side faces (20a - d) extending parallel to the longitudinal axis (18);
    - a passivation layer (26) on at least one of the side faces (20a - d), for the electrical insulation of every second electrode layer (16) arranged along the longitudinal axis (18);
    - a contacting layer (28) on the at least one side face (20a - d), for the electrical contacting of every second electrode layer (16) that is not electrically insulated by the passivation layer (26);
    the passivation layer (26) on each of the electrically insulated electrode layers (16) being covered at least in certain regions by the contacting layer (28),
    - the contacting layer (28) being formed by a sinter silver (34), and the passivation layer (26) being formed by a passivation layer material (36), to be specific by a completely imidized polyimide (38), which is thermally stable at the sintering temperature of the sinter silver (34).
  2. Piezoelectric actuator component (10) according to Claim 1,
    characterized in that the passivation layer (26) is formed by a passivation layer material (36) that is thermally stable up to a temperature of 350°C.
  3. Piezoelectric actuator component (10) according to either of Claims 1 and 2,
    characterized in that the layer stack (12) is formed as a fully active layer stack (12), all of the electrode layers (16) that are arranged along the longitudinal axis (18) extending essentially up to a surface (22) of the layer stack (12) at least on the at least one side face (20a - d) .
  4. Piezoelectric actuator component (10) according to one of Claims 1 to 3,
    characterized in that a surface (22) of the layer stack (12) on the at least one side face (20a - d) is formed essentially by arranging flush one against the other end faces (24) of the electrode layers (16) and ceramic layers (14) stacked one on top of the other that are arranged on the at least one side face (20a - d), the surface (22), in particular in the region of the passivation layer (26), being formed without any channels extending in the layer stack (12).
  5. Piezoelectric actuator component (10) according to one of Claims 1 to 4,
    characterized in that the passivation layer (26) is formed as a through-layer (32), which is arranged parallel to the longitudinal axis (18) and, for exposing the electrode layers (16) to be contacted, has at every second electrode layer (16) arranged along the longitudinal axis (18) a contacting channel (30), formed in particular by laser structuring, or in that the passivation layer (26) is formed by individual passivation layers arranged at every second electrode layer (16) arranged along the longitudinal axis (18).
  6. Piezoelectric actuator component (10) according to one of Claims 1 to 5,
    characterized in that the electrode layers (16) are formed with silver, in particular with a silver alloy (40) .
  7. Production method for producing a piezoelectric actuator component (10), in particular according to one of Claims 1 to 6, comprising the steps of:
    - providing a layer stack (12) of piezoelectric ceramic layers (14) and electrode layers (16), which are stacked alternately one on top of the other along a longitudinal axis (18), the layer stack (12) having a number of side faces (20a - d) extending parallel to the longitudinal axis (18);
    - forming an electrically insulating passivation layer (26) from a passivation layer material (36) on at least one of the side faces (20a - d), a polyimide (38) being used as the passivation layer material (26);
    - structuring, in particular laser structuring, the passivation layer (26) to expose every second electrode layer (16) arranged along the longitudinal axis (18) on the at least one side face (20a - d);
    - coating the structured passivation layer (26) with a sinter silver (34);
    - sintering the sinter silver (34).
  8. Production method according to Claim 7,
    the polyimide (38) being imidized, in particular completely, before the coating of the at least one side face (20a - d) with the sinter silver (34).
  9. Production method according to either of Claims 7 and 8,
    characterized in that a fully active layer stack (12), in which all of the electrode layers (16) that are arranged along the longitudinal axis (18) extend essentially up to a surface (22) of the layer stack (12) at least on the at least one side face (20a - d), is provided as the layer stack (12).
EP17707319.4A 2016-03-16 2017-02-27 Piezoelectric actuator component and production method for producing a piezoelectric actuator component Active EP3430653B1 (en)

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CN108886091B (en) 2022-11-25
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EP3430653A1 (en) 2019-01-23
WO2017157642A1 (en) 2017-09-21
CN108886091A (en) 2018-11-23
DE102016204308A1 (en) 2017-09-21
KR20180105695A (en) 2018-09-28

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