EP3383813A1 - Susbtrate provided with a stack having thermal properties, comprising at least one nickel oxide layer - Google Patents

Susbtrate provided with a stack having thermal properties, comprising at least one nickel oxide layer

Info

Publication number
EP3383813A1
EP3383813A1 EP16819144.3A EP16819144A EP3383813A1 EP 3383813 A1 EP3383813 A1 EP 3383813A1 EP 16819144 A EP16819144 A EP 16819144A EP 3383813 A1 EP3383813 A1 EP 3383813A1
Authority
EP
European Patent Office
Prior art keywords
layer
substrate
nickel oxide
glazing
oxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16819144.3A
Other languages
German (de)
French (fr)
Inventor
Denis Guimard
Silvia MARIANI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Publication of EP3383813A1 publication Critical patent/EP3383813A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3607Coatings of the type glass/inorganic compound/metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/73Anti-reflective coatings with specific characteristics

Definitions

  • the invention relates to a transparent substrate, in particular a mineral rigid material such as glass, said substrate being coated with a stack of thin layers comprising a functional layer.
  • metal type that can act on solar radiation and / or long-wave infrared radiation.
  • the invention relates more particularly to the use of such substrates for manufacturing thermal insulation and / or sun protection glazings.
  • These glazings can be intended both to equip buildings and vehicles, especially in order to reduce the air conditioning effort and / or to prevent excessive overheating (so-called “solar control” glazing) and / or to reduce the amount of energy dissipated to the outside (so-called “low emissive” glazing) driven by the ever increasing importance of glazed surfaces in buildings and vehicle interiors.
  • These windows can also be integrated in glazing with special features, such as heated windows or electrochromic windows.
  • a type of layer stack known to give substrates such properties consists of a functional metallic layer with infrared reflection properties and / or solar radiation, especially a metallic functional layer based on silver or of metal alloy containing silver.
  • the functional layer is thus disposed between two antireflection coatings each in general comprising several layers which are each made of a dielectric material of the nitride type and in particular silicon or aluminum nitride or of the oxide type. From an optical point of view, the purpose of these coatings which frame the functional metallic layer is to "antireflect" this metallic functional layer.
  • a blocking coating is however sometimes interposed between one or each antireflection coating and the functional metal layer, the blocking coating disposed under the functional layer in the direction of the substrate, protects it during a possible heat treatment at high temperature, the bending type and / or quenching and the blocking coating disposed on the functional layer opposite the substrate protects this layer from possible degradation during the deposition of the superior antireflection coating and during a possible high temperature heat treatment, of the bending and / or quenching type.
  • the object of the invention is to overcome the drawbacks of the prior art, by developing a new type of stack of functional monolayer layers or functional multilayer layers, stack which has a reduced square resistance (and therefore a reduced emissivity), after (or) heat treatment (s) at high temperature of the bending and / or quenching and / or annealing and / or flash heating type.
  • a transparent substrate according to claim 1 This substrate is provided on a main face with a stack of thin layers comprising at least one or even a single metallic functional layer.
  • said antireflection coatings each comprising at least one dielectric layer, said functional layer being disposed between the two antireflection coatings, at least one Ni x O nickel oxide layer being located under and in contact with the functional layer in the direction of said substrate, with a physical thickness of said Ni x O nickel oxide layer; at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
  • metal layer in the sense of the present invention, it should be understood that the layer comprises neither oxygen nor nitrogen.
  • coating in the sense of the present invention, it should be understood that there may be a single layer or several layers of different materials inside the coating.
  • contact is meant in the sense of the invention that no layer is interposed between the two layers considered.
  • the term "based on” means that the element or material thus designated is present at more than 50 atomic% in the layer under consideration.
  • the single functional layer (or layers) with infrared reflection properties and / or in the solar radiation is (or are) a layer (or layers) ) continue.
  • the Ni x O nickel oxide layer contains no element other than Ni and O.
  • the material constituting this layer may be described as: "pure nickel oxide”.
  • Ni x O refers to the fact that there may be ⁇ 1 ⁇ 1 but also that the constituent material of the layer may not have exactly this stable stoichiometry:
  • the material of the layer may be slightly over-stoichiometric to Ni, with for example a 0.8 ⁇ x ⁇ 1 and in particular 0.8 ⁇ x ⁇ 0.95 or
  • the material of the layer may be slightly under stoichiometric in Ni with for example a 1 ⁇ x ⁇ 1, 2 and in particular 1, 05 ⁇ x ⁇ 1, 2.
  • said Ni x O nickel oxide layer has an x between 1, 2 and 0.5 or even between 0.9 and 0.6.
  • a layer based on zinc oxide is located below, towards said substrate, and in contact with said nickel oxide layer Ni x O.
  • a Nickel oxide layer Ni y O is located above and in contact with, and / or is located beneath and in contact with, said Nickel Oxide Ni x O layer, a Nickel Oxide layer. closer to said functional layer being then less oxidized than another layer of nickel oxide further away from said functional layer from the substrate. Indeed, a more oxidized nickel oxide layer is better blocker and a less oxidized nickel oxide layer is better light absorbing.
  • said underlying antireflection and antireflection coatings each comprise at least one dielectric layer based on silicon nitride, optionally doped with at least one other element, such as aluminum.
  • Ni x O nickel oxide layer it is also possible for another Ni x O nickel oxide layer to be in the stack, located on the functional layer and in contact with the functional layer, with a physical thickness of said Ni x O nickel oxide layer. at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
  • the x is preferably the same for these two Ni x O nickel oxide layers to facilitate deposition.
  • a metal layer in particular comprising nickel and chromium, to be situated on and in contact with the functional layer, with a physical thickness of said metal layer of at least 0.3 nm, or even between 0 , 6 and 8.0 nm, or even between 1.0 and 5.0 nm.
  • Ni x O nickel oxide layer it is further possible for a Ni x O nickel oxide layer to be located on said functional layer in the direction of the substrate, with the interposition of at least one layer or layer of a different material between said oxide layer.
  • nickel Ni x O and said functional layer said Ni x O nickel oxide layer preferably having a thickness between 0.3 and 10.0 nm, or even between 0.6 and 8.0 nm, or even between 1, 0 and 5.0 nm. This can also have a favorable influence on the crystallographic state of the metallic functional layer, and therefore the square resistance of the stack.
  • the stack may comprise a last layer ("overcoat" in English), that is to say a protective layer,
  • This protective layer preferably has a physical thickness of between 0.5 and 10 nm.
  • the glazing according to the invention incorporates at least the carrier substrate of the stack according to the invention, optionally associated with at least one other substrate.
  • Each substrate can be clear or colored.
  • At least one of the substrates may be colored glass in the mass. The choice of the type of coloration will depend on the level of light transmission and / or the colorimetric appearance sought for the glazing once its manufacture is complete.
  • the glazing according to the invention may have a laminated structure, in particular associating at least two rigid substrates of the glass type with at least one thermoplastic polymer sheet, in order to present a glass-like structure / thin-film stack / sheet (s) / glass.
  • the polymer may especially be based on polyvinyl butyral PVB, ethylene vinyl acetate EVA, PET polyethylene terephthalate, PVC polyvinyl chloride.
  • the glazing may furthermore have a structure of glass type / stack of thin layers / sheet (s) of polymer.
  • the glazings according to the invention are capable of undergoing heat treatment without damage for the stack of thin layers. They are therefore optionally curved and / or tempered.
  • the glazing may be curved and / or tempered by being constituted by a single substrate, the one provided with the stack. It is then a glazing called "monolithic".
  • the stack of thin layers is preferably on an at least partially non-flat face.
  • the glazing may also be a multiple glazing, including a double glazing, at least the carrier substrate of the stack can be curved and / or tempered. It is preferable in a multiple glazing configuration that the stack is disposed so as to be turned towards the interleaved gas blade side. In a laminated structure, the stack may be in contact with the polymer sheet.
  • the glazing may also be a triple glazing consisting of three sheets of glass separated two by two by a gas blade.
  • the carrier substrate of the stack may be in face 2 and / or in face 5, when it is considered that the incident direction of sunlight passes through the faces in increasing order of their number. .
  • the carrier substrate of the stack can be curved or tempered glass, this substrate can be curved or hardened before or after the deposition of the stack.
  • the present invention thus makes it possible to produce a stack of functional metal monolayer thin layers or metal functional multilayer layers which has a lower square resistance after heat treatment, without adversely affecting the optical parameters of the stack.
  • FIG. 1 a functional monolayer stack according to the invention, the functional layer being deposited directly on a sub-blocking coating and directly under an over-blocking coating, the stack being illustrated during the treatment with the aid of a source producing radiation;
  • FIG. 2 a double glazing solution incorporating a functional monolayer stack
  • FIG. 1 illustrates a structure of a functional monolayer stack according to the invention deposited on a face 29 of a transparent glass substrate, in which the single functional layer 140, in particular based on silver or alloy metal containing silver, is disposed between two antireflection coatings, the underlying antireflection coating 120 located below the functional layer 140 towards the substrate 30 and the overlying antireflection coating 160 disposed above the functional layer. 140 opposite the substrate 30.
  • These two anti-reflection coatings 120, 160 each comprise at least one dielectric layer 122, 126; 162, 168 and preferably each at least two dielectric layers: in each dielectric coating, a dielectric layer 126, 162, preferably based on zinc oxide which is closer to the functional layer 140 and a dielectric layer 122, 168 , preferably based on silicon nitride, further away from the functional layer 140.
  • the functional layer 140 may be deposited directly on a sub-blocking coating 130 placed between the underlying antireflection coating 120 and the functional layer 140 and, on the other hand, the functional layer 140 may be deposited directly under an overblocking coating 150 disposed between the functional layer 140 and the overlying antireflection coating 160.
  • the layers of under and / or over-blocking although deposited in metallic form and presented as being metal layers, are sometimes in practice oxidized layers because one of their functions (in particular for the over-blocking layer) is to oxidize during the deposition of the stack to protect the functional layer.
  • At least one layer of nickel oxide Ni x O (the layer 135 in Table 1 below) is located under and in contact with the functional layer 140 towards said substrate 30, with a physical thickness of said Ni x O 135 nickel oxide layer of at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
  • this glazing comprises two substrates 60, 30 which are held together by a frame structure 90 and which are separated from one another.
  • the substrate 30, 60 respectively has an inner face 29, 61 in contact with the intervening gas blade 19, the other face 31, 59 of the substrate 30, 60 being in contact with the substrate. IS interior space, respectively the outer space ES.
  • the glazing thus makes a separation between an outer space ES and an interior space IS.
  • the stack can be positioned in face 3 (on the innermost sheet of the building by considering the incident sense of sunlight entering the building and on its face facing the gas blade).
  • FIG. 2 illustrates this positioning (the incident direction of the solar light entering the building being illustrated by the double arrow) in front of a stack of thin layers 35 positioned on an inner face 29 of the substrate 30 in contact with the spacer gas strip 19, the other face 31 of the substrate 30 being in contact with the interior space IS.
  • one of the substrates has a laminated structure.
  • the layer deposition conditions are:
  • the deposited layers can thus be classified in four categories:
  • i-layers of anti-reflective / dielectric material having a n / k ratio over the entire upper visible wavelength range at 5: Si 3 N 4 , ZnO;
  • metallic functional layers made of material with infrared reflection properties and / or solar radiation: Ag; Silver has been found to have a ratio of 0 ⁇ n / k ⁇ 5 over the entire visible wavelength range, and its bulk electrical resistivity is less than 10 -6 O.cm;
  • Figure 3 illustrates the deposition conditions of these two layers.
  • the stack of thin layers is deposited on a clear soda-lime glass substrate of a thickness of 4 mm of the Planiclear brand, distributed by the company SAINT-GOBAIN.
  • the column "No.” indicates the number of the layer and the second column indicates the coating, in connection with the configuration of Figure 1; the third column indicates the deposited material for the layer of the first column.
  • the substrate 30 is located under the layer 122 and the layers of the examples are located in the order indicated by the left column, from bottom to top starting from this substrate 30; the numbered layers in these tables which are not shown in Figure 1 are thus located in the examples in the same manner as indicated in Table 1.
  • the nickel oxide layer 134 and / or 135 and / or 136 is in the underlying blocking coating 130 and is in contact with the metallic functional layer. 140.
  • the nickel oxide Ni y O of the layer 134 or 136 is different from the nickel oxide Ni x O of the layer 135: with reference to FIG. 3 which illustrates the hysteresis curve of the deposited nickel oxide from a metal target in an oxidizing atmosphere (the abscissa indicates the flow of oxygen, in sccm and the ordinate indicates the voltage across the target), the Ni x O is deposited under normal conditions leading to an oxide rich in oxygen (in other words supe- stoichiometric in oxygen, or stoichiometric in oxygen, even slightly under stoichiometric in oxygen), whereas the Ni y O is deposited under conditions leading to an oxide rich in Ni (in other words simply under -stoichiometric oxygen).
  • the use of Ni y O leads to a higher light absorption.
  • Example 6 The difference between Example 6 and Example 2 is that in the context of Example 2 (as for the other examples), the nickel oxide layer Ni x O 135 is deposited directly on a layer based on zinc oxide 126, while in the context of Example 6, the nickel oxide layer Ni x O 135 is deposited directly on a layer 122 based on silicon nitride. It has been noticed that the square resistance of Example 6 is higher than that of Example 2 because this example 6 does not benefit from the favorable conditions obtained when the nickel oxide layer is deposited directly on a base layer. zinc oxide.
  • the heat treatment could have consisted in running the substrate 30 at a speed of 10 m / min under a laser line 8.
  • a laser line can be 60 ⁇ wide and 25 W / mm power. with the laser line oriented perpendicular to the face 29 and towards the terminal layer of the stack, the one farthest from the face 29, that is to say by arranging the laser line (illustrated by the black right arrow ) above the stack and directing the laser towards the stack, as shown in Figure 1.
  • the profile of the Ni element was analyzed both before heat treatment (curves 4 BHT and 5 BHT), and after a heat treatment at 650 ° C. for 10 minutes and then cooling in the open air until the temperature of the room of 20 ° C.
  • the abscissa exposes an arbitrary unit of time which makes it possible to locate the different layers, which are recalled by their reference number above the figures; the ordinate exposes an arbitrary unit of intensity.
  • the 5BHT curve shows the presence of Ni both in the blocking layer
  • Curve 5AHT suggests that the material constituting the blocking layer 150 has migrated through the wetting layer 140 into the Ni x O layer 135 because of the heat treatment where it has been somehow trapped.
  • Example 2 On the basis of Example 2, it was found that a 19 nm thick Ni x O layer deposited in case i, further improved (decreased still further) the square resistance, with a decrease -28% compared to that of Example 1 after heat treatment; however, light absorption in the visible, Abs is then raised to 36% after heat treatment
  • the resistivity of the Ni x O deposited according to the case i above, before heat treatment was of the order of 190 ⁇ , a value close to that of ⁇ (about 200 ⁇ ⁇ ) and well higher than the resistivity of the silver used for the functional layer 140, which is of the order of 3 ⁇ ⁇ ; after the heat treatment at 650 ° C. for 10 minutes, the resistivity of this same Ni x O deposited according to the case i above was lowered to approximately 30 ⁇ ⁇ .
  • Example 2 again on the basis of Example 2, two other thicknesses were tested for layer 135 in Ni x O: 3 nm and 10 nm.
  • the decrease of the resistance per square after the heat treatment was of the same order of magnitude as for Example 2: 5% compared with Example 1.
  • the mechanical strength of Example 2 was tested and compared with that of example 1: it is also good, sometimes even better for heavy loads.
  • the substrate coated with the stack according to the invention Due to the low square resistance obtained as well as the good optical properties (in particular light transmission in the visible), it is possible, moreover, to use the substrate coated with the stack according to the invention to achieve a transparent electrode substrate.
  • the transparent electrode substrate may be suitable for any heated glazing, for any electrochromic glazing, any display screen, or for a photovoltaic cell (or panel) and in particular for a transparent photovoltaic cell backside.

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  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

The invention relates to a transparent substrate (30), the main face of which is provided with a stack of thin layers including at least one, or a single, functional metal layer (140) having reflection properties in the infrared and/or solar radiation ranges, in particular based on silver or metal alloy containing silver, and two anti-reflection coatings (120, 160), each comprising at least one dielectric layer (122, 126; 162, 168). The above-mentioned functional layer (140) is disposed between the two anti-reflection coatings (120, 160). The substrate is characterised in that at least one nickel oxide layer NixO is located under or in contact with the functional layer (140) in the direction of the substrate (30), the physical thickness of said nickel oxide layer NixO being at least 0.3 nm, or between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.

Description

SUBSTRAT MUNI D'UN EMPILEMENT A PROPRIETES THERMIQUES COMPORTANT AU MOINS UNE COUCHE EN OXYDE DE NICKEL L'invention concerne un substrat transparent notamment en un matériau rigide minéral comme le verre, ledit substrat étant revêtu d'un empilement de couches minces comprenant une couche fonctionnelle de type métallique pouvant agir sur le rayonnement solaire et/ou le rayonnement infrarouge de grande longueur d'onde.  The invention relates to a transparent substrate, in particular a mineral rigid material such as glass, said substrate being coated with a stack of thin layers comprising a functional layer. metal type that can act on solar radiation and / or long-wave infrared radiation.
L'invention concerne plus particulièrement l'utilisation de tels substrats pour fabriquer des vitrages d'isolation thermique et/ou de protection solaire. Ces vitrages peuvent être destinés aussi bien à équiper les bâtiments que les véhicules, en vue notamment de diminuer l'effort de climatisation et/ou d'empêcher une surchauffe excessive (vitrages dits « de contrôle solaire ») et/ou diminuer la quantité d'énergie dissipée vers l'extérieur (vitrages dits « bas émissifs ») entraînée par l'importance toujours croissante des surfaces vitrées dans les bâtiments et les habitacles de véhicules.  The invention relates more particularly to the use of such substrates for manufacturing thermal insulation and / or sun protection glazings. These glazings can be intended both to equip buildings and vehicles, especially in order to reduce the air conditioning effort and / or to prevent excessive overheating (so-called "solar control" glazing) and / or to reduce the amount of energy dissipated to the outside (so-called "low emissive" glazing) driven by the ever increasing importance of glazed surfaces in buildings and vehicle interiors.
Ces vitrages peuvent par ailleurs être intégrés dans des vitrages présentant des fonctionnalités particulières, comme par exemple des vitrages chauffants ou des vitrages électrochromes.  These windows can also be integrated in glazing with special features, such as heated windows or electrochromic windows.
Un type d'empilement de couches connu pour conférer aux substrats de telles propriétés est constitué d'une couche métallique fonctionnelle à propriétés de réflexion dans l'infrarouge et/ou dans le rayonnement solaire, notamment une couche fonctionnelle métallique à base d'argent ou d'alliage métallique contenant de l'argent.  A type of layer stack known to give substrates such properties consists of a functional metallic layer with infrared reflection properties and / or solar radiation, especially a metallic functional layer based on silver or of metal alloy containing silver.
Dans ce type d'empilement, la couche fonctionnelle se trouve ainsi disposée entre deux revêtements antireflets comportant chacun en général plusieurs couches qui sont chacune en un matériau diélectrique du type nitrure et notamment nitrure de silicium ou d'aluminium ou du type oxyde. Du point de vue optique, le but de ces revêtements qui encadrent la couche fonctionnelle métallique est « d'antirefléter » cette couche fonctionnelle métallique.  In this type of stack, the functional layer is thus disposed between two antireflection coatings each in general comprising several layers which are each made of a dielectric material of the nitride type and in particular silicon or aluminum nitride or of the oxide type. From an optical point of view, the purpose of these coatings which frame the functional metallic layer is to "antireflect" this metallic functional layer.
Un revêtement de blocage est toutefois intercalé parfois entre un ou chaque revêtement antireflet et la couche métallique fonctionnelle, le revêtement de blocage disposé sous la couche fonctionnelle en direction du substrat, la protège lors d'un éventuel traitement thermique à haute température, du type bombage et/ou trempe et le revêtement de blocage disposé sur la couche fonctionnelle à l'opposé du substrat protège cette couche d'une éventuelle dégradation lors du dépôt du revêtement antireflet supérieur et lors d'un éventuel traitement thermique à haute température, du type bombage et/ou trempe. A blocking coating is however sometimes interposed between one or each antireflection coating and the functional metal layer, the blocking coating disposed under the functional layer in the direction of the substrate, protects it during a possible heat treatment at high temperature, the bending type and / or quenching and the blocking coating disposed on the functional layer opposite the substrate protects this layer from possible degradation during the deposition of the superior antireflection coating and during a possible high temperature heat treatment, of the bending and / or quenching type.
Il est connu, par exemple de la demande de brevet européen N° EP 718 250 qu'une couche diélectrique dite « de mouillage » à base d'oxyde de zinc disposée directement sous une couche fonctionnelle métallique à base d'argent, en direction du substrat porteur, favorise l'obtention d'un état cristallographique adéquat de la couche fonctionnelle métallique tout en présentant l'avantage de pouvoir supporter un traitement thermique à haute température de bombage, trempe. It is known, for example from European Patent Application No. EP 718,250, that a dielectric layer called "wetting" based on zinc oxide placed directly under a metallic functional layer based on silver, in the direction of carrier substrate, promotes the achievement of a suitable crystallographic state of the metal functional layer while having the advantage of being able to withstand a heat treatment at high temperature bending, quenching.
Ce document divulgue par ailleurs l'effet favorable de la présence d'une couche déposée sous forme métallique directement sur et au contact de la couche fonctionnelle à base d'argent pour la protection de la couche fonctionnelle pendant le dépôt des autres couches au-dessus et pendant le un traitement thermique à haute température. L'homme du métier connaît ce type de couche sous l'appellation générique de « couche de blocage » ou « blocker ».  This document also discloses the favorable effect of the presence of a layer deposited in metallic form directly on and in contact with the functional layer based on silver for the protection of the functional layer during the deposition of the other layers above. and during the heat treatment at high temperature. Those skilled in the art know this type of layer under the generic name of "blocking layer" or "blocker".
Il est en outre connu de la demande internationale de brevet N° WO 2010/142926 différentes solutions pour réaliser un chauffage éclair (« flash heating » en anglais) d'un empilement de couches minces comportant une ou plusieurs couches fonctionnelles à base d'argent. Le traitement par chauffage éclair permet d'améliorer la qualité de la couche fonctionnelle métallique et donc de diminuer l'émissivité (qui est directement liée à la résistance par carré) et l'utilisation d'une couche intermédiaire absorbante permet d'accroître l'absorption de l'empilement pendant le traitement afin qu'il soit court mais efficace. Comme la couche intermédiaire absorbante devient transparente lors du traitement, les caractéristiques optiques de l'empilement après traitement sont intéressantes (une transmission lumineuse élevée peut notamment être obtenue).  It is further known from International Patent Application No. WO 2010/142926 various solutions for carrying out a flash heating in a stack of thin layers comprising one or more functional layers based on silver. . The flash heating treatment makes it possible to improve the quality of the metallic functional layer and thus to reduce the emissivity (which is directly related to the resistance per square) and the use of an absorbent intermediate layer makes it possible to increase the absorption of the stack during the treatment so that it is short but effective. As the absorbing intermediate layer becomes transparent during the treatment, the optical characteristics of the stack after treatment are interesting (a high light transmission can in particular be obtained).
Le but de l'invention est de parvenir à remédier aux inconvénients de l'art antérieur, en mettant au point un nouveau type d'empilement de couches monocouche fonctionnelle ou pluri-couches fonctionnelles, empilement qui présente une résistance par carré réduite (et donc une émissivité réduite), après un (ou des) traitement(s) thermique(s) à haute température du type bombage et/ou trempe et/ou recuit et/ou chauffage éclair.  The object of the invention is to overcome the drawbacks of the prior art, by developing a new type of stack of functional monolayer layers or functional multilayer layers, stack which has a reduced square resistance (and therefore a reduced emissivity), after (or) heat treatment (s) at high temperature of the bending and / or quenching and / or annealing and / or flash heating type.
Il a été découvert que, d'une manière surprenante, la présence d'une couche en oxyde de nickel dans un tel empilement avait des effets très favorables sur la réduction de la résistance par carré de l'empilement dans le cas où cette couche en oxyde de nickel est directement au contact et sous une couche fonctionnelle métallique à base d'argent. L'invention a ainsi pour objet, dans son acception la plus large, un substrat transparent selon la revendication 1. Ce substrat est muni sur une face principale d'un empilement de couches minces comportant au moins une, voire une seule, couche fonctionnelle métallique à propriétés de réflexion dans l'infrarouge et/ou dans le rayonnement solaire, notamment à base d'argent ou d'alliage métallique contenant de l'argent, et deux revêtements antireflet, lesdits revêtements antireflet comportant chacun au moins une couche diélectrique, ladite couche fonctionnelle étant disposée entre les deux revêtements antireflet, au moins une couche en oxyde de nickel NixO étant située sous et au contact de la couche fonctionnelle en direction dudit substrat, avec une épaisseur physique de ladite couche en oxyde de nickel NixO d'au moins 0,3 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. It has been discovered that, surprisingly, the presence of a nickel oxide layer in such a stack has very favorable effects on the reduction of the resistance per square of the stack in the case where this layer in Nickel oxide is directly in contact and under a metallic silver-based functional layer. The object of the invention is therefore, in its widest sense, a transparent substrate according to claim 1. This substrate is provided on a main face with a stack of thin layers comprising at least one or even a single metallic functional layer. with reflection properties in the infrared and / or in solar radiation, in particular based on silver or metal alloy containing silver, and two anti-reflective coatings, said antireflection coatings each comprising at least one dielectric layer, said functional layer being disposed between the two antireflection coatings, at least one Ni x O nickel oxide layer being located under and in contact with the functional layer in the direction of said substrate, with a physical thickness of said Ni x O nickel oxide layer; at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
Par « couche métallique » au sens de la présente invention, il faut comprendre que la couche ne comprend ni oxygène, ni azote.  By "metal layer" in the sense of the present invention, it should be understood that the layer comprises neither oxygen nor nitrogen.
Par « revêtement » au sens de la présente invention, il faut comprendre qu'il peut y avoir une seule couche ou plusieurs couches de matériaux différents à l'intérieur du revêtement.  By "coating" in the sense of the present invention, it should be understood that there may be a single layer or several layers of different materials inside the coating.
Par « au contact » on entend au sens de l'invention qu'aucune couche n'est interposée entre les deux couches considérées.  By "contact" is meant in the sense of the invention that no layer is interposed between the two layers considered.
Par « à base de » on entend au sens de l'invention que l'élément ou le matériau ainsi désigné est présent à plus de 50 % atomique dans la couche considérée.  For the purpose of the invention, the term "based on" means that the element or material thus designated is present at more than 50 atomic% in the layer under consideration.
Avantageusement, l'unique (ou les) couche(s) fonctionnelle(s) métallique(s) à propriétés de réflexion dans l'infrarouge et/ou dans le rayonnement solaire, est (ou sont) une (ou des) couche(s) continue(s).  Advantageously, the single functional layer (or layers) with infrared reflection properties and / or in the solar radiation, is (or are) a layer (or layers) ) continue.
De fait, selon l'invention, la couche en oxyde de nickel NixO ne comporte aucun autre élément que Ni et O. Le matériau constituant cette couche peut être qualifié de : « oxyde de nickel pur ». In fact, according to the invention, the Ni x O nickel oxide layer contains no element other than Ni and O. The material constituting this layer may be described as: "pure nickel oxide".
L'expression « NixO » vise le fait qu'il peut y avoir Ν1ΊΟ1 mais aussi que le matériau constitutif de la couche peut ne pas présenter exactement cette stœchiométrie stable : The expression "Ni x O" refers to the fact that there may be Ν1ΊΟ1 but also that the constituent material of the layer may not have exactly this stable stoichiometry:
le matériau de la couche peut être légèrement sur-stœchiométrique en Ni, avec par exemple un 0,8 < x < 1 et notamment 0,8 < x < 0,95 ou  the material of the layer may be slightly over-stoichiometric to Ni, with for example a 0.8 <x <1 and in particular 0.8 <x <0.95 or
le matériau de la couche peut être légèrement sous stœchiométrique en Ni avec par exemple un 1 < x < 1 ,2 et notamment 1 ,05 < x < 1 ,2. Dans une variante particulière, ladite couche en oxyde de nickel NixO présente un x entre 1 ,2 et 0,5, voire entre 0,9 et 0,6. the material of the layer may be slightly under stoichiometric in Ni with for example a 1 <x <1, 2 and in particular 1, 05 <x <1, 2. In a particular variant, said Ni x O nickel oxide layer has an x between 1, 2 and 0.5 or even between 0.9 and 0.6.
Dans une variante toute particulière, une couche à base d'oxyde de zinc est située en dessous, en direction dudit substrat, et au contact de ladite couche en oxyde de Nickel NixO. In a very particular variant, a layer based on zinc oxide is located below, towards said substrate, and in contact with said nickel oxide layer Ni x O.
De préférence, une couche en oxyde de Nickel NiyO est située au-dessus et au contact, et/ou est située en dessous et au contact, de ladite couche en oxyde de Nickel NixO, une couche en oxyde de nickel la plus proche de ladite couche fonctionnelle étant alors moins oxydée qu'une autre couche en oxyde de nickel plus éloignée de ladite couche fonctionnelle en partant du substrat. En effet, une couche d'oxyde de nickel plus oxydée est meilleure bloqueur et une couche d'oxyde de nickel moins oxydée est meilleure absorbant lumineux. Preferably, a Nickel oxide layer Ni y O is located above and in contact with, and / or is located beneath and in contact with, said Nickel Oxide Ni x O layer, a Nickel Oxide layer. closer to said functional layer being then less oxidized than another layer of nickel oxide further away from said functional layer from the substrate. Indeed, a more oxidized nickel oxide layer is better blocker and a less oxidized nickel oxide layer is better light absorbing.
De préférence en outre, lesdits revêtements antireflet sous-jacent et antireflet sus-jacent comportent chacun au moins une couche diélectrique à base de nitrure de silicium, éventuellement dopé à l'aide d'au moins un autre élément, comme l'aluminium.  Preferably also, said underlying antireflection and antireflection coatings each comprise at least one dielectric layer based on silicon nitride, optionally doped with at least one other element, such as aluminum.
Il est possible par ailleurs qu'une autre couche en oxyde de nickel NixO soit dans l'empilement, située sur la couche fonctionnelle et au contact de la couche fonctionnelle, avec une épaisseur physique de ladite couche en oxyde de nickel NixO d'au moins 0,3 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. Le x est de préférence le même pour ces deux couches en oxyde de nickel NixO afin de faciliter le dépôt. It is also possible for another Ni x O nickel oxide layer to be in the stack, located on the functional layer and in contact with the functional layer, with a physical thickness of said Ni x O nickel oxide layer. at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm. The x is preferably the same for these two Ni x O nickel oxide layers to facilitate deposition.
Sinon, il est possible qu'une couche métallique, notamment comprenant du nickel et du chrome, soit située sur et au contact de la couche fonctionnelle, avec une épaisseur physique de ladite couche métallique d'au moins 0,3 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm.  Otherwise, it is possible for a metal layer, in particular comprising nickel and chromium, to be situated on and in contact with the functional layer, with a physical thickness of said metal layer of at least 0.3 nm, or even between 0 , 6 and 8.0 nm, or even between 1.0 and 5.0 nm.
Il est possible en outre qu'une couche en oxyde de nickel NixO soit située sur ladite couche fonctionnelle en direction du substrat, avec interposition d'au moins une couche ou d'une seule couche en un matériau différent entre ladite couche en oxyde de nickel NixO et ladite couche fonctionnelle, cette couche en oxyde de nickel NixO présentant de préférence une épaisseur comprise entre 0,3 et 10,0 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. Cela peut aussi avoir une influence favorable sur l'état cristallographique de la couche fonctionnelle métallique, et donc la résistance par carré de l'empilement. It is further possible for a Ni x O nickel oxide layer to be located on said functional layer in the direction of the substrate, with the interposition of at least one layer or layer of a different material between said oxide layer. nickel Ni x O and said functional layer, said Ni x O nickel oxide layer preferably having a thickness between 0.3 and 10.0 nm, or even between 0.6 and 8.0 nm, or even between 1, 0 and 5.0 nm. This can also have a favorable influence on the crystallographic state of the metallic functional layer, and therefore the square resistance of the stack.
L'empilement peut comporter une dernière couche (« overcoat » en anglais), c'est-à-dire une couche de protection, Cette couche de protection présente, de préférence, une épaisseur physique comprise entre 0,5 et 10 nm. The stack may comprise a last layer ("overcoat" in English), that is to say a protective layer, This protective layer preferably has a physical thickness of between 0.5 and 10 nm.
Le vitrage selon l'invention incorpore au moins le substrat porteur de l'empilement selon l'invention, éventuellement associé à au moins un autre substrat. Chaque substrat peut être clair ou coloré. Un des substrats au moins notamment peut être en verre coloré dans la masse. Le choix du type de coloration va dépendre du niveau de transmission lumineuse et/ou de l'aspect colorimétrique recherchés pour le vitrage une fois sa fabrication achevée. The glazing according to the invention incorporates at least the carrier substrate of the stack according to the invention, optionally associated with at least one other substrate. Each substrate can be clear or colored. At least one of the substrates may be colored glass in the mass. The choice of the type of coloration will depend on the level of light transmission and / or the colorimetric appearance sought for the glazing once its manufacture is complete.
Le vitrage selon l'invention peut présenter une structure feuilletée, associant notamment au moins deux substrats rigides du type verre par au moins une feuille de polymère thermoplastique, afin de présenter une structure de type verre/empilement de couches minces/feuille(s)/verre. Le polymère peut notamment être à base de polyvinylbutyral PVB, éthylène vinylacétate EVA, polyéthylène téréphtalate PET, polychlorure de vinyle PVC.  The glazing according to the invention may have a laminated structure, in particular associating at least two rigid substrates of the glass type with at least one thermoplastic polymer sheet, in order to present a glass-like structure / thin-film stack / sheet (s) / glass. The polymer may especially be based on polyvinyl butyral PVB, ethylene vinyl acetate EVA, PET polyethylene terephthalate, PVC polyvinyl chloride.
Le vitrage peut par ailleurs présenter une structure de type verre/empilement de couches minces/feuille(s) de polymère.  The glazing may furthermore have a structure of glass type / stack of thin layers / sheet (s) of polymer.
Les vitrages selon l'invention sont aptes à subir un traitement thermique sans dommage pour l'empilement de couches minces. Ils sont donc éventuellement bombés et/ou trempés.  The glazings according to the invention are capable of undergoing heat treatment without damage for the stack of thin layers. They are therefore optionally curved and / or tempered.
Le vitrage peut être bombé et/ou trempé en étant constitué d'un seul substrat, celui muni de l'empilement. Il s'agit alors d'un vitrage dit « monolithique ». Dans le cas où ils sont bombés, notamment en vue de constituer des vitrages pour véhicules, l'empilement de couches minces se trouve de préférence sur une face au moins partiellement non plane.  The glazing may be curved and / or tempered by being constituted by a single substrate, the one provided with the stack. It is then a glazing called "monolithic". In the case where they are curved, in particular to form glazing for vehicles, the stack of thin layers is preferably on an at least partially non-flat face.
Le vitrage peut aussi être un vitrage multiple, notamment un double-vitrage, au moins le substrat porteur de l'empilement pouvant être bombé et/ou trempé. Il est préférable dans une configuration de vitrage multiple que l'empilement soit disposé de manière à être tourné du côté de la lame de gaz intercalaire. Dans une structure feuilletée, l'empilement peut être en contact avec la feuille de polymère.  The glazing may also be a multiple glazing, including a double glazing, at least the carrier substrate of the stack can be curved and / or tempered. It is preferable in a multiple glazing configuration that the stack is disposed so as to be turned towards the interleaved gas blade side. In a laminated structure, the stack may be in contact with the polymer sheet.
Le vitrage peut aussi être un triple vitrage constitué de trois feuilles de verre séparées deux par deux par une lame de gaz. Dans une structure en triple vitrage, le substrat porteur de l'empilement peut être en face 2 et/ou en face 5, lorsque l'on considère que le sens incident de la lumière solaire traverse les faces dans l'ordre croissant de leur numéro.  The glazing may also be a triple glazing consisting of three sheets of glass separated two by two by a gas blade. In a triple-glazed structure, the carrier substrate of the stack may be in face 2 and / or in face 5, when it is considered that the incident direction of sunlight passes through the faces in increasing order of their number. .
Lorsque le vitrage est monolithique ou multiple du type double-vitrage, triple vitrage ou vitrage feuilleté, au moins le substrat porteur de l'empilement peut être en verre bombé ou trempé, ce substrat pouvant être bombé ou trempé avant ou après le dépôt de l'empilement. When the glazing is monolithic or multiple type double glazing, triple glazing or laminated glazing, at least the carrier substrate of the stack can be curved or tempered glass, this substrate can be curved or hardened before or after the deposition of the stack.
Avantageusement, la présente invention permet ainsi de réaliser un empilement de couches minces monocouche fonctionnelle métallique ou pluri- couches fonctionnelles métalliques qui présente une résistance par carré plus faible après traitement thermique, sans influencer de manière néfastes les paramètres optiques de l'empilement. Advantageously, the present invention thus makes it possible to produce a stack of functional metal monolayer thin layers or metal functional multilayer layers which has a lower square resistance after heat treatment, without adversely affecting the optical parameters of the stack.
Les détails et caractéristiques avantageuses de l'invention ressortent des exemples non limitatifs suivants, illustrés à l'aide des figures ci-jointes illustrant : The details and advantageous features of the invention emerge from the following nonlimiting examples, illustrated with the aid of the attached figures illustrating:
en figure 1 , un empilement monocouche fonctionnelle selon l'invention, la couche fonctionnelle étant déposée directement sur un revêtement de sous- blocage et directement sous un revêtement de sur-blocage, l'empilement étant illustré pendant le traitement à l'aide d'une source produisant un rayonnement ;  in FIG. 1, a functional monolayer stack according to the invention, the functional layer being deposited directly on a sub-blocking coating and directly under an over-blocking coating, the stack being illustrated during the treatment with the aid of a source producing radiation;
en figure 2, une solution de double vitrage incorporant un empilement monocouche fonctionnelle ;  in FIG. 2, a double glazing solution incorporating a functional monolayer stack;
en figure 3, la courbe d'hystérésis de l'oxyde de nickel déposé à partir d'une cible métallique en présence d'oxygène ;  in FIG. 3, the hysteresis curve of the nickel oxide deposited from a metal target in the presence of oxygen;
en figure 4, le profil partiel de l'élément Ni analysé par SIMS pour l'exemple 1 avant traitement thermique (4BHT) et après traitement thermique (4AHT) ; et  in FIG. 4, the partial profile of the element Ni analyzed by SIMS for example 1 before heat treatment (4BHT) and after heat treatment (4AHT); and
en figure 5, le profil partiel de l'élément Ni analysé par SIMS pour l'exemple 2 avant traitement thermique (5BHT) et après traitement thermique (5AHT).  in FIG. 5, the partial profile of the element Ni analyzed by SIMS for example 2 before heat treatment (5BHT) and after heat treatment (5AHT).
Dans les figures 1 et 2, les proportions entre les épaisseurs des différentes couches ou des différents éléments ne sont pas rigoureusement respectées afin de faciliter leur lecture. La figure 1 illustre une structure d'un empilement 35 monocouche fonctionnelle selon l'invention déposé sur une face 29 d'un substrat 30 verrier, transparent, dans laquelle la couche fonctionnelle 140 unique, en particulier à base d'argent ou d'alliage métallique contenant de l'argent, est disposée entre deux revêtements antireflet, le revêtement antireflet sous-jacent 120 situé en dessous de la couche fonctionnelle 140 en direction du substrat 30 et le revêtement antireflet sus-jacent 160 disposé au-dessus de la couche fonctionnelle 140 à l'opposé du substrat 30. Ces deux revêtements anti reflet 120, 160, comportent chacun au moins une couche diélectrique 122, 126 ; 162, 168 et de préférence chacun au moins deux couches diélectriques : dans chaque revêtement diélectrique, une couche diélectrique 126, 162, de préférence à base d'oxyde de zinc qui est plus proche de la couche fonctionnelle 140 et une couche diélectrique 122, 168, de préférence à base de nitrure de silicium, plus éloignée de la couche fonctionnelle 140. In Figures 1 and 2, the proportions between the thicknesses of the different layers or different elements are not rigorously respected to facilitate their reading. FIG. 1 illustrates a structure of a functional monolayer stack according to the invention deposited on a face 29 of a transparent glass substrate, in which the single functional layer 140, in particular based on silver or alloy metal containing silver, is disposed between two antireflection coatings, the underlying antireflection coating 120 located below the functional layer 140 towards the substrate 30 and the overlying antireflection coating 160 disposed above the functional layer. 140 opposite the substrate 30. These two anti-reflection coatings 120, 160 each comprise at least one dielectric layer 122, 126; 162, 168 and preferably each at least two dielectric layers: in each dielectric coating, a dielectric layer 126, 162, preferably based on zinc oxide which is closer to the functional layer 140 and a dielectric layer 122, 168 , preferably based on silicon nitride, further away from the functional layer 140.
Eventuellement, d'une part la couche fonctionnelle 140 peut être déposée directement sur un revêtement de sous-blocage 130 disposé entre le revêtement antireflet sous-jacent 120 et la couche fonctionnelle 140 et d'autre part la couche fonctionnelle 140 peut être déposée directement sous un revêtement de surblocage 150 disposé entre la couche fonctionnelle 140 et le revêtement antireflet sus-jacent 160.  Optionally, on the one hand, the functional layer 140 may be deposited directly on a sub-blocking coating 130 placed between the underlying antireflection coating 120 and the functional layer 140 and, on the other hand, the functional layer 140 may be deposited directly under an overblocking coating 150 disposed between the functional layer 140 and the overlying antireflection coating 160.
Les couches de sous et/ou sur-blocage, bien que déposées sous forme métalliques et présentées comme étant des couches métalliques, sont parfois dans la pratique des couches oxydées car une de leurs fonctions (en particulier pour la couche de sur-blocage) est de s'oxyder au cours du dépôt de l'empilement afin de protéger la couche fonctionnelle.  The layers of under and / or over-blocking, although deposited in metallic form and presented as being metal layers, are sometimes in practice oxidized layers because one of their functions (in particular for the over-blocking layer) is to oxidize during the deposition of the stack to protect the functional layer.
Selon l'invention, au moins une couche en oxyde de nickel NixO (la couche 135 dans le tableau 1 ci-après) est située sous et au contact de la couche fonctionnelle 140 en direction dudit substrat 30, avec une épaisseur physique de ladite couche en oxyde de nickel NixO 135 d'au moins 0,3 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. According to the invention, at least one layer of nickel oxide Ni x O (the layer 135 in Table 1 below) is located under and in contact with the functional layer 140 towards said substrate 30, with a physical thickness of said Ni x O 135 nickel oxide layer of at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
Lorsqu'un empilement est utilisé dans un vitrage multiple 100 de structure double vitrage, comme illustré en figure 2, ce vitrage comporte deux substrats 60, 30 qui sont maintenus ensemble par une structure de châssis 90 et qui sont séparés l'un de l'autre par une lame de gaz intercalaire 19. Chaque substrat 30, 60 comporte ainsi respectivement une face intérieure 29, 61 en contact avec la lame de gaz intercalaire 19, l'autre face 31 , 59 du substrat 30, 60 étant en contact avec l'espace intérieur IS, respectivement l'espace extérieur ES. When a stack is used in a multi-glazing unit 100 of double-glazed structure, as illustrated in FIG. 2, this glazing comprises two substrates 60, 30 which are held together by a frame structure 90 and which are separated from one another. The substrate 30, 60 respectively has an inner face 29, 61 in contact with the intervening gas blade 19, the other face 31, 59 of the substrate 30, 60 being in contact with the substrate. IS interior space, respectively the outer space ES.
Le vitrage réalise ainsi une séparation entre un espace extérieur ES et un espace intérieur IS.  The glazing thus makes a separation between an outer space ES and an interior space IS.
L'empilement peut être positionné en face 3 (sur la feuille la plus à l'intérieur du bâtiment en considérant le sens incident de la lumière solaire entrant dans le bâtiment et sur sa face tournée vers la lame de gaz).  The stack can be positioned in face 3 (on the innermost sheet of the building by considering the incident sense of sunlight entering the building and on its face facing the gas blade).
La figure 2 illustre ce positionnement (le sens incident de la lumière solaire entrant dans le bâtiment étant illustré par la double flèche) en face 3 d'un empilement de couches minces 35 positionné sur une face intérieure 29 du substrat 30 en contact avec la lame de gaz intercalaire 19, l'autre face 31 du substrat 30 étant en contact avec l'espace intérieur IS. FIG. 2 illustrates this positioning (the incident direction of the solar light entering the building being illustrated by the double arrow) in front of a stack of thin layers 35 positioned on an inner face 29 of the substrate 30 in contact with the spacer gas strip 19, the other face 31 of the substrate 30 being in contact with the interior space IS.
Toutefois, il peut aussi être envisagé que dans cette structure de double vitrage, l'un des substrats présente une structure feuilletée.  However, it can also be envisaged that in this double glazing structure, one of the substrates has a laminated structure.
Pour tous les exemples ci-après, les conditions de dépôt des couches sont :  For all the examples below, the layer deposition conditions are:
Les couches déposées peuvent ainsi être classées en quatre catégories : The deposited layers can thus be classified in four categories:
i- couches en matériau antireflet/diélectrique, présentant un rapport n/k sur toute la plage de longueur d'onde du visible supérieur en 5 : Si3N4, ZnO ; i-layers of anti-reflective / dielectric material having a n / k ratio over the entire upper visible wavelength range at 5: Si 3 N 4 , ZnO;
ii- couches fonctionnelles métalliques en matériau à propriétés de réflexion dans l'infrarouge et/ou dans le rayonnement solaire : Ag ; Il a été constaté que l'argent présente un rapport 0 < n/k < 5 sur toute la plage de longueur d'onde du visible, et sa résistivité électrique à l'état massif est inférieure à 10"6 O.cm ; metallic functional layers made of material with infrared reflection properties and / or solar radiation: Ag; Silver has been found to have a ratio of 0 <n / k <5 over the entire visible wavelength range, and its bulk electrical resistivity is less than 10 -6 O.cm;
iii- couches de sous-blocage et de sur-blocage destinées à protéger la couche fonctionnelle contre une modification de sa nature lors du dépôt de l'empilement ;  iii-underblocking and overblocking layers for protecting the functional layer against a change in its nature during the depositing of the stack;
iv- couche en oxyde de nickel NixO et NiyO ; La figure 3 illustre les conditions de dépôt de ces deux couches. iv- nickel oxide layer Ni x O and Ni y O; Figure 3 illustrates the deposition conditions of these two layers.
II est à noter qu'une cible céramique en Ν1ΊΟ1 a également été testée et a conduit à des résultats similaires à ceux constatés avec les exemples ci-après.  It should be noted that a ceramic target in Ν1ΊΟ1 was also tested and led to results similar to those seen with the examples below.
Dans tous les exemples ci-après l'empilement de couches minces est déposé sur un substrat en verre sodo-calcique clair d'une épaisseur de 4 mm de la marque Planiclear, distribué par la société SAINT-GOBAIN. In all the examples below, the stack of thin layers is deposited on a clear soda-lime glass substrate of a thickness of 4 mm of the Planiclear brand, distributed by the company SAINT-GOBAIN.
Dans le tableau 1 , la colonne « N° » indique le numéro de la couche et la seconde colonne indique le revêtement, en lien avec la configuration de la figure 1 ; la troisième colonne indique le matériau déposé pour la couche de la première colonne. In Table 1, the column "No." indicates the number of the layer and the second column indicates the coating, in connection with the configuration of Figure 1; the third column indicates the deposited material for the layer of the first column.
Dans ce tableau 1 , le substrat 30 est situé sous la couche 122 et les couches des exemples sont situées dans l'ordre indiqué par la colonne de gauche, de bas en haut en partant de ce substrat 30 ; les couches numérotées dans ces tableaux qui ne sont pas indiquées dans la figure 1 se trouvent ainsi localisées dans les exemples de la même manière qu'indiqué dans le tableau 1.  In this Table 1, the substrate 30 is located under the layer 122 and the layers of the examples are located in the order indicated by the left column, from bottom to top starting from this substrate 30; the numbered layers in these tables which are not shown in Figure 1 are thus located in the examples in the same manner as indicated in Table 1.
Dans la série d'exemple du tableau 2, pour les exemples 2 à 6 la couche en oxyde de nickel 134 et/ou 135 et/ou 136 est dans le revêtement de blocage 130 sous- jacent et est au contact de la couche fonctionnelle métallique 140. In the example series of Table 2, for Examples 2 to 6, the nickel oxide layer 134 and / or 135 and / or 136 is in the underlying blocking coating 130 and is in contact with the metallic functional layer. 140.
L'oxyde de nickel NiyO de la couche 134 ou 136 est différent de l'oxyde de nickel NixO de la couche 135 : en référence à la figure 3 qui illustre la courbe d'hystérésis de l'oxyde de nickel déposé à partir d'une cible métallique dans une atmosphère oxydante (l'abscisse indique le flux d'oxygène, en sccm et l'ordonnée indique la tension aux bornes de la cible), le NixO est déposé dans des conditions normales conduisant à un oxyde riche en oxygène (autrement dit sur- stœchiométrique en oxygène, ou stœchiométrique en oxygène, voire légèrement sous stœchiométrique en oxygène), alors que le NiyO est déposé dans des conditions conduisant à un oxyde riche en Ni (autrement dit franchement sous-stœchiométrique en oxygène). L'utilisation de NiyO conduit à l'obtention d'une absorption lumineuse plus élevée. Ex. 1 2 3 The nickel oxide Ni y O of the layer 134 or 136 is different from the nickel oxide Ni x O of the layer 135: with reference to FIG. 3 which illustrates the hysteresis curve of the deposited nickel oxide from a metal target in an oxidizing atmosphere (the abscissa indicates the flow of oxygen, in sccm and the ordinate indicates the voltage across the target), the Ni x O is deposited under normal conditions leading to an oxide rich in oxygen (in other words supe- stoichiometric in oxygen, or stoichiometric in oxygen, even slightly under stoichiometric in oxygen), whereas the Ni y O is deposited under conditions leading to an oxide rich in Ni (in other words frankly under -stoichiometric oxygen). The use of Ni y O leads to a higher light absorption. Ex. 1 2 3
R (Ω/carré) 4,7 4,5 (-5%) 3,9 (-17%)  R (Ω / square) 4.7 4.5 (-5%) 3.9 (-17%)
Abs (¾) 9,4 9,4 10,0  Abs (¾) 9.4 9.4 10.0
Tableau 2  Table 2
Dans le tableau 2, les caractéristiques du substrat revêtu de l'empilement présentées consistent en la mesure, après un traitement thermique de trempe à 650 ° C pendant 10 minutes puis un refroidissement :  In Table 2, the characteristics of the substrate coated with the stack presented consist in the measurement, after a quenching heat treatment at 650 ° C. for 10 minutes and then cooling:
- pour R, de la résistance par carré mesurée comme habituellement avec une sonde à quatre points, en ohms par carré, et  for R, square resistance measured as usual with a four-point probe, in ohms per square, and
pour Abs, de l'absorption lumineuse dans le visible en %, mesurées selon l'illuminant D65 2° , côté opposé à la face principale du substrat sur laquelle est déposée l'empilement de couches minces.  for Abs, the light absorption in the visible in%, measured according to the illuminant D65 2 °, opposite side to the main face of the substrate on which the stack of thin layers is deposited.
La valeur entre parenthèse inique l'amélioration (la diminution) de la résistance par carré par rapport à la référence que constitue l'exemple 1 .  The value between parenthesis iniquity improvement (decrease) of the resistance per square compared to the reference that constitutes Example 1.
La différence entre l'exemple 6 et l'exemple 2 est que dans le cadre de l'exemple 2 (comme pour les autres exemples), la couche en oxyde de nickel NixO 135 est déposée directement sur une couche à base d'oxyde de zinc 126, alors que dans le cadre de l'exemple 6, la couche en oxyde de nickel NixO 135 est déposée directement sur une couche 122 à base de nitrure de silicium. I l a été remarqué que la résistance par carré de l'exemple 6 est plus haute que celle de l'exemple 2 car cet exemple 6 ne bénéficie pas des conditions favorables obtenues lorsque la couche en oxyde de nickel est déposée directement sur une couche à base d'oxyde de zinc. The difference between Example 6 and Example 2 is that in the context of Example 2 (as for the other examples), the nickel oxide layer Ni x O 135 is deposited directly on a layer based on zinc oxide 126, while in the context of Example 6, the nickel oxide layer Ni x O 135 is deposited directly on a layer 122 based on silicon nitride. It has been noticed that the square resistance of Example 6 is higher than that of Example 2 because this example 6 does not benefit from the favorable conditions obtained when the nickel oxide layer is deposited directly on a base layer. zinc oxide.
Le traitement thermique aurait pu consister en un défilement du substrat 30 à une vitesse de 10 m/min sous une ligne laser 8. A titre d'exemple, une telle ligne laser peut être de 60 μιη de large et de puissance 25 W/mm avec la ligne laser orientée perpendiculairement à la face 29 et en direction de la couche terminale de l'empilement, celle la plus éloignée de la face 29, c'est-à-dire en disposant la ligne laser (illustrée par la flèche noire droite) au-dessus de l'empilement et en orientant le laser en direction de l'empilement, comme visible en figure 1 .  The heat treatment could have consisted in running the substrate 30 at a speed of 10 m / min under a laser line 8. For example, such a laser line can be 60 μιη wide and 25 W / mm power. with the laser line oriented perpendicular to the face 29 and towards the terminal layer of the stack, the one farthest from the face 29, that is to say by arranging the laser line (illustrated by the black right arrow ) above the stack and directing the laser towards the stack, as shown in Figure 1.
D'autres essais ont été réalisés avec une couche en oxyde de nickel NixO 135 d'une épaisseur de 1 nm et ont donné des résultats similaires. Other tests were carried out with a nickel oxide layer Ni x O 135 with a thickness of 1 nm and gave similar results.
D'autres essais ont été réalisés avec une couche fonctionnelle métallique en argent d'une épaisseur de 15 nm et ont donné des résultats similaires.  Other tests were performed with a silver metal functional layer with a thickness of 15 nm and gave similar results.
Pour tenter de comprendre l'amélioration surprenante de la résistance par carré, le profil de l'élément Ni a été analysé par SIMS : - pour l'exemple 1 , il est montré en figure 4, et In an attempt to understand the surprising improvement in square resistance, the profile of the Ni element was analyzed by SIMS: for example 1, it is shown in FIG.
- pour l'exemple 2, il est montré en figure 5.  for example 2, it is shown in FIG.
Le profil de l'élément Ni a été analysé tant avant traitement thermique (courbes 4 BHT et 5 BHT), qu'après un traitement thermique à 650° C pendant 10 minutes puis refroidissement à l'air libre jusqu'à la température de la pièce de 20 °C.  The profile of the Ni element was analyzed both before heat treatment (curves 4 BHT and 5 BHT), and after a heat treatment at 650 ° C. for 10 minutes and then cooling in the open air until the temperature of the room of 20 ° C.
Pour ces deux figures, l'abscisse expose une unité arbitraire de temps qui permet de localiser les différentes couches, qui sont rappelées par leur numéro de référence au-dessus des figures ; l'ordonnée expose une unité arbitraire d'intensité.  For these two figures, the abscissa exposes an arbitrary unit of time which makes it possible to locate the different layers, which are recalled by their reference number above the figures; the ordinate exposes an arbitrary unit of intensity.
La comparaison de la courbe 4BHT avec la courbe 4AHT montre qu'une quantité importante d'élément Ni de la couche de blocage 150 en NiCr ne se trouve plus dans cette couche 150 après le traitement thermique car l'intensité du signal de Ni a très fortement baissé : cela suggère que le matériau constitutif de la couche de blocage a migré ailleurs en raison du traitement thermique.  Comparison of the curve 4BHT with the curve 4AHT shows that a significant amount of element Ni NiCr blocking layer 150 is no longer in this layer 150 after the heat treatment because the intensity of the Ni signal has very strongly lowered: this suggests that the constituent material of the blocking layer has migrated elsewhere due to the heat treatment.
La courbe 5BHT montre la présence de Ni à la fois dans la couche de blocage The 5BHT curve shows the presence of Ni both in the blocking layer
150 et dans la couche 135 en NixO ; la courbe 5AHT suggère que du matériau constitutif de la couche de blocage 150 a migré, à travers la couche de mouillage 140, dans la couche 135 en NixO, en raison du traitement thermique, où il a été en quelque sorte piégé. 150 and in the layer 135 of Ni x O; Curve 5AHT suggests that the material constituting the blocking layer 150 has migrated through the wetting layer 140 into the Ni x O layer 135 because of the heat treatment where it has been somehow trapped.
Cet effet de piégeage a également été constaté pour un empilement similaire à l'exemple 2 mais avec pour seule différence une couche de blocage 150 non pas en NiCr mais en Ti.  This trapping effect was also observed for a stack similar to Example 2 but with the only difference a blocking layer 150 not NiCr but Ti.
Par ailleurs, des essais ont été réalisés pour tenter de comprendre si le mode de dépôt de la couche 135 en NixO, sur la base de l'exemple 2, pouvait influencer les améliorations obtenues. En effet, une couche en NixO peut être obtenue : Furthermore, attempts have been made to try to understand whether the mode of deposition of the layer 135 Ni x O, based on Example 2, could influence the improvements obtained. Indeed, a Ni x O layer can be obtained:
i. soit par pulvérisation d'une cible métallique, ne contenant que du Ni, dans une atmosphère contenant de l'oxygène, voire en outre un gaz neutre comme l'argon ;  i. either by sputtering a metal target, containing only Ni, in an atmosphere containing oxygen, or even in addition a neutral gas such as argon;
ii. soit par pulvérisation d'une cible dite « céramique », contenant à la fois du Ni et de l'oxygène, dans une atmosphère contenant un gaz neutre comme l'argon, voire en outre de l'oxygène.  ii. or by spraying a so-called "ceramic" target, containing both Ni and oxygen, in an atmosphere containing a neutral gas such as argon, or even in addition to oxygen.
Il a été constaté que le pic de diffraction par XRD de l'argent de la couche fonctionnelle métallique 140 selon <200> était plus prononcé dans le cas i ; toutefois, à épaisseur de couche 135 en NixO identique (5 nm), l'amélioration (diminution) de la résistance par carré par rapport à l'exemple 1 est la même : - 5%. Il a été constaté qu'une couche 135 en NixO déposée dans le cas i présente le même effet que dans le cas ii : elle améliore (diminue) la résistance par carré avec le même ordre de grandeur. It was found that the silver XRD diffraction peak of the metal functional layer 140 according to <200> was more pronounced in case i; however, at a layer thickness of identical Ni x O (5 nm), the improvement (decrease) of the resistance per square with respect to Example 1 is the same: - 5%. It has been found that a layer 135 of Ni x O deposited in case i has the same effect as in case ii: it improves (decreases) the resistance per square with the same order of magnitude.
Sur la base de l'exemple 2, il a été constaté qu'une couche 135 en NixO épaisse, de 19 nm, déposée dans le cas i, améliorait encore plus (diminuait encore plus) la résistance par carré, avec une diminution de - 28 % par rapport à celle de l'exemple 1 après traitement thermique ; toutefois, l'absorption lumineuse dans le visible, Abs est alors montée à 36 % après traitement thermique On the basis of Example 2, it was found that a 19 nm thick Ni x O layer deposited in case i, further improved (decreased still further) the square resistance, with a decrease -28% compared to that of Example 1 after heat treatment; however, light absorption in the visible, Abs is then raised to 36% after heat treatment
Il a été constaté par ailleurs que la résistivité du NixO déposé selon le cas i ci- dessus, avant traitement thermique était de l'ordre de 190 μΩαη, soit une valeur proche de celle de ΓΙΤΌ (environ 200 μΩ^) et bien plus élevée que la résistivité de l'argent utilisé pour la couche fonctionnelle 140, qui est de l'ordre de 3 μΩ^ ; après le traitement thermique à 650 ° C pendant 10 minutes, la résistivité de ce même NixO déposé selon le cas i ci-dessus est descendu à environ 30 μΩ^. It was also found that the resistivity of the Ni x O deposited according to the case i above, before heat treatment was of the order of 190 μΩαη, a value close to that of ΓΙΤΌ (about 200 μΩ ^) and well higher than the resistivity of the silver used for the functional layer 140, which is of the order of 3 μΩ ^; after the heat treatment at 650 ° C. for 10 minutes, the resistivity of this same Ni x O deposited according to the case i above was lowered to approximately 30 μΩ ^.
Enfin, toujours sur la base de l'exemple 2, deux autres épaisseurs ont été testées pour la couche 135 en NixO : 3 nm et 10 nm. La diminution de la résistance par carré après le traitement thermique a été du même ordre de grandeur que pour l'exemple 2 : - 5 % par rapport à l'exemple 1. La résistance mécanique de l'exemple 2 a été testée et comparée à celle de l'exemple 1 : elle est aussi bonne, voire parfois même meilleure pour les fortes charges. Finally, again on the basis of Example 2, two other thicknesses were tested for layer 135 in Ni x O: 3 nm and 10 nm. The decrease of the resistance per square after the heat treatment was of the same order of magnitude as for Example 2: 5% compared with Example 1. The mechanical strength of Example 2 was tested and compared with that of example 1: it is also good, sometimes even better for heavy loads.
Du fait de la faible résistance par carré obtenue ainsi que des bonnes propriétés optiques (en particulier la transmission lumineuse dans le visible), il est possible, par ailleurs, d'utiliser le substrat revêtu de l'empilement selon l'invention pour réaliser un substrat électrode transparent. Due to the low square resistance obtained as well as the good optical properties (in particular light transmission in the visible), it is possible, moreover, to use the substrate coated with the stack according to the invention to achieve a transparent electrode substrate.
D'une manière générale, le substrat électrode transparent peut convenir pour tout vitrage chauffant, pour tout vitrage électrochrome, tout écran de visualisation, ou encore pour une cellule (ou panneau) photovoltaïque et notamment pour une face arrière de cellule photovoltaïque transparente.  In general, the transparent electrode substrate may be suitable for any heated glazing, for any electrochromic glazing, any display screen, or for a photovoltaic cell (or panel) and in particular for a transparent photovoltaic cell backside.
La présente invention est décrite dans ce qui précède à titre d'exemple. Il est entendu que l'homme du métier est à même de réaliser différentes variantes de l'invention sans pour autant sortir du cadre du brevet tel que défini par les revendications. The present invention is described in the foregoing by way of example. It is understood that the skilled person is able to achieve different variants of the invention without departing from the scope of the patent as defined by the claims.

Claims

REVENDICATIONS
1 . Substrat (30) transparent muni sur une face principale d'un empilement de couches minces comportant au moins une, voire une seule, couche fonctionnelle (140) métallique à propriétés de réflexion dans l'infrarouge et/ou dans le rayonnement solaire, notamment à base d'argent ou d'alliage métallique contenant de l'argent, et deux revêtements antireflet (120, 160), lesdits revêtements antireflet comportant chacun au moins une couche diélectrique (122, 126 ; 162, 168), ladite couche fonctionnelle (140) étant disposée entre les deux revêtements antireflet (120, 160), caractérisé en ce que au moins une couche en oxyde de nickel NixO (135) est située sous et au contact de la couche fonctionnelle (140) en direction dudit substrat (30), avec une épaisseur physique de ladite couche en oxyde de nickel NixO (135) d'au moins 0,3 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. 1. Transparent substrate (30) provided on one main face with a thin film stack comprising at least one or even one functional layer (140) of metal with infrared reflection properties and / or solar radiation, in particular with respect to silver-containing metal or silver alloy base, and two antireflection coatings (120, 160), said antireflection coatings each having at least one dielectric layer (122, 126; 162, 168), said functional layer (140 ) being disposed between the two antireflection coatings (120, 160), characterized in that at least one Ni x O nickel oxide layer (135) is located under and in contact with the functional layer (140) towards said substrate ( 30), with a physical thickness of said nickel oxide layer Ni x O (135) of at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm .
2. Substrat (30) selon la revendication 1 , caractérisé en ce que ladite couche en oxyde de nickel NixO (135) présente un x entre 1 ,2 et 0,5, voire entre 0,9 et 0,6. 2. Substrate (30) according to claim 1, characterized in that said nickel oxide layer Ni x O (135) has an x between 1, 2 and 0.5, or even between 0.9 and 0.6.
3. Substrat (30) selon la revendication 1 ou 2, caractérisé en ce qu'une couche à base d'oxyde de zinc est située en dessous et au contact de ladite couche en oxyde de nickel NixO (135). 3. Substrate (30) according to claim 1 or 2, characterized in that a layer based on zinc oxide is located below and in contact with said nickel oxide layer Ni x O (135).
4. Substrat (30) selon l'une quelconque des revendications 1 à 3, caractérisé en ce qu'une couche en oxyde de nickel NiyO (134, 136) est située en dessous et au contact et/ou en dessous et au contact de ladite couche en oxyde de nickel NixO (135), une couche en oxyde de nickel la plus proche de ladite couche fonctionnelle (140) étant moins oxydée qu'une autre couche en oxyde de nickel plus éloignée. 4. Substrate (30) according to any one of claims 1 to 3, characterized in that a nickel oxide layer Ni y O (134, 136) is located below and in contact with and / or below and at contacting said nickel oxide layer Ni x O (135), a nickel oxide layer closest to said functional layer (140) being less oxidized than another layer of nickel oxide further away.
5. Substrat (30) selon l'une quelconque des revendications 1 à 4, caractérisé en ce qu'une couche en oxyde de nickel NixO est située sur et au contact de la couche fonctionnelle (140), avec une épaisseur physique de ladite couche en oxyde de nickel NixO d'au moins 0,3 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. 5. Substrate (30) according to any one of claims 1 to 4, characterized in that a layer of nickel oxide Ni x O is located on and in contact with the functional layer (140), with a physical thickness of said Ni x O nickel oxide layer of at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
6. Substrat (30) selon l'une quelconque des revendications 1 à 4, caractérisé en ce qu'une couche métallique, notamment comprenant du nickel et du chrome, est située sur et au contact de la couche fonctionnelle (140), avec une épaisseur physique de ladite couche métallique d'au moins 0,3 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. 6. Substrate (30) according to any one of claims 1 to 4, characterized in that a metal layer, especially comprising nickel and chromium, is located on and in contact with the functional layer (140), with a physical thickness of said metal layer of at least 0.3 nm, even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
7. Substrat (30) selon l'une quelconque des revendications 1 à 6, caractérisé en ce qu'une couche en oxyde de nickel NixO est située sur ladite couche fonctionnelle (140) en direction du substrat (30), avec interposition d'au moins une couche ou d'une seule couche en un matériau différent entre ladite couche en oxyde de nickel NixO et ladite couche fonctionnelle (140), cette couche en oxyde de nickel NixO présentant de préférence une épaisseur comprise entre 0,3 et 10,0 nm, voire entre 0,6 et 8,0 nm, voire entre 1 ,0 et 5,0 nm. 7. Substrate (30) according to any one of claims 1 to 6, characterized in that a layer of nickel oxide Ni x O is located on said functional layer (140) towards the substrate (30), with interposition at least one layer or layer of a different material between said Ni x O nickel oxide layer and said functional layer (140), said Ni x O nickel oxide layer preferably having a thickness between 0.3 and 10.0 nm, or even between 0.6 and 8.0 nm, or even between 1.0 and 5.0 nm.
8. Substrat (30) selon l'une quelconque des revendications 1 à 7, caractérisé en ce que lesdits revêtements antireflet sous-jacent (20) et antireflet sus-jacent (60) comportent chacun au moins une couche diélectrique (22, 66) à base de nitrure de silicium, éventuellement dopé à l'aide d'au moins un autre élément, comme l'aluminium.  8. Substrate (30) according to any one of claims 1 to 7, characterized in that said underlying antireflection coatings (20) and overlying antireflection (60) each comprise at least one dielectric layer (22, 66) based on silicon nitride, possibly doped with at least one other element, such as aluminum.
9. Vitrage (100) incorporant au moins un substrat (30) selon l'une quelconque des revendications 1 à 8, éventuellement associé à au moins un autre substrat.  9. Glazing (100) incorporating at least one substrate (30) according to any one of claims 1 to 8, optionally associated with at least one other substrate.
10. Vitrage (100) selon la revendication 9 monté en monolithique ou en vitrage multiple du type double-vitrage ou triple vitrage ou vitrage feuilleté, caractérisé en ce qu'au moins le substrat porteur de l'empilement est bombé et/ou trempé.  10. Glazing (100) according to claim 9 mounted in monolithic or multiple glazing type double glazing or triple glazing or laminated glazing, characterized in that at least the carrier substrate of the stack is curved and / or tempered.
1 1 . Utilisation du substrat selon l'une quelconque des revendications 1 à 8, pour réaliser une électrode transparente d'un vitrage chauffant ou d'un vitrage électrochrome ou d'un dispositif d'éclairage ou d'un dispositif de visualisation ou d'un panneau photovoltaïque.  1 1. Use of the substrate according to any one of claims 1 to 8, for producing a transparent electrode of a heating glazing unit or an electrochromic glazing unit or of a lighting device or a display device or a panel photovoltaic.
EP16819144.3A 2015-12-02 2016-12-01 Susbtrate provided with a stack having thermal properties, comprising at least one nickel oxide layer Withdrawn EP3383813A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1561722A FR3044658B1 (en) 2015-12-02 2015-12-02 SUBSTRATE HAVING A STACK WITH THERMAL PROPERTIES HAVING AT LEAST ONE NICKEL OXIDE LAYER.
PCT/FR2016/053172 WO2017093677A1 (en) 2015-12-02 2016-12-01 Susbtrate provided with a stack having thermal properties, comprising at least one nickel oxide layer

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EP3383813A1 true EP3383813A1 (en) 2018-10-10

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US (1) US20200255329A1 (en)
EP (1) EP3383813A1 (en)
JP (1) JP2019503894A (en)
KR (1) KR20180088432A (en)
CN (1) CN108602717A (en)
BR (1) BR112018011070A2 (en)
CA (1) CA3006339A1 (en)
CO (1) CO2018006932A2 (en)
FR (1) FR3044658B1 (en)
MX (1) MX2018006764A (en)
RU (1) RU2731597C2 (en)
WO (1) WO2017093677A1 (en)

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FR3044657B1 (en) * 2015-12-02 2017-12-15 Saint Gobain SUBSTRATE HAVING A STACK WITH THERMAL PROPERTIES HAVING AT LEAST ONE NICKEL OXIDE LAYER.

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CN108602717A (en) 2018-09-28
BR112018011070A2 (en) 2018-11-21
CA3006339A1 (en) 2017-06-08
CO2018006932A2 (en) 2018-07-19
RU2018123317A3 (en) 2020-04-10
US20200255329A1 (en) 2020-08-13
RU2731597C2 (en) 2020-09-04
WO2017093677A1 (en) 2017-06-08
MX2018006764A (en) 2018-08-01
RU2018123317A (en) 2020-01-09
FR3044658B1 (en) 2017-12-15
JP2019503894A (en) 2019-02-14
KR20180088432A (en) 2018-08-03
FR3044658A1 (en) 2017-06-09

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