EP3330049B1 - Device for gripping a single-layer or multi-layer structure comprising a suction system and retractable pads - Google Patents

Device for gripping a single-layer or multi-layer structure comprising a suction system and retractable pads Download PDF

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Publication number
EP3330049B1
EP3330049B1 EP17204833.2A EP17204833A EP3330049B1 EP 3330049 B1 EP3330049 B1 EP 3330049B1 EP 17204833 A EP17204833 A EP 17204833A EP 3330049 B1 EP3330049 B1 EP 3330049B1
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EP
European Patent Office
Prior art keywords
contact pads
hollow body
actuating
bottom wall
contact
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EP17204833.2A
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German (de)
French (fr)
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EP3330049A1 (en
Inventor
Pedro JERONIMO
Renaud VARACHE
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum

Definitions

  • the present invention relates to the field of gripping devices, or alternatively called manipulators, of substrates comprising one or more thin layers, in particular of single-layer or multilayer semiconductor structures, also called “semiconductor wafers" in English, making it possible in particular to obtain photovoltaic cells, and preferably photovoltaic cells called “crystalline”, that is to say that are based on monocrystalline silicon or multicrystalline, when these semiconductor structures correspond to silicon wafers.
  • the present invention relates to a device according to the preamble of claim 1.
  • Such a device is known from the document US 2010/0025905 A1 .
  • the invention can be implemented for many applications involving the manipulation of monolayer or multilayer structures, and particularly for its use on equipment in the photovoltaic industry, for example for charging and discharging such structures on trays. or clipping trays, this term corresponding to the non-deposition of material on the edges of a substrate or any other part of the substrate in case of masking.
  • the invention thus proposes a device for gripping a monolayer or multilayer structure comprising a suction system and retractable pads.
  • wafers In the field of the manufacture of photovoltaic cells, and in particular crystalline silicon-based photovoltaic cells, it is necessary to be able to manipulate the silicon wafers, usually called “wafers", from which the photovoltaic cells are obtained.
  • manipulators of the prior art are not adapted to be able to guard against such a risk of contamination and of such a risk of aeraulic turbulence when positioning the semiconductor structures.
  • the invention therefore aims to at least partially overcome the needs mentioned above and the disadvantages relating to the achievements of the prior art.
  • retractable is meant that the pads are retractable between an extreme position protruding from the bottom wall of the hollow body and an extreme position recessed, in particular substantially in the plane of the bottom wall of the hollow body.
  • the gripping device according to the invention may further comprise one or more of the following characteristics taken separately or in any possible technical combinations.
  • the rotary means for actuating the contact pads may comprise an annular ring for actuating the contact pads.
  • the annular ring for actuating the contact pads may comprise, on a lower face opposite the bottom wall of the hollow body, reliefs protruding actuating device, for example taking the form of bosses, relatively to the lower face and spaced from each other, able to allow a portion of the contact pads to project relative to the bottom wall of the hollow body to come into contact with the structure.
  • the inner lateral surface of the hollow body may comprise a first inner ring and the annular ring for actuating the contact pads may comprise at least one first drive wheel pinion, in particular a plurality of first pinions, for example at least three , in particular regularly distributed on the annular ring, the first inner ring and said at least one first gear together forming a first internal gear system.
  • the annular ring for actuating the contact pads may comprise, on an upper face opposite the compressed gas suction system, a second inner ring and the gripping device may comprise at least one second driving wheel pinion, the second inner ring and said at least one second pinion together forming a second inner gear system.
  • the gripping device according to the invention may comprise a motor, in particular an electric motor, driving in rotation of said rotary means for actuating the contact pads.
  • the motor may advantageously be able to drive in rotation the annular ring for actuating the contact pads, the motor comprising said at least one second pinion.
  • the motor can advantageously be slaved in position to match the number of revolutions depending on the contact pads that we want to operate.
  • the suction system may include one or more gas exhaust ports.
  • the gas exhaust port (s) may all be oriented in the opposite direction of the bottom wall of the hollow body.
  • the gas escape orifice (s) are preferably directed in the opposite direction of the monolayer structure or multilayer. In this way, the gas is evacuated from the gripping device without generating aeraulic disturbance around the structure.
  • the suction system may comprise sucker type suction means.
  • the suction system may be housed at least in part in a gripping cap of the gripping device.
  • This gripping cap may comprise a base wall surmounted by a central gripping member, said base wall being adapted to close the internal cavity of the hollow body.
  • the motor can then be attached to the base wall of the gripping hood.
  • the suction system may comprise a plurality of gas exhaust ports disposed on the base wall of the gripping cap, being in particular regularly distributed on said base wall.
  • the suction system may further comprise one or more compressed gas supply ports located on the central gripping member of the gripping cap.
  • each retractable contact pad can cooperate with a resilient return member, in particular a spring, the retractable contact pads being in particular retractable in elastic return towards the suction system.
  • the plurality of contact pads and the plurality of corresponding stud holes may further be evenly distributed substantially circularly over the surface of the bottom wall of the hollow body.
  • the contact pads and the corresponding pin holes may in particular be spaced angularly at an angle of between 30 and 50 °, in particular about 40 °.
  • the gripping device may comprise a sensor for detecting the structure, in particular of the capacitive, optical or ultrasound type, in particular located at the level of the hollow body, for example fixed on the external lateral surface of the body. hollow.
  • the hollow body and / or the gripping cap, in particular the base wall and / or the gripping member, of the gripping device according to the invention can be preferably of substantially circular shape.
  • the invention is not limited to this type of shape so that the hollow body and / or the gripping cap, in particular the base wall and / or the gripping member, of the gripping device can exhibit different shape, for example oval or polygonal, such as rectangular or square, among others.
  • the gripping device 1 is preferably used, but not exclusively, for the manipulation of semi-conductor structures semiconductor or multilayer semiconductor wafers, and in particular for silicon wafers, in particular, silicon wafers making it possible to obtain photovoltaic cells based on crystalline silicon, such as heterojunction or homojunction photovoltaic cells.
  • the gripping device 1 comprises a lower portion formed by hollow body 6 of circular shape constituting a base placed close to the structure 2.
  • This hollow body 6 has an internal cavity C, visible on the figure 3 which is delimited by the internal lateral surface SL of the hollow body 6 and by a bottom wall 7 of the hollow body 6.
  • the gripping device 1 comprises an upper part formed by gripping cap 12, which comprises a base wall 13, of circular shape, surmounted by a central grip member 14, of cylindrical shape.
  • the base wall 13 makes it possible to close the internal cavity C of the hollow body 6.
  • the gripping device 1 comprises a suction system 3 by compressed gas, in particular by compressed air, which is housed at least partly in the internal cavity C of the hollow body 6.
  • This suction system 3 comprises, for example, sucker type suction means, visible on the figure 4 .
  • sucker type suction means visible on the figure 4 .
  • it comprises a compressed gas supply port 4 located on the cylindrical wall of the central gripping member 14, and three gas exhaust ports 5 disposed on the base wall 13 of the gripping cover 12, being regularly distributed on this base wall 13.
  • these gas exhaust ports 5 are all oriented in the opposite direction of the bottom wall 7 of the hollow body 6, that is to say so that the outgoing gases are directed away from the structure 2 In this way, the air is evacuated from the gripping device 1 without generating aeraulic disturbance around the structure 2.
  • the bottom wall 7 of the hollow body 6 comprises a plurality of suction orifices 8, as visible on the figure 2 , for example arranged in a star, vis-à-vis the suction system 3 and adapted to allow the gripping of the structure 2 by suction.
  • the gripping device 1 further comprises a plurality of retractable contact pads 9, for example new in this example, able to come into contact with the structure 2, these contact pads 9 being positioned through orifices of studs 10 of FIG. the bottom wall 7 of the hollow body 6.
  • the gripping device 1 comprises rotary means 11 for actuating the contact pads 9, housed in the internal cavity C of the hollow body 6. These rotary means 11 are able to selectively allow a portion of the contact pads 9 protruding relative to the bottom wall 7 of the hollow body 6 to come into contact with the structure 2 while the other contact pads 9 are retracted relative to this bottom wall 7 without contact with the structure 2.
  • the rotary means 11 for actuating the contact pads 9 advantageously comprise an annular ring 11 for actuating the contact pads 9.
  • This annular ring 11 comprises, on a lower face 11a facing the wall bottom 7 of the hollow body 6, actuating reliefs 15, in particular in the form of bosses, projecting relative to the lower face 11a and spaced apart from each other.
  • These reliefs actuating means 15 are adapted to allow a portion of the contact pads 9 to protrude relative to the bottom wall 7 of the hollow body 6 to come into contact with the structure 2.
  • the internal lateral surface SL of the hollow body 6 comprises a first inner ring 16 and the annular ring 11 for actuating the contact pads 9 comprises three first pinions 17, regularly distributed around the annular ring 11, forming drive wheels , the first inner ring 16 and the first three gears 17 together forming a first internal gear system 16, 17.
  • annular ring 11 for actuating the contact pads 9 also comprises, on an upper face 11b opposite the suction system 3 by compressed gas, a second inner ring 18 and the gripping device 1 comprises a second pinion 19 forming a drive wheel, the second inner ring 18 and the second pinion 19 together forming a second internal gear system 18, 19.
  • the gripping device 1 comprises a motor 20, for example electric, fixed on the base wall 13 of the gripping cover 12, which includes the second pinion 19 and thus allows the rotary drive of the annular ring 11 to means of the second gear system 18, 19 thus formed.
  • a motor 20 for example electric
  • each retractable contact pad 9 cooperates with an elastic return member 21, here in the form of a spring, these retractable contact pads 9 thus being retractable in elastic return towards the suction system 3.
  • the contact pads 9 and the corresponding pin holes 10 are regularly distributed in a circular manner on the surface of the bottom wall 7 of the hollow body 6. More precisely, they are angularly spaced at an angle of about 40 ° .
  • the gripping device 1 also comprises a detection sensor 22 of the structure 2, which can in particular be of the capacitive, optical or ultrasonic type, and fixed on the external lateral surface of the hollow body 6, as visible on the figure 1 .
  • the gripping device 1 according to the invention can then be used as described below.
  • the number of retractable pads 9 coming into contact with the structure 2 is limited so as to prevent any risk of contamination of the structure 2.
  • This number corresponds to the number of actuating reliefs 15. In this example, it is equal to three but that is by no means limitative and there could be at least four or at least five or even at least six or more.
  • These retractable pins 9 serve as support for the structure 2.
  • the gripping device 1 is used so that a set of retractable pads 9 can only see one type of process and thus avoid contamination of the structure 2.
  • the positioning change of the retractable pads 9 is made possible by means of the actuating reliefs 15 of the annular ring 11, as visible on the figure 7 . Indeed, when the stud 9 is in contact with the actuating relief 15 after rotation of the annular ring 11, this relief 15 pushes it towards the structure 2 so as to come into contact therewith. On the contrary, in the absence of pressure exerted by the actuating relief on a retractable stud 9, the spring 21 of the stud 9 forces it to return inside the internal cavity C of the hollow body 6. as examples on the figure 7 , the pad 9a corresponds to a pad actuated while the pad 9b corresponds to a non-actuated pad.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Description

DOMAINE TECHNIQUETECHNICAL AREA

La présente invention se rapporte au domaine des dispositifs de préhension, ou encore appelés manipulateurs, de substrats comprenant une ou plusieurs couches minces, notamment de structures semi-conductrices monocouches ou multicouches, également dénommées « semiconductor wafers » en anglais, permettant notamment l'obtention de cellules photovoltaïques, et préférentiellement des cellules photovoltaïques dites « cristallines », c'est-à-dire qui sont à base de silicium monocristallin ou multicristallin, lorsque ces structures semi-conductrices correspondent à des plaquettes de silicium.The present invention relates to the field of gripping devices, or alternatively called manipulators, of substrates comprising one or more thin layers, in particular of single-layer or multilayer semiconductor structures, also called "semiconductor wafers" in English, making it possible in particular to obtain photovoltaic cells, and preferably photovoltaic cells called "crystalline", that is to say that are based on monocrystalline silicon or multicrystalline, when these semiconductor structures correspond to silicon wafers.

Plus précisément, la présente invention se rapporte à un dispositif selon le préambule de la revendication 1.More specifically, the present invention relates to a device according to the preamble of claim 1.

Un tel dispositif est connu du document US 2010/0025905 A1 .Such a device is known from the document US 2010/0025905 A1 .

L'invention peut être mise en oeuvre pour de nombreuses applications qui impliquent la manipulation de structures monocouches ou multicouches, et particulièrement pour son utilisation sur des équipements de l'industrie photovoltaïque, par exemple pour la charge et la décharge de telles structures sur des plateaux ou plateaux de détourage, ce terme correspondant à la non déposition de matière sur les bords d'un substrat ou tout autre partie du substrat en cas de masquage.The invention can be implemented for many applications involving the manipulation of monolayer or multilayer structures, and particularly for its use on equipment in the photovoltaic industry, for example for charging and discharging such structures on trays. or clipping trays, this term corresponding to the non-deposition of material on the edges of a substrate or any other part of the substrate in case of masking.

L'invention propose ainsi un dispositif de préhension d'une structure monocouche ou multicouche comportant un système d'aspiration et des plots rétractables.The invention thus proposes a device for gripping a monolayer or multilayer structure comprising a suction system and retractable pads.

ÉTAT DE LA TECHNIQUE ANTÉRIEURESTATE OF THE PRIOR ART

Dans le domaine de la fabrication des cellules photovoltaïques, et en particulier des cellules photovoltaïques cristallines à base de silicium, il est nécessaire de pouvoir manipuler les plaquettes de silicium, habituellement appelées « wafers », à partir desquelles les cellules photovoltaïques sont obtenues.In the field of the manufacture of photovoltaic cells, and in particular crystalline silicon-based photovoltaic cells, it is necessary to be able to manipulate the silicon wafers, usually called "wafers", from which the photovoltaic cells are obtained.

L'art antérieur enseigne ainsi de nombreuses solutions de manipulateurs de structures semi-conductrices reposant sur diverses technologies. Ainsi, par exemple, la demande de brevet canadien CA 2 688 226 A1 , la demande de brevet américain US 2005/0110291 A1 et le brevet américain US 7,398,735 B1 divulguent des solutions de manipulateurs dont le principe de fonctionnement repose sur un système de type Bernoulli. D'autres publications, comme par exemple le brevet américain US 6,382,692 B1 et les demandes de brevet américain US 2007/0262598 A1 , US 2010/0025905 A1 , US 2010/0253106 A1 et US 2013/0032981 A1 , enseignent des solutions de manipulation de structures semi-conductrices par la technologie du vide. D'autres technologies peuvent encore être employées par ces manipulateurs selon l'art antérieur, comme par exemple celles utilisant les ultra-sons ou celles reposant sur un principe de fonctionnement essentiellement mécanique.The prior art thus teaches many semiconductor structure manipulator solutions based on various technologies. So, for example, the Canadian patent application CA 2 688 226 A1 , the US patent application US 2005/0110291 A1 and the US patent US 7,398,735 B1 disclose solutions of manipulators whose operating principle is based on a Bernoulli type system. Other publications, such as the US patent US 6,382,692 B1 and US patent applications US 2007/0262598 A1 , US 2010/0025905 A1 , US 2010/0253106 A1 and US 2013/0032981 A1 , teach semiconductor structure manipulation solutions using vacuum technology. Other technologies can still be used by these manipulators according to the prior art, such as those using ultrasound or those based on a principle of essentially mechanical operation.

Par ailleurs, lors de la fabrication des cellules photovoltaïques, il est très important de pouvoir se prémunir de tout risque de contamination de surface des plaquettes de silicium et également de tout risque de perturbation aéraulique. Or, il peut arriver que certains opérateurs travaillant sur des équipements photovoltaïques utilisent un même préhenseur, ou manipulateur, pour manipuler les plaquettes de silicium avant et après procédé de sorte que cela engendre un risque élevé de contamination. De plus, lors du positionnement des plaquettes de silicium sur des plateaux ou des plateaux de détourage pour recevoir un dépôt, l'opération de pose des plaquettes peut être rendue compliquée du fait des perturbations aérauliques engendrées par les préhenseurs.Moreover, during the manufacture of photovoltaic cells, it is very important to be able to guard against any risk of surface contamination of silicon wafers and also any risk of aeraulic disturbance. However, it can happen that some operators working on photovoltaic equipment use the same gripper, or manipulator, to handle the silicon wafers before and after process so that it generates a high risk of contamination. In addition, when positioning the silicon wafers on trays or trimming trays to receive a deposit, the platelet laying operation can be made complicated by the air disturbances generated by the grippers.

Un des inconvénients majeurs des manipulateurs de l'art antérieur est ainsi qu'ils ne sont pas adaptés pour pouvoir se prémunir d'un tel risque de contamination et d'un tel risque de turbulence aéraulique lors du positionnement des structures semi-conductrices.One of the major drawbacks of the manipulators of the prior art is that they are not adapted to be able to guard against such a risk of contamination and of such a risk of aeraulic turbulence when positioning the semiconductor structures.

EXPOSÉ DE L'INVENTIONSTATEMENT OF THE INVENTION

L'invention a donc pour but de remédier au moins partiellement aux besoins mentionnés précédemment et aux inconvénients relatifs aux réalisations de l'art antérieur.The invention therefore aims to at least partially overcome the needs mentioned above and the disadvantages relating to the achievements of the prior art.

L'invention a ainsi pour objet un dispositif de préhension d'une structure (ou substrat) monocouche ou multicouche, semi-conductrice ou non, en particulier une structure semi-conductrice multicouche, notamment une plaquette de silicium, notamment une plaquette de silicium permettant l'obtention de cellules photovoltaïques à base de silicium cristallin, ledit dispositif comportant :

  • un système d'aspiration par gaz comprimé, notamment de l'air comprimé, comprenant au moins un orifice d'alimentation en gaz comprimé et au moins un orifice d'échappement de gaz,
  • un corps creux comprenant une cavité interne, délimitée par une surface latérale interne du corps creux et par une paroi de fond du corps creux, le système d'aspiration par gaz comprimé étant logé au moins partiellement dans ladite cavité interne, ladite paroi de fond comportant une pluralité d'orifices d'aspiration en vis-à-vis du système d'aspiration apte à permettre la préhension de la structure par aspiration,
ledit dispositif étant caractérisé par :
  • une pluralité de plots (ou pions) de contact rétractables, aptes à venir au contact de la structure, les plots de contact étant positionnés au travers d'orifices de plots de la paroi de fond du corps creux, et
  • des moyens rotatifs d'actionnement des plots de contact, logés au moins en partie dans la cavité interne du corps creux, aptes à permettre sélectivement à une partie des plots de contact d'être en saillie relativement à la paroi de fond du corps creux pour venir au contact de la structure tandis que les autres plots de contact sont rétractés relativement à ladite paroi de fond sans contact avec la structure.
The invention thus relates to a device for gripping a monolayer or multilayer structure or substrate, or semiconductor or not, in particular a multilayer semiconductor structure, in particular a silicon wafer, in particular a silicon wafer making it possible to obtain photovoltaic cells based on crystalline silicon, said device comprising:
  • a compressed gas suction system, in particular compressed air, comprising at least one compressed gas supply port and at least one gas exhaust port,
  • a hollow body comprising an internal cavity delimited by an internal lateral surface of the hollow body and by a bottom wall of the hollow body, the compressed gas suction system being housed at least partially in said internal cavity, said bottom wall comprising a plurality of suction ports vis-à-vis the suction system adapted to allow the gripping of the structure by suction,
said device being characterized by:
  • a plurality of retractable contact pads (or pins), able to come into contact with the structure, the contact pads being positioned through stud orifices of the bottom wall of the hollow body, and
  • rotary means for actuating the contact pads, housed at least in part in the internal cavity of the hollow body, adapted to selectively allow a portion of the contact pads to protrude relative to the bottom wall of the hollow body to come into contact with the structure while the other contact pads are retracted relative to said bottom wall without contact with the structure.

Par « rétractables », on entend que les plots sont escamotables entre une position extrême en saillie par rapport à la paroi de fond du corps creux et une position extrême en retrait, en particulier sensiblement dans le plan de la paroi de fond du corps creux.By "retractable" is meant that the pads are retractable between an extreme position protruding from the bottom wall of the hollow body and an extreme position recessed, in particular substantially in the plane of the bottom wall of the hollow body.

Le dispositif de préhension selon l'invention peut en outre comporter l'une ou plusieurs des caractéristiques suivantes prises isolément ou suivant toutes combinaisons techniques possibles.The gripping device according to the invention may further comprise one or more of the following characteristics taken separately or in any possible technical combinations.

De façon préférentielle, les moyens rotatifs d'actionnement des plots de contact peuvent comporter une bague annulaire d'actionnement des plots de contact.Preferably, the rotary means for actuating the contact pads may comprise an annular ring for actuating the contact pads.

La bague annulaire d'actionnement des plots de contact peut comprendre, sur une face inférieure en vis-à-vis de la paroi de fond du corps creux, des reliefs d'actionnement en saillie, prenant par exemple la forme de bossages, relativement à la face inférieure et espacés les uns des autres, aptes à permettre à une partie des plots de contact d'être en saillie relativement à la paroi de fond du corps creux pour venir au contact de la structure.The annular ring for actuating the contact pads may comprise, on a lower face opposite the bottom wall of the hollow body, reliefs protruding actuating device, for example taking the form of bosses, relatively to the lower face and spaced from each other, able to allow a portion of the contact pads to project relative to the bottom wall of the hollow body to come into contact with the structure.

De plus, la surface latérale interne du corps creux peut comporter une première couronne intérieure et la bague annulaire d'actionnement des plots de contact peut comporter au moins un premier pignon formant roue motrice, notamment une pluralité de premiers pignons, par exemple au moins trois, notamment répartis régulièrement sur la bague annulaire, la première couronne intérieure et ledit au moins un premier pignon formant ensemble un premier système d'engrenage intérieur.In addition, the inner lateral surface of the hollow body may comprise a first inner ring and the annular ring for actuating the contact pads may comprise at least one first drive wheel pinion, in particular a plurality of first pinions, for example at least three , in particular regularly distributed on the annular ring, the first inner ring and said at least one first gear together forming a first internal gear system.

Par ailleurs, la bague annulaire d'actionnement des plots de contact peut comprendre, sur une face supérieure en vis-à-vis du système d'aspiration par gaz comprimé, une deuxième couronne intérieure et le dispositif de préhension peut comporter au moins un deuxième pignon formant roue motrice, la deuxième couronne intérieure et ledit au moins un deuxième pignon formant ensemble un deuxième système d'engrenage intérieur.Furthermore, the annular ring for actuating the contact pads may comprise, on an upper face opposite the compressed gas suction system, a second inner ring and the gripping device may comprise at least one second driving wheel pinion, the second inner ring and said at least one second pinion together forming a second inner gear system.

En outre, le dispositif de préhension selon l'invention peut comporter un moteur, notamment électrique, d'entraînement en rotation desdits moyens rotatifs d'actionnement des plots de contact.In addition, the gripping device according to the invention may comprise a motor, in particular an electric motor, driving in rotation of said rotary means for actuating the contact pads.

Le moteur peut avantageusement être apte à entraîner en rotation la bague annulaire d'actionnement des plots de contact, le moteur comprenant ledit au moins un deuxième pignon. Le moteur peut avantageusement être asservi en position pour faire correspondre le nombre de tours en fonction des plots de contact que l'on veut actionner.The motor may advantageously be able to drive in rotation the annular ring for actuating the contact pads, the motor comprising said at least one second pinion. The motor can advantageously be slaved in position to match the number of revolutions depending on the contact pads that we want to operate.

De plus, le système d'aspiration peut comporter un ou plusieurs orifices d'échappement de gaz. Le ou les orifices d'échappement de gaz peuvent être tous orientés en direction opposée de la paroi de fond du corps creux.In addition, the suction system may include one or more gas exhaust ports. The gas exhaust port (s) may all be oriented in the opposite direction of the bottom wall of the hollow body.

Autrement dit, le ou les orifices d'échappement de gaz sont préférentiellement dirigés en direction opposée de la structure monocouche ou multicouche. De cette façon, le gaz est évacué du dispositif de préhension sans générer de perturbation aéraulique autour de la structure.In other words, the gas escape orifice (s) are preferably directed in the opposite direction of the monolayer structure or multilayer. In this way, the gas is evacuated from the gripping device without generating aeraulic disturbance around the structure.

Par ailleurs, le système d'aspiration peut comporter des moyens d'aspiration de type ventouse.Furthermore, the suction system may comprise sucker type suction means.

De plus, le système d'aspiration peut être logé au moins en partie dans un capot de préhension du dispositif de préhension. Ce capot de préhension peut comprendre une paroi de base surmontée d'un organe central de préhension, ladite paroi de base étant apte à venir fermer la cavité interne du corps creux.In addition, the suction system may be housed at least in part in a gripping cap of the gripping device. This gripping cap may comprise a base wall surmounted by a central gripping member, said base wall being adapted to close the internal cavity of the hollow body.

Le moteur peut alors être fixé sur la paroi de base du capot de préhension.The motor can then be attached to the base wall of the gripping hood.

En outre, le système d'aspiration peut comporter une pluralité d'orifices d'échappement de gaz disposés sur la paroi de base du capot de préhension, étant notamment répartis régulièrement sur ladite paroi de base.In addition, the suction system may comprise a plurality of gas exhaust ports disposed on the base wall of the gripping cap, being in particular regularly distributed on said base wall.

De plus, le système d'aspiration peut en outre comporter un ou plusieurs orifices d'alimentation en gaz comprimé situés sur l'organe central de préhension du capot de préhension.In addition, the suction system may further comprise one or more compressed gas supply ports located on the central gripping member of the gripping cap.

Par ailleurs, chaque plot de contact rétractable peut coopérer avec un organe de rappel élastique, notamment un ressort, les plots de contact rétractables étant notamment rétractables en rappel élastique vers le système d'aspiration.Furthermore, each retractable contact pad can cooperate with a resilient return member, in particular a spring, the retractable contact pads being in particular retractable in elastic return towards the suction system.

La pluralité de plots de contact et la pluralité d'orifices de plots correspondante peuvent de plus être réparties régulièrement de façon sensiblement circulaire sur la surface de la paroi de fond du corps creux.The plurality of contact pads and the plurality of corresponding stud holes may further be evenly distributed substantially circularly over the surface of the bottom wall of the hollow body.

Les plots de contact et les orifices de plots correspondants peuvent en particulier être espacés angulairement d'un angle compris entre 30 et 50°, notamment d'environ 40°.The contact pads and the corresponding pin holes may in particular be spaced angularly at an angle of between 30 and 50 °, in particular about 40 °.

En outre, le dispositif de préhension selon l'invention peut comporter un capteur de détection de la structure, notamment de type capacitif, optique ou encore à ultrasons, notamment situé au niveau du corps creux, par exemple fixé sur la surface latérale externe du corps creux.In addition, the gripping device according to the invention may comprise a sensor for detecting the structure, in particular of the capacitive, optical or ultrasound type, in particular located at the level of the hollow body, for example fixed on the external lateral surface of the body. hollow.

Le corps creux et/ou le capot de préhension, notamment la paroi de base et/ou l'organe de préhension, du dispositif de préhension selon l'invention peuvent être préférentiellement de forme sensiblement circulaire. Toutefois, l'invention n'est pas limitée à ce type de forme de sorte que le corps creux et/ou le capot de préhension, notamment la paroi de base et/ou l'organe de préhension, du dispositif de préhension peuvent présenter une forme différente, par exemple ovale ou polygonale, telle que rectangulaire ou carrée, entre autres.The hollow body and / or the gripping cap, in particular the base wall and / or the gripping member, of the gripping device according to the invention can be preferably of substantially circular shape. However, the invention is not limited to this type of shape so that the hollow body and / or the gripping cap, in particular the base wall and / or the gripping member, of the gripping device can exhibit different shape, for example oval or polygonal, such as rectangular or square, among others.

BRÈVE DESCRIPTION DES DESSINSBRIEF DESCRIPTION OF THE DRAWINGS

L'invention pourra être mieux comprise à la lecture de la description détaillée qui va suivre, d'un exemple de mise en oeuvre non limitatif de celle-ci, ainsi qu'à l'examen des figures, schématiques et partielles, du dessin annexé, sur lequel :

  • la figure 1 représente, en perspective, un exemple de dispositif de préhension conforme à l'invention et une structure monocouche ou multicouche,
  • la figure 2 représente, en perspective, la paroi de fond du corps creux du dispositif de préhension de la figure 1,
  • les figures 3 et 4 représentent deux vues différentes éclatées du dispositif de préhension de la figure 1,
  • les figures 5 et 6 représentent deux vues différentes en perspective des moyens rotatifs d'actionnement des plots de contact du dispositif de préhension de la figure 1,
  • la figure 7 représente une vue en perspective et en semi-coupe du dispositif de préhension de la figure 1 permettant de visualiser l'actionnement des plots de contact,
  • la figure 8 représente, en perspective, une vue de dessous du dispositif de préhension de la figure 1 sans la présence de la paroi de fond permettant de visualiser l'intérieur de la cavité interne du corps creux, et
  • la figure 9 illustre, en perspective, l'absence de contact entre la structure et le dispositif de préhension de la figure 1 lors de son utilisation, hormis au niveau des plots de contact sélectivement actionnés par le biais des moyens rotatifs.
The invention will be better understood on reading the following detailed description of an example of non-limiting implementation thereof, as well as on examining the schematic and partial figures of the appended drawing. , on which :
  • the figure 1 represents, in perspective, an example of a gripping device according to the invention and a monolayer or multilayer structure,
  • the figure 2 represents, in perspective, the bottom wall of the hollow body of the gripping device of the figure 1 ,
  • the Figures 3 and 4 represent two different exploded views of the gripping device of the figure 1 ,
  • the Figures 5 and 6 represent two different views in perspective of the rotary means for actuating the contact pads of the gripping device of the figure 1 ,
  • the figure 7 represents a perspective and semi-sectional view of the gripping device of the figure 1 to visualize the actuation of the contact pads,
  • the figure 8 represents, in perspective, a bottom view of the gripping device of the figure 1 without the presence of the bottom wall making it possible to visualize the inside of the internal cavity of the hollow body, and
  • the figure 9 illustrates, in perspective, the absence of contact between the structure and the gripping device of the figure 1 when in use, except at the contact pads selectively actuated through the rotating means.

Dans l'ensemble de ces figures, des références identiques peuvent désigner des éléments identiques ou analogues.In all of these figures, identical references may designate identical or similar elements.

De plus, les différentes parties représentées sur les figures ne le sont pas nécessairement selon une échelle uniforme, pour rendre les figures plus lisibles.In addition, the different parts shown in the figures are not necessarily in a uniform scale, to make the figures more readable.

EXPOSÉ DÉTAILLÉ D'UN MODE DE RÉALISATION PARTICULIERDETAILED PRESENTATION OF A PARTICULAR EMBODIMENT

En référence aux figures 1 à 9, on va maintenant décrire un exemple de réalisation d'un dispositif de préhension 1 conforme à l'invention et son principe de fonctionnement.With reference to Figures 1 to 9 , we will now describe an embodiment of a gripping device 1 according to the invention and its operating principle.

Il est à noter que, comme indiqué précédemment, le dispositif de préhension 1 est préférentiellement utilisé, mais non exclusivement, pour la manipulation de structures semi-conductrices monocouches ou multicouches de type « semiconductor wafers », et en particulier pour des plaquettes de silicium, notamment les plaquettes de silicium permettant l'obtention de cellules photovoltaïques à base de silicium cristallin, telles que les cellules photovoltaïque à hétérojonction ou à homojonction.It should be noted that, as indicated above, the gripping device 1 is preferably used, but not exclusively, for the manipulation of semi-conductor structures semiconductor or multilayer semiconductor wafers, and in particular for silicon wafers, in particular, silicon wafers making it possible to obtain photovoltaic cells based on crystalline silicon, such as heterojunction or homojunction photovoltaic cells.

Comme visible sur les figures 1 à 4, le dispositif de préhension 1 conforme à l'invention comporte une partie inférieure formée par corps creux 6 de forme circulaire constituant une base placée à proximité de la structure 2.As visible on Figures 1 to 4 , the gripping device 1 according to the invention comprises a lower portion formed by hollow body 6 of circular shape constituting a base placed close to the structure 2.

Ce corps creux 6 comporte une cavité interne C, visible sur la figure 3, laquelle est délimitée par la surface latérale interne SL du corps creux 6 et par une paroi de fond 7 du corps creux 6.This hollow body 6 has an internal cavity C, visible on the figure 3 which is delimited by the internal lateral surface SL of the hollow body 6 and by a bottom wall 7 of the hollow body 6.

Par ailleurs, le dispositif de préhension 1 conforme à l'invention comporte une partie supérieure formée par capot de préhension 12, lequel comprend une paroi de base 13, de forme circulaire, surmontée d'un organe central de préhension 14, de forme cylindrique. De façon avantageuse, la paroi de base 13 permet de venir fermer la cavité interne C du corps creux 6.Furthermore, the gripping device 1 according to the invention comprises an upper part formed by gripping cap 12, which comprises a base wall 13, of circular shape, surmounted by a central grip member 14, of cylindrical shape. Advantageously, the base wall 13 makes it possible to close the internal cavity C of the hollow body 6.

De plus, le dispositif de préhension 1 comporte un système d'aspiration 3 par gaz comprimé, notamment par air comprimé, qui est logé au moins en partie dans la cavité interne C du corps creux 6.In addition, the gripping device 1 comprises a suction system 3 by compressed gas, in particular by compressed air, which is housed at least partly in the internal cavity C of the hollow body 6.

Ce système d'aspiration 3 comporte par exemple des moyens d'aspiration de type ventouse, visibles sur la figure 4. De plus, il comporte un orifice d'alimentation en gaz comprimé 4 situé sur la paroi cylindrique de l'organe central de préhension 14, et trois orifices d'échappement de gaz 5 disposés sur la paroi de base 13 du capot de préhension 12, en étant répartis régulièrement sur cette paroi de base 13.This suction system 3 comprises, for example, sucker type suction means, visible on the figure 4 . In addition, it comprises a compressed gas supply port 4 located on the cylindrical wall of the central gripping member 14, and three gas exhaust ports 5 disposed on the base wall 13 of the gripping cover 12, being regularly distributed on this base wall 13.

De façon avantageuse, ces orifices d'échappement de gaz 5 sont tous orientés en direction opposée de la paroi de fond 7 du corps creux 6, c'est-à-dire de sorte que les gaz sortants soient dirigés en éloignement de la structure 2. De cette façon, l'air est évacué du dispositif de préhension 1 sans générer de perturbation aéraulique autour de la structure 2.Advantageously, these gas exhaust ports 5 are all oriented in the opposite direction of the bottom wall 7 of the hollow body 6, that is to say so that the outgoing gases are directed away from the structure 2 In this way, the air is evacuated from the gripping device 1 without generating aeraulic disturbance around the structure 2.

Par ailleurs, la paroi de fond 7 du corps creux 6 comporte une pluralité d'orifices d'aspiration 8, comme visible sur la figure 2, par exemple disposés en étoile, en vis-à-vis du système d'aspiration 3 et apte à permettre la préhension de la structure 2 par aspiration.Furthermore, the bottom wall 7 of the hollow body 6 comprises a plurality of suction orifices 8, as visible on the figure 2 , for example arranged in a star, vis-à-vis the suction system 3 and adapted to allow the gripping of the structure 2 by suction.

Le dispositif de préhension 1 comporte en outre une pluralité de plots de contact rétractables 9, par exemple neuf dans cet exemple, aptes à venir au contact de la structure 2, ces plots de contact 9 étant positionnés au travers d'orifices de plots 10 de la paroi de fond 7 du corps creux 6.The gripping device 1 further comprises a plurality of retractable contact pads 9, for example new in this example, able to come into contact with the structure 2, these contact pads 9 being positioned through orifices of studs 10 of FIG. the bottom wall 7 of the hollow body 6.

Enfin, le dispositif de préhension 1 comporte des moyens rotatifs 11 d'actionnement des plots de contact 9, logés dans la cavité interne C du corps creux 6. Ces moyens rotatifs 11 sont aptes à permettre sélectivement à une partie des plots de contact 9 d'être en saillie relativement à la paroi de fond 7 du corps creux 6 pour venir au contact de la structure 2 tandis que les autres plots de contact 9 sont rétractés relativement à cette paroi de fond 7 sans contact avec la structure 2.Finally, the gripping device 1 comprises rotary means 11 for actuating the contact pads 9, housed in the internal cavity C of the hollow body 6. These rotary means 11 are able to selectively allow a portion of the contact pads 9 protruding relative to the bottom wall 7 of the hollow body 6 to come into contact with the structure 2 while the other contact pads 9 are retracted relative to this bottom wall 7 without contact with the structure 2.

Dans cet exemple, comme visible sur les figures 5 et 6 par exemple, les moyens rotatifs 11 d'actionnement des plots de contact 9 comportent avantageusement une bague annulaire 11 d'actionnement des plots de contact 9. Cette bague annulaire 11 comprend, sur une face inférieure 11a en vis-à-vis de la paroi de fond 7 du corps creux 6, des reliefs d'actionnement 15, notamment sous forme de bossages, en saillie relativement à la face inférieure 11a et espacés les uns des autres. Ces reliefs d'actionnement 15 sont aptes à permettre à une partie des plots de contact 9 d'être en saillie relativement à la paroi de fond 7 du corps creux 6 pour venir au contact de la structure 2.In this example, as visible on the Figures 5 and 6 for example, the rotary means 11 for actuating the contact pads 9 advantageously comprise an annular ring 11 for actuating the contact pads 9. This annular ring 11 comprises, on a lower face 11a facing the wall bottom 7 of the hollow body 6, actuating reliefs 15, in particular in the form of bosses, projecting relative to the lower face 11a and spaced apart from each other. These reliefs actuating means 15 are adapted to allow a portion of the contact pads 9 to protrude relative to the bottom wall 7 of the hollow body 6 to come into contact with the structure 2.

Par ailleurs, comme visible sur les figures 3 et 17, la surface latérale interne SL du corps creux 6 comporte une première couronne intérieure 16 et la bague annulaire 11 d'actionnement des plots de contact 9 comporte trois premiers pignons 17, régulièrement répartis autour de la bague annulaire 11, formant des roues motrices, la première couronne intérieure 16 et les trois premiers pignons 17 formant ensemble un premier système d'engrenage intérieur 16, 17.Moreover, as visible on figures 3 and 17, the internal lateral surface SL of the hollow body 6 comprises a first inner ring 16 and the annular ring 11 for actuating the contact pads 9 comprises three first pinions 17, regularly distributed around the annular ring 11, forming drive wheels , the first inner ring 16 and the first three gears 17 together forming a first internal gear system 16, 17.

De plus, la bague annulaire 11 d'actionnement des plots de contact 9 comprend également, sur une face supérieure 11b en vis-à-vis du système d'aspiration 3 par gaz comprimé, une deuxième couronne intérieure 18 et le dispositif de préhension 1 comporte un deuxième pignon 19 formant roue motrice, la deuxième couronne intérieure 18 et le deuxième pignon 19 formant ensemble un deuxième système d'engrenage intérieur 18, 19.In addition, the annular ring 11 for actuating the contact pads 9 also comprises, on an upper face 11b opposite the suction system 3 by compressed gas, a second inner ring 18 and the gripping device 1 comprises a second pinion 19 forming a drive wheel, the second inner ring 18 and the second pinion 19 together forming a second internal gear system 18, 19.

Plus précisément, le dispositif de préhension 1 comporte un moteur 20, par exemple électrique, fixé sur la paroi de base 13 du capot de préhension 12, qui comporte le deuxième pignon 19 et permet ainsi l'entraînement en rotation de la bague annulaire 11 au moyen du deuxième système d'engrenage 18, 19 ainsi formé.More specifically, the gripping device 1 comprises a motor 20, for example electric, fixed on the base wall 13 of the gripping cover 12, which includes the second pinion 19 and thus allows the rotary drive of the annular ring 11 to means of the second gear system 18, 19 thus formed.

De plus, chaque plot de contact rétractable 9 coopère avec un organe de rappel élastique 21, ici sous la forme d'un ressort, ces plots de contact rétractables 9 étant ainsi rétractables en rappel élastique vers le système d'aspiration 3.In addition, each retractable contact pad 9 cooperates with an elastic return member 21, here in the form of a spring, these retractable contact pads 9 thus being retractable in elastic return towards the suction system 3.

Comme visible sur les figures 2 et 8 notamment, les plots de contact 9 et les orifices de plots 10 correspondants sont répartis régulièrement de façon circulaire sur la surface de la paroi de fond 7 du corps creux 6. Plus précisément, ils sont espacés angulairement d'un angle d'environ 40°.As visible on figures 2 and 8 in particular, the contact pads 9 and the corresponding pin holes 10 are regularly distributed in a circular manner on the surface of the bottom wall 7 of the hollow body 6. More precisely, they are angularly spaced at an angle of about 40 ° .

Enfin, le dispositif de préhension 1 comporte également un capteur de détection 22 de la structure 2, qui peut notamment être de type capacitif, optique ou encore à ultrasons, et fixé sur la surface latérale externe du corps creux 6, comme visible sur la figure 1.Finally, the gripping device 1 also comprises a detection sensor 22 of the structure 2, which can in particular be of the capacitive, optical or ultrasonic type, and fixed on the external lateral surface of the hollow body 6, as visible on the figure 1 .

Le dispositif de préhension 1 conforme l'invention peut alors être utilisé de la manière décrite ci-après.The gripping device 1 according to the invention can then be used as described below.

Le nombre de plots rétractables 9 venant au contact de la structure 2 est limité de sorte à empêcher tout risque de contamination de la structure 2. Ce nombre correspond ainsi au nombre de reliefs d'actionnement 15. Dans cet exemple, il est égal à trois mais cela n'est aucunement limitatif et il pourrait y en avoir au moins quatre, voire au moins cinq, voire au moins six, voire plus. Ces pions rétractables 9 servent de support à la structure 2.The number of retractable pads 9 coming into contact with the structure 2 is limited so as to prevent any risk of contamination of the structure 2. This number corresponds to the number of actuating reliefs 15. In this example, it is equal to three but that is by no means limitative and there could be at least four or at least five or even at least six or more. These retractable pins 9 serve as support for the structure 2.

Pour un type de procédé donné, on va ainsi sélectionner une partie des plots de contact 9 qui vont venir au contact d'une structure 2 par le biais de la rotation de la bague annulaire 11 via le moteur 20. Puis, pour un autre type de procédé donné, on va sélectionner une autre partie des plots de contact 9 pour venir au contact d'une structure 2 par le biais de la rotation de la bague annulaire 11 via le moteur 20 d'un angle prédéterminé pour permettre le changement de plots rétractables 9. Autrement dit, on utilise le dispositif de préhension 1 de sorte qu'un jeu de plots rétractables 9 donné ne puisse voir qu'un type de procédé et ainsi permettre d'éviter une contamination de la structure 2.For a given type of process, one will thus select a part of the contact pads 9 which will come into contact with a structure 2 by means of the rotation of the annular ring 11 via the motor 20. Then, for another type given method, we will select another part of the contact pads 9 to come into contact with a structure 2 through the rotation of the annular ring 11 via the motor 20 at a predetermined angle to allow the change of pads 9. In other words, the gripping device 1 is used so that a set of retractable pads 9 can only see one type of process and thus avoid contamination of the structure 2.

Le changement de positionnement des plots rétractables 9 est rendu possible par le biais des reliefs d'actionnement 15 de la bague annulaire 11, comme visible sur la figure 7. En effet, lorsque le plot 9 est au contact du relief d'actionnement 15 après rotation de la bague annulaire 11, ce relief 15 le pousse en direction de la structure 2 de sorte à venir au contact de celle-ci. Au contraire, en l'absence de pression exercée par le relief d'actionnement 15 sur un plot rétractable 9, le ressort 21 du plot 9 le contraint à rentrer à l'intérieur de la cavité interne C du corps creux 6. Ainsi, à titre d'exemples sur la figure 7, le plot 9a correspond à un plot actionné tandis que le plot 9b correspond à un plot non actionné.The positioning change of the retractable pads 9 is made possible by means of the actuating reliefs 15 of the annular ring 11, as visible on the figure 7 . Indeed, when the stud 9 is in contact with the actuating relief 15 after rotation of the annular ring 11, this relief 15 pushes it towards the structure 2 so as to come into contact therewith. On the contrary, in the absence of pressure exerted by the actuating relief on a retractable stud 9, the spring 21 of the stud 9 forces it to return inside the internal cavity C of the hollow body 6. as examples on the figure 7 , the pad 9a corresponds to a pad actuated while the pad 9b corresponds to a non-actuated pad.

De façon avantageuse, comme visible sur la figure 9, lorsque le dispositif de préhension 1 est utilisé pour la préhension de la structure 2, celle-ci n'est en contact qu'uniquement avec les plots 9 actionnés de sorte qu'un espace E subsiste entre la paroi de fond 7 et la structure 2.Advantageously, as visible on the figure 9 when the gripping device 1 is used for gripping the structure 2, it is in contact only with the pads 9 actuated so that a space E remains between the bottom wall 7 and the structure 2.

Claims (15)

  1. Gripping device (1) for gripping a single-layer or multi-layer structure (2), said device comprising:
    - a suction system (3) using compressed gas, comprising at least one compressed gas inlet port (4) and at least one gas venting port (5),
    - a hollow body (6) comprising an internal cavity (C), delimited by an internal lateral surface (SL) of the hollow body (6) and by a bottom wall (7) of the hollow body (6), the compressed gas suction system (3) being housed at least partially inside said internal cavity (C), said bottom wall (7) including a plurality of suction ports (8) facing the suction system (3) capable of allowing the structure (2) to be gripped by suction,
    said device being characterised by:
    - a plurality of retractable contact pads (9), capable of coming into contact with the structure (2), the contact pads (9) being positioned through pad ports (10) in the bottom wall (7) of the hollow body (6), and
    - rotary means (11) for actuating the contact pads (9), housed at least partially inside the internal cavity (C) of the hollow body (6), capable of selectively enabling part of the contact pads (9) to project relative to the bottom wall (7) of the hollow body (6) so as to come into contact with the structure (2), whereas the other contact pads (9) are retracted relative to said bottom wall (7) without contact with the structure (2).
  2. Device according to claim 1, characterised in that the rotary means (11) for actuating the contact pads (9) include an annular ring (11) for actuating the contact pads (9).
  3. Device according to claim 2, characterised in that the annular ring (11) for actuating the contact pads (9) comprises, on a bottom face (11a) facing the bottom wall (7) of the hollow body (6), actuating raised portions (15) which project relative to the bottom face (11a) and spaced apart from one another, capable of enabling part of the contact pads (9) to project relative to the bottom wall (7) of the hollow body (6) so as to come into contact with the structure (2).
  4. Device according to claim 2 or 3, characterised in that the internal lateral surface (SL) of the hollow body (6) includes a first inner ring gear (16) and in that the annular ring (11) for actuating the contact pads (9) includes at least one first pinion (17) forming a drive wheel, the first inner ring gear (16) and said at least one first pinion (17) jointly forming a first inner gearing system (16, 17).
  5. Device according to one of claims 2 to 4, characterised in that the annular ring (11) for actuating the contact pads (9) comprises, on a top face (11b) facing the compressed gas suction system (3), a second inner ring gear (18) and in that the gripping device (1) includes at least one second pinion (19) forming a drive wheel, the second inner ring gear (18) and said at least one second pinion (19) jointly forming a second inner gearing system (18, 19).
  6. Device according to any of the preceding claims, characterised in that it includes a motor (20) for driving said rotary means (11) for actuating the contact pads (9) in rotation.
  7. Device according to claims 5 and 6, characterised in that the motor (20) is capable of driving the annular ring (11) for actuating the contact pads (9) in rotation, the motor (20) comprising said at least one second pinion (19).
  8. Device according to any of the preceding claims, characterised in that the suction system (3) includes one or more gas venting ports (5), all of which are oriented in the opposite direction to the bottom wall (7) of the hollow body (6).
  9. Device according to any of the preceding claims, characterised in that the suction system (3) includes suction means of the suction pad type.
  10. Device according to any of the preceding claims, characterised in that the suction system (3) is housed at least partially inside a gripping cover (12) of the gripping device (1), comprising a base wall (13) positioned underneath a central gripping member (14), said base wall (13) being capable of closing off the internal cavity (C) of the hollow body (6).
  11. Device according to claim 6 or 7, and according to claim 10, characterised in that the motor (20) is fixed to the base wall (13) of the gripping cover (12).
  12. Device according to any of the preceding claims, characterised in that each retractable contact pad (9) engages with an elastic return member (21), the retractable contact pads (9) in particular being retractable by elastic return towards the suction system (3).
  13. Device according to any of the preceding claims, characterised in that the plurality of contact pads (9) and the plurality of corresponding pad ports (10) are evenly distributed in a substantially circular manner on the surface of the bottom wall (7) of the hollow body (6).
  14. Device according to claim 13, characterised in that the contact pads (9) and the corresponding pad ports (10) are angularly spaced apart by an angle that lies in the range 30 to 50°, in particular equal to about 40°.
  15. Device according to any of the preceding claims, characterised in that it includes a sensor (22) for detecting the structure (2), in particular of the capacitive, optical or ultrasonic sensor type.
EP17204833.2A 2016-12-05 2017-12-01 Device for gripping a single-layer or multi-layer structure comprising a suction system and retractable pads Active EP3330049B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1661949A FR3059583B1 (en) 2016-12-05 2016-12-05 DEVICE FOR PREVENTING A MONOLAYER OR MULTILAYER STRUCTURE HAVING A SUCTION SYSTEM AND RETRACTABLE PLOTS

Publications (2)

Publication Number Publication Date
EP3330049A1 EP3330049A1 (en) 2018-06-06
EP3330049B1 true EP3330049B1 (en) 2019-09-18

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Application Number Title Priority Date Filing Date
EP17204833.2A Active EP3330049B1 (en) 2016-12-05 2017-12-01 Device for gripping a single-layer or multi-layer structure comprising a suction system and retractable pads

Country Status (2)

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EP (1) EP3330049B1 (en)
FR (1) FR3059583B1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR82913E (en) * 1962-11-05 1964-05-08 Bertin & Cie Improvements to vacuum support devices
DE2429421C2 (en) * 1974-06-19 1981-12-10 Vits-Maschinenbau Gmbh, 4018 Langenfeld Device for lifting the top sheet of a stack with blown air
DE202008010424U1 (en) * 2008-07-30 2009-12-24 J. Schmalz Gmbh Air-operated surface suction gripper

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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Publication number Publication date
EP3330049A1 (en) 2018-06-06
FR3059583A1 (en) 2018-06-08
FR3059583B1 (en) 2019-05-17

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