EP3267463A3 - Electronic vacuum tube with a planar cathode made of nanotubes or nanowires - Google Patents

Electronic vacuum tube with a planar cathode made of nanotubes or nanowires Download PDF

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Publication number
EP3267463A3
EP3267463A3 EP17178583.5A EP17178583A EP3267463A3 EP 3267463 A3 EP3267463 A3 EP 3267463A3 EP 17178583 A EP17178583 A EP 17178583A EP 3267463 A3 EP3267463 A3 EP 3267463A3
Authority
EP
European Patent Office
Prior art keywords
nanotube
nanowires
nanotubes
nanowire
vacuum tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP17178583.5A
Other languages
German (de)
French (fr)
Other versions
EP3267463A2 (en
Inventor
Jean-Paul Mazellier
Lucie SABAUT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales SA filed Critical Thales SA
Publication of EP3267463A2 publication Critical patent/EP3267463A2/en
Publication of EP3267463A3 publication Critical patent/EP3267463A3/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J21/00—Vacuum tubes
    • H01J21/02—Tubes with a single discharge path
    • H01J21/06—Tubes with a single discharge path having electrostatic control means only
    • H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
    • H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02—Electrodes; Magnetic control means; Screens
    • H01J23/04—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30423—Microengineered edge emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30434—Nanotubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/068—Multi-cathode assembly

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Microwave Tubes (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

L'invention concerne un tube électronique sous vide comprenant au moins une cathode (C) émissive d'électrons et au moins une anode (A) disposées dans une enceinte à vide (E), la cathode présentant une structure planaire comprenant un substrat (Sb) comprenant un matériau conducteur, une pluralité d'éléments nanotube ou nanofil (NT) isolés électriquement du substrat, l'axe longitudinal desdits éléments nanotube ou nanofil étant sensiblement parallèle au plan du substrat, et au moins un premier connecteur (CE1) relié électriquement à au moins un éléments nanotube ou nanofil de manière à pouvoir appliquer à l'élément nanofil ou nanotube un premier potentiel électrique (V1).

Figure imgaf001
Figure imgaf002
The invention relates to a vacuum electronic tube comprising at least one cathode (C) emitting electrons and at least one anode (A) arranged in a vacuum chamber (E), the cathode having a planar structure comprising a substrate (Sb ) comprising a conductive material, a plurality of nanotube or nanowire elements (NT) electrically isolated from the substrate, the longitudinal axis of said nanotube or nanowire elements being substantially parallel to the plane of the substrate, and at least one first connector (CE1) electrically connected to at least one nanotube or nanowire element so as to be able to apply to the nanowire or nanotube element a first electrical potential (V1).
Figure imgaf001
Figure imgaf002
EP17178583.5A 2016-07-07 2017-06-29 Electronic vacuum tube with a planar cathode made of nanotubes or nanowires Pending EP3267463A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1601057A FR3053830A1 (en) 2016-07-07 2016-07-07 VACUUM CATHODE ELECTRONIC TUBE BASED ON NANOTUBES OR NANOWIAS

Publications (2)

Publication Number Publication Date
EP3267463A2 EP3267463A2 (en) 2018-01-10
EP3267463A3 true EP3267463A3 (en) 2018-04-04

Family

ID=57485541

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17178583.5A Pending EP3267463A3 (en) 2016-07-07 2017-06-29 Electronic vacuum tube with a planar cathode made of nanotubes or nanowires

Country Status (8)

Country Link
US (1) US10720298B2 (en)
EP (1) EP3267463A3 (en)
JP (1) JP6982994B2 (en)
KR (1) KR102458120B1 (en)
CN (1) CN107591299B (en)
AU (1) AU2017204507B2 (en)
FR (1) FR3053830A1 (en)
TW (1) TWI753924B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111048374A (en) * 2019-11-21 2020-04-21 金陵科技学院 Light-emitting backlight source with staggered double-hollow-ring-surface cathode product-shaped three-arc gate control structure
CN112002628B (en) * 2020-08-28 2023-06-23 云南电网有限责任公司电力科学研究院 X-ray tube cathode unit and method for manufacturing the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000311578A (en) * 1999-04-28 2000-11-07 Sharp Corp Electron source array, its manufacture, and image forming device formed by using electron source array or its manufacture
US20040116034A1 (en) * 1997-10-30 2004-06-17 Canon Kabushiki Kaisha Method of manufacturing an electronic device containing a carbon nanotube
US20100045212A1 (en) * 2008-06-25 2010-02-25 Vladimir Mancevski Devices having laterally arranged nanotubes
US20100181896A1 (en) * 2009-01-16 2010-07-22 Korea University Industrial & Academic Collaboration Foundation Surface field electron emitters using carbon nanotube yarn and method of fabricating carbon nanotube yarn thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100372020B1 (en) * 2000-02-03 2003-02-14 학교법인 선문학원 manufacturing method of carbon nanotube - field emission display
US6672925B2 (en) * 2001-08-17 2004-01-06 Motorola, Inc. Vacuum microelectronic device and method
KR20050111705A (en) * 2004-05-22 2005-11-28 삼성에스디아이 주식회사 Field emission device and display adopting the same
FR2873493B1 (en) * 2004-07-20 2007-04-20 Commissariat Energie Atomique SEMICONDUCTOR DEVICE WITH NANOTUBE OR NANOFIL, CONFIGURABLE OPTICALLY
US7939218B2 (en) * 2004-12-09 2011-05-10 Nanosys, Inc. Nanowire structures comprising carbon
FR2897718B1 (en) * 2006-02-22 2008-10-17 Commissariat Energie Atomique NANOTUBE CATHODE STRUCTURE FOR EMISSIVE SCREEN
TWI314841B (en) * 2006-07-14 2009-09-11 Ind Tech Res Inst Methods for fabricating field emission displays
FR2930673A1 (en) * 2008-04-28 2009-10-30 Saint Gobain FIELD EFFECT-EMITTING FLAME LAMP AND MANUFACTURE THEREOF
US9171690B2 (en) * 2011-12-29 2015-10-27 Elwha Llc Variable field emission device
FR3030873B1 (en) 2014-12-23 2017-01-20 Thales Sa HIGH ENERGY ELECTRON SOURCE BASED ON NANOTUBES / CARBON NANOFIBERS WITH ELETROMAGNETIC WAVE CONTROL ELEMENT DEPORTEE

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040116034A1 (en) * 1997-10-30 2004-06-17 Canon Kabushiki Kaisha Method of manufacturing an electronic device containing a carbon nanotube
JP2000311578A (en) * 1999-04-28 2000-11-07 Sharp Corp Electron source array, its manufacture, and image forming device formed by using electron source array or its manufacture
US20100045212A1 (en) * 2008-06-25 2010-02-25 Vladimir Mancevski Devices having laterally arranged nanotubes
US20100181896A1 (en) * 2009-01-16 2010-07-22 Korea University Industrial & Academic Collaboration Foundation Surface field electron emitters using carbon nanotube yarn and method of fabricating carbon nanotube yarn thereof

Also Published As

Publication number Publication date
KR102458120B1 (en) 2022-10-21
TW201812824A (en) 2018-04-01
EP3267463A2 (en) 2018-01-10
FR3053830A1 (en) 2018-01-12
CN107591299B (en) 2021-07-27
JP2018010869A (en) 2018-01-18
KR20180006322A (en) 2018-01-17
TWI753924B (en) 2022-02-01
JP6982994B2 (en) 2021-12-17
CN107591299A (en) 2018-01-16
AU2017204507B2 (en) 2022-04-14
AU2017204507A1 (en) 2018-01-25
US20180012723A1 (en) 2018-01-11
US10720298B2 (en) 2020-07-21

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