EP3194929A1 - Systeme et procede de detection de particules - Google Patents
Systeme et procede de detection de particulesInfo
- Publication number
- EP3194929A1 EP3194929A1 EP15766455.8A EP15766455A EP3194929A1 EP 3194929 A1 EP3194929 A1 EP 3194929A1 EP 15766455 A EP15766455 A EP 15766455A EP 3194929 A1 EP3194929 A1 EP 3194929A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- particles
- particle
- concentration
- air flow
- particle concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002245 particle Substances 0.000 title claims abstract description 272
- 238000000034 method Methods 0.000 title claims description 14
- 238000005259 measurement Methods 0.000 claims abstract description 81
- 239000012080 ambient air Substances 0.000 claims abstract description 28
- 238000004364 calculation method Methods 0.000 claims abstract description 17
- 230000005494 condensation Effects 0.000 claims abstract description 13
- 238000009833 condensation Methods 0.000 claims abstract description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 239000003570 air Substances 0.000 claims description 58
- 238000001514 detection method Methods 0.000 claims description 38
- 230000004907 flux Effects 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 8
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 239000000443 aerosol Substances 0.000 description 32
- 239000006229 carbon black Substances 0.000 description 13
- 239000002105 nanoparticle Substances 0.000 description 13
- 229910010413 TiO 2 Inorganic materials 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 230000004044 response Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000035502 ADME Effects 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 230000003189 isokinetic effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0266—Investigating particle size or size distribution with electrical classification
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
- G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/02—Alarms for ensuring the safety of persons
- G08B21/12—Alarms for ensuring the safety of persons responsive to undesired emission of substances, e.g. pollution alarms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
- G01N1/2211—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with cyclones
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0038—Investigating nanoparticles
Definitions
- the invention relates to the field of the detection of particles, or aerosols, in particular nanoparticles or nanoscale aerosols.
- the invention is advantageously applied to the field of monitoring and controlling the presence of particles in an atmosphere, for example to monitor the exposure of people to aerosols.
- Particle detection can be performed by different types of particle concentration measuring devices each based on a particular type of measurement: optical, electrical, etc.
- a particle concentration measurement can be performed by a condensation ring counter (CNC, or CPC for "Condensation Particle Counter”).
- CNC condensation ring counter
- an air flow to be characterized is sent into a steam saturation zone and then into a vapor condensation zone in order to condense the vaporized liquid around the particles contained in the air flow and to increase the size. of these particles until they become optically detectable.
- the condensation ring counter then performs a unit count or by attenuation of these particles and thus measures a concentration in number of the particles contained in the air flow.
- a particle concentration measurement can also be performed using an electrometer measuring device.
- a measuring device is coupled to an element called “charger” whose function is to electrically charge the particles by depositing electric charges on the surface of the particles.
- charger an element which function is to electrically charge the particles by depositing electric charges on the surface of the particles.
- a difference in electrical potentials is applied between two areas of the charger so as to generate electric charges in the air stream to be characterized which are deposited on the particles, for example using a tip , a needle and a wall of the charger by corona effect.
- the electrometer measuring device which receives the air flow comprising the electrically charged particles, comprises one or more electrometers which collect the electric charges deposited on the surface of the particles.
- the current induced by the collected electrical charges is then processed in a measurement chain in order to estimate a concentration and possibly a particle size distribution (that is to say different particle concentrations according to their size).
- these devices that perform measurements in real time (result obtained after a time for example less than about 1 minute) or near real time (result obtained after a time for example less than about 1 hour) are not sensitive. to particle chemistry. This poses a major difficulty because the ambient air can contain a large and highly variable amount of particles that form a background noise with respect to the particles of interest to be detected (for example manufactured nanoparticles). Since these devices do not differentiate between background noise and particles of interest, it is not possible to perform such a measurement in real time or near real time in the presence of a significant background noise. since the measurement of the concentration of the particles of interest then requires a subsequent chemical analysis in order to identify the particles of interest by all those which have been detected.
- the particles of interest other than those of the ambient air for example manufactured nanoparticles, which one seeks to detect tend to cluster together and form aggregates or agglomerates of particles.
- a condensation ring counter does not distinguish between a single particle and an aggregate or an agglomerate of particles during counting.
- the measurement of a concentration of particles made by a CNC in the context of a detection of particles of interest other than the natural particles of the ambient air is therefore not representative of the actual number of individual particles.
- these aggregates or particle agglomerates have a large specific surface that can receive very many electric charges, which results in a strong response of an electrometer measuring device during the detection of such particles.
- the result of measuring a particle concentration carried out with an electrometer measuring device is therefore also not correct in the presence of aggregates or agglomerates of particles of interest and is overestimated with respect to the number of particles. aggregates or agglomerates.
- An object of the present invention is to propose a particle detection system of interest making it possible to carry out in real time or near real time a detection of these particles which is effective even in the presence of a large and variable background noise. That is to say in the presence of many particles of the ambient air, which does not require the implementation, after the measurement, of an analysis of the chemical nature of the sampled particles, and the detection of which is not impacted by the formation of aggregates or agglomerates of particles to be detected.
- the present invention proposes a particle detection system comprising at least:
- a first particle concentration measuring device comprising at least one electrometer measuring device coupled to a charger, and / or comprising at least one optical particle counter;
- a second device for measuring the concentration of particles comprising at least one condensation ring counter
- a calculation unit capable of calculating a ratio and / or a difference between a first particle concentration measurement of an air flow intended to be carried out by the first particle concentration measuring device and a second particle concentration measurement of the air flow to be performed by the second particle concentration measuring device.
- Such a detection system judiciously combines two devices for measuring the concentration of different particles making it possible to carry out in parallel two particle concentration measurements which are based on different measurement techniques.
- the first measuring device When the first measuring device has a charger (which electrically charges the particles of the airflow) coupled to an electrometer measuring device, the latter overestimates the concentration of the particles of interest measured (due to the formation of aggregates or agglomerates of these particles of interest) compared to that measured by the condensation ring counter.
- the calculation of the ratio and / or of the difference between the two measurements made thus makes it possible to correctly detect the presence of particles of interest and this whatever the level of the background noise, that is to say whatever the particle concentration of ambient air or ambient atmosphere (or ambient aerosol).
- the particle detection system notably tracks the evolution of the estimated masses of aerosols by the optical particle counter, compared to the evolution of the total concentration (aerosols of interest + background) given by the condensation ring counter.
- the aggregates and agglomerates of particles of interest represent a significant mass for a low concentration of aggregate or agglomerates of particles.
- the optical particle counter is not sensitive to background noise and is not very sensitive to low particle concentrations, the difference and / or the ratio between the two measurements made makes it possible to correctly detect the presence of particles of interest. whatever the level of the background noise, that is to say regardless of the particle concentration of the ambient air or the ambient atmosphere (or ambient aerosol).
- this ratio and / or this difference between the particle concentration measurements made makes it possible to dispense with a subsequent analysis of the chemical nature of sampled particles.
- This detection system is therefore able to detect in real time or near real time the presence of particles of interest in an ambient atmosphere.
- the response time of the detection system may be less than one minute, see of the order of one second.
- particles is used here and in the remainder of the document to refer to nanoparticles (having at least one dimension less than about 100 nm), as well as slightly larger particles (less than one micron in size), and also to aggregates and / or agglomerates of such particles whose dimensions may be several microns.
- the particle detection system may further include a flow divider having an inlet into which the airflow is to be sent and two outputs coupled to inputs of the first and second particle concentration measuring devices.
- the particle detection system may further comprise a particle selection device disposed upstream of the flow separator and capable of selecting at least a portion of the particles of the airflow according to their behavior (electrical mobility and / or mobility aerodynamic and / or size) such that the air flow received by the first and second particle concentration measuring devices comprises only the selected particles.
- a particle selection device disposed upstream of the flow separator and capable of selecting at least a portion of the particles of the airflow according to their behavior (electrical mobility and / or mobility aerodynamic and / or size) such that the air flow received by the first and second particle concentration measuring devices comprises only the selected particles.
- the particle selection device may include a cyclone, or the particle selection device may include a differential electric mobility analyzer coupled to a charger or an electric charge neutralizer of the particles of the airflow.
- the calculation unit may be able to make a comparison between the ratio and / or the difference between the first and second particle concentration measurements of the air flow and a threshold value for determining the presence of particles of interest other than those of ambient air.
- the particle detection system may further comprise a signal processing unit delivered by the computing unit.
- the particle detection system may further comprise a device capable of determining the nature of the particles of the air flow.
- the calculation unit may be able to calculate a concentration of particles of interest contained in the air flow and distinct from the particles of the ambient air.
- the invention also relates to a particle detection method comprising at least the following steps:
- a first particle concentration measuring device comprising at least one electrometer measuring device coupled to a charger, and / or comprising at least one optical counter of particles
- the first measuring device comprises the electrometer measuring device coupled to the charger
- a step of electric charging of the particles of the air flow is carried out by the charger such that the first measurement of the concentration of particles is implemented from the air stream comprising the electrically charged particles.
- the method may further comprise, prior to the first and second particle concentration measurements, a step of selecting at least a portion of the particles of the airflow according to their behavior (electrical mobility and / or aerodynamic mobility and / or or size) such that the first and second particle concentration measurements are performed from the air stream comprising only the selected particles.
- the method may further comprise, after the step of calculating the ratio and / or the difference between the first and second particle concentration measurements, a comparison step between the ratio and / or the difference between the first and second measurements. particle concentration and a threshold value to determine the presence of particles of interest other than those of ambient air.
- the method may further comprise a step of determining the nature of the particles of the air flow.
- the method may further comprise a step of calculating a concentration of particles of interest contained in the air flow and distinct from the particles of the ambient air.
- FIG. 1 schematically represents a particle detection system, object of the present invention, according to a first embodiment
- FIG. 2 represents measurements of ambient aerosol concentrations produced by a particle detection system, object of the present invention
- FIG. 3 represents the evolution of the ratio between the measurements of ambient aerosol concentrations calculated by the particle detection system, object of the present invention
- FIG. 4 represents measurements of particle concentrations in the presence of nanoparticles of TiO 2 interest made by a particle detection system, object of the present invention
- FIG. 5 represents the evolution of the ratio between the measurements of particle concentrations in the presence of nanoparticles of TiO 2 interest calculated by the particle detection system, object of the present invention
- FIG. 6 represents measurements of particle concentrations in the presence of nanoparticles of SiC interest produced by a particle detection system, object of the present invention
- FIG. 7 represents the evolution of the ratio between the measurements of particle concentrations in the presence of nanoparticles of SiC interest calculated by the particle detection system, object of the present invention
- FIG. 8 represents measurements of particle concentrations in the presence of nanoparticles of carbon black interest made by a particle detection system, object of the present invention
- FIG. 9 represents the evolution of the ratio between the measurements of particle concentrations in the presence of nanoparticles of carbon black interest calculated by the particle detection system, object of the present invention
- FIG. 10 schematically shows a particle detection system, object of the present invention, according to a second embodiment.
- Figure 1 schematically shows a system 100 of particle detection according to a first embodiment.
- the system 100 comprises an inlet pipe 102 in which an air flow comprising the aerosol to be characterized is sent, for example by suction. This flow of air is then separated into two distinct streams by a flux separator 104 which is coupled to other pipes 106, 108 respectively connected to the inlet of a first device 110 for measuring the concentration of particles and of a second device 112 for measuring the concentration of particles.
- the output of the pipe 106 is connected to the input of a charger 114 of the first device 110.
- the charger 114 is able to deposit electrical charges on the surface of the particles of the air flow received.
- the first device 110 further comprises an electrometer measuring device 116 whose input is coupled to the output of the charger 114.
- the second device 112 comprises a condensation ring counter (CNC).
- the pipes 102, 106, 108 and the flux separator 104 are made in such a way as not to modify the aerosol to be characterized, in particular by preserving isokinetic flow and by minimizing the deposits of particles on the walls of these elements. for example using a flow separator and antistatic or stainless steel pipes.
- the two measuring devices 110, 112 each perform a measurement of the particle concentration of the air flow received by these devices.
- the data provided by these two devices 110, 112 are then sent to the input of a computing unit 118, for example a computer or electronic computing means, which calculates the ratio and / or the difference (the ratio in FIG. the example described here) between the values of the measurements of the concentrations made by the two measuring devices 110, 112.
- the calculation unit 118 also makes it possible to determine the significant variations of the value of the ratio and / or of this difference during the his evolution.
- the ratio of the concentration measurements made by these two types of devices 110, 112 (here the ratio between the measurement made by the first device 110 on the measurement made by the second device 112) is close to 1 or between about 0.5 and 2.
- the value of the particle concentration measured by the first device 110 differs from that measured by the second device 112.
- the first device 110 provides a measurement value greater than that provided by the second device 112 because of aggregates and / or agglomerates of particles whose number is overestimated by the first device 110 is due to the large number of electric charges received by these aggregates and / or agglomerates of particles, and because the second device 112 counts each of these aggregates and / or agglomerates as a single particle.
- the analysis of this difference of measurements thus makes it possible to highlight the presence of these particles of interest, different from those of the ambient air which form a background noise, even in case of variation of the particle concentration of the ambiant air.
- FIG. 2 represents the evolution of the particle concentrations (in number of particles / cm 3 ) measured with the first device 110 (curve 10) and with the second device 112 (curve 12), over a period of 24 hours, during a measurement of the concentration of particles of an ambient air flow not comprising particles of interest forming aggregates and / or agglomerates of particles.
- FIG. 3 represents the evolution of the ratio between these measurements which is calculated by the calculation unit 118.
- FIG. 4 represents the evolution of the particle concentrations (in number of particles / cm 3 ) obtained with the first device 110 (curve 20) and with the second device 112 (curve 22), over a period of 40 minutes, during a measurement of the particle concentration of an air flow which comprises, in addition to the particles of the ambient air, nanoparticles of Ti0 2 .
- the first device It strongly overestimates the concentration of particles in the airflow relative to the second device 112 because of the aggregates and / or agglomerates of TiO 2 particles that are formed.
- the ratio of the measured concentrations rapidly reaches 10 and even exceeds punctually 10,000 during the operation causing the greater resuspension of TiO 2 particles (between the 33 th and 35 th minute in these FIGS. 4 and 5).
- FIG. 6 represents the evolution of the particle concentrations (in number of particles / cm 3 ) obtained with the first device 110 (curve 30) and with the second device 112 (curve 32), over a period of 16 minutes, during a measurement of the particle concentration of an air flow which comprises, in addition to the particles of the ambient air, nanoparticles of SiC.
- These measurements are carried out during two phases: a first phase corresponding to the first 12 minutes during which the SiC particles are not handled (which does not generate an aerosol of SiC in the air stream), and a second phase ranging from from the 12 th minute to the 16 th minute during which the SiC particles are manipulated, which generates SiC aerosols in the air flow.
- FIG. 1 represents the evolution of the particle concentrations (in number of particles / cm 3 ) obtained with the first device 110 (curve 30) and with the second device 112 (curve 32), over a period of 16 minutes, during a measurement of the particle concentration of an air flow which comprises, in addition to the particles of the ambient
- the ratio of the concentrations is close to 1, as for the measurements previously described in connection with FIGS. 2 and 3.
- the first device 110 greatly overestimates the concentration of particles in the airflow relative to the second device 112 due to the aggregates and / or agglomerates of SiC particles that are formed.
- the ratio of measured concentrations rapidly reaches because the second device 112 does not detect a significant change in concentration, while the first device 110 overestimates the number of SiC particles in the airflow.
- FIG. 9 represents the evolution of the ratio between these measurements which is calculated by the calculation unit 118. As long as there is no manipulation of the carbon black particles, and therefore no carbon black aerosols. in the airflow, the ratio of the concentrations is close to 1 and globally lower than 1.
- a greater variability of this ratio is obtained here during this first phase because of the low concentrations of particles of the ambient air ( less than 1000 particles / cm 3 ), the measurement made by the first device 110 for such concentrations being inaccurate.
- the first device 110 greatly overestimates the concentration of particles relative to the second device 112 because of the aggregates and / or agglomerates of carbon black particles that form. The ratio of measured concentrations then rapidly exceeds 1000.
- the system 100 thus makes it possible to specifically highlight the presence of an aerosol of interest other than the particles of the ambient air, in a very sensitive manner and with a response time of the order of one second.
- the presence of particles of interest is for example determined by the calculation unit 118 when the calculated value of the ratio between the measurements provided by the devices 110, 112 exceeds a threshold value, the value of this threshold value being a function of the elements forming the system 100 and determined, for example, beforehand during a calibration or calibration phase
- the ratio of the two measurements is not affected by these variations and always allows the presence of these particles of interest to be identified.
- the system 100 also comprises a processing unit 120 receiving as input the signal delivered by the calculation unit 118, that is to say the ratio and / or the difference between the values of the particle concentrations provided by the two devices. 110, 112, and using this signal to perform one or more desired functions. It is possible that the units 118 and 120 correspond to a single element. For example, the processing unit 120 may trigger an alarm (visual, audible, etc.) when the value of the ratio and / or the difference between the measurements of the concentrations made by the devices 110, 112 exceeds a certain threshold.
- an alarm visual, audible, etc.
- the processing unit 120 can also perform a servo-control of a method as a function of the value of this ratio and / or this difference, and trigger for example a stop, a regulation or a start of all sorts of actions linked by example to a manufacturing process or other.
- the processing unit 120 can also perform a recording of the signal delivered by the calculation unit 118. Other functions or processing of the signal delivered by the calculation unit 118 can be performed by the processing unit 120.
- Figure 10 shows schematically the system 100 according to a second embodiment.
- a charger or neutralizer 121 for electric charges of the particles is arranged upstream of the flux separator 104 and is coupled to a device
- the 122 of selection of particles which is able to select at least a portion of the particles of the airflow according to their behavior (electrical mobility and / or aerodynamic mobility and / or size), corresponding for example to a differential analyzer of electric mobility (ADME, or DMA for "Differential Mobility Analyzer") and its control system.
- ADME differential analyzer of electric mobility
- the particles of the airflow circulating in the input pipe 102 are electrically charged or neutralized by the charger or the neutralizer 121, and the device 122 selects the particles according to their behavior, for example depending on their size. Only particles whose size corresponds to the desired range are retained by the device 122 and sent to the flux separator 104. The particle concentrations are then measured by the devices 110 and 112, as previously described.
- the device 122 may be able to perform the selection of the particles according to their electrical behavior (electric mobility), or their aerodynamic behavior (aerodynamic mobility) and thus achieve a selecting the particles according to their size without these particles being electrically charged or neutralized, for example when the device 122 is a cyclone.
- electrical behavior electrical mobility
- aerodynamic behavior aerodynamic mobility
- a size selection of the particles may be carried out directly at the level of the first device 110 which may be able to count only particles of a certain size or whose size corresponds to a selected range.
- the first device 110 and / or the second device 112 may be able to measure the concentration of number of particles and also perform this measurement for several ranges of particle sizes.
- the system 100 comprises a third device disposed parallel to the measuring devices 110, 112 and for determining the nature, mineral or carbon, of the aerosol characterized.
- the flux separator 104 can perform a separation of the inlet air flow not in two separate streams, but in three separate streams so that the third device performs this determination of the nature of the particles parallel to the measurements made by the devices 110, 112.
- the first device 110 may comprise, in place of the electrometer measuring device 116 coupled to the charger 114, an optical particle counter (COP).
- COP optical particle counter
- Such an optical particle counter makes it possible in particular to estimate the number of particles and their mass.
- Such an optical particle counter corresponds, for example, to the equipment offered by the GRIMM trademark under the trade name "Dustmonitor 1.109" or to the commercial equipment offered by the PALLAS brand under the trade name FIDAS.
- the computing unit 118 can also calculate, from the measurement results provided by the devices 110 and 112, a value of the particle concentration. For this, a prior calibration or modeling of the system 100 is performed before the measurements so that this calculation of the value of the particle concentration can be made from the measurements made by the devices 110 and 112.
- Such a system 100 is for example adapted to perform:
- an air flow comprising the particles to be detected is formed by the fact that the measuring devices take this air by suction.
- This air may be from a stream of air sent into the detection system, but it is also possible that this air is taken by the detection system from a volume of air that does not form a flow of air. that is to say which is not in circulation, for example confined in a closed enclosure.
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Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1458809A FR3026185B1 (fr) | 2014-09-18 | 2014-09-18 | Systeme et procede de detection de particules |
PCT/EP2015/071293 WO2016042060A1 (fr) | 2014-09-18 | 2015-09-17 | Systeme et procede de detection de particules |
Publications (1)
Publication Number | Publication Date |
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EP3194929A1 true EP3194929A1 (fr) | 2017-07-26 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP15766455.8A Withdrawn EP3194929A1 (fr) | 2014-09-18 | 2015-09-17 | Systeme et procede de detection de particules |
Country Status (4)
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US (1) | US10254209B2 (fr) |
EP (1) | EP3194929A1 (fr) |
FR (1) | FR3026185B1 (fr) |
WO (1) | WO2016042060A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US10782219B2 (en) * | 2017-12-22 | 2020-09-22 | Industrial Technology Research Institute | Particle counting method and device |
CN108627433B (zh) * | 2018-03-26 | 2020-06-02 | 北京大学 | 一种环境气溶胶分粒径黑碳质量分布的测量方法及其系统 |
CN110595974A (zh) * | 2019-10-31 | 2019-12-20 | 中船动力研究院有限公司 | 一种颗粒浓度监测装置及方法 |
CN116884518B (zh) * | 2023-09-07 | 2023-11-10 | 中珀(秦皇岛)新材料科技有限公司 | 基于预测压缩的碳纳米颗粒浆料生产数据处理方法 |
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US5027642A (en) * | 1987-10-13 | 1991-07-02 | American Air Liquide | Method of detecting and or removing trace amounts of condensible vapors from compressed gas |
US7363828B2 (en) * | 2005-08-25 | 2008-04-29 | Msp Corporation | Aerosol measurement by dilution and particle counting |
JP5123618B2 (ja) * | 2007-09-07 | 2013-01-23 | 東京エレクトロン株式会社 | 容器清浄度計測装置、基板処理システム及び容器清浄度計測方法 |
GB0808385D0 (en) * | 2008-05-08 | 2008-06-18 | Naneum Ltd | A condensation apparatus |
-
2014
- 2014-09-18 FR FR1458809A patent/FR3026185B1/fr not_active Expired - Fee Related
-
2015
- 2015-09-17 WO PCT/EP2015/071293 patent/WO2016042060A1/fr active Application Filing
- 2015-09-17 US US15/510,778 patent/US10254209B2/en not_active Expired - Fee Related
- 2015-09-17 EP EP15766455.8A patent/EP3194929A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
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WO2016042060A1 (fr) | 2016-03-24 |
FR3026185A1 (fr) | 2016-03-25 |
US10254209B2 (en) | 2019-04-09 |
FR3026185B1 (fr) | 2017-09-29 |
US20170276590A1 (en) | 2017-09-28 |
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