EP3108996A1 - Dispositif destine a mesurer les deplacements d'un objet rotatif - Google Patents

Dispositif destine a mesurer les deplacements d'un objet rotatif Download PDF

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Publication number
EP3108996A1
EP3108996A1 EP15173333.4A EP15173333A EP3108996A1 EP 3108996 A1 EP3108996 A1 EP 3108996A1 EP 15173333 A EP15173333 A EP 15173333A EP 3108996 A1 EP3108996 A1 EP 3108996A1
Authority
EP
European Patent Office
Prior art keywords
intermediate part
rotation
axis
measuring means
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15173333.4A
Other languages
German (de)
English (en)
Other versions
EP3108996B1 (fr
Inventor
Dirk Geyermann
Jens Kummetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
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Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to EP15173333.4A priority Critical patent/EP3108996B1/fr
Publication of EP3108996A1 publication Critical patent/EP3108996A1/fr
Application granted granted Critical
Publication of EP3108996B1 publication Critical patent/EP3108996B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/52—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism a single rotating pair
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00—Testing of machine parts
    • G01M13/04—Bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0003—Arrangements for preventing undesired thermal effects on tools or parts of the machine
    • B23Q11/0007—Arrangements for preventing undesired thermal effects on tools or parts of the machine by compensating occurring thermal dilations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2220/00—Machine tool components
    • B23Q2220/006—Spindle heads

Definitions

  • the present invention relates to a device for measuring displacements of a rotating object according to the preamble of claim 1.
  • the machining accuracy of a machine tool is determined inter alia by the accuracy of the rotation of the tool spindle (spindle).
  • An analysis of the accuracy of the tool spindle requires the determination of displacements of the spindle. The results can be used to correct the displacements occurring or to take constructive measures on the machine tool in order to minimize the displacements and thus to increase the machining accuracy of the machine tool.
  • the displacements of the spindle can be due to occurring forces in the rotation of the spindle and in thermally induced expansions.
  • a generic device for measuring the displacements of a turntable is in the EP 1 434 027 A2 described.
  • a radial bearing decoupling the rotation of the turntable is provided for measuring the mutual displacements of a turntable relative to a base. Furthermore, centrally arranged measuring means are provided which detect transverse displacements in two mutually perpendicular directions X, Y.
  • the measuring means comprise a cross grating, which is scanned contactlessly by a scanning head.
  • the cross grating is arranged on a rotationally decoupled component and the scanning head is arranged on a second component fixed thereto in the X and Y directions on the base.
  • Displacements in the axial direction of the turntable are measured by means of a touching probe which itself touches a reference surface of the rotating table.
  • the present invention has for its object to provide a device for measuring displacements of a rotating object, with the displacements can be measured as precisely as possible.
  • the device designed according to the invention has the advantage that even displacements of rapidly rotating objects, in particular spindles of a machine tool, can be detected with high precision.
  • the device for measuring displacements of a rotating object relative to a base comprises a rotor, which is rigidly coupled to the measuring object with the rotating object to be measured.
  • the device further comprises a coupling and a stator, wherein the intermediate part is arranged on the stator via the coupling.
  • the coupling is designed to couple the intermediate part in a torsionally rigid manner to the stator and to allow displacements of the intermediate part relative to the stator in all other five degrees of freedom.
  • the device further comprises measuring means which are designed to measure displacements of the intermediate part relative to the stator in these five degrees of freedom, these measuring means each comprise the components measuring scale and scanning head for non-contact sampling of the measuring standard and one of the components measuring scale and scanning on the intermediate part and the other component is arranged on the stator.
  • the measuring means preferably comprise a first measuring means, which is arranged radially spaced from the axis of rotation and is formed to a Displacement of the intermediate part relative to the stator in a first direction perpendicular to the axis of rotation to measure
  • the measuring means preferably comprise a second measuring means, which is arranged radially offset to the rotational axis and the first measuring means in the circumferential direction and is adapted to measure a displacement of the intermediate part relative to the stator in a second direction perpendicular to the axis of rotation.
  • the measuring means preferably comprise a third measuring means, which is arranged radially spaced from the axis of rotation and the first measuring means in the direction of the axis of rotation and is adapted to measure a displacement of the intermediate part relative to the stator in the first direction perpendicular to the axis of rotation.
  • the measuring means preferably comprise a fourth measuring means, which is arranged radially spaced from the axis of rotation and the second measuring means in the direction of the axis of rotation and is adapted to measure a displacement of the intermediate part relative to the stator in the second direction perpendicular to the axis of rotation.
  • the measuring means preferably comprise a fifth measuring means, which is designed to measure a displacement of the intermediate part relative to the stator in the direction of the axis of rotation.
  • the angular offset of the first measuring means relative to the second measuring means is preferably 90 °. With this arrangement, it is easily possible to measure displacements of the intermediate part relative to the stator in two mutually offset directions by 90 °.
  • the third measuring means and the fourth measuring means are preferably arranged offset by 90 ° in the circumferential direction to each other.
  • a particularly simple construction of the device results when the measuring graduations are part of the intermediate part and the scanning heads are part of the stator.
  • the intermediate parts to be measured can be kept free from cabling.
  • the radial bearing is preferably an air bearing.
  • the air bearing is relatively stiff and low in friction.
  • an axial bearing is arranged between the rotor and the intermediate part, which positionally positions the rotor at the intermediate part in the axial direction.
  • the axial bearing preferably comprises two thrust bearings spaced apart from each other along the rotational axis.
  • one of the components measuring scale and scanning head of the fifth measuring means is arranged centrally in the direction of the axis of rotation between the two axial bearings on the intermediate part.
  • the device according to the invention can be supplemented by a sixth measuring means, which is designed to measure the rotation of the rotor about the axis of rotation.
  • This sixth measuring means comprises a measuring graduation on the rotor and a scanning head on the intermediate part.
  • the intermediate part and the stator are each designed as a hollow cylinder rotationally symmetrical.
  • the radial bearings can be arranged centrally in the hollow cylinders, resulting in a particularly space-saving and rigid, stable arrangement results.
  • FIGS. 1 to 5 show assemblies and different views of an inventively designed device, which will be explained in detail below.
  • the device for measuring displacements of a rotating object - in particular a spindle - relative to a base comprises a rotor 1 to which the spindle to be measured - z. B. in the form of a rotating Tool spindle - can be coupled.
  • This rotor 1 is rotatably mounted in an intermediate part 2.
  • a radial bearing 4 decoupling the rotation of the rotor 1 with a rotation axis D is arranged between the rotor 1 and the intermediate part 2.
  • the apparatus further comprises a stator 3 which is stationary for measuring displacements at the base - e.g. in the form of a table of a machine tool - is fixed.
  • a coupling 11 is arranged, which is designed exclusively to prevent a rotation of the intermediate part 2 relative to the stator 3 about the axis of rotation D.
  • the coupling 11 allows a movement of the intermediate part 2 relative to the stator 3 in all other five freedoms (five degrees of freedom or possibilities of movement).
  • the device now includes measuring means 5, 6, 7, 8, 10 for measuring displacements of the intermediate part 2 relative to the stator 3 in these five freedoms.
  • the radial bearing 4 transmits the displacements of the rotor 1 to be measured in four freedoms, namely a first translation in the X direction and a second translation in the Y direction as well as a first rotation about the X axis as the axis of rotation and a second rotation about the Y axis.
  • first measuring means 5, second measuring means 6, third measuring means 7 and fourth measuring means 8 are provided.
  • Each of these measuring means 5, 6, 7, 8 consists in each case of a material measure 5.1, 6.1, 7.1, 8.1 and a scanning head 5.2, 6.2, 7.2, 8.2.
  • the respective material measure 5.1, 6.1, 7.1, 8.1 may be part of the intermediate part 2 or alternatively part of the stator 3.
  • the respectively associated scanning head 5.2, 6.2, 7.2, 8.2 of the corresponding measuring graduation 5.1, 6.1, 7.1, 8.1 is arranged opposite to a component of the stator 3 or alternatively of the intermediate part 2.
  • the measuring graduations 5., 6.1, 7.1, 8.1 are each part of the intermediate part 2 and the scanning heads 5.2, 6.2, 7.2, 8.2 part of the stator 3.
  • the first measuring means 5 For measuring the displacement in the X direction (perpendicular to the axis of rotation D) is the first measuring means 5, consisting of the material measure 5.1 and the scanning 5.2 arranged radially spaced from the axis of rotation D.
  • the second measuring means 6 is spaced radially from the axis of rotation D and arranged at a distance from the first measuring means 5 in the circumferential direction.
  • the offset in the circumferential direction is preferably 90 °.
  • the fourth measuring device 8 is spaced apart from the second measuring device 6 radially to the axis of rotation D and spaced apart from the second measuring device 6 in the direction of the axis of rotation D.
  • the third measuring device 7 is spaced apart from the first measuring device 5 radially to the axis of rotation D and spaced apart from the first measuring device 5 in the direction of the axis of rotation D.
  • the measuring graduations 5.1, 6.1, 7.1, 8.1 are designed such that only tangential movements of the intermediate part 2 are respectively detected by scanning with the associated scanning head 5.2, 6.2, 7.2, 8.2.
  • the measuring graduations 5.1, 6.1, 7.1, 8.1 are designed to modulate the position-dependent scanning signal formed by the scanning 5.2, 6.2, 7.2, 8.2 only with tangential displacement and displacements in a direction perpendicular thereto, ie in the radial direction (relative to the axis of rotation D) does not modulate position-dependent. This ensures that displacements due to thermal expansion of the intermediate part 2 relative to the stator 3 are not included in the measurement result and distort it.
  • the radial bearing 4 is to design particularly free of play, formed in a particularly advantageous manner as a magnetic bearing or as an air bearing.
  • the intermediate part 2 and the stator 3 are preferably each formed as a hollow cylinder and thus rotationally symmetrical.
  • This measure results in a compact and particularly rigid structure with the outer hollow cylinder as the stator 3, the inner hollow cylinder as an intermediate part and lying within the two hollow cylinder rotary bearing 4 and rotor first
  • the measuring graduations 5.1, 6.1, 7.1, 8.1 and the corresponding Abtastkexcellent 5.2, 6.2, 7.2, 8.2 are mounted on rotationally symmetrical outer and inner peripheral surfaces of the hollow cylinder.
  • the device is also designed to measure a displacement of a rotating spindle in the Z direction.
  • the rotor 1 is mounted in the intermediate part 2 in the Z direction without play such that Z movements of the rotor 1 are transmitted to the intermediate part 2 in an unadulterated manner.
  • two thrust bearings 41, 42 are arranged between the rotor 1 and the intermediate part 2 for this purpose. These thrust bearings 41, 42 are preferably also air bearings.
  • a fifth measuring means 10 is provided, which is designed to measure a displacement of the intermediate part 2 relative to the stator 3 in the Z-direction, ie in the direction of the axis of rotation D.
  • the material measure 10.1 is a component of the intermediate part 2 and the measuring scale 10.1 that scans the material measure 10.1 is a component part of the scanning element 10.2 Stators 3.
  • the fifth measuring means 10 is preferably arranged centrally between the two axial bearings 41, 42 (viewed in the Z direction). Hereby becomes ensures that thermally induced expansions of the rotor 1 in the Z direction affect the measurement result as little as possible.
  • the rotor 1 is preferably made of a material which has a negligible coefficient of thermal expansion, e.g. from Invar.
  • FIG. 5 shows an embodiment of the coupling 11 in detail.
  • the coupling 11 is arranged between the intermediate part 2 and the stator 3, and it is designed exclusively to prevent a rotation of the intermediate part 2 relative to the stator 3 about the axis of rotation D.
  • the coupling 11 allows a movement of the intermediate part 2 relative to the stator 3 in all other five freedoms (five degrees of freedom or possibilities of movement).
  • the intermediate part 2 is rigidly connected to a component of the coupling 11, to which the in FIG. 5 shown adapter 11.4 is used.
  • the play-free movement in the five degrees of freedom is ensured by the use of solid joints.
  • the adapter 11.4 is connected to the first coupling means 11.1 in the form of a first spring parallelogram.
  • This first coupling means 11.1 allows only a movement possibility in the Y direction and includes this solid state joints.
  • the first spring parallelogram transfers without play movements of the intermediate part 2 on the second coupling means 11.2, in turn formed as a spring parallelogram.
  • This second coupling means 11.2 allows only a movement possibility in the X direction and includes for this purpose the second spring parallelogram with multiple solid joints.
  • a third coupling means 11.3 is provided, which in turn consists of an arrangement of solid-state joints.
  • a coupling in the form of a bellows coupling or in the form of a stator coupling can be used, as they are known for the rotationally rigid mounting of encoders.
  • a sixth measuring means may be provided, which is designed to measure the rotation of the rotor 1 about the axis of rotation D.
  • the sixth measuring means comprises a measuring graduation on the rotor 1 and a scanning head on the intermediate part 2 for contactless scanning of the material measure.
  • the current angular position of the rotor 1 is measured about the axis of rotation D relative to the intermediate part 2 and thus also relative to the stator 3 and the base.
  • a displacement measured with the first, second, third, fourth and fifth measuring means 5, 6, 7, 8, 10 can thus be assigned to an angular position measured for this purpose.
  • the sixth measuring means can be used to measure the actual rotational speed of the rotor 1.
  • the measuring means 5, 6, 7, 8, 10 each consist of a material measure 5.1, 6.1, 7.1, 8.1, 10.1 and a scanning head 5.2, 6.2, 7.2, 8.2, 10.2.
  • the scanning 5.2, 6.2, 7.2, 8.2, 10.2 is in each case radially spaced from the associated material measure 5.1, 6.1, 7.1, 8.1, 10.1 and scans them contactless.
  • the measuring graduations 5.1, 6.1, 7.1, 8.1, 10.1 are preferably incremental graduations with lines which are aligned parallel to the axis of rotation D, as in FIGS Figures 2 and 3 is shown schematically.
  • the displacements can be measured particularly accurately if the measuring graduations 5.1, 6.1, 7.1, 8.1, 10.1 are designed for photoelectric scanning.
  • the invention is not limited to the photoelectric scanning principle, the measuring graduations 5.1, 6.1, 7.1, 8.1, 10.1 can also be designed inductive, magnetic or capacitive scannable.
EP15173333.4A 2015-06-23 2015-06-23 Dispositif destine a mesurer les deplacements d'un objet rotatif Active EP3108996B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP15173333.4A EP3108996B1 (fr) 2015-06-23 2015-06-23 Dispositif destine a mesurer les deplacements d'un objet rotatif

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15173333.4A EP3108996B1 (fr) 2015-06-23 2015-06-23 Dispositif destine a mesurer les deplacements d'un objet rotatif

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EP3108996A1 true EP3108996A1 (fr) 2016-12-28
EP3108996B1 EP3108996B1 (fr) 2017-09-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3318840B1 (fr) * 2016-11-04 2019-02-27 DREIER Technology GmbH Dispositif de mesure de séparation et procédé de contrôle de l'exactitude de position d'une partie de machine exécutant une trajectoire
EP3581910A1 (fr) * 2018-06-14 2019-12-18 Baumer Electric AG Codeur rotatif pour vehicules ferroviaires

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1162030A2 (fr) * 2000-06-07 2001-12-12 Mori Seiki Co., Ltd. Machine-outil à commande numérique avec système de détection de défauts de rondeur de la broche
EP1434027A2 (fr) 2002-12-24 2004-06-30 Mori Seiki Co., Ltd. Appareil pour mesurer la position angulaire et déplacement d'une table rotative et appareil pour analyser la précision associée
CN101344457A (zh) * 2008-08-27 2009-01-14 重庆大学 高速主轴非接触式磁力耦合动态测试装置及其测试方法
CN101972948A (zh) * 2010-09-26 2011-02-16 天津大学 模拟工况载荷条件下机床主轴热误差试验装置
CN103341789A (zh) * 2013-06-09 2013-10-09 沈阳机床(集团)有限责任公司 用于主轴回转误差检测的传感器位置调节装置
DE102012205599A1 (de) * 2012-04-04 2013-10-10 Carl Zeiss Industrielle Messtechnik Gmbh Reduzieren von Fehlern einer Drehvorrichtung bei der Bestimmung von Koordinaten eines Werkstücks oder bei der Bearbeitung eines Werkstücks

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1162030A2 (fr) * 2000-06-07 2001-12-12 Mori Seiki Co., Ltd. Machine-outil à commande numérique avec système de détection de défauts de rondeur de la broche
EP1434027A2 (fr) 2002-12-24 2004-06-30 Mori Seiki Co., Ltd. Appareil pour mesurer la position angulaire et déplacement d'une table rotative et appareil pour analyser la précision associée
CN101344457A (zh) * 2008-08-27 2009-01-14 重庆大学 高速主轴非接触式磁力耦合动态测试装置及其测试方法
CN101972948A (zh) * 2010-09-26 2011-02-16 天津大学 模拟工况载荷条件下机床主轴热误差试验装置
DE102012205599A1 (de) * 2012-04-04 2013-10-10 Carl Zeiss Industrielle Messtechnik Gmbh Reduzieren von Fehlern einer Drehvorrichtung bei der Bestimmung von Koordinaten eines Werkstücks oder bei der Bearbeitung eines Werkstücks
CN103341789A (zh) * 2013-06-09 2013-10-09 沈阳机床(集团)有限责任公司 用于主轴回转误差检测的传感器位置调节装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3318840B1 (fr) * 2016-11-04 2019-02-27 DREIER Technology GmbH Dispositif de mesure de séparation et procédé de contrôle de l'exactitude de position d'une partie de machine exécutant une trajectoire
EP3581910A1 (fr) * 2018-06-14 2019-12-18 Baumer Electric AG Codeur rotatif pour vehicules ferroviaires

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