EP3059450A1 - Fastening device for vacuum pump - Google Patents

Abstract

The invention relates to a device for fastening a vacuum pump, in particular a turbomolecular vacuum pump, to a base, wherein the vacuum pump comprises a stationary unit to be fixed to the base and a rotating unit rotating relative to the stationary unit during operation, with at least one energy absorber connected to a pump side Section on the stationary unit of the vacuum pump and with a base-side portion attachable to the base, wherein the two portions of the Energieaufnehmers are interconnected and mutually displaceable in the connected state, and wherein the Energieaufnehmer is adapted, in a fault of the vacuum pump from the rotation unit to transfer the kinetic energy of the vacuum pump transmitted to the stationary unit and introduced into the energy receiver by displacing the sections while maintaining the connected state of the sections.

Description

The invention relates to a device for fastening a vacuum pump, in particular a turbomolecular vacuum pump, to a base, wherein the vacuum pump comprises a stationary unit to be fastened to the base and a rotating unit rotating during operation relative to the stationary unit.

Conventionally, vacuum pumps are rigidly attached to the respective base, for example by means of screws. The base itself is e.g. anchored on the ground or at a so-called pumping station or is formed by a pumping station or other device.

If a malfunction occurs, for example a so-called crash or rotor burst, the vacuum pump, the entire energy of the rotating unit is directed into the base in a very short time. The base can move in an uncontrolled manner and parts can detach from the base. The associated risk potential must be addressed in an appropriate manner.

It is therefore an object of the invention to provide a device for fixing a vacuum pump, which fixes the vacuum pump to a base such that in the event of an accident the environment of the vacuum pump is not endangered.

The solution of this object is achieved by a fastening device and a system of a vacuum pump and a fastening device each having the features of the independent claims.

According to the invention, at least one energy absorber is provided, which can be fastened with a pump-side section to the stationary unit of the vacuum pump and with a base-side section to the base, in particular detachably. The base can in particular be a frame for the vacuum pump, preferably a pumping station. The base-side section is located in particular on that side of the vacuum pump which is opposite to the side of the vacuum pump facing a chamber to be evacuated.

The stationary unit of the vacuum pump may in particular comprise a lower part and / or a housing of the vacuum pump. The rotary unit preferably comprises a rotor that is rotationally driven at high speeds in a known manner to produce a high vacuum or ultrahigh vacuum.

The pump-side portion and the base-side portion are connected to each other and displaced in the connected state against each other. The two sections can in particular form separate components or a common component. The term "displacing" includes both a relative movement of a plurality of separate components and, for example, a deformation of a single component, which is associated with a movement of the pump-side portion and the base-side portion relative to each other.

The energy absorber is adapted to receive in a malfunction of the vacuum pump from the rotation unit to the stationary unit and introduced into the energy absorber introduced kinetic energy of the vacuum pump by displacing the sections while maintaining the connected state of the sections.

The energy absorber compensates for the otherwise uninfluenced energy of the rotation unit introduced into the base. In particular, the Energieaufnehmer a force, a pulse, an angular momentum and / or a moment, in particular a crash moment record.

The duration of the accident, in particular the crash time can be extended by the energy receiver, so that energy peaks or peak moments can be reduced. The energy input into the base is thus minimized. The fact that the sections still remain connected to each other, no parts can solve, so that the vacuum pump poses no danger to the environment,

According to the invention, there is thus to a certain extent a "receptive" fastening device, which can compensate for the energy released in the event of a fault. For example, the fastening device can act as a "crumple zone" due to its energy absorber, which can absorb the rotational energy at least to a substantial extent. Alternatively or additionally, the fastening device may be designed such that the released rotational energy is converted predominantly into heat, e.g. by means of a braking device. In conventional, e.g. With the help of ordinary screws attached to the base of vacuum pumps, only a small part of the released energy can be compensated, if at all, before either the screws or other more or less rigid fasteners become ineffective and the pump disengages from the base or the base the incoming energy reacts in an uncontrolled manner.

Further developments of the invention can be found in the dependent claims, the description and the accompanying drawings.

According to one embodiment, the displacement comprises a controlled, predetermined, in particular limited, relative movement of the two sections relative to one another. The relative movement may in particular comprise a rotational movement. The energy released in the event of a fault can thus be converted at least partially into the relative movement, so that the energy can be compensated in a suitable manner. In particular, the base-side portion may be stationary, ie fixed relative to the base, while the pump-side portion may move relative to the base-side portion.

According to a further embodiment, the portions of the energy absorber are formed as separate components, wherein the energy absorption takes place by braking the one component by means of the other component. The energy released in the event of a malfunction is at least partially converted into frictional heat.

According to a further embodiment, the base-side section is designed as a brake unit for the pump-side section or comprises a brake unit. In particular, the base-side section is firmly connected to the base even in the event of a fault, while the pump-side section moves relative to the base-side section and is thereby braked. This is structurally particularly easy to implement, since the brake unit can be connected to the base. In principle, however, conversely, it is also conceivable that the pump-side section is designed as a brake unit or comprises a brake unit. As a brake unit, a mechanical brake is preferably provided, wherein alternatively or additionally, in principle, an electric or magnetic brake, e.g. an eddy current brake can be provided.

According to a further embodiment, the brake unit comprises brake shoes for the pump-side section, which are preferably designed as brake rings. The brake shoes and / or the region of the pump-side section, which cooperates with the brake shoes, may in particular comprise a friction-increasing material, for example a rubber material. In this way, the braking effect can be improved. The brake unit may also include a plurality of brake shoes which are at different positions with the pump side Collaborate section. It is also possible for the brake shoes to extend over the entire circumferential region of the pump-side section. In this case, the brake shoes may be formed, for example, as brake rings, wherein preferably an upper brake ring and a lower brake ring can receive and clamp a flange of the pump-side section between them.

According to a further embodiment, the braking action of the brake unit is adjustable, in particular by adjusting the brake shoes of the brake unit. Preferably, a clamping ring can be provided for adjusting. The strength of the braking effect can be varied. This can be done alternatively or additionally by a suitable choice of material.

According to a further embodiment, the pump-side portion is formed as a mounting plate. The mounting plate may in particular have a circular shape. Preferably, the mounting plate projects beyond the stationary unit of the vacuum pump and forms a flange for the brake shoes.

According to a further embodiment, the two components cooperate such that a rotational movement of the pump-side component which occurs in the event of a fault is braked by the base-side component and a movement of the pump-side component with a component perpendicular to the axis of rotation is at least substantially prevented.

According to a further embodiment, the two components each have a basic structure, wherein at least one of the components is additionally provided at least in regions on the basic structure with a friction-increasing material. Due to the friction-increasing material, the braking effect can be improved.

According to a further embodiment, the sections of the energy absorber are formed as areas of at least one common component, wherein the energy absorption takes place by deforming the component.

There are therefore no separate components, but a common component before. The component can in particular be made in one piece. It is also conceivable that the components are manufactured separately and then firmly connected to each other. Consequently, a composite element can also be provided as a common component.

The energy released in the event of a fault is compensated here at least in part by a deformation of the component. Here, the energy is converted into deformation energy and heat. In particular, it can be provided that the component is irreversibly deformed, so that the component must be replaced after an accident. Preferably, the component is designed in such a way that, in the case of an accident-induced deformation, no parts are loosened. In this way, it is ensured that the vacuum pump always remains connected to the base, even if it can move to a certain extent, but nevertheless controlled, relative to the base.

According to a further embodiment, the common component comprises at least one deformation element, which in particular comprises a metal sheet, a rod and / or a rubber element. The material and the rigidity of the deformation body can preferably be chosen such that in the event of an accident, the largest possible portion of the released energy can be absorbed, while the connection between the vacuum pump and the base is maintained.

According to a further embodiment, the common component or a deformation body of the common component comprises a composite material, wherein are made of a first material existing areas at least substantially for attachment to the vacuum pump and to the base and at least one of a second, different material from the first material existing area at least substantially used for energy absorption. In this case, the first material may in particular be stronger, harder or more rigid than the second material which is deformed. In this way, a secure connection between the vacuum pump and the deformation body or the base and the deformation body is ensured. However, the individual areas do not have to be strictly separated from each other. For example, at a transitional area, the first material and the second material may also be mixed together or merge into one another. In addition, the material composite is not limited to just two materials. Thus, it is also possible to use a plurality of different materials which, for example, have particularly good deformation properties or have a particularly good energy absorption behavior.

According to a further embodiment, a limiting device is provided, which limits a movement, in particular a rotational movement, of the pump-side section relative to the base-side section, wherein in particular the limiting device is provided in addition to a brake unit for the pump-side section.

Preferably, the angle of rotation can be limited. In particular, in this way, the vacuum pump can not rotate arbitrarily far relative to the base. The limiting device may comprise a fixed stop, which stops the relative movement abruptly.

According to a further embodiment, the limiting device is additionally designed as a guide for the movement of the pump-side section. In particular, the guide comprises at least one pin on the one of the sections, which engages in a slot on the other section. The slot can be curved in particular. The base-side section preferably comprises the pin, while the pump-side section, in particular the fastening plate, has the oblong hole. In principle, a reverse arrangement is possible.

The invention also relates to a system having at least one vacuum pump, in particular turbomolecular pump, and at least one fastening device. The fastening device may in this case have one or more of the features just described.

Fig. 1

eine Schnittansicht einer Vakuumpumpe, die mithilfe einer erfindungsgemäßen Befestigungsvorrichtung gemäß einer ersten Ausführungsform an einer Basis befestigt ist,

Fig. 2

eine Schnittansicht eines Teilbereichs der Befestigungsvorrichtung gemäß Fig. 1,

Fig. 3

eine Draufsicht eines Teilbereichs der Befestigungsvorrichtung gemäß Fig. 1, und

Fig. 4

eine Schnittansicht einer Vakuumpumpe, die mithilfe einer erfindungsgemäßen Befestigungsvorrichtung gemäß einer zweiten Ausführungsform an einer Basis befestigt ist.

The invention will now be described by way of example with reference to the drawings. Show it:

Fig. 1

3 a sectional view of a vacuum pump which is fastened to a base by means of a fastening device according to the invention according to a first embodiment,

Fig. 2

a sectional view of a portion of the fastening device according to Fig. 1 .

Fig. 3

a plan view of a portion of the fastening device according to Fig. 1 , and

Fig. 4

a sectional view of a vacuum pump, which is fastened by means of a fastening device according to the invention according to a second embodiment to a base.

First, it should be noted that the illustrated embodiments are merely exemplary in nature. In particular, the number and the way of the Arrangement of the individual illustrated fasteners, slots and pins vary. The features of one embodiment may also be arbitrarily combined with features of the other embodiment.

In Fig. 1 a vacuum pump 10 is shown with a stationary including the housing of the pump stationary unit 12. Inside the stationary unit 12 is an in Fig. 1 only schematically indicated rotation unit 13. The stationary unit 12 has at the top of a mounting flange 14 for attachment of the vacuum pump 10 to a container to be evacuated.

The vacuum pump 10 is, in particular, a turbomolecular pump of conventional construction with a rotor shaft 13a carrying rotor blades 13b which act as a pump as part of the rotation unit 13, although other types of vacuum pumps provided with rotating parts are also possible.

At the lower region, the stationary unit 12 has a lower part 16 of the vacuum pump, which can be connected to a fastening device. The fastening device comprises an energy absorber 17 and represents the connecting link between the vacuum pump 10 and a base 18. The base 18 can be designed, for example, as a pumping station, which itself can be firmly anchored to the ground.

The energy absorber 17 has a pump-side section 20, which is connected to the lower part 16 of the vacuum pump 10. Furthermore, the energy absorber 17 comprises a base-side section 22 which is firmly connected to the base 18. For fastening the respective sections fastening means 24 are provided, which may be formed, for example, as screws.

The base-side section 22 comprises a brake unit 26, which has brake shoes 28. The two brake shoes 28 can be adjusted by means of a screw 24 or a clamping ring, i. the braking effect can be adjusted specifically.

The pump-side portion 20 has a mounting plate 30 which is received between the brake shoes 28.

The mounting plate 30 may be formed in particular circular, while the brake shoes 28 may be configured as brake rings.

During normal operation, the vacuum pump 10 is fixedly connected to the base 18 by the attachment device. If there is an accident, for example a so-called crash or rotor burst, the vacuum pump 10 is set in rotation about the axis of rotation D due to the released rotational energy of the rotation unit. This rotational movement is transmitted to the pump-side section 20 and braked by means of the brake shoes 28 of the base-side section 22. The energy released in the event of a fault can consequently be compensated by means of the energy absorber 17 and converted into heat. The vacuum pump 10 remains connected to the base 18.

A further development of this concept is in the Fig. 2 and Fig. 3 shown. Accordingly, the brake unit 26 may include a pin 32 which cooperates with the mounting plate 30. As in Fig. 3 can be seen, engages the pin 32 of the base-side portion 22 in a slot 34 of the pump-side portion 20 a. The rotation of the mounting plate 30 is thus abruptly stopped as soon as the pin 32 reaches one end of the slot 34.

An alternative embodiment of a fastening device is in Fig. 4 shown. The energy absorber 17 in this concept comprises a deformation body 36. The deformation body 36 may in this case comprise a first material 38 and a second material 40. In particular, the first material 38 is stiffer than the second material 40 and is used to connect the vacuum pump 10 and the base 18 to the attachment device, respectively. The second material 40, however, is deformable such that the energy released in a fault can be absorbed by the deformation body 36 and converted into deformation energy.

The deformation portion formed by the second material 40 may be e.g. be formed by a solid block of material, which is connected via the existing of the first material 38 sections with the vacuum pump 10 and the base 18. Alternatively, the deformation section may comprise a plurality of individual elements, e.g. in the form of bars, sheets or plastic or rubber elements.

The invention thus makes it possible to absorb and convert energy released in a fault, ie to compensate or absorb it in such a way that there is no danger of the vacuum pump 10 becoming detached from the base 18.

LIST OF REFERENCE NUMBERS

10

vacuum pump

12

stationary unit

13

rotation unit

13a

rotor shaft

13b

rotor disc

14

mounting flange

16

lower part

17

energy consumption

18

Base, pump stand

20

pump-side section

22

base-sided section

24

Fastener, screw

26

brake unit

28

Brake shoe, brake ring

30

mounting plate

32

pen

34

Long hole

36

deformable body

38

first material

40

second material

D

axis of rotation

Claims (15)

Device for fastening a vacuum pump (10), in particular a turbomolecular vacuum pump, to a base (18), wherein the vacuum pump (10) has a stationary unit (12) to be fastened to the base (18) and a relative to the stationary unit (12) during operation ) comprises rotating rotation unit (13),
with at least one energy absorber (17) which can be fastened to the stationary unit (12) of the vacuum pump (10) with a pump-side section (20) and to the base (18) with a base-side section (22), the two sections (20 , 22) of the energy absorber (17) connected to each other and in the connected state are mutually displaceable, and
wherein the energy absorber (17) is adapted, in a fault of the vacuum pump (10) from the rotation unit (13) on the stationary unit (12) and transferred to the energy receiver (17) initiated kinetic energy of the vacuum pump (17) by shifting the sections ( 20, 22) while maintaining the connected state of the sections (20, 22). Fastening device according to claim 1,
characterized in that
the displacement comprises a controlled, predetermined, in particular limited, relative movement of the two sections (20, 22) relative to one another. Fastening device according to claim 1 or 2,
characterized in that
the portions (20, 22) of the energy absorber (17) are formed as separate components, wherein the energy absorption (17) takes place by braking the one component by means of the other component. Fastening device according to claim 3,
characterized in that
the base-side section (22) is designed as a brake unit (26) for the pump-side section (20) or comprises a brake unit (26). Fastening device according to claim 4,
characterized in that
the brake unit (26) comprises brake shoes (28) for the pump-side section (20), which are preferably designed as brake rings. Fastening device according to claim 4 or 5,
characterized in that
the braking effect of the brake unit (26) is adjustable, in particular by adjusting the brake shoes (28) of the brake unit (26). Fastening device according to one of the preceding claims,
characterized in that
the pump-side section (20) is designed as a fastening plate (30). Fastening device according to one of claims 3 to 7,
characterized in that
the two components cooperate in such a way that a rotational movement of the pump-side component arising in the event of a malfunction occurs through the base-side component Braked component and a movement of the pump-side component with a vertical axis to the (D) component is at least substantially prevented. Fastening device according to one of claims 3 to 8,
characterized in that
the two components each have a basic structure, wherein at least one of the components is additionally provided with a friction-increasing material at least in regions on the basic structure. Fastening device according to claim 1 or 2,
characterized in that
the portions (20, 22) of the energy absorber (17) are formed as regions of at least one common component, wherein the energy absorption takes place by deforming the component. Fastening device according to claim 10,
characterized in that
the common component comprises at least one deformation element (36), which in particular comprises a metal sheet, a rod and / or a rubber element. Fastening device according to claim 10 or 11,
characterized in that
the common component or a deformation body (36) of the common component comprises a composite material, wherein from a first material (38) existing areas at least substantially for attachment to the vacuum pump (10) and to the base (18) are formed and at least one of a second, different from the first material (38) Material (40) existing area at least substantially used for energy absorption. Fastening device according to one of the preceding claims,
characterized in that
a limiting device is provided which limits a movement, in particular a rotational movement, of the pump-side section (20) relative to the base-side section (22), wherein in particular the limiting device in addition to a brake unit (26) for the pump-side section (20 ) is provided. Fastening device according to claim 13,
characterized in that
the limiting device is additionally designed as a guide for the movement of the pump-side section (20) and in particular comprises at least one pin (32) on one of the sections (20, 22) which is inserted into a slot (34) on the other section (22, FIG. 20) engages. System comprising at least one vacuum pump (10), in particular turbomolecular vacuum pump, and at least one fastening device according to one of the preceding claims.

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