EP3039407A1 - Dispositif de mesure de réflexions sur des objets à contrôler et procédé de mesure d'un rayonnement réfléchi par des objets à contrôler - Google Patents

Dispositif de mesure de réflexions sur des objets à contrôler et procédé de mesure d'un rayonnement réfléchi par des objets à contrôler

Info

Publication number
EP3039407A1
EP3039407A1 EP14789980.1A EP14789980A EP3039407A1 EP 3039407 A1 EP3039407 A1 EP 3039407A1 EP 14789980 A EP14789980 A EP 14789980A EP 3039407 A1 EP3039407 A1 EP 3039407A1
Authority
EP
European Patent Office
Prior art keywords
radiation
measuring device
focusing
test object
receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14789980.1A
Other languages
German (de)
English (en)
Inventor
Thomas Hochrein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoex GmbH
Original Assignee
Inoex GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoex GmbH filed Critical Inoex GmbH
Publication of EP3039407A1 publication Critical patent/EP3039407A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/221—Arrangements for directing or focusing the acoustical waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness

Definitions

  • the invention relates to a measuring device for reflection measurements on test objects according to the preamble of claim 1.
  • the invention further relates to a method for measuring radiation reflected on test objects.
  • the radiation used for the measurement is in particular terahertz radiation.
  • Reflection measurements on test objects are performed, for example, to determine the wall thickness of the test objects. Reflection measurements have the advantage over transmission measurements that the test object only has to be accessible on one side.
  • a disadvantage of reflectance measurements is the low signal-to-noise ratio, since, for example, in measurements on test objects made of plastics, the reflectance is lower than the transmittance.
  • the receiver In order to obtain the best possible signal quality of the measured radiation, the receiver is formed separately from the transmitter.
  • a measuring device for reflection measurements is known in which between a terahertz transmitter and the test object and between the test object and a terahertz receiver, a dielectric body is arranged to improve the signal quality.
  • a disadvantage of the known measuring device is that it is less flexible and complicated in construction.
  • the invention is therefore an object of the invention to provide a measuring device for reflection measurements on test objects, which is simple and flexible and adapted to the test object.
  • This object is achieved by a measuring device having the features of claim 1. Because at least two of the elements from the group of first collimating element, first focusing element, second collimating element and second focusing element are formed separately from one another, the measuring device can be constructed in a simple and flexible manner and to the test object or the available installation space be adjusted. Individual elements can be changed in a simple manner and depending on the test object, so that the signal quality and / or the required installation space can be optimized.
  • the transmitter and the receiver are designed separately, so that the receiver is optimally adaptable to the reflected radiation and optimum signal quality of the measured radiation is achieved.
  • the emitted radiation and / or reflected radiation has in particular a frequency in the range from 0.01 THz to 50 THz, in particular from 0.05 THz to 20 THz, and in particular from 0.1 THz to 5 THz.
  • a measuring device enables a comparatively compact construction. Due to the fact that the transmitter and the receiver are arranged one after the other along the direction of radiation, ie along an optical axis, the transmitter and the receiver can be arranged overlapping. As a result, a compact structure is achieved. In particular, the first collimating element and the second focusing element are formed separately from each other. As a result, the first collimating element and the second focusing element can be arranged offset along the radiation direction and / or be formed with a different focal length.
  • a measuring device ensures a compact construction. Since the transmitter and the receiver have an overlapping region along the radiation direction, ie are arranged successively and overlapping along the radiation direction, the dimension transverse to the radiation direction can be minimized.
  • a measuring device enables easy production and a flexible structure.
  • a measuring device ensures in a simple manner the arrangement of the first collimating element and the second focusing element as a function of the arrangement of the transmitter and / or receiver and / or a test object holder.
  • a measuring device according to claim 6 enables in a simple manner an alignment or parallel alignment of the emitted radiation and / or a focusing of the reflected radiation.
  • the respective lens is preferably convex, in particular biconvex or plano-convex.
  • a measuring device according to claim 7 ensures a high signal quality.
  • the first collimating element and / or the second focusing element as a mirror, signal losses or reflection losses are avoided.
  • mirrors enable a space-saving design of the measuring equipment which can be adapted to the given installation space. contraption. Due to the parabolic design, alignment, in particular parallel alignment of the emitted radiation and / or focusing of the reflected radiation is made possible. In addition, mirrors allow redirecting the radiation.
  • a measuring device allows an arrangement of the first focusing element and / or the second collimating element independently of the arrangement of the first collimating element and the second focusing element. This allows for optimal adaptation to the test object and the available room.
  • a measuring device ensures a simple structure. Since the first focusing element and the second collimation element are arranged in the beam path in front of the test object and after the test obj ect, they can be formed in one piece in a simple manner. This also allows a simple and accurate arrangement or adjustment.
  • a measuring device makes it possible in a simple manner to focus the emitted radiation on the test object and / or to align or parallelize the radiation reflected by the test object.
  • the first focusing element and / or the second collimation element are formed as a convex lens.
  • the respective lens is in particular biconvex or plano-convex.
  • the first focusing element and the second collimation element are integrally formed.
  • a measuring device enables in a simple manner focusing of the emitted radiation on the test object and / or a Aligning or parallelizing the radiation reflected by the test object.
  • the first focusing element and the second limiting element are preferably designed as a parabolic mirror.
  • the first focusing element and the second collimation element are preferably formed integrally. As a result, reflection losses are avoided, so that a high signal quality is ensured.
  • the mirrors or the mirror allow redirecting the radiation.
  • a measuring device allows an adaptation of the structure of the existing space.
  • the deflecting element is designed in particular as a mirror. This allows a lossless deflection of the emitted and / or the reflected radiation.
  • the deflecting element is preferably arranged between the test object or a test object holder and the first focusing element and / or the second collimating element.
  • a measuring device enables a simple and flexible adaptation of the structure to the test object.
  • a measuring device ensures a simple structure.
  • the gas or the air in particular has a refractive index which is smaller than the refractive index of the first collimating element and / or the first focusing element and / or the second collimating element and / or the second focusing element.
  • a further object of the invention is to provide a method for measuring radiation reflected at test objects, which enables a simple and flexible reflection measurement adapted to the test object.
  • This object is achieved by a method having the features of claim 15.
  • the advantages of the method according to the invention correspond to the already described advantages of the measuring device according to the invention.
  • the method can be developed in particular also with the features of claims 2 to 14.
  • the inventive method is used in particular for determining a wall thickness of the test object.
  • the test object is formed in particular from a plastic material.
  • the emitted radiation and / or the reflected radiation has in particular a frequency in the range from 0.01 THz to 50 THz, in particular from 0.05 THz to 20 THz, and in particular from 0.1 THz to 5 THz.
  • FIG. 1 is a schematic representation of a measuring device for reflection measurements on test objects with lenses for aligning and focusing the emitted and reflected radiation according to a first embodiment
  • FIG. 2 is a schematic representation of a measuring device with an overlapping arranged transmitter and receiver according to a second embodiment
  • FIG. 3 is a schematic representation of a measuring device with a deflection element according to a third embodiment
  • FIG. 4 shows a schematic representation of a measuring device with a mirror for focusing the emitted radiation and for aligning the reflected radiation according to a fourth exemplary embodiment
  • FIG. 5 shows a schematic representation of a measuring device with mirrors for focusing and aligning the radiation according to a fifth exemplary embodiment.
  • a measuring device 1 is used for carrying out reflection measurements on a test object 2.
  • the measuring device 1 has a transmitter 3 which has radiation with a frequency in the range from 0.01 THz to 50 THz, in particular from 0.05 THz to 20 THz, and in particular emitted from 0.1 THz to 5 THz.
  • the transmitter 3 or the transmitting antenna is designed in a conventional manner and emits the radiation in a cone-shaped manner in a radiation direction 4.
  • the emitted radiation is shown in FIG. 1 denoted by S.
  • the radiation direction 4 defines an optical axis of the transmitter 3.
  • the transmitter 3 is followed by a first Kollimations- element 5 in the radiation direction 4.
  • the first collimating element 5 is designed as a convex lens.
  • the convex lens 5 is arranged concentrically to the optical axis of the transmitter 3 and the radiation cone of the emitted radiation S.
  • the first collimation element 5 is used for aligning or parallelizing the emitted radiation S.
  • the first collimating element 5 is followed by a first focusing element 6 in the radiation direction 4.
  • the first focusing element 6 is integrally formed with a second collimating element 7.
  • the first focusing element 6 and the second collimation element 7 are designed as a convex lens, which is arranged concentrically to an optical axis A of the measuring device 1.
  • the first focusing element 6 that is to say a first half of the convex lens
  • the emitted radiation S is focused onto a focal point F on a surface of the test object 2.
  • the test object 2 is held by means of a test object holder 8, which is displaceable along the optical axis A relative to the first focusing element 6 and the second collimating element 7.
  • the second collimating element 7, that is to say a second half of the convex lens, is arranged downstream of the test object 2 in a reflection direction 9.
  • the reflection direction 9 runs opposite to the radiation direction 4.
  • the reflected radiation is denoted by R below.
  • the second collimation element 7 is used for aligning or paralleling the reflected radiation R.
  • the second collimating element 7 is followed in the reflection direction 9 by a second focusing element 10, which focuses the reflected radiation R onto a receiver 11.
  • the reflection direction 9 defines an optical axis of the receiver 11 and the receiving antenna, respectively.
  • the second focusing element 10 is formed as a convex lens, which is arranged concentrically to the optical axis of the receiver 11.
  • the second focusing element 10 focuses the reflected radiation R onto a focal point D of the receiver 11.
  • the receiver 11 serves to detect the radiation R reflected at the test object 2.
  • the reflected radiation R has a frequency Range from 0.01 THz to 50 THz, in particular of
  • the transmitter 3 and the receiver 11 and the elements 5 and 10 as well as 6 and 7 are arranged symmetrically relative to the optical axis A.
  • the transmitter 3 and the receiver 11 and the first collimating element 5 and the second focusing element 10 are aligned along the radiation direction 4 and the reflection direction 9 to each other, and in particular not offset from one another.
  • the first collimating element 5 and the second focusing element 10 are formed separately from each other and separately from the first focusing element 6 and the second collimating element 7, respectively.
  • the elements 5, 10 and 6 or 7 can be arranged in a simple and flexible manner relative to the transmitter 3 and / or the receiver 11 and / or the test object holder 8.
  • the first focusing element 6 and / or the second collimation element 7 is preferably displaceable relative to the first collimating element 5 and / or the second focusing element 10.
  • the space between the transmitter 3 and the first collimating element 5 and / or the space between the first collimating element 5 and the first focusing element 6 and / or the space between the first focusing element 6 and the test object Holder 8 or the test object 2 and / or the space between the test object holder 8 or the test object 2 and the second collimating element 7 and / or the space between the second collimating element 7 and the second focusing element 10 and / or the space between the second focusing element 10 and the receiver 1 1 is filled with a gas G, preferably with air.
  • a gas G preferably with air.
  • the operation of the measuring device 1 is as follows:
  • the transmitter 3 emits the radiation S at a frequency in the terahertz range.
  • the radiation S is emitted conically.
  • the first collimating element 5 aligns the emitted radiation S parallel to the optical axis A.
  • the collimated radiation S is subsequently focused on the focal point or focal point F by the first focusing element 6.
  • the focal point F lies in particular on the surface of the test object 2.
  • the test object 2 has been correspondingly positioned by means of the displaceable test object holder 8.
  • the radiation R reflected on the test object 2 is in turn aligned parallel to the optical axis A by means of the second collimation element 7.
  • the collimated reflected radiation R is then focused by means of the second focusing element 10 onto the focal point D of the receiver 11.
  • the radiation R detected by the receiver 11 is evaluated by means of the control device 12.
  • the transmitter 3 or the transmitting antenna and the receiver 11 or the receiving antenna are aligned in parallel, but with an offset to the optical axis A.
  • the emitted radiation S is collimated centrally by the first lens 5 to the optical axis 4 of the transmitter 3 and by means of the lens 6 or 7, which is arranged centrally to the optical axis A, focused on the surface of the test object 2.
  • the test object 2 is located in the focal point F of the lens 6 or 7.
  • the radiation R reflected in the region of the focal point F is again collimated by the lens 6 or 7 and focused onto the receiver 11 by means of the lens 10.
  • the surface of the test object 2 is preferably oriented vertically in the focal point F, so that as much reflected radiation R as possible is reflected in the direction of the receiver 11.
  • the test object 2 is designed in particular as a plastic component, for example as a plastic pipe.
  • a wall thickness B of the inspection object 2 can be detected from the reflected radiation R.
  • the structure of the measuring device 1 is relatively compact and can be flexibly adapted to the available space.
  • the reflection losses at the interfaces of the collimation elements 5 and 7 and the Focusing elements 6 and 10 are small, which provides a comparatively good signal-to-noise ratio.
  • the reflected radiation R can be evaluated in an optimal manner.
  • the transmitter 3 and the first collimating element 5 along the radiation direction 4 and the optical axis A is arranged offset to the receiver 11 and the second focusing element 10.
  • the transmitter 3 and the receiver 11 are arranged overlapping and have an overlap region x.
  • the measuring device 1 has a deflecting element 13 which is arranged between the first focusing element 6 and the test object 2 or the test object holder 8 and the test object 2 or the test object holder 8 and the second collimation element 7 is arranged in the beam path.
  • the space between the first focusing element 6 and the second collimating element 7 and the deflecting element 13 and between the deflecting element 13 and the test object holder 8 is filled with a gas G, in particular with air, in accordance with the preceding embodiments ,
  • the deflecting element 13 is designed as a mirror, which is particularly flat.
  • deflecting element 13 is an arrangement of the test object 2 spaced or transversely to the optical axis A allows.
  • the measuring device 1 is thus easily and flexibly adaptable to the test object 2 or a predetermined space.
  • the first focusing element 6 and the second collimation element 7 are integrally formed as a mirror.
  • the mirror is parabolically shaped so that the emitted radiation S is focused and the reflected radiation R is collimated.
  • the mirror 6 or 7 also deflects the emitted radiation S or the reflected radiation R and accordingly acts as a deflection element.
  • the space between the mirror 6 or 7 and the test object 2 or the test object holder 8 is filled according to the preceding exemplary embodiments with a gas G, in particular with air.
  • a gas G in particular with air.
  • the first collimating element 5 and the second focusing element 10 are formed separately as a mirror.
  • the mirrors 5, 10 are in particular parabolically shaped so that the radiation S emitted in the radiation direction 4 is deflected parallel and transversely, in particular perpendicular to the radiation direction 4 and the collimated reflected radiation R is focused and deflected in the reflection direction 9 to the receiver 11.
  • the first focusing element 6 and the second Collimating element 7 are integrally formed according to the fourth embodiment as a parabolic mirror.
  • the measuring device 1 has a compact construction.
  • the test object holder 8 or the test object 2 can be arranged in the reflection direction 9 after the transmitter 3 and the receiver 11, since due to the mirrors 5, 6, 7 and 10, the emitted radiation S and the reflected radiation R respectively deflected, in particular by 180 ° is deflected.
  • the space between the mirrors 5, 6, 7 and 10 and the test object holder 8 or the test object 2 is filled according to the preceding embodiments with a gas G, in particular with air.
  • a gas G in particular with air.
  • the measuring device 1 can also be operated with electromagnetic waves in other frequency ranges or with other types of waves, for example with ultrasonic waves.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de mesure (1) servant à mesurer des réflexions sur des objets (2) à contrôler, comprenant un émetteur (3) d'un rayonnement (S), un premier élément de collimation (5) servant à diriger le rayonnement émis (S), un premier élément de focalisation (6) servant à focaliser le rayonnement émis (S) par rapport à l'objet (2) à contrôler, un récepteur (11) servant à détecter un rayonnement (R) réfléchi par l'objet (2) à contrôler, un second élément de collimation (7) servant à diriger le rayonnement réfléchi (R) et un second élément de focalisation (10) servant à focaliser le rayonnement réfléchi (R) par rapport au récepteur (11). Au moins deux des éléments (5, 6, 7, 10) sont formés séparément l'un de l'autre. On obtient ainsi une structure plus simple et plus souple du dispositif de mesure (1) qui peut être adaptée à l'objet (2) à contrôler.
EP14789980.1A 2013-08-27 2014-08-26 Dispositif de mesure de réflexions sur des objets à contrôler et procédé de mesure d'un rayonnement réfléchi par des objets à contrôler Withdrawn EP3039407A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013217038.6A DE102013217038A1 (de) 2013-08-27 2013-08-27 Messvorrichtung für Reflexionsmessungen an Prüfobjekten sowie Verfahren zur Messung von an Prüfobjekten reflektierter Strahlung
PCT/DE2014/100304 WO2015027994A1 (fr) 2013-08-27 2014-08-26 Dispositif de mesure de réflexions sur des objets à contrôler et procédé de mesure d'un rayonnement réfléchi par des objets à contrôler

Publications (1)

Publication Number Publication Date
EP3039407A1 true EP3039407A1 (fr) 2016-07-06

Family

ID=51830164

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14789980.1A Withdrawn EP3039407A1 (fr) 2013-08-27 2014-08-26 Dispositif de mesure de réflexions sur des objets à contrôler et procédé de mesure d'un rayonnement réfléchi par des objets à contrôler

Country Status (4)

Country Link
US (1) US9791263B2 (fr)
EP (1) EP3039407A1 (fr)
DE (1) DE102013217038A1 (fr)
WO (1) WO2015027994A1 (fr)

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DE102013223945A1 (de) 2013-11-22 2015-05-28 Inoex Gmbh Messvorrichtung und Verfahren zur Vermessung von Prüfobjekten
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EP3386384A4 (fr) * 2015-12-10 2019-07-24 Raytelligence AB Détecteur radar permettant de surveiller des fonctions corporelles
DE102015122205B4 (de) * 2015-12-18 2022-11-03 Inoex Gmbh Terahertz-Messverfahren und Terahertz-Messvorrichtung zum Ermitteln einer Schichtdicke oder eines Abstandes eines Messobjektes
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DE102018122391A1 (de) * 2018-09-13 2020-03-19 Sikora Ag Vorrichtung und Verfahren zum Detektieren eines Gegenstandes

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Also Published As

Publication number Publication date
US9791263B2 (en) 2017-10-17
WO2015027994A1 (fr) 2015-03-05
US20160238375A1 (en) 2016-08-18
DE102013217038A1 (de) 2015-03-05

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