EP3010649B1 - Ensemble transducteur ultrasonore et véhicule automobile pourvu d'un ensemble transducteur ultrasonore - Google Patents

Ensemble transducteur ultrasonore et véhicule automobile pourvu d'un ensemble transducteur ultrasonore Download PDF

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Publication number
EP3010649B1
EP3010649B1 EP14714704.5A EP14714704A EP3010649B1 EP 3010649 B1 EP3010649 B1 EP 3010649B1 EP 14714704 A EP14714704 A EP 14714704A EP 3010649 B1 EP3010649 B1 EP 3010649B1
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EP
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Prior art keywords
transducer elements
membrane
elements
transducer
ultrasound transducer
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EP14714704.5A
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German (de)
English (en)
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EP3010649A1 (fr
Inventor
Andre Gerlach
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy

Definitions

  • the invention relates to an ultrasonic transducer arrangement which is set up to send and/or receive ultrasonic signals and which has at least two transducer elements which are arranged at a distance from one another and are set up to send and/or receive ultrasonic signals.
  • the invention also relates to a method for producing such an ultrasonic transducer arrangement and a motor vehicle in which such an ultrasonic transducer arrangement is provided.
  • converter arrangements for ultrasound-based environment sensing are used.
  • these are predominantly resonant oscillators, which consist of solid bodies and one or more transducer elements.
  • an acoustic transducer which comprises a so-called array of transducer elements arranged according to a 1-3 technique and the upper and lower ends of which are encapsulated in rigid polymer plates.
  • the transducer elements are contacted by flexible conductors made of a polyimide material coated on both sides with a copper conductor.
  • FIG. 1 shows transducer elements having a 2-2 or 1-3 structure, where elements are contacted on opposite major faces of electrodes. Passive polymer layers are provided between the piezoelectric elements contacted by the electrodes, resulting in an array structure.
  • the document EP 0 973 149 A2 discloses an ultrasonic transducer array comprising a plurality of transducer elements and a backmass 84, the transducer elements being spaced apart and coupled to the backmass on one side.
  • the transducer elements share a diaphragm.
  • the document U.S. 2006/075818 A1 discloses a CMUT array having a plurality of transducer elements, a diaphragm and a back mass, the transducer elements being spaced apart and coupled to the diaphragm at one end. On an opposite side, the transducer elements are coupled to the back ground.
  • the document U.S. 8,398,551 B2 1 shows a capacitive ultrasonic transducer array with a plurality of transducer elements, a membrane 9 and a back mass 2, the transducer elements being arranged at a distance from one another and coupled to the membrane at one end. On an opposite side, the transducer elements are coupled to the back ground.
  • the documents DE 10 2010 025 194 A1 and US2010/0208553 show an ultrasonic transducer in which the bumper is used as a membrane.
  • An ultrasonic transducer array with multiple transducer elements is disclosed in document DE 10 2008 016558 A1 described.
  • the invention includes an ultrasonic transducer arrangement that is set up to send and/or receive ultrasonic signals, at least two transducer elements, a membrane and at least one back mass.
  • the at least two transducer elements are arranged at a distance from one another.
  • the at least two transducer elements are directly or indirectly coupled to the membrane at one end and at one opposite side directly or indirectly coupled to the at least one rear mass.
  • a concealed mounted array sensor of a new type of contacting is advantageously proposed, which is applied to an outer skin.
  • the proposed design is very simple, compact and inexpensive to implement.
  • converter element is to be interpreted broadly and includes, for example, electric-acoustic converters that work according to electrostatic, magnetostrictive, piezoelectric effects or combinations of these effects.
  • the transducer element can in particular be a piezoelectric element and the ultrasonic transducer arrangement can be referred to as a piezoelectric ultrasonic transducer arrangement.
  • the membrane of the ultrasonic transducer arrangement is formed by an outer skin of a bumper, side mirror or door area of a motor vehicle, with the transducer elements being arranged hidden behind the outer skin.
  • the membrane is preferably formed from a thin material layer, which is made from a polymer material, for example.
  • the membrane preferably has a thickness of between 0.1 mm and 5 mm, particularly preferably less than 2 mm or less than 1 mm.
  • the transducer elements can be coupled to the membrane directly or indirectly, but in any case in such a way that acoustic coupling is made possible to a sufficient extent, ie suitable vibrations can be transmitted.
  • the coupling can be accomplished, for example, by means of a press fit, a press fit, such as by screwing in, or by gluing.
  • the coupling can also take place by overmoulding the resonance body with the material of the outer skin, which can also be referred to as embedding.
  • Indirect coupling can mean that a further layer of material is provided between the transducer elements and the membrane, for example a liquid such as a gel or an oil.
  • the further material layer can be provided in particular to the acoustic coupling between the To optimize transducer elements and the membrane, z. B. to compensate for tolerances in the dimensions of the components or the roughness of the surfaces of the coupling partners.
  • the ultrasonic transducer arrangement has 2 to 50 transducer elements.
  • Efficient multi-element sensors i. H. Arrays of 2 to 50 transducer elements, provided in what is known as concealed mounting.
  • the transducer elements are spaced apart by plastic composite elements.
  • the plastic composite elements are arranged between the transducer elements so that they are electrically and mechanically sufficiently insulated from one another.
  • this type of arrangement of the transducer elements can also be referred to as embedding in a plastic composite mass, meaning that the transducer elements are essentially completely surrounded by the plastic composite mass.
  • the restriction “essentially” relates, for example, to channels provided for the necessary electrical contacting of the transducer elements.
  • the converter arrangement has at least one front mass in addition to the at least one rear mass.
  • the rear mass and the front mass are made of different materials Z.
  • Front and/or rear masses are particularly preferably provided individually for each converter element.
  • the electro-acoustic radiation emitted by the transducer elements for sensing the surroundings then preferably leaves the transducer arrangement in the direction of the end face of the transducer elements, rearward radiation is suppressed.
  • the rear mass is effective as a so-called inertial mass, ie its inertia enables the introduction of force into the front body and thus also serves to dampen the vibrations in relation to the area in which no radiation is desired.
  • the front mass is preferably made of a duroplastic or thermoplastic polymer or an elastomer and the back mass is made of a metal, for example aluminum, steel or brass.
  • the selection of suitable materials can be determined by limitations or specifications with regard to the reception sensitivities to be achieved or transmission signal strengths of the ultrasonic transducer arrangement. In particular, however, other environmental influences, such as the Ambient temperature or the mechanical stress caused by shaking, must be taken into account in order to determine suitable materials.
  • the ultrasonic transducer arrangement has electrodes for contacting the transducer elements.
  • the converter elements are preferably individually electrically contacted.
  • a so-called flex foil is used as at least one electrode, which is suitable for contacting the transducer elements.
  • the flex film can be glued to the transducer elements, for example, by means of conductive adhesive.
  • the transducer elements are coupled to a first electrode on the end face.
  • the first electrode is a first flex film.
  • the first electrode or flex film is also attached to the membrane.
  • the first electrode or flex film is particularly preferably glued to the membrane, for example by means of a conductive adhesive.
  • the front mass is glued to the first electrode or flex foil and the front mass is arranged between the transducer elements and the first electrode or flex foil.
  • the front mass is preferably designed to be conductive, for example made from a conductive plastic or from a metal, such as aluminum.
  • a flex film which contacts the transducer elements on their side surfaces, which is referred to as the so-called 3-1 effect.
  • the transducer elements have electrodes on their side surfaces, which are in contact through the flexible foil.
  • Such electrodes can be sputtered onto the transducer elements, for example.
  • the flex foil can be arranged on the end face of the converter elements and can be glued to them on the one hand and to the membrane on the other hand, or it can be provided that the flex foil is provided on the opposite side of the converter elements, as a result of which they are glued to the converter elements on the one hand and on the other hand to the rear mass.
  • the transducer elements are coupled to a second electrode on the opposite side.
  • the second electrode is a second flex foil.
  • the invention can be used in particular in such environment sensors which are provided, for example, in the front and/or rear bumper of the vehicle for the purpose of parking assistance and/or collision avoidance.
  • Ultrasonic signals are usually transmitted through a medium such as air or water from an emitter to a receiver or transmitted from an emitter into an environment or ultrasonic signals reflected by an object in the environment are detected and the propagation time and/or propagation time differences and/or other variables such as For example, amplitudes and phases of the ultrasonic signals are measured.
  • ultrasonic transducers are used, which can both emit ultrasonic waves and receive ultrasonic waves. However, it can also be provided to use the ultrasonic transducer only as a receiver or only as a transmitter.
  • the ultrasonic transducer arrangement can be installed in an ultrasonic system that includes a group of ultrasonic sensors, wherein at least one, preferably all, ultrasonic sensors include the features of the ultrasonic transducer arrangement.
  • the ultrasound system can be set up, for example, to record a partial environment of the motor vehicle.
  • the ultrasonic sensors in the front area for detecting a front vehicle environment and/or the ultrasonic sensors in the side area for detecting a side area of the vehicle and/or the ultrasonic sensors in the rear area for detecting a rear area of the vehicle can each be assigned to such an ultrasonic system.
  • four to six sensors are installed in a bumper, with only a maximum of four sensors being mounted with approximately the same line of sight.
  • sensors are also positioned in the front bumper in such a way that they have their detection range to the left and to the right.
  • sensors can also be positioned in the rear bumper in such a way that they detect an area to the left and right of the motor vehicle.
  • the ultrasound system also has a control device assigned to the respective group and a signal processing device.
  • ultrasonic sensors installed on the side of the front and rear bumpers can be used, as well as sensors installed in a side mirror or in a door section.
  • the present invention provides an ultrasonic transducer which is also suitable for use in measuring the flow of fluid media, in particular in the intake tract and/or in the exhaust tract and/or in the exhaust gas recirculation tract and/or after a turbocharger of internal combustion engines in motor vehicles.
  • the membrane of the ultrasonic transducer arrangement is formed by an outer skin of a component such as a bumper, side mirror or door area of a motor vehicle.
  • the transducer elements are hidden behind the outer skin.
  • a motor vehicle has a bumper, a side mirror or a door section and an ultrasonic transducer arrangement as described above, the membrane of the ultrasonic transducer arrangement being formed by an outer skin of the bumper, side mirror or door section, and the transducer elements being arranged hidden behind the outer skin are.
  • the invention is defined in claim 7.
  • the thickness of the outer skin of the bumper or side mirror or the door section in which the ultrasonic transducer arrangement is installed does not correspond to the above-mentioned thicknesses preferred for acoustic transmission, it can be provided that the bumper, the side mirror or the door section of the motor vehicle is designed correspondingly thinner than elsewhere in the area in which the ultrasonic transducer arrangement is to be installed.
  • Local thinnings of this type can be incorporated both by subsequent machining, for example by milling, or already during the manufacturing process, for example during injection molding.
  • the ultrasonic transducer arrangement 1 shown in a side sectional view according to a first embodiment of the invention comprises, for example, eight transducer elements 2 arranged next to one another at a distance from one another, which are each coupled to a membrane 4 on an end face 3 and to a rear mass 6 on an opposite side 5.
  • Plastic composite elements 8 are arranged between the eight transducer elements 2 to space them apart.
  • the exemplary embodiment shown comprises two flex foils 10, 12, with a first flex foil 10 being arranged between the converter elements 2 and the membrane 4 according to the invention and contacting the converter elements 2 individually at their end faces 3.
  • the first flex film 10 is attached to the membrane 4 by means of a conductive adhesive 14 .
  • the coupling between the first flex foil 10 and the membrane 4 can be direct or indirect, with indirect contact denoting that at least one layer of another material is arranged between the first flex foil 10 and the membrane 4 .
  • the conductive adhesive 14 can be such a layer.
  • layers of liquid such as oil or gel may be provided to improve acoustic coupling.
  • the second flex foil 12 is arranged between the converter elements 2 and the back mass 6 and contacts the converter elements 2 individually on sides 5 which are arranged opposite the front sides 3 with respect to the membrane 4 .
  • the second flex film 12 is attached to the backing mass 6 by means of a further adhesive 20 .
  • the converter elements 2 form what is known as an array 15.
  • at least two converter elements 2 are referred to as an array 15, which are arranged at a distance from one another and which are coupled directly or indirectly to at least one back mass 6 on the side 5 opposite the end face 3 .
  • the array 15 here also includes the plastic composite elements 8, the flex foils 10, 12 and the backing mass 6.
  • the membrane 4 is thinner in a contact area 32 than outside of the contact area 32, so that the array 15 in the contact area 32 in the membrane 4 is at least partially countersunk. This has the advantage that the ultrasonic transducer arrangement 1 can be designed to be sufficiently sensitive to absorb ultrasonic waves or emit sufficiently strong ultrasonic waves, and the membrane 4 outside of the contact area 32 can be made sufficiently thick.
  • the ultrasonic transducer arrangement 1 not shown according to the invention in a lateral sectional view serves only for illustration and again comprises, for example, eight transducer elements 2 arranged next to one another at a distance from one another, which are each coupled to the membrane 4 on their front side 3 and to the back mass 6 on their opposite side 5.
  • Plastic composite elements 8 are arranged between the eight transducer elements 2 to space them apart.
  • the ultrasonic transducer arrangement 1 includes only one flex film 12, which is referred to as the second flex film 12.
  • the second flex foil 12 is arranged between the converter elements 2 and the back mass 6 and contacts the converter elements 2 individually on side surfaces 7, 9, which are neither the front sides 3 nor the opposite sides 5, and form the main surfaces of the converter elements 2.
  • the flex film 12 has contact surfaces 22, 24, which are guided to the side surfaces 7, 9.
  • the contact surfaces 22, 24 are coated surfaces of the transducer elements 2, which are contacted by the flex film 12.
  • the illustrated electrical contact transverse to the main vibration direction of the transducer element 2 is also referred to as so-called 3-1 contact.
  • the converter elements 2 are attached directly to the membrane 4 by means of an adhesive 17 .
  • the coupling between the transducer elements 2 and the membrane 4 can be direct or indirect, with indirect contact denoting that at least one layer of a further material is arranged between the transducer elements 2 and the membrane 4 .
  • the adhesive 17 can be such a layer.
  • layers of liquid such as oil or gel may be provided to improve acoustic coupling.
  • the second flex film 12 is attached to the backing mass 6 by means of a further adhesive 20 .
  • the array 15 includes figure 2 the transducer elements 2, the plastic composite elements 8, the second flex foil 12 and the backing mass 6. Between the array 15 and the membrane 4, as with reference to FIG figure 1 described, there is a mechanical coupling, for example by screwing or clamping the array 15 in the membrane 4, suitable means for this purpose not being shown. Provision can likewise advantageously be made for the membrane 4 to be thinner in the contact area 32 than outside the contact area 32, so that the array 15 in the contact area 32 is at least partially countersunk in the membrane 4.
  • the ultrasonic transducer arrangement 1 shown in a lateral sectional view according to a second embodiment of the invention again comprises, for example, eight transducer elements 2 arranged next to one another at a distance from one another, which are each coupled to the membrane 4 on their end face 3 and to individual rear masses 6 on their opposite side 5.
  • Plastic composite elements 8 are arranged between the eight transducer elements 2 to space them apart.
  • the ultrasonic transducer arrangement 1 comprises a rear mass 6 and a front mass 26 for each transducer element 2, between which the respective transducer element 2 is arranged.
  • the exemplary embodiment shown again comprises two flex foils 10, 12, the first flex foil 10 being arranged between the transducer elements 2 and the membrane 4 and the converter elements 2 are each individually contacted at the front masses 26, which for this purpose have conductor tracks or are made of a conductive material.
  • the first flex film 10 is in turn attached to the membrane 4 by means of the conductive adhesive 14 .
  • the coupling between the first flex foil 10 and the membrane 4 can be direct or indirect, as with reference to FIG figure 1 described.
  • the first flex foil 10 is also attached to the front masses 26 by means of a conductive adhesive, which is not shown.
  • the second flex foil 12 is arranged between the transducer elements 2 and the rear masses 6 and contacts the transducer elements 2 individually via the sides 5 opposite the end faces 3.
  • the second flex foil 12 is in turn attached to the rear masses 6 by means of a second conductive adhesive 28.
  • the converter elements 2 are each electrically contacted individually on the rear masses 26, which for this purpose have conductor tracks or are made of a conductive material.
  • the array 15 includes in the in figure 3 illustrated embodiment, the transducer elements 2, the plastic composite elements 8, the flex foils 10, 12 and the rear masses 6. Between the array 15 and the membrane 4, as with reference to figure 1 described, there is a mechanical coupling, for example by screwing or clamping the array 15 in the membrane 4, suitable means for this purpose not being shown. In turn, it can advantageously be provided that the membrane 4 is thinner in the contact area 32 than outside of the contact area 32, so that the array 15 in the contact area 32 is at least partially countersunk in the membrane 4.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Claims (7)

  1. Ensemble de transducteurs à ultrasons (1) conçu pour envoyer et/ou recevoir des signaux ultrasonores, ledit ensemble comprenant au moins deux éléments transducteurs (2), une membrane (4) et au moins une masse arrière (6), les au moins deux éléments transducteurs (2) étant disposés à distance l'un de l'autre et étant accouplés directement ou indirectement à la membrane (4) sur une face frontale (3) et accouplés directement ou indirectement à l'au moins une masse arrière (6) sur une face opposée (5),
    caractérisé en ce que la membrane (4) est formée par une peau extérieure d'un pare-chocs, d'un rétroviseur ou d'une zone de porte d'un véhicule automobile, les éléments transducteurs (2) étant disposés en étant cachés derrière la peau extérieure,
    l'ensemble de transducteurs à ultrasons (1) comportant 2 à 50 éléments transducteurs (2), un premier film souple (10) étant disposé entre les éléments transducteurs (2) et la membrane (4) pour venir en contact avec les éléments transducteurs (2).
  2. Ensemble de transducteur à ultrasons (1) selon la revendication 1, caractérisé en ce que la membrane (4) a une épaisseur comprise entre 0,1 mm et 5 mm.
  3. Ensemble de transducteurs à ultrasons (1) selon l'une des revendications précédentes, caractérisé en ce que les éléments transducteurs (2) sont espacés les uns des autres par des éléments composites (8) en matière synthétique.
  4. Ensemble de transducteurs à ultrasons (1) selon l'une des revendications précédentes, caractérisé en ce qu'au moins une masse avant (26) est couplée au premier film souple (10) et la masse avant (26) est disposée entre les éléments transducteurs (2) et le premier film souple (10).
  5. Ensemble de transducteurs à ultrasons (1) selon l'une des revendications précédentes, caractérisé en ce que les éléments transducteurs (2) sont collés à un deuxième film souple (12) sur la face opposée (5).
  6. Procédé de fabrication d'un ensemble de transducteurs à ultrasons (1) qui est conçu pour envoyer et/ou recevoir des signaux ultrasonores, notamment un ensemble transducteur à ultrasons (1) selon l'une des revendications 1 à 5, ledit procédé comprenant les étapes suivantes :
    a) réaliser un réseau (15) comprenant au moins deux éléments transducteurs (2) qui sont disposés à distance l'un de l'autre et qui sont accouplés directement ou indirectement à au moins une masse arrière (6) sur une face (5) opposée à une face frontale (3),
    b) fixer le réseau (15) à une membrane (4) qui est formée par une peau externe d'un composant, les au moins deux éléments transducteurs (2) étant accouplés directement ou indirectement à la membrane (4) sur la face frontale (3),
    caractérisé en ce que la membrane (4) est formée par une peau extérieure d'un pare-chocs, d'un rétroviseur ou d'une zone de porte d'un véhicule automobile, les éléments transducteurs (2) étant disposés en étant cachés derrière la peau extérieure, l'ensemble de transducteurs à ultrasons (1) comportant 2 à 50 éléments transducteurs (2), un premier film souple (10) étant disposé entre les éléments transducteurs (2) et la membrane (4) pour venir en contact avec les éléments transducteurs (2).
  7. Véhicule automobile comprenant un pare-chocs, un rétroviseur ou une portion de porte et un ensemble de transducteur à ultrasons (1) selon l'une des revendications 1 à 5.
EP14714704.5A 2013-06-20 2014-04-02 Ensemble transducteur ultrasonore et véhicule automobile pourvu d'un ensemble transducteur ultrasonore Active EP3010649B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013211612.8A DE102013211612A1 (de) 2013-06-20 2013-06-20 Ultraschallwandleranordnung und Kraftfahrzeug mit einer Ultraschallwandleranordnung
PCT/EP2014/056577 WO2014202248A1 (fr) 2013-06-20 2014-04-02 Ensemble transducteur ultrasonore et véhicule automobile pourvu d'un ensemble transducteur ultrasonore

Publications (2)

Publication Number Publication Date
EP3010649A1 EP3010649A1 (fr) 2016-04-27
EP3010649B1 true EP3010649B1 (fr) 2022-03-02

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Application Number Title Priority Date Filing Date
EP14714704.5A Active EP3010649B1 (fr) 2013-06-20 2014-04-02 Ensemble transducteur ultrasonore et véhicule automobile pourvu d'un ensemble transducteur ultrasonore

Country Status (4)

Country Link
EP (1) EP3010649B1 (fr)
CN (1) CN105636711A (fr)
DE (1) DE102013211612A1 (fr)
WO (1) WO2014202248A1 (fr)

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Publication number Priority date Publication date Assignee Title
JPS6477299A (en) * 1987-09-18 1989-03-23 Toshiba Corp Ultrasonic probe
DE69111151T2 (de) * 1990-08-10 1996-02-15 Sekisui Plastics Schallemissionsfühler.
US6225728B1 (en) 1994-08-18 2001-05-01 Agilent Technologies, Inc. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US5691960A (en) 1995-08-02 1997-11-25 Materials Systems, Inc. Conformal composite acoustic transducer panel and method of fabrication thereof
JP4294798B2 (ja) * 1998-07-16 2009-07-15 マサチューセッツ・インスティテュート・オブ・テクノロジー 超音波トランスデューサ
DE10361316B4 (de) * 2003-12-19 2015-08-27 Valeo Schalter Und Sensoren Gmbh Ultraschallwandlervorrichtung
JP4347885B2 (ja) * 2004-06-03 2009-10-21 オリンパス株式会社 静電容量型超音波振動子の製造方法、当該製造方法によって製造された静電容量型超音波振動子を備えた超音波内視鏡装置、静電容量型超音波プローブおよび静電容量型超音波振動子
US7545075B2 (en) * 2004-06-04 2009-06-09 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same
US20090082673A1 (en) * 2007-09-26 2009-03-26 Xuanming Lu Semiconductor matching layer in a layered ultrasound transducer array
DE102010018993B4 (de) * 2010-05-03 2021-04-01 Valeo Schalter Und Sensoren Gmbh Ultraschallsensor, zugehöriges Herstellungsverfahren und Umfelderkennungssystem
CN202686117U (zh) * 2012-06-13 2013-01-23 浙江吉利汽车研究院有限公司杭州分公司 一种汽车防碰撞预警装置

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Publication number Publication date
EP3010649A1 (fr) 2016-04-27
DE102013211612A1 (de) 2014-12-24
WO2014202248A1 (fr) 2014-12-24
CN105636711A (zh) 2016-06-01

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