EP2972129A1 - Thermal flow sensor for determining a gas or the composition of a gas mixture and the flow speed of the gas or the gas mixture - Google Patents
Thermal flow sensor for determining a gas or the composition of a gas mixture and the flow speed of the gas or the gas mixtureInfo
- Publication number
- EP2972129A1 EP2972129A1 EP14706560.1A EP14706560A EP2972129A1 EP 2972129 A1 EP2972129 A1 EP 2972129A1 EP 14706560 A EP14706560 A EP 14706560A EP 2972129 A1 EP2972129 A1 EP 2972129A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- gas
- gas mixture
- flow sensor
- thermal flow
- heating structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
Definitions
- Thermal flow sensor for determining a gas or the composition of a gas mixture, and its flow velocity
- the invention relates to a thermal flow sensor for determining a gas or the composition of a gas mixture, as well as its
- Thermal flow sensors are well known in the art.
- Such sensors are used, for example, to determine a
- Properties of the gas to react by being used is an accurate or accurate determination of the flow rate as the thermal changes
- Flow sensor is recalibrated.
- a further sensor is used for this purpose, which instead of the flow velocity determines the present gas or the composition of the gas mixture so as to determine the thermal properties of the gas or gas mixture on which the determination of the flow velocity is based.
- this requires a further sensor without which recalibration would not be feasible.
- a recalibration can be carried out by means of special software.
- the present gas or the composition of the gas mixture must be entered into the software.
- the disadvantage is thus that a further step on the part of the operator, namely the manual input, must be performed.
- the object is achieved by a thermal flow sensor and a flow meter.
- the thermal flow sensor for determining a gas or the Composition of a gas mixture, and its flow rate comprises:
- At least one heating structure which is applied to the first dielectric layer and serves to heat the gas or the gas mixture
- At least one first temperature sensor element which is applied to the first dielectric layer at a distance from the heating structure and detects the temperature of the gas or gas mixture heated on the heating structure;
- control device which controls the heating structure in a first operating state such that the heating structure has a predetermined temperature and in a second operating state controls the heating structure in such a way that a power supplied to the heating structure corresponds to a predetermined power
- An evaluation unit which determines by means of the operating conditions, at least one physical property of the present gas or the gas mixture (2) and determines based on this physical property, the present gas or the composition of the gas mixture (2) and its flow velocity.
- the object is achieved in that the thermal
- Flow sensor determines the present gas or the composition of the gas mixture and at the same time the flow rate depending on the gas present or the composition of the gas mixture.
- the thermal flow sensor determines a physical property, preferably the thermal conductivity, of the gas or gas mixture and determines by means of which the present gas or gas mixture and its flow velocity.
- Composition of the gas mixture can be avoided, since a change in the gas or the composition of the gas mixture also leads to a change in the thermal conductivity by which the present gas or gas mixture is determined.
- the thermal flow sensor to a control device which is switchable at least between two operating states, wherein in the second
- the power supplied to the heating structure is constantly controlled to a predetermined power, so as to determine the present gas or the composition of a gas mixture and in the first operating state based on the determined present gas or the determined composition of a gas mixture regulates the temperature of the heating structure such that the Heating structure a predetermined Temperature, so that the gas to be heated or gas mixture corresponds at least in the area around the heating structure of a predetermined gas temperature.
- the regulating device regulates the temperature of the heating structure, for example by means of a DC voltage signal or alternatively an AC voltage signal,
- the heating structure has a predetermined temperature.
- DC voltage signal can be set the predetermined temperature directly by the DC signal, whereas in an AC signal, the predetermined temperature can be set on the average value of the AC signal.
- the thermal flow sensor is thus self-calibrating. In this way, a false measurement of the flow velocity can be avoided when the
- composition of the gas mixture on the basis of the measured thermal conductivity determined in terms of concentration and that for the concentration determination of the
- composition of the gas mixture the individual components of the gas mixture of the evaluation must be known.
- concentration determination of the composition of the gas mixture to 5% accuracy, the
- Flow rate can be determined to 10% of the measured value, preferably 5% of the measured value.
- thermal flow sensors for example, in
- Biogasanalgen be used to determine there in addition to the flow rate and the volume fraction of methane, so that it can be concluded on the calorific value of the gas.
- Composition of a gas mixture is also advantageous in the field of medical technology, for example in spirometers for checking lung function and vital capacity. • In the area of air conditioning technology, it is also conceivable to measure the amount of air and the composition (CO content) of the air flowing out of the room at the same time, in order to allow an optimal admixing of fresh air.
- a further advantageous embodiment provides that the substrate has a recess at least in a first region, such that the first dielectric layer forms a membrane on the substrate at least in the first region and that the at least one heating structure in the first region acts as a membrane formed first dielectric layer is arranged.
- the heating structure is better thermally decoupled from the rest of the sensor, so as to be able to perform the most sensitive, fast and accurate measurement.
- Temperature sensor element is applied to the first dielectric layer.
- the embodiment provides that the heating structure along a
- the embodiment provides that the second temperature sensor element is formed from a material which has a
- Resistance temperature coefficient in the range of 1000-1 1000 ppm / Kelvin preferably in the range of 2000-11000 ppm / Kelvin, more preferably in the range of 3000-1 1000 ppm / Kelvin.
- the heating structure and the first temperature sensor element are each formed from a material having a resistance temperature coefficient in the range of 1000-1 1000 ppm / Kelvin, preferably in the range of 2000-11000 ppm / Kelvin, particularly preferred in the range of 3000-1000 ppm / Kelvin.
- the embodiment provides that the
- Heating structure made of nickel or platinum is formed.
- the measurement of the temperature can be saved directly to the heating structure, as this temperature on the ohmic resistance of the heating structure and the can calculate known value of the resistance-temperature coefficient and thus can be determined.
- the heating structure and the first temperature sensor element is made of one and the same material, preferably platinum. It is also conceivable, however, for the heating structure made of platinum and the first temperature sensor element made of nickel to be made of different materials.
- the control device keeps the ratio between the supplied power and the predetermined temperature substantially constant. In this way, the measurement result disturbing influences, such as. Temperature fluctuations,
- Temperature sensor element bypassing gas by means of at least a first response signal and a second response signal detects that the first response signal originates from the first temperature sensor element and the second response signal from the second temperature sensor element.
- the embodiment provides that the evaluation unit for determining the flow velocity compares the first and / or second response signal with first reference values. It is further provided that the evaluation unit for determining the present gas or the composition of the gas mixture compares the first and / or second response signal with second reference values.
- This alternating voltage signal is used to generate a phase shift between the excitation signal and the first and / or second response signal that the evaluation unit determines the phase shift between the excitation signal and the first and / or second response signal.
- the evaluation unit performs a verification or verification of the previously determined gas or the previously determined composition of the gas mixture and its flow rate. As an alternative to the just described verification or verification, it may be provided that the evaluation unit is based on the
- Phase shift determines a further physical property of the present gas or gas mixture.
- the further physical property represents the thermal diffusivity of the present gas or gas mixture.
- the thermal conductivity the specific thermal conductivity, can also be used.
- Heat capacity, the density and the dynamic or kinematic viscosity are determined.
- first dielectric layer and / or the second dielectric layer have a layer thickness of less than 100 micrometers, preferably less than 50 micrometers, more preferably less than 15 micrometers exhibit.
- the layer thickness both in the first dielectric layer and in the second dielectric layer represents a compromise between mechanical stability and the heat transfer through these layers.
- first and the second dielectric layer are formed from the same material.
- the first and second dielectric layers are formed of a polymer.
- the object is achieved by a flow meter with a thermal flow sensor according to at least one of the preceding embodiment.
- FIG. 1 shows a cross section of an embodiment of the invention.
- FIG. 2 shows an electrical circuit diagram of the control device and a voltage divider which serves to detect a response signal
- FIG. 3 a first measuring curve comprises the first reference values
- FIG. 1 shows a cross section of an embodiment of the invention
- the thermal flow sensor 1 a substrate 3, on which a first dielectric layer 6 is applied. Furthermore, the substrate 3 has a recess 5 in a first region 4, so that the first dielectric layer in the first region 4 forms a membrane 7 on the substrate 3. On this membrane 7, a heating structure 8 is applied such that it extends between a first and a second temperature sensor element 9, 10 along the flow direction of
- Gas or the gas mixture 2 is located and serves to heat the gas or gas mixture 2.
- the two temperature sensor elements 9, 10 are likewise applied to the first dielectric layer 6 and preferably arranged such that they lie in the first region 4. By means of these two temperature sensor elements 9, 10, the temperature of the heated gas to the heating structure 8 or gas mixture 2 is detected.
- a second dielectric layer 16 is applied to the first dielectric layer 6. To determine a gas or the composition of a gas mixture 2, the the side facing away from the substrate 3 of the second dielectric layer 18 exposed to the flowing gas or gas mixture 2.
- the thermal flow sensor 1 further comprises a control device 1 1, which controls the heating structure 8 with an excitation signal 12 and in a first
- Operating state controls such that the heating structure has a predetermined temperature and the heating structure 8 controls in a second operating state such that a power supplied to the heating structure 8 is controlled substantially to a predetermined power.
- the control device thus controls by means of the heating structure in the first operating state, the gas temperature of the gas or gas mixture to the predetermined temperature.
- the control device In the second operating state, the control device essentially regulates the power supplied to the heating structure to the predetermined power, which is typically constant at least in the mean value.
- the excitation signal 13 represents an alternating voltage signal which, for example, has an excitation frequency of 1 Hz.
- the predetermined temperature in the first operating state represents a constant excess temperature of the gas or gas mixture relative to the ambient temperature in the range of 120 ° C and if the predetermined power in the second operating state has a peak-to-peak value of 20 mW (milliwatts).
- the excitation frequency, the predetermined temperature and the peak-to-peak value of the alternating voltage signal can vary depending on the gas or gas mixture 2 present.
- the control device 1 1 holds in a third operating state, the ratio between the supplied power and the predetermined temperature substantially constant.
- control device 1 1 is designed to be switchable, so that it can be switched between the individual operating states.
- the thermal flow sensor 1 in addition to an evaluation unit 12, by means of the individual operating conditions, at least the present gas or the composition of the gas mixture 2, and the
- the thermal flow sensor measures the thermal conductivity of the gas or
- the evaluation unit 12 detects the temperature of the gas or gas mixture 2 flowing past the first temperature sensor element 9 by means of a first response signal 14 and the temperature of the gas or gas mixture 2 flowing past the second temperature sensor element 10 by means of a second response signal 15
- Flow rate compares the evaluation unit 12 either the first Response signal 14 with first reference values 16 or the second response signal 15 with the first reference values 16 individually or else the first and the second
- the evaluation unit 12 compares either the first response signal 14 with second reference values 17 or the second response signal 15 with the second reference values 17 or the first and the second response signal 14, 15 with the second reference values 17, the first reference values 16 differing from the second reference values 17.
- the composition of the gas mixture 2 which is preferably a binary gas mixture, such as, for example, an argon-helium mixture, the must
- Evaluation unit 12 the individual components, so in the case of helium and argon, be known so that the concentration composition of the (binary)
- FIG. 2a shows an electrical circuit diagram of the control device 1 1 and Fig. 2b) a voltage divider which serves to detect the response signals 14, 15.
- Control device 1 1 represents in the simplest case, a voltage divider, wherein the ohmic heating resistor of the heating structure 8 is shown with R H and the heating resistor is a series resistor RVH upstream of the heating structure 8.
- Total voltage for the heating structure U H can thus generate the excitation signal 13, which as already mentioned represents an AC signal having a peak-peak value of 20 mW.
- excitation signal 13 comes both a sine wave voltage, a square wave voltage as well as any other form of a
- Fig. 2b shows a voltage divider which serves to detect a response signal 14, 15.
- the evaluation unit 12 thus comprises at least one voltage divider for each temperature sensor element 9, 10.
- FIG. 2b) shows the ohmic resistance of the temperature sensor element with R T.
- the voltage divider comprises a series resistor RVT and is operated with a total voltage UT, wherein the total voltage U T represents a DC voltage.
- the first response signal 14 is tapped off over the resistance of the temperature sensor element RT.
- 3 shows a first measurement curve, which comprises the first reference values 16 required for determining the flow velocity of the gas or of the gas mixture 2.
- 4 shows a second measuring curve on the basis of which the determination of the present gas or the composition of the gas mixture 2 can be carried out.
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- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013102398.3A DE102013102398B8 (en) | 2013-03-11 | 2013-03-11 | Thermal flow sensor for determining the composition of a gas mixture and its flow velocity |
PCT/EP2014/053533 WO2014139786A1 (en) | 2013-03-11 | 2014-02-24 | Thermal flow sensor for determining a gas or the composition of a gas mixture and the flow speed of the gas or the gas mixture |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2972129A1 true EP2972129A1 (en) | 2016-01-20 |
Family
ID=50179605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14706560.1A Ceased EP2972129A1 (en) | 2013-03-11 | 2014-02-24 | Thermal flow sensor for determining a gas or the composition of a gas mixture and the flow speed of the gas or the gas mixture |
Country Status (4)
Country | Link |
---|---|
US (1) | US10101285B2 (en) |
EP (1) | EP2972129A1 (en) |
DE (1) | DE102013102398B8 (en) |
WO (1) | WO2014139786A1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102271697B1 (en) * | 2016-08-18 | 2021-07-02 | 네바다 나노테크 시스템즈 인코포레이티드 | Systems and methods for determining at least one property of a substance |
EP4122515A1 (en) * | 2016-09-16 | 2023-01-25 | Fisher & Paykel Healthcare Limited | Thermistor flow sensor having multiple temperature points |
EP4141430A1 (en) * | 2018-01-05 | 2023-03-01 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Evaluation arrangement for a thermal gas sensor, method and computer program |
EP3735581B1 (en) | 2018-01-05 | 2022-07-20 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Gas sensor, and method for operating the gas sensor |
EP3783275A1 (en) * | 2019-08-21 | 2021-02-24 | Grundfos Holding A/S | Pump system |
US11073415B2 (en) | 2019-10-21 | 2021-07-27 | Flusso Limited | Thermal fluid flow sensor having a dielectric membrane comprising discontinuities between the heating element and an edge |
DE102021112183A1 (en) | 2021-05-10 | 2022-11-10 | Endress+Hauser SE+Co. KG | Measuring system for mass flow measurement |
US11867648B2 (en) * | 2021-06-22 | 2024-01-09 | Flusso Limited | Thermal fluid sensor with encapsulated fluid region |
DE102021133787A1 (en) | 2021-12-20 | 2023-06-22 | Endress+Hauser SE+Co. KG | Detection of foreign bodies in flowing measurement media |
DE102022132794A1 (en) | 2022-12-09 | 2024-06-20 | Endress+Hauser Flowtec Ag | Procedure for online testing of an automation field device |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5117691A (en) | 1990-03-12 | 1992-06-02 | The John Hopkins University | Heated element velocimeter |
DE10063752A1 (en) | 2000-12-21 | 2002-06-27 | Bosch Gmbh Robert | Method and device for determining the throughput of a flowing medium |
DE50209352D1 (en) | 2002-08-22 | 2007-03-15 | Ems Patent Ag | Thermal gas flow meter with gas quality indicator |
US20080034861A1 (en) | 2006-08-11 | 2008-02-14 | Anasphere, Inc. | Multiple-mode heated semiconductor anemometer |
DE102007033144B4 (en) | 2007-07-13 | 2020-09-24 | Vitesco Technologies GmbH | Sensor for measuring the hydrocarbon content in a gas flow in a purge line |
DE102010030952B4 (en) | 2010-07-05 | 2022-05-25 | Innovative Sensor Technology Ist Ag | Device for determining and/or monitoring a volume flow and/or a flow rate |
DE102011075519A1 (en) | 2011-05-09 | 2012-11-15 | Innovative Sensor Technology Ist Ag | Method for determining mass flow rate of e.g. gas in main pipe, involves determining value of thermal characteristics of medium, so that flow rate value is determined based on amplitudes under consideration of thermal characteristics value |
DE102011081923B4 (en) | 2011-08-31 | 2017-02-09 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Sensor chip for determining a flow parameter of a gas and method for determining the same |
-
2013
- 2013-03-11 DE DE102013102398.3A patent/DE102013102398B8/en active Active
-
2014
- 2014-02-24 EP EP14706560.1A patent/EP2972129A1/en not_active Ceased
- 2014-02-24 WO PCT/EP2014/053533 patent/WO2014139786A1/en active Application Filing
- 2014-02-24 US US14/773,802 patent/US10101285B2/en active Active
Non-Patent Citations (2)
Title |
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None * |
See also references of WO2014139786A1 * |
Also Published As
Publication number | Publication date |
---|---|
US10101285B2 (en) | 2018-10-16 |
DE102013102398B4 (en) | 2024-05-02 |
DE102013102398A1 (en) | 2014-09-11 |
WO2014139786A1 (en) | 2014-09-18 |
DE102013102398B8 (en) | 2024-06-27 |
US20160025660A1 (en) | 2016-01-28 |
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