EP2927501B1 - Method and system for determining and evaluating the installation orientation of a device - Google Patents

Description

The present invention relates to a method and a system for determining and evaluating the installation orientation of a device, in particular a device, such as a pump or vacuum pump. In a variety of facilities of the type mentioned must be considered for optimum operation their spatial position or orientation. This applies, inter alia, to certain pumps, in particular vacuum pumps.
Such a pump may in particular comprise a rotor shaft which is rotatable about a rotor axis and a delivery pump for conveying an operating means, in particular a lubricant, with which a rotary bearing serving for the rotatable support of the rotor shaft is supplied. A pump of this type is usually used for pumping or evacuating a recipient. For this purpose, the pump has a flange, via which it is connected to the recipient. However, it should be noted with certain pumps that these can not be connected to the recipient in every position and put into operation. For example, there are also pumps that can only be operated with a substantially upwardly oriented flange. If these pumps with downwardly pointing flange or upside down connected to a recipient and put into operation, so the equipment can not circulate between the feed pump and the pivot bearing, as fed back by gravity from the pivot bearing to the feed pump resources on the Head pump can not flow back to the feed pump. As a result, the pump could be damaged in overhead operation.

In contrast, other pumps must be connected with downwardly directed flange or upside down to a recipient, provided that the equipment can be conveyed back to the feed pump only in this position of gravity from the pivot bearing.

In the WO 2014/026779 A1 a method for operating an electronic control unit is described in which by means of at least one sensor, the installation location of the control unit is determined and it is decided depending on the determined installation location, whether the control unit may be operated or not. In this case, the environmental conditions at the installation site can be taken into account when deciding whether the control unit may be operated at the installation location or not. In addition, the constructive circumstances of the control unit can be taken into account in the relevant decision. The relevant sensor can be designed so that it independently determines the installation position of the control unit at its installation location. The controller may be part of a stationary implement or a mobile work vehicle for controlling the operation of the implement or work vehicle.

In the CN 201908851 U a molecular pump with associated detectors is described by which the respective tilt angle or rotation angle of the pump is detected. The respective angles are reproduced on a display provided on the outside of the pump. Via a control unit, the power supply to a magnetic bearing of the pump is controlled accordingly.

In the older publication WO 2014/068277 A1 a vacuum pump with associated position detector is described by which the respective orientation of the vacuum pump can be determined. About a control unit is a drive of Pump controllable depending on the detected pump orientation. The drive is only activated for normal operation if the determined orientation of the pump represents a permissible orientation.

The invention has for its object to provide a method and a system of the type mentioned, with which even with different installation orientations of the device always ensures optimum operation and ensures that the device is not taken in improper manner in operation.

This object is achieved by a method having the features of claim 1 and a system having the features of claim 7. Preferred embodiments of the method according to the invention and preferred embodiments of the system according to the invention are specified in the subclaims.

The device comprises a pump and a device for the pump, namely an auxiliary device connected thereto. The pump may e.g. be a vacuum pump. For example, it may be a lubricant-laden turbomolecular pump, one-stage or multi-stage Roots piston, rotary piston, screw or side channel pump. The device or the auxiliary device may be, for example, a lubricant pump of a vacuum pump. The device may also be a vacuum device, such as a vacuum device. a pressure gauge, vacuum gauge, gas analyzer or leak detector.

In accordance with the method according to the invention, the current installation orientation of the device is detected by at least one position detector associated with the device and is checked by means of a control and / or evaluation unit as to whether the device may be operated in the detected positional orientation. If necessary, but not mandatory, it can also be determined under which conditions the device is operable, wherein the device comprises a pump, in particular a vacuum pump, and except the pump an auxiliary device connected thereto, in particular a lubricant pump, and detects the current installation orientation of both the pump and the auxiliary device connected thereto by at least one position detector becomes.

A position detector is, in the context of the present disclosure, a device of basically arbitrary design and arrangement capable of detecting or determining at least one parameter whose value depends on the orientation of the associated device in space, i. which also changes when the orientation changes. The position detector may be e.g. be a comparatively compact, for example in the form of a component present sensor, but also a not necessarily spatially concentrated or physical device such. an evaluation program that can evaluate, for example, already detected current values and then investigate whether the current measurements have orientation-dependent properties. For example, the position detector may be designed as an acceleration sensor or may be capable of detecting an increased quiescent current in an actively controlled magnetic bearing (magnetic bearing).

By the invention it is ensured that in such installation orientations of the device in which a reliable operation is not possible, the device is not put into operation in an inadmissible manner. In addition, in cases in which commissioning is possible in principle, given the particular installation orientation, it is ensured that the device can be put into operation under the respectively optimum conditions.

Preferably, an error message is generated by means of the control and / or evaluation unit in the event that it has been determined that the device may not be operated in the detected positional orientation. Such an error message can in particular be generated acoustically and / or optically and / or by electronic data transmission, eg in the form of an error telegram.

With such an error message to the operator is signaled that the device occupies an improper installation orientation, whereupon the device can be aligned correctly.

In particular, it is also advantageous if, by means of the control and / or evaluation unit, it has also been determined in the event that it has been determined that the device may be operated in the detected positional orientation, besides determining the conditions under which the device can be operated whether the operation of the device in the recorded position orientation and under the relevant conditions corresponds to a normal and correspondingly uncritical operation or represents a particularly critical limit case.

Although the device can be put into operation in both cases. In the mentioned critical limiting case, however, e.g. be promptly ensured that optimal conditions or optimal location orientation of the device is brought about again.

In this case, by means of the control and / or evaluation unit in the event that it has been determined that the operation of the device in the detected position orientation and under the relevant conditions represents a particular critical limit case, advantageously a particular qualified warning message can be generated.

By signaling the operator also such a critical limit case and possibly specified, the staff can also promptly provide for appropriate remedy.

A further preferred embodiment of the method according to the invention is characterized in that the determination of the conditions under which the device is operable, the determination of a power limit for the device dependent on the detected positional orientation, the determination of a quiescent current dependent on the detected positional orientation for at least one Magnetic bearing of the device, and / or the determination of a dependent of the detected position orientation cooling of at least a portion of the device comprises.

Thus, e.g. be taken into account, inter alia, the fact that in different situations a different quiescent current in the respective camps is required to carry, for example, a rotor mass. It may also be useful in particular, depending on the orientation of the device to use a different thermal characteristics, since the quiescent currents or DC components heat the lossy bearings and accordingly depending on the orientation, location and / or orientation of the device, the heat input into the overall system, inter alia different efficiencies of the types of storage can be distributed differently as well as completely different.

In addition, the fact may be taken into account, in particular, that with different installation orientations of the device, its cooling can be accomplished differently. For example, at given temperature limits, a pump may pump different amounts of gas at different mounting orientations until it begins to regulate the speed or power in the range of warning thresholds or error limits.

In particular, in so-called double-flow lubricant pumps, which may be associated with a vacuum pump, for example, an all-layer capability of the arrangement is generally relatively difficult to achieve. lubricant pumps are often mounted rotated by 180 ° depending on the application, whereas the corresponding delivery channels are provided on the vacuum pump for both types of installation. The unused conveyor channels are closed by seals.

With the application of the method according to the invention e.g. On such a pump, therefore, the security can be increased that the operator operates the vacuum or turbomolecular pump in the right direction and / or the lubricant pump is mounted correctly after a service again. It is advantageous if the position detector is arranged in the lubricant pump. The position detector is then rotated correctly to the installation position so that it is also possible to change the prescribed pump orientation in the field without having to change the parameterization or setting.

According to a further expedient practical embodiment of the method according to the invention, the current installation orientation of the device is detected by at least one switching device associated with the device, in particular liquid-level switch, or at least one acceleration sensor, in particular a micro-electro-mechanical acceleration sensor.

The system according to the invention for determining and evaluating the installation orientation of a device with a pump or vacuum pump and a device serving to control, regulate and / or switch certain properties and / or functions of the pump, namely an auxiliary device connected thereto, comprises at least one device associated with the device Position detector for detecting the current installation orientation of the device and a responsive to the output signals of the position detector control and / or evaluation, which is designed to automatically check whether the device may be operated in the detected position orientation, and optionally automatically determine, under which conditions the device can be operated on.

In this case, the device comprises a pump, in particular a vacuum pump and, apart from the pump, an auxiliary device connected thereto, in particular a lubricant pump, at least one position detector of the pump and at least one position detector of the auxiliary device being associated.

In addition, the control and / or evaluation unit is preferably designed to generate an error message in the event that it has been determined that the device may not be operated in the detected positional orientation.

According to a further preferred practical embodiment of the system according to the invention, the control and / or evaluation unit is further designed, in the event that it has been determined that the device may be operated in the detected positional orientation, except for determining the conditions under which the device is also to determine whether the operation of the device in the recorded position orientation and under the relevant conditions corresponds to a normal and correspondingly uncritical operation or represents a particular critical borderline case.

Preferably, the control and / or evaluation unit is further designed to generate a particularly qualified warning message in the event that it has been determined that the operation of the device in the detected position orientation and under the relevant conditions is a particularly critical limit.

The determination by the control and / or evaluation unit of the conditions under which the device is operable preferably comprises the determination of a power limit for the device dependent on the detected positional orientation, the determination of a quiescent current dependent on the detected positional orientation for at least one, in particular actively controlled, magnetic bearing the device, and / or the determination of a dependent of the detected position orientation cooling at least a portion of the device.
As a respective position detector advantageously a switching sensor, in particular a single or multi-axis liquid storage switch, or an acceleration sensor, in particular a single or multi-axis micro-electro-mechanical acceleration sensor is provided.
As a pump, the device may in particular comprise a vacuum pump, which may in particular be a turbomolecular pump.
Furthermore, the device may comprise, in addition to the pump as an auxiliary device connected thereto, for example, a lubricant pump, wherein at least one position detector of the pump and at least one position detector of the lubricant pump is associated.
It is also particularly advantageous if at least one position detector is provided in control electronics associated with the device, at least one position detector in a particularly sealed assembly and / or at least one position detector on a board or the like.
Alternatively or additionally, for example, at least one position detector freely mounted within the device, at least one position detector in a molded assembly such as a motor stator, at least one position detector freely mounted outside the housing of the device and / or at least one position detector freely mounted within a device attached auxiliary device such as in particular be provided a vacuum pump associated with a lubricant pump.

It is also particularly advantageous if the system comprises an input interface connected to the control and / or evaluation unit, via which at least one reference value relating to the positional orientation of the device can be entered.

In this case, the relevant reference value can be input manually, for example via a data bus access or by means of an operating device. Although such a value serving as a reference for the control electronics can still be dependent on the accuracy of the information given by the operating personnel. However, advantages of the installation position evaluation can already be exploited, for example by raising performance limits or by triggering general operation release.

Optionally, by means of the control and evaluation at least partially, the conditions may be brought about or initiated, under which the device may be operated.

Fig. 1

eine schematische Darstellung einer beispielhaften Ausführungsform eines erfindungsgemäßen Systems,

Fig. 2

eine geschnittene Ansicht einer beispielhaften Ausführungsform einer Vakuumpumpe als Bestandteil einer beispielhaften Einrichtung, bei der das erfindungsgemäße System anwendbar ist,

Fig. 3

eine seitliche Außenansicht der Vakuumpumpe gemäß Fig. 2, deren Drehlager über eine seitlich neben der Rotorwelle angeordnete Förderpumpe mit Betriebsmittel versorgt wird,

Fig. 4

eine geschnittene Teilansicht der Vakuumpumpe gemäß Fig. 3,

Fig. 5

eine geschnittene Ansicht einer beispielhaften Ausführungsform der der Vakuumpumpe gemäß Fig. 4 zugeordneten Förderpumpe,

Fig. 6

eine geschnittene Ansicht eines Mündungsbereichs zweier Vorlaufkanäle, die in einem gemeinsamen Vorlauf der Vakuumpumpe gemäß Fig. 3 münden,

Fig. 7

eine beispielhafte Anordnung verschiedener Lager einer Vakuumpumpe in vertikaler Ausrichtung,

Fig. 8

die Lageranordnung gemäß Fig. 7, wobei die Vakuumpumpe im vorliegenden Fall jedoch horizontal ausgerichtet ist,

Fig. 9

eine schematische Darstellung einer beispielhaften Ausführungsform einer konvektionsgekühlten Einrichtung, bei der das erfindungsgemäße System anwendbar ist, und

Fig. 10

eine schematische Darstellung der konvektionsgekühlten Einrichtung gemäß Fig. 9 in einer anderen Orientierung.

Fig. 1 zeigt in schematischer Darstellung eine beispielhafte Ausführungsform eines zur Ausführung des erfindungsgemäßen Verfahrens geeigneten erfindungsgemäßen Systems 2 zur Ermittlung und Bewertung der Einbauorientierung einer Einrichtung 4, die eine Pumpe, insbesondere eine Vakuumpumpe, umfasst. Das System 2 umfasst wenigstens einen der Einrichtung 4 zugeordneten Lagedetektor 6 zur Erfassung der aktuellen Einbauorientierung der Einrichtung 4 sowie eine auf die Ausgangssignale 8 des Lagedetektors 6 ansprechende Steuer-und/oder Auswerteeinheit 10.
Dabei ist die Steuer- und/oder Auswerteeinheit 10 dazu ausgeführt, automatisch zu überprüfen, ob die Einrichtung 4 in der erfassten Lageorientierung betrieben werden darf, und gegebenenfalls automatisch zu ermitteln, unter welchen Bedingungen die Einrichtung 4 betreibbar ist.
Überdies kann die Steuer- und/oder Auswerteeinheit 10 dazu ausgeführt sein, in dem Fall, dass ermittelt wurde, dass die Einrichtung 4 in der erfassten Lageorientierung nicht betrieben werden darf, eine Fehlermeldung zu erzeugen.
Die Fehlermeldung kann insbesondere akustisch und/oder optisch und/oder per elektronischer Datenweitergabe (z.B. in Form eines Fehlertelegramms) generiert werden und über eine beispielsweise der Steuer- und/oder Auswerteeinheit 10 nachgeschaltete Wiedergabeeinheit 18 wiedergegeben werden.
Die Steuer- und/oder Auswerteeinheit 10 kann ferner ermitteln, ob der erlaubte Betrieb der Einrichtung 4 in der erfassten Lageorientierung und unter den betreffenden Bedingungen einem normalen bzw. unkritischen Betrieb entspricht oder einen Grenzfall darstellt.
Wenn dies der Fall ist, kann die Steuer- und/oder Auswerteeinheit 10 eine insbesondere qualifizierte Warnmeldung erzeugen.
Auch eine solche Warnmeldung kann insbesondere wieder akustisch und/oder optisch und/oder per elektronischer Datenweitergabe (z.B. in Form eines Fehlertelegramms) generiert und beispielsweise über eine der Steuer- und/oder Auswerteeinheit 10 nachgeschaltete Wiedergabeeinheit 18 wiedergegeben werden. Dabei kann für die Fehlermeldung und die Warnmeldung insbesondere ein und dieselbe Wiedergabeeinheit 18 verwendet werden. Grundsätzlich sind jedoch auch getrennte Wiedergabeeinheiten für die beiden Meldungen denkbar.
Die durch die Steuer- und/oder Auswerteeinheit 10 durchgeführte Ermittlung der Bedingungen, unter welchen die Einrichtung 4 betreibbar ist, kann insbesondere die Ermittlung einer Leistungsbegrenzung für die Einrichtung 4, die Ermittlung eines Ruhestroms für ein aktiv geregeltes Magnetlager der Einrichtung 4 und/oder die Ermittlung einer Kühlung wenigstens eines Bereichs der Einrichtung 4 umfassen.
Als Lagedetektor 6 kann beispielsweise ein Beschleunigungssensor vorgesehen sein.The invention will be explained in more detail below with reference to exemplary embodiments with reference to the drawing; in this show:

Fig. 1

a schematic representation of an exemplary embodiment of a system according to the invention,

Fig. 2

3 is a sectional view of an exemplary embodiment of a vacuum pump as part of an exemplary device to which the system according to the invention is applicable;

Fig. 3

a side outside view of the vacuum pump according to Fig. 2 , whose pivot bearing over a side next to the rotor shaft arranged delivery pump is supplied with equipment,

Fig. 4

a sectional partial view of the vacuum pump according to Fig. 3 .

Fig. 5

a sectional view of an exemplary embodiment of the vacuum pump according to Fig. 4 associated delivery pump,

Fig. 6

a sectional view of a mouth region of two flow channels, in a common flow of the vacuum pump according to Fig. 3 lead,

Fig. 7

an exemplary arrangement of different bearings of a vacuum pump in a vertical orientation,

Fig. 8

the bearing assembly according to Fig. 7 However, in the present case, the vacuum pump is oriented horizontally,

Fig. 9

a schematic representation of an exemplary embodiment of a convection-cooled device in which the inventive system is applicable, and

Fig. 10

a schematic representation of the convection-cooled device according to Fig. 9 in a different orientation.

Fig. 1 shows a schematic representation of an exemplary embodiment of an inventive system 2 suitable for carrying out the method according to the invention for determining and evaluating the installation orientation of a device 4, which comprises a pump, in particular a vacuum pump. The system 2 comprises at least one position detector 6 associated with the device 4 for detecting the current installation orientation of the device 4 and a control and / or evaluation unit 10 responsive to the output signals 8 of the position detector 6.
In this case, the control and / or evaluation unit 10 is designed to automatically check whether the device 4 may be operated in the detected position orientation, and optionally automatically determine under which conditions the device 4 is operable.
Moreover, the control and / or evaluation unit 10 may be designed to generate an error message in the event that it has been determined that the device 4 may not be operated in the detected positional orientation.
The error message can in particular be generated acoustically and / or optically and / or by electronic data transmission (eg in the form of an error telegram) and can be reproduced via a playback unit 18 which is connected downstream, for example, to the control and / or evaluation unit 10.
The control and / or evaluation unit 10 can also determine whether the permitted operation of the device 4 in the detected position orientation and under the relevant conditions corresponds to a normal or uncritical operation or represents a limiting case.
If this is the case, the control and / or evaluation unit 10 can generate a particularly qualified warning message.
Such a warning message can in particular be generated again acoustically and / or optically and / or by electronic data transmission (eg in the form of an error telegram) and reproduced, for example, via a playback unit 18 connected downstream of the control and / or evaluation unit 10. In this case, in particular one and the same display unit 18 can be used for the error message and the warning message. Basically, however, separate playback units for the two messages are conceivable.
The determination made by the control and / or evaluation unit 10 of the conditions under which the device 4 is operable, in particular the determination of a power limit for the device 4, the determination of a quiescent current for an actively controlled magnetic bearing of the device 4 and / or the Determining a cooling of at least a portion of the device 4 include.
As an attitude detector 6, for example, an acceleration sensor can be provided.

The device 4 can, for example, be a vacuum pump 20 and, as auxiliary device 22 connected thereto, a lubricant pump (cf. Fig. 3 to 6 ). In this case, according to the invention, a position detector 6 of the vacuum pump 20 and a position detector 6 of the lubricant pump 22 are assigned to monitor the positional orientation of the vacuum pump 20 and the positional orientation of the lubricant pump 22. In addition, the system 2 may include an input interface connected to the control and / or evaluation unit 10, via which a reference value relating to the positional orientation of the device 4 can be entered.

Fig. 2 shows a sectional view of a vacuum pump 20, namely a turbomolecular pump, as part of a device 4, in which the inventive system or the inventive method is applicable.

In the Fig. 3 is a lateral external view of this vacuum pump is shown, wherein also the rotary bearing is supplied via a laterally arranged next to the rotor shaft feed pump 110 with resources, which forms a further part of the device 4, in which the inventive system or the inventive method is applicable.

In the Fig. 4 is a partial sectional view of the vacuum pump according to Fig. 3 shown. A sectional view of an exemplary embodiment of the vacuum pump according to Fig. 4 associated feed pump 110 is in the Fig. 5 played. Fig. 6 shows a sectional view of a mouth region of two flow channels, which in a common flow of the vacuum pump according to Fig. 3 lead.

In the Fig. 2 The vacuum pump shown comprises a pump inlet 70 surrounded by an inlet flange 68 as well as a plurality of pumping stages for conveying the gas present at the pump inlet 70 to a pump inlet 70 Fig. 2 not shown pump outlet. The vacuum pump comprises a stator with a static housing 72 and a rotor arranged in the housing 72 with a rotor shaft 12 rotatably mounted about a rotation axis 14.

The vacuum pump is embodied as a turbomolecular pump and comprises a plurality of turbomolecular pump stages which are pump-connected in series with a plurality of turbomolecular rotor disks 16 connected to the rotor shaft 12 and a plurality of turbomolecular stator disks 26 arranged in the axial direction between the rotor disks 16 and fixed in the housing 72 held at a desired axial distance from each other are. The rotor disks 16 and stator disks 26 provide in the scoop region 50 an axial pumping action directed in the direction of the arrow 58.

The vacuum pump also comprises three radially arranged pumping stages in series with one another, connected in series with each other. The rotor-side part of the Holweck pump stages comprises a rotor hub 74 connected to the rotor shaft 12 and two cylinder shell-shaped Holweck rotor sleeves 76, 78 fastened to and supported by the rotor hub 74, which are oriented coaxially with the axis of rotation 14 and are nested one inside the other in the radial direction. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 80, 82 are provided, which are also oriented coaxially to the rotation axis 14 and are nested in the radial direction. The pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces opposite each other, forming a narrow radial Holweck gap, of a Holweck rotor sleeve 76, 78 and a Holweck stator sleeve 80, 82. In this case, one of the pump-active surfaces is in each case formed smoothly-in the present case that of the Holweck rotor sleeve 76 or 78 -and the opposite pump-active surface of the Holweck stator sleeve 80, 82 has a structuring with helically around the rotation axis 14 in the axial direction extending grooves, in which is driven by the rotation of the rotor, the gas and thereby pumped.

The vacuum pump includes a drive motor 104 for rotationally driving the rotor whose rotor is formed by the rotor shaft 12. A control unit 106 controls the motor 104.

The rotatable mounting of the rotor shaft 12 is effected by a designed as a rolling bearing pivot bearing 84 in the region of the pump outlet and a permanent magnet bearing 86 in the region of the pump inlet 70.

The permanent magnet bearing 86 comprises a rotor-side bearing half 88 and a stator bearing half 90, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 92, 94, wherein the magnetic rings 92, 94 opposite to form a radial bearing gap 96.

Within the magnetic bearing 86, an emergency or catch bearing 98 is provided, which is designed as an unlubricated roller bearing and runs empty in normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor relative to the stator engages to a radial stop form for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.

The pivot bearing 84 is supplied with a resource such as a lubricant. It can, how Fig. 2 shows, in the region of the pivot bearing 84 on the rotor shaft 12, a conical spray nut 100 may be provided with an increasing to the pivot bearing 84 outside diameter, with at least one scraper of a plurality of with a resource such as a lubricant, impregnated absorbent discs 102 comprising resource storage is in sliding contact. In operation, the resource is transferred by capillary action of the resource storage on the scraper to the rotating spray nut 100 and due to the centrifugal force along the spray nut 100 in the direction of increasing outer diameter of the spray nut 100 to the pivot bearing 84 out promoted, where there is, for example, a lubricating Function fulfilled.

At the in Fig. 3 shown illustration is - as in Fig. 2 - The inlet flange 68 of the pump directed upward and the axis of rotation 14 of in Fig. 3 not shown rotor shaft 12 is disposed at an angle of 0 degrees to the vertical. In this position, the pump is upright. Will the pump be against it turned upside down, so the inlet flange 68 down. The axis of rotation 14 is then at an angle to the vertical of 180 degrees.

The construction of the pump Fig. 3 corresponds to the construction of the pump of Fig. 2 , However, the pump is the Fig. 3 the rotary bearing 84 is supplied with operating means via a delivery pump 110 arranged laterally next to the rotor shaft 12, as with reference to FIGS Fig. 4 is carried out closer.

The feed pump 110 is designed to convey the operating medium into at least one feed 112, via which the operating medium is fed to the rotary bearing 84. For returning the equipment from the pivot bearing 84 to the feed pump, a first return 114 and a second return 116 are provided.

The first return 114 has laterally below the pivot bearing 84 a gap 118 which opens at its radially outer end into a first return passage 120, which is guided radially outwardly and downwardly to a first reservoir 122.

The supplied via the flow 112 resources enters the funnel-shaped memory 124 below the spray nut 100, as above with reference to Fig. 2 described that promotes equipment toward the rolling bearing 84, where it fulfills, for example, a lubricating function. From the roller bearing 84, the operating fluid drips off and, due to the effect of gravity, passes into the first reservoir 122 via the gap 118 and the first return passage 120.

In the presentation of Fig. 4 is the pump as in the representations of Fig. 2 and 3 upright. The in Fig. 4 not shown flange 68 is thus located at the top of the pump and the axis of rotation 14 of the rotor shaft 12th has an angle to the vertical of 0 °. Such an orientation of the pump is also referred to below as a spatial position of 0 °.

As Fig. 4 1, the feed pump 110 has a first inlet 126, via which the operating medium can pass from the first reservoir 122 into a first working space 128 of the feed pump. The first inlet 126 is formed in a partition wall 130, which separates the first reservoir 122 from the first working space 128. In addition, the first inlet 126 is located in the spatial position of 0 ° at the substantially lowest point in the partition wall 130, so that the resource can reach the first working space 128 even at a low level in the first reservoir 122.

The feed pump 110 will be described with reference to FIGS Fig. 5 described in more detail. The feed pump 110 is designed in the manner of a rotary vane pump and has a rotatable in a housing 132 about a rotational axis 134 rotor, which is hereinafter referred to as a conveyor rotor 136. In the conveyor rotor 136 radially movable slide 138 are arranged on centrifugal and spring force. Inside the housing 132 is the first working space 128, which is spatially limited by the housing 132, the conveyor rotor 136 and the respective moving in the direction of rotation 140 of the conveyor rotor slide 138.

If the conveying rotor 136 rotates in the conveying direction 140, the operating medium which has reached the first working space 128 via the first inlet 126 is conveyed by the conveying rotor via a first outlet 142 lying at 90 ° into a first feed channel 144 which opens into the feed 112 ( see. Fig. 6 ).

In the upright orientation of the feed pump, the second return 116 is inoperative. If the pump is turned upside down, so that the flange 68 (see. Fig. 3 ) is down and the rotation axis 14 forms an angle of 180 ° with the vertical, then the first return 114 is inoperative and the Operating fluid passes via the second return line 116 back to the feed pump 110, as will be described below.

The second return 116 has a second return passage 146, which, based on the spatial position of the pump of 0 ° corresponding to Fig. 4 away from a radially adjacent and above the pivot bearing 84 lying collecting region 148 for the resource away radially outwards and up to a second reservoir 150 is guided, which in turn is separated via the partition 130 of a further, second working chamber 152 of the feed pump 110.

In the partition wall 130, a second inlet 154 is provided, via which the operating medium can pass from the second reservoir 150 into the second working space 152. The second inlet 154 is located in an upside-down pump, ie in a spatial position of the pump of 180 °, in the lower part of the pump. The operating medium can therefore reach the second working chamber 152 even at a low level in the second reservoir 150.

Like from the Fig. 5 it can be seen, the operating medium which has reached the second working space 152 is conveyed by the respective slide 138 when the conveying rotor 136 rotates in the direction of rotation 140 to a second outlet 156 arranged at 270 °. The second outlet 156 opens into a second flow channel 158, which in turn opens like the first flow channel 144 in the flow 112.

As Fig. 6 shows, in the mouth region of the first and second flow channel 144, 158, a backflow prevention device 160 is arranged, which is designed to prevent that on the first flow channel 144 in the common flow 112 flowing fluid into the second flow channel 158 and, conversely, via the second supply channel 158 supplied operating medium in the first flow channel 144 passes. The backflow prevention device 160 thus effectively ensures that no short circuit between the two flow channels 144, 158 occurs.
The backflow prevention device 160 is functionally configured in the manner of a pneumatic or-valve. The backflow prevention device 160 forms in the mouth region of the two flow channels 144 and 158 an enlarged space region 162, in which a ball 164 is arranged, which can close one of the two flow channels 144, 158 in dependence on the flow of operating medium. As exemplified in Fig. 6 is shown, the ball 164 is pressed by an incoming from the first flow channel 144 resource flow against the mouth of the second flow channel 158 and thereby closes it.
The backflow prevention device 160 may be in the form of a non-return element or a shut-off element, such as a shut-off valve. The backflow prevention device 160 may also be designed as a manually, gravitationally, pressure or electrically driven element which, depending on the vacuum pump position, closes the first or second flow channel 144, 158 with a slide or flap (not shown).
In accordance with the foregoing, in reference to FIG Fig. 3 to 6 described pump at a position of the pump of 0 °, so in an upright pump as in Fig. 3 , the resources pass through the first return 114 to the feed pump 110. By contrast, when the pump is upside down, that is to say when the pump is in a spatial position, in which the rotation axis 14 encloses an angle to the vertical of 180 °, the operating medium reaches the delivery pump 110 via the second return 116 from the rotary bearing 84. In this case, by means of the system 2 according to the invention or the method according to the invention, the current installation orientation of the pump 20 and the installation orientation the auxiliary device 22 and the feed pump 110 are monitored accordingly. For this purpose, at least one or more position detectors 6 can be assigned to the pump 20 or the auxiliary device 22 in the manner described above.

If the positional orientation of the auxiliary device 22 or of the delivery pump 110 is monitored accordingly, then the delivery pump can also be provided, for example, with only one of the two returns 114, 116. Thus, it may be determined via the system 2 according to the invention, if necessary, whether the delivery pump 110 occupies a position such that the operating medium can reach the delivery pump 110 via the respective return.

Since an all-layer capability of a conveyor or lubricant pump is often difficult to achieve, it is therefore advantageous to attach at least one position detector within the lubricant pump or assign this. Lubricant pumps are still often mounted rotated by 180 ° depending on the application, although appropriate delivery channels on the turbomolecular pump for both types of installation are available. However, the unused conveyor channels are often closed by seals.

With the system 2 according to the invention, it can now be ensured that the operating staff operates the turbopump in the correct direction, or that the lubricant pump is correctly mounted again after a service or the like. The current installation orientation can be verified reliably by means of the system according to the invention. In this case, a position detector arranged within the lubricant pump brings with it the advantage that it is always automatically rotated in the correct direction to the installed position.

In a rotary vane pump with a lubricant sump, for example, can be ensured by the inventive monitoring of the mounting orientation be recognized that an unfavorable orientation or misalignment and corresponding to a malfunction of the lubricant supply.
As already mentioned, the determination of the conditions under which the vacuum pump 4 can be operated may include, inter alia, in particular the determination of a quiescent current dependent on the detected positional orientation for at least one in particular actively controlled magnetic bearing of the device 4.
Fig. 7 shows a purely exemplary sketched arrangement of various magnetic bearings (magnetic bearings) 170, 172 174 a pump 20 with drive motor 170, which is in particular a turbomolecular pump. In contrast, shows Fig. 8 the bearing assembly according to Fig. 7 with horizontally oriented pump 20th
In different positions, a different quiescent current is required in each active controlled magnetic bearings to carry the rotor mass. In the present embodiment, the so-called radial center of gravity magnetic bearing 172 carries in one in the Fig. 8 illustrated horizontal orientation of the pump 20 a majority of the rotor mass. In contrast, in the in the Fig. 7 shown vertical orientation of the pump 20 or in a (not shown) by 180 ° inverted "headstand" position, the entire rotor mass carried by the axial magnetic bearing 170, which accordingly has a significantly increased quiescent current.
Due to the fluctuations occurring as a result of an active control, the position detection of the bearings is not influenced as far as the DC component of the respective monitored measurement channels is considered.

In this case, it is particularly useful to use a different thermal characteristic depending on the orientation, since the quiescent currents or DC components heat the lossy bearings and accordingly depending on the orientation, location and / or orientation of the pump, the heat input into the overall system in particular by different Efficiencies of the bearing types both differently distributed and absolutely different.

In addition, a cooling depending on the respective area of the pump is possible in different ways. In this case, in practice, heating of the magnetic bearing 172 forming a gravity bearing is often much more difficult to cool than would be possible in the area of the magnetic thrust bearing 170 or in the area of other radial bearings. The pump 20 can therefore, within given temperature limits, pump at different orientations different amounts of gas until the speed or power is reduced when reaching warning thresholds or error limits.

As also already mentioned, the determination, carried out by the control and / or evaluation unit 10 of the system 2 according to the invention, of the conditions under which the device 4 can be operated can also determine a cooling of at least one region of the device 4 dependent on the detected positional orientation include.

Fig. 9 shows a schematic representation of an exemplary embodiment of a convection-cooled device 4, in which the system according to the invention is applicable.

In the illustration according to Fig. 9 is the convection-cooled device 4 is oriented so that their cooling ribs 176 extend in the vertical direction.

In contrast, the convection-cooled device 4 in the illustration according to Fig. 10 oriented so that their cooling fins 176 extend in the horizontal direction.

Such convection-cooled devices 4 must be freely circulated in the right direction to reach their full capacity. In particular, in the horizontal direction extending cooling fins 176 (see. Fig. 10 ) lead to a lower heat transfer to the environment and thus to an earlier overheating of the device 4. By means of the system 2 according to the invention or of the method according to the invention, it is now also possible to ensure that the relevant device 4 is put into operation in the correct installation orientation, ie the device 4 before being put into operation as shown in FIG Fig. 9 is aligned so that the cooling fins 176 extend in the vertical direction.

A common type of installation of vacuum pumps is also the flanging on the lid or doors of large vacuum process chambers. It is typically the goal to remove all relevant attachments together for easier maintenance and cleaning and store them so that all components are easily accessible. Often also loading and unloading openings are designed in such a way that pumps are mounted there. In certain cases, such a lid or door can be removed and stored for maintenance in another location or regularly folded back and forth during a plant cycle. Both cases result in the vacuum pump being in a positional orientation for this period, which does not permit operation or only with restrictions. In addition, turbomolecular pumps with a lubricant supply are predominantly designed in such a way that they do not lose the lubricant filling at standstill, even outside the intended operating position, or the lubricant filling does not run into specific areas. However, this only applies to the stationary vacuum pump. Outside the intended As a rule, the pump must not be put into operation because otherwise there could be lubricant losses in the area of the pump chamber.

Also in this case, the knowledge of the current orientation offset the control and / or evaluation unit 10 of the system 2 (cf. Fig. 1 ), which may be integrated into the control electronics of the pump or may be provided separately therefrom, capable of rejecting starting requests, if necessary with an error message, so that the integrity of the pump and in particular its lubricant supply remains assured.

In general, the control and / or evaluation unit 10 of the system 2 according to the invention may be provided in the control electronics of the relevant device 4 or else separately therefrom.

In addition, according to the invention it can be provided that the relevant conditions under which the device 4 is optionally operable, at least partially by the control and / or evaluation unit 10 of the system 2 according to the invention itself induced or at least initiated.

LIST OF REFERENCE NUMBERS

2

system

4

Facility

6

position detector

8th

output

10

Control and / or evaluation unit

12

rotor shaft

14

axis of rotation

16

rotor disc

18

Playback unit

20

Pump, vacuum pump

22

Auxiliary device, lubricant pump

26

stator

36

spacer

50

adding area

58

arrow

68

inlet flange

70

pump inlet

72

casing

74

rotor hub

76, 78

Holweck rotor sleeve

80, 82

Holweck stator

84

pivot bearing

86

Permanent magnetic bearings

88

Rotor-side bearing half

90

stator side half

92, 94

permanent magnetic ring

96

radial bearing gap

98

safety bearing

100

spray mother

102

absorbent disc

104

drive motor

106

control unit

108

pump outlet

110

feed pump

112

leader

114

first return

116

second return

118

gap

120

first return channel

122

first reservoir

124

Storage

126

first inlet

128

first working space

130

partition wall

132

casing

134

axis of rotation

136

feed rotor

138

pusher

140

direction of rotation

142

first outlet

144

first flow channel

146

second return channel

148

collecting area

150

second reservoir

152

second workspace

154

second inlet

156

second outlet

158

second flow channel

160

Return prevention means

162

space area

164

Bullet

166

drive motor

168

drive motor

170

Thrust bearing (axial magnetic bearing)

172

radial bearing (radial center of gravity magnetic bearing)

174

radial bearing (radial magnetic bearing)

176

cooling fin

Claims (12)

1. A method of determining and assessing the installation orientation of a device (4),
   in which the current installation orientation of the device (4) is detected by at least one position detector (6) associated with the device (4) and a check is made by means of a control and/or evaluation unit (10) whether the device (4) may be operated in the detected positional orientation and the conditions under which the device (4) is operable are optionally in particular also determined, wherein the device (4) comprises a pump (20), in particular a vacuum pump, and in addition to the pump (20) an auxiliary device (22) connected thereto, in particular a lubricant pump, and the current installation orientations of both the pump (20) and the auxiliary device (22) connected thereto are each detected by at least one position detector (6).
2. A method in accordance with claim 1,
   characterized in that an error message is generated by means of the control and/or evaluation unit (10) in the event that it was determined that the device (4) may not be operated in the detected positional orientation.
3. A method in accordance with claim 1 or claim 2,
   characterized in that, in the event that it was determined that the device (4) may be operated in the detected positional orientation, it is also determined by means of the control and/or evaluation unit (10), in addition to the determination of the conditions under which the device (4) is operable, whether the operation of the device (4) in the detected positional orientation and under the respective conditions corresponds to a normal and correspondingly non-critical operation or represents a borderline case, in particular a critical borderline case.
4. A method in accordance with claim 3,
   characterized in that a warning message, in particular a qualified warning message, is generated by means of the control and/or evaluation unit (10) in the event that it was determined that the operation of the device (4) in the detected positional orientation and under the respective conditions represents a borderline case, in particular a critical borderline case.
5. A method in accordance with any one of the preceding claims,
   characterized in that the determination of the conditions under which the device (4) is operable comprises the determination of a power restriction for the device (4) dependent on the detected positional orientation; the determination of an idle current, dependent on the detected positional orientation, for at least one magnetic bearing of the device (4) which is in particular actively regulated; and/or the determination of a cooling of at least one region of the device (4) dependent on the detected positional orientation.
6. A method in accordance with any one of the preceding claims,
   characterized in that the current installation orientation of the device (4) is detected by at least one switching sensor associated with the device, in particular by a liquid position switch, or by at least one acceleration sensor, in particular by a micro-electromechanical acceleration sensor.
7. A system (2) for determining and assessing the installation orientation of a device (4) for carrying out the method in accordance with any one of the preceding claims,
   comprising at least one position detector (6) associated with the device (4) for detecting the current installation orientation of the device (4); and a control and/or evaluation unit (10) which responds to the output signals (8) of the position detector (6) and which is configured to automatically check whether the device (4) may be operated in the detected positional orientation and is optionally in particular also configured to automatically determine the conditions under which the device (4) is operable; said system comprising at least one further position detector (6), wherein the device (4) comprises a pump (20), in particular a vacuum pump, and in addition to the pump (20) an auxiliary device (22) connected thereto, in particular a lubricant pump, and at least one position detector (6) can be associated with the pump (20) and at least one position detector (6) can be associated with the auxiliary device (22).
8. A system in accordance with claim 7,
   characterized in that the control and/or evaluation unit (10) is moreover configured to generate an error message in the event that it was determined that the device (4) may not be operated in the detected positional orientation.
9. A system in accordance with claim 7 or claim 8,
   characterized in that, in the event that it was determined that the device (4) may be operated in the detected positional orientation, the control and/or evaluation unit (10) is furthermore configured to determine, in addition to the determination of the conditions under which the device (4) is operable, whether the operation of the device (4) in the detected positional orientation and under the respective conditions corresponds to a normal non-critical operation or represents a borderline case, in particular a critical borderline case.
10. A system in accordance with claim 9,
    characterized in that the control and/or evaluation unit (10) is furthermore configured to generate a warning message, in particular a qualified warning message, in the event that it was determined that the operation of the device (4) in the detected positional orientation and under the respective conditions represents a borderline case, in particular a critical borderline case.
11. A system in accordance with any one of the claims 7 to 10,
    characterized in that the determination carried out by the control and/or evaluation unit (10) of the conditions under which the device (4) is operable comprises the determination of a power restriction for the device (4) dependent on the detected positional orientation; the determination of an idle current, dependent on the detected positional orientation, for at least one magnetic bearing of the device (4) which is in particular actively regulated; and/or the determination of a cooling of at least one region of the device (4) dependent on the detected positional orientation.
12. A system in accordance with any one of the claims 7 to 11,
    characterized in that a switching sensor, in particular a uniaxial or multiaxial liquid position switch, or an acceleration sensor, in particular a uniaxial or multiaxial micro-electromechanical acceleration sensor, is provided as the position detector (6).

Images