EP2881590A4 - Part for vacuum pumps and vacuum pump - Google Patents

Part for vacuum pumps and vacuum pump

Info

Publication number
EP2881590A4
EP2881590A4 EP13824768.9A EP13824768A EP2881590A4 EP 2881590 A4 EP2881590 A4 EP 2881590A4 EP 13824768 A EP13824768 A EP 13824768A EP 2881590 A4 EP2881590 A4 EP 2881590A4
Authority
EP
European Patent Office
Prior art keywords
vacuum
pumps
vacuum pump
pump
vacuum pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13824768.9A
Other languages
German (de)
French (fr)
Other versions
EP2881590A1 (en
Inventor
Takashi Kabasawa
Manabu Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of EP2881590A1 publication Critical patent/EP2881590A1/en
Publication of EP2881590A4 publication Critical patent/EP2881590A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/516—Surface roughness
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP13824768.9A 2012-08-01 2013-07-24 Part for vacuum pumps and vacuum pump Withdrawn EP2881590A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012171432A JP2014031734A (en) 2012-08-01 2012-08-01 Component for vacuum pump, and vacuum pump
PCT/JP2013/070021 WO2014021160A1 (en) 2012-08-01 2013-07-24 Part for vacuum pumps and vacuum pump

Publications (2)

Publication Number Publication Date
EP2881590A1 EP2881590A1 (en) 2015-06-10
EP2881590A4 true EP2881590A4 (en) 2016-04-06

Family

ID=50027839

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13824768.9A Withdrawn EP2881590A4 (en) 2012-08-01 2013-07-24 Part for vacuum pumps and vacuum pump

Country Status (6)

Country Link
US (1) US20150184669A1 (en)
EP (1) EP2881590A4 (en)
JP (1) JP2014031734A (en)
KR (1) KR20150037747A (en)
CN (1) CN104471254A (en)
WO (1) WO2014021160A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI586893B (en) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
JP2022185262A (en) * 2021-06-02 2022-12-14 株式会社島津製作所 Vacuum pump and leak detector

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005001294A1 (en) * 2003-06-25 2005-01-06 The Boc Group Plc Rotary impeller for a turbomolecular pump
WO2005014892A2 (en) * 2003-07-23 2005-02-17 The Boc Group Plc Coating
US20070269608A1 (en) * 2003-02-27 2007-11-22 Masahiro Saito Rotor repair method and rotor repair apparatus
WO2008157013A1 (en) * 2007-06-13 2008-12-24 Hontek Corporation Method and coating for protecting and repairing an airfoil surface using molded boots, sheet or tape
WO2011162070A1 (en) * 2010-06-24 2011-12-29 エドワーズ株式会社 Vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3098139B2 (en) 1993-06-17 2000-10-16 株式会社大阪真空機器製作所 Compound molecular pump
FR2845737B1 (en) 2002-10-11 2005-01-14 Cit Alcatel TURBOMOLECULAR PUMP WITH COMPOSITE SKIRT

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070269608A1 (en) * 2003-02-27 2007-11-22 Masahiro Saito Rotor repair method and rotor repair apparatus
WO2005001294A1 (en) * 2003-06-25 2005-01-06 The Boc Group Plc Rotary impeller for a turbomolecular pump
WO2005014892A2 (en) * 2003-07-23 2005-02-17 The Boc Group Plc Coating
WO2008157013A1 (en) * 2007-06-13 2008-12-24 Hontek Corporation Method and coating for protecting and repairing an airfoil surface using molded boots, sheet or tape
WO2011162070A1 (en) * 2010-06-24 2011-12-29 エドワーズ株式会社 Vacuum pump
EP2587069A1 (en) * 2010-06-24 2013-05-01 Edwards Japan Limited Vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2014021160A1 *

Also Published As

Publication number Publication date
WO2014021160A1 (en) 2014-02-06
KR20150037747A (en) 2015-04-08
CN104471254A (en) 2015-03-25
US20150184669A1 (en) 2015-07-02
EP2881590A1 (en) 2015-06-10
JP2014031734A (en) 2014-02-20

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20150121

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
RA4 Supplementary search report drawn up and despatched (corrected)

Effective date: 20160303

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/26 20060101ALI20160226BHEP

Ipc: F04D 29/02 20060101ALI20160226BHEP

Ipc: B24C 1/08 20060101ALI20160226BHEP

Ipc: F04D 19/04 20060101AFI20160226BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20161005