EP2860752A1 - Dispositif d'électrodes doté de pré- et/ou de post-filtre et son procédé de fabrication et spectromètre de masse doté d'un tel dispositif d'électrodes - Google Patents

Dispositif d'électrodes doté de pré- et/ou de post-filtre et son procédé de fabrication et spectromètre de masse doté d'un tel dispositif d'électrodes Download PDF

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Publication number
EP2860752A1
EP2860752A1 EP14188177.1A EP14188177A EP2860752A1 EP 2860752 A1 EP2860752 A1 EP 2860752A1 EP 14188177 A EP14188177 A EP 14188177A EP 2860752 A1 EP2860752 A1 EP 2860752A1
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EP
European Patent Office
Prior art keywords
electrode
insulator
blank
sections
carrier element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14188177.1A
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German (de)
English (en)
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EP2860752B1 (fr
Inventor
Bernd Laser
Carsten Laser
Frank Schäfer
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Vacutec Hochvakuum- & Prazisionstechnik GmbH
VACUTEC Hochvakuum and Prazisionstechnik GmbH
Original Assignee
Vacutec Hochvakuum- & Prazisionstechnik GmbH
VACUTEC Hochvakuum and Prazisionstechnik GmbH
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Publication of EP2860752A1 publication Critical patent/EP2860752A1/fr
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/062—Ion guides
    • H01J49/063—Multipole ion guides, e.g. quadrupoles, hexapoles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/068—Mounting, supporting, spacing, or insulating electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

Definitions

  • the invention relates to a method according to claim 1 for producing an electrode device, in particular a multipole, for use in a mass spectrometer, wherein the electrode device comprises at least one main filter and at least one pre and / or post filter.
  • the invention further relates to such an electrode device according to claim 8, as well as a mass spectrometer with such a multi-pole electrode device according to claim 15.
  • Multipolar electrode arrangements for the characterization of chemical compounds are known in the art, for example from the German patent 944900 known.
  • Such multipole mass filters operate without a magnetic field.
  • a quadrupole for example, comprises four metal rods which serve as electrodes and are arranged on a circle with radius R 0 .
  • the voltage across the electrodes is composed of a high-frequency AC voltage and a DC voltage, wherein the respectively opposite pairs of the electrodes have a phase-shifted by 180 ° high-frequency voltage.
  • the ions to be separated are shot as a fine ion beam in the longitudinal direction of the electrodes in the field. Due to the applied AC and DC voltages, the ions are moved on defined trajectories through the mass filter. Outside stable boundary conditions, the ions collide with the electrodes, neutralizing them. As a result, these neutralized ions no longer reach the detector.
  • the applied voltage at the electrodes is linear to the detected ion mass, which is why for driving through the mass range, ie for the setting the desired mass to be detected, a proportional change of AC voltage and DC voltage is made.
  • a change in the resolution can be effected by changing the voltage conditions.
  • a stability diagram plays a role, which is calculated according to the differential equations of Mathieu.
  • Pre- and post-filters act as a pre- and post-stage of the main filter, by applying only a weak AC voltage.
  • the field does not start or stop abruptly for the ions, but the ions are slowly led into or out of the field. Therefore, the ions achieve a higher stability and thus a better focus.
  • the pre and post filters work similarly to lenses.
  • pre- and post-filters In the implementation of pre- and post-filters in practical application, the high-precision alignment of the electrodes to one another (eg prefilter to main filter) must be taken into consideration, since even small inaccuracies can lead to field disturbances.
  • pre and post filters In DE 22 15 763
  • a great effort must be made here at high cost for the highly accurate alignment of the filter to each other. Therefore, there is a lack in the prior art of a method which precise alignment with low Guaranteed effort and thus also has a high analytical accuracy.
  • the object of the invention is thus to improve the production method for electrode devices with pre and / or post filters and to provide a resulting electrode device.
  • the invention solves this problem by providing a manufacturing method for an electrode device with pre and / or post filter and provides an electrode device with pre and / or post filter as a product.
  • the electrode device in this case comprises a plurality of electrode arrangements which can be joined together to form the electrode device.
  • An electrode assembly has one or more electrodes.
  • the electrodes are each made of an electrode blank, which preferably has metal. Particularly preferably, the electrode blank consists of solid material.
  • the electrode blank is preferably rod-shaped and in particular has a round cross-section. The blank may e.g. be designed as a round rod. From this electrode blank, the main filter, one or more prefilters and / or one or more post-filters are produced.
  • the manufacturing process comprises several steps, which are repeated until the intended number of pre and / or post filters is reached.
  • the electrode blank may also be made e.g. have a trapezoidal or rectangular cross-section and thus e.g. serve for ion conduction or for ion transfer.
  • pre- and post-filter includes that the pre- and post-filters may also be lenses or lens-like, as they preferentially focus the ions to enter them with a collimated beam into the main filter. In this case, in contrast to the main filter, there is no filtering in the true sense, ie little or no ions are neutralized. Whether the pre- and / or post filters only have a focusing effect or even neutralize ions, also depends on whether and how the pre and / or post filters be charged with DC voltage. Both possibilities can be realized with the present invention.
  • each electrode blank is connected to holding means.
  • the electrode device comprises four electrode blanks, the electrode blanks being divided into a plurality of electrode arrays.
  • an electrode assembly each comprises two electrode blanks.
  • one of the electrode assemblies comprises only one electrode blank and the other electrode assembly comprises three electrode blanks.
  • the electrode device may be e.g. composed of four individual electrode assemblies, each having an electrode blank.
  • the holding means are designed such that they can hold the electrode rod assemblies as a device. They can then also be referred to as a holding device.
  • the holding means comprise at least one carrier element, wherein each electrode blank is connected to the one or more carrier elements.
  • the attachment is either indirectly, by interposition of one or more insulators, or directly. If the one or more electrode blanks are fastened directly to the at least one carrier element, the at least one carrier element is preferably designed as an insulator.
  • the holding means can thus be designed as a carrier element or carrier elements, as at least one insulator or as a carrier element or carrier elements and at least one insulator.
  • each electrode blank is separated into two sections, the sections being axially spaced from one another by means of a gap are spaced.
  • the gap thus extends through the entire electrode blank and electrically separates the two sections from each other, whereby the individual sections can be applied independently of each other with voltage.
  • the portions are held in a constant relative position or in a constant relative position to each other during and after the separation by the holding means.
  • Each of the sections is used as a filter along with the sections of the other electrode blanks in the finished electrode device. For example, several first sections form a prefilter and several second sections form a main filter.
  • a "set" of filter sections (eg, a first and a second section for pre- and main filters) is thus made from a single electrode blank, the holding means holding the sections at each time in position relative to each other so that the relative position between the Sections not changed.
  • This method has the advantage that the separation between a pre- and post-filter and the main filter takes place only when the two sections are firmly connected by the holding means. A shift of the sections against each other and a re-alignment thus eliminated and saves additional effort. The exact positioning of the electrodes increases the analytical accuracy.
  • This separation step ie the separation of the electrode blank into two sections, is performed as often as it corresponds to the intended number of pre and / or post filters.
  • the number of electrode blanks corresponds to the number of desired electrodes. For example, if a prefilter and a post filter are provided, the electrode blanks are separated twice into two sections, so that each electrode blank a total of three sections arise, each axially spaced from each other with a gap and of the holding means in a constant relative position to each other. The total of three sections are then used together with the sections of the other electrode blanks as pre-filter, main filter and post-filter. The multiple electrode arrays are joined together in a further step by connecting the holding means to the electrode device.
  • the holding means comprise at least one carrier element, in particular a single carrier element, and insulator means comprising at least one insulator.
  • the insulator or insulators, ie non-conductive material preferably comprise quartz or ceramic, wherein in the case where the insulator means consist entirely of quartz, the material of the electrode blank is preferably made of the alloy (marketed under the trademark "Invar", for example) the material number is 1.3912 (German steel key).
  • the metal of the electrode blank is preferably a Einschmelzleg réelle iron-nickel cobalt-based, for example as the (sold under the brand "Vacon") alloy with the material number 1.3981 (German steel key) or as the alloy available under the designation Vacon 11 or Vacon 11 T.
  • the insulator means are preferably connected to the electrode blank, wherein this compound can be made detachable or non-detachable.
  • the insulator or the insulators are applied with an adhesive, by screws or by soldering to the electrode blank.
  • the insulator means in particular, if they are made of ceramic, réellesintern on the electrode blank.
  • the metal of the electrode and the insulators preferably have a similar coefficient of thermal expansion, so that a permanent connection between metal and insulator is ensured.
  • the carrier element is preferably connected to at least one insulator of the insulator means. If the insulator means comprise a plurality of insulators, the carrier element is connected to at least one of these insulators. If the insulator means comprise only one insulator, the carrier element is connected to exactly this insulator.
  • the carrier element which preferably has a semicircular arc-like shape in cross-section, is preferably made of the same material as the electrode blank.
  • the carrier element and the insulator or the insulators are preferably detachably or non-detachably connected to one another.
  • the compound by gluing by means of an adhesive, through Soldering, created by screwing or by sintering.
  • the insulator is connected by gluing to the carrier element and thus produces a permanent connection.
  • At least one insulator of the insulator means and / or the carrier element is connected to both sections and thereby holds the sections in the constant relative position to one another.
  • the insulator means comprise a plurality of insulators, then at least one of the insulators and / or the carrier element is connected to both sections. If the insulator means comprise only one insulator, this one insulator and / or the carrier element is connected to both sections.
  • the insulator acts in an insulating manner between the electrode blank and the carrier element, so that the blank electrode and the carrier element are e.g. can also consist of the same material.
  • the isolator means may e.g. have several short insulators, a long insulator or a combination of these two solutions.
  • the insulator or the insulators are designed or positioned such that there is a stable connection between the two sections.
  • one or more short insulators may each be positioned on the sections.
  • the carrier element then connects the insulators, so that the sections are connected to one another via the carrier element and the insulators.
  • the carrier element When separating the electrode blank, e.g. between two insulators, then the two sections are held by the carrier element in a constant relative position to each other.
  • a long insulator is positioned on the electrode blank so that it is connected to both sections.
  • the carrier element is then positioned on the insulator.
  • the insulator means in particular an insulator of the insulator means, hold the sections in the same relative position relative to each other.
  • the electrode blank and / or the insulator is provided with a recess.
  • the recess or the recesses are arranged such that they lie between the insulator and the gap and the gap with the recess or the Recesses is connected.
  • the gap thus extends between the cavity of the recess and the side of the electrode blank, which lies opposite the cavity of the recess.
  • two electrode blanks are applied to a carrier element, which are each divided into different filters.
  • a carrier element which are each divided into different filters.
  • Such an arrangement comprises two sections from which main filters are to become and two sections from which pre-filters are to be made, wherein always a main filter section and a prefilter section are interconnected by an insulator.
  • the order of the o.g. Steps can be varied. For example, First, a recess is introduced into the electrode blank, which divides the electrode blank into two sections. Subsequently, an insulator is positioned over the recess and connected to both sections. During the subsequent separation of the two sections by a gap, these sections are held by the insulator in a constant relative position to each other. Thereafter, a carrier element is connected to the insulator to be joined in a further step with another carrier element to an electrode device. Alternatively, e.g. after applying a plurality of short insulators on the electrode blank, the support member connected to the insulators and performed the separation cut between the insulators. However, the possible embodiments are not limited to these two examples.
  • the gap is formed such that the presence of an insulator and / or a carrier element, which are positioned over the gap, through this gap have no influence on the field geometry of the multipole and thus do not affect the trajectory of ions.
  • the trajectory of the ions or the main direction of movement of the ions, neglecting their circular movement, is arranged along the electrode blank, namely in particular on the side of the blank electrode which lies opposite the side of the electrode blank fitted with the insulator means.
  • the trajectory of the ions thus substantially corresponds to a longitudinal axis to the electrode blank, which after the o.g. Criteria, in particular on the opposite side of the insulator means, is arranged.
  • a visual axis to the insulator means and / or the carrier element advantageously no normal to this longitudinal axis, a visual axis to the insulator means and / or the carrier element.
  • a normal in this context is an axis which is at a 90 ° angle to the longitudinal axis.
  • the gap therefor e.g. Angles on or is stair-like or obliquely formed and / or the entry and exit point of the intermediate space from the blank are offset from each other.
  • a training with angulations or a step-like design prevents the so-called "needle-point effect" disturbing the field geometry.
  • the intermediate space angelnungen and the entry and exit point of the intermediate space from the blank are offset from each other.
  • Such an arrangement has the advantage that the probability that the ions pass through the gap to the insulator is greatly reduced.
  • the ions can not establish direct contact with the surface of the insulator. Therefore, the ions can not react with the surface of the insulator, which is why no electrostatic charge of this surface can take place by the ions. With such a charge, the ion would namely absorb an electron of the insulator and would be neutralized with it.
  • the insulator on the other hand, would be positively charged, which would change the field geometry. An altered electric field would affect the trajectory of the other ions.
  • the intersection of the intermediate space begins, for example, at the recess and is continued in the direction of the opposite side of the blank.
  • the first Section is thus formed transversely to the longitudinal axis of the blank, a second portion along the longitudinal axis, whereupon a further section follows, which is aligned again transversely to the longitudinal axis.
  • further angulations can be incorporated by further longitudinally and transversely to the longitudinal direction extending portions in the configuration of the intermediate space.
  • the transition from the recess to the intermediate space and the exit point of the intermediate space from the electrode blank are offset from one another, wherein in particular between a prefilter and a main filter, the exit point of the intermediate space from the electrode blank is preferably offset in the direction of flight of the ions. This prevents an undefined electric field from being generated by surface charging of the insulator, which would influence the trajectory of the further ions.
  • the offset between the entry and exit point of the gap in or out of the electrode blank may be mirrored at the transition between the main filter and post filter to the transition between prefilter and main filter, or in the same way, so not mirrored, be formed.
  • a mirrored structure has the advantage that the main filter is formed symmetrically. This results in a more homogeneous field, which means less interference for the ions.
  • a similar construction could also take advantage of the transition between the main filter and the postfilter in that the likelihood that the ions reach the insulator is kept even lower, since the exit point of the intermediate space from the electrode blank is offset in the direction of flight.
  • the sections of the electrode blank are simultaneously processed together with the carrier element such that contours of the blank and of the carrier element are ground.
  • the working is preferably carried out by grinding, in particular by the use of a grindstone.
  • the individual sections of the electrode blank are preferably ground in the longitudinal direction, so that in the cross section of the electrode blank a circular and a non-circular, in particular substantially hyperbolic, section is formed. This has the advantage that a better field geometry is formed, resulting in a more accurate measurement.
  • the joint processing of the electrode blank and the carrier element by, for example, grinding can also take place before the electrode blank is separated into the two sections. Preferably, however, the processing is carried out after the separation cut. Alternatively, the processing of the electrode blanks can also be omitted, for example to save costs.
  • the end portions of the support members are formed convex and concave by the machining, so that they center themselves later in the pairwise assembly of the support elements.
  • each section becomes an electrode.
  • Each of these electrodes has a circular section and a substantially hyperbolic section as a result of the machining in cross-section.
  • the respective similarly machined portions of all provided electrode blanks in particular after being joined to the electrode device, form the individual filters, e.g. Prefilter and main filter.
  • the recess is introduced into the electrode blank by a machining or non-cutting (erosive) manufacturing process.
  • Cutting processes can be, for example, milling, sawing, planing, grinding or drilling.
  • Non-cutting or ablation processes can be carried out, for example, by chemical or thermal removal. This includes the method of electroerosion, etching, laser cutting or water jet cutting.
  • the recess is introduced by a machining process in the electrode blank.
  • the recess sawn into the electrode blank.
  • the recess can also be introduced by casting in the production of the blank.
  • the gap separating the sections of the electrode blank is made by a machining and / or non-machining manufacturing process.
  • the gap is ground, milled or sawed into the electrode blank, e.g. with a wire saw.
  • the gap is made by electro-erosion, etching, laser cutting or water jet cutting.
  • the production of the intermediate space takes place by means of wire erosion.
  • the use of wire or electrical erosion has the advantage that substantially no mechanical stresses are generated in the components and a very accurate removal of the metal is possible.
  • the fact that the recess is first introduced prevents the tool, e.g. the eroding wire comes in contact with the insulator.
  • the insulator holds both sections together during and after separation and acts as an insulator between the electrode and the support element.
  • a separation between pre- and post-filter and main filter is necessary in order to be able to act on the various sections differently with AC voltage and DC voltage.
  • the pre- or post-filter is preferably applied only with an alternating voltage.
  • an electrode or an electrode device to which no readjustment between the various sections is necessary because an insulator or the support member during the separation of the electrode blank holds both sections of the electrode blank together.
  • the invention thus shows an effective method for producing an electrode device with pre and / or post filters, wherein the electrodes are aligned with high precision, in particular with respect to the filter sections to each other and to the distances to the other electrodes of the multipole.
  • Process resulting electrode device has extremely straight electrode rods, which have a very high parallelism to each other.
  • the measuring method offers a higher transmission rate of the ions and a higher resolution thanks to the invention by better focusing of the ion beam.
  • the product of the manufacturing method according to the invention namely a very precisely working electrode device, has a plurality of electrode arrangements with at least one electrode blank, holding means and a gap separating the blank electrode into two sections, so that these axially spaced apart and thus are electrically isolated from each other.
  • the holding means in this case comprise insulator means and a carrier element, wherein either at least parts of the insulator means or the carrier element hold the two sections in a constant relative position to each other.
  • at least one insulator of the insulator means and / or the electrode blank has a recess, which in particular has a greater extent in the longitudinal direction of the electrode blank than the intermediate space.
  • At least one insulator of the insulator means is connected to the electrode blank and the carrier element.
  • two electrode blanks each are connected to a support member and are processed together so that the electrode portions each have a circular portion and a hyperbolic portion, and the support members can self-adjust upon mating, forming an electrode device.
  • the invention preferably comprises a multi-pole electrode device with at least two electrode arrangements according to the invention.
  • the electrode device is designed as a multipole, in particular as a quadrupole, and consists of two electrode arrangements according to the invention.
  • the electrode arrangements each preferably comprise two sections which are formed as main filters, and at least two sections which serve as prefilters are formed and / or at least two sections which are formed as a post filter.
  • the individual sections are arranged according to the invention.
  • the electrode assemblies are preferably interconnected by the support members to form an electrode assembly.
  • the carrier elements themselves center each other through the ground end sections, which are convex and concave and fit exactly into one another.
  • the invention further comprises a mass spectrometer with an electrode device according to the invention or a plurality of electrode arrangements according to the invention.
  • Fig. 1 shows a schematically simplified electrode assembly 1 for use in a multi-pole electrode device, in particular in a multipole, a mass filter or mass spectrometer.
  • the electrode assembly 1 is composed, inter alia, of a section for a main filter 3, a section for a prefilter 5 and a section for a postfilter 7.
  • the invention is not limited to this embodiment.
  • an electrode arrangement 1 according to the invention may also have only one section for a prefilter 5 or only one section for a postfilter 7.
  • the portion for the prefilter 5 and the portion for the postfilter 7 are electrically separated from each other by the portion for the main filter 3 by gaps, to be differently supplied with AC voltage and DC voltage.
  • the ions to be detected according to the set mass arrive at a multipole in operation, e.g. through the field of a pre-filter 5, where initially only AC voltage is applied, in the field of the main filter 3, where the DC voltage is added.
  • the prefilter 5 ensures that the ions enter the field of the main filter 3 in a more stable state, whereby a better focusing of the ions is possible.
  • the pre and post filters 5, 7 therefore work much like lenses.
  • the ions are filtered according to their mass-to-charge ratios, ions which do not correspond to the desired mass and are therefore to be sorted out, are attracted by the DC voltage applied electrodes and in collision with the electrode arrangement 1 neutralized.
  • the ions that are to be counted and hit the detector will be defocused by an abruptly breaking field at the end of the main filter 3 is preserved by the postfilter 7.
  • the postfilter 7 for example, DC voltage and AC voltage are gradually attenuated or the DC voltage completely switched off in order to achieve an even higher focus.
  • a post filter 7 is used in cases where further ion optical components are provided.
  • Fig. 2 shows a schematic representation of the process steps S1 to S5 for the preparation of an electrode assembly 1 with a prefilter 5.
  • Postfilter 7 can be prepared in an analogous manner.
  • an unprocessed electrode blank 9a is shown. This is preferably made of metal, in particular the metals Invar or Vacon come into question.
  • the electrode blank 9 is manufactured as a round rod. Alternatively, however, the electrode blank 9 may also have a trapezoidal or rectangular cross-section, in which case it can then be used to guide the ions, for example around curves.
  • a recess 11 is introduced into the electrode blank 9a, for example by sawing or milling. This recess 11 does not pass through the entire electrode blank 9a, but only affects the surface.
  • the recess 11 divides the electrode blank into two sections 13a, 15a, which at the end of the manufacturing process represent the individual filters (for example main filter, prefilter).
  • an insulator 17a is applied to the electrode blank 9a, so that the insulator 17a partially or completely covers the recess 11 and the recess 11 is thus provided as a cavity in the electrode blank 9a below the insulator 17a.
  • the insulator 17a is connected to both sections 13a, 15a.
  • the connection between the insulator 17 and the electrode rod assembly 9 is non-detachable and realized by adhesive.
  • the insulator 17 is formed as a quartz.
  • the insulator 17 may also be made of ceramic.
  • the metal of the electrode blank 9 has a similar temperature expansion coefficient as the Insulator so that a permanent connection between the metal and insulator 17 is possible.
  • a gap 19 is made between the cavity and the opposite side of the electrode blank 9. Through this gap 19, the sections 13, 15 axially spaced from each other. There is thus an electrical separation between the sections 13, 15, so that the sections 13, 15 can be acted upon independently of one another with voltages.
  • the insulator 17 holds the sections 13, 15 in a constant relative position to each other during the separation process, so that a complex adjustment is eliminated.
  • the intermediate space 19 various methods are suitable. Particularly suitable for this are milling, drilling, sawing and electro-erosion. When sawing, it is preferred to use a wire saw or a saw wire, which may be e.g. can be occupied at short intervals with diamond segments. This method opens up the possibility of making the gap flexible and e.g. also to introduce corners. Particularly preferably, the production of the intermediate space 19 can be done by means of wire erosion cutting. The recess 11 prevents that e.g. the eroding wire comes in contact with the insulator 17 during the separation of the electrode blank 9 in the two sections 13, 15.
  • a continuous section of the intermediate space 19 is necessary in order to be able to connect the two sections 13 and 15 of the electrode blank 9 separately from one another.
  • the first portion 13a may be regarded as a later part of the pre-filter 5 and the second portion 15a as a later part of the main filter 3.
  • the first section 13a corresponds to the main filter 3 and the second section 15a corresponds to the postfilter 7.
  • the separation of the two sections 13, 15 through the recess 11 and the gap 19 is formed such that no normal to Longitudinal axis of the electrode blank 9, a visual axis to the insulator 17 forms.
  • This has the advantage that the ions can not come into contact with the insulator 17 and thus no surface charging of the insulator 17 by the ions can take place. A surface charge of the insulator 17 would adversely affect the field geometry.
  • a step S5 at least one carrier element 25a is connected to the insulator 17a.
  • the connection between the insulator 17 and the carrier element 25 is preferably carried out by gluing.
  • a further processed electrode blank 9 is preferably arranged on the carrier element 25, which is preferably formed semicircular in cross-section in cross-section.
  • the electrode blanks 9 are processed together with the carrier elements 25.
  • the common processing is preferably done by grinding, in particular by a grindstone.
  • the cross sections of the electrode blanks 9 thereby each receive a circular section and a non-circular, in particular substantially hyperbolic, section.
  • the end portions of the support members 25 are simultaneously formed convex and concave to achieve later centering with another support member 25, a self-centering.
  • Fig. 3 shows an alternative embodiment of step S4, in particular from the gap 19a Fig. 2 ,
  • the gap 19b is formed such that it has an oblique section. Again, it is advantageous if - at least at the transition between pre-filter and main filter - the exit point 21 of the intermediate space 19b from the electrode blank 9b closer to the main filter 3 as the transition 23 between the recess 11 and the gap 19b.
  • Fig. 4 shows a cross-sectional view of step S3, wherein the viewer looks directly into the recess 11.
  • the upper part of the electrode blank 9c is removed for the formation of the recess 11.
  • the insulator 17c is applied over the recess 11, so that the recess 11 is at least partially covered by the insulator 17c.
  • the gap 19c (not shown here) is then produced, for example, by wire erosion between the later exit point 21 and the cavity of the recess 11.
  • Fig. 5 shows a schematic view of the electrode blank 9d.
  • the direction of flight 27 of the ions 29 is in the longitudinal direction, that is parallel to the longitudinal axis 31 of the electrode blank 9, fixed.
  • the longitudinal axis 31 is arranged on the side of the electrode blank 9, which is opposite to the side on which the insulator 17 is applied.
  • No normal 33 to the longitudinal axis 31 of the electrode blank 9 represents a visual axis to the insulator 17. In particular, this is ensured by the Verwinkelept and by the offset of the entry and exit point 21, 23 of the gap 19 d in and out of the electrode blank 9d , This measure completely or at least partially prevents the ions 29 from electrostatically charging the surface of the insulator 17d and thereby changing the field geometry.
  • Fig. 7 shows an alternative embodiment of the product according to the invention. Shown there are several short insulators 17h 'to 17h “", wherein in each case two of the insulators 17h' to 17h “" on a portion 13h, 15h are arranged.
  • the use of a plurality of insulators 17h 'to 17h “", in particular by the arrangement in the outer regions of the sections 13h, 15h, increases the stability of the electrode assembly 1.
  • the carrier element 25h is connected to the isolators 17h' to 17h "" wherein the two sections 13h, 15h are thereby held by the carrier element 25h in a constant relative position to each other.
  • the gap 19h is formed in this case staircase also in this case, so that there is no visual axis to the support member 25h here.
  • the insulators 17h 'to 17h "" may also have different lengths.
  • Fig. 8 shows a further alternative embodiment, wherein in each case one long insulator 17i ', 17i "is arranged on each of the sections 13i, 15i, and such a design increases as the use of several short insulators 17h' through 17h""in FIG Fig. 7 , the stability of the electrode assembly 1.
  • Fig. 9 shows a further alternative embodiment, wherein a long insulator 17j interconnects both sections 13j, 15j.
  • the support member 25 no longer holds the sections 13j, 15j together and in one constant relative position to each other, but the insulator 17j, which is placed over the gap 19j.
  • Fig. 10 shows an electrode device 35 which is composed of two electrode assemblies 1.
  • the electrode assemblies 1 each have a carrier element 25, wherein the end portions 37 of the carrier elements 25 are convex and concave and with the other carrier element 25 fit into each other.
  • the electrode blanks 9 are each attached to the inside of the support elements 25 by insulators 17 to the support elements 25.
  • the electrode assemblies 1 are preferably machined prior to assembly to the electrode device 35, in particular ground, so that the electrode blanks 9 each have a circular portion and a substantially hyperbolic portion (not shown here) and the support member 25, the convex and concave shaped end portions 37 receives.
  • the support members 25 can either be extended over almost the entire length of the electrode blanks 9 or arranged as ring-like elements at individual positions.
  • the electrode device 35 is fixed by means of the carrier elements 25 in the mass spectrometer.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
EP14188177.1A 2013-10-11 2014-10-08 Dispositif d'électrodes doté de pré- et/ou de post-filtre et son procédé de fabrication et spectromètre de masse doté d'un tel dispositif d'électrodes Active EP2860752B1 (fr)

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DE102013111254.4A DE102013111254B4 (de) 2013-10-11 2013-10-11 Elektroden-Vorrichtung mit Pre- und/oder Postfilter und Herstellungs-Verfahren hierzu sowie Massenspektrometer mit einer solchen Elektroden-Vorrichtung

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DE102017107137B4 (de) 2017-04-03 2022-06-23 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Vorrichtung mit einem Multipol und einer Haltevorrichtung zum Halten des Multipols, Haltevorrichtung, Massenspektrometer mit einer derartigen Vorrichtung, Montageeinheit zur Positionierung des Multipols sowie Verfahren zum Positionieren einer Haltevorrichtung gegenüber einem Multipol

Citations (7)

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Publication number Priority date Publication date Assignee Title
DE944900C (de) 1953-12-24 1956-06-28 Wolfgang Paul Dr Ing Verfahren zur Trennung bzw. zum getrennten Nachweis von Ionen verschiedener spezifischer Ladung
DE2215763A1 (de) 1972-03-30 1973-10-04 Geoffrey William Ball Massenspektrometer
US20040245460A1 (en) * 2003-06-05 2004-12-09 Tehlirian Berg A. Integrated shield in multipole rod assemblies for mass spectrometers
DE102004054835A1 (de) 2004-11-12 2006-05-24 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Verfahren zur Herstellung einer Elektrode bzw. mehrpoligen Elektrodenanordnung sowie mehrpolige Elektrodenanordnung und Elektrode für eine mehrpolige Elektrodenanordnung
US20070114391A1 (en) * 2005-11-14 2007-05-24 Alexander Mordehai Precision segmented ion trap
EP1814138A2 (fr) * 2006-01-30 2007-08-01 Varian, Inc. Constructions d'électrode bidimensionnelle pour traitement d'ions
DE112010002730T5 (de) * 2009-07-24 2012-08-16 Agilent Technologies Inc. Lineare ionenverarbeitungsvorrichtung mit einer verbesserten mechanischen isolation und anordnung

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DE944900C (de) 1953-12-24 1956-06-28 Wolfgang Paul Dr Ing Verfahren zur Trennung bzw. zum getrennten Nachweis von Ionen verschiedener spezifischer Ladung
DE2215763A1 (de) 1972-03-30 1973-10-04 Geoffrey William Ball Massenspektrometer
US20040245460A1 (en) * 2003-06-05 2004-12-09 Tehlirian Berg A. Integrated shield in multipole rod assemblies for mass spectrometers
DE102004054835A1 (de) 2004-11-12 2006-05-24 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Verfahren zur Herstellung einer Elektrode bzw. mehrpoligen Elektrodenanordnung sowie mehrpolige Elektrodenanordnung und Elektrode für eine mehrpolige Elektrodenanordnung
US20070114391A1 (en) * 2005-11-14 2007-05-24 Alexander Mordehai Precision segmented ion trap
EP1814138A2 (fr) * 2006-01-30 2007-08-01 Varian, Inc. Constructions d'électrode bidimensionnelle pour traitement d'ions
DE112010002730T5 (de) * 2009-07-24 2012-08-16 Agilent Technologies Inc. Lineare ionenverarbeitungsvorrichtung mit einer verbesserten mechanischen isolation und anordnung

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DAWSON: "Fringing Fields In The Quadrupole Mass Filter", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PHYSICS, vol. 6, 1971, pages 33 - 44
MILLER; DENTON: "The Quadrupole Mass Filter: Basic Operating Concepts", JOURNAL OF CHEMICAL EDUCATION, vol. 63, no. 7, 1986, pages 617 - 623

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US9190252B2 (en) 2015-11-17
EP2860752B1 (fr) 2017-04-19
US20150102213A1 (en) 2015-04-16
DE102013111254A1 (de) 2015-04-16
DE102013111254B4 (de) 2019-04-25

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