EP2778623A3 - Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus - Google Patents
Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus Download PDFInfo
- Publication number
- EP2778623A3 EP2778623A3 EP14159732.8A EP14159732A EP2778623A3 EP 2778623 A3 EP2778623 A3 EP 2778623A3 EP 14159732 A EP14159732 A EP 14159732A EP 2778623 A3 EP2778623 A3 EP 2778623A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- detector
- position detection
- image pickup
- machine tool
- scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24438—Special design of the sensing element or scale
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24476—Signal processing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/02—Arm motion controller
- Y10S901/09—Closed loop, sensor feedback controls arm movement
Abstract
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013052747A JP6147038B2 (en) | 2013-03-15 | 2013-03-15 | Position detecting device, lens device, imaging system, and machine tool |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2778623A2 EP2778623A2 (en) | 2014-09-17 |
EP2778623A3 true EP2778623A3 (en) | 2016-03-16 |
EP2778623B1 EP2778623B1 (en) | 2019-02-27 |
Family
ID=50729340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14159732.8A Active EP2778623B1 (en) | 2013-03-15 | 2014-03-14 | Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus |
Country Status (4)
Country | Link |
---|---|
US (1) | US20140277730A1 (en) |
EP (1) | EP2778623B1 (en) |
JP (1) | JP6147038B2 (en) |
CN (1) | CN104048686B (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6533360B2 (en) * | 2013-10-30 | 2019-06-19 | キヤノン株式会社 | Position detection device, lens apparatus having the same, and imaging apparatus |
US9427872B1 (en) * | 2014-12-21 | 2016-08-30 | Google Inc. | Devices and methods for encoder calibration |
JP6440609B2 (en) * | 2015-01-16 | 2018-12-19 | キヤノン株式会社 | Position detection device, lens device, imaging system, machine tool, exposure device, position detection method, program, storage medium |
US10215596B2 (en) | 2015-01-16 | 2019-02-26 | Canon Kabushiki Kaisha | Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy |
US10201901B2 (en) * | 2015-01-29 | 2019-02-12 | Canon Kabushiki Kaisha | Robot apparatus, method for controlling robot, program, and recording medium |
US9863790B1 (en) * | 2015-06-08 | 2018-01-09 | X Development Llc | Devices and methods for a rotary encoder |
JP6717305B2 (en) * | 2015-07-17 | 2020-07-01 | 株式会社ニコン | Encoder device, drive device, stage device, robot device, rotation information acquisition method, and rotation information acquisition program |
US10213923B2 (en) * | 2015-09-09 | 2019-02-26 | Carbon Robotics, Inc. | Robotic arm system and object avoidance methods |
JP6555995B2 (en) * | 2015-09-11 | 2019-08-07 | キヤノン株式会社 | Rotation detection means |
JP6786873B2 (en) * | 2016-05-20 | 2020-11-18 | 株式会社ニコン | Encoder device, drive device, stage device, and robot device |
US10330467B2 (en) * | 2016-06-01 | 2019-06-25 | Virtek Vision International Ulc | Precision locating rotary stage |
JP2018059714A (en) * | 2016-09-30 | 2018-04-12 | キヤノン株式会社 | Eccentricity calculation method, rotary encoder, robot arm and robot apparatus |
WO2018150833A1 (en) * | 2017-02-20 | 2018-08-23 | 日立オートモティブシステムズ株式会社 | Angle detection device |
JP2019035700A (en) * | 2017-08-18 | 2019-03-07 | セイコーエプソン株式会社 | Encoder, robot, and printer |
JP7203584B2 (en) * | 2018-12-03 | 2023-01-13 | キヤノンプレシジョン株式会社 | absolute rotary encoder |
CN111457948A (en) * | 2019-01-22 | 2020-07-28 | 大银微系统股份有限公司 | Optical encoder and control method thereof |
US20200271484A1 (en) * | 2019-02-25 | 2020-08-27 | Hiwin Mikrosystem Corp. | Optical encoder and control method thereof |
JP6924419B2 (en) * | 2019-09-06 | 2021-08-25 | 株式会社安川電機 | Encoder, servo motor, servo system |
DE102021112648A1 (en) | 2021-05-17 | 2022-11-17 | Sick Ag | Sensor device and method for determining a kinematic variable of a relative movement |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4266125A (en) * | 1978-12-21 | 1981-05-05 | Hewlett-Packard Company | Optical shaft angle encoder |
US20040206894A1 (en) * | 2003-04-21 | 2004-10-21 | Mitsubishi Denki Kabushiki Kaisha | Optical rotary encoder |
EP2251647A1 (en) * | 2009-05-13 | 2010-11-17 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Absolute angular position measuring device and method |
US20110147572A1 (en) * | 2009-12-17 | 2011-06-23 | Canon Kabushiki Kaisha | Rotary encoder and rotation mechanism including the same |
EP2343510A2 (en) * | 2009-12-24 | 2011-07-13 | Canon Kabushiki Kaisha | Rotary encoder |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62231118A (en) * | 1986-03-31 | 1987-10-09 | Shin Meiwa Ind Co Ltd | Encoder |
JPH0658771A (en) * | 1992-08-10 | 1994-03-04 | Shimpo Ind Co Ltd | Rotary position detector |
US5774074A (en) * | 1997-01-21 | 1998-06-30 | Hewlett-Packard Company | Multi-track position encoder system |
JP2004071007A (en) * | 2002-08-02 | 2004-03-04 | Matsushita Electric Ind Co Ltd | Disk unit, eccentricity control method of disk, and recording medium |
JP4497970B2 (en) * | 2004-03-22 | 2010-07-07 | キヤノン株式会社 | Lens device |
JP2005321696A (en) * | 2004-05-11 | 2005-11-17 | Canon Inc | Lens barrel and optical instrument having the same |
GB0508325D0 (en) * | 2005-04-26 | 2005-06-01 | Renishaw Plc | Rotary encoders |
JP4764099B2 (en) * | 2005-08-10 | 2011-08-31 | キヤノン株式会社 | Position detection apparatus and imaging apparatus |
JP4271232B2 (en) * | 2006-12-20 | 2009-06-03 | ファナック株式会社 | Apparatus, method, program, and recording medium for executing offline programming of robot |
JP5168106B2 (en) * | 2008-09-08 | 2013-03-21 | 株式会社リコー | Rotating disk eccentricity measurement method |
DE102008043556B4 (en) * | 2008-11-07 | 2022-03-31 | Dr. Johannes Heidenhain Gmbh | position measuring device |
DE102009040790B4 (en) * | 2009-09-09 | 2012-10-25 | Universität Stuttgart | Method for optical compensation of the measuring track centering in rotary angle sensors |
JP5126290B2 (en) * | 2010-06-07 | 2013-01-23 | 株式会社安川電機 | Encoder, servo motor, servo unit, and encoder manufacturing method |
JP5479236B2 (en) * | 2010-06-15 | 2014-04-23 | キヤノン株式会社 | Rotary encoder |
JP5973773B2 (en) * | 2012-04-26 | 2016-08-23 | 株式会社トプコン | Rotation angle detector |
JP6494303B2 (en) * | 2015-01-26 | 2019-04-03 | キヤノンプレシジョン株式会社 | Rotary scale manufacturing method |
-
2013
- 2013-03-15 JP JP2013052747A patent/JP6147038B2/en active Active
-
2014
- 2014-03-11 CN CN201410086802.9A patent/CN104048686B/en active Active
- 2014-03-13 US US14/208,321 patent/US20140277730A1/en not_active Abandoned
- 2014-03-14 EP EP14159732.8A patent/EP2778623B1/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4266125A (en) * | 1978-12-21 | 1981-05-05 | Hewlett-Packard Company | Optical shaft angle encoder |
US20040206894A1 (en) * | 2003-04-21 | 2004-10-21 | Mitsubishi Denki Kabushiki Kaisha | Optical rotary encoder |
EP2251647A1 (en) * | 2009-05-13 | 2010-11-17 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Absolute angular position measuring device and method |
US20110147572A1 (en) * | 2009-12-17 | 2011-06-23 | Canon Kabushiki Kaisha | Rotary encoder and rotation mechanism including the same |
EP2343510A2 (en) * | 2009-12-24 | 2011-07-13 | Canon Kabushiki Kaisha | Rotary encoder |
Also Published As
Publication number | Publication date |
---|---|
CN104048686A (en) | 2014-09-17 |
JP2014178227A (en) | 2014-09-25 |
CN104048686B (en) | 2017-07-18 |
JP6147038B2 (en) | 2017-06-14 |
EP2778623B1 (en) | 2019-02-27 |
US20140277730A1 (en) | 2014-09-18 |
EP2778623A2 (en) | 2014-09-17 |
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