EP2778623A3 - Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus - Google Patents

Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus Download PDF

Info

Publication number
EP2778623A3
EP2778623A3 EP14159732.8A EP14159732A EP2778623A3 EP 2778623 A3 EP2778623 A3 EP 2778623A3 EP 14159732 A EP14159732 A EP 14159732A EP 2778623 A3 EP2778623 A3 EP 2778623A3
Authority
EP
European Patent Office
Prior art keywords
detector
position detection
image pickup
machine tool
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14159732.8A
Other languages
German (de)
French (fr)
Other versions
EP2778623B1 (en
EP2778623A2 (en
Inventor
Hitoshi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP2778623A2 publication Critical patent/EP2778623A2/en
Publication of EP2778623A3 publication Critical patent/EP2778623A3/en
Application granted granted Critical
Publication of EP2778623B1 publication Critical patent/EP2778623B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00Controls for manipulators
    • B25J13/08Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428Error prevention
    • G01D5/24433Error prevention by mechanical means
    • G01D5/24438Special design of the sensing element or scale
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471Error correction
    • G01D5/24476Signal processing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00Robots
    • Y10S901/02Arm motion controller
    • Y10S901/09Closed loop, sensor feedback controls arm movement

Abstract

A position detection apparatus (100) includes a scale (10) including a pattern circumferentially and periodically formed on a circle whose center is a predetermined point, a sensor unit (20) relatively movable with respect to the scale (10), and a signal processor (40) which processes an output signal of the sensor unit (20) to obtain position information of an object, and the sensor unit (20) includes a first detector (21) and a second detector (22), and the signal processor (40) reduces an error component contained in the position information due to a difference between a rotation center of the scale (10) and the predetermined point based on a first detection signal outputted from the first detector (21) and on a second detection signal outputted from the second detector (22).
EP14159732.8A 2013-03-15 2014-03-14 Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus Active EP2778623B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013052747A JP6147038B2 (en) 2013-03-15 2013-03-15 Position detecting device, lens device, imaging system, and machine tool

Publications (3)

Publication Number Publication Date
EP2778623A2 EP2778623A2 (en) 2014-09-17
EP2778623A3 true EP2778623A3 (en) 2016-03-16
EP2778623B1 EP2778623B1 (en) 2019-02-27

Family

ID=50729340

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14159732.8A Active EP2778623B1 (en) 2013-03-15 2014-03-14 Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus

Country Status (4)

Country Link
US (1) US20140277730A1 (en)
EP (1) EP2778623B1 (en)
JP (1) JP6147038B2 (en)
CN (1) CN104048686B (en)

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JP6533360B2 (en) * 2013-10-30 2019-06-19 キヤノン株式会社 Position detection device, lens apparatus having the same, and imaging apparatus
US9427872B1 (en) * 2014-12-21 2016-08-30 Google Inc. Devices and methods for encoder calibration
JP6440609B2 (en) * 2015-01-16 2018-12-19 キヤノン株式会社 Position detection device, lens device, imaging system, machine tool, exposure device, position detection method, program, storage medium
US10215596B2 (en) 2015-01-16 2019-02-26 Canon Kabushiki Kaisha Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy
US10201901B2 (en) * 2015-01-29 2019-02-12 Canon Kabushiki Kaisha Robot apparatus, method for controlling robot, program, and recording medium
US9863790B1 (en) * 2015-06-08 2018-01-09 X Development Llc Devices and methods for a rotary encoder
JP6717305B2 (en) * 2015-07-17 2020-07-01 株式会社ニコン Encoder device, drive device, stage device, robot device, rotation information acquisition method, and rotation information acquisition program
US10213923B2 (en) * 2015-09-09 2019-02-26 Carbon Robotics, Inc. Robotic arm system and object avoidance methods
JP6555995B2 (en) * 2015-09-11 2019-08-07 キヤノン株式会社 Rotation detection means
JP6786873B2 (en) * 2016-05-20 2020-11-18 株式会社ニコン Encoder device, drive device, stage device, and robot device
US10330467B2 (en) * 2016-06-01 2019-06-25 Virtek Vision International Ulc Precision locating rotary stage
JP2018059714A (en) * 2016-09-30 2018-04-12 キヤノン株式会社 Eccentricity calculation method, rotary encoder, robot arm and robot apparatus
WO2018150833A1 (en) * 2017-02-20 2018-08-23 日立オートモティブシステムズ株式会社 Angle detection device
JP2019035700A (en) * 2017-08-18 2019-03-07 セイコーエプソン株式会社 Encoder, robot, and printer
JP7203584B2 (en) * 2018-12-03 2023-01-13 キヤノンプレシジョン株式会社 absolute rotary encoder
CN111457948A (en) * 2019-01-22 2020-07-28 大银微系统股份有限公司 Optical encoder and control method thereof
US20200271484A1 (en) * 2019-02-25 2020-08-27 Hiwin Mikrosystem Corp. Optical encoder and control method thereof
JP6924419B2 (en) * 2019-09-06 2021-08-25 株式会社安川電機 Encoder, servo motor, servo system
DE102021112648A1 (en) 2021-05-17 2022-11-17 Sick Ag Sensor device and method for determining a kinematic variable of a relative movement

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US4266125A (en) * 1978-12-21 1981-05-05 Hewlett-Packard Company Optical shaft angle encoder
US20040206894A1 (en) * 2003-04-21 2004-10-21 Mitsubishi Denki Kabushiki Kaisha Optical rotary encoder
EP2251647A1 (en) * 2009-05-13 2010-11-17 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Absolute angular position measuring device and method
US20110147572A1 (en) * 2009-12-17 2011-06-23 Canon Kabushiki Kaisha Rotary encoder and rotation mechanism including the same
EP2343510A2 (en) * 2009-12-24 2011-07-13 Canon Kabushiki Kaisha Rotary encoder

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US4266125A (en) * 1978-12-21 1981-05-05 Hewlett-Packard Company Optical shaft angle encoder
US20040206894A1 (en) * 2003-04-21 2004-10-21 Mitsubishi Denki Kabushiki Kaisha Optical rotary encoder
EP2251647A1 (en) * 2009-05-13 2010-11-17 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Absolute angular position measuring device and method
US20110147572A1 (en) * 2009-12-17 2011-06-23 Canon Kabushiki Kaisha Rotary encoder and rotation mechanism including the same
EP2343510A2 (en) * 2009-12-24 2011-07-13 Canon Kabushiki Kaisha Rotary encoder

Also Published As

Publication number Publication date
CN104048686A (en) 2014-09-17
JP2014178227A (en) 2014-09-25
CN104048686B (en) 2017-07-18
JP6147038B2 (en) 2017-06-14
EP2778623B1 (en) 2019-02-27
US20140277730A1 (en) 2014-09-18
EP2778623A2 (en) 2014-09-17

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