EP2766712B1 - Verfahren zur erkennung der interaktion von mindestens einer einheit mit einer dielektrischen schicht - Google Patents
Verfahren zur erkennung der interaktion von mindestens einer einheit mit einer dielektrischen schicht Download PDFInfo
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- EP2766712B1 EP2766712B1 EP12780227.0A EP12780227A EP2766712B1 EP 2766712 B1 EP2766712 B1 EP 2766712B1 EP 12780227 A EP12780227 A EP 12780227A EP 2766712 B1 EP2766712 B1 EP 2766712B1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/5005—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing involving human or animal cells
- G01N33/5091—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing involving human or animal cells for testing the pathological state of an organism
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6489—Photoluminescence of semiconductors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
Definitions
- the present invention relates to the technical field of luminescence detection applied to Biosciences. More precisely, the present invention relates to a method for detecting the interaction of at least one entity with a luminescent dielectric layer containing different electronic levels. Such a method is particularly suitable for the study of living cells or cell organelles such as cell nuclei and mitochondria.
- fluorophores http://fr.wikipedia.org/wiki/Fluorophore
- NPs semiconductor nanoparticles II-VI and III-V
- the fluorophores used are often organic in nature and are mostly toxic.
- these molecules lose their luminescence properties by degrading under the effect of the exciting light, which limits the observation time to a few minutes.
- NPs II-VI and III-V for their part, have the following advantages compared to fluorophores: (i) the emission wavelength can be controlled by their size, (ii) they lead to high luminescence yields and (iii) they exhibit greater emission stability. However, these NPs have been shown to be cytotoxic, due to the release of toxic ions (for example, Cd, Se, etc.) under photoexcitation.
- toxic ions for example, Cd, Se, etc.
- the patent application US2010 / 0035335 uses metallic nanoparticles which either amplify the natural luminescence of cells or fluorescent markers integrated into the cell. This document therefore focuses either on the amplification of cellular autofluorescence which leads to a single green color, or on that of the staining agents added to the cells which have a cytotoxic effect.
- the document " Luminescence processes in amorphous hydrogenated silicon-nitride nanometric multilayers "(F. Giorgis and CF Pirri, Physical Rview B, Vol. 60, Number 16 ) shows the detection of photoluminescence in a dielectric layer of silicon.
- a photoluminescence-based quantum semiconductor biosensor for rapid in situ detection of Escherichia coli (Valerie Duplan et al., Sensors and Actuators B: Chemical ), shows the detection of biomolecules based on the photoluminescence of a GaAs semiconductor.
- the object of the invention is precisely to propose a new method suitable for the study of different biological entities or biomolecules, which is easy to implement and does not require prior labeling of the biological entities or biomolecules.
- the method according to the invention must therefore be simple and competitive, compared to the prior techniques mentioned above.
- the entity is capable, by physicochemical interactions with the dielectric layer on which it is deposited, of influencing the radiative and non-radiative electronic transitions between the energy levels in the band gap of the dielectric layer caused by the external excitatory electromagnetic radiation used.
- the invention uses the passivation of dielectric layer by the entity or entities deposited on the dielectric layer (which can in particular be a living cell) which increases the rate of radiative recombinations of the layer, thus modifying the luminescence emitted.
- the process according to the invention does not use the plasmonic effect at all, as is the case in the process described in the patent application. US2010 / 0035335 .
- the dielectric layer has the following stoichiometry in atoms of Si, N and O: SiO x with 0 ⁇ x ⁇ 2, Si y N z with 1 ⁇ y ⁇ 3 and 0 ⁇ z ⁇ 4 or Si t O u N v with 1 ⁇ t ⁇ 3, 0 ⁇ u ⁇ 1 and 0 ⁇ v ⁇ 2.
- the stoichiometries given in the context of the invention include the silicon nanoparticles present within the layer.
- the silicon nanoparticles represent a volume fraction of 5 to 75%, relative to the total volume of the dielectric layer (i.e. of the matrix + the silicon nanoparticles). This volume fraction will be a function of the stoichiometry of the layer.
- the dielectric layers richer in Si will have a higher volume fraction of Si nanoparticles.
- the presence of the Si nanoparticles can be determined by TEM, the stoichiometry by element spectroscopy techniques associated with TEM, and the volume fraction of the silicon particles by XPS spectroscopy.
- the dielectric layer is composed of silicon oxide in which silicon nanoparticles are distributed, it comprises Si-H bonds, due to the passivation by hydrogen of at least part of the interface defects between the silicon oxide matrix and the silicon nanoparticles.
- the dielectric layer containing different electronic levels in the forbidden energy band of the dielectric layer is composed of silicon nitride or silicon oxy-nitride in which silicon nanoparticles are distributed, the latter comprises bonds Si-H and NH, corresponding to passivation by hydrogen of at least part of the interface defects between the matrix of silicon nitride or silicon oxy-nitride respectively and the silicon nanoparticles that it contains .
- the dielectric layer is a dielectric layer of silicon nitride in which silicon nanoparticles are distributed and which is partially hydrogenated and whose stoichiometry in silicon atoms and in nitrogen atoms is SiN xa with xa ranging from 0 , 4 to 0.8.
- the Figure 2 shows the energy state diagram of an SiN xa dielectric layer as defined above, as well as some of the possible radiative electronic transitions between energy levels in the bandgap.
- the first electronic transition (Ec (SiN xa ) -> Si - ) corresponds to a red emission relating to the transition between the conduction band (Ec) of the SiN xa layer and the Si - fault states of the silicon nanoparticles .
- the third way of recombination corresponds to the electronic transition (Si 0 -> N - ) which occurs between the neutral silicon atoms of the silicon nanoparticles and the N - fault states of the dielectric matrix .
- There are also other recombination pathways in the blue emission spectrum for this type of layer Robertson J. et al., Appl. Phys. Lett. 1984, 44, 415-417 and Mo C. et al. J. Appl. Phys. 1993, 73, 5185-5188 ).
- dielectric layers in particular of the organic type, for example polymers, in particular used in the field of photovoltaics.
- the interaction of the entity with the dielectric layer makes it possible to achieve such transition levels and therefore leads to an emission of luminescence.
- the emission may be different depending on the area of the cell in contact with the dielectric layer, as will appear later with reference to the Figures.
- the entity will be deposited on the dielectric layer and left for a sufficient time to obtain an interaction of the entity with the dielectric layer leading to physicochemical interactions with the dielectric layer on which it is deposited, which will influence radiative and non-radiative electronic transitions between energy levels in the forbidden band caused by external excitatory electromagnetic radiation.
- the luminescence emission obtained differs from that which would be obtained if the entity were deposited on a conventional substrate, such as a glass slide, as well as from that obtained with the dielectric layer alone.
- the silicon nanoparticles present in the dielectric layer can be in the form of essentially spherical particles, rods or particles of irregular shape.
- the particles will be essentially spherical.
- the silicon nanoparticles Preferably, the silicon nanoparticles have a size of less than 50 nm, and advantageously a size belonging to the range going from 1 to 20 nm, and preferentially to the range going from 1 to 7 nm. Most often, the nanoparticles used are essentially spherical, that is to say that their shape does not deviate by more than 10% from a perfect sphere.
- the size of a nanoparticle corresponds to its diameter in the case of spherical particles or to its equivalent diameter in the case of non-spherical particles.
- the measurement of the equivalent diameter of a nanoparticle can be carried out by measuring the area of each nanoparticle on a photograph by transmission electron microscopy.
- the dielectric layer has a thickness of less than 500 nm, and typically belonging to the range going from 30 to 200 nm and preferentially to the range going from 50 to 150 nm, which will of course be related to the size of the nanoparticles. of silicon present.
- the dielectric layer is generally deposited on a substrate 3 playing the role of support, as illustrated Figure 1 .
- substrates will be of the plate or lamella type, made of glass or quartz, or even of silicon or more generally any support which would withstand the process of depositing the dielectric layer.
- the dielectric layers can be obtained within the scope of the invention by a chemical vapor deposition (CVD) process, and in particular by a plasma assisted chemical vapor deposition process called PECVD.
- CVD chemical vapor deposition
- PECVD plasma assisted chemical vapor deposition
- CVD deposition is carried out by reacting the various constituents of a vapor phase. These constituents are created by the dissociation of several species. These reactions require an "energy motor” which can be thermal energy, but also energy supplied by plasma or another energy source.
- the deposition will be carried out from a gas mixture composed of silane (SiH 4 ) and nitrous oxide (N 2 O), optionally in a carrier gas of the argon, helium or hydrogen type.
- the deposition will be carried out from a gas mixture containing SiH 4 and ammonia (NH 3 ) or nitrogen (N 2 ), playing the role of gas precursors.
- the deposit will be carried out from a gas mixture composed of SiH 4 , NH 3 (or N 2 ) and N 2 O.
- the different stoichiometries are obtained by varying the ratio of the precursor gases.
- the deposition time determines a different thickness.
- such deposits can be carried out at a temperature belonging to the range going from 50 to 500 ° C, and typically of the order of 370 ° C.
- the pressure, frequency and power injected to generate the plasma, as well as the gas flow rates will depend on the reactor used and will be adapted by those skilled in the art.
- the deposited layers obtained contain Si nanoparticles integrated into the matrix of silicon oxide, silicon nitride or silicon oxy-nitride, depending on the gas mixture used. Such layers are partially hydrogenated, which is why the presence of Si-H and Si-OH bonds is mentioned, in the case of silicon oxide, the presence of Si-H and NH bonds, in the case of silicon oxide. silicon nitride and the presence of Si-H, Si-OH and NH bonds, in the case of silicon oxy-nitride.
- the preparation of such dielectric layers is described in particular by JF Lelievre, in "Elaboration of SiNx: H by PECVD: optimization of properties optical, passivating and structural for photovoltaic applications ", Thèse INSA de Lyon, 2007, p.
- the deposition be carried out by other chemical vapor deposition techniques well known to those skilled in the art, namely the chemical vapor deposition technique assisted by UV photon UVCVD (for "UV (Hg) photon assisted Chemical Vapor Deposition "), the technique of chemical vapor deposition at atmospheric pressure APCVD (for" Atmospheric Chemical Vapor Deposition ”) or the technique of chemical vapor deposition at low pressure LPCVD (for" Low Pressure Chemical Vapor Deposition ”).
- UV photon UVCVD for "UV (Hg) photon assisted Chemical Vapor Deposition”
- LPCVD Low Pressure Chemical Vapor Deposition
- the method according to the invention can be applied to any type of biological entity, in particular to molecules entering into the composition of cells, such as proteins, lipids (phospholipids or glycolipids), DNAs, RNAs, or even to cells. or more generally to cellular organelles such as nuclei and mitochondria.
- the method according to the invention can be used on any type of substance (products in the biomedical, agro-food, cosmetic, perfumery, etc.) field which can have a physico-chemical interaction with the dielectric layer and thus influence the transitions. radiative and non-radiative electronics between energy levels in the band gap caused by external excitatory electromagnetic radiation.
- the dielectric layer in particular a single cell
- a population of entities in particular a cell culture
- the entity may be deposited, in a form in solution or in suspension in an appropriate solvent, or as such.
- the contact time between the entity and the dielectric layer, before measurement of the luminescence, and possibly excitation if the excitation does not take place thanks to natural light will preferably be greater than 10 s, or even 1 hour or 1 day, this time depending on the entity studied. For example, for certain types of cells, longer times of one to several days may be necessary for a multi-color image in particular to appear.
- the method according to the invention is particularly advantageous in the case where the entity is a living cell.
- the living cell can be deposited and be grown directly on the dielectric layer.
- any culture medium well known to those skilled in the art can be used.
- rinsing can be carried out before measurement of the luminescence, or even before excitation if the excitation is not carried out thanks to natural light. Before detection, it may be useful to fix the cell (s) according to techniques well known to those skilled in the art, for example, by rinsing with ethanol.
- the method according to the invention in particular when the entity is a cell or a cell nucleus or a mitochondria, could be used to carry out cell differentiation, to diagnose a pathology, and in particular a cancer or else to evaluate the disease. effectiveness of treatment.
- the dielectric layer does not include, either in its mass or on the surface, metal particles.
- metal particles include, either in its mass or on the surface, metal particles.
- the detection can be carried out without adding a luminescent agent to the entity. That is to say, in particular, without prior marking of the entity.
- the exciting electromagnetic radiation is most often radiation of light visible to the human eye, infrared, ultraviolet or X-ray radiation.
- an electromagnetic radiation in the wavelength range from 250 to 700 nm.
- the luminescence detection means can be a CCD sensor (standing for “Charge-Coupled Device”, for charge transfer device) connected to a computer system for processing the image obtained.
- the detection for its part, will preferably be carried out in the range of wavelengths ranging from 300 to 2000 nm.
- step c) for the detection of the luminescence of the dielectric layer to be obtained in step c) in the form of an image in several colors.
- the use of the invention is possible in biology or in medicine and will consist quite simply in replacing the substrates made of glass conventionally used as supports for cell cultures (during their observation in optical microscopy) by substrates, in particular of glass, carriers.
- the method according to the invention offers new approaches in the field of cell imaging, and in particular allows the multi-color visualization of cells (or more generally of biological entities), without requiring the use of any fluorescent agent.
- fluorescent agent such as fluorophores or fluorescent nanoparticles which disrupt or completely change the normal functioning of cells or cellular organelles.
- the method according to the invention allows efficient in-vitro visualization of a biological entity, for various applications in biology or medicine.
- the method according to the invention is particularly suitable for the visualization and the study of cells, in particular in the form of cell culture, or even of cell organelles such as nuclei or mitochondria which can be isolated from cells.
- the ratio of ammonia / silane gas flow rates in the circulating gas determines the stoichiometry of the dielectric layer deposited (silicon nanoparticles included) which is therefore equal to 5.
- the deposit has a thickness of 60 to 200 nm, depending on the time of deposit.
- the Figure 3 is a TEM photograph of the deposit obtained and shows the presence of silicon particles with a diameter of between 2 and 4 nm within the silicon nitride matrix.
- FIG. 4 show the effectiveness of the method according to the invention for fluorescent visualization of biological cells without any additional specific agent.
- the two images were obtained under the same optical acquisition conditions.
- Figure 4 (A) that the natural fluorescence (green in color) of 3T3-L1 cells fixed on ordinary glass-based supports is non-existent.
- Figure 4 (B) the same cells spread on the substrates as obtained previously give a clearly visible fluorescence ( Figure 4 (B) ) with a multi-color image with areas of red / yellow and green.
- the places where no cells are seen correspond to the SiN xa layer in the absence of cells.
- the luminescence intensity of the layers on their own is therefore very low, which proves that the deposited cells not only give a given set of colors, but also passivate non-radiative states.
- the colors obtained correspond well to the possible transitions as illustrated Figure 2 .
- the cell influences the substrate differently, so that it is possible to distinguish the various compartments of the cell which will correspond to fluorescence emissions of different colors. It is thus possible to distinguish the nucleus, the endoplasmic reticulum and the cytoplasm.
- the fluorescence intensity detected is much higher than that obtained with the autofluorescence signal of the cells (green only) obtained under the same acquisition conditions in terms of acquisition time and intensity of excitation.
- FIGs 5 and 6 demonstrate the different fluorescence obtained with different cells, due to the very nature of the cells ( Figure 6 ) or by their healthy versus tumoral character ( Figure 5 ).
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Claims (18)
- Verfahren zum Erfassen der Interaktion von wenigstens einer Einheit mit einer dielektrischen Schicht, die unterschiedliche elektronische Niveaus in dem verbotenen Energieband der dielektrischen Schicht enthält,
bei dem:a) die Einheit auf der dielektrischen Schicht abgeschieden wird,b) die Einheit und die dielektrische Schicht, auf der sie abgeschieden ist, einer elektromagnetischen Erregerstrahlung ausgesetzt werden, die unter den in Schritt c) umgesetzten Bedingungen zu keiner beobachtbaren Lumineszenz der Einheit selbst führt, undc) die Lumineszenz der dielektrischen Schicht, deren elektronische Strahlungs- und Nichtstrahlungsübergänge zwischen den Energieniveaus in dem verbotenen Band infolge ihrer Interaktion mit der Einheit beeinflusst worden sind, erfasst wird. - Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass die dielektrische Schicht zusammengesetzt ist:- entweder aus Siliziumoxid, in dem Siliziumnanopartikel verteilt sind, wobei die Schicht Si-H-, Si-O-Si- und Si-OH-Bindungen umfasst,- oder aus Siliziumnitrid, in dem Siliziumnanopartikel verteilt sind, wobei die Schicht Si-H-, Si-N-Si- und N-H-Bindungen umfasst,- oder aus einem Siliziumoxynitrid, in dem Siliziumnanopartikel verteilt sind, wobei die Schicht Si-H-, Si-N-Si-, Si-O-Si-, Si-OH- und N-H-Bindungen umfasst.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Einheit durch physikalisch-chemische Interaktionen mit der dielektrischen Schicht, auf der sie abgeschieden ist, in der Lage ist, die elektronischen Strahlungs- und Nichtstrahlungsübergänge zwischen den Energieniveaus in dem verbotenen Band, welche durch die externe elektromagnetische Erregerstrahlung bewirkt werden, zu beeinflussen.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die dielektrische Schicht die folgende Stöchiometrie an Si-, N- und O-Atomen aufweist:
SiOx wobei 0 < x < 2, SiyNz wobei 1 < y < 3 und 0 < z < 4 oder SitOuNv wobei 1 < t < 3, 0 < u < 1 und 0 < v < 2. - Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Siliziumnanopartikel eine zu dem Bereich von 1 bis 20 nm, vorzugsweise zu dem Bereich von 1 bis 7 nm gehörende Größe aufweisen.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die dielektrische Schicht eine Dicke von weniger als 500 nm und vorzugsweise von 30 bis 200 nm und bevorzugt von 50 bis 150 nm aufweist.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die dielektrische Schicht eine dielektrische Schicht aus Siliziumnitrid ist, in der Siliziumnanopartikel verteilt sind und die teilweise hydriert ist und deren Stöchiometrie an Siliziumatomen und an Stickstoffatomen SiNxa ist, wobei xa im Bereich von 0,4 bis 0,8 liegt.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die dielektrische Schicht weder in ihrer Masse noch auf der Oberfläche Metallpartikel enthält.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die elektromagnetische Erregerstrahlung eine für das menschliche Auge sichtbare Lichtstrahlung, eine Infrarot-, Ultraviolett- oder Röntgenstrahlung ist.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Erfassung der Lumineszenz der dielektrischen Schicht in Schritt c) in Form eines Mehrfarbenbildes erfolgt.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die dielektrische Schicht durch ein Verfahren der plasmaunterstützten chemischen Gasphasenabscheidung, welches als PECVD bezeichnet wird, erhalten wird.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Erfassung ohne Zugabe eines Lumineszenzmittels zu der Einheit durchgeführt wird.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Einheit eine biologische Einheit ist, insbesondere ein Molekül, das Bestandteil von Zellen ist, wie ein Protein, ein Lipid, eine DNA, eine RNA, eine Zelle oder ein zelluläres Organell, wie ein Kern oder ein Mitochondrium.
- Verfahren nach Anspruch 13, dadurch gekennzeichnet, dass die Einheit ein zelluläres Organell, wie ein Kern oder ein Mitochondrium, ist oder vorzugsweise die Einheit eine lebende Zelle ist.
- Verfahren nach Anspruch 14, dadurch gekennzeichnet, dass die Einheit eine lebende Zelle ist, die auf der dielektrischen Schicht abgeschieden und in Wachstum versetzt wird.
- Verwendung eines Verfahrens nach einem der Ansprüche 13 bis 15, zur Durchführung der Zelldifferenzierung.
- Verwendung eines Verfahrens nach einem der Ansprüche 13 bis 15, zur Diagnose einer Pathologie und insbesondere von Krebs.
- Verwendung eines Verfahrens nach einem der Ansprüche 13 bis 15, zur Bewertung der Wirksamkeit einer Behandlung.
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PCT/FR2012/052274 WO2013054024A1 (fr) | 2011-10-11 | 2012-10-08 | Procede de detection de l'interaction d'au moins une entite avec une couche dielectrique |
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Title |
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VALÉRIE DUPLAN ET AL: "A photoluminescence-based quantum semiconductor biosensor for rapid in situ detection of Escherichia coli (Supporting Information)", SENSORS AND ACTUATORS B: CHEMICAL: INTERNATIONAL JOURNAL DEVOTED TO RESEARCH AND DEVELOPMENT OF PHYSICAL AND CHEMICAL TRANSDUCERS, vol. 160, no. 1, 1 December 2011 (2011-12-01), NL, pages 46 - 51, XP055504018, ISSN: 0925-4005, DOI: 10.1016/j.snb.2011.07.010 * |
VALRIE DUPLAN ET AL: "A photoluminescence-based quantum semiconductor biosensor for rapid in situ detection of Escherichia coli", SENSORS AND ACTUATORS B: CHEMICAL: INTERNATIONAL JOURNAL DEVOTED TO RESEARCH AND DEVELOPMENT OF PHYSICAL AND CHEMICAL TRANSDUCERS, ELSEVIER BV, NL, vol. 160, no. 1, 5 July 2011 (2011-07-05), pages 46 - 51, XP028110866, ISSN: 0925-4005, [retrieved on 20110719], DOI: 10.1016/J.SNB.2011.07.010 * |
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US20140255973A1 (en) | 2014-09-11 |
FR2981159B1 (fr) | 2013-11-29 |
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