EP2747123A3 - Ionization pump stage - Google Patents

Ionization pump stage Download PDF

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Publication number
EP2747123A3
EP2747123A3 EP13191365.9A EP13191365A EP2747123A3 EP 2747123 A3 EP2747123 A3 EP 2747123A3 EP 13191365 A EP13191365 A EP 13191365A EP 2747123 A3 EP2747123 A3 EP 2747123A3
Authority
EP
European Patent Office
Prior art keywords
gas
ionizing
ionization
section
entering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13191365.9A
Other languages
German (de)
French (fr)
Other versions
EP2747123B1 (en
EP2747123A2 (en
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2747123A2 publication Critical patent/EP2747123A2/en
Publication of EP2747123A3 publication Critical patent/EP2747123A3/en
Application granted granted Critical
Publication of EP2747123B1 publication Critical patent/EP2747123B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/002—Influencing flow of fluids by influencing the boundary layer
    • F15D1/0065—Influencing flow of fluids by influencing the boundary layer using active means, e.g. supplying external energy or injecting fluid
    • F15D1/0075—Influencing flow of fluids by influencing the boundary layer using active means, e.g. supplying external energy or injecting fluid comprising electromagnetic or electrostatic means for influencing the state of the fluid, e.g. for ionising the fluid or for generating a plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft eine Ionisationspumpstufe, insbesondere für eine Vakuumpumpe, umfassend einen Einlass für in die Pumpstufe eintretendes Gas, einen mit dem Einlass gasleitend in Verbindung stehenden Ionisierungsabschnitt und eine Ionisierungseinrichtung zur Ionisierung des in den Ionisierungsabschnitt eingetretenen Gases, eine Beschleunigungseinrichtung zur Beschleunigung des in dem Ionisierungsabschnitt vorhandenen ionisierten Gases in Förderrichtung, und einen in Förderrichtung auf den Ionisierungsabschnitt folgenden und mit dem Ionisierungsabschnitt gasleitend in Verbindung stehenden Neutralisierungsabschnitt und eine Neutralisierungseinrichtung zur elektrischen Neutralisierung des in den Neutralisierungsabschnitt eintretenden ionisierten Gases.

Figure imgaf001
The invention relates to an ionization pumping stage, in particular for a vacuum pump, comprising an inlet for gas entering the pumping stage, an ionizing section communicating with the inlet gas-conducting and an ionizing device for ionizing the gas entering the ionizing section, an accelerating device for accelerating the ionizing section existing ionized gas in the conveying direction, and a downstream in the conveying direction to the ionization and with the ionization gas-conducting neutralization section and a neutralizing device for electrically neutralizing the entering into the neutralization ionized gas.
Figure imgaf001
EP13191365.9A 2012-12-17 2013-11-04 Ionization pump stage Active EP2747123B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012223450.0A DE102012223450B4 (en) 2012-12-17 2012-12-17 Vacuum pump with ionization pump stage

Publications (3)

Publication Number Publication Date
EP2747123A2 EP2747123A2 (en) 2014-06-25
EP2747123A3 true EP2747123A3 (en) 2015-08-05
EP2747123B1 EP2747123B1 (en) 2019-03-06

Family

ID=49513862

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13191365.9A Active EP2747123B1 (en) 2012-12-17 2013-11-04 Ionization pump stage

Country Status (3)

Country Link
US (1) US10132339B2 (en)
EP (1) EP2747123B1 (en)
DE (1) DE102012223450B4 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10665437B2 (en) 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10262845B2 (en) * 2015-02-10 2019-04-16 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2182751A (en) * 1937-05-10 1939-12-05 Luminous Tube Control Corp Electronic pump
EP0106377A2 (en) * 1982-09-14 1984-04-25 VARIAN S.p.A. Ion pump with a cathode of improved structure, particularly for pumping inert gases
DE4243860A1 (en) * 1992-12-23 1994-07-07 Imm Inst Mikrotech Microminiaturized electrostatic pump and process for its manufacture
US5899666A (en) * 1996-08-27 1999-05-04 Korea Research Institute Of Standards And Science Ion drag vacuum pump
US6559601B1 (en) * 1998-12-30 2003-05-06 Tokyo Electron Limited Plasma vacuum pump
DE102009042417A1 (en) * 2009-07-16 2011-01-27 Vacom Steuerungsbau Und Service Gmbh Orbitron ion-getter pump for pumping e.g. atoms, has ionization and pump chambers separated by cylindrical grid arrangement, where ions passing through grid are pushed towards lamella arrangement that is provided outside grid
WO2011156864A1 (en) * 2010-06-18 2011-12-22 Gbc Scientific Equipment Pty. Ltd. Nanoporous vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3156842A (en) * 1962-10-08 1964-11-10 Gordon W Mcclure Gas ionizer
WO2008092083A2 (en) * 2007-01-25 2008-07-31 Ion A-Z, Llc Electrical ionizer and methods of making and using

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2182751A (en) * 1937-05-10 1939-12-05 Luminous Tube Control Corp Electronic pump
EP0106377A2 (en) * 1982-09-14 1984-04-25 VARIAN S.p.A. Ion pump with a cathode of improved structure, particularly for pumping inert gases
DE4243860A1 (en) * 1992-12-23 1994-07-07 Imm Inst Mikrotech Microminiaturized electrostatic pump and process for its manufacture
US5899666A (en) * 1996-08-27 1999-05-04 Korea Research Institute Of Standards And Science Ion drag vacuum pump
US6559601B1 (en) * 1998-12-30 2003-05-06 Tokyo Electron Limited Plasma vacuum pump
DE102009042417A1 (en) * 2009-07-16 2011-01-27 Vacom Steuerungsbau Und Service Gmbh Orbitron ion-getter pump for pumping e.g. atoms, has ionization and pump chambers separated by cylindrical grid arrangement, where ions passing through grid are pushed towards lamella arrangement that is provided outside grid
WO2011156864A1 (en) * 2010-06-18 2011-12-22 Gbc Scientific Equipment Pty. Ltd. Nanoporous vacuum pump

Also Published As

Publication number Publication date
US10132339B2 (en) 2018-11-20
EP2747123B1 (en) 2019-03-06
US20140169986A1 (en) 2014-06-19
DE102012223450A1 (en) 2014-06-18
DE102012223450B4 (en) 2019-07-04
EP2747123A2 (en) 2014-06-25

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