EP2722528A4 - Rotor and vacuum pump - Google Patents
Rotor and vacuum pumpInfo
- Publication number
- EP2722528A4 EP2722528A4 EP12800506.3A EP12800506A EP2722528A4 EP 2722528 A4 EP2722528 A4 EP 2722528A4 EP 12800506 A EP12800506 A EP 12800506A EP 2722528 A4 EP2722528 A4 EP 2722528A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- vacuum pump
- vacuum
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011133869 | 2011-06-16 | ||
PCT/JP2012/064125 WO2012172990A1 (en) | 2011-06-16 | 2012-05-31 | Rotor and vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2722528A1 EP2722528A1 (en) | 2014-04-23 |
EP2722528A4 true EP2722528A4 (en) | 2014-12-03 |
EP2722528B1 EP2722528B1 (en) | 2018-05-30 |
Family
ID=47356981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12800506.3A Active EP2722528B1 (en) | 2011-06-16 | 2012-05-31 | Rotor assembly and vacuum pump there with |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2722528B1 (en) |
JP (1) | JP6047091B2 (en) |
CN (1) | CN103562554B (en) |
WO (1) | WO2012172990A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011119506A1 (en) * | 2011-11-26 | 2013-05-29 | Pfeiffer Vacuum Gmbh | Fast rotating rotor for a vacuum pump |
JP6142630B2 (en) * | 2013-03-29 | 2017-06-07 | 株式会社島津製作所 | Vacuum pump |
JP6706553B2 (en) * | 2015-12-15 | 2020-06-10 | エドワーズ株式会社 | Vacuum pump, rotary blade mounted on the vacuum pump, and reflection mechanism |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62152520A (en) * | 1985-12-25 | 1987-07-07 | Toshiba Corp | Rotary machine having rotary cylinder |
JPH08219086A (en) * | 1995-02-14 | 1996-08-27 | Daikin Ind Ltd | Rotor support structure |
EP1101945A2 (en) * | 1999-11-19 | 2001-05-23 | The BOC Group plc | Vacuum pumps |
EP1318308A2 (en) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Vacuum pump |
JP2005180265A (en) * | 2003-12-18 | 2005-07-07 | Boc Edwards Kk | Vacuum pump |
WO2005121561A1 (en) * | 2004-06-07 | 2005-12-22 | The Boc Group Plc | Vacuum pump impeller |
JP2006291794A (en) * | 2005-04-08 | 2006-10-26 | Osaka Vacuum Ltd | Vacuum pump rotor |
JP2007071139A (en) * | 2005-09-08 | 2007-03-22 | Osaka Vacuum Ltd | Composite vacuum pump rotor |
EP2108844A2 (en) * | 2008-03-26 | 2009-10-14 | Ebara Corporation | Turbo vacuum pump |
DE102008056352A1 (en) * | 2008-11-07 | 2010-05-12 | Oerlikon Leybold Vacuum Gmbh | vacuum pump rotor |
WO2012002084A1 (en) * | 2010-07-02 | 2012-01-05 | エドワーズ株式会社 | Vacuum pump |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63175317U (en) * | 1986-10-15 | 1988-11-14 | ||
JPH0749040Y2 (en) * | 1989-10-03 | 1995-11-13 | 株式会社荏原製作所 | Impeller mounting structure |
JP3098139B2 (en) | 1993-06-17 | 2000-10-16 | 株式会社大阪真空機器製作所 | Compound molecular pump |
JPH07271241A (en) | 1994-03-25 | 1995-10-20 | Fuji Xerox Co Ltd | Flange for electrophotographic photoreceptor drum |
JPH10196041A (en) * | 1997-01-08 | 1998-07-28 | Nippon Light Metal Co Ltd | Honeycomb panel |
DE19955517A1 (en) | 1999-11-18 | 2001-05-23 | Leybold Vakuum Gmbh | High-speed turbopump |
FR2845737B1 (en) | 2002-10-11 | 2005-01-14 | Cit Alcatel | TURBOMOLECULAR PUMP WITH COMPOSITE SKIRT |
JP5480780B2 (en) | 2009-11-26 | 2014-04-23 | 積水化学工業株式会社 | Liquid crystal display element spacer and liquid crystal display element |
-
2012
- 2012-05-31 WO PCT/JP2012/064125 patent/WO2012172990A1/en unknown
- 2012-05-31 JP JP2013520501A patent/JP6047091B2/en active Active
- 2012-05-31 EP EP12800506.3A patent/EP2722528B1/en active Active
- 2012-05-31 CN CN201280026312.9A patent/CN103562554B/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62152520A (en) * | 1985-12-25 | 1987-07-07 | Toshiba Corp | Rotary machine having rotary cylinder |
JPH08219086A (en) * | 1995-02-14 | 1996-08-27 | Daikin Ind Ltd | Rotor support structure |
EP1101945A2 (en) * | 1999-11-19 | 2001-05-23 | The BOC Group plc | Vacuum pumps |
EP1318308A2 (en) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Vacuum pump |
JP2005180265A (en) * | 2003-12-18 | 2005-07-07 | Boc Edwards Kk | Vacuum pump |
WO2005121561A1 (en) * | 2004-06-07 | 2005-12-22 | The Boc Group Plc | Vacuum pump impeller |
JP2006291794A (en) * | 2005-04-08 | 2006-10-26 | Osaka Vacuum Ltd | Vacuum pump rotor |
JP2007071139A (en) * | 2005-09-08 | 2007-03-22 | Osaka Vacuum Ltd | Composite vacuum pump rotor |
EP2108844A2 (en) * | 2008-03-26 | 2009-10-14 | Ebara Corporation | Turbo vacuum pump |
DE102008056352A1 (en) * | 2008-11-07 | 2010-05-12 | Oerlikon Leybold Vacuum Gmbh | vacuum pump rotor |
WO2012002084A1 (en) * | 2010-07-02 | 2012-01-05 | エドワーズ株式会社 | Vacuum pump |
Non-Patent Citations (1)
Title |
---|
See also references of WO2012172990A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP6047091B2 (en) | 2016-12-21 |
EP2722528A1 (en) | 2014-04-23 |
EP2722528B1 (en) | 2018-05-30 |
CN103562554B (en) | 2016-12-21 |
CN103562554A (en) | 2014-02-05 |
WO2012172990A1 (en) | 2012-12-20 |
JPWO2012172990A1 (en) | 2015-02-23 |
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