EP2633273A1

EP2633273A1 - Sensor device for detecting a flow property of a fluid medium

Info

Publication number: EP2633273A1
Application number: EP11754649.9A
Authority: EP
Inventors: Norbert Schneider; Kurt Etherington; Uwe Konzelmann; Andreas Roehler; Andreas Kaufmann; Frank Ullrich; Michael Rittmann; Wolfgang Dann; Hans Beyrich
Original assignee: Robert Bosch GmbH
Current assignee: Robert Bosch GmbH
Priority date: 2010-10-28
Filing date: 2011-09-02
Publication date: 2013-09-04
Anticipated expiration: 2031-09-02
Also published as: US20130269419A1; KR101957133B1; US9212938B2; WO2012055622A1; KR20140009161A; DE102010043083A1; EP2633273B1

Abstract

The invention relates to a sensor device (110) for detecting at least one flow property of a fluid medium. The sensor device (110) comprises at least one sensor housing (116) in which at least one electronic module (142) having at least one flow sensor (152) for detecting the flow property is received. The electronic module (142) is at least partially received in at least one electronic chamber (134). At least one pressure sensor (162) and at least one humidity sensor (160) are further received within the sensor housing (116). The pressure sensor (162) and preferably also the humidity sensor (16) are at least partially received in at least one sensor chamber (166) implemented separately from the electronic chamber (134).

Description

Description title

PRIOR ART Numerous methods and devices for determining flow properties of fluid media, ie liquids and / or gases, are known from the prior art. The flow properties may in principle be any physically and / or chemically measurable properties which qualify or quantify a flow of the fluid medium. In particular, this may be a flow velocity and / or a mass flow and / or a

Volumetric flow act. The invention will be described in more detail below with reference to so-called hot film air mass meter, as described for example in Robert Bosch GmbH: sensors in the motor vehicle, edition 2007, pages 140-142. Such Heißfileinuftmassenmesser are usually based on a sensor chip, in particular a silicon sensor chip, with a measuring surface, which is overflowed by the flowing fluid medium. The sensor chip usually comprises at least one heating element and at least two temperature sensors, which are arranged, for example, on the measuring surface of the sensor chip. From an asymmetry of the temperature profile detected by the temperature sensors, which is influenced by the flow of the fluid medium, it is possible to deduce a mass flow and / or volume flow of the fluid medium.

Heißfileinuftmassenmesser are usually designed as plug-in sensor, which is fixed or interchangeable introduced into a flow tube. For example, this flow tube may be an intake tract of an internal combustion engine.

In order to be able to precisely deduce from the sensor signals of the hot-film air mass meter certain flow properties of the fluid medium, it is in many cases desirable to be able to provide further information about the fluid medium. For example, EP 1 017 931 B1 proposes a sensor for an internal combustion engine, which includes an air mass meter with a sensor element for

Detecting the intake air mass. Adjacent to the air mass meter and its sensor element are provided a moisture sensor and a pressure sensor and an evaluation circuit for processing the output from the air mass meter or its sensor element, the humidity sensor and the pressure sensor data and arranged in a single housing.

Despite the technical improvements that can be achieved by the device described in EP 1 017 931 B1, in particular the improved

Signal accuracy and the ability to determine other properties of the flowing fluid medium, such combined sensors are subject to various technical challenges. These challenges are particularly constructive and production-technical nature. For example, hot-film air mass meters have been commercially available for many years and are used in numerous motor vehicles. However, the integration of pressure and humidity sensors into hot-film air mass meter plug-in sensors, as proposed in EP 1 017 931 B1, necessitates an adaptation of the geometry and the design of the plug-in sensors in many cases. Plug-in sensors already in use are therefore not or only with difficulty be replaced by new plug-in sensors with pressure and humidity sensors, since basically the entire module would have to be replaced. Furthermore, in many cases, production plants must be completely reorganized and reorganized as soon as plug-in sensors with additional pressure and humidity measurement are to be produced. In particular, the combined electronic module with pressure and humidity sensor, as in EP 1 017 931 B1

proposed, requires a significant adjustment of the production and

Mounting process. As a result, a provision of externally compatible plug-in sensor of different functionality, ie plug-in sensors with pressure and humidity measurement and plug-in sensors without such pressure and humidity measurement, for reasons of cost practically unrealizable. It would therefore be desirable to have a sensor device for detecting a flow characteristic of a fluid medium, which is set up to generate pressure and temperature signals, and which can be produced in a simple and cost-effective manner, with the least possible modification of known manufacturing methods for plug-in sensors without such pressure and humidity measurements.

Disclosure of the invention

Accordingly, a sensor device for detecting at least one flow characteristic of a flowing fluid medium is proposed, which at least largely satisfies these requirements and which knows the disadvantages Sensor devices of this kind at least largely avoids. With respect to the at least one flow characteristic to be detected, which can be detected qualitatively and / or quantitatively, reference may be made, for example, to the above description of the prior art. In particular, this may be

Flow characteristic to a flow rate and / or a mass flow and / or a volume flow of the fluid medium act. The fluid medium may in particular be a gas, preferably air. The

Sensor device is particularly useful in automotive engineering, for example in the intake of an internal combustion engine. However, other applications are possible in principle.

The sensor device comprises at least one sensor housing. Under a

Sensor housing is to be understood in the context of the present invention, a one-piece or multi-part device which closes the sensor device to the outside at least largely and at least largely protects against mechanical effects and preferably also other types of actions, such as chemical agents and / or moisture. In particular, the sensor housing may comprise at least one plug-in sensor or be configured as a plug-in sensor, wherein the plug-in sensor can be introduced into the flowing fluid medium, wherein an exchangeable or a permanent introduction is conceivable. The plug-in sensor can protrude, for example, into a flow tube of the flowing fluid medium, wherein the flow tube itself can be part of the sensor device or can also be provided as a separate part, for example with an opening into which the plug-in sensor can be inserted. The plug-in sensor and the

Flow housing can in particular at least partially from a

Be made plastic material, for example by means of an injection molding process.

In the sensor housing is at least one electronic module with at least one

Flow sensor for detecting the flow characteristic was added. A receptacle in the sensor housing is to be understood that the electronic module is at least partially, preferably completely, to be enclosed by the sensor housing. The electronic module is at least partially in at least one

Electronics compartment of the sensor housing arranged. In the context of the present invention, an electronics space is understood to be a partially or completely enclosed space within the housing which is closed off in at least one direction by the housing. Preferably, the electronics compartment comprises at least a recess accessible from a surface of the housing in the housing, for example a cuboid depression. The electronic space can, as will be explained in more detail below, for example, be accessible for a placement,

for example, from the surface, and can by at least one

Closing element, for example, at least one electronics compartment lid, permanently or reversibly be closed.

Under a flow sensor is basically any sensor element to understand, which is configured to detect the at least one flow characteristic. In particular, the flow sensor may be at least one hot-film air mass meter chip, for example of the type described above. In particular, this hot-film air mass meter chip may have at least one hot-film air mass meter chip

Silicon chip include, with a measuring surface, which is overflowed by the flowing fluid medium. For example, at least one heating element and at least two temperature sensors may be located on this sensor surface, it being possible, as described above, to be able to close the at least one flow characteristic from an asymmetry of the temperature profile measured by the temperature sensor. The at least one flow sensor can be arranged, for example, on a sensor carrier of the electronic module, which protrudes into the flowing fluid medium. The electronic module can in particular be designed in one piece and can

in particular carry a control and / or evaluation circuit which is set up to control the flow sensor and / or to receive signals from the flow sensor. Accordingly, the electronic module may for example comprise at least one circuit carrier. Furthermore, the electronic module can in particular have the at least one sensor carrier which is connected to the circuit carrier

preferably mechanically connected. For example, the circuit carrier can be arranged in an electronics compartment of the sensor housing, and the sensor carrier can protrude out of this electronics compartment into the fluid medium. It is particularly preferred if the sensor housing has at least one channel through which the fluid medium can flow, the sensor carrier of the electronic module carrying the flow sensor projecting from the electronics compartment into the at least one channel through which the fluid medium can flow in the sensor housing. This at least one channel may in particular be configured in one piece, but may also have at least one main channel and at least one branching off from this main channel

Bypass channel, wherein the sensor carrier preferably protrudes into the bypass channel, as is basically known from the prior art. Of the Circuit carrier of the electronic module may in particular comprise a printed circuit board which is used alone or which is for example also mounted on a mechanical support, for example a stamped and bent part, for example of a metallic material. The sensor carrier may be connected directly to the circuit carrier or else to the carrier part, for example the stamped and bent part, for example by the sensor carrier being molded onto this stamped and bent part. Other embodiments are possible. For example, it is conceivable to produce the electronic module from a printed circuit board material, wherein both the

Circuit carrier and the sensor carrier are made of the printed circuit board material, preferably from a piece of printed circuit board material. Neither alternatively or additionally, it is also possible to use known from the prior art injection-molded circuit boards as an electronic module, such as injection molded

Circuit boards in one or more so-called MI D techniques (MID: molded interconnect device). Various embodiments are conceivable.

The sensor device furthermore has at least one pressure sensor and at least one humidity sensor. The pressure sensor and the humidity sensor are accommodated within the sensor housing. Under an arrangement within the sensor housing is again an arrangement to understand, in which both the pressure sensor and the humidity sensor are at least partially enclosed by the sensor housing, preferably completely. The pressure sensor, and preferably also the moisture sensor, are accommodated at least partially and preferably completely in at least one sensor space formed separately from the electronics space. Analogous to the electronics compartment, a sensor compartment in the context of the present invention is understood to mean a partially or completely enclosed space within the housing, which is terminated in at least one direction by the housing.

Preferably, the sensor space comprises at least one recess accessible from a surface of the housing in the housing, for example one

cuboid depression. The sensor space can, as will be explained in more detail below, be accessible, for example, from an assembly, for example from the surface, and can be permanently or reversibly closed by at least one closure element, for example at least one sensor space cover. For example, the electronics compartment lid and the sensor compartment lid can be arranged on opposite sides of the housing. Alternatively, the sensor space can also be at least partially opened, for example by being designed as a depression in the housing, for example as a housing opposite the electronics space Deepening. However, a closable embodiment is preferred in which

For example, the sensor space can be closed by a sensor space cover.

Under a pressure sensor is basically to understand any sensor element which is adapted to detect a pressure of the fluid medium. In particular, this may be a micromechanical pressure sensor, as described for example in Robert Bosch GmbH: Sensors in the motor vehicle, pages 128-130. However, other types of pressure sensors are alternatively or additionally usable, for example, pressure sensors, which directly on the use of one or more strain gauges or the like

Pressure sensor elements based. Under a moisture sensor is basically any sensor element to understand, which is adapted to detect a moisture of the fluid medium. For example, resistive and / or capacitive sensor elements come into consideration here, as are known from the prior art. Examples of such humidity sensors are described in Robert Bosch GmbH: Sensors in motor vehicles, Edition 2007, pages 92-95. Also other types of

However, moisture sensors come in principle alternatively or additionally for use in the context of the present invention into consideration. The embodiment of the sensor device according to the invention offers the advantage, as will be explained in more detail below, that the electronics compartment and the sensor compartment can be equipped independently of one another. In this way, for example, the sensor device according to the invention without major changes in design and / or the construction tools, on a

Production device can be produced, which can also be used for sensor devices without pressure sensor and without humidity sensor.

The electronic module can in particular comprise a drive and / or evaluation circuit for the at least one flow sensor. The pressure sensor and the

Humidity sensor may in particular each have a sensor electronics, which is formed separately from the electronic module. The electronics module can

In particular, comprise a sensor carrier, wherein the sensor carrier the

Flow sensor carries and protrudes from the electronics compartment in at least one of the fluid medium flow channel in the sensor housing. Others too

However, embodiments are possible in principle. For example, a breakthrough may be provided in a wall of the electronics compartment which connects the electronics compartment to the at least one channel, wherein the sensor carrier projects through the opening into the at least one channel. The electronics compartment and the sensor compartment can in particular from each other

be accessible to opposite sides of the sensor housing, for example, for a fitting. For example, as stated above, the sensor device

comprise at least one plug-in sensor which at least partially into the fluid

Medium is einbringbar. For example, the electronics compartment and the sensor compartment may be accessible from opposite sides of the plug-in sensor of the sensor device. For example, the plug-in sensor can have an insertion direction along, for example, an axis, wherein the opposing sides can preferably be configured substantially parallel to the insertion direction. For example, the plug-in sensor can have a substantially rectangular cross-section in a plane perpendicular to the insertion direction, with one of the flow

opposite end face and a flow-repellent back, wherein the sides can be arranged substantially parallel to the flow direction.

In particular, these pages may be the long sides of a rectangle. In particular, the electronics compartment and the sensor compartment may each be independently closable by means of closure elements, in particular at least one electronics compartment cover and / or at least one sensor compartment cover. These covers can be latched, for example, with the housing or be closed in other ways. Alternatively or in addition to a lid construction, other types of closure elements are conceivable.

The sensor housing can in particular at least one with the sensor space

connected inlet opening for acting on the pressure sensor with a pressure of the fluid medium and / or for acting on the humidity sensor with the fluid

Have medium or its moisture. The at least one inlet opening may be formed separately for the pressure sensor and the humidity sensor. Alternatively or additionally, however, one or more common inlet openings can also be used. In particular, the inlet opening can be configured in such a way that the fluid medium can penetrate unhindered through the inlet opening into the sensor space. Alternatively, however, the at least one inlet opening can also be designed to be completely or partially closed, for example by at least one membrane, in particular at least one moisture-permeable at least partially

Membrane, in particular a semipermeable membrane. The at least one

Inlet opening may in principle have any cross section, for example a rectangular and / or round and / or polygonal cross section. Others too Embodiments are possible. The at least one inlet opening can be provided in particular in a sensor space cover of the sensor housing, wherein the sensor space can be at least partially closed by means of the sensor space cover. In particular, the humidity sensor may have at least one measuring chamber arranged at least partially in the sensor space. For example, the

Moisture sensor itself have a housing in which the measuring chamber is arranged. In particular, the measuring chamber can be closed by at least one membrane which is at least partially permeable to moisture, ie permeable. The moisture sensor may in particular comprise at least one circuit carrier, for example at least one printed circuit board and / or another type of

Circuit carriers. For example, the circuit carrier may be made of a plastic material and / or ceramic material and / or printed circuit board construction. Other embodiments are possible. The circuit carrier can in particular be completely or partially accommodated in the sensor space. The pressure sensor can be arranged independently of the circuit carrier of the humidity sensor in the sensor space, for example next to the circuit carrier. Alternatively or additionally, the

Pressure sensor, however, also be wholly or partially connected to the circuit carrier of the sensor space. The pressure sensor and the humidity sensor may in particular comprise at least one common supply line, for example at least one supply line and / or at least one signal line and / or at least one ground line. In particular, at least one supply line of the pressure sensor can be electrically contacted with at least one supply line of the humidity sensor via at least one common plug contact.

The sensor device may also have one or more others

Sensor elements comprise, for detecting at least one further physical and / or chemical property of the fluid medium. In particular, the

Sensor device further comprise at least one temperature sensor, in particular at least one arranged on an outer side of the sensor housing

Temperature sensor. For example, a temperature sensor may be arranged on an outer side of the sensor housing such that it is arranged on the same side as well as the inlet opening for the moisture and / or the pressure opening. However, another embodiment is possible in principle. In particular, the temperature sensor can be arranged in at least one recess on a side wall of the plug-in sensor. The temperature sensor can in particular at least one temperature-dependent Include resistance. Alternatively or additionally, other types of

Temperature sensors can be used. In particular, the temperature sensor can be overflowed freely by the flowing fluid medium, ie not by the housing of the

Enclosed sensor element. The temperature sensor can be connected in particular by a frictional connection and / or positive connection with the housing, for example by caulking leads of the temperature sensor with an outer wall of the sensor housing or connected in any other way. Supply lines of the temperature sensor may in particular be guided into the interior of the sensor housing and be connected there, for example, to the electronic module and / or with a

Connect the connector of the sensor device. Various others

Embodiments are conceivable.

The sensor device described above has over known

Sensor devices numerous advantages. In particular, the sensor device can be configured substantially compatible with conventional sensor devices without a pressure sensor and without a moisture sensor, from their outer dimensions. In particular, plug-in sensors can be produced which, regardless of whether they now contain a pressure sensor and a moisture sensor or not, behave the same in their outer dimensions. Furthermore, sensor devices of the type mentioned can be manufactured with and without pressure sensors or humidity sensors on one and the same production line as well as sensor devices which do not comprise such pressure and / or humidity sensors. In this way, production, logistics and storage of the described sensor devices are significantly simplified. Thus, for example, various sensor housings can be provided, which differ almost exclusively in the design of the electronics compartment and the optional sensor compartment, for example by providing sensor units with pressure sensor and humidity sensor sensor housing with sensor space, and by no such sensor space is provided in other sensor housings. Alternatively, the logistics can also work with a single type of sensor housing, wherein in the case of production of sensor devices without pressure sensor and without moisture sensor, for example, the sensor space can remain unpopulated.

Overall, this design, manufacturing, logistics and storage can be significantly simplify and improve, and the sensor devices can be considerably cheaper design. There is also the possibility, already

existing, conventional sensor devices without pressure and humidity sensors to be replaced by sensor devices according to the invention. Brief description of the drawings

Further optional details and features of the invention will become apparent from the following description of preferred embodiments, which are shown schematically in the figures.

1 shows a conventional sensor device for detecting at least one flow characteristic of a fluid medium; and

FIGS. 2A and 2B show different views of an embodiment of a sensor device according to the invention.

Embodiments of the invention

1 shows a prior art embodiment of a sensor device 110 for detecting at least one flow characteristic of a fluid medium in a perspective, open view. The

Sensor device 110 is configured in this embodiment as Heißfiluuftmassenmesser 112 and includes a plug-in sensor 114, which in a flow of the fluid medium, for example, an intake air mass, can be introduced, for example, reversibly inserted into a suction pipe or permanently installed. Of the

Hot film air mass meter 1 12 corresponds to a commercially available

Air mass sensor type HFM7 of Robert Bosch GmbH, Germany. Of the

Plug-in sensor 1 14 comprises a sensor housing 116, with a head side 1 18 projecting furthest into the fluid medium, an end face 120 facing the fluid medium, a rear side 122 facing away from the fluid medium, and two

Side surfaces in the form of a first side 124 and a second side 126, wherein in the illustration of Figure 1, the first side 124 is visible.

Within the sensor housing 1 16, a channel region 128 with at least one channel 130 through which the fluid can flow and an electronics region 132 with an electronics housing 134 recessed in the sensor housing 116 are accommodated. The channel 130 in turn has a main channel 136 and a bypass channel 138. Of the Channel area 128 is closed by a channel space cover 140 on the first side 124. The electronics compartment 134 is designed in this embodiment as a rectangular recess in the first side 124 of the sensor housing 116. By doing

Electronics room 134 is an electronic module 142 added, which has a

Circuit carrier 144 with a drive and / or evaluation circuit 146 includes, which may be included, for example on a floor panel 148. Furthermore, the electronic module 142 comprises a sensor carrier 150 in the form of a molded-on to the bottom plate 148 wing, which projects into the bypass channel 138. In the sensor carrier 150, a flow sensor 152 is embedded in the form of a Heißfileinuftmassenmesserchips. The electronics compartment 134 is on the first side 124 by a

Electronic compartment lid 154 lockable. Furthermore, the sensor housing 1 16 on the second side 126 may include a cooling opening 156 which extends into the electronics compartment 134 inside. In the case of the commercially available embodiment of the sensor device 110 according to FIG. 1, the sensor carrier 150 and the bottom plate 148 thus form a unit which is referred to as electronic module 142 and which may include a drive and / or evaluation circuit 146, for example in this or in other exemplary embodiments , for controlling and / or evaluating the flow sensor 152. In addition to the flow sensor 152, the electronics of the circuit carrier 144 and the control and / or evaluation circuit 146 are glued to the base plate 148. The flow sensor 152 and the drive and / or evaluation circuit 146 are usually connected to one another by bond connections. The resulting

Electronics module 142 is glued, for example, in the electronics room 134, and the entire plug-in sensor 1 14 is closed by the cover 140, 154.

In contrast, FIGS. 2A and 2B show an exemplary embodiment of a sensor device 110 according to the invention. Neither is an example of a hot film air mass meter 1 12, which is preferably initially configured basically similar to the sensor device 110 according to FIG. Accordingly, for a large part of the structure of the sensor device 110, reference may be made to the description of FIG. FIG. 2A shows an opened perspective view of the first side 124, whereas FIG. 2B shows a perspective view of the second side 126. In turn, the hot-film air mass meter 112 comprises a plug-in sensor 1 14 with a sensor housing 1 16. In the sensor housing 1 16 again a channel region 128 is provided, analogous to the plug-in sensor 114 of Figure 1, with a channel 130, in which via a provided on an end face 120 of the plug-in sensor 114

Kanaleinlassöffnung 158 fluid can flow. Furthermore, an electronics compartment 134 is again provided in an electronics area 132, in which a

Electronic module 142 is provided with a flow sensor 152. In this regard, reference may be made at least largely to the above description. The channel region 128 is in turn closed by a channel space cover 140, and the

Electronics room 134 through an electronics compartment lid 154. Other configurations are possible in principle. In the sensor device 110 according to FIGS. 2A and 2B, a humidity sensor 160 and a pressure sensor 162 are additionally integrated in the available installation space. In this case, the humidity sensor 160 and / or the pressure sensor 162 can each be individual sensors or sensor modules.

For example, the humidity sensor 160 may be configured as a humidity module 164 or contained in a humidity module 164. The humidity sensor 160 and the pressure sensor 162 may be formed separately from each other, but may in principle be formed summarized.

In contrast to the known embodiment of Figure 1 is in the

Sensor device 110 according to Figures 2A and 2B, a spatial separation between the electronic module 142 on the one hand and the pressure sensor 162 and the humidity sensor 160 on the other hand provided. Thus, in the embodiment according to the invention according to FIGS. 2A and 2B, the pressure sensor 162 and the moisture sensor 160 are accommodated in a sensor space 166 formed separately from the electronics space 134. This sensor space 166 is in this example, in turn, as a recess in the second side 126, which the first side 124 with the electronics space 134th

opposite, designed. Thus, this sensor space 166 may be configured, for example, as a rear side chamber and configured to be able to be fitted from the second side 126. The sensor space 166 is thus at least substantially separated from the electronics space 134, so that in this or in other embodiments, a separate introduction of the electronic module 142 and the printing or

Moisture sensors 160, 162 can be made, for example, from different

Equipment directions ago. The sensor space 166 can, for example, as shown in FIG. 2B, be closable by at least one closure element, in particular at least one sensor space cover 168. This sensor space cover 168 and / or other parts of the sensor housing 116 may in the illustrated embodiment include one or more inlet openings 170, which the pressure and / or

Can serve moisture measurement. In the illustrated embodiment according to FIG 2B By way of example, a round inlet opening 170 is provided in the sensor space cover 168. However, other embodiments are possible in principle. By way of example, this inlet opening 170 is arranged above a semipermeable membrane 172 of the humidity sensor 160, for example, so that moisture can be applied to the moisture sensor 160 via the inlet opening 170. At the same time, the inlet port 170 and / or a separate inlet port may also serve to pressurize the pressure sensor 162.

By way of example, as described above, the moisture sensor 160 in the exemplary embodiment illustrated is part of a moisture module 164, which as a whole can itself act as a moisture sensor 160. This moisture module 164 and / or the humidity sensor 160 may, for example, comprise at least one circuit carrier 174, on which optionally one or more interconnects and / or one or more electronic components may be accommodated, for example a control circuit for the humidity sensor 160. However, other configurations are also fundamental possible. The moisture sensor 160 and / or the moisture module 164, wherein no distinction is made between the two units, may further comprise at least one measuring chamber 176 in which, for example, the at least one moisture sensor 160 and / or a chip thereof can be accommodated. This can for example be placed on the circuit carrier 174 and be completed at the top, for example, by the semi-permeable membrane 172. Of the

Pressure sensor 162 may, for example, be accommodated next to the moisture module 164 in the sensor space 166. Other embodiments are possible. In this way it is possible, for example by means of the embodiment shown in FIGS. 2A and 2B, to realize a rear side construction in which the assembly of the pressure and humidity sensor 162, 160 can take place on a separate production line. The further construction and the further equipping of the electronics compartment 134 can, for example, on existing series devices, for example for

Production of the sensor device 1 10 according to Figure 1, carried out. The advantage of

Rear side structure compared to the known structure consists in the completely separate and independent spaces 134, 166. Through the sensor space 166 for integration of pressure and humidity measurement of the electronics space 134 for mounting the electronic module 142, in contrast to the design concept of Figure 1, usually preferably unchanged. In contrast to known Aufbauschemata arise for the assembly of

Electronic module 142 thus preferably no changes, since the size and position of the bearing surfaces of the electronic module 142, for example, can remain unchanged. Modifications to series directions and processes are therefore generally not required. The assembly of the pressure and humidity sensor 162, 160 in the plug-in sensor 114 can be done on a separate production line, for example, before or after the assembly of the electronics compartment 134. For example, such a preassembled plug-in sensor module can then be transferred to an existing series device and further processed there. The moisture module 164 may include, for example, a printed circuit board as a circuit carrier 174. On this can then the actual

Moisture sensor 160 are located, and optionally a drive and / or

Evaluation circuit of the humidity module 164. The actual humidity sensor 160 may be arranged, for example, in the measuring chamber 176, the opening of which may be closed by the semipermeable membrane 172. This semipermeable membrane 172 may be permeable to moisture, for example, and may at the same time protect the humidity sensor 160 against ingress of water and dirt. For example, the moisture module 164 may be glued into the sensor space 166 and / or otherwise fixed in the sensor space 166. The connection of the humidity module 164 to a plug 177 of the plug-in sensor 1 14 can be done for example by bonding.

For example, a micromechanical pressure sensor may be used as the pressure sensor 162, which in turn may also be integrated in a pressure sensor module 178, for example. For example, the premold of the commercially available pressure sensor type DS-S3 of Robert Bosch GmbH, Germany, can be used as the pressure sensor 162. The pressure sensor 162 can in particular be mounted next to the moisture module 164 and, for example, in turn be connected to the sensor housing 1 16, for example, again by an adhesive connection. Neither can a contacting of the pressure sensor 162 and an electrical connection with the plug 177 take place. For example, a welded connection can be used for this purpose. However, other embodiments are possible. The pressure sensor 162 may be pressurized by the same inlet port 170, which is also the pressure

Moisture sensor 160 is exposed to moisture. Alternatively or additionally, however, one or more inlet openings 170 may also be provided as separate pressure measuring openings, for example on the second side 126 of the plug-in sensor 114, for example once again in the sensor space cover 168.

Claims

claims

Sensor device (110) for detecting at least one flow characteristic of a fluid medium, comprising at least one sensor housing (1 16), wherein in the sensor housing (1 16) at least one electronic module (142) is accommodated with at least one flow sensor (152) for detecting the flow characteristic, in particular at least one Heißfileinuftmassenmesserchip, wherein the

Electronic module (142) is at least partially accommodated in at least one electronics compartment (134), wherein at least one pressure sensor (162) and at least one humidity sensor (160) are additionally accommodated within the sensor housing (16), characterized in that the pressure sensor (162) and preferably also the humidity sensor (160) at least partially in at least one of the

Electronics space (134) separately formed sensor space (166) are added.

Sensor device (110) according to the preceding claim, wherein the

Electronic module (142) comprises a sensor carrier (150), wherein the sensor carrier (150) carries the flow sensor (152) and from the electronics compartment (134) projects into at least one of the fluid medium flow channel (130) in the sensor housing (116).

Sensor device (1 10) according to one of the preceding claims, wherein the electronics space (134) and the sensor space (166) from opposite sides (124, 126) of the sensor housing (1 16) are accessible, in particular from opposite sides (124, 126 ) of a plug-in sensor (1 14) of the sensor device (1 10).

Sensor device (1 10) according to any one of the preceding claims, wherein the electronics compartment (134) and the sensor chamber (166) each independently by closure elements, in particular at least one electronics compartment cover (154) and at least one sensor space cover (168) are closable.

5. Sensor device (1 10) according to one of the preceding claims, wherein the sensor housing (116) at least one with the sensor chamber (166) connected to the inlet opening (170) for acting on the pressure sensor (162) with a pressure of the fluid medium and / or for acting on the humidity sensor (160) with a moisture of the fluid medium.

6. Sensor device (1 10) according to the preceding claim, wherein the at least one inlet opening (170) in a sensor space cover (168) of the sensor housing (1 16) is provided, wherein by means of the sensor space cover (168) of the sensor space (166) at least partially closed is.

7. Sensor device (110) according to one of the preceding claims, wherein the humidity sensor (160) has at least one measuring chamber (176) arranged in the sensor space (166).

8. Sensor device (110) according to the preceding claim, wherein the

Measuring chamber (176) by at least one moisture-permeable membrane (172) is completed.

9. Sensor device (1 10) according to one of the preceding claims, wherein the humidity sensor (160) has at least one circuit carrier (174), wherein the circuit carrier (174) in the sensor space (166) is accommodated.

10. Sensor device according to the preceding claim, wherein the pressure sensor (162) adjacent to the circuit carrier (174) of the humidity sensor (160) in the

Sensor space (166) is arranged.