EP2580564B1 - Pressure sensor with a cylindrical pressure measurement cell - Google Patents

Pressure sensor with a cylindrical pressure measurement cell Download PDF

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Publication number
EP2580564B1
EP2580564B1 EP11718756.7A EP11718756A EP2580564B1 EP 2580564 B1 EP2580564 B1 EP 2580564B1 EP 11718756 A EP11718756 A EP 11718756A EP 2580564 B1 EP2580564 B1 EP 2580564B1
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EP
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Prior art keywords
measuring cell
pressure
component
pressure measuring
pressure sensor
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EP11718756.7A
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German (de)
French (fr)
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EP2580564A1 (en
Inventor
Michael Hügel
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Endress and Hauser SE and Co KG
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Endress and Hauser SE and Co KG
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/04Measuring force or stress, in general by measuring elastic deformation of gauges, e.g. of springs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings

Definitions

  • the present invention relates to a pressure transducer with a cylindrical pressure measuring cell.
  • Generic pressure transducers have a ceramic pressure measuring cell in a housing, wherein the pressure measuring cell is arranged in a measuring cell chamber in the housing, wherein the measuring cell chamber has an opening through which the pressure measuring cell can be acted upon with a media pressure, wherein the housing has a radially inwardly extending annular shoulder has, which surrounds the housing opening, and which forms an axial stop surface for a sealing ring, on which rests a sealing ring, against which the pressure measuring cell is clamped axially with a self-tensioning device.
  • angular rings are used, which are inserted in an annular gap between the lateral surface of the pressure measuring cell and the housing wall, and which surround the edge of the opening-side end face of the pressure measuring cell.
  • a generic pressure transducer is for example in the European patent EP 0 594 808 B1 discloses, wherein the angle ring described therein in particular serves to enable a modular construction of the housing, wherein the axial shoulder is formed on a process connection body having the housing opening through which the pressure measuring cell is to be acted upon with a pressure, wherein the connection body its lateral surface has a thread, which engages in a complementary internal thread in the housing, wherein the internal thread is arranged in a front end portion of the sensor chamber.
  • the task of the angle ring is in this context two things, namely on the one hand, the axial and radial positioning of the pressure measuring cell in the housing and on the other hand holding the O-ring before mounting the connector body.
  • the voltage behavior of the pressure measuring cell in the housing is sufficient elastic material for the angle ring ahead, which requires compromise with respect to the radial support of the sealing ring by the angle ring, since the sealing ring and angle ring materials have similar hardness, and insofar as the angle ring hardly seems suitable for supporting the sealing ring under pressure load.
  • the publication EP 1 942 525 A1 discloses a sealing device for closing a pressure measuring cell housing on a rear side facing the housing of a pressure measuring cell, wherein the sealing device comprises a pressure equalization opening for a pressure equalization line of the pressure measuring cell housing recorded pressure measuring cell, wherein the sealing means of a dimensionally stable hard part with at least one in the region of the pressure equalization opening attached to the hard part elastic Soft part is formed.
  • the publication WO 2010 046 249 A1 discloses a pressure transducer having an elongated housing, a pressure measuring cell arranged in the housing, wherein the housing has at least one opening through which the sensor can be acted upon by a pressure, the pressure measuring cell is axially clamped in the housing against a seal.
  • the publication DE 101 33 066 A1 discloses a pressure measuring cell which is enclosed in a sleeve having a radially inwardly extending shoulder on which rests the pressure measuring cell, wherein between the shoulder and the edge of the pressure measuring cell, a centering ring with a cylindrical portion and an integrally formed thereon extending radially inwardly Shoulder is arranged.
  • the centering ring causes a soft and low-tension bearing of the pressure cell.
  • the centering ring causes a seal of the gap between the pressure measuring cell and the sleeve.
  • the pressure measuring transducer comprises: a substantially cylindrical pressure measuring cell, a measuring cell housing with an at least partially substantially cylindrical measuring cell chamber; a sealing ring; a jig; and an angle ring for positioning the pressure measuring cell and the sealing ring in the measuring cell chamber, wherein the measuring cell chamber has an opening through which the measuring cell chamber can be acted upon by a media pressure, wherein the measuring cell housing has an annular axial stop surface which surrounds the opening, and which of a cylindrical wall of the measuring cell chamber extends radially inwardly, wherein the sealing ring rests on the axial stop surface, wherein the pressure measuring cell rests with a front end face on the sealing ring, wherein the clamping device rests on a rear end face of the pressure measuring cell to the pressure measuring cell against the sealing ring clamped axially, wherein the angle ring is disposed in an annular gap between the pressure measuring cell and a wall of the measuring cell chamber and having a radially inwardly extending shoulder which surrounds an edge
  • the first component has a substantially cylindrical section, from which the radial shoulder extends radially inwards at one end section.
  • the apertures comprise bores or axial slots in the cylindrical portion.
  • the second component comprises an elastomer having a hardness of not more than 50 Shore A.
  • the elastomer may in particular comprise VMQ or EPDM.
  • the first component comprises an organic material, in particular an elastomer.
  • the polymer of the first component may in particular comprise PEEK, PS or PA xx, in particular PA 6, PA 66, PA 12, PA MACM 12, PA 6-3-T.
  • the pressure measuring cell may in particular be a ceramic pressure measuring cell, which has a base body and a measuring membrane, wherein the measuring membrane is pressure-tightly connected to the base body along its edge by means of an annular joint, wherein the sealing ring rests on the measuring membrane in the area of the measuring membrane which is aligned with the joint ,
  • the sealing ring may in particular comprise an elastomer.
  • the clamping device may comprise a threaded ring according to a development of the invention, which has a thread on its lateral surface, and wherein the housing has a complementary to the thread of the screw inner thread into which the screw ring is screwed to clamp the pressure measuring cell.
  • At least one decoupling body is arranged between the screw ring and the pressure measuring cell.
  • the decoupling body is used in particular to radial stresses due to different thermal expansion coefficients of the material of the screw ring on the one hand and the material of the pressure measuring cell on the other hand, de could be introduced via frictional engagement in the pressure measuring cell, keep away from the pressure measuring cell.
  • the decoupling body has the same material as the pressure measuring cell or as the main body of the pressure measuring cell.
  • the second component of the angle ring comprises a plurality of spring elements which are arranged in the annular gap for positioning the pressure measuring cell.
  • the cylindrical section of the first element does not fill more than 70%, preferably not more than 50%, of the volume of the annular gap between the pressure measuring cell and the wall of the measuring cell chamber, the spring elements not exceeding 80%, preferably not more than 60% and more preferably not more than 50% of the remaining volume of the annular gap fill.
  • the remaining volume of the annular gap is the difference between the total volume of the annular gap and the volume of the cylindrical portion of the first element in the annular gap.
  • the spring elements comprise in one embodiment of the invention, webs which extend in the axial direction.
  • the radial stop for the sealing ring has a toroidal contact surface for the sealing ring.
  • the angle ring further serves the purpose of ensuring the dielectric strength of, for example, 600 V between the circuit ground of the pressure measuring cell and the mass of the housing (ground).
  • the in Fig. 1 shown pressure measuring transducer 1 comprises a pressure measuring cell 2, which has a cylindrical base body 3 and a measuring diaphragm 4, wherein the measuring diaphragm is connected to the main body along a circumferential annular joint 5 pressure-tight.
  • the measuring membrane and the base body preferably have a ceramic material, in particular corundum, wherein the joint may comprise, for example, an active brazing material, in particular a Zr-Ni-Ti active brazing material or glass.
  • the pressure measuring cell is arranged in a housing 6, which has in its interior a cylindrical measuring cell chamber 7, which is acted upon by a frontal opening 8 with a pressure, wherein the frontal opening 8 is bounded by a radial shoulder 9, which extends from the cylindrical wall the measuring cell chamber 7 extends radially inwardly.
  • the radial shoulder 9 defines an axial stop 10 on which an elastic sealing ring, in particular an O-ring 11 is supported.
  • the pressure measuring cell 2 is between the sealing ring 11 and a Clamping ring 12 axially clamped in the measuring cell chamber, wherein the clamping ring 12 has a male thread 13 on a portion of its lateral surface, which rests in a complementary internal thread 14 in the housing 6.
  • a decoupling ring 15 is arranged and clamped, wherein the decoupling ring 15 in particular has the same material as the main body of the basic measuring cell 2.
  • an angle ring 20 is provided which has a cylindrical portion 21 and a radial shoulder 22, wherein extends radially inwardly through the radial shoulder 22 at an end face of the cylindrical portion 21.
  • the angle ring is arranged in an annular gap, which is formed between the pressure measuring cell 2 and the wall of the measuring cell chamber 7, wherein the angle ring with its radial shoulder 22 surrounds the edge region of the measuring diaphragm 4.
  • the radial shoulder 22 has a contact surface 24, on which the sealing ring 11 is radially supported.
  • the angle ring 20 comprises a first component 26, which has a substantially dimensionally stable elastomer under the forces occurring, and a second component 28, which has a much softer elastomer, wherein the first component forms a basic structure of an angle ring to which secures the second component is.
  • the radial shoulder 22 serves to support the sealing ring, wherein the radial shoulder extends between the contact surface 24 for the sealing ring 11 and a lateral surface portion 32 of the first component, wherein the lateral surface portion is positioned in clearance in the housing and thus the position of the sealing ring with respect to the Housing sufficiently well defined, wherein the sealing ring is radially supported in this position under pressure by the radial shoulder 22 on the contact surface 24.
  • d 0 is the nominal diameter.
  • the tolerances of the gap are accordingly half the value of the diameter tolerance.
  • FIG. 2 illustrated embodiment of an angle ring 20 has a cylindrical portion 21 and a radial shoulder 22, wherein the angle ring has in a first component 26 on its comparatively hard elastomer and a second component 28 of a relatively soft elastomer.
  • the first component 26 defines a cylindrical basic structure and a radial shoulder 22 up to its radial abutment surface 24, wherein the second component 28 comprises axial webs 24, which penetrate openings of the first component 26, and wherein the axial webs 34 connected to each other via a ring 36 which forms part of the radial shoulder 22.
  • the pressure measuring cell is inserted into this angle ring, wherein the lateral position of the pressure measuring cell in the measuring cell chamber of the housing is defined by the webs 34, wherein the webs 34 in turn abut the housing wall of the measuring cell chamber.
  • Fig. 3 now shows an individual view of the first component 26 of the angle ring, wherein holes 28 and 40 can be seen here, which form the openings through which the webs 34 extend in the radial direction to fix them with respect to the first component.
  • Fig. 4 finally shows an individual representation of the second component of the angle ring according to the invention, wherein the webs 34 are connected to each other via a circumferential ring 36.
  • the angle ring is made by overmolding the first component in an injection molding process with the material of the second component.
  • the present invention discloses a pressure transducer with improved positioning of the sealing ring in the housing, which is the prerequisite for a consistent measurement accuracy in smaller measuring cells.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Description

Die vorliegende Erfindung betrifft einen Druckmessaufnehmer mit einer zylindrischen Druckmesszelle. Gattungsgemäße Druckmessaufnehmer weisen eine keramische Druckmesszelle in einem Gehäuse auf, wobei die Druckmesszelle in einer Messzellenkammer in dem Gehäuse angeordnet ist, wobei die Messzellenkammer eine Öffnung aufweist, durch welche die Druckmesszelle mit einem Mediendruck beaufschlagbar ist, wobei das Gehäuse eine sich radial einwärts erstreckende ringförmige Schulter aufweist, welche die Gehäuseöffnung umgibt, und welche eine axiale Anschlagfläche für einen Dichtring bildet, auf welcher ein Dichtring aufliegt, gegen den die Druckmesszelle mit einer Eigenspannvorrichtung axial eingespannt ist. Zur Positionierung der Druckmesszelle und des Dichtrings im Gehäuse werden Winkelringe eingesetzt, welche in einem Ringspalt zwischen der Mantelfläche der Druckmesszelle und der Gehäusewand eingesetzt sind, und welche den Rand der öffnungsseitigen Stirnfläche der Druckmesszelle umgreifen. Ein gattungsgemäßer Druckmessaufnehmer ist beispielsweise im europäischen Patent EP 0 594 808 B1 offenbart, wobei der dort beschriebene Winkelring insbesondere dazu dient, einen modularen Aufbau des Gehäuses zu ermöglichen, bei dem die axiale Schulter an einem Prozessanschlusskörper ausgebildet ist, welcher die Gehäuseöffnung aufweist, durch welche die Druckmesszelle mit einem Druck zu beaufschlagen ist, wobei der Anschlusskörper auf seiner Mantelfläche ein Gewinde aufweist, welches in ein komplementäres Innengewinde in dem Gehäuse eingereift, wobei das Innengewinde in einem frontseitigen Endabschnitt der Sensorkammer angeordnet ist. Die Aufgabe des Winkelrings ist in diesem Zusammenhang zweierlei, nämlich einerseits das axiale und radiale Positionieren der Druckmesszelle in dem Gehäuse und andererseits das Halten des O-Rings vor der Montage des Anschlusskörpers. Insbesondere das Spannungsverhalten der Druckmesszelle in dem Gehäuse setzt jedoch einen hinreichend elastischen Werkstoff für den Winkelring voraus, welches hinsichtlich der radialen Abstützung des Dichtrings durch den Winkelring Kompromisse erfordert, da Dichtring und Winkelring Werkstoffe ähnlicher Härte aufweisen, und insofern der Winkelring kaum zur Abstützung des Dichtrings unter Druckbelastung geeignet erscheint.The present invention relates to a pressure transducer with a cylindrical pressure measuring cell. Generic pressure transducers have a ceramic pressure measuring cell in a housing, wherein the pressure measuring cell is arranged in a measuring cell chamber in the housing, wherein the measuring cell chamber has an opening through which the pressure measuring cell can be acted upon with a media pressure, wherein the housing has a radially inwardly extending annular shoulder has, which surrounds the housing opening, and which forms an axial stop surface for a sealing ring, on which rests a sealing ring, against which the pressure measuring cell is clamped axially with a self-tensioning device. For positioning the pressure measuring cell and the sealing ring in the housing angular rings are used, which are inserted in an annular gap between the lateral surface of the pressure measuring cell and the housing wall, and which surround the edge of the opening-side end face of the pressure measuring cell. A generic pressure transducer is for example in the European patent EP 0 594 808 B1 discloses, wherein the angle ring described therein in particular serves to enable a modular construction of the housing, wherein the axial shoulder is formed on a process connection body having the housing opening through which the pressure measuring cell is to be acted upon with a pressure, wherein the connection body its lateral surface has a thread, which engages in a complementary internal thread in the housing, wherein the internal thread is arranged in a front end portion of the sensor chamber. The task of the angle ring is in this context two things, namely on the one hand, the axial and radial positioning of the pressure measuring cell in the housing and on the other hand holding the O-ring before mounting the connector body. However, in particular the voltage behavior of the pressure measuring cell in the housing is sufficient elastic material for the angle ring ahead, which requires compromise with respect to the radial support of the sealing ring by the angle ring, since the sealing ring and angle ring materials have similar hardness, and insofar as the angle ring hardly seems suitable for supporting the sealing ring under pressure load.

Die Offenlegungsschrift EP 1 942 525 A1 offenbart eine Abdichteinrichtung zum Verschließen eines Druckmesszellengehäuses auf einer dem Gehäuse zugewandten Rückseite einer Druckmesszelle, wobei die Abdichteinrichtung eine Druckausgleichsöffnung für eine Druckausgleichsleitung der im Druckmesszellengehäuse aufgenommenen Druckmesszelle aufweist, wobei die Abdichteinrichtung aus einem formstabilen Hartteil mit zumindest einem im Bereich der Druckausgleichsöffnung an dem Hartteil befestigten elastischen Weichteil ausgebildet ist.The publication EP 1 942 525 A1 discloses a sealing device for closing a pressure measuring cell housing on a rear side facing the housing of a pressure measuring cell, wherein the sealing device comprises a pressure equalization opening for a pressure equalization line of the pressure measuring cell housing recorded pressure measuring cell, wherein the sealing means of a dimensionally stable hard part with at least one in the region of the pressure equalization opening attached to the hard part elastic Soft part is formed.

Die Offenlegungsschrift WO 2010 046 249 A1 offenbart einen Druckmessaufnehmer mit einem länglichen Gehäuse, einer in dem Gehäuse angeordneten Druckmesszelle, wobei das Gehäuse wenigstens eine Öffnung aufweist, durch die hindurch der Sensor mit einem Druck beaufschlagbar ist, die Druckmesszelle ist in dem Gehäuse gegen eine Dichtung axial eingespannt.The publication WO 2010 046 249 A1 discloses a pressure transducer having an elongated housing, a pressure measuring cell arranged in the housing, wherein the housing has at least one opening through which the sensor can be acted upon by a pressure, the pressure measuring cell is axially clamped in the housing against a seal.

Die Offenlegungsschrift DE 101 33 066 A1 offenbart eine Druckmesszelle die in eine Hülse eingefasst ist, welche eine sich radial nach innen erstreckende Schulter aufweist, auf der die Druckmesszelle aufliegt, wobei zwischen der Schulter und dem Rand der Druckmesszelle ein Zentrierring mit einem zylindrischen Abschnitt und einer daran angeformten sich radial nach innen erstreckende Schulter angeordnet ist. Der Zentrierring bewirkt eine weiche und verspannungsarme Lagerung der Druckmesszelle. Zusätzlich bewirkt der Zentrierring eine Abdichtung des Spaltes zwischen der Druckmesszelle und der Hülse.The publication DE 101 33 066 A1 discloses a pressure measuring cell which is enclosed in a sleeve having a radially inwardly extending shoulder on which rests the pressure measuring cell, wherein between the shoulder and the edge of the pressure measuring cell, a centering ring with a cylindrical portion and an integrally formed thereon extending radially inwardly Shoulder is arranged. The centering ring causes a soft and low-tension bearing of the pressure cell. In addition, the centering ring causes a seal of the gap between the pressure measuring cell and the sleeve.

Bei kleineren Druckmesszellen ist es jedoch erforderlich, die Position des Dichtrings genau zu definieren, da die relative Bedeutung einer radialen Verschiebung des Dichtrings mit abnehmendem Durchmesser der Druckmesszelle an Bedeutung gewinnt. Es ist daher die Aufgabe der vorliegenden Erfindung, einen Druckmessaufnehmer bereitzustellen, der die Nachteile des Stands der Technik überwindet, also einerseits die Druckmesszelle spannungsfrei in der Messzellenkammer lagert und andererseits den Dichtring auch unter Druckbelastung radial definiert positioniert. Die Aufgabe wird erfindungsgemäß gelöst durch den Druckmessaufnehmer gemäß dem unabhängigen Patentanspruch 1.For smaller pressure cells, however, it is necessary to precisely define the position of the sealing ring, since the relative importance of a radial displacement of the sealing ring wins with decreasing diameter of the pressure measuring cell in importance. It is therefore an object of the present invention to provide a pressure transducer, which overcomes the disadvantages of the prior art, so on the one hand, the pressure measuring cell stored stress-free in the measuring cell chamber and on the other hand, the sealing ring positioned radially defined under pressure load. The object is achieved by the pressure transducer according to the independent claim. 1

Der erfindungsgemäße Druckmessaufnehmer umfasst: eine im wesentlichen zylindrische Druckmesszelle, ein Messzellengehäuse mit einer zumindest abschnittsweise im wesentlichen zylindrischen Messzellenkammer; einen Dichtring; eine Einspannvorrichtung; und einen Winkelring zum positionieren der Druckmesszelle und des Dichtrings in der Messzellenkammer, wobei die Messzellenkammer eine Öffnung aufweist, durch welche die Messzellenkammer mit einem Mediendruck beaufschlagbar ist, wobei das Messzellengehäuse eine ringförmige axiale Anschlagfläche aufweist, welche die Öffnung umgibt, und welche sich von einer zylindrischen Wand der Messzellenkammer radial einwärts erstreckt, wobei der Dichtring auf der axialen Anschlagfläche aufliegt, wobei die Druckmesszelle mit einer frontseitigen Stirnfläche auf den Dichtring aufliegt, wobei die Einspannvorrichtung auf einer rückseitigen Stirnfläche der Druckmesszelle aufliegt, um die Druckmesszelle gegen den Dichtring axial einzuspannen, wobei der Winkelring in einem Ringspalt zwischen der Druckmesszelle und einer Wand der Messzellenkammer angeordnet ist und eine sich radial einwärts erstreckende Schulter aufweist, welche einen Randbereich der frontseitigen Stirnfläche der Druckmesszelle umgreift, wobei die radiale Schulter einen radialen Anschlag definiert, um den Dichtring zwischen der Druckmesszelle und der axialen Anschlagfläche zu positionieren, wobei erfindungsgemäß der Winkelring mindestens eine erste Komponente umfasst, die einen formsteifen Werkstoff aufweist, und mindestens eine zweite Komponente, welche einen elastischen Werkstoff aufweist, wobei die mindestens eine formsteife Komponente die radiale Schulter bildet und sich in axialer Richtung in den Ringspalt erstreckt, wobei die zweite Komponente mit der ersten Komponente verbunden ist und sich in dem Ringspalt zumindest abschnittsweise radial zwischen der Mantelfläche der Druckmesszelle und der Wand der Messzellenkammer erstreckt, um die Druckmesszelle bezüglich der Messzellenkammer zu positionieren, wobei der zylindrische Abschnitt einen oder mehrere Durchbrüche aufweist, durch welche sich die zweite Komponente erstreckt, um die zweite Komponente mit der ersten Komponente zu verbinden.The pressure measuring transducer according to the invention comprises: a substantially cylindrical pressure measuring cell, a measuring cell housing with an at least partially substantially cylindrical measuring cell chamber; a sealing ring; a jig; and an angle ring for positioning the pressure measuring cell and the sealing ring in the measuring cell chamber, wherein the measuring cell chamber has an opening through which the measuring cell chamber can be acted upon by a media pressure, wherein the measuring cell housing has an annular axial stop surface which surrounds the opening, and which of a cylindrical wall of the measuring cell chamber extends radially inwardly, wherein the sealing ring rests on the axial stop surface, wherein the pressure measuring cell rests with a front end face on the sealing ring, wherein the clamping device rests on a rear end face of the pressure measuring cell to the pressure measuring cell against the sealing ring clamped axially, wherein the angle ring is disposed in an annular gap between the pressure measuring cell and a wall of the measuring cell chamber and having a radially inwardly extending shoulder which surrounds an edge region of the front end face of the pressure measuring cell, wherein the radial shoulder defines a radial stop to the sealing ring to position between the pressure measuring cell and the axial abutment surface, wherein according to the invention the angle ring comprises at least a first component having a dimensionally stable material, and at least one second component having an elastic material, wherein the at least one dimensionally rigid component forms the radial shoulder and extends in the axial direction in the annular gap, wherein the second component is connected to the first component and extending in the annular gap at least partially radially between the lateral surface of the pressure measuring cell and the wall of the measuring cell chamber to position the pressure cell with respect to the measuring cell chamber, the cylindrical portion having one or more apertures through which the second component extends to connect the second component to the first component.

In einer Weiterbildung der Erfindung weist die erste Komponente einen im Wesentlichen zylindrischen Abschnitt auf, von dem sich an einem Endabschnitt die radiale Schulter radial einwärts erstreckt.In a development of the invention, the first component has a substantially cylindrical section, from which the radial shoulder extends radially inwards at one end section.

In einer Ausgestaltung der Erfindung umfassen die Durchbrüche, Bohrungen oder axiale Schlitze in dem zylindrischen Abschnitt.In one embodiment of the invention, the apertures comprise bores or axial slots in the cylindrical portion.

In einer Weiterbildung der Erfindung umfasst die zweite Komponente ein Elastomer mit einer Härte von nicht mehr als 50 Shore A. Das Elastomer kann insbesondere VMQ oder EPDM aufweisen.In one development of the invention, the second component comprises an elastomer having a hardness of not more than 50 Shore A. The elastomer may in particular comprise VMQ or EPDM.

In einer Weiterbildung der Erfindung weist die erste Komponente einen organischen Werkstoff, insbesondere ein Elastomer auf. Das Polymer der ersten Komponente kann insbesondere PEEK, PS oder PA xx aufweisen, insbesondere PA 6, PA 66, PA 12, PA MACM12, PA 6-3-T.In a development of the invention, the first component comprises an organic material, in particular an elastomer. The polymer of the first component may in particular comprise PEEK, PS or PA xx, in particular PA 6, PA 66, PA 12, PA MACM 12, PA 6-3-T.

Die Druckmesszelle kann insbesondere eine keramische Druckmesszelle sein, welche einen Grundkörper und eine Messmembran aufweist, wobei die Messmembran entlang ihres Randes mittels einer ringförmigen Fügestelle druckdicht mit dem Grundkörper verbunden ist, wobei der Dichtring in dem mit der Fügestelle fluchtenden Bereich der Messmembran auf der Messmembran aufliegt. Der Dichtring kann insbesondere ein Elastomer aufweisen.The pressure measuring cell may in particular be a ceramic pressure measuring cell, which has a base body and a measuring membrane, wherein the measuring membrane is pressure-tightly connected to the base body along its edge by means of an annular joint, wherein the sealing ring rests on the measuring membrane in the area of the measuring membrane which is aligned with the joint , The sealing ring may in particular comprise an elastomer.

Die Einspannvorrichtung kann gemäß einer Weiterbildung der Erfindung einen Schraubring umfassen, welcher auf seiner Mantelfläche ein Gewinde aufweist, und wobei das Gehäuse ein zu dem Gewinde des Schraubrings komplementäres Innengewinde aufweist, in welches der Schraubring eingeschraubt ist, um die Druckmesszelle einzuspannen.The clamping device may comprise a threaded ring according to a development of the invention, which has a thread on its lateral surface, and wherein the housing has a complementary to the thread of the screw inner thread into which the screw ring is screwed to clamp the pressure measuring cell.

Gemäß einer Weiterbildung der Erfindung ist zwischen dem Schraubring und der Druckmesszelle mindestens ein Entkopplungskörper angeordnet. Der Entkopplungskörper dient insbesondere dazu Radialspannungen aufgrund unterschiedlicher Wärmeausdehnungskoeffizienten des Materials des Schraubrings einerseits und des Materials der Druckmesszelle andererseits, de über Reibschluss in die Druckmesszelle eingeleitet werden könnten, von der Druckmesszelle fernzuhalten.According to one embodiment of the invention, at least one decoupling body is arranged between the screw ring and the pressure measuring cell. The decoupling body is used in particular to radial stresses due to different thermal expansion coefficients of the material of the screw ring on the one hand and the material of the pressure measuring cell on the other hand, de could be introduced via frictional engagement in the pressure measuring cell, keep away from the pressure measuring cell.

In einer derzeit bevorzugten Ausgestaltung der Erfindung weist der Entkopplungskörper den gleichen Werkstoff auf wie die Druckmesszelle bzw. wie der Grundkörper der Druckmesszelle.In a currently preferred embodiment of the invention, the decoupling body has the same material as the pressure measuring cell or as the main body of the pressure measuring cell.

Gemäß einer Weiterbildung der Erfindung umfasst die zweite Komponente des Winkelrings mehrere Federelemente, die in dem Ringspalt zur Positionierung der Druckmesszelle angeordnet sind.According to one embodiment of the invention, the second component of the angle ring comprises a plurality of spring elements which are arranged in the annular gap for positioning the pressure measuring cell.

In einer Weiterbildung der Erfindung füllt der zylindrische Abschnitt des ersten Elements nicht mehr als 70 % vorzugsweise nicht mehr als 50% des Volumens des Ringspalts zwischen der Druckmesszelle und der Wand der Messzellenkammer aus, wobei die Federelemente nicht mehr als 80 %, vorzugsweise nicht mehr als 60 % und besonders bevorzugt nicht mehr als 50 % des verbleibenden Volumen des Ringspalts ausfüllen. Das verbleibende Volumen des Ringspalts ist die Differenz zwischen dem Gesamtvolumen des Ringspalts und dem Volumen des zylindrischen Abschnitts des ersten Elements in dem Ringspalt.In a further development of the invention, the cylindrical section of the first element does not fill more than 70%, preferably not more than 50%, of the volume of the annular gap between the pressure measuring cell and the wall of the measuring cell chamber, the spring elements not exceeding 80%, preferably not more than 60% and more preferably not more than 50% of the remaining volume of the annular gap fill. The remaining volume of the annular gap is the difference between the total volume of the annular gap and the volume of the cylindrical portion of the first element in the annular gap.

Die Federelemente umfassen in einer Ausgestaltung der Erfindung, Stege, welche sich in axialer Richtung erstrecken.The spring elements comprise in one embodiment of the invention, webs which extend in the axial direction.

In einer Ausgestaltung der Erfindung weist der radiale Anschlag für den Dichtring eine toroidale Anlagefläche für den Dichtring aufweist.In one embodiment of the invention, the radial stop for the sealing ring has a toroidal contact surface for the sealing ring.

Durch die Kontrolle der lateralen Position der Druckmesszelle dient der Winkelring weiterhin dem Ziel die Spannungsfestigkeit von beispielsweise 600V zwischen der Schaltungsmasse der Druckmesszelle und der Masse des Gehäuses (Erde) zu gewährleisten. Insbesondere eine metallische Fügestelle zwischen der Messmembran und dem Grundkörper der Druckmesszelle, die sich bis zur Mantelfläche der Druckmesszelle erstreckt, ist auf Schaltungsmasse der Druckmesszelle gelegt. Insofern ist es wichtig, die Mindestabstände zwischen der Mantelfläche der Druckmesszelle und dem Gehäuse einzuhalten, was durch den Winkelring erreicht wird.By controlling the lateral position of the pressure measuring cell, the angle ring further serves the purpose of ensuring the dielectric strength of, for example, 600 V between the circuit ground of the pressure measuring cell and the mass of the housing (ground). In particular, a metallic joint between the measuring diaphragm and the base body of the pressure measuring cell, which extends up to the lateral surface of the pressure measuring cell, is placed on circuit ground of the pressure measuring cell. So far It is important to observe the minimum distances between the lateral surface of the pressure cell and the housing, which is achieved by the angle ring.

Die Erfindung wird nun anhand der in den Figuren gezeigten Ausführungsbeispiele erläutert. Es zeigt:

Fig. 1:
einen Längsschnitt durch einen Abschnitt eines erfindungsgemäßen Druckmessaufnehmers;
Fig. 2:
ein Ausführungsbeispiel eines Winkelrings eines erfindungsgemäßen Druckmessaufnehmers;
Fig. 3:
die erste Komponente des Winkelrings aus Fig. 2; und
Fig. 4:
die zweite Komponente des Winkelrings aus Fig. 2.
The invention will now be explained with reference to the embodiments shown in FIGS. It shows:
Fig. 1:
a longitudinal section through a portion of a pressure measuring transducer according to the invention;
Fig. 2:
an embodiment of an angle ring of a pressure measuring transducer according to the invention;
3:
the first component of the angle ring Fig. 2 ; and
4:
the second component of the angle ring Fig. 2 ,

Der in Fig. 1 dargestellte Druckmessaufnehmer 1 umfasst eine Druckmesszelle 2, welche einen zylindrischen Grundkörper 3 und eine Messmembran 4 aufweist, wobei die Messmembran mit dem Grundkörper entlang einer umlaufenden ringförmigen Fügestelle 5 druckdicht verbunden ist. Die Messmembran und der Grundkörper weisen vorzugsweise einen keramischen Werkstoff, insbesondere Korund auf, wobei die Fügestelle beispielsweise ein Aktivhartlot, insbesondere ein Zr-Ni-Ti-Aktivhartlot oder Glas umfassen kann.The in Fig. 1 shown pressure measuring transducer 1 comprises a pressure measuring cell 2, which has a cylindrical base body 3 and a measuring diaphragm 4, wherein the measuring diaphragm is connected to the main body along a circumferential annular joint 5 pressure-tight. The measuring membrane and the base body preferably have a ceramic material, in particular corundum, wherein the joint may comprise, for example, an active brazing material, in particular a Zr-Ni-Ti active brazing material or glass.

Die Druckmesszelle ist in einem Gehäuse 6 angeordnet, welches in seinem Inneren eine zylindrische Messzellenkammer 7 aufweist, die durch eine stirnseitige Öffnung 8 mit einem Druck beaufschlagbar ist, wobei die stirnseitige Öffnung 8 durch eine radiale Schulter 9 begrenzt ist, welche sich von der zylindrischen Wand der Messzellenkammer 7 radial einwärts erstreckt. Die radiale Schulter 9 definiert einen axialen Anschlag 10, an dem sich ein elastischer Dichtring, insbesondere ein O-Ring 11 abstützt. Die Druckmesszelle 2 ist zwischen dem Dichtring 11 und einem Einspannring 12 axial in der Messzellenkammer eingespannt, wobei der Einspannring 12 auf einem Abschnitt seiner Mantelfläche ein Außengewinde 13 aufweist, welches in ein komplementäres Innengewinde 14 im Gehäuse 6 eingereift. Zwischen dem Einspannring 12 und der Druckmesszelle ist ein Entkopplungsring 15 angeordnet und eingespannt, wobei der Entkopplungsring 15 insbesondere den gleichen Werkstoff wie der Grundkörper der Grundmesszelle 2 aufweist. Zur Positionierung der Druckmesszelle 2 in der Messzellenkammer 7 ist ein Winkelring 20 vorgesehen, welcher einen zylindrischen Abschnitt 21 und eine radiale Schulter 22 aufweist, wobei durch die radiale Schulter 22 an einer Stirnseite des zylindrischen Abschnitts 21 radial einwärts erstreckt. Der Winkelring ist in einem Ringspalt angeordnet, welcher zwischen der Druckmesszelle 2 und der Wand der Messzellenkammer 7 gebildet ist, wobei der Winkelring mit seiner radialen Schulter 22 den Randbereich der Messmembran 4 umgreift. Die radiale Schulter 22 weist eine Anlagefläche 24 auf, an welcher sich der Dichtring 11 radial abstützt. Der Winkelring 20 umfasst eine erste Komponente 26, die ein unter den auftretenden Kräften im Wesentlichen formstabiles Elastomer aufweist, und eine zweite Komponente 28, welches ein deutlich weicheres Elastomer aufweist, wobei die erste Komponente eine Grundstruktur eines Winkelrings bildet, an welcher die zweite Komponente befestigt ist.The pressure measuring cell is arranged in a housing 6, which has in its interior a cylindrical measuring cell chamber 7, which is acted upon by a frontal opening 8 with a pressure, wherein the frontal opening 8 is bounded by a radial shoulder 9, which extends from the cylindrical wall the measuring cell chamber 7 extends radially inwardly. The radial shoulder 9 defines an axial stop 10 on which an elastic sealing ring, in particular an O-ring 11 is supported. The pressure measuring cell 2 is between the sealing ring 11 and a Clamping ring 12 axially clamped in the measuring cell chamber, wherein the clamping ring 12 has a male thread 13 on a portion of its lateral surface, which rests in a complementary internal thread 14 in the housing 6. Between the clamping ring 12 and the pressure measuring cell, a decoupling ring 15 is arranged and clamped, wherein the decoupling ring 15 in particular has the same material as the main body of the basic measuring cell 2. For positioning the pressure measuring cell 2 in the measuring cell chamber 7, an angle ring 20 is provided which has a cylindrical portion 21 and a radial shoulder 22, wherein extends radially inwardly through the radial shoulder 22 at an end face of the cylindrical portion 21. The angle ring is arranged in an annular gap, which is formed between the pressure measuring cell 2 and the wall of the measuring cell chamber 7, wherein the angle ring with its radial shoulder 22 surrounds the edge region of the measuring diaphragm 4. The radial shoulder 22 has a contact surface 24, on which the sealing ring 11 is radially supported. The angle ring 20 comprises a first component 26, which has a substantially dimensionally stable elastomer under the forces occurring, and a second component 28, which has a much softer elastomer, wherein the first component forms a basic structure of an angle ring to which secures the second component is.

Die radialen Schulter 22 dient zur Abstützung des Dichtrings, wobei sich die radiale Schulter zwischen der Anlagefläche 24 für den Dichtring 11 und einem Mantelflächenabschnitt 32 der ersten Komponente erstreckt, wobei der Mantelflächenabschnitt in Spielpassung in dem Gehäuse positioniert ist und somit die Position des Dichtrings bezüglich des Gehäuses hinreichend genau definiert, wobei der Dichtring in dieser Position auch unter Druckbeaufschlagung durch die radiale Schulter 22 an der Anlagefläche 24 radial abgestützt wird.The radial shoulder 22 serves to support the sealing ring, wherein the radial shoulder extends between the contact surface 24 for the sealing ring 11 and a lateral surface portion 32 of the first component, wherein the lateral surface portion is positioned in clearance in the housing and thus the position of the sealing ring with respect to the Housing sufficiently well defined, wherein the sealing ring is radially supported in this position under pressure by the radial shoulder 22 on the contact surface 24.

Für die Toleranz des Durchmessers d des Winkelrings im Bereich der Spielpassung gilt: d 0 - 0 , 05 mm < d < d 0 + 0 , 15 mm ,

Figure imgb0001

wobei d0 der Solldurchmesser ist. Die Toleranzen des Spalts betragen dementsprechend den halben Wert der Durchmessertoleranz.For the tolerance of the diameter d of the angle ring in the area of the clearance, the following applies: d 0 - 0 . 05 mm < d < d 0 + 0 . 15 mm .
Figure imgb0001

where d 0 is the nominal diameter. The tolerances of the gap are accordingly half the value of the diameter tolerance.

Das in Fig. 2 dargestellte Ausführungsbeispiel eines Winkelrings 20 weist einen zylindrischen Abschnitt 21 und eine radiale Schulter 22 auf, wobei der Winkelring in eine erste Komponente 26 auf seinem vergleichsweise harten Elastomer und eine zweite Komponente 28 aus einem vergleichsweise weichen Elastomer aufweist. Die erste Komponente 26 definiert eine zylindrische Grundstruktur und eine radiale Schulter 22 bis zu deren radialer Anlagefläche 24, wobei die zweite Komponente 28 axiale Stege 24 umfasst, welche Durchbrüche der ersten Komponente 26 durchdringen, und wobei die axialen Stege 34 über einen Ring 36 miteinander verbunden sind, welcher einen Teil der radialen Schulter 22 bildet.This in Fig. 2 illustrated embodiment of an angle ring 20 has a cylindrical portion 21 and a radial shoulder 22, wherein the angle ring has in a first component 26 on its comparatively hard elastomer and a second component 28 of a relatively soft elastomer. The first component 26 defines a cylindrical basic structure and a radial shoulder 22 up to its radial abutment surface 24, wherein the second component 28 comprises axial webs 24, which penetrate openings of the first component 26, and wherein the axial webs 34 connected to each other via a ring 36 which forms part of the radial shoulder 22.

Die Druckmesszelle wird in diesen Winkelring eingesetzt, wobei die laterale Position der Druckmesszelle in der Messzellenkammer des Gehäuses durch die Stege 34 definiert ist, wobei die Stege 34 wiederum an der Gehäusewand der Messzellenkammer anliegen.The pressure measuring cell is inserted into this angle ring, wherein the lateral position of the pressure measuring cell in the measuring cell chamber of the housing is defined by the webs 34, wherein the webs 34 in turn abut the housing wall of the measuring cell chamber.

Fig. 3 zeigt nun eine Einzeldarstellung der ersten Komponente 26 des Winkelrings, wobei hierin Bohrungen 28 und 40 zu erkennen sind, welche die Durchbrüche bilden, durch welche sich die Stege 34 in radialer Richtung erstrecken, um diese bezüglich der ersten Komponente zu fixieren. Fig. 3 now shows an individual view of the first component 26 of the angle ring, wherein holes 28 and 40 can be seen here, which form the openings through which the webs 34 extend in the radial direction to fix them with respect to the first component.

Fig. 4 zeigt schließlich eine Einzeldarstellung der zweiten Komponente des erfindungsgemäßen Winkelrings, wobei die Stege 34 über eine umlaufenden Ring 36 miteinander verbunden sind. Der Winkelring wird hergestellt, indem die erste Komponente in einem Spritzgussverfahren mit dem Material der zweiten Komponente umspritzt wird. Fig. 4 finally shows an individual representation of the second component of the angle ring according to the invention, wherein the webs 34 are connected to each other via a circumferential ring 36. The angle ring is made by overmolding the first component in an injection molding process with the material of the second component.

Im Ergebnis offenbart die vorliegende Erfindung einen Druckmessaufnehmer mit einer verbesserten Positionierung des Dichtrings im Gehäuse, was die Voraussetzung für eine gleich bleibende Messgenauigkeit bei verkleinerten Messzellen ist.As a result, the present invention discloses a pressure transducer with improved positioning of the sealing ring in the housing, which is the prerequisite for a consistent measurement accuracy in smaller measuring cells.

Claims (13)

  1. Pressure sensor (1) comprising:
    an essentially cylindrical pressure measuring cell (2),
    a measuring cell housing (6) with an essentially cylindrical measuring cell chamber (7),
    wherein the measuring cell chamber has an opening through which the measuring cell chamber can be exposed to a medium pressure, wherein the measuring cell housing (6) has an annular axial stop face (10) which surrounds the opening and which extends radially inwards from a cylindrical wall of the measuring cell chamber;
    a sealing ring (11);
    a clamping device (12); and
    an angle ring (20) designed to position the pressure measuring cell (2) and the sealing ring (11) in the measuring cell chamber,
    wherein the sealing ring (11) lies on the axial stop face (10),
    wherein the pressure measuring cell (2) lies with its front abutting face on the sealing ring (11),
    wherein the clamping device (12) lies on the rear abutting face of the pressure measuring cell in order to axially clamp the pressure measuring cell against the sealing ring (11),
    wherein the angle ring (20) is arranged in an angular gap between the pressure measuring cell (2) and a wall of the measuring cell chamber (7) and features a shoulder (22) that extends radially inwards, said shoulder surrounding a marginal zone of the front abutting face of the pressure measuring cell (2),
    wherein the radial shoulder (22) defines a radial stop in order to position the sealing ring between the pressure measuring cell and the axial stop face,
    wherein the angle ring (20) comprises at least a first component (26), which features a rigid material, and at least a second component (28), which features an elastic material, wherein the at least first component forms the radial shoulder (22) and extends into the annular gap in the axial direction,
    wherein the first component (26) features an essentially cylindrical section from which the radial shoulder (22) extends radially inwards at an end section,
    wherein the second component (28) is connected to the first component and in the annular gap extends radially at least in part between the lateral surface of the pressure measuring cell (2) and the wall of the measuring cell chamber (7) in order to position the pressure measuring cell (2) in relation to the measuring cell chamber (7), characterized in that the cylindrical section features at least one or several apertures (38, 40) through which the second component extends (28) in order to connect the second component (28) with the first component (26).
  2. Pressure sensor (1) as claimed in Claim 1, wherein the apertures comprise bore holes (38, 40) or axial slits in the cylindrical section.
  3. Pressure sensor (1) as claimed in one of the previous claims, wherein the second component (28) features an elastomer with a hardness of no more than 50 Shore A.
  4. Pressure sensor (1) as claimed in one of the previous claims, wherein the elastomer of the second component (28) features VMQ or EPDM.
  5. Pressure sensor (1) as claimed in one of the previous claims, wherein the first component (26) features an organic material, particularly an elastomer, preferably PEEK, PS or PAxx.
  6. Pressure sensor (1) as claimed in one of the previous claims, wherein the pressure measuring cell (2) is a ceramic pressure measuring cell which has a meter body (3) and a measuring membrane (4), wherein the measuring membrane (4) is connected pressure-tight to the meter body (2) along its edge by means of an annular joint (5), wherein the sealing ring (11) lies on the measuring membrane in the area of the measuring membrane that is flush with the joint (5).
  7. Pressure sensor (1) as claimed in Claim 6, wherein the sealing ring (11) features an elastomer.
  8. Pressure sensor (1) as claimed in one of the previous claims, wherein the clamping unit comprises a screwed ring which has a thread on its lateral surface, and wherein the housing features an internal thread, complementing the thread of the screwed ring, into which the screwed ring is screwed in order to clamp the pressure measuring cell.
  9. Pressure sensor (1) as claimed in Claim 10, wherein at least one decoupling body is arranged between the screwed ring and the pressure measuring cell.
  10. Pressure sensor (1) as claimed in one of the previous claims, wherein the second component (28) comprises several spring elements (34) which are arranged in the annular gap to position the pressure measuring cell.
  11. Pressure sensor (1) as claimed in Claim 12, wherein the cylindrical section of the first component fills no more than 70%, and preferably no more than 50%, of the volume of the annular gap between the pressure measuring cell and the wall of the measuring cell chamber (7), and wherein the spring elements (34) fill no more than 80%, preferably no more than 60% and particularly preferably no more than 50% of the remaining volume of the annular gap.
  12. Pressure sensor (1) as claimed in Claim 10 or 11, wherein the spring elements feature ridges (34) that extend in the axial direction.
  13. Pressure sensor (1) as claimed in one of the previous claims, wherein the radial stop for the sealing ring (11) features a toroidal bearing surface for the sealing ring (11).
EP11718756.7A 2010-06-10 2011-05-11 Pressure sensor with a cylindrical pressure measurement cell Active EP2580564B1 (en)

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DE102010029955A DE102010029955A1 (en) 2010-06-10 2010-06-10 Pressure sensor with a cylindrical pressure measuring cell
PCT/EP2011/057591 WO2011154209A1 (en) 2010-06-10 2011-05-11 Pressure sensor with a cylindrical pressure measurement cell

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CN102939520A (en) 2013-02-20
WO2011154209A1 (en) 2011-12-15
CN102939520B (en) 2014-12-31
US20130086990A1 (en) 2013-04-11
US8925388B2 (en) 2015-01-06

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