EP2515092A4 - Interferometer and fourier spectrometer using same - Google Patents
Interferometer and fourier spectrometer using sameInfo
- Publication number
- EP2515092A4 EP2515092A4 EP10837481.0A EP10837481A EP2515092A4 EP 2515092 A4 EP2515092 A4 EP 2515092A4 EP 10837481 A EP10837481 A EP 10837481A EP 2515092 A4 EP2515092 A4 EP 2515092A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- interferometer
- same
- fourier spectrometer
- spectrometer
- fourier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009282586 | 2009-12-14 | ||
PCT/JP2010/071983 WO2011074452A1 (en) | 2009-12-14 | 2010-12-08 | Interferometer and fourier spectrometer using same |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2515092A1 EP2515092A1 (en) | 2012-10-24 |
EP2515092A4 true EP2515092A4 (en) | 2015-09-09 |
Family
ID=44167209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10837481.0A Withdrawn EP2515092A4 (en) | 2009-12-14 | 2010-12-08 | Interferometer and fourier spectrometer using same |
Country Status (4)
Country | Link |
---|---|
US (1) | US9025156B2 (en) |
EP (1) | EP2515092A4 (en) |
JP (1) | JPWO2011074452A1 (en) |
WO (1) | WO2011074452A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2634551B1 (en) | 2010-10-28 | 2021-05-19 | FOSS Analytical A/S | Interferometer and fourier-transform spectroscopic analyzer |
WO2012124294A1 (en) * | 2011-03-17 | 2012-09-20 | コニカミノルタセンシング株式会社 | Fourier transform spectrometer and fourier transform spectrometry |
JP5835327B2 (en) * | 2011-07-13 | 2015-12-24 | コニカミノルタ株式会社 | Interferometer and spectrometer equipped with the interferometer |
JP5888334B2 (en) * | 2011-09-30 | 2016-03-22 | ウシオ電機株式会社 | Digital holography method and digital holography apparatus |
CN106066205B (en) * | 2016-05-25 | 2018-09-21 | 北京雪迪龙科技股份有限公司 | Micromotion mechanism, movable lens interferometer and the infrared spectrometer using movable lens interferometer |
CN106152951A (en) * | 2016-07-05 | 2016-11-23 | 中国工程物理研究院激光聚变研究中心 | A kind of two-sided interference device measuring non-transparent film thickness distribution and method |
US10900842B2 (en) | 2019-01-11 | 2021-01-26 | MP High Tech Solutions Pty Ltd | On-board radiation sensing apparatus |
JP6688917B1 (en) * | 2019-01-30 | 2020-04-28 | 浜松ホトニクス株式会社 | Optical module, signal processing system, and signal processing method |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63203917A (en) * | 1987-02-19 | 1988-08-23 | Shimadzu Corp | Magnetic flotation type rectilinear bearing |
EP0436752A1 (en) * | 1990-01-08 | 1991-07-17 | Advantest Corporation | Optical interference signal extractor |
JPH05231939A (en) * | 1992-02-21 | 1993-09-07 | Hitachi Ltd | Step scan fourier transferm infrared spectral apparatus |
JPH06174844A (en) * | 1992-12-04 | 1994-06-24 | Sharp Corp | Laser distance measuring apparatus |
DE19940981C1 (en) * | 1999-08-28 | 2001-07-12 | Bruker Optik Gmbh | Fourier transformation IR spectrometer uses vertical-cavity surface-emitting laser diode as reference radiation source for adjustment of movable mirror of interferometer |
US20040008742A1 (en) * | 2002-03-15 | 2004-01-15 | Chou Stephen Y. | Mode-locked laser using a mode-locking wavelength selective reflector |
JP2004220008A (en) * | 2002-12-26 | 2004-08-05 | Kyocera Corp | Volume type phase grating, its manufacturing method, optical module and semiconductor laser module using the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3542161A1 (en) * | 1985-11-28 | 1987-06-04 | Kayser Threde Gmbh | METHOD AND DEVICE FOR REDUCING THE DATA RATE IN FOURIERS SPECTROSCOPY |
JP2784468B2 (en) | 1988-07-15 | 1998-08-06 | 株式会社アドバンテスト | Optical interference signal extraction device |
JPH02238334A (en) | 1989-03-13 | 1990-09-20 | Sumitomo Electric Ind Ltd | Interference optical measuring apparatus wherein scale factor is stabilized |
JP2714754B2 (en) | 1994-03-02 | 1998-02-16 | 日本電信電話株式会社 | Waveguide dispersion measurement method and apparatus |
JPH0875434A (en) | 1994-09-05 | 1996-03-22 | Tokyo Seimitsu Co Ltd | Surface form measuring device |
JP3497927B2 (en) | 1995-07-13 | 2004-02-16 | 日本分光株式会社 | Interferogram integrator |
US7889348B2 (en) * | 2005-10-14 | 2011-02-15 | The General Hospital Corporation | Arrangements and methods for facilitating photoluminescence imaging |
JP5125544B2 (en) * | 2008-01-24 | 2013-01-23 | 日本電気株式会社 | Gas measuring device and gas measuring method |
US8120781B2 (en) * | 2008-11-26 | 2012-02-21 | Zygo Corporation | Interferometric systems and methods featuring spectral analysis of unevenly sampled data |
-
2010
- 2010-12-08 US US13/515,250 patent/US9025156B2/en active Active
- 2010-12-08 EP EP10837481.0A patent/EP2515092A4/en not_active Withdrawn
- 2010-12-08 WO PCT/JP2010/071983 patent/WO2011074452A1/en active Application Filing
- 2010-12-08 JP JP2011546070A patent/JPWO2011074452A1/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63203917A (en) * | 1987-02-19 | 1988-08-23 | Shimadzu Corp | Magnetic flotation type rectilinear bearing |
EP0436752A1 (en) * | 1990-01-08 | 1991-07-17 | Advantest Corporation | Optical interference signal extractor |
JPH05231939A (en) * | 1992-02-21 | 1993-09-07 | Hitachi Ltd | Step scan fourier transferm infrared spectral apparatus |
JPH06174844A (en) * | 1992-12-04 | 1994-06-24 | Sharp Corp | Laser distance measuring apparatus |
DE19940981C1 (en) * | 1999-08-28 | 2001-07-12 | Bruker Optik Gmbh | Fourier transformation IR spectrometer uses vertical-cavity surface-emitting laser diode as reference radiation source for adjustment of movable mirror of interferometer |
US20040008742A1 (en) * | 2002-03-15 | 2004-01-15 | Chou Stephen Y. | Mode-locked laser using a mode-locking wavelength selective reflector |
JP2004220008A (en) * | 2002-12-26 | 2004-08-05 | Kyocera Corp | Volume type phase grating, its manufacturing method, optical module and semiconductor laser module using the same |
Non-Patent Citations (1)
Title |
---|
See also references of WO2011074452A1 * |
Also Published As
Publication number | Publication date |
---|---|
US20120287439A1 (en) | 2012-11-15 |
EP2515092A1 (en) | 2012-10-24 |
WO2011074452A1 (en) | 2011-06-23 |
US9025156B2 (en) | 2015-05-05 |
JPWO2011074452A1 (en) | 2013-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20120611 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: HIRAO, YUSUKE |
|
DAX | Request for extension of the european patent (deleted) | ||
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G01J 3/45 20060101AFI20150417BHEP |
|
RA4 | Supplementary search report drawn up and despatched (corrected) |
Effective date: 20150812 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G01J 3/45 20060101AFI20150806BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20180829 |