EP2511912A3 - Diffraction grating for X-ray Talbot interferometer, method of manufacturing the same, and X-ray Talbot interferometer - Google Patents

Diffraction grating for X-ray Talbot interferometer, method of manufacturing the same, and X-ray Talbot interferometer Download PDF

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Publication number
EP2511912A3
EP2511912A3 EP12164092.4A EP12164092A EP2511912A3 EP 2511912 A3 EP2511912 A3 EP 2511912A3 EP 12164092 A EP12164092 A EP 12164092A EP 2511912 A3 EP2511912 A3 EP 2511912A3
Authority
EP
European Patent Office
Prior art keywords
talbot interferometer
ray talbot
diffraction grating
manufacturing
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12164092.4A
Other languages
German (de)
French (fr)
Other versions
EP2511912B1 (en
EP2511912A2 (en
Inventor
Yoshitomo Nakagawa
Yoshiharu Shirakawabe
Satoshi Nakayama
Atsushi Nagata
Takeshi Umemoto
Mayu Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
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Hitachi High Tech Science Corp
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Publication date
Application filed by Hitachi High Tech Science Corp filed Critical Hitachi High Tech Science Corp
Publication of EP2511912A2 publication Critical patent/EP2511912A2/en
Publication of EP2511912A3 publication Critical patent/EP2511912A3/en
Application granted granted Critical
Publication of EP2511912B1 publication Critical patent/EP2511912B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

Abstract

Provided are a diffraction grating for an X-ray Talbot interferometer, a method of manufacturing the same, and an X-ray Talbot interferometer, the method enabling easy and highly accurate manufacturing of a diffraction grating having grooves with a high aspect ratio. The diffraction grating for an X-ray Talbot interferometer includes a plurality of ridge-like X-ray absorbing portions (20b) formed on a substrate (22) along one direction at predetermined intervals through cutting of a metal film.
EP12164092.4A 2011-04-15 2012-04-13 Diffraction grating for X-ray Talbot interferometer, method of manufacturing the same, and X-ray Talbot interferometer Not-in-force EP2511912B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011090606A JP5714968B2 (en) 2011-04-15 2011-04-15 Diffraction grating for X-ray Talbot interferometer, manufacturing method thereof, and X-ray Talbot interferometer

Publications (3)

Publication Number Publication Date
EP2511912A2 EP2511912A2 (en) 2012-10-17
EP2511912A3 true EP2511912A3 (en) 2013-11-06
EP2511912B1 EP2511912B1 (en) 2016-07-13

Family

ID=46026653

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12164092.4A Not-in-force EP2511912B1 (en) 2011-04-15 2012-04-13 Diffraction grating for X-ray Talbot interferometer, method of manufacturing the same, and X-ray Talbot interferometer

Country Status (2)

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EP (1) EP2511912B1 (en)
JP (1) JP5714968B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105139913B (en) 2015-09-08 2017-10-13 清华大学 A kind of grating and radiation imaging apparatus
EP3454051A1 (en) * 2017-09-06 2019-03-13 Koninklijke Philips N.V. Diffraction grating for x-ray phase contrast and/or dark-field imaging

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050025423A1 (en) * 2003-06-30 2005-02-03 Masashi Hanaoka Grating forming method, molding die, molded product and manufacturing method for master member for manufacturing molding die
US20050286680A1 (en) * 2002-12-26 2005-12-29 Atsushi Momose X-ray imaging system and imaging method
US20110051889A1 (en) * 2009-08-26 2011-03-03 Canon Kabushiki Kaisha X-ray phase grating and method for producing the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4856043A (en) * 1988-07-18 1989-08-08 North American Philips Corporation Two piece ceramic Soller slit collimator for X-ray collimation
JP2004125874A (en) * 2002-09-30 2004-04-22 Sumitomo Heavy Ind Ltd Stamper and its manufacturing method and forming method using the stamper
JP4608679B2 (en) 2005-03-17 2011-01-12 財団法人新産業創造研究機構 Manufacturing method of phase type diffraction grating and amplitude type diffraction grating used in X-ray Talbot interferometer
JP2009042528A (en) 2007-08-09 2009-02-26 Hyogo Prefecture Method of manufacturing diffraction grating
JP2012225659A (en) * 2011-04-15 2012-11-15 Seiko Instruments Inc Diffraction grating for x-ray talbot interferometer, method for manufacturing the same, and x-ray talbot interferometer
JP5656726B2 (en) * 2011-04-15 2015-01-21 株式会社日立ハイテクサイエンス Method for manufacturing phase diffraction grating for X-ray Talbot interferometer
JP2012225966A (en) * 2011-04-15 2012-11-15 Seiko Instruments Inc Diffraction grating for x-ray talbot interferometer, method for manufacturing the same, and x-ray talbot interferometer
JP5695959B2 (en) * 2011-04-15 2015-04-08 株式会社日立ハイテクサイエンス Method for producing single crystal diamond cutting blade

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050286680A1 (en) * 2002-12-26 2005-12-29 Atsushi Momose X-ray imaging system and imaging method
US20050025423A1 (en) * 2003-06-30 2005-02-03 Masashi Hanaoka Grating forming method, molding die, molded product and manufacturing method for master member for manufacturing molding die
US20110051889A1 (en) * 2009-08-26 2011-03-03 Canon Kabushiki Kaisha X-ray phase grating and method for producing the same

Also Published As

Publication number Publication date
JP2012225658A (en) 2012-11-15
JP5714968B2 (en) 2015-05-07
EP2511912B1 (en) 2016-07-13
EP2511912A2 (en) 2012-10-17

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