EP2425468A4 - MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION - Google Patents

MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION

Info

Publication number
EP2425468A4
EP2425468A4 EP10770334.0A EP10770334A EP2425468A4 EP 2425468 A4 EP2425468 A4 EP 2425468A4 EP 10770334 A EP10770334 A EP 10770334A EP 2425468 A4 EP2425468 A4 EP 2425468A4
Authority
EP
European Patent Office
Prior art keywords
cmos structure
mass sensing
fbar
monolithic
monolithic fbar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10770334.0A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2425468A1 (en
Inventor
Matthew Johnston
Kenneth Shepard
Ioannis Kymissis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Columbia University in the City of New York
Original Assignee
Columbia University in the City of New York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Columbia University in the City of New York filed Critical Columbia University in the City of New York
Publication of EP2425468A1 publication Critical patent/EP2425468A1/en
Publication of EP2425468A4 publication Critical patent/EP2425468A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H03H9/0557—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the other elements being buried in the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
EP10770334.0A 2009-04-29 2010-04-29 MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION Withdrawn EP2425468A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17386609P 2009-04-29 2009-04-29
US21561109P 2009-05-07 2009-05-07
PCT/US2010/032976 WO2010127122A1 (en) 2009-04-29 2010-04-29 Monolithic fbar-cmos structure such as for mass sensing

Publications (2)

Publication Number Publication Date
EP2425468A1 EP2425468A1 (en) 2012-03-07
EP2425468A4 true EP2425468A4 (en) 2014-05-21

Family

ID=43032556

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10770334.0A Withdrawn EP2425468A4 (en) 2009-04-29 2010-04-29 MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION

Country Status (4)

Country Link
EP (1) EP2425468A4 (zh)
CN (1) CN102414855B (zh)
CA (1) CA2760508A1 (zh)
WO (1) WO2010127122A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9255912B2 (en) 2009-04-29 2016-02-09 The Trustees Of Columbia University In The City Of New York Monolithic FBAR-CMOS structure such as for mass sensing
WO2014062936A1 (en) 2012-10-17 2014-04-24 The Trustees Of Columbia University In The City Of New York Cmos-integrated jfet for dense low-noise bioelectronic platforms
WO2014210307A1 (en) 2013-06-26 2014-12-31 Edrees Hassan Co-integrated bulk acoustic wave resonators
CN105866815B (zh) * 2016-05-06 2018-12-28 中国工程物理研究院电子工程研究所 一种柔性结构的fbar伽马辐照传感器
EP3497439B1 (en) * 2016-08-11 2023-12-20 Qorvo US, Inc. Acoustic resonator device with controlled placement of functionalization material
GB2554400A (en) 2016-09-26 2018-04-04 Univ Warwick Bulk acoustic wave resonator based sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030199105A1 (en) * 2002-04-22 2003-10-23 Kub Francis J. Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
US20060125489A1 (en) * 2002-07-19 2006-06-15 Hans-Dieter Feucht Device and method for detecting a substance
US20060202779A1 (en) * 2005-03-14 2006-09-14 Fazzio R S Monolithic vertical integration of an acoustic resonator and electronic circuitry

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2271179A1 (en) * 1999-05-05 2000-11-05 Sensorchem International Corporation Process for monitoring and detecting small molecule - biomolecule interactions
KR100865652B1 (ko) * 2001-05-11 2008-10-29 우베 고산 가부시키가이샤 압전 박막 공진자
JP3939939B2 (ja) * 2001-07-17 2007-07-04 富士通株式会社 圧電薄膜共振素子の製造方法
JP3949990B2 (ja) * 2002-03-29 2007-07-25 株式会社東芝 電圧制御発振器
EP1682880A1 (en) * 2003-10-08 2006-07-26 Philips Intellectual Property & Standards GmbH Bulk acoustic wave sensor
DE602004000851T2 (de) * 2003-10-30 2007-05-16 Avago Technologies General Ip (Singapore) Pte. Ltd. Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten
US7323805B2 (en) * 2004-01-28 2008-01-29 Kabushiki Kaisha Toshiba Piezoelectric thin film device and method for manufacturing the same
US7138889B2 (en) * 2005-03-22 2006-11-21 Triquint Semiconductor, Inc. Single-port multi-resonator acoustic resonator device
EP1959568A1 (en) * 2007-02-19 2008-08-20 Consejo Superior de Investigaciones Cientificas Thin-film bulk acoustic ware resonator and method for performing heterogeneous integration of the same with complementary-metal-oxide-semiconductor integrated circuit
CN101246162A (zh) * 2008-03-12 2008-08-20 浙江大学 利用压电薄膜体声波器件的抗体检测生物芯片

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030199105A1 (en) * 2002-04-22 2003-10-23 Kub Francis J. Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
US20060125489A1 (en) * 2002-07-19 2006-06-15 Hans-Dieter Feucht Device and method for detecting a substance
US20060202779A1 (en) * 2005-03-14 2006-09-14 Fazzio R S Monolithic vertical integration of an acoustic resonator and electronic circuitry

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BREDERLOW R ET AL: "Biochemical sensors based on bulk acoustic wave resonators", INTERNATIONAL ELECTRON DEVICES MEETING 2003. IEDM. TECHNICAL DIGEST. WASHINGTON, DC, DEC 8 - 10, 2003; [INTERNATIONAL ELECTRON DEVICES MEETING], NEW YORK, NY : IEEE, US, 8 December 2003 (2003-12-08), pages 992 - 994, XP010684243, ISBN: 978-0-7803-7872-8 *
See also references of WO2010127122A1 *

Also Published As

Publication number Publication date
CN102414855B (zh) 2015-02-11
CN102414855A (zh) 2012-04-11
EP2425468A1 (en) 2012-03-07
WO2010127122A1 (en) 2010-11-04
CA2760508A1 (en) 2010-11-04

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