EP2359177A4 - Digital micro-mirror device - Google Patents
Digital micro-mirror deviceInfo
- Publication number
- EP2359177A4 EP2359177A4 EP08878822A EP08878822A EP2359177A4 EP 2359177 A4 EP2359177 A4 EP 2359177A4 EP 08878822 A EP08878822 A EP 08878822A EP 08878822 A EP08878822 A EP 08878822A EP 2359177 A4 EP2359177 A4 EP 2359177A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- mirror device
- digital micro
- micro
- digital
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/28—Reflectors in projection beam
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/AU2008/001849 WO2010068962A1 (en) | 2008-12-17 | 2008-12-17 | Digital micro-mirror device |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2359177A1 EP2359177A1 (en) | 2011-08-24 |
EP2359177A4 true EP2359177A4 (en) | 2012-06-06 |
Family
ID=42268154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08878822A Withdrawn EP2359177A4 (en) | 2008-12-17 | 2008-12-17 | Digital micro-mirror device |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP2359177A4 (en) |
JP (1) | JP2012511163A (en) |
KR (1) | KR20110070925A (en) |
CN (1) | CN102239436A (en) |
AU (1) | AU2008365366B2 (en) |
CA (1) | CA2742310A1 (en) |
WO (1) | WO2010068962A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011104843B4 (en) * | 2011-05-05 | 2013-02-07 | Technische Universität Darmstadt | Micromirror component with linear bending spring and method for its production |
CN102608875A (en) * | 2012-03-27 | 2012-07-25 | 深圳市华星光电技术有限公司 | Glass substrate carved number repairing method and glass substrate carved number repairing device based on repairing cabinet |
CN103543526B (en) * | 2013-09-29 | 2016-04-13 | 华中科技大学 | A kind of array laser scanner |
JP6492893B2 (en) * | 2015-04-01 | 2019-04-03 | セイコーエプソン株式会社 | Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus |
CN109991730B (en) * | 2019-03-12 | 2021-06-15 | 上海集成电路研发中心有限公司 | Micro-mirror structure |
CN112711163A (en) * | 2019-10-25 | 2021-04-27 | 台达电子工业股份有限公司 | Projection device |
CN111338076B (en) * | 2020-03-31 | 2022-06-14 | 吉林省广播电视研究所(吉林省广播电视局科技信息中心) | Micro-electro-mechanical deep imaging integrated circuit and imaging method |
CN114660880A (en) * | 2022-04-11 | 2022-06-24 | 长沙沃默科技有限公司 | Reflective projection imaging device and design method thereof |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5382961A (en) * | 1992-10-15 | 1995-01-17 | Texas Instruments Incorporated | Bistable DMD addressing method |
US6198180B1 (en) * | 1999-06-30 | 2001-03-06 | Sandia Corporation | Micromechanisms with floating pivot |
US6735008B2 (en) * | 2000-07-31 | 2004-05-11 | Corning Incorporated | MEMS mirror and method of fabrication |
US20060044519A1 (en) * | 2004-08-25 | 2006-03-02 | Andrew Huibers | Micromirrors and hinge structures for micromirror arrays in projection displays |
US20070114883A1 (en) * | 2005-11-23 | 2007-05-24 | Dongmin Chen | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
US20070206266A1 (en) * | 2006-03-01 | 2007-09-06 | Vlad Novotny | Micro mirrors with piezoelectric release mechanism |
JP2007256557A (en) * | 2006-03-23 | 2007-10-04 | Sumitomo Precision Prod Co Ltd | Mems actuator and scanner |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
GB0323903D0 (en) * | 2003-10-11 | 2003-11-12 | Koninkl Philips Electronics Nv | Elastomeric stamp,patterning method using such a stamp and method for producing such a stamp |
JP4247254B2 (en) * | 2006-08-08 | 2009-04-02 | マイクロプレシジョン株式会社 | Electromagnetic drive type optical deflection element |
US7488082B2 (en) * | 2006-12-12 | 2009-02-10 | Angstrom, Inc. | Discretely controlled micromirror array device with segmented electrodes |
-
2008
- 2008-12-17 EP EP08878822A patent/EP2359177A4/en not_active Withdrawn
- 2008-12-17 WO PCT/AU2008/001849 patent/WO2010068962A1/en active Application Filing
- 2008-12-17 AU AU2008365366A patent/AU2008365366B2/en not_active Expired - Fee Related
- 2008-12-17 CN CN2008801321924A patent/CN102239436A/en active Pending
- 2008-12-17 CA CA2742310A patent/CA2742310A1/en not_active Abandoned
- 2008-12-17 JP JP2011538793A patent/JP2012511163A/en active Pending
- 2008-12-17 KR KR1020117011188A patent/KR20110070925A/en not_active Application Discontinuation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5382961A (en) * | 1992-10-15 | 1995-01-17 | Texas Instruments Incorporated | Bistable DMD addressing method |
US6198180B1 (en) * | 1999-06-30 | 2001-03-06 | Sandia Corporation | Micromechanisms with floating pivot |
US6735008B2 (en) * | 2000-07-31 | 2004-05-11 | Corning Incorporated | MEMS mirror and method of fabrication |
US20060044519A1 (en) * | 2004-08-25 | 2006-03-02 | Andrew Huibers | Micromirrors and hinge structures for micromirror arrays in projection displays |
US20070114883A1 (en) * | 2005-11-23 | 2007-05-24 | Dongmin Chen | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
US20070206266A1 (en) * | 2006-03-01 | 2007-09-06 | Vlad Novotny | Micro mirrors with piezoelectric release mechanism |
JP2007256557A (en) * | 2006-03-23 | 2007-10-04 | Sumitomo Precision Prod Co Ltd | Mems actuator and scanner |
Non-Patent Citations (1)
Title |
---|
See also references of WO2010068962A1 * |
Also Published As
Publication number | Publication date |
---|---|
KR20110070925A (en) | 2011-06-24 |
AU2008365366B2 (en) | 2012-04-19 |
WO2010068962A1 (en) | 2010-06-24 |
CA2742310A1 (en) | 2010-06-24 |
CN102239436A (en) | 2011-11-09 |
AU2008365366A1 (en) | 2010-06-24 |
JP2012511163A (en) | 2012-05-17 |
EP2359177A1 (en) | 2011-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20110511 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20120509 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: B81B 7/04 20060101ALI20120503BHEP Ipc: G03B 21/28 20060101ALI20120503BHEP Ipc: G02B 26/08 20060101AFI20120503BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20121211 |