EP2353781A3 - Werkzeug zum Glätten oder Polieren optischer Oberflächen - Google Patents

Werkzeug zum Glätten oder Polieren optischer Oberflächen Download PDF

Info

Publication number
EP2353781A3
EP2353781A3 EP11152330A EP11152330A EP2353781A3 EP 2353781 A3 EP2353781 A3 EP 2353781A3 EP 11152330 A EP11152330 A EP 11152330A EP 11152330 A EP11152330 A EP 11152330A EP 2353781 A3 EP2353781 A3 EP 2353781A3
Authority
EP
European Patent Office
Prior art keywords
tool
body part
optical surface
pistons
pads
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11152330A
Other languages
English (en)
French (fr)
Other versions
EP2353781A2 (de
Inventor
Colin Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qioptiq Ltd
Original Assignee
Qioptiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qioptiq Ltd filed Critical Qioptiq Ltd
Publication of EP2353781A2 publication Critical patent/EP2353781A2/de
Publication of EP2353781A3 publication Critical patent/EP2353781A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/0018—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor for plane optical surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
    • B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
EP11152330A 2010-02-08 2011-01-27 Werkzeug zum Glätten oder Polieren optischer Oberflächen Withdrawn EP2353781A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1002017A GB2477557A (en) 2010-02-08 2010-02-08 Aspheric optical surface polishing tool with individually movable polishing pads

Publications (2)

Publication Number Publication Date
EP2353781A2 EP2353781A2 (de) 2011-08-10
EP2353781A3 true EP2353781A3 (de) 2012-12-26

Family

ID=42082638

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11152330A Withdrawn EP2353781A3 (de) 2010-02-08 2011-01-27 Werkzeug zum Glätten oder Polieren optischer Oberflächen

Country Status (3)

Country Link
US (1) US20110195645A1 (de)
EP (1) EP2353781A3 (de)
GB (1) GB2477557A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581743B (zh) * 2012-02-21 2014-06-11 宁波大学 一种非球面光学零件的研抛方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013035709A1 (en) * 2011-09-05 2013-03-14 Canon Kabushiki Kaisha Processing apparatus and optical member manufacturing method
CN103231320B (zh) * 2013-04-16 2015-03-11 北京理工大学 一种用于曲面加工的多点支撑面型可调自锁式抛光盘
DE102014109654B4 (de) 2014-07-10 2022-05-12 Carl Zeiss Jena Gmbh Vorrichtungen zum Bearbeiten von optischen Werkstücken
CN105150051A (zh) * 2015-07-28 2015-12-16 中国科学院长春光学精密机械与物理研究所 一种内联式多气缸自适应抛光磨头
CN105364641B (zh) * 2015-11-19 2017-07-28 浙江工业大学 微半环凹模阵列式研抛方法及装置
CN109202709A (zh) * 2018-11-21 2019-01-15 中国科学院光电技术研究所 一种气压控制恒定压力自适应抛光磨头
CN110202424B (zh) * 2019-06-27 2020-04-17 山东大学 一种贯通式微透镜阵列工件的仿形抛光方法
CN111633509B (zh) * 2020-06-04 2022-04-05 深圳市国林光学有限公司 虚拟现实用镜片抛光设备
CN111993215B (zh) * 2020-08-18 2022-06-14 中国科学院光电技术研究所 一种用于大口径光学元件加工的可变形柔性抛光工具
CN112454034A (zh) * 2020-11-24 2021-03-09 黄金仙 一种轴承生产加工用轴承圈生产装置
CN112571203A (zh) * 2020-12-07 2021-03-30 中国科学院长春光学精密机械与物理研究所 一种可变形研抛盘
CN114603430B (zh) * 2022-05-10 2022-08-19 中国科学院光电技术研究所 一种深型轴棱锥光学元件表面碎带误差抑制方法
CN116922243B (zh) * 2023-09-19 2023-11-28 苏州中砥半导体材料有限公司 一种基于磷化铟单晶的制备系统及制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09323249A (ja) * 1996-06-04 1997-12-16 Nikon Corp 研磨工具
JPH10286777A (ja) * 1997-04-09 1998-10-27 Nikon Corp 研磨工具皿
WO2001056740A1 (de) * 2000-02-03 2001-08-09 Carl Zeiss Polierkopf für eine poliermaschine

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3430499C2 (de) * 1984-08-18 1986-08-14 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Einrichtung zum Läppen oder Polieren von optischen Werkstücken
DE3643914A1 (de) * 1986-12-22 1988-06-30 Zeiss Carl Fa Verfahren und vorrichtung zum laeppen bzw. polieren optischer flaechen
JPS63232957A (ja) * 1987-03-19 1988-09-28 Canon Inc 曲面研摩機
US4918869A (en) * 1987-10-28 1990-04-24 Fujikoshi Machinery Corporation Method for lapping a wafer material and an apparatus therefor
US5230184A (en) * 1991-07-05 1993-07-27 Motorola, Inc. Distributed polishing head
US6296550B1 (en) * 1998-11-16 2001-10-02 Chartered Semiconductor Manufacturing Ltd. Scalable multi-pad design for improved CMP process

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09323249A (ja) * 1996-06-04 1997-12-16 Nikon Corp 研磨工具
JPH10286777A (ja) * 1997-04-09 1998-10-27 Nikon Corp 研磨工具皿
WO2001056740A1 (de) * 2000-02-03 2001-08-09 Carl Zeiss Polierkopf für eine poliermaschine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581743B (zh) * 2012-02-21 2014-06-11 宁波大学 一种非球面光学零件的研抛方法

Also Published As

Publication number Publication date
EP2353781A2 (de) 2011-08-10
GB201002017D0 (en) 2010-03-24
GB2477557A (en) 2011-08-10
US20110195645A1 (en) 2011-08-11

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