EP2330299A4 - Vacuum evacuation device - Google Patents

Vacuum evacuation device

Info

Publication number
EP2330299A4
EP2330299A4 EP09812899.4A EP09812899A EP2330299A4 EP 2330299 A4 EP2330299 A4 EP 2330299A4 EP 09812899 A EP09812899 A EP 09812899A EP 2330299 A4 EP2330299 A4 EP 2330299A4
Authority
EP
European Patent Office
Prior art keywords
evacuation device
vacuum evacuation
vacuum
evacuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09812899.4A
Other languages
German (de)
French (fr)
Other versions
EP2330299A1 (en
Inventor
Kouji Shibayama
Toshio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of EP2330299A1 publication Critical patent/EP2330299A1/en
Publication of EP2330299A4 publication Critical patent/EP2330299A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
EP09812899.4A 2008-09-10 2009-09-10 Vacuum evacuation device Withdrawn EP2330299A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008232324 2008-09-10
PCT/JP2009/004496 WO2010029750A1 (en) 2008-09-10 2009-09-10 Vacuum evacuation device

Publications (2)

Publication Number Publication Date
EP2330299A1 EP2330299A1 (en) 2011-06-08
EP2330299A4 true EP2330299A4 (en) 2016-06-15

Family

ID=42005014

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09812899.4A Withdrawn EP2330299A4 (en) 2008-09-10 2009-09-10 Vacuum evacuation device

Country Status (7)

Country Link
US (1) US20110164992A1 (en)
EP (1) EP2330299A4 (en)
JP (1) JPWO2010029750A1 (en)
KR (1) KR101193479B1 (en)
CN (1) CN102124225A (en)
TW (1) TWI467092B (en)
WO (1) WO2010029750A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101995358B1 (en) * 2012-06-28 2019-07-02 스털링 인더스트리 컨설트 게엠베하 Method and pump arrangement for evacuating a chamber
GB2508396B (en) * 2012-11-30 2015-10-07 Edwards Ltd Improvements in and relating to vacuum conduits
GB2510829B (en) * 2013-02-13 2015-09-02 Edwards Ltd Pumping system
DE102013108090A1 (en) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. pump assembly
DE202014005279U1 (en) 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vacuum system
CA2953455C (en) 2014-06-27 2022-03-29 Ateliers Busch Sa Method of pumping in a system of vacuum pumps and system of vacuum pumps
KR20210102478A (en) * 2014-09-26 2021-08-19 아뜰리에 부쉬 에스.아. Vacuum-generating pumping system and pumping method using this pumping system
RU2674297C2 (en) * 2014-10-02 2018-12-06 Ателье Буш Са Pumping-out system for creating vacuum and pumping-out method therewith
JP2018178846A (en) * 2017-04-12 2018-11-15 株式会社荏原製作所 Device and method for controlling operation of vacuum pump device
CN108533494B (en) * 2018-06-19 2024-02-20 浙江维朋制冷设备有限公司 Vacuum pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
WO2006082366A1 (en) * 2005-02-02 2006-08-10 Edwards Limited Method of operating a pumping system
JP2007231935A (en) * 2006-01-31 2007-09-13 Ebara Densan Ltd Vacuum pump unit
EP1906022A1 (en) * 2006-09-29 2008-04-02 Anest Iwata Corporation Evacuation apparatus

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3922110A (en) * 1974-01-28 1975-11-25 Henry Huse Multi-stage vacuum pump
FR2652390B1 (en) * 1989-09-27 1991-11-29 Cit Alcatel VACUUM PUMP GROUP.
US5431545A (en) * 1993-12-02 1995-07-11 Praxair Technology, Inc. Pumper system for in-situ pigging applications
JP3763193B2 (en) * 1997-09-22 2006-04-05 アイシン精機株式会社 Multistage vacuum pump
JP2000329084A (en) * 1999-05-18 2000-11-28 Ebara Corp Displacement type compressor
JP2001207984A (en) * 1999-11-17 2001-08-03 Teijin Seiki Co Ltd Evacuation device
JP2002174175A (en) 2000-12-05 2002-06-21 Teijin Seiki Co Ltd Evacuator
FR2822200B1 (en) * 2001-03-19 2003-09-26 Cit Alcatel PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES
JP3906973B2 (en) * 2001-10-30 2007-04-18 株式会社アルバック Vacuum exhaust device
JP3992176B2 (en) * 2001-10-26 2007-10-17 株式会社アルバック Vacuum exhaust method and vacuum exhaust device
JP3982673B2 (en) * 2001-10-31 2007-09-26 株式会社アルバック Operation method of vacuum exhaust system
JP4443080B2 (en) 2001-09-21 2010-03-31 新明和工業株式会社 Vacuum exhaust system and operation method thereof
JP2006322405A (en) 2005-05-19 2006-11-30 Denso Corp Evacuation system
JP4718302B2 (en) 2005-11-04 2011-07-06 株式会社アルバック Vacuum exhaust device
KR101303173B1 (en) * 2006-01-31 2013-09-09 가부시키가이샤 에바라 세이사꾸쇼 Vacuum pump unit
JP2008232324A (en) 2007-03-22 2008-10-02 Ntn Corp Automatic alignment roller bearing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
WO2006082366A1 (en) * 2005-02-02 2006-08-10 Edwards Limited Method of operating a pumping system
JP2007231935A (en) * 2006-01-31 2007-09-13 Ebara Densan Ltd Vacuum pump unit
EP1906022A1 (en) * 2006-09-29 2008-04-02 Anest Iwata Corporation Evacuation apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2010029750A1 *

Also Published As

Publication number Publication date
TW201018790A (en) 2010-05-16
KR20110040980A (en) 2011-04-20
US20110164992A1 (en) 2011-07-07
CN102124225A (en) 2011-07-13
KR101193479B1 (en) 2012-10-22
WO2010029750A1 (en) 2010-03-18
JPWO2010029750A1 (en) 2012-02-02
EP2330299A1 (en) 2011-06-08
TWI467092B (en) 2015-01-01

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20110411

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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA RS

DAX Request for extension of the european patent (deleted)
RA4 Supplementary search report drawn up and despatched (corrected)

Effective date: 20160513

RIC1 Information provided on ipc code assigned before grant

Ipc: F04B 41/06 20060101ALI20160509BHEP

Ipc: F04C 23/00 20060101ALI20160509BHEP

Ipc: F04C 25/02 20060101ALI20160509BHEP

Ipc: F04B 37/14 20060101AFI20160509BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20161213