EP2300790B1 - Méthode et dispositif de test in situ de capteurs et d'amplificateurs - Google Patents

Méthode et dispositif de test in situ de capteurs et d'amplificateurs Download PDF

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Publication number
EP2300790B1
EP2300790B1 EP09746242.8A EP09746242A EP2300790B1 EP 2300790 B1 EP2300790 B1 EP 2300790B1 EP 09746242 A EP09746242 A EP 09746242A EP 2300790 B1 EP2300790 B1 EP 2300790B1
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EP
European Patent Office
Prior art keywords
test
signal
preamplifier
transducer
decoded
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Application number
EP09746242.8A
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German (de)
English (en)
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EP2300790A1 (fr
Inventor
Morten Kirkelund
Lars Munch Kofoed
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Hottinger Bruel and Kjaer AS
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Bruel and Kjaer Sound and Vibration Measurement AS
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/005—Testing or calibrating of detectors covered by the subgroups of G01H3/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2829—Testing of circuits in sensor or actuator systems
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements

Definitions

  • the present invention relates to apparatus and methods for in situ test of sensors and related amplifiers and in particular for test of reactive sensors and amplifiers for said sensors, a sensor and an amplifier constituting a transducer.
  • Sensors and transducers are widely used in systems for data acquisition where physical properties are subject to be measured, gathered or analyzed. Measurements and gatherings of properties can be used for immediate use or for statistical purpose and analysis and can even further be used for monitoring or evaluation purposes.
  • a sensor is hereby understood to be the sensing element and a transducer is often referred to as the sensing element together with means for conditioning and transmitting the sensed signal in a usable manner like a preamplifier circuit, and in the present context this is the meaning of the term transducer.
  • Sensors in this kind of areas can be based on several different elements and principles such as piezo-electric, piezo-resistive, capacitive or magneto restrictive.
  • WO 86/04137 there is disclosed a system comprising a primary and a secondary transducer which are built together.
  • the secondary piezo-electric transducer can be energized by an introduced electrical signal and generates hereby a mechanical excitation to be picked up by the primary piezo-electric transducer.
  • the difference signal is the signal measured and in case of no signal or faulty signal, the transducer is susceptible..
  • This system will need considerably more special hardware and twice the cabling of a conventional circuit.
  • US 6698269 discloses a system for test of transducers by means of a built-in test signal generator connected to the sensor-amplifier connection point for test and disconnecting the amplifier for analysis of the transducer. This system is based on the idea of exiting the sensor element by means of a generator generating a suitable electrical signal. The preamplifier in situ is not under test, and implementation and control of the system is an issue that remains to be solved.
  • US 5400297 discloses a method and a system for injection of a test signal through a relatively small capacitor into the junction point of the inlet of a preamplifier for acoustic devices and a sensor.
  • the system which primarily is designed for capacitive voltage sensors, though adaptable for charge type sensors, requires a separate connection point with very high quality cabling in addition to the normal signal cabling.
  • the object of the present invention provides an apparatus and a method for testing and characterising complete sensor-, transducer- and amplifier systems, which apparatus and method solve the problems and issues of prior art, and at the same time offer a hitherto unseen detailed characterisation of the sensor and associated circuits without the associated extra accessories, cabling and equipment of prior art.
  • the invention provides apparatus and methods for remote test of transducer arrays from a central control unit.
  • the present invention is far more simple and universal in use due to much higher integration of the transducer itself.
  • the principle in general of the present invention relies on test of the impedance of the sensing element in a transducer by means of the amplifier circuitry for the sensing elements conditioning.
  • the mode control controls a switch which determines whether or not the test signal is routed to the input of the preamplifier for test of the complete transducer and associated circuitry.
  • Examples of applicable sensors can be but are not limited to capacitive, magneto-restrictive, inductive and piezo-electric sensors and preamplifiers of two-wire or three or more wire types in charge or voltage input mode. A structure in schematic form and some representative embodiments will be described in detail in the following.
  • the sensor PE1 is of a piezo-electric type characterised by its charge sensitivity Q and Zpe1.
  • the transducer is operated in charge mode, which is well known to a man skilled in the art.
  • the sensor PE1 is coupled to the inverting input of an operational amplifier U1 with feedback capacitor C1.
  • a biasing voltage VREF1 is through R3 fed to the non-inverting input of the amplifier U1. This as such constitutes a basic charge coupled transducer. It is well known in this field, that power supply to the amplifier can be a constant current originating from the current generator circuit Is.
  • the present embodiment is characterised as a two-wire charge constant current line drive type of transducer with a piezo-electric accelerometer as the sensing element also shown in the structure diagram in fig. 3 as item 1.
  • the current Is flowing into OUT on U1 supplying power to U1 and the residual current is running through a current measuring circuit R and derived as a proportional voltage on terminal CM.
  • a current signal Ig is supplied from a generator and superposed the supply current Is, said current measuring circuit R derives this as a superposed voltage on terminal CM.
  • Switch2 connects the coupling capacitor C2 to ground GND, the transducer operates in normal mode.
  • the voltage derived from the superposed Is and Ig is connected through coupling capacitor C2 to the non-inverting input of the amplifier U1. Since the coupling capacitor C2 will filter off direct current components, only alternating current signals will reach the non-inverting input on the amplifier U1.
  • Detection is based either on a 1-channel analyzer, which analyses the transducer response, or a 2-channel analyzer, where the transfer function between the test signal and the transducer response is calculated.
  • the advantage using a 2-channel analysis is better signal to noise ratio, phase information and rejection of vibration signals.
  • FIG. 2 shows one sample transducer and the additional circuitry necessary in order to describe this embodiment of the invention.
  • the sensor MIC is a condenser microphone characterised by its voltage sensitivity Vm and the impedance Zm.
  • the transducer is operated in voltage mode, which is well known to a man skilled in the art.
  • the microphone is coupled to the non-inverting input of an operational amplifier U22 in unity gain mode characterised by feedback impedance Z11.
  • a biasing voltage VREF7 is through R12 fed to the non-inverting input of the amplifier U22.
  • Supply power to the preamplifier in this embodiment is fed to a power supply pin pw on U22.
  • Amplifier U22 is operated as a current line drive amplifier where the signals from sensor MIC is amplified by the amplifier U22 and is present on the output as current
  • fig 2 is also shown R4 connected between CM on U22 and ground, and Cg1 that through Switch2 can be connected to either the output terminal OUT on U22 or terminal CM on U22. Since the amplifier U22 operates in current line drive mode, a current Ig1 can be superposed the signal current in the output terminal. Terminal CM on the amplifier constitutes an output through a current measuring circuit R4 deriving a voltage in proportion to the current in the output terminal.
  • the shown capacitor Cg1 constitutes a physical capacitor in the microphone construction acting as input capacitance compensation, and referred to as guard capacitor.
  • the transfer function is dependent on Zm.
  • microphone impedance capacance and resonance
  • total amplification low frequency cut-off and cable impedance
  • Detection is based on either a 1-channel analyzer, which analyses the transducer response, or a 2-channel analyzer, where the transfer function between the test signal and the transducer response is calculated.
  • the advantage of using a 2-channel analysis is better signal to noise ratio, phase information and rejection of acoustic signals.
  • the present invention since the present invention relies on a change of the switch Switch2 between normal operation and test mode, and it is claimed to be achieved without additional wiring, the present invention - in addition to conditioning amplifiers and switching circuitry according to the description - comprises a mode control system for decoding of a control signal to be superposed on the output line.
  • a current generator Ic is shown. This current generator Ic is controlled from the test generator circuit and dependent on timing of the change in currents from Ic, a decoding circuit in the preamplifier GNDSC will signal Switch2 to change between normal operation and test mode.
  • FIG. 4 is a schematic diagram outlining the functional elements of the invention and their interconnections.
  • the Sensor 1 is connected to the Conditioning preamplifier 2.
  • the amplifier 2 is connected to the Line Drive 3 and the cabling to the remote measuring equipment Frontend/Analyzer 8.
  • a Current Generator 7 can be connected to the output of the Line Drive 3, where a Current measuring circuit 5 monitors the current in the output of the Line Drive 3.
  • the injected current from the Current Generator 7 is derived in a test signal wired to the Test signal Switch 4 and a test control signal wired to Mode Control 6 which in turn controls the Test signal Switch 4 injecting the derived signal into Conditioning preamplifier 2.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Amplifiers (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Claims (10)

  1. Procédé d'essai d'un transducteur comprenant un élément de détection (1, 2 ; 25, 26) et un préamplificateur de conditionnement associé comprenant un amplificateur opérationnel (9, 36) par introduction d'un signal d'essai (Ig ; Ig1) dans l'entrée dudit préamplificateur, caractérisé en ce que ledit signal d'essai (Ig ; Ig1) est concomitant avec un signal de commande (Ic ; Ic1) qui est superposé sur la même borne du transducteur et constitue une signalisation d'essai, et ledit signal de commande est décodé dans un circuit de décodage GNDSC (6, 29) dans ledit préamplificateur et permet l'acheminement dudit signal d'essai (Ig ; Ig1) dans ladite entrée dudit amplificateur opérationnel (9, 36) via un condensateur (C2, Cg1) filtrant le courant continu, si bien que les propriétés électriques dudit transducteur peuvent être analysées en détail d'un emplacement distant.
  2. Procédé d'essai d'un transducteur selon la revendication 1, caractérisé en ce que ledit signal d'essai (Ig ; Ig1) est introduit à travers la borne de sortie dudit transducteur et superposé à celle-ci.
  3. Procédé d'essai d'un transducteur selon les revendications 1 et 2, caractérisé en ce que ledit signal d'essai (Ig ; Ig1) est introduit à distance depuis un générateur central (17 ; 41).
  4. Procédé d'essai d'un transducteur selon les revendications 1 à 3, caractérisé en ce que ledit signal d'essai (Ig ; Ig1) est décodé et ledit signal d'essai est acheminé à la borne d'entrée dudit préamplificateur sur la base des signaux de commande décodés.
  5. Procédé d'essai d'un transducteur selon les revendications 1 à 4, caractérisé en ce que ledit signal d'essai (Ig ; Ig1) est acheminé à l'entrée non inversante dudit amplificateur opérationnel (9, 36).
  6. Appareil comprenant un capteur (1, 2 ; 25, 26) et un préamplificateur de conditionnement d'adaptation comprenant un amplificateur opérationnel (9, 36), caractérisé en ce que ledit préamplificateur de conditionnement comprend un circuit de décodage GNDSC (6, 29) pour être à même de manière autonome d'accepter et de décoder un signal de commande (Ic ; Ic1) et une signalisation d'essai comprenant des signaux d'essai (Ig ; Ig1) et des séquences de signalisation d'essai, d'acheminer les signaux d'essai décodés (Ig ; Ig1) dans une borne d'entrée dudit amplificateur opérationnel (9, 36) dans le préamplificateur de conditionnement via un condensateur (C2, Cg1) filtrant le courant continu conformément aux séquences de signalisation d'essai décodées.
  7. Appareil selon la revendication 6, caractérisé en ce que la source d'énergie pour ledit préamplificateur est une source de courant constant Is (16) et le signal de sortie dudit préamplificateur est superposé à ladite source d'énergie à courant constant.
  8. Appareil selon la revendication 6, caractérisé en ce que la source d'énergie pour ledit préamplificateur est une source de tension constante PW (35) et ledit signal de sortie est câblé séparément de ladite source d'énergie à courant constant.
  9. Appareil selon les revendications 6 à 8, caractérisé en ce que ladite signalisation d'essai comprenant le signal d'essai et le signal de séquence d'essai peut provenir d'un générateur d'essai central distant (17, 41).
  10. Appareil selon les revendications 6 à 9, caractérisé en ce que ledit signal d'essai distant et ledit signal de séquence d'essai distant provenant dudit système d'essai central distant sont superposés sur ledit signal de sortie.
EP09746242.8A 2008-05-13 2009-05-12 Méthode et dispositif de test in situ de capteurs et d'amplificateurs Active EP2300790B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/119,731 US7936175B2 (en) 2008-05-13 2008-05-13 Full function test for in situ test of sensors and amplifiers
PCT/IB2009/051939 WO2009138947A1 (fr) 2008-05-13 2009-05-12 Test de fonctionnement complet pour test in situ de capteurs et d'amplificateurs

Publications (2)

Publication Number Publication Date
EP2300790A1 EP2300790A1 (fr) 2011-03-30
EP2300790B1 true EP2300790B1 (fr) 2014-07-02

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US (1) US7936175B2 (fr)
EP (1) EP2300790B1 (fr)
JP (1) JP5135471B2 (fr)
CN (1) CN102027339B (fr)
DK (1) DK2300790T3 (fr)
WO (1) WO2009138947A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2671290C1 (ru) * 2017-11-20 2018-10-30 ООО "ГлобалТест" Пьезоэлектрический преобразователь
EP3450929A1 (fr) 2017-08-30 2019-03-06 G.R.A.S. Sound & Vibration A/S Système d'un analyseur de signal et de capteurs à génération de signal d'essai

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201122294D0 (en) * 2011-12-23 2012-02-01 Televic Rail Nv Signal test circuit and method
RU2493543C2 (ru) * 2011-12-27 2013-09-20 Открытое акционерное общество "Корпорация космических систем специального назначения "Комета" Способ измерения параметров гидроакустического пьезоэлектрического преобразователя и устройство для его осуществления
US8711517B2 (en) 2012-04-27 2014-04-29 Seagate Technology Llc Two dimensional magnetic sensor immune to skew angle misalignment
FR2997495B1 (fr) 2012-10-30 2015-07-24 Eurocopter France Procede de surveillance de capteurs vibratoires
US9147431B2 (en) 2013-08-06 2015-09-29 Seagate Technology Llc Multi-sensor data transducer
EP3141893B1 (fr) * 2015-09-08 2019-12-11 Mitsubishi Electric R&D Centre Europe B.V. Système permettant de déterminer si une détérioration se produit dans une interface d'un substrat de semi-conducteur
CN105116199A (zh) * 2015-09-15 2015-12-02 欧朗科技（苏州）有限公司 高精度轨道交通传感器自动功能测试装置
ES2878179T3 (es) * 2016-02-08 2021-11-18 Meggitt Sa Circuito de medición
US10073115B1 (en) 2016-04-18 2018-09-11 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Self diagnostic accelerometer field programmable gate array (SDA FPGA)
WO2019133646A1 (fr) * 2017-12-27 2019-07-04 Knowles Electronics, Llc Détection de défaut d'ensemble transducteur
CN110045150A (zh) * 2019-05-13 2019-07-23 中国工程物理研究院电子工程研究所 一种在线自检测压电加速度传感器
CN112394235B (zh) * 2020-11-18 2023-10-24 浙江理工大学 一种压电元件检测系统及方法和应用
CN114441830A (zh) * 2022-01-07 2022-05-06 南方电网数字电网研究院有限公司 一种压电压阻型电场传感器性能测试系统及方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1369435A (en) * 1970-10-30 1974-10-09 Secr Defence Piezoelectric transducer testing system
US4620446A (en) * 1984-12-31 1986-11-04 Bruel & Kjaer Instruments, Inc. Acceleration responsive transducers
CA2032384C (fr) * 1989-12-18 2000-06-20 Drexelbrook Controls, Inc. Systeme de teletest d'instrumentation
DK167636B1 (da) * 1991-05-31 1993-11-29 Brueel & Kjaer As Fremgangsmaade og apparat til overvaagning af akustiske transducere
JPH0526890A (ja) * 1991-07-19 1993-02-02 Mitsubishi Petrochem Co Ltd 自己診断回路付き加速度センサ
US5447051A (en) * 1993-08-05 1995-09-05 Hewlett-Packard Company Method and apparatus for testing a piezoelectric force sensor
US5753793A (en) * 1993-08-24 1998-05-19 A/S Bruel & Kjaer Apparatus for detecting the malfunctioning of an accelerometer
US5726821A (en) * 1995-12-22 1998-03-10 Western Digital Corporation Programmable preamplifier unit with serial interface for disk data storage device using MR heads
JPH11258074A (ja) * 1998-03-11 1999-09-24 Omron Corp 静電容量型力学量検出装置
US6215302B1 (en) * 1999-05-04 2001-04-10 National Semiconductor Corporation Preamplifier and method for measuring resistance of a resistive transducer
JP4251346B2 (ja) * 2001-04-10 2009-04-08 久 安藤 校正機能付き変位センサ
US7042228B2 (en) * 2001-04-27 2006-05-09 Oceana Sensor Technologies, Inc. Transducer in-situ testing apparatus and method
US6698269B2 (en) * 2001-04-27 2004-03-02 Oceana Sensor Technologies, Inc. Transducer in-situ testing apparatus and method
US6571598B2 (en) * 2001-08-13 2003-06-03 The United States Of America As Represented By The Secretary Of The Navy Calibration circuit for use with a differential input preamplifier in a sensor system
DE10140855A1 (de) * 2001-08-21 2003-03-06 Bosch Gmbh Robert Prüfschaltung
JP2005016975A (ja) * 2003-06-23 2005-01-20 Denso Corp 半導体加速度センサの検査方法及び半導体加速度センサ
DE102005047894B4 (de) * 2005-10-06 2010-05-12 Abb Ag Verfahren zur Prüfung der Betriebsfähigkeit von Messumformern
CN101131382B (zh) * 2006-08-25 2010-12-01 中国科学院金属研究所 薄膜材料电/热/力耦合作用下性能测试系统及测试方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3450929A1 (fr) 2017-08-30 2019-03-06 G.R.A.S. Sound & Vibration A/S Système d'un analyseur de signal et de capteurs à génération de signal d'essai
RU2671290C1 (ru) * 2017-11-20 2018-10-30 ООО "ГлобалТест" Пьезоэлектрический преобразователь

Also Published As

Publication number Publication date
EP2300790A1 (fr) 2011-03-30
US7936175B2 (en) 2011-05-03
DK2300790T3 (da) 2014-10-13
JP5135471B2 (ja) 2013-02-06
CN102027339A (zh) 2011-04-20
CN102027339B (zh) 2013-11-06
JP2011521225A (ja) 2011-07-21
US20090284263A1 (en) 2009-11-19
WO2009138947A1 (fr) 2009-11-19

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