EP2291854A1 - Support for a rotating target - Google Patents
Support for a rotating targetInfo
- Publication number
- EP2291854A1 EP2291854A1 EP09769468A EP09769468A EP2291854A1 EP 2291854 A1 EP2291854 A1 EP 2291854A1 EP 09769468 A EP09769468 A EP 09769468A EP 09769468 A EP09769468 A EP 09769468A EP 2291854 A1 EP2291854 A1 EP 2291854A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- support
- zone
- support according
- target
- thick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/086—Target geometry
Definitions
- the present invention relates to a support for a rotating target, such as a rotating anode for generating an X-ray beam.
- a rotating target such as a rotating anode for generating an X-ray beam.
- These anodes are especially used in X-ray sources of very high gloss.
- An X-ray source usually comprises a vacuum enclosure, limited by a sealed wall, in which is disposed a cathode adapted to generate a flow of electrons.
- a cathode adapted to generate a flow of electrons.
- In the vacuum chamber is also a rotating anode, driven in rotation about an axis of rotation, which receives on its periphery the flow of electrons from the cathode, and thus emits X-rays which are directed towards a exit.
- Such a device is for example described in EP-1 804 271 in which the rotating anode is located on the same shaft as the turbomolecular vacuum pump.
- X-rays are generated during the interaction of an electron beam with a target. A small portion of the electron energy is transformed into X-rays, the bulk of which is absorbed by the target material and transferred to its support. In the context of a very high-brightness source, the energy of the beam and the energy density at the electronic spot are very high.
- Anodes used in X-ray sources include the target and its support which is usually made of copper or graphite.
- these materials do not withstand the mechanical stresses generated by the work at high rotation speed and at high temperature, which causes the creep of the support, ie the progressive irreversible deformation of the metal part subjected to a constant stress.
- the creep rate increases as the temperature of the material increases.
- the creep of the support of the rotating target must remain below the limit of rupture of the material of the support.
- the support must have an electrical conductivity allowing the transfer of electric charge (greater than 5 mA, 50 keV) to evacuate the electrons that bombard the rotating target.
- the object of the present invention is to propose a support for a rotating target whose creep characteristics are adapted to the working conditions of a device for the emission of a very high-gloss X-ray radiation.
- the object of the present invention is a support for a rotating target having substantially the shape of a perforated disc at its center.
- the support is on the one hand made of a material which is a nickel-based structural hardening superalloy, and on the other hand it has the shape of a disk provided with a zone of thickness. less at its periphery, the peripheral thin zone and the thick zone surrounding the central orifice being separated by a steep slope zone of between 3 and 10 ° and the thickness ratio between the peripheral thin zone and the thick zone surrounding the central orifice being between 1.5 and 3.
- the slope of the recess zone is for example of the order of 4.6 ° and the thickness ratio between the peripheral thin zone and the thick zone surrounding the central orifice is for example of the order of 1.7. .
- the shape of the support is also optimized so as to limit the mass in rotation, which limits the energy of training.
- the rotating anode can be installed on the shaft of a conventional turbo-molecular pump, without having to modify the design of the pump.
- this thinned shape makes it possible to improve the stability of the rotating anode and allows the reduction of the height of the rotor and thus the increase of the compactness of the complete system.
- the support has an extra thickness around its central orifice of several millimeters relative to the average thickness in the vicinity of the periphery of the disc.
- the average thickness of the support in the peripheral thin zone is less than 10 mm.
- the ratio between the outside diameter of the thick zone surrounding the central orifice and the inside diameter of the perforated disk is between 1, 2 and 2, and for example of the order of 1, 4.
- the support has an intermediate zone between the peripheral thin zone and the thick zone surrounding the central orifice.
- this zone hereinafter referred to as the drop zone
- the thickness of the disk goes from the value of the thickness in the thick zone to the value of the thickness in the thin peripheral zone according to a determined slope.
- the outer diameter of the recess zone is at most equal to 90 mm.
- the inside diameter of the support is conditioned by the fastening means of the rotating anode on the rotor shaft.
- the outer diameter of the support is chosen so as to take account of the linear speed at the electronic spot, the level of the mechanical stresses imposed by its rotational speed and its operating temperature and the radiation thermal evacuation.
- the outer diameter of the support is chosen so that the D / d ratio between the outside diameter D and the inside diameter d of the perforated disk is between 2.5 and 5, for example of the order of 3.3.
- the inside diameter of the support is preferably between 40 and 80 mm, and for example of the order of 50 mm.
- the outer diameter of the support is preferably less than 200 mm, for example of the order of 150 mm.
- the support material is a material known under the trademark "INCONEL ® ", ie a superalloy comprising mainly nickel (Ni) but also several other metals, in particular chromium (Cr), magnesium (Mg) , iron (Fe) and titanium (Ti).
- annealed annealing material ie an alloy having undergone a heat treatment, the purpose of which is to put and maintain in solution certain constituents of the alloy (phases, precipitates).
- the machined part is then subjected to an annealing treatment, also called aging.
- the annealing is done after a mechanical treatment in order to make the material more homogeneous and to increase its hardness.
- This so-called “hardening” treatment aims to create precipitates in the matrix. During operation of the anode, these precipitates will hinder dislocation movements and thus prevent deformation of the anode by creep.
- the target consists of a coating based on copper (Cu), molybdenum (Mo) and / or tungsten (W) deposited on the peripheral rim of at least one face of the support.
- the coating is deposited preferably on the rim of each of the two faces of the support.
- the coating is not necessarily the same on each of the faces.
- the target and its support being reversible, this allows different target combinations: Cu-Cu, Cu-Mo, Mo-W, etc.
- At least one face of the support is coated with an emissive coating (black body), aluminate titanate for example, which serves to evacuate the calories by thermal radiation.
- the coating preferably covers the entire available surface to maximize heat exchange.
- a rotating anode comprising a target carried by a support, which is substantially in the form of a perforated disc at its center, made of a material which is a nickel-based structural hardening superalloy. and provided with a zone of lesser thickness at its periphery, the peripheral thin zone and the thick zone surrounding the central orifice being separated by a steep slope zone of between 3 and 10 °, and the thickness ratio between the peripheral thin zone and the thick zone surrounding the central orifice being between 1, 5 and 3.
- this invention has the advantage of offering a compact solution for the generation of X-ray beams of very high brightness.
- the possibility of continuously applying the electron beam makes it possible to increase the efficiency of the machine for measuring a coefficient 5, but also to make analyzes directly on production plates.
- integrated circuits thanks to a beam of small dimensions (typically 30 ⁇ m x 30 ⁇ m).
- FIG. 1 represents a rotating anode, comprising a support bearing a rotating target, connected to a rotation shaft according to one embodiment of the invention
- FIG. 2a is a sectional view of the support of FIG. 1,
- FIG. 1 is a perspective view of the rotating anode of Figure 1.
- the X-radiation source comprises a vacuum enclosure, in which a rotating anode 1 is disposed which has at its periphery a target 2 receiving the electron flow. from a cathode, also placed in the enclosure, and emitting X-rays which are directed to an output.
- the target 2 is carried by a support 3 having a particular profile. It is a thin disc with an orifice at its center to let the axis of rotation pass.
- the rotating anode 1 is rotated by the shaft 4 of the rotor of the turbomolecular pump with which it is associated.
- the rotating anode 1 is connected to the shaft 4 by a holding member 5 from which it is separated by an insulating part 6 thermally.
- the fixing of the assembly is carried out by means of a clamping piece 7.
- the support 3 is a disc carrying a circular orifice 20 at its center.
- the internal diameter d of the support is for example 45 mm, and its outer diameter D is for example 148 mm, a ratio D / d of 3.23.
- the support 3 has a zone of greater thickness 21 near the central orifice, for example having a thickness E of 5 mm.
- This zone 21 has a diameter A which is for example 65 mm, ie a ratio A / d of 1.44 in the present case.
- the support At its periphery, the support comprises a zone of smaller thickness 22, for example having a thickness e of 2 mm. Between the thicker zone 21 and the thinner zone 22 is a transition zone 23 which has a step thickness between its inner diameter A and its outer diameter B.
- the inner diameter A is for example 65 mm
- the outer diameter B is for example 90 mm, a slope of 6.8 ° for the recess shown.
- the zones described above may as well be divided into sub-zones of slightly different dimensional characteristics while remaining within the scope of the present invention.
- the support 3 consists of a nickel-based superalloy, preferably of the inconel type, which has creep limits adapted to the operating conditions of the rotating anode.
- FIG. 2b shows in perspective the rotating anode 1.
- the energy supplied to the target is greater than 200 Watt, and the energy reaching the rotation shaft must be less than 50 watts so as not to heat up the impeller of the pump (maximum 130 0 C). This energy difference must be removed before reaching the tree.
- It is a titanate aluminate coating 24 deposited on either side of the support 3, on each of its faces, which allows cooling by radiation and better evacuation of the Watts.
- This coating 24 of black color covers the surface starting from the central orifice 20 of the support 3 and up to a distance greater than 3 mm from the outer edge of the support 3.
- the target 2 which generates the X-rays is a thick-film coating deposited on the outer rim of the support 3.
- the coating may have as its main constituent, for example, copper Cu, molybdenum Mo and / or tungsten W.
- the target 2 and its support 3 are designed to be reversible.
- the deposition of the coating of the target 2 is preferably made on both sides of the support 3. It is thus possible to envisage different combinations in the nature of the coating constituting the target 2.
- the target 2 is polished and its flatness is ground to the micron before the installation of the rotating anode 1 on the shaft 4 of the pump.
Landscapes
- X-Ray Techniques (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0854325A FR2933231B1 (en) | 2008-06-27 | 2008-06-27 | SUPPORT FOR A ROTATING TARGET |
PCT/FR2009/050805 WO2009156627A1 (en) | 2008-06-27 | 2009-04-30 | Support for a rotating target |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2291854A1 true EP2291854A1 (en) | 2011-03-09 |
Family
ID=40260806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09769468A Withdrawn EP2291854A1 (en) | 2008-06-27 | 2009-04-30 | Support for a rotating target |
Country Status (9)
Country | Link |
---|---|
US (1) | US20110096909A1 (en) |
EP (1) | EP2291854A1 (en) |
JP (1) | JP2011526058A (en) |
KR (1) | KR20110038061A (en) |
CN (1) | CN102067267A (en) |
FR (1) | FR2933231B1 (en) |
IL (1) | IL209590A0 (en) |
TW (1) | TW201013733A (en) |
WO (1) | WO2009156627A1 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6335512B1 (en) * | 1999-07-13 | 2002-01-01 | General Electric Company | X-ray device comprising a crack resistant weld |
US6612478B2 (en) * | 2001-05-14 | 2003-09-02 | Varian Medical Systems, Inc. | Method for manufacturing x-ray tubes |
US7224771B2 (en) * | 2003-07-30 | 2007-05-29 | Koninklijke Philips Electronics N.V. | Shaped anode x-ray tube |
DE102005000784A1 (en) * | 2005-01-03 | 2006-07-13 | Reis, Hans-Henning, Dr.sc.techn. | X-ray rotary anode with X-ray active layer (focal track element), under which are materially connected further elements of material with good thermal conductivity |
-
2008
- 2008-06-27 FR FR0854325A patent/FR2933231B1/en not_active Expired - Fee Related
-
2009
- 2009-04-30 CN CN2009801232164A patent/CN102067267A/en active Pending
- 2009-04-30 JP JP2011515533A patent/JP2011526058A/en not_active Withdrawn
- 2009-04-30 EP EP09769468A patent/EP2291854A1/en not_active Withdrawn
- 2009-04-30 US US12/737,088 patent/US20110096909A1/en not_active Abandoned
- 2009-04-30 WO PCT/FR2009/050805 patent/WO2009156627A1/en active Application Filing
- 2009-04-30 KR KR1020117001918A patent/KR20110038061A/en not_active Application Discontinuation
- 2009-05-19 TW TW098116558A patent/TW201013733A/en unknown
-
2010
- 2010-11-25 IL IL209590A patent/IL209590A0/en unknown
Non-Patent Citations (1)
Title |
---|
See references of WO2009156627A1 * |
Also Published As
Publication number | Publication date |
---|---|
FR2933231A1 (en) | 2010-01-01 |
TW201013733A (en) | 2010-04-01 |
US20110096909A1 (en) | 2011-04-28 |
CN102067267A (en) | 2011-05-18 |
FR2933231B1 (en) | 2010-06-11 |
JP2011526058A (en) | 2011-09-29 |
WO2009156627A1 (en) | 2009-12-30 |
IL209590A0 (en) | 2011-01-31 |
KR20110038061A (en) | 2011-04-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20110127 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA RS |
|
DAX | Request for extension of the european patent (deleted) | ||
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: ADIXEN VACUUM PRODUCTS |
|
17Q | First examination report despatched |
Effective date: 20120723 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20131105 |