EP2256752A2 - Millimetric wave transformer with high transformation ratio and low insertion losses - Google Patents
Millimetric wave transformer with high transformation ratio and low insertion losses Download PDFInfo
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- EP2256752A2 EP2256752A2 EP10164168A EP10164168A EP2256752A2 EP 2256752 A2 EP2256752 A2 EP 2256752A2 EP 10164168 A EP10164168 A EP 10164168A EP 10164168 A EP10164168 A EP 10164168A EP 2256752 A2 EP2256752 A2 EP 2256752A2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F19/00—Fixed transformers or mutual inductances of the signal type
- H01F19/04—Transformers or mutual inductances suitable for handling frequencies considerably beyond the audio range
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
Definitions
- the present invention relates to transformers of alternating signals with millimeter wavelengths, that is to say whose frequency is between about 30 GHz and about 300 GHz.
- the figure 1 represents the circuit diagram of a transformer 1.
- a primary winding 3 At the terminals of a primary winding 3 is applied an alternating signal IN.
- the transformer 1 is used to raise or lower the voltage V IN of the input AC signal IN, to isolate one with respect to the other two circuits, to filter a possible DC component of the signal IN or to adapt the impedances between different components of a circuit.
- the coefficient n is related to the value ls / Lp , , where Ls and Lp are the respective inductances of the secondary and primary windings.
- transformers capable of processing millimeter wavelength signals.
- European automobile radars 80 GHz
- the broadcasting of high-definition video over wireless networks 60 GHz
- the Ls and Lp values vary greatly with frequency, in particular because of the skin effect and the small skin thickness in which a high frequency signal propagates in a conductor (0.27 ⁇ m in 60 GHz copper).
- Another difficulty lies in the fact that the resonance frequency of the transformer, that is to say the frequency from which the transformer is no longer operational, decreases as the number of turns of the windings increases.
- millimeter wave transformers can not have more than two turns per winding.
- the Figure 2A is a perspective view of a millimeter wave transformer 11.
- the transformer 11 comprises a primary winding 13, consisting of a lathe formed in a metallization level M1, and a secondary winding 15, consisting of two towers essentially formed in the same metallization level M2 less than the level M1.
- the intersection between the two towers constituting the secondary winding 15 passes through a conductive section 17, formed in a metallization level M3 less than the M2 level and connected to the towers by vias (not shown).
- the primary winding 13 is disposed above the secondary winding 15, so that the average diameter (average of the outer diameter and inner diameter) of the primary winding coincides with the average diameter of the secondary winding.
- the primary and secondary windings consist of conductor tracks of identical widths (for example 4 ⁇ m) formed in successive metallization levels isolated from each other.
- the Figure 2B is a sectional view of the transformer 11 of the Figure 2A according to a plan schematized by the line A of the Figure 2A .
- the primary winding 13 and the secondary winding 15 are separated by an insulating layer 19.
- transformers of this type lies in the high insertion losses that they introduce, particularly because of the significant resistivity of the windings.
- the transformation coefficient n of the transformer 11 is determined by the inductances Lp and Ls of the primary and secondary windings. These inductances depend strongly on the working frequency. It would be desirable, at a given working frequency, to be able to increase the transformation coefficient n, that is to say increase the ratio between the inductances Ls and Lp.
- an object of an embodiment of the present invention is to provide a millimeter wave transformer that overcomes all or at least some of the disadvantages mentioned above of the solutions of the prior art.
- An object of an embodiment of the present invention is to provide such a transformer having a high conversion coefficient.
- An object of an embodiment of the present invention is to provide such a transformer with low insertion losses.
- the invention provides a millimeter wave transformer in which the track width of the primary winding is greater than the track width of the secondary winding.
- an embodiment of the present invention provides a millimeter wave transformer comprising at the primary a tower consisting of a conductive track made in at least a first metallization level, and the secondary winding facing the primary tower, comprising at least one a tower consisting of a conductive track made in at least a second isolated metallization level of said at least one first level, the track width of the primary tower being at least equal to the total width of the secondary winding.
- the secondary winding is arranged facing the outer portion of the primary tower, so that the outer perimeter of the secondary winding coincides with the outer perimeter of the primary tower.
- the secondary winding comprises two turns made in said at least one second level of metallization, the intersection between these two turns being made in a third metallization level isolated from the first level.
- the conductive tracks are copper tracks.
- An embodiment of the present invention provides a method of adjusting the transformation coefficient of a millimeter wave transformer comprising at the primary a tower consisting of a conductive track made in at least a first level of metallization, and secondary a winding facing the primary tower, comprising at least one tower consisting of a conducting track made in at least a second insulated metallization level of said at least one first level, the track width of the primary tower being greater than the total width of the the secondary winding, the method comprising a step of adjusting the position of the secondary winding, to the outer portion of the primary tower to increase said coefficient and to the inner portion of the primary tower to decrease said coefficient.
- the figure 3A is a perspective view of a millimeter wave transformer 21.
- the transformer 21 comprises a primary winding 23, consisting of a lathe formed in a metallization level M1, and a secondary winding 25, consisting of two turns formed essentially in the same metallization level M2 less than the level M1.
- the intersection between the two towers constituting the secondary winding 25 passes through a conductive section 27, formed in a metallization level M3 less than the M2 level and connected to the towers by vias (not shown).
- the primary winding 23 is disposed above the secondary winding 25, so that the average diameter (average of the outer diameter and inner diameter) of the primary winding coincides with the average diameter of the secondary winding.
- the figure 3B is a sectional view of the transformer 21 of the figure 3A according to a plan schematized by the line A of the figure 3A .
- the conductive tracks are separated from each other by an insulator 29.
- the track width of the primary winding 23 is greater than the track width of the secondary winding 25.
- the track width of the primary winding 23 is greater than the total width of the secondary winding 25, i.e., in this case, twice the track width of the secondary winding plus the width insulation 29 between the first and second turns of the secondary winding.
- secondary winding 1.5. .mu.m.
- the Figure 4A represents the evolution of the transformation coefficient n of the transformers illustrated by the FIGS. 2A-2B and 3A-3B , depending on the frequency of the input signal.
- Curve 31 corresponds to the case of transformer 11 of figures 2A and 2B , for track widths of the primary and secondary windings equal to 4 ⁇ m.
- Curve 33 corresponds to the case of transformer 21 of Figures 3A and 3B , for track widths of the primary and secondary windings respectively equal to 12 microns and 4 microns.
- the curve 33 is clearly above the curve 31 regardless of the working frequency considered and in particular for the millimeter wavelength signals.
- the transformation coefficient of the transformer 11 is equal to 3.11 and that of the transformer 21 is equal to 4.24.
- the Figure 4B represents the evolution of insertion losses of transformers 11 and 21, as a function of the frequency of the input signal.
- Curve 41 corresponds to the case of transformer 11, for track widths of primary and secondary windings equal to 4 ⁇ m.
- the curve 43 corresponds to the case of the transformer 21, for the track widths of the primary and secondary windings respectively equal to 12 microns and 4 microns.
- the curve 43 is well below the curve 41 regardless of the working frequency considered and in particular for the millimeter wavelength signals.
- the insertion losses of the transformer 11 are 1.33 dB and those of the transformer 21 are 1.01 dB.
- the track width of the primary winding is beneficial only within a certain threshold. Indeed, from a certain width, there is a degradation of the performance of the transformer, and in particular an increase in insertion losses. For example, if the secondary winding consists of two tows of 4 ⁇ m track width, separated by 1.5 ⁇ m of insulation, or a total width of 9.5 ⁇ m, care should be taken not to increase the width of the track of the primary winding beyond 24 ⁇ m.
- track width of the primary winding is greater than the total width of the secondary winding, different positions of the secondary winding facing the primary winding are possible.
- the secondary winding is positioned under the outer portion of the primary winding, so that its outer perimeter coincides with the outer perimeter of the primary winding.
- the Figure 5A is a perspective view showing a millimeter wave transformer 51.
- the transformer 51 comprises a primary winding 53, consisting of a lathe formed in a metallization level M1, and a secondary winding 55, consisting of a lathe formed in a metallization level M2 lower than the level M1.
- the primary winding 53 is arranged opposite the secondary winding 55, so that the inner perimeters of the primary and secondary windings coincide.
- the Figure 5B is a sectional view of the transformer 51 of the Figure 5A according to a plan schematized by the line A of the Figure 5A .
- the Figure 6A is a perspective view showing a millimeter wave transformer 61.
- the transformer 61 comprises a primary winding 63, consisting of a lathe formed in a metallization level M1, and a secondary winding 65, consisting of a lathe formed in a metallization level M2 lower than the level M1.
- the primary winding 63 is disposed opposite the secondary winding 65, so that the outer perimeters of the primary and secondary windings coincide.
- the Figure 6B is a sectional view of the transformer 61 of the Figure 6A according to a plan schematized by the line A of the Figure 6A .
- the figure 7 represents the evolution of the transformation coefficient n of the transformers illustrated by the Figures 5A-5B and 6A-6B , depending on the frequency of the input signal.
- the curves 71 and 73 correspond respectively to the transformers 51 ( Figures 5A and 5B ) and 61 ( Figures 6A and 6B ), for track widths of the primary and secondary windings respectively equal to 12 microns and 4 microns.
- the curve 73 is clearly above the curve 71 regardless of the working frequency considered and in particular for the millimeter wavelength signals.
- the transformation coefficient of the transformer 51 is equal to 1.16 and that of the transformer 61 is equal to 1.28.
- the inventors have determined that, for a given primary winding diameter, the transformation coefficient increases linearly with the diameter of the secondary winding, when the latter is within the range of values for which the primary and secondary windings are opposite. one of the other.
- metallization levels lower or higher than other metallization levels have been mentioned in the description of embodiments of the invention, in particular, the primary windings have been described as being arranged above the secondary windings. The invention is not restricted to these particular cases. The order of the metallization levels can be reversed, and in particular, the secondary winding can be arranged above the primary winding.
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Abstract
Description
La présente invention concerne les transformateurs de signaux alternatifs à longueurs d'ondes millimétriques, c'est-à-dire dont la fréquence est comprise entre environ 30 GHz et environ 300 GHz.The present invention relates to transformers of alternating signals with millimeter wavelengths, that is to say whose frequency is between about 30 GHz and about 300 GHz.
La
Certaines applications nécessitent des transformateurs aptes à traiter des signaux de longueurs d'ondes millimétriques. On pourra par exemple citer de façon non limitative les radars automobiles européens (80 GHz) et la diffusion de vidéo à haute définition sur réseaux sans fil (60 GHz). Aux longueurs d'ondes millimétriques, les valeurs Ls et Lp varient beaucoup avec la fréquence, notamment en raison de l'effet de peau et de la faible épaisseur de peau dans laquelle un signal haute fréquence se propage dans un conducteur (0,27 µm dans du cuivre à 60 GHz). Une autre difficulté réside dans le fait que la fréquence de résonance du transformateur, c'est-à-dire la fréquence à partir de laquelle le transformateur n'est plus opérationnel, diminue lorsque le nombre de tours des enroulements augmente. En pratique, les transformateurs d'ondes millimétriques ne peuvent pas avoir plus de deux tours par enroulement.Some applications require transformers capable of processing millimeter wavelength signals. For example, European automobile radars (80 GHz) and the broadcasting of high-definition video over wireless networks (60 GHz) may be mentioned in a nonlimiting manner. At millimeter wavelengths, the Ls and Lp values vary greatly with frequency, in particular because of the skin effect and the small skin thickness in which a high frequency signal propagates in a conductor (0.27 μm in 60 GHz copper). Another difficulty lies in the fact that the resonance frequency of the transformer, that is to say the frequency from which the transformer is no longer operational, decreases as the number of turns of the windings increases. In practice, millimeter wave transformers can not have more than two turns per winding.
La
La
Un inconvénient des transformateurs de ce type réside dans les pertes d'insertion élevées qu'ils introduisent, en raison notamment de la résistivité non négligeable des enroulements.A disadvantage of transformers of this type lies in the high insertion losses that they introduce, particularly because of the significant resistivity of the windings.
En outre, le coefficient de transformation n du transformateur 11 est déterminé par les inductances Lp et Ls des enroulements primaire et secondaire. Ces inductances dépendent fortement de la fréquence de travail. Il serait souhaitable, à une fréquence de travail donnée, de pouvoir augmenter le coefficient de transformation n, c'est-à-dire augmenter le rapport entre les inductances Ls et Lp.In addition, the transformation coefficient n of the
Ainsi, un objet d'un mode de réalisation de la présente invention est de proposer un transformateur d'ondes millimétriques palliant tous ou au moins certains des inconvénients cités ci-dessus des solutions de l'art antérieur.Thus, an object of an embodiment of the present invention is to provide a millimeter wave transformer that overcomes all or at least some of the disadvantages mentioned above of the solutions of the prior art.
Un objet d'un mode de réalisation de la présente invention est de proposer un tel transformateur présentant un fort coefficient de transformation.An object of an embodiment of the present invention is to provide such a transformer having a high conversion coefficient.
Un objet d'un mode de réalisation de la présente invention est de proposer un tel transformateur à faibles pertes d'insertion.An object of an embodiment of the present invention is to provide such a transformer with low insertion losses.
De façon générale, l'invention prévoit un transformateur d'ondes millimétriques dans lequel la largeur de piste de l'enroulement primaire est supérieure à la largeur de piste de l'enroulement secondaire.In general, the invention provides a millimeter wave transformer in which the track width of the primary winding is greater than the track width of the secondary winding.
Ainsi, un mode de réalisation de la présente invention prévoit un transformateur d'ondes millimétriques comportant au primaire un tour constitué d'une piste conductrice réalisée dans au moins un premier niveau de métallisation, et au secondaire un enroulement en regard du tour primaire, comportant au moins un tour constitué d'une piste conductrice réalisée dans au moins un second niveau de métallisation isolé dudit au moins un premier niveau, la largeur de piste du tour primaire étant au moins égale à la largeur totale de l'enroulement secondaire.Thus, an embodiment of the present invention provides a millimeter wave transformer comprising at the primary a tower consisting of a conductive track made in at least a first metallization level, and the secondary winding facing the primary tower, comprising at least one a tower consisting of a conductive track made in at least a second isolated metallization level of said at least one first level, the track width of the primary tower being at least equal to the total width of the secondary winding.
Selon un mode de réalisation de la présente invention, l'enroulement secondaire est disposé en regard de la partie extérieure du tour primaire, de façon que le périmètre extérieur de l'enroulement secondaire coïncide avec le périmètre extérieur du tour primaire.According to one embodiment of the present invention, the secondary winding is arranged facing the outer portion of the primary tower, so that the outer perimeter of the secondary winding coincides with the outer perimeter of the primary tower.
Selon un mode de réalisation de la présente invention, l'enroulement secondaire comporte deux tours réalisés dans ledit au moins un second niveau de métallisation, l'intersection entre ces deux tours étant réalisée dans un troisième niveau de métallisation isolé du premier niveau.According to one embodiment of the present invention, the secondary winding comprises two turns made in said at least one second level of metallization, the intersection between these two turns being made in a third metallization level isolated from the first level.
Selon un mode de réalisation de la présente invention, les pistes conductrices sont des pistes de cuivre.According to one embodiment of the present invention, the conductive tracks are copper tracks.
Un mode de réalisation de la présente invention prévoit un procédé d'ajustement du coefficient de transformation d'un transformateur d'ondes millimétriques comportant au primaire un tour constitué d'une piste conductrice réalisée dans au moins un premier niveau de métallisation, et au secondaire un enroulement en regard du tour primaire, comportant au moins un tour constitué d'une piste conductrice réalisée dans au moins un second niveau de métallisation isolé dudit au moins un premier niveau, la largeur de piste du tour primaire étant supérieure à la largeur totale de l'enroulement secondaire, ce procédé comportant une étape d'ajustement de la position de l'enroulement secondaire, vers la partie extérieure du tour primaire pour augmenter ledit coefficient et vers la partie intérieure du tour primaire pour diminuer ledit coefficient.An embodiment of the present invention provides a method of adjusting the transformation coefficient of a millimeter wave transformer comprising at the primary a tower consisting of a conductive track made in at least a first level of metallization, and secondary a winding facing the primary tower, comprising at least one tower consisting of a conducting track made in at least a second insulated metallization level of said at least one first level, the track width of the primary tower being greater than the total width of the the secondary winding, the method comprising a step of adjusting the position of the secondary winding, to the outer portion of the primary tower to increase said coefficient and to the inner portion of the primary tower to decrease said coefficient.
Ces objets, caractéristiques et avantages, ainsi que d'autres seront exposés en détail dans la description suivante de modes de réalisation particuliers faite à titre non-limitatif en relation avec les figures jointes parmi lesquelles :
- la
figure 1 , précédemment décrite, représente le schéma électrique d'un transformateur ; - la
figure 2A , précédemment décrite, est une vue en perspective d'un transformateur d'ondes millimétriques ; - la
figure 2B , précédemment décrite, est une vue en coupe du transformateur de lafigure 2A ; - la
figure 3A est une vue en perspective représentant un exemple de transformateur d'ondes millimétriques selon un mode de réalisation de l'invention ; - la
figure 3B est une vue en coupe du transformateur de lafigure 3A ; - les
figures 4A et 4B représentent les évolutions du coefficient de transformation et des pertes d'insertion en fonction de la fréquence du signal d'entrée pour les transformateurs desfigures 2A et 3A ; - la
figure 5A est une vue en perspective représentant un exemple de transformateur d'ondes millimétriques selon un autre mode de réalisation de l'invention ; - la
figure 5B est une vue en coupe du transformateur de lafigure 5A ; - la
figure 6A est une vue en perspective d'un exemple de transformateur d'ondes millimétriques selon un autre mode de réalisation de l'invention ; - la
figure 6B est une vue en coupe du transformateur de lafigure 6A ; et - La
figure 7 représente l'évolution du coefficient de transformation en fonction de la fréquence du signal d'entrée pour les transformateurs desfigures 5A et 6A .
- the
figure 1 , previously described, represents the electrical diagram of a transformer; - the
Figure 2A , previously described, is a perspective view of a millimeter wave transformer; - the
Figure 2B , previously described, is a sectional view of the transformer of theFigure 2A ; - the
figure 3A is a perspective view showing an example of a millimeter wave transformer according to an embodiment of the invention; - the
figure 3B is a sectional view of the transformer of thefigure 3A ; - the
Figures 4A and 4B represent changes in the transformation coefficient and insertion losses as a function of the input signal frequency for the transformers of the transformers.Figures 2A and 3A ; - the
Figure 5A is a perspective view showing an example of a millimeter wave transformer according to another embodiment of the invention; - the
Figure 5B is a sectional view of the transformer of theFigure 5A ; - the
Figure 6A is a perspective view of an exemplary millimeter wave transformer according to another embodiment of the invention; - the
Figure 6B is a sectional view of the transformer of theFigure 6A ; and - The
figure 7 represents the evolution of the transformation coefficient as a function of the frequency of the input signal for the transformers of theFigures 5A and 6A .
Par souci de clarté, de mêmes éléments ont été désignés par de mêmes références aux différentes figures et, de plus, comme cela est habituel dans la représentation des circuits intégrés, les diverses figures ne sont pas tracées à l'échelle.For the sake of clarity, the same elements have been designated by the same references in the various figures and, moreover, as is customary in the representation of the integrated circuits, the various figures are not drawn to scale.
La
La
Comme cela est illustré, la largeur de piste de l'enroulement primaire 23 est supérieure à la largeur de piste de l'enroulement secondaire 25. Selon un mode de réalisation illustré en
La
La courbe 33 se situe nettement au dessus de la courbe 31 quelle que soit la fréquence de travail considérée et notamment pour les signaux à longueur d'onde millimétrique. Par exemple, à 60 GHz, le coefficient de transformation du transformateur 11 est égal à 3,11 et celui du transformateur 21 est égal à 4,24.The
La
La courbe 43 se situe nettement au dessous de la courbe 41 quelle que soit la fréquence de travail considérée et notamment pour les signaux à longueur d'onde millimétrique. Par exemple, à 60 GHz, les pertes d'insertion du transformateur 11 sont de 1,33 dB et celles du transformateur 21 sont de 1,01 dB.The
On notera que l'augmentation de la largeur de piste de l'enroulement primaire n'est bénéfique qu'en deçà d'un certain seuil. En effet, à partir d'une certaine largeur, on observe une dégradation des performances du transformateur, et notamment une augmentation des pertes d'insertion. Par exemple, si l'enroulement secondaire est composé de deux tours de 4 µm de largeur de piste, séparées par 1,5 µm d'isolant, soit une largeur totale de 9,5 µm, on veillera à ne pas augmenter la largeur de piste de l'enroulement primaire au-delà de 24 µm.It should be noted that increasing the track width of the primary winding is beneficial only within a certain threshold. Indeed, from a certain width, there is a degradation of the performance of the transformer, and in particular an increase in insertion losses. For example, if the secondary winding consists of two tows of 4 μm track width, separated by 1.5 μm of insulation, or a total width of 9.5 μm, care should be taken not to increase the width of the track of the primary winding beyond 24 μm.
Si la largeur de piste de l'enroulement primaire est supérieure à la largeur totale de l'enroulement secondaire, différents positionnements de l'enroulement secondaire en regard de l'enroulement primaire sont possibles.If the track width of the primary winding is greater than the total width of the secondary winding, different positions of the secondary winding facing the primary winding are possible.
Selon un aspect de l'invention, l'enroulement secondaire est positionné sous la partie extérieure de l'enroulement primaire, de façon que son périmètre extérieur coïncide avec le périmètre extérieur de l'enroulement primaire.According to one aspect of the invention, the secondary winding is positioned under the outer portion of the primary winding, so that its outer perimeter coincides with the outer perimeter of the primary winding.
La
La
La
La
La
La courbe 73 se situe nettement au dessus de la courbe 71 quelle que soit la fréquence de travail considérée et notamment pour les signaux à longueur d'onde millimétrique. Par exemple, à 60 GHz, le coefficient de transformation du transformateur 51 est égal à 1,16 et celui du transformateur 61 est égal à 1,28.The
Les inventeurs ont déterminé que, pour un diamètre d'enroulement primaire donné, le coefficient de transformation augmente linéairement avec le diamètre de l'enroulement secondaire, lorsque ce dernier est compris dans la plage de valeurs pour lesquelles les enroulements primaire et secondaire sont en regard l'un de l'autre.The inventors have determined that, for a given primary winding diameter, the transformation coefficient increases linearly with the diameter of the secondary winding, when the latter is within the range of values for which the primary and secondary windings are opposite. one of the other.
Ainsi, pour renforcer le coefficient de transformation, on prévoit de disposer l'enroulement secondaire sous la partie extérieure de l'enroulement primaire, de façon que les périmètres extérieurs des enroulements coïncident, comme cela est illustré en
Selon un avantage de l'invention, il est possible d'ajuster finement le coefficient de transformation aux besoins spécifiés en positionnant de façon adaptée l'enroulement secondaire, vers l'intérieur ou vers l'extérieur de l'enroulement primaire.According to an advantage of the invention, it is possible to finely adjust the transformation coefficient to the specified requirements by appropriately positioning the secondary winding, inwardly or outwardly of the primary winding.
Des modes de réalisation particuliers de la présente invention ont été décrits. Diverses variantes et modifications apparaîtront à l'homme de l'art. En particulier, l'invention ne se restreint pas aux exemples de transformateurs millimétriques exposés ci-dessus dans lesquels les enroulements secondaires comportent un ou deux tours. L'homme de l'art saura mettre en oeuvre l'invention quel que soit le nombre de tours de l'enroulement secondaire (en pratique pas plus de deux tours pour des fréquences supérieures à 50 GHz). Par ailleurs, des valeurs numériques de largeur de piste ont été données à titre d'exemple. L'invention ne se restreint pas à ces seuls cas particuliers. En outre, l'utilisation de pistes conductrices en cuivre a été évoquée. L'invention ne se restreint pas à ce seul cas particulier. L'homme de l'art saura mettre en oeuvre l'invention quels que soient les matériaux employés pour la réalisation du transformateur. De plus, on a mentionné dans la description de modes de réalisation de l'invention des niveaux de métallisation inférieurs ou supérieurs à d'autres niveaux de métallisation, notamment, on a décrit les enroulements primaires comme étant disposés au dessus des enroulements secondaires. L'invention ne se restreint pas à ces cas particuliers. L'ordre des niveaux de métallisation peut être inversé, et notamment, l'enroulement secondaire peut être disposé au dessus de l'enroulement primaire.Particular embodiments of the present invention have been described. Various variations and modifications will be apparent to those skilled in the art. In particular, the invention is not limited to the above-described examples of millimetric transformers in which the secondary windings comprise one or two turns. Those skilled in the art will know how to implement the invention regardless of the number of revolutions of the secondary winding (in practice no more than two turns for frequencies greater than 50 GHz). In addition, numerical values of track width have been given by way of example. The invention is not restricted to these cases alone individuals. In addition, the use of conductive copper tracks has been mentioned. The invention is not restricted to this particular case. Those skilled in the art will know how to implement the invention regardless of the materials used for producing the transformer. In addition, metallization levels lower or higher than other metallization levels have been mentioned in the description of embodiments of the invention, in particular, the primary windings have been described as being arranged above the secondary windings. The invention is not restricted to these particular cases. The order of the metallization levels can be reversed, and in particular, the secondary winding can be arranged above the primary winding.
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FR0953496 | 2009-05-27 |
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EP2256752B1 EP2256752B1 (en) | 2012-05-23 |
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CN111884606A (en) * | 2020-06-22 | 2020-11-03 | 南京迈矽科微电子科技有限公司 | Broadband matching circuit and millimeter wave power amplification circuit based on millimeter wave transformer |
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US8988852B2 (en) * | 2009-11-17 | 2015-03-24 | Marvell World Trade Ltd. | Ground shield capacitor |
US8791784B2 (en) * | 2011-08-18 | 2014-07-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Vertically oriented semiconductor device and shielding structure thereof |
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Also Published As
Publication number | Publication date |
---|---|
EP2256752A3 (en) | 2011-01-05 |
US20100301987A1 (en) | 2010-12-02 |
EP2256752B1 (en) | 2012-05-23 |
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