EP2228145B1 - Method and device for cleaning a suction system for a rotary press - Google Patents

Method and device for cleaning a suction system for a rotary press Download PDF

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Publication number
EP2228145B1
EP2228145B1 EP10001874A EP10001874A EP2228145B1 EP 2228145 B1 EP2228145 B1 EP 2228145B1 EP 10001874 A EP10001874 A EP 10001874A EP 10001874 A EP10001874 A EP 10001874A EP 2228145 B1 EP2228145 B1 EP 2228145B1
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EP
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Prior art keywords
suction
cleaning
suction system
cleaning liquid
valve
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EP10001874A
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German (de)
French (fr)
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EP2228145A2 (en
EP2228145A3 (en
Inventor
Hans Wolf
Stefan Lüdemann
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Fette GmbH
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Fette GmbH
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/002—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using a central suction system, e.g. for collecting exhaust gases in workshops
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/02—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a ram exerting pressure on the material in a moulding space
    • B30B11/08—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a ram exerting pressure on the material in a moulding space co-operating with moulds carried by a turntable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/0082—Dust eliminating means; Mould or press ram cleaning means

Definitions

  • the invention relates to a method and a device for cleaning a suction system for rotary presses according to claim 1 and 4.
  • a suction system usually contains a plurality of suction nozzles, which are placed at suitable locations in the press room.
  • the suction nozzles are connected via a collecting line with a suction device outside the press room. It is necessary to clean the suction system from time to time with a cleaning medium, eg. B. water.
  • a cleaning medium eg. B. water.
  • DE 4212 164 A1 shows an apparatus and a method for. Extraction of airborne contaminants during pressing of chipboard.
  • the invention is therefore based on the object to provide a method and apparatus for safe and complete cleaning of the exhaust system in rotary presses.
  • shut-off valves are arranged in the suction lines for this purpose, which can be optionally closed by means of a suitable control device. When closing these check valves, the cleaning medium, which is supplied via a port, dammed in the exhaust system. If, in one embodiment of the invention, a predetermined level is reached, the supply of cleaning medium is ended. Subsequently, the shut-off valves can be opened in any order and for any duration, so that a flow is formed in the exhaust system.
  • a closing valve is arranged, which is actuated by the control device. It only opens when cleaning is intended. Before it is opened, however, the check valves in the suction lines must be closed.
  • a targeted cleaning of one or more strands of the extraction system can be achieved by appropriate switching of the shut-off valves.
  • the use of ultrasound supports the cleaning.
  • a suction system 10 is shown, with the aid of dust and contaminants from a press chamber, not shown, a rotary press can be removed.
  • a rotary press nor an aggregate for the suction is shown. It can be seen only three suction nozzles 12, 14, 16, which are arranged at suitable locations in the press room.
  • the suction nozzles 12 to 16 are connected to suction lines 18, 20, 22, which are guided to a collecting line 24.
  • a supply line 26 is connected for cleaning fluid, in which a closing valve 28 is arranged. Downstream of the supply line 26, a level sensor 30 is disposed in the manifold 24.
  • the suction lines 18 to 22 are associated with shut-off valves 32, 34, 36.
  • the valves 28 and 32 to 36 are actuated by a suitable, not shown, control device of the tablet press.
  • the level sensor 30 is also connected to the control device.
  • a suction pressure is generated at the manifold 24, and a suitable suction unit draws the atmosphere from the press room. This is indicated by arrows 38 and 40, respectively.
  • a suction operation is well known for tablet presses.
  • the shut-off valves 32 to 36 which may be formed by suitable flaps, are opened.
  • the closing valve 28 is closed. If a cleaning of the exhaust system take place, the shut-off valves 32 to 36 are closed, as in Fig. 2 shown.
  • the closing valve 28 is opened.
  • cleaning liquid according to arrow 40 can enter the suction system.
  • the suction lines 18 to 22 above the shut-off valves 32 to 36 are thus flooded. The flooding is stopped as soon as the cleaning liquid has reached the level sensor 30.
  • a timing circuit may be provided which closes the closing valve 28 after a certain time after opening again.
  • the suction unit is switched off.
  • the shut-off valves 32 to 36 are opened simultaneously or successively.
  • the cleaning liquid flows down into the press room and cleans the lines 18 to 22 below the shut-off valves 32 to 36.
  • the flowed into the press room cleaning liquid is removed in the usual way from the press room.
  • shut-off valves 32 to 36 it is also possible to open and close the shut-off valves 32 to 36 in order to achieve a suitable flow velocity and turbulence also below the shut-off valves, whereby the cleaning effect is improved.
  • the shut-off valves 32 to 36 may be formed by so-called pinch valves. Pinch valves are state of the art in their own right. In these, a flexible area of a conduit is more or less constricted by means of a suitable means to restrict or inhibit the flow.

Description

Die Erfindung bezieht sich auf ein Verfahren und eine Vorrichtung zur Abreinigung eines Absaugsystems für Rundläuferpressen nach Patentanspruch 1 und 4.The invention relates to a method and a device for cleaning a suction system for rotary presses according to claim 1 and 4.

Es ist bekannt, bei Tablettenpressen den im Pressraum entstehenden Staub über ein geeignetes Absaugsystem zu entfernen. Ein derartiges Absaugsystem enthält zumeist mehrere Absaugdüsen, die an geeigneten Orten im Pressenraum platziert werden. Die Absaugdüsen sind über eine Sammelleitung mit einer Absaugvorrichtung außerhalb des Pressenraums verbunden. Es ist erforderlich, das Absaugsystem von Zeit zu Zeit mit einem Reinigungsmedium zu reinigen, z. B. Wasser.It is known in tablet presses to remove the dust arising in the pressing chamber via a suitable suction system. Such a suction system usually contains a plurality of suction nozzles, which are placed at suitable locations in the press room. The suction nozzles are connected via a collecting line with a suction device outside the press room. It is necessary to clean the suction system from time to time with a cleaning medium, eg. B. water.

Es ist bekannt, dem Absaugsystem bzw. seinem Kanal- oder Leitungssystem Reinigungsdüsen zuzuordnen, die über eine Leitung mit Reinigungsmedium versorgt werden. Je größer die Anzahl der Reinigungsdüsen ist, desto besser ist das Reinigungsergebnis. Allerdings weist eine derartige Reinigungsvorrichtung einige Nachteile auf. Die Reinigungsdüsen haben aufgrund ihrer Funktionsweise keine gleichmäßige Reinigungswirkung, und in den meisten Fällen sind Sprühschatten vorhanden, in denen keine Abreinigung stattfindet. Die Wirkungsreichweite von Reinigungsdüsen ist begrenzt. Dies führt entweder zu einer sehr hohen Zahl von Reinigungsdüsen oder zu einem schlechten Reinigungsergebnis. Der Aufwand für die Versorgung der Reinigungsdüsen mit Reinigungsmedium steigt naturgemäß mit der Anzahl der Reinigungsdüsen.It is known to associate the suction system or its channel or line system cleaning nozzles, which are supplied via a line with cleaning medium. The larger the number of cleaning nozzles, the better the cleaning result. However, such a cleaning device has some disadvantages. The cleaning nozzles do not have a uniform cleaning action due to their operation, and in most cases there are spray shadows in which no cleaning takes place. The effective range of cleaning nozzles is limited. This leads either to a very high number of cleaning nozzles or to a poor cleaning result. The cost of supplying the cleaning nozzles with cleaning medium naturally increases with the number of cleaning nozzles.

Ein weiterer Nachteil des bekannten Reinigungssystems ist der benötigte Bauraum für die Reinigungskomponenten, der verhältnismäßig groß ist. Auch der Aufwand für eine Vielzahl von Reinigungsdüsen und entsprechenden Zuleitungen ist hoch. Die Reinigungsdüsen verengen darüber hinaus den Querschnitt der Leitung und können zur Verstopfung der Rohrleitung führen. Reinigungsdüsen verursachen Unebenheiten in der inneren Wandungsfläche von Leitungen und stellen daher ihrerseits ein Reinigungsproblem dar. Schließlich ist es nicht möglich, an jeder beliebigen Stelle des Absaugsystems Reinigungsdüsen anzuordnen.Another disadvantage of the known cleaning system is the required installation space for the cleaning components, which is relatively large. The cost of a variety of cleaning nozzles and corresponding leads is high. The cleaning nozzles also narrow the cross-section of the pipe and can lead to blockage of the pipe. Cleaning nozzles cause bumps in the inner wall surface of pipes and therefore in turn constitute a cleaning problem. Finally, it is not possible to arrange cleaning nozzles at any point of the exhaust system.

DE 4212 164 A1 zeigt eine vorrichtung und ein Verfahren zum. Absaugen von beim Pressen von Spanplatten entstehenden luftverunreinigungen. DE 4212 164 A1 shows an apparatus and a method for. Extraction of airborne contaminants during pressing of chipboard.

Der Erfindung liegt daher die Aufgabe zugrunde, ein Verfahren und eine Vorrichtung zur sicheren und vollständigen Reinigung des Absaugsystems in Rundläuferpressen zu schaffen.The invention is therefore based on the object to provide a method and apparatus for safe and complete cleaning of the exhaust system in rotary presses.

Diese Aufgabe wird durch die Merkmale des Patentanspruchs 1 bzw. 4 gelöst.This object is solved by the features of patent claims 1 and 4, respectively.

Beim erfindungsgemäßen Verfahren wird zumindest ein Teil des Absaugsystems mit Reinigungsflüssigkeit geflutet. Anschließend wird die Reinigungsflüssigkeit in den Pressenraum abgelassen und aus diesem entfernt. Bei der erfindungsgemäßen Vorrichtung sind zu diesem Zweck Absperrventile in den Absaugleitungen angeordnet, die mit Hilfe einer geeigneten Steuervorrichtung wahlweise geschlossen werden können. Beim Schließen dieser Sperrventile wird das Reinigungsmedium, das über einen Anschluss zugeführt wird, im Absaugsystem aufgestaut. Wird bei einer Ausgestaltung der Erfmdung hierbei ein vorgegebenes Niveau erreicht, wird die Zufuhr von Reinigungsmedium beendet. Anschließend können die Absperrventile in beliebiger Reihenfolge und auf beliebige Dauer geöffnet werden, so dass eine Strömung im Absaugsystem ausgebildet ist. Durch getaktetes Öffnen und Schließen der Absperrventile entstehen auch in den unteren Bereichen unterhalb der Absperrventile hohe Strömungsgeschwindigkeiten und Turbulenzen, die dafür sorgen, dass auch unterhalb der Absperrventile eine gute Abreinigung stattfindet. Durch Erregung der Reinigungsflüssigkeit mit Ultraschall kann die Reinigungswirkung in einer weiteren Ausgestaltung der Erfindung noch verbessert werden.In the method according to the invention, at least part of the suction system is flooded with cleaning liquid. Subsequently, the cleaning liquid is discharged into the press room and removed therefrom. In the apparatus according to the invention shut-off valves are arranged in the suction lines for this purpose, which can be optionally closed by means of a suitable control device. When closing these check valves, the cleaning medium, which is supplied via a port, dammed in the exhaust system. If, in one embodiment of the invention, a predetermined level is reached, the supply of cleaning medium is ended. Subsequently, the shut-off valves can be opened in any order and for any duration, so that a flow is formed in the exhaust system. By clocked opening and closing of the shut-off valves, high flow velocities and turbulences also occur in the lower areas below the shut-off valves, which ensure that good cleaning takes place even below the shut-off valves. By exciting the cleaning liquid with ultrasound, the Cleaning effect can be further improved in a further embodiment of the invention.

Es versteht sich, dass in dem Anschluss für Reinigungsflüssigkeit ebenfalls ein Schließventil angeordnet ist, dass von der Steuervorrichtung betätigt wird. Es wird nur geöffnet, wenn eine Reinigung beabsichtigt ist. Bevor es geöffnet wird, müssen jedoch die Sperrventile in den Absaugleitungen geschlossen werden.It is understood that in the connection for cleaning liquid also a closing valve is arranged, which is actuated by the control device. It only opens when cleaning is intended. Before it is opened, however, the check valves in the suction lines must be closed.

Mit Hilfe der Erfindung lässt sich eine gezielte Abreinigung eines oder mehrerer Stränge des Absaugsystems durch entsprechende Schaltung der Absperrventile erreichen. Wie schon erwähnt, unterstützt die Verwendung von Ultraschall die Abreinigung.With the aid of the invention, a targeted cleaning of one or more strands of the extraction system can be achieved by appropriate switching of the shut-off valves. As already mentioned, the use of ultrasound supports the cleaning.

Mit Hilfe der Erfmdung wird eine zuverlässige Abreinigung aller Oberflächen des Absaugsystems für Tablettenpressen erzielt. Durch hohe Strömungsgeschwindigkeiten und Turbulenzen in der Strömung des Reinigungsmediums lässt sich eine hohe Abreinigungswirkung erzielen. Die erfindungsgemäße Vorrichtung benötigt nur einen geringen Bauraum, da keine Reinigungsdüsen und keine einzelnen Zuleitungen zu den Düsen erforderlich sind. Der Aufwand für Reinigungsdüsen und entsprechende Leitungen entfällt. Demgegenüber hält sich der Mehraufwand für die Absperrventile in den Absaugleitungen und der entsprechenden Ansteuerung für diese in Grenzen.With the help of the invention, a reliable cleaning of all surfaces of the suction system for tablet presses is achieved. High flow velocities and turbulences in the flow of the cleaning medium make it possible to achieve a high cleaning effect. The device according to the invention requires only a small space, since no cleaning nozzles and no individual leads to the nozzles are required. The effort for cleaning nozzles and corresponding lines is eliminated. In contrast, the extra effort for the shut-off valves in the suction lines and the corresponding control for these limits.

Die Erfmdung wird nachfolgend anhand von Zeichnungen näher erläutert.

Fig. 1
zeigt äußerst schematisch ein Absaugsystem für eine Tablettenpresse nach der Erfmdung während des Absaugbetriebs.
Fig. 2
zeigt das Absaugsystem nach Fig. 1 während der Reinigung.
The invention is explained in more detail below with reference to drawings.
Fig. 1
shows very schematically a suction system for a tablet press according to the invention during the suction operation.
Fig. 2
shows the exhaust system after Fig. 1 during the cleaning.

In den Fig. 1 und 2 ist ein mit 10 bezeichnetes Absaugsystem dargestellt, mit dessen Hilfe Staub und Verunreinigungen aus einer nicht gezeigten Pressenkammer einer Rundläuferpresse entfernt werden können. In den Figuren ist weder eine Rundläuferpresse noch ein Aggregat für die Absaugung dargestellt. Man erkennt lediglich drei Absaugdüsen 12, 14, 16, die an geeigneten Orten im Pressenraum angeordnet sind. Die Absaugdüsen 12 bis 16 sind mit Absaugleitungen 18, 20, 22 verbunden, die zu einer Sammelleitung 24 geführt sind. An die Sammelleitung ist eine Zuleitung 26 für Reinigungsflüssigkeit angeschlossen, in der ein Schließventil 28 angeordnet ist. Abströmseitig von der Zuführleitung 26 ist ein Füllstandssensor 30 in der Sammelleitung 24 angeordnet.In the Fig. 1 and 2 a suction system 10 is shown, with the aid of dust and contaminants from a press chamber, not shown, a rotary press can be removed. In the figures, neither a rotary press nor an aggregate for the suction is shown. It can be seen only three suction nozzles 12, 14, 16, which are arranged at suitable locations in the press room. The suction nozzles 12 to 16 are connected to suction lines 18, 20, 22, which are guided to a collecting line 24. To the manifold a supply line 26 is connected for cleaning fluid, in which a closing valve 28 is arranged. Downstream of the supply line 26, a level sensor 30 is disposed in the manifold 24.

Den Absaugleitungen 18 bis 22 sind Absperrventile 32, 34, 36 zugeordnet. Die Ventile 28 und 32 bis 36 werden von einer geeigneten, nicht gezeigten Steuervorrichtung der Tablettenpresse betätigt. Der Füllstandssensor 30 ist ebenfalls mit der Steuervorrichtung verbunden.The suction lines 18 to 22 are associated with shut-off valves 32, 34, 36. The valves 28 and 32 to 36 are actuated by a suitable, not shown, control device of the tablet press. The level sensor 30 is also connected to the control device.

Während des Betriebs der Presse wird ein Saugdruck an der Sammelleitung 24 erzeugt, und ein geeignetes Saugaggregat saugt die Atmosphäre aus dem Pressenraum an. Dies ist durch Pfeile 38 bzw. 40 angedeutet. Ein derartiger Absaugbetrieb ist für Tablettenpressen allgemein bekannt. Hierbei sind die Absperrventile 32 bis 36, die von geeigneten Klappen gebildet sein können, geöffnet. Das Schließventil 28 ist hingegen geschlossen. Soll eine Reinigung des Absaugsystems stattfinden, werden die Absperrventile 32 bis 36 geschlossen, wie in Fig. 2 dargestellt. Das Schließventil 28 wird geöffnet. Dadurch kann Reinigungsflüssigkeit gemäß Pfeil 40 in das Absaugsystem eintreten. Die Absaugleitungen 18 bis 22 oberhalb der Absperrventile 32 bis 36 werden somit geflutet. Das Fluten wird beendet, sobald die Reinigungsflüssigkeit den Füllstandssensor 30 erreicht hat. Dieser gibt ein Signal an die nicht gezeigte Steuervorrichtung, die daraufhin das Schließventil 28 schließt und somit die weitere Zufuhr von Reinigungsflüssigkeit stoppt. Statt eines Niveausensors kann auch eine Zeitschaltung vorgesehen sein, welche das Schließventil 28 nach einer bestimmten Zeit nach dem Öffnen wieder schließt. Während des Flutungsvorganges ist das Absaugaggregat abgeschaltet. Um die Reinigungsflüssigkeit zu entfernen, werden die Absperrventile 32 bis 36 gleichzeitig oder nacheinander geöffnet. Die Reinigungsflüssigkeit fließt nach unten in den Pressenraum und reinigt die Leitungen 18 bis 22 unterhalb der Absperrventile 32 bis 36. Die in den Pressenraum geflossene Reinigungsflüssigkeit wird auf übliche Weise aus dem Pressenraum entfernt.During operation of the press, a suction pressure is generated at the manifold 24, and a suitable suction unit draws the atmosphere from the press room. This is indicated by arrows 38 and 40, respectively. Such a suction operation is well known for tablet presses. In this case, the shut-off valves 32 to 36, which may be formed by suitable flaps, are opened. The closing valve 28 is closed. If a cleaning of the exhaust system take place, the shut-off valves 32 to 36 are closed, as in Fig. 2 shown. The closing valve 28 is opened. As a result, cleaning liquid according to arrow 40 can enter the suction system. The suction lines 18 to 22 above the shut-off valves 32 to 36 are thus flooded. The flooding is stopped as soon as the cleaning liquid has reached the level sensor 30. This gives a signal to the control device, not shown, which then closes the closing valve 28 and thus stops the further supply of cleaning liquid. Instead of a level sensor, a timing circuit may be provided which closes the closing valve 28 after a certain time after opening again. During the flooding process, the suction unit is switched off. In order to remove the cleaning liquid, the shut-off valves 32 to 36 are opened simultaneously or successively. The cleaning liquid flows down into the press room and cleans the lines 18 to 22 below the shut-off valves 32 to 36. The flowed into the press room cleaning liquid is removed in the usual way from the press room.

Es ist auch möglich, die Absperrventile 32 bis 36 getaktet zu öffnen und zu schließen, um eine geeignete Strömungsgeschwindigkeit und Turbulenz auch unterhalb der Absperrventile zu erzielen, wodurch die Reinigungswirkung verbessert wird. Durch Erregung der Reinigungsflüssigkeit mit Ultraschall (nicht gezeigt) wird eine weitere Verbesserung der Reinigungswirkung erzielt.It is also possible to open and close the shut-off valves 32 to 36 in order to achieve a suitable flow velocity and turbulence also below the shut-off valves, whereby the cleaning effect is improved. By exciting the cleaning liquid with ultrasound (not shown), a further improvement of the cleaning effect is achieved.

Die Absperrventile 32 bis 36 können von sogenannten Quetschventilen gebildet sein. Quetschventile sind an sich Stand der Technik. Bei diesen wird ein flexibler Bereich einer Leitung mit Hilfe eines geeigneten Mittels mehr oder weniger abgeschnürt, um den Durchfluss zu beschränken bzw. zu unterbinden.The shut-off valves 32 to 36 may be formed by so-called pinch valves. Pinch valves are state of the art in their own right. In these, a flexible area of a conduit is more or less constricted by means of a suitable means to restrict or inhibit the flow.

Claims (7)

  1. A method for dedusting a suction system for rotary presses, wherein cleaning liquid is guided into the suction system, characterised in that the suction system is closed in the region of the press room of the press, and at least a part of the suction system is flooded with cleaning liquid, and the cleaning liquid is subsequently drained into the press room.
  2. A method according to claim 1, characterised in that flooding with cleaning liquid is stopped when the level of the cleaning liquid in the suction system has reached a predetermined value.
  3. A method according to claim 1 or 2, characterised in that the cleaning liquid in the suction system is excited by ultrasound.
  4. An apparatus for dedusting a suction system for rotary presses, wherein at least one suction nozzle within a press room is/are connected to a suction apparatus outside the press room via a suction line and a collecting line, characterised in that the suction line (18 to 22) has a cut-off valve (32 to 36), the collecting line (24) is connectable to a cleaning line (26) to which a controllable closing valve (28) is associated, and that a control device for the actuation of the cut-off valve (32 to 36) and of the closing valve (28) is provided, which sets the cut-off valve (32 to 36) into the cut-off position when the closing valve (28) is opened.
  5. An apparatus according to claim 4, characterised in that the cut-off valve (32 to 36) is arranged in the vicinity of the suction nozzles (12 to 16).
  6. An apparatus according to claim 4 or 5, characterised in that a filling level sensor (30) is associated to the collecting line (24) which is connected to the control device, and that the control device closes the closing valve when the liquid level reaches the filling level sensor (30).
  7. An apparatus according to any one of claims 4 to 6, characterised in that the control device drives the cut-off valve (32 to 36) in a clocked manner, in order to open and close it periodically.
EP10001874A 2009-03-14 2010-02-24 Method and device for cleaning a suction system for a rotary press Active EP2228145B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009013180A DE102009013180B3 (en) 2009-03-14 2009-03-14 Method and device for cleaning a suction system for a rotary press

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EP2228145A2 EP2228145A2 (en) 2010-09-15
EP2228145A3 EP2228145A3 (en) 2012-03-28
EP2228145B1 true EP2228145B1 (en) 2013-01-02

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US7381356B2 (en) * 2003-10-02 2008-06-03 Kikusui Seisakusho, Ltd. Rotary powder compression molding machine
US7874656B2 (en) * 2004-12-10 2011-01-25 Canon Finetech Inc. Ink-feeding device and pressure-generating method
WO2008029884A1 (en) * 2006-09-08 2008-03-13 Nikon Corporation Cleaning member, cleaning method and device manufacturing method
US20090013989A1 (en) * 2007-05-17 2009-01-15 Brown Stephen L Lineal slot ventilator with internal cleaning system and adjustable baffle

Also Published As

Publication number Publication date
EP2228145A2 (en) 2010-09-15
EP2228145A3 (en) 2012-03-28
DE102009013180B3 (en) 2010-07-01
US20100229746A1 (en) 2010-09-16

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