EP2209354A3 - Generator for generating a bundled plasma jet - Google Patents

Generator for generating a bundled plasma jet Download PDF

Info

Publication number
EP2209354A3
EP2209354A3 EP10150084A EP10150084A EP2209354A3 EP 2209354 A3 EP2209354 A3 EP 2209354A3 EP 10150084 A EP10150084 A EP 10150084A EP 10150084 A EP10150084 A EP 10150084A EP 2209354 A3 EP2209354 A3 EP 2209354A3
Authority
EP
European Patent Office
Prior art keywords
electrode
pin
jet generator
whose
sheath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10150084A
Other languages
German (de)
French (fr)
Other versions
EP2209354A2 (en
EP2209354B1 (en
Inventor
Michael Bisges
Uwe Hartmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Relyon Plasma GmbH
Original Assignee
Reinhausen Plasma GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE202009000537U external-priority patent/DE202009000537U1/en
Priority claimed from DE102009004968A external-priority patent/DE102009004968B4/en
Application filed by Reinhausen Plasma GmbH filed Critical Reinhausen Plasma GmbH
Publication of EP2209354A2 publication Critical patent/EP2209354A2/en
Publication of EP2209354A3 publication Critical patent/EP2209354A3/en
Application granted granted Critical
Publication of EP2209354B1 publication Critical patent/EP2209354B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3468—Vortex generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Abstract

Die Erfindung betrifft einen Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls durch Lichtbogenentladung unter Zufuhr eines Arbeitsgases umfassend eine Stiftelektrode, einen konzentrisch zu der Stiftelektrode angeordneten hohlzylindrischen, gegenüber der Stiftelektrode isolierten Mantel aus elektrisch leitendem Material, an dessen einer Stirnseite eine ringförmige Elektrode angeordnet ist, die eine Düsenöffnung begrenzt, deren Durchmesser kleiner als der Durchmesser des hohlzylindrischen Mantels ist, der an der gegenüberliegender Stirnseite eine Zufuhr für das Arbeitsgas aufweist sowie eine Spannungsquelle zum Anlegen einer Spannung zwischen Stift- und Ringelektrode, wobei der Mantel und/oder die Ringelektrode geerdet sind.The invention relates to a jet generator for generating a collimated plasma beam by arc discharge with supply of a working gas comprising a pin electrode, a concentrically arranged to the pin electrode hollow cylindrical, insulated from the pin electrode sheath of electrically conductive material, on whose one end face an annular electrode is arranged, the one Limited nozzle opening whose diameter is smaller than the diameter of the hollow cylindrical shell having a supply for the working gas at the opposite end face and a voltage source for applying a voltage between the pin and ring electrode, wherein the sheath and / or the ring electrode are grounded.

Um einen derartigen Strahlgenerator zu schaffen, der mit einer niedrigen Zünd- und Betriebsspannung arbeitet, der weniger Verlustwärme erzeugt und damit die behandelten Oberflächen weniger stark thermisch belastet und dessen Leistungsabgabe während des Betriebs praktisch konstant ist, wir in dem Strahlgenerator ein asymmetrisches Wärmeprofil zu erzeugt, wonach der Großteil der Verlustwärme erst an der Düsenöffnung freigesetzt wird, während die Stiftelektrode thermisch lediglich außerordentlich gering belastet wird. Zugleich wird der Widerstand zwischen der Stift- und Ringelektrode reduziert.

Figure imgaf001
In order to provide such a jet generator which operates with a low ignition and operating voltage, which generates less heat loss and thus less thermally stressed the treated surfaces and whose power output during operation is practically constant, we generate in the jet generator an asymmetric thermal profile, according to which the majority of the heat loss is released only at the nozzle opening, while the pin electrode is thermally loaded only extremely low. At the same time the resistance between the pin and ring electrode is reduced.
Figure imgaf001
EP10150084.1A 2009-01-14 2010-01-05 Generator for generating a bundled plasma jet Not-in-force EP2209354B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202009000537U DE202009000537U1 (en) 2009-01-14 2009-01-14 Beam generator for generating a collimated plasma jet
DE102009004968A DE102009004968B4 (en) 2009-01-14 2009-01-14 Beam generator for generating a collimated plasma jet

Publications (3)

Publication Number Publication Date
EP2209354A2 EP2209354A2 (en) 2010-07-21
EP2209354A3 true EP2209354A3 (en) 2012-01-11
EP2209354B1 EP2209354B1 (en) 2014-04-09

Family

ID=41796222

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10150084.1A Not-in-force EP2209354B1 (en) 2009-01-14 2010-01-05 Generator for generating a bundled plasma jet

Country Status (2)

Country Link
EP (1) EP2209354B1 (en)
DK (1) DK2209354T3 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011076806A1 (en) 2011-05-31 2012-12-06 Leibniz-Institut für Plasmaforschung und Technologie e.V. Apparatus and method for producing a cold, homogeneous plasma under atmospheric pressure conditions
CN109504970B (en) * 2018-12-14 2024-01-09 四川大学 Implant activation hydrophilic device
US11533802B1 (en) * 2022-04-23 2022-12-20 Janak H. Handa Direct-current plasma torch apparatus

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2951143A (en) * 1958-09-25 1960-08-30 Union Carbide Corp Arc torch
US3007072A (en) * 1959-01-29 1961-10-31 Gen Electric Radial type arc plasma generator
US3740522A (en) * 1971-04-12 1973-06-19 Geotel Inc Plasma torch, and electrode means therefor
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge
US6355312B1 (en) * 1998-10-16 2002-03-12 Cottin Development, Inc. Methods and apparatus for subjecting a rod-like or thread-like material to a plasma treatment
WO2007040583A1 (en) * 2005-09-30 2007-04-12 Phoenix Solutions Co. Plasma torch with corrosive protected collimator
US20080050291A1 (en) * 2004-10-18 2008-02-28 Yutaka Electronics Industry Co.,Ltd. Plasma Generation Device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2951143A (en) * 1958-09-25 1960-08-30 Union Carbide Corp Arc torch
US3007072A (en) * 1959-01-29 1961-10-31 Gen Electric Radial type arc plasma generator
US3740522A (en) * 1971-04-12 1973-06-19 Geotel Inc Plasma torch, and electrode means therefor
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge
US6355312B1 (en) * 1998-10-16 2002-03-12 Cottin Development, Inc. Methods and apparatus for subjecting a rod-like or thread-like material to a plasma treatment
US20080050291A1 (en) * 2004-10-18 2008-02-28 Yutaka Electronics Industry Co.,Ltd. Plasma Generation Device
WO2007040583A1 (en) * 2005-09-30 2007-04-12 Phoenix Solutions Co. Plasma torch with corrosive protected collimator

Also Published As

Publication number Publication date
EP2209354A2 (en) 2010-07-21
EP2209354B1 (en) 2014-04-09
DK2209354T3 (en) 2014-07-14

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