EP2200838A1 - Composition and method for providing a patterned metal layer having high conductivity - Google Patents
Composition and method for providing a patterned metal layer having high conductivityInfo
- Publication number
- EP2200838A1 EP2200838A1 EP08842620A EP08842620A EP2200838A1 EP 2200838 A1 EP2200838 A1 EP 2200838A1 EP 08842620 A EP08842620 A EP 08842620A EP 08842620 A EP08842620 A EP 08842620A EP 2200838 A1 EP2200838 A1 EP 2200838A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- catalyst
- patterned
- metal
- fraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 130
- 239000002184 metal Substances 0.000 title claims abstract description 130
- 238000000034 method Methods 0.000 title claims abstract description 107
- 239000000203 mixture Substances 0.000 title description 16
- 239000003054 catalyst Substances 0.000 claims abstract description 178
- 239000000758 substrate Substances 0.000 claims abstract description 101
- 238000007747 plating Methods 0.000 claims abstract description 38
- 238000001931 thermography Methods 0.000 claims abstract description 38
- 238000012546 transfer Methods 0.000 claims description 133
- 239000002318 adhesion promoter Substances 0.000 claims description 82
- 239000011521 glass Substances 0.000 claims description 63
- 230000003667 anti-reflective effect Effects 0.000 claims description 33
- 239000003795 chemical substances by application Substances 0.000 claims description 30
- 229920005596 polymer binder Polymers 0.000 claims description 27
- 239000002491 polymer binding agent Substances 0.000 claims description 27
- 229910052802 copper Inorganic materials 0.000 claims description 24
- -1 silicate hydroxides Chemical class 0.000 claims description 24
- 239000000975 dye Substances 0.000 claims description 22
- 229920005862 polyol Polymers 0.000 claims description 22
- 150000004703 alkoxides Chemical class 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 21
- 150000003077 polyols Chemical class 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 17
- 229910052759 nickel Inorganic materials 0.000 claims description 17
- 229910000000 metal hydroxide Inorganic materials 0.000 claims description 16
- 150000004692 metal hydroxides Chemical class 0.000 claims description 16
- 229910052709 silver Inorganic materials 0.000 claims description 16
- 229910045601 alloy Inorganic materials 0.000 claims description 14
- 239000000956 alloy Substances 0.000 claims description 14
- 239000006100 radiation absorber Substances 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 239000002923 metal particle Substances 0.000 claims description 11
- 150000004706 metal oxides Chemical class 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 9
- 229910044991 metal oxide Inorganic materials 0.000 claims description 9
- 150000003839 salts Chemical class 0.000 claims description 9
- 239000006229 carbon black Substances 0.000 claims description 8
- 239000000843 powder Substances 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229910052707 ruthenium Inorganic materials 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000001404 mediated effect Effects 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- 239000000615 nonconductor Substances 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 330
- 239000002585 base Substances 0.000 description 68
- 239000010408 film Substances 0.000 description 63
- 239000010949 copper Substances 0.000 description 50
- 238000003384 imaging method Methods 0.000 description 39
- 229920001577 copolymer Polymers 0.000 description 38
- 125000000217 alkyl group Chemical group 0.000 description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 24
- 239000000523 sample Substances 0.000 description 24
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 21
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 21
- 238000009713 electroplating Methods 0.000 description 21
- 229920000642 polymer Polymers 0.000 description 18
- 239000011230 binding agent Substances 0.000 description 17
- 239000004615 ingredient Substances 0.000 description 17
- 239000000243 solution Substances 0.000 description 17
- 238000000576 coating method Methods 0.000 description 14
- 230000005855 radiation Effects 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 12
- 229920000728 polyester Polymers 0.000 description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 239000011651 chromium Substances 0.000 description 11
- 239000002245 particle Substances 0.000 description 11
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 10
- 238000000151 deposition Methods 0.000 description 10
- 229920000058 polyacrylate Polymers 0.000 description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 9
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 9
- 239000002253 acid Substances 0.000 description 9
- 150000002739 metals Chemical class 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 8
- 239000000178 monomer Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000007772 electroless plating Methods 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- 239000010944 silver (metal) Substances 0.000 description 7
- 229920000178 Acrylic resin Polymers 0.000 description 6
- 239000004925 Acrylic resin Substances 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- 235000019241 carbon black Nutrition 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 6
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 description 6
- 239000005020 polyethylene terephthalate Substances 0.000 description 6
- 229920002689 polyvinyl acetate Polymers 0.000 description 6
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 5
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 5
- 239000005977 Ethylene Substances 0.000 description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 5
- 239000011118 polyvinyl acetate Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 229920002554 vinyl polymer Polymers 0.000 description 5
- CBECDWUDYQOTSW-UHFFFAOYSA-N 2-ethylbut-3-enal Chemical compound CCC(C=C)C=O CBECDWUDYQOTSW-UHFFFAOYSA-N 0.000 description 4
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 4
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 4
- 239000004721 Polyphenylene oxide Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 125000003710 aryl alkyl group Chemical group 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 229910052906 cristobalite Inorganic materials 0.000 description 4
- 229920001519 homopolymer Polymers 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 239000011572 manganese Substances 0.000 description 4
- 229910021645 metal ion Inorganic materials 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 4
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 4
- 239000000049 pigment Substances 0.000 description 4
- 229920000570 polyether Polymers 0.000 description 4
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 229910052682 stishovite Inorganic materials 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000011135 tin Substances 0.000 description 4
- 229910052905 tridymite Inorganic materials 0.000 description 4
- 229920006163 vinyl copolymer Polymers 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910052726 zirconium Inorganic materials 0.000 description 4
- KTEFLEFPDDQMCB-UHFFFAOYSA-N 1,4-bis(4-butylanilino)-5,8-dihydroxyanthracene-9,10-dione Chemical compound C1=CC(CCCC)=CC=C1NC(C=1C(=O)C2=C(O)C=CC(O)=C2C(=O)C=11)=CC=C1NC1=CC=C(CCCC)C=C1 KTEFLEFPDDQMCB-UHFFFAOYSA-N 0.000 description 3
- RKJUIXBNRJVNHR-UHFFFAOYSA-N 3H-indole Chemical compound C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 3
- 239000011358 absorbing material Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 125000005678 ethenylene group Chemical class [H]C([*:1])=C([H])[*:2] 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000009472 formulation Methods 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 229920002521 macromolecule Polymers 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920000767 polyaniline Polymers 0.000 description 3
- 229920000128 polypyrrole Polymers 0.000 description 3
- 229920000123 polythiophene Polymers 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000012713 reactive precursor Substances 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000000527 sonication Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 229920001909 styrene-acrylic polymer Polymers 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- ZORQXIQZAOLNGE-UHFFFAOYSA-N 1,1-difluorocyclohexane Chemical compound FC1(F)CCCCC1 ZORQXIQZAOLNGE-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 2
- XZIIFPSPUDAGJM-UHFFFAOYSA-N 6-chloro-2-n,2-n-diethylpyrimidine-2,4-diamine Chemical compound CCN(CC)C1=NC(N)=CC(Cl)=N1 XZIIFPSPUDAGJM-UHFFFAOYSA-N 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 2
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 2
- 229910003202 NH4 Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 229910020615 PbO—SiO2 Inorganic materials 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- 229920006243 acrylic copolymer Polymers 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229960002887 deanol Drugs 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 125000005842 heteroatom Chemical group 0.000 description 2
- 239000004816 latex Substances 0.000 description 2
- 229920000126 latex Polymers 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 150000002905 orthoesters Chemical class 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 125000005702 oxyalkylene group Chemical group 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- 150000003738 xylenes Chemical class 0.000 description 2
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- 239000001211 (E)-4-phenylbut-3-en-2-one Substances 0.000 description 1
- HDTIFOGXOGLRCB-VVGYGEMISA-N 2-[2-[(2r,3r)-3,4-bis(2-hydroxyethoxy)oxolan-2-yl]-2-(2-hydroxyethoxy)ethoxy]ethyl (z)-octadec-9-enoate Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)OCCOCC(OCCO)[C@H]1OCC(OCCO)[C@H]1OCCO HDTIFOGXOGLRCB-VVGYGEMISA-N 0.000 description 1
- FAFGMAGIYHHRKN-UHFFFAOYSA-N 2-diphenylphosphanylethyl(diphenyl)phosphane;palladium Chemical compound [Pd].C=1C=CC=CC=1P(C=1C=CC=CC=1)CCP(C=1C=CC=CC=1)C1=CC=CC=C1.C=1C=CC=CC=1P(C=1C=CC=CC=1)CCP(C=1C=CC=CC=1)C1=CC=CC=C1 FAFGMAGIYHHRKN-UHFFFAOYSA-N 0.000 description 1
- SNZYOYGFWBZAQY-UHFFFAOYSA-N 2-ethyl-2-(hydroxymethyl)propane-1,3-diol;2-methyloxirane Chemical class CC1CO1.CCC(CO)(CO)CO SNZYOYGFWBZAQY-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- QWGRWMMWNDWRQN-UHFFFAOYSA-N 2-methylpropane-1,3-diol Chemical compound OCC(C)CO QWGRWMMWNDWRQN-UHFFFAOYSA-N 0.000 description 1
- PYSRRFNXTXNWCD-UHFFFAOYSA-N 3-(2-phenylethenyl)furan-2,5-dione Chemical compound O=C1OC(=O)C(C=CC=2C=CC=CC=2)=C1 PYSRRFNXTXNWCD-UHFFFAOYSA-N 0.000 description 1
- FMGBDYLOANULLW-UHFFFAOYSA-N 3-isocyanatopropyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CCCN=C=O FMGBDYLOANULLW-UHFFFAOYSA-N 0.000 description 1
- URDOJQUSEUXVRP-UHFFFAOYSA-N 3-triethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CCO[Si](OCC)(OCC)CCCOC(=O)C(C)=C URDOJQUSEUXVRP-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- AWZSJBDJHOOBGX-UHFFFAOYSA-N 4-[2-[2-[2-chloro-3-[2-[1,1-dimethyl-3-(4-sulfonatobutyl)benzo[e]indol-3-ium-2-yl]ethenyl]cyclohex-2-en-1-ylidene]ethylidene]-1,1-dimethyl-3h-benzo[e]indol-3-ium-3-yl]butane-1-sulfonate Chemical compound OS(=O)(=O)CCCCN1C2=CC=C3C=CC=CC3=C2C(C)(C)\C1=C/C=C\1C(Cl)=C(\C=C\C=2C(C3=C4C=CC=CC4=CC=C3[N+]=2CCCCS([O-])(=O)=O)(C)C)CCC/1 AWZSJBDJHOOBGX-UHFFFAOYSA-N 0.000 description 1
- FPJPAIQDDFIEKJ-UHFFFAOYSA-N 4-trimethoxysilylbutanenitrile Chemical compound CO[Si](OC)(OC)CCCC#N FPJPAIQDDFIEKJ-UHFFFAOYSA-N 0.000 description 1
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- 229910018404 Al2 O3 Inorganic materials 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 239000004970 Chain extender Substances 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 239000004971 Cross linker Substances 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- 229910017061 Fe Co Inorganic materials 0.000 description 1
- CTKINSOISVBQLD-UHFFFAOYSA-N Glycidol Chemical compound OCC1CO1 CTKINSOISVBQLD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229920005692 JONCRYL® Polymers 0.000 description 1
- 229920005730 JONCRYL® 63 Polymers 0.000 description 1
- 229920005479 Lucite® Polymers 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- 229920000147 Styrene maleic anhydride Polymers 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000004775 Tyvek Substances 0.000 description 1
- 229920000690 Tyvek Polymers 0.000 description 1
- 229910000756 V alloy Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- AVZBBZGFGVNAQU-UHFFFAOYSA-N [Fe+2].[Co+2].[O-][Cr]([O-])=O.[O-][Cr]([O-])=O Chemical compound [Fe+2].[Co+2].[O-][Cr]([O-])=O.[O-][Cr]([O-])=O AVZBBZGFGVNAQU-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 150000001241 acetals Chemical class 0.000 description 1
- XREZMAAQVYVESP-UHFFFAOYSA-N acetyloxymethyl 2-[n-[2-(acetyloxymethoxy)-2-oxoethyl]-2-[2-[2-[bis[2-(acetyloxymethoxy)-2-oxoethyl]amino]-4-fluorophenoxy]ethoxy]-5-fluoroanilino]acetate Chemical compound CC(=O)OCOC(=O)CN(CC(=O)OCOC(C)=O)C1=CC(F)=CC=C1OCCOC1=CC=C(F)C=C1N(CC(=O)OCOC(C)=O)CC(=O)OCOC(C)=O XREZMAAQVYVESP-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 150000001253 acrylic acids Chemical class 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000008346 aqueous phase Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- GDCXBZMWKSBSJG-UHFFFAOYSA-N azane;4-methylbenzenesulfonic acid Chemical compound [NH4+].CC1=CC=C(S([O-])(=O)=O)C=C1 GDCXBZMWKSBSJG-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- WXNOJTUTEXAZLD-UHFFFAOYSA-L benzonitrile;dichloropalladium Chemical compound Cl[Pd]Cl.N#CC1=CC=CC=C1.N#CC1=CC=CC=C1 WXNOJTUTEXAZLD-UHFFFAOYSA-L 0.000 description 1
- 229930008407 benzylideneacetone Natural products 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical group 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- JGDFBJMWFLXCLJ-UHFFFAOYSA-N copper chromite Chemical compound [Cu]=O.[Cu]=O.O=[Cr]O[Cr]=O JGDFBJMWFLXCLJ-UHFFFAOYSA-N 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000013530 defoamer Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- 238000007046 ethoxylation reaction Methods 0.000 description 1
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 239000007850 fluorescent dye Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- WOLATMHLPFJRGC-UHFFFAOYSA-N furan-2,5-dione;styrene Chemical compound O=C1OC(=O)C=C1.C=CC1=CC=CC=C1 WOLATMHLPFJRGC-UHFFFAOYSA-N 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 150000002314 glycerols Chemical class 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229920000578 graft copolymer Polymers 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 239000003906 humectant Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 150000002924 oxiranes Chemical class 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920005646 polycarboxylate Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- YQBUFTPPJRMFNN-UHFFFAOYSA-M potassium 1-(dimethylamino)ethyl ethyl phosphate Chemical compound P(=O)(OCC)([O-])OC(C)N(C)C.[K+] YQBUFTPPJRMFNN-UHFFFAOYSA-M 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 229920005604 random copolymer Polymers 0.000 description 1
- 229920003987 resole Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229940035044 sorbitan monolaurate Drugs 0.000 description 1
- 239000001593 sorbitan monooleate Substances 0.000 description 1
- 229940035049 sorbitan monooleate Drugs 0.000 description 1
- 235000011069 sorbitan monooleate Nutrition 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 1
- KNANANSBRPCBAH-UHFFFAOYSA-N tetraoctadecylazanium Chemical compound CCCCCCCCCCCCCCCCCC[N+](CCCCCCCCCCCCCCCCCC)(CCCCCCCCCCCCCCCCCC)CCCCCCCCCCCCCCCCCC KNANANSBRPCBAH-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical class [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- BWHOZHOGCMHOBV-BQYQJAHWSA-N trans-benzylideneacetone Chemical compound CC(=O)\C=C\C1=CC=CC=C1 BWHOZHOGCMHOBV-BQYQJAHWSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000012463 white pigment Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
- B41M5/382—Contact thermal transfer or sublimation processes
- B41M5/38207—Contact thermal transfer or sublimation processes characterised by aspects not provided for in groups B41M5/385 - B41M5/395
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
- B41M5/382—Contact thermal transfer or sublimation processes
- B41M5/38207—Contact thermal transfer or sublimation processes characterised by aspects not provided for in groups B41M5/385 - B41M5/395
- B41M5/38214—Structural details, e.g. multilayer systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
- B41M5/382—Contact thermal transfer or sublimation processes
- B41M5/392—Additives, other than colour forming substances, dyes or pigments, e.g. sensitisers, transfer promoting agents
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
- H05K3/046—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0073—Shielding materials
- H05K9/0094—Shielding materials being light-transmitting, e.g. transparent, translucent
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0528—Patterning during transfer, i.e. without preformed pattern, e.g. by using a die, a programmed tool or a laser
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/207—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a prefabricated paste pattern, ink pattern or powder pattern
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
Definitions
- the invention relates to methods for providing conducting metal patterns for electrical applications.
- Electromagnetic interference shields and touch screens for light transmissive surfaces typically include a conducting metal mesh mounted on a substrate.
- the mesh allows a substantial portion of visible light to pass, while shielding other electromagnetic radiation.
- There are a variety of methods available to manufacture such metal mesh articles For instance, US 6,717,048 discloses an electromagnetic shielding plate having a glass substrate and a geometric pattern formed on the substrate in an off-set printing process. New methods useful for providing conducting metal patterns are needed that allow high resolution and precise digital control of the pattern being formed; for instance with a capability to prepare mesh having fine lines, down to10 micron line-width.
- One embodiment is a method for making a patterned metal layer having high conductivity comprising: providing a patterned substrate comprising a patterned catalyst layer on a base substrate; said patterned substrate made by a thermal imaging method comprising:
- a thermal transfer donor comprising a base film and a catalyst transfer layer
- the catalyst transfer layer comprises: (i) a catalyst fraction; optionally (ii) an adhesion promoter fraction; and, optionally and independently, (iii) a polymer binder fraction;
- thermal transfer donor comprising a base film, a catalyst transfer layer (A), and a LTHC layer interposed between said base film and said catalyst transfer layer (A), said catalyst transfer layer (A) comprising: (i) about 1.0 to about 99 wt % of a catalyst fraction (A), based on the total weight of the catalyst layer, said catalyst fraction comprising metal particles selected from Ag, Cu, and alloys thereof;
- Another embodiment is a thermal transfer donor comprising, in layered sequence, a base film, a catalyst transfer layer (B) and an adhesion promoter layer, said catalyst transfer layer (B) comprising:
- a catalyst fraction (i) about 1.0 to about 99 wt % of a catalyst fraction, based on the total weight of the catalyst layer, said catalyst fraction comprising metal particles selected from Ag, Cu, and alloys thereof; (iii) about 1.0 to about 99 wt % of a polymer binder; and wherein the adhesion promoter layer comprises material selected from glass frit; and metal hydroxides and alkoxides.
- Another embodiment is an electronic device having a patterned metal layer on a substrate, said substrate substantially transparent to visible light; said patterned metal layer comprising, in layered sequence on said substrate: an adhesion promoter layer, a catalyst layer, and a plated metal layer; and said patterned metal layer having at least one line of width of about 1 millimeter or less.
- Figure 1A and B are cross-sectional views of various thermal imaging donors 100 in accordance with embodiments of the invention.
- Figure 2A is a cross-sectional view of thermal imaging receiver 200 having a receiver base layer 202.
- Figure 2B is a cross-sectional view of a receiver 200 having a patterned black layer 204.
- Figure 3 illustrates the laser-mediated transfer process for preparing patterned substrates.
- Figures 4A and B illustrate separation of spent thermal transfer donor and receiver elements after thermal transfer of the patterned catalyst layer.
- Figure 5 is a side-view of a patterned metal layer provided one embodiment of the invention.
- Figure 6 is a photomicrograph of a patterned metal layer.
- Figure 7 shows a photomicrograph of a plated pattern within the bounds of a patterned black layer provided by the method of the invention.
- the terms encompass specifically the homopolymers and copolymers of methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, (meth)acrylic acid and glycidyl (meth)acrylate.
- copolymer herein encompasses polymers derived from polymerization of two or more monomers, unless specifically defined otherwise.
- the term (meth)acrylic acid encompasses both methacrylic acid and acrylic acid.
- (meth)acrylate encompasses methacrylate and acrylate.
- styrene acrylic polymers “acrylic styrene” and “styrene acrylic” are synonymous and encompass copolymers of the above described “acrylic resins” with styrene and substituted styrene monomers, for instance alpha-methyl styrene.
- styrene acrylic polymers “acrylic styrene” and “styrene acrylic” are synonymous and encompass copolymers of the above described “acrylic resins” with styrene and substituted styrene monomers, for instance alpha-methyl styrene.
- mesh herein refers to a weblike pattern or construction.
- a mesh includes, for instance, a free-standing screen, and a weblike pattern adhered or mounted on a base layer.
- thermo imaging donor and “thermal transfer donor” may be used interchangeably herein, and are intended to be synonymous.
- One embodiment of the invention is a method for making a patterned metal layer having high conductivity.
- the method requires providing a patterned substrate comprising a patterned catalyst layer on a base substrate.
- the embodiment requires the patterned substrate be made by a thermal imaging method comprising:
- a thermal transfer donor comprising a base film and a catalyst transfer layer
- the catalyst layer comprises: (i) a catalyst fraction; optionally (ii) an adhesion promoter fraction; and, optionally and independently, (iii) a polymer binder fraction.
- contacting the donor with a receiver wherein the receiver comprises a base layer;
- the patterned metal layer provided by the method can be in the form of a metal mesh adhered to the substrate or, if so desired, detached from the substrate.
- thermal transfer donor required for the thermal imaging method; followed by the details of the thermal imagining method; and the plating step; to provide a patterned metal layer having high conductivity.
- the thermal transfer donor comprises, in layered sequence, a base film, and optional LTHC layer, a catalyst transfer layer and an optional protective sthppable cover layer.
- Other embodiments can include one or more additional layers interposed between the base film and the catalyst transfer layer and/or on top of the metal transfer layer.
- one or more other conventional thermal transfer donor element layers can be included in the thermal imaging donor, including but not limited to an interlayer, primer layer, release layer, ejection layer, thermal insulating layer, underlayer, adhesive layer, humectant layer, and light attenuating layer.
- FIG. 1A is a cross-sectional view of a thermal imaging donor 100 in accordance with one embodiment of the invention.
- Thermal imaging donor 100 comprises base film 102, and a catalyst layer 106 on the surface of the base film 102.
- Base film 102 provides support to the other layers of thermal imaging donor 100.
- Base film 102 comprises a flexible polymer film that is preferably transparent.
- a suitable thickness for base film 102 is about 25 ⁇ m to about 200 ⁇ m, although thicker or thinner support layers may be used.
- the base film may be stretched by standard processes known in the art for producing oriented films and one or more other layers, such as a light-to-heat-conversion (LTHC) layer, may be coated onto the base film prior to completion of the stretching process.
- LTHC light-to-heat-conversion
- Preferred base films comprise a material selected from the group consisting of: polyethylene terephthalate (PET), polyethylene naphthalate (PEN), triacetyl cellulose and polyimide.
- a light-attenuating agent (absorber or diffuser) may be present in a discrete layer or incorporated in one of the other functional layers of the thermal transfer donor, such as the base film, the LTHC layer or the catalyst layer.
- the base film comprises a small amount (typically 0.2% to 0.5% by weight of the base film) of a light-attenuating agent such as a dye, which can assist in the focusing of the radiation source onto the radiation-absorber in the LTHC layer during the thermal imaging step, thereby improving the efficiency of the heat transfer.
- the base film may be modified to assist in the focusing of a laser radiation source in which the equipment comprises an imaging laser and a non-imaging laser, and wherein the non-imaging laser has a light detector that is in communication with the imaging laser.
- the wavelength ranges at which the imaging and non-imaging laser operate (typically in the range from about 350 nm to about 1500 nm) determine the wavelength ranges in which the absorber(s) and/or diffuser(s) are active and inactive.
- the absorber and/or diffuser operate to absorb or diffuse light in the 670 nm region, rather than in the 830 nm region.
- the light attenuating agent preferably absorbs or diffuses light in the visible region, and in one embodiment absorbs around 670 nm.
- Suitable light-attenuating agents are well known in the art and include the commercially available Disperse Blue 60 and Solvent Green 28 dyes and carbon black.
- the amount of light-attenuating agent is sufficient to achieve an optical density (OD) of 0.1 or greater at some wavelength of about 400 to about 750 nm, more preferably about 0.3 to about 1.5.
- OD optical density
- LTHC Light-to-heat conversion layer
- the thermal imaging donor may, optionally, have a light-to-heat- conversion layer (LTHC), interposed between the base film and the other layers as illustrated in Figure 1 B.
- Thermal imaging donor 100 comprises a LTHC layer 108 interposed between base film 102 and the catalyst layer 106.
- LTHC layer 108 is incorporated as a part of thermal imaging donor 100 for radiation-induced thermal transfer to couple the energy of light radiated from a light-emitting source into the thermal transfer donor.
- the radiation absorber in the LTHC layer (or other layers) absorbs light in the infrared, visible, and/or ultraviolet regions of the electromagnetic spectrum and converts the absorbed light into heat.
- the radiation absorber is typically highly absorptive, providing an OD at the wavelength of the imaging radiation of 0.1 to 3 or higher and preferably 0.2 to 2.
- Suitable radiation absorbing materials can include, for example, dyes (e.g., visible dyes, ultraviolet dyes, infrared dyes, fluorescent dyes, and radiation- polarizing dyes), pigments, metals, metal compounds, metallized films, and other suitable absorbing materials.
- Suitable radiation absorbers and binders for LTHC layers are well-known in the art, and lists and references can be found, for example, in PCT/US05/38010; PCT/US05/38009; US6,228,555 B1 ; Matsuoka, M., "Infrared Absorbing Materials", Plenum Press, New York, 1990; and Matsuoka, M., Absorption Spectra of Dyes for Diode Lasers, Bunshin Publishing Co., Tokyo, 1990.
- Preferred classes of near-infrared dyes for LTHC layers are cyanine compounds selected from the group consisting of: indocyanines, phthalocyanines including polysubstituted phthalocyanines and metal-containing phthalocyanines, and merocyanines.
- Sources of suitable infrared-absorbing dyes include H. W. Sands Corporation (Jupiter, FL, US), American Cyanamid Co. (Wayne, NJ), Cytec Industries (West Paterson, NJ), Glendale Protective Technologies, Inc. (Lakeland, FL) and Hampford Research Inc. (Stratford, CT).
- Preferred dyes for LTHC, carrier layers and transfer layers are 3H-indolium, 2-[2-[2-chloro-3-[(1 ,3- dihydro-1 ,3,3-trimethyl-2H-indol-2-ylidene)ethylidene]-1 -cyclopenten-1 - yl]ethenyl]-1 ,3,3-trimethyl-, salt with thfluoromethanesulfonic acid (1 :1 ) having CAS No.
- An LTHC layer may include a particulate radiation absorber in a binder.
- suitable pigments include carbon black and graphite.
- the weight percent of the radiation absorber in the layer, excluding the solvent in the calculation of weight percent, is generally from 1 wt% to 85 wt%, preferably from 3 wt% to 60 wt%, and most preferably from 5 wt% to 40 wt%, depending on the particular radiation absorber(s) and binder(s) used in the LTHC layer.
- Suitable binders for use in the LTHC layer include film-forming polymers, such as, for example, phenolic resins (e.g., novolak and resole resins), polyvinyl butyral resins, polyvinyl acetates, polyvinyl acetals, polyvinylidene chlorides, polyacrylates, and styrene acrylics.
- the % transmittance of the LTHC layer is affected by the identity and amount of the radiation-absorber and the thickness of the LTHC layer.
- the LTHC layer preferably exhibits radiation transmission of about 20% to about 80%, more preferably of about 40% to about 50%, at the wavelength of the imaging radiation used in the thermal transfer imaging process.
- the weight ratio of radiation absorber to binder is generally from about 5:1 to about 1 :1000 by weight, preferably about 2:1 to about 1 :100 by weight.
- a polymeric or organic LTHC layer is coated to a thickness of 0.05 Dm to 20 Dm, preferably, 0.05 Dm to 10 Dm, and, more preferably, 0.10 Dm to 5 Dm.
- the LTHC layer may include a broad variety of water-soluble or water-dispersible polymeric binders with compositions as disclosed in the above referenced PCT/US05/38010 and
- the average particle size of a water-dispersible binder in its aqueous phase is less than 0.1 micron, and more preferably less than 0.05 micron, and preferably having a narrow particle size distribution.
- Preferred water-soluble or water-dispersible polymeric binders for LTHC layers useful in the invention are those selected from the group: acrylic resins and hydrophilic polyesters and more preferably from sulphonated polyesters as described in the above referenced PCT/US05/38009.
- maleic anhydride polymers and copolymers including those comprising functionality provided by treating the maleic anhydride polymers and/or copolymers with alcohols, amines, and alkali metal hydroxides.
- Specific families of maleic anhydride based copolymers comprise the structure represented by formula (III)
- R 2 i and R 22 can be the same or different, and individually are hydrogen, alkyl, aryl, aralkyl, cycloalkyl, and halogen, provided that one of R 2 i and R 22 is an aromatic group;
- R31, R32, R41 and R 42 are the same or different groups, which can be hydrogen or alkyl of one to about five carbon atoms;
- R50 is functional group selected from: a) alkyl, aralkyl, alkyl-substituted aralkyl radicals containing from one to about twenty carbon atoms; b) oxyalkylated derivatives of alkyl, aralkyl, alkyl-substituted aralkyl radicals containing from about two to about four carbon atoms in each oxyalkylene group, which can be of one to about twenty repeating units; c) oxyalkylated derivatives of alkyl, aralkyl, alkyl-substituted aralkyl radicals containing from about two to about four carbon atoms in each oxyalkylene group, which can be of one to about six repeating units; d) at least one unsaturated moiety; e) at least one heteroatom moiety; f) alkaline molecules capable of forming salts selected from Li, Na, K and NH 4 + , and g) combinations thereof.
- a preferred maleic anhydride polymer for LTHC layers comprises a copolymer of formula (III), wherein R 2 i, R31, R32, R33, R41, R42, R43, are individually hydrogen, R22 is phenyl, and R50 is 2-(n-butoxy)ethyl.
- a specific example of a maleic anhydride copolymer useful in LTHC layers is a styrene maleic anhydride copolymer such as SMA 1440H, a product of Sartomer Corporation, Exton, PA.
- a preferred LTHC layer comprises one or more water-soluble or water-dispersible radiation-absorbing cyanine compound(s) selected from the group consisting of: indocyanines, phthalocyanines including polysubstituted phthalocyanines and metal-containing phthalocyanines, and merocyanines; and one or more water-soluble or water- dispersible polymeric binders selected from the group consisting of: acrylic resins, hydrophilic polyesters, sulphonated polyesters, and maleic anhydride homopolymers and copolymers.
- cyanine compound(s) selected from the group consisting of: indocyanines, phthalocyanines including polysubstituted phthalocyanines and metal-containing phthalocyanines, and merocyanines
- water-soluble or water- dispersible polymeric binders selected from the group consisting of: acrylic resins, hydrophilic polyesters, sulphonated polyesters, and maleic anhydride homopolymers and copolymers.
- a most preferred LTHC layer further comprises one or more release modifiers selected from the group consisting of: quaternary ammonium cationic compounds; phosphate anionic compounds; phosphonate anionic compounds; compounds comprising from one to five ester groups and from two to ten hydroxyl groups; alkoxylated amine compounds; and combinations thereof.
- release modifiers selected from the group consisting of: quaternary ammonium cationic compounds; phosphate anionic compounds; phosphonate anionic compounds; compounds comprising from one to five ester groups and from two to ten hydroxyl groups; alkoxylated amine compounds; and combinations thereof.
- Metal radiation absorbers also may be used as LTHC layers, either in the form of particles or as films deposited by various techniques such as thermal evaporation, e-beam heating and sputtering, as disclosed in US 5,256,506.
- Nickel and chromium are preferred metals for the LTHC layer 108 with chromium being especially preferred. Any other suitable metal for the heating layer can be used.
- the preferred thickness of the metal heating layer depends on the optical absorption of the metals used. For chromium, nickel/vanadium alloy or nickel, a layer of 80 -100 Angstroms is preferred.
- Preferred radiation absorbers for LTHC layers utilized herein are selected from the group consisting of: metal films selected from Cr and Ni; carbon black; graphite; and especially preferred are near infrared dyes with an absorption maxima in the range of about 600 to 1200 nm within the LTHC layer.
- the catalyst transfer layer and the patterned catalyst layer provided by thermal transfer comprises: (i) a catalyst fraction; optionally (ii) an adhesion promoter fraction; and, optionally and independently, (iii) a polymer binder fraction.
- the catalyst transfer layer can be a non-conducting layer or a conducting layer.
- the catalyst transfer layer thickness can be anywhere from about 5 nm to about 5 ⁇ m, and more preferably, about 100 nm to about 3 ⁇ m.
- the catalyst fraction can be a conductive material, or a non-conductive material, depending upon the requisite properties of the patterned catalyst layer, treating conditions, method of plating, etc.
- the catalyst fraction comprises one or more catalyst(s) that, when applied to a substrate, can provide plating, or metal deposition, when subjected to electrolytic plating or electroless plating conditions.
- the catalyst fraction comprises one or more catalyst(s) selected from the group: (1 ) metal particles, including powders and colloids; (2) metal oxides; (3) organic metal complexes; (4) metal salts; (5) ceramics and other non-conductor powders coated with metal salts, metal oxides, metal complexes, metal or carbon; and (6) carbon in all conductive forms; each metal of (1 ) to (5) selected from the group consisting of: Ag, Cu, Au, Fe, Ni, Al, Pd, Pt, Ru, Rh, Os, Ir, Sn and alloys thereof.
- metal alloys useful as catalysts are stainless, carbon, low- and high-alloy steel; and alloys of nickel, copper, aluminum, magnesium, beryllium, titanium, zinc, molybdenum, tungsten, tin, lead, silver and manganese.
- a comprehensive list of substrates can be found in Gawrilov, G. G.: Chemical (Electroless) Nickel Plating, Portcullis Press, Redhill, UK 1979; and Simon, H.: Galvanotechnik, 74 (1983) pp. 776-771.
- the catalyst is a conductive metal oxide selected from doped and undoped metal oxide particles including transparent conductive oxides such as indium-tin-oxide (ITO), antimony-tin-oxide (ATO), tin oxide, fluorine-doped tin oxide, zinc oxide, aluminum-doped zinc oxide (AZO), and zinc tin oxide (ZTO); alloys thereof.
- transparent conductive oxides such as indium-tin-oxide (ITO), antimony-tin-oxide (ATO), tin oxide, fluorine-doped tin oxide, zinc oxide, aluminum-doped zinc oxide (AZO), and zinc tin oxide (ZTO); alloys thereof.
- the catalyst fraction comprises metal particles having an average longest dimension of about 5 nm to about 1500 nm.
- the catalyst fraction comprises one or more organic metal complexe(s).
- organic metal complexes examples include_acetylacetonatoplatinum, cis-bis (benzonitrile) dichloroplatinum, acetylacetonatopalladium, bis(benzylideneacetone)palladium, bis(benzonitrile)dichloropalladium, bis[1 ,2- bis(diphenylphosphino)ethane]palladium, hexafluoroacetyl-acetonatopalladium, etc.
- the catalyst fraction comprises one or more metal salts, for instance, palladium acetate and palladium chloride.
- Platinum colloidal suspensions useful as catalysts can be prepared from chloroplatinic acid (hydrogen hexachlorplatinate) as disclosed in Shah, P. et. al, Langmuir 1999, 15, 1584-1587.
- a commonly used palladium colloid is tetraoctadecylammonium bromide-stabilized palladium colloid as disclosed in Hidber, P. C. et. al., Langmuir 1996, 12, 5209-5215.
- the catalyst transfer layer has an adhesion promoter that is useful in improving the bonding of the patterned catalyst layer to the base layer of the receiver after thermal transfer is completed.
- the adhesion promoter also tends to improve the bonding of the patterned metal layer on the patterned substrate after plating is completed.
- additional treatment such as heating or annealing is required to realize optimal adhesion of the patterned catalyst layer and patterned metal layer to the substrate.
- the catalyst layer comprises an adhesion promoter fraction of about 0.5 to about 10 wt %, and preferably about 1.0 to about 4.0 wt %, based on the total weight of the catalyst layer.
- Glass frit useful as an adhesion promoter usually has a softening point of about 200 to 700 0 C, preferably about 350 to 700 0 C, more preferably from 400 to 620 0 C.
- the glass frit useful as an adhesion promoter typically has an average particle size of about 100 nm to about 5 microns; and preferably about 100 nm to about 800 nm. However, glass frit with an average particle size less than 100 nm can be used as an adhesion promoter, if so desired.
- the glass frit is suitably selected from conventional glass frits having a softening point in the above range and then baked.
- Examples of the conventional glass frits include a glass frit with a low softening point in the above range comprising the oxides of the elements Al, Si, B, Na, Li, Ca, Mg, Mo, Ba, Bi, Zn, Zr, Ti, W, Sn, Sr, Co, Ru, V, Ta, W, Mn, Cu, Ag, Ce, Cd, and P.
- Specific glasses include PbO — SiO 2 -B 2 O 3 glass, PbO-SiO 2 -B 2 O 3 -ZnO glass, PbO-SiO 2 -B 2 O 3 -Al 2 O 3 -ZnO glass, B 2 O 3 - SiO 2 -B 2 O 3 glass, ZnO — SiO 2 -B 2 O 3 glass, and the like.
- These materials can be used independently or in combination as adhesion promoters.
- the adhesion promoter fraction is 0.5 to about 10 wt %, preferably 1.0 to about 4.0 wt %, based on the total weight of the catalyst layer, when glass frit is used.
- Metal oxides useful as adhesion promoters can be, for example, Na 2 O, CaO, CdO, BaO, ZrO, ZnO, MgO, CoO, NiO, FeO, MnO, PbO and combinations thereof; and in combination with SiO 2 .
- Metal hydroxides and alkoxides useful as adhesion promoters include those of Group Ilia thru Villa, Ib, Mb, 1Mb, and IVb of the Periodic Table and the lanthanides.
- Specific adhesion promoters are metal hydroxides and alkoxides of metals selected from the group consisting of Ti, Zr, Mn, Fe, Co, Ni, Cu, Zn, Al, and B.
- Preferred metal hydroxides and alkoxides are those of Ti and Zr.
- Specific metal alkoxide adhesion promoters are titanate and zirconate orthoesters and chelates including compounds of the formula (I), (II) and (III):
- M is Ti or Zr
- R is a monovalent Ci - Cs linear or branched alkyl
- X is selected from OH, -N(R 1 ) 2 , -C(O)OR 3 , -C(O)R 3 , -CO 2 " A + ; wherein R 1 is a -CH 3 or C 2 - C 4 linear or branched alkyl, optionally substituted with a hydroxyl or interrupted with an ether oxygen; provided that no more than one heteroatom is bonded to any one carbon atom; R 3 is Ci - C 4 linear or branched alkyl; A + is selected from NH 4 + , Li + , Na + , or K + .
- the adhesion promoter fraction is about 0.5 to about 20 wt %, preferably about 0.5 to about 5.0 wt %, based on the total weight of the catalyst layer, when metal hydroxides and alkoxides are used as the adhesion promoter fraction.
- Commercially available titanate and zirconate orthoesters and chelates useful as adhesion promoters are the TYZOR® organic titanates and zirconates available from E.I. DuPont de Nemours, Inc., Wilmington, DE. Specific organic zirconates are TYZOR® 212, 217, TEAZ, and CI-24 organic zirconates. Specific organic titanates are TYZOR® TE and LA organic titanates.
- Silicate hydroxides and alkoxides useful as adhesion promoters include those of formula (IV)
- R 11 is hydrogen or a Ci - C ⁇ linear or branched alkyl
- silicate alkoxides useful in the invention are tetramethoxysilane; tetraethoxysilane, tetrapropoxysilane, tetrabutoxysilane, thmethoxymethylsilane, thethoxymethylsilane, thmethoxyvinylsilane, triethoxyvinylsilane, 3-aminopropyl trimethoxysilane, 3-aminopropyl triethoxysilane, 3-methacryloyloxypropyl trimethoxysilane, 3- methacryloyloxypropyl triethoxysilane, 3-isocyanatopropyl trimethoxysilane, 3- isocyanatopropyl triethoxysilane, and 3-cyanopropyl trimethoxysilane.
- the adhesion promoter fraction is about 0.5 to about 20 wt %, preferably about 0.5 to about 5.0 wt %, based on the total weight of the catalyst layer, when silicate hydroxides and alkoxides are used as the adhesion promoter fraction.
- Organic polyols useful as adhesion promoters include organic polyols having two or more hydroxyl groups per molecule and having hydroxyl equivalent weights of about 30 to about 200 g/equivalent, preferably about 30 to about 100 g/equivalent, and more preferably about 30 to about 60 g/equivalent.
- the organic binders useful as adhesion promoters are organic polyols selected from the group consisting of C2 - Ceo linear or branched alkyl; C 5 - C 6 o alicyclic; and C 6 - C 6 o radicals consisting of a combination of linear or branched alkyl and alicyclic radicals; each optionally interrupted by one or more -O-, -S-, -OC(O)-, and -NR 11 C(O)-, wherein R 11 is hydrogen or a Ci - C 6 linear or branched alkyl.
- the adhesion promoter fraction can contain at least one polyol selected from ethylene glycol, glycol derivatives, glycerol and glycerol derivatives, pentaerythhtol (CAS [115-77-5]), trimethylolpropane (CAS [77-99-6]), dipentaerythritol (CAS [126-58-9]), dithmethylolpropane (CAS [23235-61 -2]), sorbitol (CAS 50-70-4]), sorbitan monooleate (CAS [1338-43-8]), sorbitan monolaurate (CAS [1338-39-2]), 2-butyl 2-ethyl 1 ,3-propanediol (CAS 115-84-4]), 2-methyl 1 ,3-propanediol (CAS [2163- 42-0]), neopentyl glycol (CAS [126-30-7]), 1 ,4-butanediol (CAS [110-63-4]
- organic binders useful as the adhesion promoter fraction can contain at least one of an ethoxylated or propoxylated compound such as ethoxylated pentaerythritol (CAS [42503-43-7]), propoxylated pentaerythritol (CAS [9051 -49-4]), ethoxylated trimethylol propane adducts, e.g.
- an ethoxylated or propoxylated compound such as ethoxylated pentaerythritol (CAS [42503-43-7]), propoxylated pentaerythritol (CAS [9051 -49-4]), ethoxylated trimethylol propane adducts, e.g.
- the organic binders useful as adhesion promoter fraction can contain a hyperbranched polyol, for example a dendritic hyperbranched polyol, a hyperbranched dendritic polyether or polyester, a hyperbranched polyether or polyester, arborols, dendritic or cascade super- molecules and their hyperbranched cousins, or a dendritic macromolecule of the polyester type having one or more reactive hydroxyl groups.
- a hyperbranched polyol for example in U. S. Patent 5,418,301 of HuIt, et al. assigned to Perstorp AB titled "Dendritic Macromolecule and Process for Preparation Thereof, U. S. Patent 5,663,247 of Sorensen et al.
- hyperbranched polyol products include those of Perstorp, for example Boltorn H20, H2003, H2004, H30, H40, P1000, and H311 with respective average OH functionality per molecule of 16, 12, 6.4, 32, 64, 14, and unspecified, and respective average relative molecular mass of 2100, 2500, 3200, 3500, 5400, 1500, and unspecified.
- hyperbranched polyols include polyether structure (V) and polyester structure (Vl) based upon pentaerythritol:
- the organic binders useful as adhesion promoter fraction can contain branched alkyl interrupted by -O-, -S-, -OC(O)-, and -NR 11 C(O)-.
- polyols interrupted by -OC(O)- are listed above.
- the adhesion promoter fraction is about 0.5 to about 20 wt %, preferably about 0.5 to about 5.0 wt %, based on the total weight of the catalyst layer, when organic polyols are used as the adhesion promoter fraction.
- Polymer binder fraction is about 0.5 to about 20 wt %, preferably about 0.5 to about 5.0 wt %, based on the total weight of the catalyst layer, when organic polyols are used as the adhesion promoter fraction.
- the catalyst layer optionally, and independently of whether an adhesion promoter is present, has a polymer binder fraction.
- the catalyst layer has a polymer binder fraction and, preferably, the polymer binder is selected from the group consisting of: one or more conducting
- (co)polymers/(co)oligomers selected from the group consisting of: polyaniline, polythiophene, polypyrrole, polyheteroaromatic vinylenes, and their derivatives; one or more non-conducting (co)polymers/(co)oligomers selected from the group consisting of: acrylic, styrenic and styrenic-acrylic latexes; solution-based acrylic, styrenic and styrenic-acrylic polymers; and combinations thereof; copolymers of ethylene with one or more monomers selected from the group consisting of: alkyl (meth)acrylate(s) wherein the alkyl group is a C1 to C18 linear or branched chain alkyl, norbornene, vinyl acetate, carbon monoxide, (meth)acrylic acid; and polyvinylacetate and its copolymers; vinyl (co)polymer(s) or (co)oligomer(s) comprising repeat units selected from the
- polymer binder fraction comprises polymers selected from the group consisting of: acrylic and styrenic-acrylic latexes and solution- based acrylic and styrenic-acrylic (co)polymers including random and graft copolymers; and combinations thereof; copolymers of ethylene with one or more monomers selected from the group consisting of: (meth)acrylates, vinyl acetate, carbon monoxide and (meth)acrylic acid; polyvinylacetate and its copolymers; and polyvinylpyrrolidone and its copolymers including polyvinylpyrrolidone-co- vinyl acetate.
- the latexes have an average particle size of less than about 150 nm, more preferably, less than about 100 nm.
- Preferred solution- based acrylic, styrenic and styrenic-acrylic polymers have a M w of less than about 100,000, preferably less than 50,000, and more preferably less than 30,000.
- the polymer binder fraction has an acid number of about 10 to about 300. The acid number is the milli-equivalents of KOH per gram, as determined by standard titration techniques, needed to neutralize the acid functionality in the latex or solution polymers.
- the acid functionality is generally incorporated into the acrylic and styrenic-acrylic polymers by copolymerization of ethyleneically unsaturated carboxylic aicds, such as acrylic acid, methacrylic acid, etc.
- Commercial examples of solution-based acrylic and styrenic acrylic polymers useful as polymer binders include Carboset® GA2300 (Noveon), Joncryl® 63 (Johnson Polymer), and Elvacite® 2028 (Lucite
- the catalyst layer and patterned catalyst layer comprises about 1.0 to 99 wt % catalyst fraction; about 0.5 to 10 wt % adhesion promoter fraction; and about 0.5 to 98.5 wt % polymer binder fraction.
- Another embodiment includes a catalyst transfer layer comprising an adhesion promoter fraction comprising organic polyols and a polymer binder fraction comprising acrylic and styrenic-acrylic latexes and solution-based acrylic and styrenic-acrylic (co)polymers having an acid number less than about 250; preferably less than about 100.
- the organic polyols are amide polyols, as discussed above.
- the catalyst layer When the patterned metal layer provided by the invention is to be used in display applications, for instance, as the front filter for a display device, the catalyst layer, optionally and preferably, has an antireflective agent fraction designed to reduce the reflectivity of the catalyst layer, and the metal layer plated onto it.
- the antireflective agent is a black pigment selected from the group consisting of ruthenium, manganese, nickel, chromium, iron, cobalt, copper, and alloys thereof; their oxides; and mixtures thereof.
- Preferred antireflective agents include Ru ⁇ 2, Cr 3 O 4 , CO2O3, and Ni.
- nonconductive antireflective agents agents are ceramic-based blacks including Fe-Co chromite, Cr-Fe-Ni spinel, and Cu-chromite.
- the antireflective agent can be a reactive precursor, which upon treatment provides the antireflective agent.
- Examples of a reactive precursors to antireflective agents include metals such as ruthenium, manganese, nickel, chromium, iron, cobalt, or copper; alkoxide derivatives, complexes with ⁇ -diketones, complexes with ⁇ -keto acid esters, and organic carboxylate esters of these metals. They are converted to the corresponding oxides on baking to exhibit black color and antireflective properties.
- metals such as ruthenium, manganese, nickel, chromium, iron, cobalt, or copper
- alkoxide derivatives complexes with ⁇ -diketones, complexes with ⁇ -keto acid esters, and organic carboxylate esters of these metals. They are converted to the corresponding oxides on baking to exhibit black color and antireflective properties.
- the metal as such it may be different from the metal powder used as the catalyst fraction, or one metal may have the dual functions. For example, when copper powder is used as the catalyst fraction, a part of the copper
- Another embodiment of the invention is a thermal transfer donor comprising a base film, a catalyst layer (A), and a LTHC layer interposed between said base film and said catalyst layer (A), said catalyst layer (A) comprising: (i) about 1.0 to about 99 wt % of a catalyst fraction, based on the total weight of the catalyst layer, said catalyst fraction comprising metal particles selected from Ag, Cu, and alloys thereof;
- adhesion promotor fraction selected from glass frit; and metal hydroxides and alkoxides
- the thermal transfer donor as described above wherein the catalyst layer (A) consists essentially of components (i), (ii), and (iii), as described above; wherein the polymer binder is selected from the group consisting of: one or more conducting (co)polymers/(co)oligomers selected from the group consisting of: polyaniline, polythiophene, polypyrrole, polyheteroaromatic vinylenes, and their derivatives; one or more non-conducting (co)polymers/(co)oligomers selected from the group consisting of: acrylic, styreneic and styrenic-acrylic latexes; solution-based acrylic, styrenic and styrenic-acrylic polymers; and combinations thereof; copolymers of ethylene with one or more monomers selected from the group consisting of: alkyl (meth)acrylate(s) wherein the alkyl group is a C1 to C18 linear or branched chain alkyl, norborn
- the LTHC layer comprises one or more radiation absorbers selected from the group consisting of: metal films selected from Cr and Ni; carbon black; graphite; and near infrared dyes with an absorption maxima in the range of about 600 to 1200 nm within the LTHC layer.
- the LTHC layer comprises: one or more water-soluble or water-dispersible radiation-absorbing cyanine compound(s) selected from the group consisting of: indocyanines, phthalocyanines, and merocyanines; and one or more water-soluble or water- dispersible polymeric binders selected from the group consisting of: acrylic resins, hydrophilic polyesters, sulphonated polyesters and maleic anhydride homopolymers and copolymers.
- the thermal transfer donor may have one or more additional transfer layers disposed on a side of the catalyst transfer layer opposite said base film, herein defined as above the metal transfer layer.
- the additional transfer layer thickness can be anywhere from about 5 nm to about 5 ⁇ m, and more preferably, about 100 nm to about 3 ⁇ m.
- the additional transfer layer can be a functional layer, acting as a conducting, semiconducting, insulating, adhesive, planarizing, light attenuating or protective layer, for instance, and is transferred along with the metal transfer layer in the thermal transfer process. Following transfer, the additional transfer layer will be disposed between the patterned catalysis layer and the base layer of the receiver.
- Another embodiment is a thermal transfer donor comprising, in layered sequence, a base film, a catalyst transfer layer (B) and an adhesion promoter layer, said catalyst transfer layer (B) comprising:
- adhesion promoter layer comprises material selected from glass frit; and metal hydroxides and alkoxides.
- Another embodiment is a thermal transfer donor comprising, in layered sequence, a base film, a catalyst layer (B) and an adhesion promoter layer, said catalyst layer (B) consisting essentially of components (i) and (iii), as described above; wherein the polymer binder is selected from the group consisting of: one or more conducting (co)polymers/(co)oligomers selected from the group consisting of: polyaniline, polythiophene, polypyrrole, polyheteroaromatic vinylenes, and their derivatives; one or more non-conducting (co)polymers/(co)oligomers selected from the group consisting of: acrylic, styreneic and styrenic-acrylic latexes; solution-based acrylic, styrenic and styrenic-acrylic polymers; and combinations thereof; copolymers of ethylene with one or more monomers selected from the group consisting of: alkyl (meth)acrylate(s) wherein the alky
- the adhesion promoter layer in the embodiments described above preferably comprises material selected from glass frit; and metal hydroxides and alkoxides, as described above.
- the adhesion promoter layer further comprises a polymer binder selected from the group consisting of: one or more (co)polymers/(co)oligomers selected from the group consisting of: acrylic, styreneic and styrenic-acrylic latexes; solution-based acrylic, styrenic and styrenic-acrylic polymers; and combinations thereof; copolymers of ethylene with one or more monomers selected from the group consisting of: alkyl (meth)acrylate(s) wherein the alkyl group is a C1 to C18 linear or branched chain alkyl, norbornene, vinyl acetate, carbon monoxide, (meth)acrylic acid; and polyvinylacetate and its copolymers; vinyl (co)polymer(s) or (co)oligomer(s)
- thermal transfer donor comprising an adhesion promoter layer, as described above, wherein the adhesion promoter layer further comprises an antireflective agent fraction, as disclosed above, designed to reduce the reflectivity of the adhesion promoter layer.
- the adhesion promoter layer comprising an antireflective agent fraction can be deposed on top of the catalyst transfer layer as an additional transfer layer.
- a protective strippable cover sheet may be present on the outmost layer of the thermal transfer donor.
- the cover sheet protects the underlaying transfer layers and is easily removable.
- the thermal imaging donor comprising a catalyst transfer layer may be prepared by applying a fluid dispersion of the catalyst transfer layer composition onto the surface of a base film, or the LTHC layer, if present, and volatizing the carrier fluid. Applying the fluid dispersion can be accomplished by any method that gives a uniform layer, or if desired, a patterned or nonuniform catalyst transfer layer. Coating, including rod coating and spin-coating, spraying, printing, blading or knifing can be used. Coating and spraying are preferred methods for applying the fluid dispersion to provide uniform catalyst transfer layers.
- the carrier fluid is allowed to evaporate to provide the catalyst transfer layer or the layer can be dried by any conventional method of drying including applying heat and/or vacuum.
- FIG. 2A is a cross-sectional view of thermal imaging receiver 200 having a receiver base layer 202.
- the receiver base layer 202 is a dimensionally stable sheet material as defined for the base film of the thermal transfer donor. Additionally, the receiver base layer can be an opaque material, such as polyethylene terephthalate filled with a white pigment such as titanium dioxide; ivory paper; or synthetic paper, such as Tyvek® spunbonded polyolefin.
- the base layer material can also be glass.
- Preferred base layers for receivers are polyethylene terephthalate, polyethylene naphthalate, polyimide, for instance Kapton® polyamide, and glass.
- the thermal imaging receiver may comprise one or more optional additional layers, such as an adhesive layer; an antireflective layer; etc., which may be a continuous layer over the base layer or a patterned layer.
- a particular useful receiver additionally comprises a patterned antireflective layer 204, as illustrated in Figure 2B.
- the patterned antireflective layer can be made using a similar thermal imaging process as disclosed below.
- Suitable antireflective layers include one or more nonconductive materials selected from the group consisting of: RuO2, cobalt oxide, nickel oxide, iron-cobalt chromite, copper chromite, and non-conductive carbon blacks.
- the thermal transfer donor is contacted with a thermal imaging receiver.
- the contacting may occur with the catalyst transfer layer of the donor; or with any optional layers that overlay the catalyst transfer layer.
- contacting is meant that the donor is in close proximity, preferably within several microns of the receiver.
- the receiver may be off-set from the donor by, for example, previously printed layers, fibers or particles that act as spacers to provide a controlled gap between donor and receiver. Vacuum and/or pressure can be used to hold the donor element 100 and the receiver element 200 together.
- the donor element 100 and the receiver element 200 can be held together by fusion of layers at the periphery of the assembly.
- the donor element 100 and receiver element 200 can be taped together and taped to the imaging apparatus. A pin/clamping system can also be used.
- the donor element can be laminated to the receiver element. If the donor element 100 and the receiver element 200 are flexible, the assembly can be conveniently mounted on a drum to facilitate laser imaging. Transferring
- Thermal transfer can be achieved by a laser-mediated transfer process as illustrated in Figure 3.
- the assembly of the donor 100 and the receiver 200 is selectively exposed to heat, which is preferably in the form of laser radiation (R), in an exposure pattern of the image of the desired pattern to be formed on the receiver.
- the laser radiation or laser beam (R) is focused about at the interface between the catalyst transfer layer 106 and LTHC layer 108, if present, otherwise it is focused about at the interface between 106 and base film 102. Sufficient radiation is applied to achieve transfer of the catalyst layer to the receiver.
- a variety of light-emitting sources can be used to heat the thermal transfer donor elements.
- high- powered light sources e.g., xenon flash lamps and lasers
- infrared, visible, and ultraviolet lasers are particularly useful.
- Other light sources and irradiation conditions can be suitable based on, among other things, the donor element construction, the transfer layer material, the mode of thermal transfer, and other such factors.
- the radiation is preferably applied through the backside of base film 102, that is, the side not containing the catalyst transfer layer.
- Laser radiation preferably is provided at a laser fluence of up to about 600 mJ/cm 2 , and more preferably about 75-440 mJ/cm 2 .
- Lasers with an operating wavelength of about 350 nm to about 1500 nm are preferred.
- diode lasers for example those emitting in the region of about 750 to about 870 nm and up to 1200 nm, which offer a substantial advantage in terms of their small size, low cost, stability, reliability, ruggedness and ease of modulation.
- Such lasers are available from, for example, Spectra Diode Laboratories (San Jose, CA).
- Creo Spectrum Trendsetter 3244F which utilizes lasers emitting near 830 nm.
- This device utilizes a Spatial Light Modulator to split and modulate the 5-50 Watt output from the -830 nm laser diode array.
- Associated optics focus this light onto the imageable elements. This produces 0.1 to 30 Watts of imaging light on the donor element, focused to an array of 50 to 240 individual beams, each with 10-200 mW of light in approximately 10 x 10 to 2 x 10 micron spots. Similar exposure can be obtained with individual lasers per spot, such as disclosed in US
- each laser emits 50-300 mW of electrically modulated light at 780-870 nm.
- Other options include fiber-coupled lasers emitting 500-3000 mW and each individually modulated and focused on the media. Such a laser can be obtained from Opto Power in Arlington, AZ.
- Suitable lasers for thermal imaging include, for example, high power (>90 mW) single mode laser diodes, fiber-coupled laser diodes, and diode-pumped solid state lasers (e.g., Nd:YAG and Nd:YLF).
- Laser exposure dwell times can vary widely from, for example, a few hundredths of microseconds to tens of microseconds or more, and laser fluences can be in the range from, for example, about 0.01 to about 5 J/cm 2 or more.
- the thermal imaging method requires at least a portion of the catalyst transfer layer be transferred onto the thermal imaging receiver by thermal transfer to provide a patterned catalyst layer on the receiver base film.
- the patterned catalyst layer on the receiver base film becomes, upon removal of the spent thermal imaging donor, the patterned substrate, required for the plating step.
- the donor further comprises, on the catalyst transfer layer opposite the base film, an adhesion promoter layer; and said transferring further comprises transferring a corresponding proximate portion of the adhesion promoter layer to provide said patterned substrate having, in layered sequence on the receiver, a patterned adhesion promoter layer and said patterned catalyst layer.
- Preferred adhesion promoter layers comprise materials selected from glass frit, metal hydroxides and metal alkoxides.
- the term "transferring a corresponding proximate portion of the adhesion promoter layer together" means that the transference of the exposed catalyst transfer layer onto the receiver includes a simultaneous matching transference of the exposed adhesion promoter layer, residing adjacent the catalyst transfer layer, onto the receiver.
- the catalyst transfer layer comprises more than one layer or additional transfer layers are present on top of the catalyst transfer layer, these layers are transferred in a like manner.
- the adhesion promoter layer further comprises an antireflective agent fraction, as disclosed above.
- the donor element 100 and the receiver element 200 are separated, as illustrated in Figures 4A and B, leaving the untransferred portions of the catalyst transfer layer 106 on the donor element 100 and the patterned catalyst layer on the receiver element 200.
- the separation of the donor and receiver is achieved by simply peeling the two elements apart. This generally requires very little peel force and is accomplished by simply separating the donor element from the receiver element. This can be done using any conventional separation technique and can be manual or automatic.
- Another embodiment is a thermal imagining method wherein the receiver additionally comprises a patterned anti-reflective layer having limits; and said transferring at least a portion of the catalyst transfer layer onto the receiver, is within the limits of the patterned anti-reflective layer.
- This is another useful method allowing darkening of the patterned catalyst layer.
- the patterned anti- reflective layer can be deposed on the receiver base layer in a preliminary imaging process; followed by transferring of the patterned catalyst layer; in registration with the patterned anti-reflective layer.
- the transferred portions of the transfer layers correspond to those portions of the transfer layers exposed to laser radiation.
- the receiver element includes both exposed portions and non-exposed portions of one or more transfer layers.
- a process for enhancing the resolution of a pattern on a thermal imaging receiver comprising an exposed portion and a non-exposed portion of one or more thermal transfer layers on a surface of the thermal imaging receiver comprises: (a) contacting said surface of the thermal imaging receiver with an adhesive surface to provide a temporary laminate; and (b) removing said adhesive surface from the temporary laminate to provide a thermal imaging receiver with a surface substantially free of said non- exposed portion of one or more transfer layers.
- Suitable adhesive surfaces for performing the process are commercial adhesive tapes, for instance, those Scotch® brand tapes available from 3M company.
- Tacky rollers for instance, a medium tack roller available in the form of a Dust Removal System-1 (red) from SDI (Systems Division, Inc., Irvine, CA 92618-2005) are a suitable adhesive surface for the process.
- Chrome films, used as LTHC layers described above, also make useful low tack adhesive layers for removing non-exposed portions of the transfer layers under very gentle conditions.
- thermal imaging method further comprises: (d) heating the patterned substrate to an anneal temperature for an anneal period to provide the annealed patterned substrate; and said plating metal, comprises plating said annealed patterned substrate.
- This aspect of the thermal imaging method is useful in fixing the adhesion promoter, present in or adjacent the patterned catalyst layer, to the receiver.
- Annealing of the patterned substrate is particularly useful in processes wherein the patterned metal layer provided by the plating step is intended to remain bonded to base layer. Glass frit is typically heated to a softening or melting temperature as disclosed above.
- adhesion promoters such as the polyols combined with polycarboxylat.es, metal hydroxides and alkoxides, can also give improved adhesion to substrates upon heating to an anneal temperature.
- the anneal temperature is usually between 80 and 150 0 C; for glass base layers, the anneal temperature can be higher, typically 150 to 550 0 C depending upon whether polymer binders are present in the patterned catalyst layer and the particular nature of the adhesion promoter.
- Plating The method further comprises plating metal onto said patterned substrate, to provide the patterned metal layer in connectivity with the patterned catalyst layer.
- plating refers to any method providing selective metal deposition onto the patterned catalysis layer, as a result of the presence of the patterned catalyst layer.
- Wet plating is preferable since the metal layer can be selectively formed on the patterned catalyst layer.
- Wet plating includes electroless plating and electrolytic plating, or a combination thereof, and is adequately selected depending on the required conductivity of the patterned catalyst layer.
- Electrolytic plating is a galvanic process requiring an electric current to be passed through an electrolyte solution containing metal ions capable of being reduced.
- Electroless plating is a non-galvanic plating that involves several simultaneous chemical reactions in an aqueous solution, which occur without the use of external electrical power. Electroless plating systems have in common a metal ion capable of being reduced to a metal; and a chemical reducing agent capable of delivering electrons to the metal ion.
- the most common electroless plating method is electroless nickel plating that uses sodium hypophosphite as the reducing agent and nickel (II) ions as the metal ion.
- the two plating processes may be employed in combination.
- the electroplating can be applied from the beginning.
- a first conductive layer having a small thickness is formed by electroless plating; and then, a second conductive layer is formed by electroplating; to from the patterned metal layer.
- the plating metal is selected from the group consisting of Ni, Cu, Fe, Cr, Sn, Mn, Mo, Ag, Au, W, Zn, and alloys thereof.
- Preferred plating metals are Ni and Cu.
- the plating process may further include any treatment processes that are known in the art of plating that may be beneficial in the overall deposition of metal onto the patterned catalyst layer.
- the patterned substrates may be pre-treated with sensitizers, cleaning agents, and the like before the deposition of metal.
- the patterned metal layer provided by the plating process may be a single layer or a multilayer having two, three or more sub-layers.
- the thickness of the patterned metal layer is usually from about 0.1 to about 20 microns, preferably from about 0.1 to about 5 microns.
- the patterned metal layer has a resistance of less than 0. 2 Ohms per square as measured using the 4 probe resistance function of a HP 3478A multimeter.
- the patterned metal layer is in the form of a geometric pattern of lines forming a mesh having pitches in the range of 150 to 500 micron, and a line width of about 10 to 80 microns.
- the method further comprises treating the patterned metal layer with a darkening agent to provide a darkened patterned metal layer to reduce reflectivity of the metal layer, as evidenced by visual examination.
- the darkening agent can be an oxidizing agent that oxidizes metals like Cu, Ni and alloys thereof.
- EBONOL ( H ) -C oxidizer is a proprietary blackening agent for copper and copper alloys marketed by Cookson Electronics, Buffalo, Rl; that is useful as a darkening agent in the treating of the patterned metal layer.
- Figure 5 is a side-view of one embodiment encompassing a receiver 200 including a receiver base layer 202, patterned antireflective layer 204, a patterned catalyst layer 106, a patterned metal layer 210, and a darkened patterned metal layer 212.
- Electronic device Another embodiment is an electronic device having a patterned metal layer on a substrate, said substrate substantially transparent to visible light; said patterned metal layer comprising in layered sequence on said substrate, an adhesion promoter layer, a catalyst layer, and a plated metal layer; and said patterned metal layer having a pattern with at least one line of width of about 1 millimeter or less.
- the patterned metal layer has at least at least one line of width of about 200 microns or less.
- the patterned metal layer has at least one line of width of about 150 microns or less, 100 microns or less, 50 microns or less, 20 microns or less and 10 microns or less.
- the adhesion promoter layer comprises material selected from glass frit, and metal hydroxides and alkoxides; and the catalyst layer comprises (i) about 0.5 to about 99 wt % of a catalyst fraction, based on the total weight of the catalyst layer, said catalyst fraction comprising metal particles selected from Ag, Cu, and alloys thereof; and (ii) about 0.5 to about 99 wt % of a polymer binder.
- Another embodiment is an electronic device, as disclosed above, wherein the adhesion promoter layer further comprises an antireflective agent fraction.
- Preferred antireflective agents are as disclosed above.
- Another embodiment is an electronic device, as disclosed above, wherein the adhesion promoter layer further comprises an antireflective agent fraction; and the patterned metal layer further comprises an antireflective layer on the metal layer opposite the adhesion promoter layer.
- Preferred embodiments of the electronic device include a touchpad sensor and an electromagnetic interference (EMI) shield.
- EMI electromagnetic interference
- a touchpad sensor comprising a patterned metal layer as described above further comprises a dielectric layer, typically an organic polymer having suitable dielectric properties.
- the touchpad sensor comprises a first base layer with a first patterned metal layer; a second base layer with a second patterned metal layer; and a dielectric layer deposed between the first and second patterned metal layers.
- the touchpad sensor comprises a first base layer, having two opposing surfaces, a patterned metal layer deposed on each of the two opposing surfaces; and a dielectric layer on top of each of the patterned metal layers.
- the various embodiments of the method have several advantages over other methods for producing metal patterns, including precise digital control of the pattern being formed; the capability to prepare mesh having fine lines, down to 10 micron line-width; and the capability to depose other layers, such as antireflective layers, adhesive layers, dielectric layers, etc., in a precise relation to the metal pattern.
- the steps of manufacturing the patterned catalyst layer are dry steps, that is, they do not require the use of solvents, etchants, and masks, typically used in conventional photolithography methods.
- the only step requiring conventional "wet" processing is the plating step.
- the overall method may be more environmental friendly than conventional methods used in making metal mesh.
- a Flatbed printer was used for transferring catalyst transfer layers onto glass substrates.
- the imaging head used was a SQUAREspot® thermal imaging head manufactured by Creo/Kodak, Vancouver, Canada.
- the head was mounted on the flatbed scanner as described in the paper "Thermal Transfer for Flat Panel Display Manufacturing", Eran Elizur and Dan Gelbart, Journal of the Society for Information Display, Vol. 11 Number 1 , pp. 199-202.
- a Creo Trendsetter® 800 (Creo/Kodak, Vancouver, Canada) was utilized for imaging to flexible substrates.
- the Creo Trendsetter® 800 is a modified drum- type imager utilizing a modified Thermal 1.7 Head with a 12.5 watt maximum average operating power at a wavelength of 830 nm with 5080 dpi resolution.
- the 800 Trendsetter was operated in a controlled temperature/humidity environment with an average temperature of -68 0 C and an average relative humidity of ⁇ 40-50%.
- a section of thermal imaging receiver was positioned on the drum. The thermal transfer donor was loaded so that the side of the donor element coated with the catalyst transfer layer was facing the free side of the receiver.
- Imaging assemblages were exposed from the back-side through the donor film base. Films were mounted using vacuum hold down to a standard plastic or metal carrier plate clamped mechanically to the drum. In some experiments utilizing the Creo Trendsetter® 800 thermal platesetter, a nonstandard drum with vacuum holes machined directly onto the drum to match common donor and receiver sizes was used as a replacement for the standard drum/carrier plate assemblage. Contact between the donor and receiver was established by about 600 mm of Hg vacuum pressure. Laser output was under computer control to build up the desired image pattern. Laser power and drum speed were controllable and were adjusted in an iterative fashion to optimize image quality as judged by visual inspection of the transferred image on the receiving surface. Method 1 : Thermal transfer onto rigid substrates
- UVO is a process where a surface is exposed to deep UV light (185 nm - 254 nm) having an intensity of ⁇ 30 mJ/sec cm 2 in the presence of air) for abut 5 min and then rinsed in Dl water.
- a thermal transfer donor was placed in vacuum contact with a receiver on a flatbed scanner as described in the paper "Thermal Transfer for Flat Panel Display Manufacturing", Eran Elizur and Dan Gelbart, Journal of the Society for Information Display, Vol. 11 Number 1 , pp. 199-202.
- the assemblage of thermal imaging donor and glass panel was then exposed in a desired pattern from the back side first through the donor base film using a SQUARESPOT thermal imaging head manufactured by Creo/Kodak, Vancouver, Canada.
- the rapidly moving head was equipped with 830 nm infrared lasers with output energy of 21.5 watts was focused to a spot size of about 5 ⁇ m x 5 ⁇ m on the donor base film, or the interface of the base film and a LTHC layer when a LTHC layer was present.
- Scan speeds typically ranged from 0.5 m/sec to 1.3 m/sec.
- Laser output was under computer control to build up the desired pattern.
- Laser power and scan speed were controllable and were adjusted in an iterative fashion to optimize transfer quality as judged by visual inspection of the patterned catalyst layer on the receiver.
- the flatbed imager was operated in a controlled temperature/humidity environment with an average temperature of about 70 0 F and an average relative humidity of about 45-55 %. Characterization Methods
- Resistivity - Resistivity was measured using the four probe resistance function of a HP 3478A multimeter (Hewlett-Packard). Typically a square of mesh ⁇ 15 mm on a side was measured. Thickness - Thickness of the transferred catalyst layer, Cu plating and blackening was determined using a KLA Tencor P-15 profiler.
- the metal line came off substrate in small pieces with significant force applied.
- the metal line came off substrate with minimal effort and adjoining pieces loosened along edges.
- the metal line came off substrate independent of contact or when contacted pulls off substrate as single piece.
- Organic LTHC Layer was prepared as reported in Formulation L of the Examples of PCT/US05/38009, referenced above:
- a LTHC coating formulation was prepared from the following materials: (i) demineralised water: 894 g; (ii) dimethylaminoethanol: 5 g; (iii) Hampford dye 822 (Hampford Research; formula corresponds to SDA 4927): 10 g;_(iv) polyester binder (Amertech Polyester Clear; American Inks and Coatings Corp; Valley Forge; PA): 65 g of a 30% aqueous solution; (v) TegoWetTM 251 (4) polysiloxane copolymer: 2.5 g; (vi) potassium dimethylaminoethanol ethyl phosphate: 14 g of an 11.5% aqueous solution [The 11.5% aqueous solution was prepared by combining three parts water and 0.5 parts ethyl acid phosphate (Stauffer)
- the gravure roll rotates in the opposite direction to the film web and applies the coating to the web at one point of contact.
- the coated film was passed into a stenter oven at a temperature of 100- 110 0 C where the film was dried and stretched in the sideways direction to approximately 3 times its original dimensions.
- the biaxially stretched coated film was heat-set at a temperature of about 190 0 C by conventional means.
- the coated polyester film is then wound onto a roll.
- the total thickness of the final film was 50 ⁇ m; the dry thickness of the transfer-assist coating layer is of 0.07 ⁇ m.
- the PET base film contained Solvent Green 28 dye to give a final dye concentration of typically 0.2% to 0.5% by weight in the polymer of the base film.
- the base film containing the Solvent Green 28 dye (0.40% by weight) had an absorbance of 1.2 at 670 nm, and an absorbance of ⁇ 0.08 at 830 nm.
- the donor substrate will herein be referred to as: Organic LTHC Green PET donor substrate.
- a thermal transfer donor comprising a base film and a catalyst layer was first prepared using the following procedure.
- ZONYL FSA surfactant 0.523 g , BYK-025 defoamer (0.299 g)
- glass frit 0.529 g, EG2922SMZ, Ferro Corporation, Cleveland, Ohio
- Model 40TP200, Transducer Model 41 C28 for 15 min, during which time the mixture was stirred with a spatula at 5 min intervals.
- the container with the mixture was placed in a water bath with sonication for 1 h, during which time the mixture was stirred with a spatula at 0.5-h intervals.
- the mixture was then treated in a water bath at RT with probe sonication for additional 15 min, during which time the mixture was stirred gently with a spatula at 5-minute intervals.
- the resulting dispersion was filtered twice with 2.0 micron WHATMAN GFM-150 syringe-disc filter (Whatman Inc., Clifton, New Jersey).
- An organic LTHC Green PET thermal transfer donor base film was cleaned with a pressurized nitrogen stream immediately prior to coating.
- the above dispersion was drawn on to the base film using a CN# 5 rod (Buschman Corporation, Cleveland, Ohio) at 5.8 ft/min utilizing a WATERPROOF Color Versatility coating system (E.I. DuPont De Nemours, Inc..Wilmington, DE).
- the wet films were dried for 20 min at 48 0 C to provide a thermal transfer donor comprising a base film and a silver catalyst layer.
- the thermal transfer donor was placed in vacuum contact with a glass panel (boro-aluminosilicate glass ⁇ 0.7 mm thick). This glass receiver was mounted on a flatbed scanner as described above.
- Thermal transfer was preformed by exposing the donor to imaging radiation from the imaging head with total laser power at the image plane of about 20.5 W using scan speeds from varying from 0.5 to 1.3 m/sec in straight-line patterns of about 5 mm.
- the spent donor was removed from the glass, providing the patterned substrate.
- the patterned glass substrate was then heated at an anneal temperature in a Fisher Scientific ISOTEMP Programmable Muffle Furnace Model 650 heated to 525 0 C at a rate of 10 °C/min and left at that temperature for 15 min.
- the sample was then cooled to near room temperature (RT) by turning off the power to the furnace. After annealing the sample mesh had a resistance of 110 D/square and was difficult to remove by scraping with probe.
- the patterned substrate was then prepared for electroplating by applying 14" wide Cu tape, having a conductive adhesive, along the periphery of the silver pattern. Electroplating was preformed in a Technic, Inc. "Mini Plating Plant 3" electroplating system.
- the copper plating bath electrolyte was "PC-65” with the bhghtner "PC 65 B” added at 1 % by volume. Both are manufactured by Technic Inc., Cranston Rl.
- the plating bath was kept at 22 0 C during plating.
- a current density of ⁇ 118 Amp/m 2 was applied to the patterned substrate for 400 sec depositing about 8 ⁇ m of copper on the silver pattern to provide a patterned copper layer having a resistivity ⁇ 0.2 D/square.
- Figure 6 is a photomicrograph of the patterned metal layer. Blackening of the patterned Cu layer was performed by immersing the plated patterned substrate in a 50 wt % solution of EBONOL-C (vendor, city state) heated to 100 0 C for 120 sec. The resulting blackened copper plated mesh had a resistivity of ⁇ 0.2 D/square and low reflectance.
- EBONOL-C vendor, city state
- This example illustrates the formation of a blackened Cu plated mesh using TYZOR ® 212 organo zirconate added as an adhesion promoter.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 2 and 3.
- the donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.5 m/sec.
- the donor sheet was removed from the glass, providing a patterned substrate having an imaged Ag pattern.
- the patterned substrate was heat-treated in a Fisher Scientific lsotemp Programmable Muffle Furnace Model 650 to 230 0 C at a rate of 10 °C/min and left at that temperature for 15 min.
- the patterned substrate was then cooled to RT by turning off the power to the heating elements.
- Electroplating of the heat-treated patterned substrate was done in the same manner as described in Example 1 except a current density of -248 Amp/m 2 was applied to the sample for 300 sec, to provide a patterned Cu layer with a Cu thickness of about 5.7 ⁇ m.
- the resistance of the Cu plated mesh was ⁇ 0.2 D/square.
- TYZOR 212 1. 160 - - -
- This example illustrates the formation of a blackened Cu plated mesh using an organic polyol, PRIMID ® XL552 polyol, added as an adhesion promoter.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 2 and 3. The donor sheet was imaged onto a glass plate in the flat bed imager previously described. The imaging speed was 0.5 m/sec.
- the donor sheet was removed from the glass, providing a patterned substrate having an imaged Ag pattern.
- the patterned substrate was heat-treated in a Fisher Scientific lsotemp Programmable Muffle Furnace Model 650 to 230 0 C at a rate of 10 C/min and left at that temperature for 15 min.
- the patterned substrate was then cooled to RT by turning off the power to the heating elements.
- the resistance of the heat treated Ag mesh was 144 D/square.
- Electroplating of the heat-treated patterned substrate was done in the same manner as described in Example 1 except a current density of about 248 Amp/m 2 was applied to the sample for 300 sec, to provide a patterned Cu layer with a Cu thickness of ⁇ 5.7 ⁇ m.
- the resistance of the Cu plated mesh was ⁇ 0.2 D/square.
- Blackening of the patterned Cu layer was done by immersing the plated patterned substrate in a 100% solution of Ebonol-C heated to 100 0 C for 7 seconds.
- the resulting mesh had a resistivity of ⁇ 0.2 D/square and low reflectance.
- This example illustrates the formation of a Cu plated mesh in the absence of an adhesion promoter.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 2 and 3.
- the donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.9 m/sec.
- Electroplating of the patterned substrate was done in the same manner as described in Example 1 except a current density of -124 Amp/m 2 was applied to the sample for 480 sec depositing ⁇ 7 ⁇ m of Cu.
- the resulting mesh had a resistivity of ⁇ 0.2 D/square.
- This example illustrates the creation of a blackened Cu plated mesh.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 4 and 5.
- the donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.6 m/sec.
- the donor sheet was removed from the glass, providing a patterned substrate having an imaged Ag pattern.
- the patterned substrate was heat-treated in a furnace to 525 0 C at a rate of 10 C/min and left at that temperature for 15 min.
- the patterned substrate was then cooled to RT by turning off the power to the heating elements. The heat treatment provided an Ag pattern with good adhesion to the substrate.
- Electroplating was performed in the same manner as described in Example 1 except a current density of -124 Amp/m 2 was applied to the sample for 200 sec depositing ⁇ 1.4 ⁇ m of Cu on the patterned catalyst layer.
- the plated pattern showed slight delamination at edge of pattern.
- Blackening of the plated Cu pattern was performed by immersing the patterned metal layer in a 50% solution of Ebonol-C heated to 100 0 C for 60 sec. The resulting mesh had good conductivity and low reflectance. The blackened sample had poor adhesion to the glass and was easily removed from the glass plate.
- This example illustrates the creation of a Cu plated mesh using a glass frit as an adhesion promoter.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 4 and 5.
- the donor sheet was imaged onto a sheet of MELINEX ® ST504 using the CREO TRENDSETTER ® 800 previously described. Imaging was done with a drum rotation speed of 60 rpm and laser powers of 6.9, 7.0, 7.1 and 7.2 W.
- Electroplating of the patterned substrate was done in the same manner as described in Example 1 except a current density of -226 Amp/m 2 was applied to the sample for 480 sec depositing about 7 ⁇ m of Cu.
- the resulting mesh had a resistivity ⁇ 0.2 D/square.
- This example illustrates the formation of a Cu plated mesh.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 4 and 5.
- the donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.9 m/sec.
- Electroplating was performed using the same technique as described in Example 1. The patterned metal layer delaminated from the substrate under all plating conditions.
- Example 8
- This example illustrates the creation of a Cu plated mesh on a glass plate.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 4 and 5.
- the donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.8 m/sec.
- Electroplating was done in the same manner as described in Example 1 except a current density of -248 Amp/m 2 was applied to the sample for 200 sec depositing 1.5 ⁇ m of Cu. Deposition of Cu was irregular suggesting that portions of the original image were isolated from the plating electrodes by breaks in the pattern or by other non-conductive elements in the pattern. The resulting plated areas of the mesh had a resistivity of about 0.5 D/square.
- This example illustrates the creation of a Cu plated mesh on a triacetyl cellulose film.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 4 and 5.
- the donor sheet was imaged onto a sheet of TAC film using the CREO TRENDSETTER ® 800 previously described. Imaging was done with a drum rotation speed of 40 rpm and laser power of 4.0 W. Electroplating was done in the same manner as described in Example 1 except a current density of -344 Amp/m 2 was applied to the sample for 180 sec depositing ⁇ 5 ⁇ m of Cu.
- the resulting mesh had a resistivity ⁇ 0.2 D/square.
- Example 10 This example illustrates the formation of a blackened Cu plated mesh using a glass frit as an adhesion promoter.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 6 and 7.
- the donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.6 m/sec.
- the donor sheet was removed from the glass, providing a patterned substrate having an imaged Ag pattern.
- the patterned substrate was then heat-treated in a furnace heated to 525 C at a rate of 10 C/min and left at that temperature for 15 min.
- the sample was then cooled to near RT by turning off the power to the heating elements.
- the heat treatment provided a Ag pattern with good adhesion to the substrate.
- Electroplating was done in the same manner as described in Example 1 except a current density of -516 Amp/m 2 was applied to the sample for 111 sec.
- the resulting plated mesh had a resistivity ⁇ 0.2 D/square and had good adhesion to the substrate.
- Blackening of the plated Cu was performed by immersing the plated sample in a 50% solution of Ebonol-C heated to 100 0 C for 60 sec.
- the resulting mesh had a resistivity ⁇ 0.2 D/square and low reflectance.
- the blackened sample had good adhesion to the glass substrate. Table 6
- This example illustrates the creation of a blackened Cu plated mesh using a glass frit as adhesion promoter, and RuO 2 as a blackening agent for the patterned catalyst layer.
- a donor sheet was prepared using the same general procedure as outlined in Example 1 and the ingredients and process variables listed in Table 6 and 7.
- the donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.6 m/sec.
- the donor sheet was removed from the glass, providing a patterned substrate having an imaged Ag pattern.
- the patterned substrate was then heat treated in a furnance heated to 525 C at a rate of 10 C/min and left at that temperature for 15 min.
- the sample was then cooled to near RT by turning off the power to the heating elements.
- the heat treatment provided a Ag pattern with good adhesion to the substrate.
- Electroplating was done in the same manner as described in Example 1 except a current density of -516 Amp/m 2 was applied to the sample for 111 sec.
- the resulting mesh had a resistivity -0.5 D/square.
- the resulting plated pattern exhibited good adhesion to the substrate.
- This example illustrates the formation of a patterned metal layer on a patterned substrate having a patterned black layer thereon.
- a first donor sheet comprising Cr 3 O 4 was prepared following the same general procedure as outlined in Example 1 with the following ingredients: xylenes (12.018 g), ELVACITE ® 2028 (21.264 g) DEGDB (0.082 g), glass frit (EG 2922 SMZ, 8.612 g) and DuPont 1-2218 Cr 3 O 4 powder (12.161 g).
- a second donor sheet containing a catalyst layer was prepared using the same general jprocedure as described in Example 1 and the ingredients and process variables listed in Table 6 and 7.
- the first donor sheet was imaged onto a glass plate in the flat bed imager previously described.
- the imaging speed was 0.7 m/sec.
- the first imaged donor sheet was removed to provide a patterned substrate having a patterned black layer thereon. Without changing the position of the patterned substrate the second donor sheet was imaged onto the patterned substrate within the limits of the patterned black layer using an imaging speed of 0.7 m/sec.
- the second imaged donor sheet was removed to provide patterned substrate having, in layered sequence, a Ag catalyst layer, a black layer, and the glass substrate.
- the patterned substrate was then heat-treated in a furnace heated to 525 0 C at a rate of 10 °C/min and left at that temperature for 15 min.
- the sample was then cooled to near RT by turning off the power to the heating elements.
- the heat treatment provided a Ag pattern with good adhesion to the substrate.
- Electroplating was done in the same manner as described in Example 1 except a current density of ⁇ 190 Amp/m 2 was applied to the sample for 40 sec depositing about 4 microns of Cu.
- the resulting plated pattern showed good conductivity.
- Figure 7 shows a photomicrograph of the plated pattern within the bounds of the patterned black layer.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Laminated Bodies (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Chemically Coating (AREA)
- Electroplating Methods And Accessories (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/877,637 US7666568B2 (en) | 2007-10-23 | 2007-10-23 | Composition and method for providing a patterned metal layer having high conductivity |
PCT/US2008/080851 WO2009055515A1 (en) | 2007-10-23 | 2008-10-23 | Composition and method for providing a patterned metal layer having high conductivity |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2200838A1 true EP2200838A1 (en) | 2010-06-30 |
EP2200838B1 EP2200838B1 (en) | 2011-10-19 |
Family
ID=40219442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08842620A Not-in-force EP2200838B1 (en) | 2007-10-23 | 2008-10-23 | Method for providing a patterned metal layer having high conductivity |
Country Status (7)
Country | Link |
---|---|
US (1) | US7666568B2 (en) |
EP (1) | EP2200838B1 (en) |
JP (1) | JP2011503348A (en) |
KR (1) | KR20100087018A (en) |
CN (1) | CN101835624B (en) |
AT (1) | ATE529266T1 (en) |
WO (1) | WO2009055515A1 (en) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3056978A1 (en) * | 2009-02-26 | 2016-08-17 | 3M Innovative Properties Company | Touch screen sensor and patterned substrate having overlaid micropatterns with low visibility |
US20110279398A1 (en) * | 2010-05-12 | 2011-11-17 | Harald Philipp | Touch screen electrode enhancements |
GB201009847D0 (en) * | 2010-06-11 | 2010-07-21 | Dzp Technologies Ltd | Deposition method, apparatus, printed object and uses |
CN102465259A (en) * | 2010-11-11 | 2012-05-23 | 鸿富锦精密工业(深圳)有限公司 | Electromagnetic shielding treatment method for plastic surface and product thereof |
US10526198B2 (en) * | 2011-03-04 | 2020-01-07 | Texas Instruments Incorporated | Infrared sensor design using an epoxy film as an infrared absorption layer |
CN103534049B (en) * | 2011-05-18 | 2016-11-02 | 户田工业株式会社 | Copper powders, copper cream, the manufacture method of conductive coating and conductive coating |
KR20130007042A (en) * | 2011-06-28 | 2013-01-18 | 삼성디스플레이 주식회사 | Donor film for thermal imprinting, manufacturing method thereof and manufacturing method of oled using the same |
CN103858059A (en) * | 2011-10-14 | 2014-06-11 | 佳能株式会社 | Electrophotographic member, process cartridge and electrophotographic device |
CN103184440B (en) * | 2011-12-27 | 2015-12-02 | 比亚迪股份有限公司 | Goods of a kind of surface selective metallization and preparation method thereof |
TWI506752B (en) * | 2012-04-18 | 2015-11-01 | Lg Chemical Ltd | Conductive structure body and method for manufacturing the same |
KR101983691B1 (en) * | 2012-08-17 | 2019-05-30 | 삼성디스플레이 주식회사 | Light blocking member and display panel including the same |
JP5694265B2 (en) * | 2012-10-02 | 2015-04-01 | 学校法人関東学院 | Electroless plating method and electroless plating film |
KR101468690B1 (en) * | 2012-11-19 | 2014-12-04 | 엔젯 주식회사 | Transparent electrode comprising elecrode line of high-vicosity conductive nano ink composition and touch sensor, transparent heater and electromagnetic wave shielding material using the transparent electrode |
TW201445006A (en) * | 2013-05-23 | 2014-12-01 | Byd Co Ltd | A method of selective metallizing a surface of a polymer article and a polymer article obtained thereof |
JP6275482B2 (en) * | 2013-06-03 | 2018-02-07 | 株式会社レグルス | Method for forming circuit pattern on plastic molded article and coating liquid used therefor |
US9448666B2 (en) | 2013-06-08 | 2016-09-20 | Microsoft Technology Licensing, Llc | Dark film lamination for a touch sensor |
CN106062887B (en) * | 2013-06-24 | 2018-11-30 | 休斯敦大学体系 | Metal nano net |
RU2554608C2 (en) * | 2013-07-01 | 2015-06-27 | Общество с ограниченной ответственностью "Солар" | Method for producing anti-reflective coating |
KR101617534B1 (en) * | 2013-08-01 | 2016-05-02 | 주식회사 엘지화학 | Method for manufacturing metal pattern having three dimensional structure |
TWI637466B (en) * | 2013-08-26 | 2018-10-01 | 三菱綜合材料股份有限公司 | Jointed body and power module substrate |
JP6079505B2 (en) | 2013-08-26 | 2017-02-15 | 三菱マテリアル株式会社 | Bonded body and power module substrate |
KR20150057032A (en) * | 2013-11-18 | 2015-05-28 | 삼성전기주식회사 | Touch panel, and manufacturing method thereof |
JP2015164030A (en) * | 2014-01-31 | 2015-09-10 | 住友金属鉱山株式会社 | Conductive substrate, conductive substrate laminate, method for producing conductive substrate, and method for producing conductive substrate laminate |
CN103935078B (en) * | 2014-04-04 | 2016-08-24 | 刘从余 | A kind of composite sheet and preparation method thereof and equipment |
JP5829746B1 (en) * | 2014-04-04 | 2015-12-09 | キヤノン・コンポーネンツ株式会社 | Conductive film, manufacturing method thereof, resin product with plating film, and manufacturing method thereof |
JP6275861B2 (en) * | 2014-09-29 | 2018-02-07 | 富士フイルム株式会社 | Laminated body, conductive laminated body and manufacturing method thereof, touch panel sensor, touch panel, transfer film |
CN104294244B (en) * | 2014-10-24 | 2017-05-31 | 中国科学院上海光学精密机械研究所 | The method that two-dimensional surface metal structure is realized in Laser-assisted chemical mixing plating |
US20190053381A1 (en) * | 2014-11-28 | 2019-02-14 | Industrial Technology Research Institute | Structure of conductive lines and method of manufacturing the same |
TWI584708B (en) * | 2014-11-28 | 2017-05-21 | 財團法人工業技術研究院 | Structure of conductive lines and method of manufacturing the same |
KR102412896B1 (en) | 2014-12-18 | 2022-06-24 | 삼성전자 주식회사 | Method and apparatus for supporting facility control of terminal |
CN107210097A (en) * | 2014-12-26 | 2017-09-26 | 日本科技先进有限公司 | There is the manufacture method and the manufacture method of wire netting substrate of the multilayer board of the electroconductive polymer layer of patterning on the transparent substrate |
US10506747B2 (en) * | 2015-02-12 | 2019-12-10 | West China Hospital, Sichuan University | Mouse for magnetic resonance, manufacturing method thereof, and signal transmission apparatus containing the same |
JP5843992B1 (en) * | 2015-05-01 | 2016-01-13 | 株式会社イオックス | Catalyst composition for electroless plating transfer film and electroless plating transfer film |
KR20170012679A (en) | 2015-07-22 | 2017-02-03 | 희성전자 주식회사 | Methods for manufacturing touch sensor and touch sensor manufactured thereby |
US9915002B2 (en) * | 2015-09-21 | 2018-03-13 | Ethan Pfeiffer | System and method for producing a nano metal mesh using a brittle film template for lithography |
KR102437034B1 (en) * | 2016-03-31 | 2022-08-29 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | Laser Seeding Method for Electrically Conductive Plating |
CN109492504B (en) * | 2017-09-12 | 2023-07-04 | 江西欧迈斯微电子有限公司 | Ultrasonic biological recognition device, preparation method thereof and electronic equipment |
TWI646672B (en) | 2017-12-01 | 2019-01-01 | 財團法人工業技術研究院 | Infrared sensing element and method of manufacturing same |
US10519595B2 (en) | 2017-12-29 | 2019-12-31 | Industrial Technology Research Institute | Composite textile |
CN112385147A (en) * | 2018-06-07 | 2021-02-19 | 大陆汽车有限责任公司 | Black-coloured objects having electromagnetic or electric field function |
US11167375B2 (en) | 2018-08-10 | 2021-11-09 | The Research Foundation For The State University Of New York | Additive manufacturing processes and additively manufactured products |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4743091A (en) | 1986-10-30 | 1988-05-10 | Daniel Gelbart | Two dimensional laser diode array |
DE3854107T2 (en) | 1987-04-06 | 1996-03-21 | Sigmax Ltd | Printable, flexible sheet for applying a pattern to an object by burning and label based on this sheet. |
US5256506A (en) | 1990-10-04 | 1993-10-26 | Graphics Technology International Inc. | Ablation-transfer imaging/recording |
SE468771B (en) | 1992-02-26 | 1993-03-15 | Perstorp Ab | DENDRITIC MACROMOLECYLE OF POLYESTER TYPE, PROCEDURES FOR PRODUCING THEREOF AND USING THEREOF |
SE503342C2 (en) | 1994-10-24 | 1996-05-28 | Perstorp Ab | Polyester-type hyperbranched macromolecule and process for its preparation |
US5994489A (en) * | 1994-10-24 | 1999-11-30 | The Dow Chemical Company | Adhesion promoter and self-priming arylcyclobutene resin compositions |
JP3585598B2 (en) | 1995-08-25 | 2004-11-04 | 大日本印刷株式会社 | Thermal transfer sheet |
US6207268B1 (en) | 1996-11-12 | 2001-03-27 | Dai Nippon Printing Co., Ltd. | Transfer sheet, and pattern-forming method |
US6765082B2 (en) | 1998-12-22 | 2004-07-20 | Bayer Aktiengesellschaft | Method for producing highly-branched glycidol-based polyols |
SE514207C2 (en) | 1999-03-23 | 2001-01-22 | Perstorp Ab | Hyperbranched dendritic polyether and process for its preparation |
KR20020062974A (en) * | 1999-12-28 | 2002-07-31 | 가부시키가이샤 닛폰 쇼쿠바이 | Multilayer material |
US6228555B1 (en) | 1999-12-28 | 2001-05-08 | 3M Innovative Properties Company | Thermal mass transfer donor element |
US6645681B2 (en) | 2000-12-15 | 2003-11-11 | E. I. Du Pont De Nemours And Company | Color filter |
JP2002185184A (en) | 2000-12-18 | 2002-06-28 | Dainippon Printing Co Ltd | Electromagnetic shield member and its manufacturing method |
JP4668438B2 (en) | 2001-03-08 | 2011-04-13 | 住友ゴム工業株式会社 | Electromagnetic wave shield plate and manufacturing method thereof |
JP2003025510A (en) * | 2001-07-16 | 2003-01-29 | Shin Etsu Chem Co Ltd | Multilayered laminate having reflection preventing properties and scratch resistance |
PT1427423E (en) | 2001-09-08 | 2007-03-30 | Astrazeneca Ab | Benzothiazepine and benzothiadiazepine derivatives with ileal bile acid transport (ibat) inhibitory activity for the treatment hyperlipidaemia |
US6767980B2 (en) * | 2002-04-19 | 2004-07-27 | Nippon Shokubai Co., Ltd. | Reactive diluent and curable resin composition |
EP1506094A1 (en) | 2002-05-17 | 2005-02-16 | E.I. Du Pont De Nemours And Company | Low molecular weight acrylic copolymer latexes for donor elements in the thermal printing of color filters |
MXPA04011470A (en) | 2002-05-21 | 2005-02-14 | Amgen Inc | Substituted heterocyclic compounds and methods of use. |
WO2004007810A1 (en) | 2002-07-12 | 2004-01-22 | Fujimori Kogyo Co., Ltd. | Electromagnetic wave shield material and process for producing the same |
KR100667067B1 (en) * | 2004-09-08 | 2007-01-10 | 삼성에스디아이 주식회사 | Donor substrate for laser induced thermal imaging method and electroluminescence display device manufactured using the same substrate |
US7270887B2 (en) * | 2004-10-13 | 2007-09-18 | Shin-Etsu Chemical Co., Ltd. | Antireflective coating, coating composition, and antireflective coated article |
US20080014532A1 (en) * | 2006-07-14 | 2008-01-17 | 3M Innovative Properties Company | Laminate body, and method for manufacturing thin substrate using the laminate body |
US7927454B2 (en) * | 2007-07-17 | 2011-04-19 | Samsung Mobile Display Co., Ltd. | Method of patterning a substrate |
-
2007
- 2007-10-23 US US11/877,637 patent/US7666568B2/en not_active Expired - Fee Related
-
2008
- 2008-10-23 JP JP2010531216A patent/JP2011503348A/en not_active Abandoned
- 2008-10-23 WO PCT/US2008/080851 patent/WO2009055515A1/en active Application Filing
- 2008-10-23 AT AT08842620T patent/ATE529266T1/en not_active IP Right Cessation
- 2008-10-23 KR KR1020107011123A patent/KR20100087018A/en not_active Application Discontinuation
- 2008-10-23 EP EP08842620A patent/EP2200838B1/en not_active Not-in-force
- 2008-10-23 CN CN200880112842.9A patent/CN101835624B/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO2009055515A1 * |
Also Published As
Publication number | Publication date |
---|---|
KR20100087018A (en) | 2010-08-02 |
JP2011503348A (en) | 2011-01-27 |
US20090104572A1 (en) | 2009-04-23 |
ATE529266T1 (en) | 2011-11-15 |
WO2009055515A1 (en) | 2009-04-30 |
EP2200838B1 (en) | 2011-10-19 |
US7666568B2 (en) | 2010-02-23 |
CN101835624B (en) | 2012-10-10 |
CN101835624A (en) | 2010-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7666568B2 (en) | Composition and method for providing a patterned metal layer having high conductivity | |
EP2201827B1 (en) | Negative imaging method for providing a patterned metal layer having high conductivity | |
US7901596B2 (en) | Metal compositions, thermal imaging donors and patterned multilayer compositions derived therefrom | |
JP5934137B2 (en) | Substrate patterning method | |
US8308886B2 (en) | Donor elements and processes for thermal transfer of nanoparticle layers | |
EP2041626B1 (en) | A process for enhancing the resolution of a thermally transferred pattern | |
WO2008010982A2 (en) | Thermally imageable dielectric layers, thermal transfer donors and receivers | |
WO2001017793A1 (en) | Thermal transfer element with a plasticizer-containing transfer layer and thermal transfer process | |
WO2008156908A1 (en) | Substrate and negative imaging method for providing transparent conducting patterns |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20100413 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA MK RS |
|
17Q | First examination report despatched |
Effective date: 20101011 |
|
DAX | Request for extension of the european patent (deleted) | ||
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H05K 9/00 20060101ALI20110307BHEP Ipc: H05K 3/18 20060101ALI20110307BHEP Ipc: H05K 3/04 20060101ALI20110307BHEP Ipc: B41M 5/382 20060101AFI20110307BHEP Ipc: B41M 5/392 20060101ALI20110307BHEP |
|
RTI1 | Title (correction) |
Free format text: METHOD FOR PROVIDING A PATTERNED METAL LAYER HAVING HIGH CONDUCTIVITY |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 602008010654 Country of ref document: DE Effective date: 20111215 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: VDEP Effective date: 20111019 |
|
LTIE | Lt: invalidation of european patent or patent extension |
Effective date: 20111019 |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: MK05 Ref document number: 529266 Country of ref document: AT Kind code of ref document: T Effective date: 20111019 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: NO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120119 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120219 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: MC Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20111031 Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120120 Ref country code: HR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120220 Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120119 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: MM4A |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
26N | No opposition filed |
Effective date: 20120720 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20111023 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 602008010654 Country of ref document: DE Effective date: 20120720 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20121018 Year of fee payment: 5 Ref country code: DE Payment date: 20121017 Year of fee payment: 5 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20121017 Year of fee payment: 5 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120130 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20111023 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121031 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121031 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20111019 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20131023 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20131023 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20140630 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 602008010654 Country of ref document: DE Effective date: 20140501 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20140501 Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20131031 |