EP2193363A1 - Elektrode für ein mikrofluidisches system - Google Patents

Elektrode für ein mikrofluidisches system

Info

Publication number
EP2193363A1
EP2193363A1 EP08835770A EP08835770A EP2193363A1 EP 2193363 A1 EP2193363 A1 EP 2193363A1 EP 08835770 A EP08835770 A EP 08835770A EP 08835770 A EP08835770 A EP 08835770A EP 2193363 A1 EP2193363 A1 EP 2193363A1
Authority
EP
European Patent Office
Prior art keywords
detection electrode
layer
microfluidic system
metal
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08835770A
Other languages
English (en)
French (fr)
Inventor
Edouard Brunet
Emmanuel Valentin
Géraldine DUISIT
Héléne GASCON
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Publication of EP2193363A1 publication Critical patent/EP2193363A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/307Disposable laminated or multilayered electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip

Definitions

  • the present invention relates to an electrode for a microfluidic system.
  • Microfluidic systems are known structures used in chemistry, physico-chemistry & biology, particularly in the following areas:
  • microreaction which aims to produce all kinds of compounds (molecules, particles, emulsions, etc.) from starting reagents introduced into a microfluidic system which acts as a synthesis reactor,
  • microfluidic systems performs the function of detector.
  • the role of microfluidic systems is not however limited to the aforementioned functions; in particular, microfluidic systems may be designed to function as heat exchangers, filters, mixers, extractors, separators (for example operating by electrophoresis), devices for generating droplets of given size or solid particles, or as devices allowing to carry out particular operations (cell lysis, amplification of DNA, ).
  • miniaturization of chemical or biological analysis systems is a marked trend in chemistry and analytical biochemistry. This makes it possible, on the one hand, to reduce the analysis times and, on the other hand, to reduce the quantity of reagents required. Miniaturization also makes it possible to integrate in the same system several steps of a detection protocol, which increases automation and therefore reduces handling costs. Miniaturization implies ever weaker detection volumes, hence the development of detection techniques and the development of increasingly sensitive detection components. Under these components, detection electrodes, in particular electrochemical electrodes, which are generally based on gold or platinum, are known to guarantee electrochemical stability and biological and chemical compatibility.
  • these noble materials are deposited on rigid substrates or substrates based on inorganic material (silico-soda-lime glass) or organic material, in particular thermoplastics (polycarbonate, polymethylmethacrylate, polyimide, etc.).
  • inorganic material silicon-soda-lime glass
  • thermoplastics polycarbonate, polymethylmethacrylate, polyimide, etc.
  • the present invention proposes to overcome the drawbacks of the electrochemical detection electrodes of the prior art by proposing a biologically compatible and electrochemically stable metallic layer electrode configuration (stability in operation and stability during eventual storage).
  • the detection electrode for a microfluidic system is characterized in that it comprises a substrate of which at least one surface portion is coated by a stack of thin layers comprising a metal layer with intrinsic properties of electrical conductivity, said metal layer being associated with a so-called electrochemical barrier layer, said electrochemical barrier layer being associated with a terminal layer ensuring the biological compatibility and the electrochemical functionality (exchange of electric charges with molecules of the sample). This last layer also ensures the chemical and biological inertness of the electrode.
  • this particular stacking structure it is possible to obtain, at lower cost, a detection electrode having an electrochemical resistance and a chemical and biological compatibility which makes its use possible within microfluidic analysis systems.
  • the end layer further allows an exchange of electrical charges with molecules of the biological sample. This last layer also ensures the chemical and biological inertness of the electrode.
  • the single figure shows the oxidation of the electrode as a function of the applied voltage.
  • the metal layer is based on a pure material chosen from silver, or copper, zinc, or aluminum
  • the electrochemical barrier layer is based on a metal or on the basis of a nitride of this metal, this metal possibly being, for example, titanium, or an electron-conduction oxide of the aluminum doped zinc oxide type (ZnO: A1); , mixed indium tin oxide (ITO), mixed indium zinc oxide (IZO) -
  • the chemical and biological compatibility layer is based on a noble metal material selected for example from gold or platinum or any other metal compatible with the products to be tested.
  • the thickness of the metal layer is between 50 to 1000 nm preferably between 150 to 500 nm, and even more preferably substantially close to 200 nm.
  • the thickness of the electrochemical barrier layer is between 10 and 100 nm, preferably between 15 and 50 nm, and even more preferably substantially close to 20 nm.
  • the thickness of the chemical and biological compatibility layer is between 10 to 100 nm, preferably between 15 to 50 nm, and even more preferably substantially close to 20 nm.
  • the thickness of the layer of hooking between 2 and 10 nm it comprises a stack of layers of the Cu / TiNi / Au or TiN / Ag / Ti / Au type.
  • the detection electrode for a microfluidic system has an electrical resistivity of between 0.1 and 10 ohm. square, which makes its use as a perfectly satisfactory electrode.
  • it has a total thickness of between 200 and 500 nm.
  • the electrode according to the invention is deposited, for example, by vacuum deposition techniques (for example by magnetic field assisted sputtering) or by electroplating on a substrate, which will thus constitute with the electrode a microfluidic system.
  • the substrate of the microfluidic system can be made of materials of different kinds.
  • polymer silicon or metal.
  • these materials are unsatisfactory in many ways: the polymers are most often sensitive to certain organic solvents, are difficult to withstand prolonged treatments at temperatures above 200-300 ° C., deform under the effect of pressure, and are not entirely chemically inert (they can adsorb compounds present in the fluids, possibly salting them out later).
  • the surface condition of the polymers is difficult to control, in particular because it can change over time.
  • some polymers are not adapted to detection techniques operating by spectroscopy, in particular Raman, because of the disturbances they may cause.
  • metals are likely to corrode, are not transparent or compatible with certain biological fluids, and are not compatible with the use of electrical function.
  • support substrate for the electrode according to the invention glass, glass-ceramic or ceramic.
  • a metal layer with intrinsic properties of electrical conductivity which is based on a pure material chosen from silver, or copper, zinc, aluminum and whose thickness is between 50 and 1000 nm, preferably between between 150 to 500 nm, and even more preferably substantially close to 200 nm.
  • an electrochemical barrier layer which is based on a metal or on the basis of a nitride of this metal, this metal possibly being, for example, titanium or an electronically conductive oxide of the ZnO: Al, ITO, IZO type;
  • a chemical and biological compatibility layer which is based on a noble metallic material chosen from gold and platinum.
  • a hooked layer of a few nanometers, for example 1 and 10 nm, is deposited between the substrate and the metal layer. This layer of hooked can be based on titanium, chromium, nickel
  • CVD Chemical Vapor Deposition
  • electroplating electroplating
  • spraying etc.
  • an exemplary embodiment of an electrode for a microfluidic system according to the invention is given below.
  • the glass is 0.7 mm sodocalcic and coated with a stack of Cu / TiNi / Au type magnetron deposited thin films.
  • This electrode has a resistivity of 1 Ohm. square and a biological compatibility allowing the electrochemical interaction of the electrode with proteins in solution, without degrading them.
  • the electrochemical detection electrode then undergoes surface treatments which, after removal of material forming the stack, form a plurality of detection cells.
  • the array of detection cells can be obtained by physical etching, in particular by sand blasting or by irradiation using a CO 2 laser (JP-A-2000-298109), or by chemical etching of stacking.
  • the detection cell array in several steps (depositAg / etchAg - depositTi / etchTi depositAu / etchAu), which makes it possible to modulate the lateral dimensions of each of the deposits, in particular to overcome any contamination by the edges.
  • a deposition method based on electrodeposition is also well suited.
  • the glass-function substrate advantageously has large dimensions so that several patterns can be made simultaneously, and therefore a large number of detection cells can be obtained in a single operation.
  • substrates having a surface area of up to several square meters which makes it possible to make several thousand detection cells on a single substrate that can be subsequently cut into complete unit elements.
  • the detection cells obtained in accordance with the invention have microstructures having a substantially square or rectangular cross section, which may be slightly rounded at the level of the substrate, having a depth that may range from several tens of microns to a few ⁇ m, or even less than micron.
  • Systems entirely made of glass are interesting in that the substrate or substrates which constitute them have a small thickness and are transparent, which allows their use in complementary techniques of optical detection.
  • the pure Ag electrode is oxidized as early as 0.4 V with an oxidation peak centered around 0.5-0.6 (dashed curve).
  • An overlay of 20 nm Au slightly limits the oxidation of Ag (square dot curve).
  • the most effective protection is obtained with the Ti electrochemical barrier layer (12 nm) where the Ag starts to be oxidized only from 1.5 V (DC line curve).
  • the electrode undergoes an oxidation cycle using a so-called 'three-electrode' assembly with a working electrode (studied electrode), a reference electrode (saturated calomel electrode). ) and a counter-electrode (glass + 500 nm ITO) immersed in a liquid electrolyte H3PO4 (orthophosphoric acid).
  • a working electrode studied electrode
  • a reference electrode saturated calomel electrode
  • a counter-electrode glass + 500 nm ITO immersed in a liquid electrolyte H3PO4 (orthophosphoric acid).

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
EP08835770A 2007-09-18 2008-09-08 Elektrode für ein mikrofluidisches system Withdrawn EP2193363A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0757646A FR2921157A1 (fr) 2007-09-18 2007-09-18 Electrode pour systeme microfluidique
PCT/FR2008/051598 WO2009044063A1 (fr) 2007-09-18 2008-09-08 Electrode pour systeme microfluidique

Publications (1)

Publication Number Publication Date
EP2193363A1 true EP2193363A1 (de) 2010-06-09

Family

ID=39301095

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08835770A Withdrawn EP2193363A1 (de) 2007-09-18 2008-09-08 Elektrode für ein mikrofluidisches system

Country Status (3)

Country Link
EP (1) EP2193363A1 (de)
FR (1) FR2921157A1 (de)
WO (1) WO2009044063A1 (de)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4324761A (en) * 1981-04-01 1982-04-13 General Electric Company Hydrogen detector
US5119441A (en) * 1989-03-28 1992-06-02 Ricoh Company, Ltd. Optical character recognition apparatus and method using masks operation
US5110441A (en) * 1989-12-14 1992-05-05 Monsanto Company Solid state ph sensor
US5989402A (en) * 1997-08-29 1999-11-23 Caliper Technologies Corp. Controller/detector interfaces for microfluidic systems
US20050103624A1 (en) * 1999-10-04 2005-05-19 Bhullar Raghbir S. Biosensor and method of making
US6662439B1 (en) * 1999-10-04 2003-12-16 Roche Diagnostics Corporation Laser defined features for patterned laminates and electrodes
US6783647B2 (en) * 2001-10-19 2004-08-31 Ut-Battelle, Llc Microfluidic systems and methods of transport and lysis of cells and analysis of cell lysate
JP4417116B2 (ja) * 2002-03-05 2010-02-17 カリパー・ライフ・サイエンシズ・インク. 混合式マイクロ流体システム
US20060022130A1 (en) * 2004-07-29 2006-02-02 Predicant Biosciences, Inc., A Delaware Corporation Microfluidic devices and methods with integrated electrical contact

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009044063A1 *

Also Published As

Publication number Publication date
WO2009044063A1 (fr) 2009-04-09
FR2921157A1 (fr) 2009-03-20

Similar Documents

Publication Publication Date Title
FR2872438A1 (fr) Dispositif de deplacement et de traitement de volumes de liquide
Kretschmer et al. Pearl chain formation of nanoparticles in microelectrode gaps by dielectrophoresis
Mendoza et al. Improvements in the characterization of the crystalline structure of acid-terminated alkanethiol self-assembled monolayers on Au (111)
Nioradze et al. Organic contamination of highly oriented pyrolytic graphite as studied by scanning electrochemical microscopy
EP2576056B1 (de) Verfahren zur herstellung eines microfluiden chips, chip und assoziierte platte
EP1543080B1 (de) Verfahren zum belegen einer oberfläche mit einem organischen film
WO2010067083A9 (en) Nanotube electrochemistry
EP2269722A1 (de) Mikrofluid-Vorrichtung, die zwei wasserabweisende, miteinander verbundene Schichten umfasst und entsprechendes Verbundverfahren
WO2010024446A1 (ja) 光電流による被検物質の特定的検出に用いられる電極部材
CA2731977A1 (fr) Materiau solide composite electriquement conducteur et procede d'obtention d'un tel materiau
EP1379338B1 (de) Maskenloses verfahren zur lokalisierten organischen pfropfung auf leitfähigen oder halbleitfähigen teilen von verbundoberflächen
Tan et al. Multilayer graphene—A promising electrode material in liquid cell electrochemistry
Roy et al. Scanning electron microscopy observation of nanoscopic wetting of TiO2 nanotubes and ODS modified nanotubes using ionic liquids
EP2350634B1 (de) Mikrofluidikvorrichtung zur trennung oder auftrennung oder vorkonzentrierung von in einem elektrolyten enthaltenen analyten
Lian et al. Amorphous silicon on indium tin oxide: a transparent electrode for simultaneous light activated electrochemistry and optical microscopy
US20090166222A1 (en) Electrical nanotraps for spectroscopically characterizing biomolecules within
EP3371581A1 (de) Vorrichtung zur elektrochemischen detektion durch amperometrie von mindestens einer elektroaktiven spezies in einem flüssigen medium
WO2009044063A1 (fr) Electrode pour systeme microfluidique
Mutoro et al. Janus-faced SiO2: Activation and passivation in the electrode system platinum/yttria-stabilized zirconia
EP1937409A1 (de) Vorrichtung zur steuerung der verdrängung eines flüssigkeitsvolumens zwischen zwei oder mehr massiven substraten und verdrängungsverfahren
Zhong et al. Electrochemical studies of cytochrome c on gold electrodes with promotor of humic acid and 4-aminothiophenol
FR2746678A1 (fr) Procede de realisation d'un depot sur un support amovible, et depot realise sur un support
EP3856415B1 (de) Verfahren zur reinigung und/oder regenerierung eines mikrofluidischen glassensors zur analyse von metallen
FR2862239A1 (fr) Dispositif de reception d'un echantillon de fluide, et ses applications
EP3390685B1 (de) Verfahren zum schutz einer metallischen oberfläche eines bauteils mittels diamantbeschichtung und so hergestelltes teil

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20100419

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

RIN1 Information on inventor provided before grant (corrected)

Inventor name: GASCON, HELENE

Inventor name: DUISIT, GERALDINE

Inventor name: VALENTIN, EMMANUEL

Inventor name: BRUNET, EDOUARD

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20140401