EP2141968A3 - Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas - Google Patents

Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas Download PDF

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Publication number
EP2141968A3
EP2141968A3 EP20090006430 EP09006430A EP2141968A3 EP 2141968 A3 EP2141968 A3 EP 2141968A3 EP 20090006430 EP20090006430 EP 20090006430 EP 09006430 A EP09006430 A EP 09006430A EP 2141968 A3 EP2141968 A3 EP 2141968A3
Authority
EP
European Patent Office
Prior art keywords
generating
atmospheric pressure
pressure plasma
readjust
deviations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20090006430
Other languages
English (en)
French (fr)
Other versions
EP2141968A2 (de
EP2141968B1 (de
Inventor
Michael Bisges
Thorsten Krüger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maschinenfabrik Reinhausen GmbH
Scheubeck GmbH and Co
Original Assignee
Maschinenfabrik Reinhausen GmbH
Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maschinenfabrik Reinhausen GmbH, Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG filed Critical Maschinenfabrik Reinhausen GmbH
Priority to PL09006430T priority Critical patent/PL2141968T3/pl
Publication of EP2141968A2 publication Critical patent/EP2141968A2/de
Publication of EP2141968A3 publication Critical patent/EP2141968A3/de
Application granted granted Critical
Publication of EP2141968B1 publication Critical patent/EP2141968B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H05H1/2481—Generating plasma using acoustic pressure discharges the plasma being activated using piezoelectric actuators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Acoustics & Sound (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Die vorliegende Erfindung betrifft eine Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas, bei der es während des Betriebes, trotz auftretender Temperaturschwankungen, zu keinen Leistungsverlusten im verwendeten Piezoelement kommt und die auch bei steigender Betriebsdauer eine annähernd gleichbleibend hohe Wandlungseffizienz der Piezoelemente sicherstellt. Dafür weist die erfindungsgemäße Vorrichtung eine Ansteuerplatine auf, die aus einem Frequenz- und Spannungswandler sowie einem Regelkreis besteht, die das Verhalten des piezokeramischen Elements überwacht und den optimalen Betriebspunkt bei Abweichungen nachregelt.
EP09006430.4A 2008-07-04 2009-05-13 Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas Active EP2141968B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL09006430T PL2141968T3 (pl) 2008-07-04 2009-05-13 Urządzenie do wytwarzania plazmy pod ciśnieniem atmosferycznym

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202008008980U DE202008008980U1 (de) 2008-07-04 2008-07-04 Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas

Publications (3)

Publication Number Publication Date
EP2141968A2 EP2141968A2 (de) 2010-01-06
EP2141968A3 true EP2141968A3 (de) 2014-01-22
EP2141968B1 EP2141968B1 (de) 2016-07-13

Family

ID=39736799

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09006430.4A Active EP2141968B1 (de) 2008-07-04 2009-05-13 Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas

Country Status (3)

Country Link
EP (1) EP2141968B1 (de)
DE (1) DE202008008980U1 (de)
PL (1) PL2141968T3 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010027795A1 (de) 2010-04-15 2011-10-20 BSH Bosch und Siemens Hausgeräte GmbH Hausgerät mit Plasmagenerator und Verfahren zu seinem Betrieb
DE102012104137A1 (de) * 2012-05-11 2013-11-14 Maschinenfabrik Reinhausen Gmbh Feldgesteuerter Verbundisolator
DE102013100617B4 (de) * 2013-01-22 2016-08-25 Epcos Ag Vorrichtung zur Erzeugung eines Plasmas und Handgerät mit der Vorrichtung
DE102013107448B4 (de) 2013-07-15 2016-11-24 Relyon Plasma Gmbh Anordnung zur Keimreduktion mittels Plasma
DE102013113941B4 (de) 2013-12-12 2015-07-23 Reinhausen Plasma Gmbh Anordnung zur Behandlung von Wunden
DE102015204753A1 (de) 2015-03-17 2016-10-20 Tesa Se Niedertemperatur-Plasma-Behandlung
DE102016102585A1 (de) * 2016-02-15 2017-08-17 Epcos Ag Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
DE102016104490B3 (de) 2016-03-11 2017-05-24 Epcos Ag Vorrichtung und Verfahren zur Erzeugung eines nichtthermischen Atmosphärendruck-Plasmas
DE102017105430A1 (de) 2017-03-14 2018-09-20 Epcos Ag Vorrichtung zur Erzeugung eines nichtthermischen Atmosphärendruck-Plasmas und Wirkraum
DE102019106767A1 (de) * 2019-03-18 2020-09-24 Relyon Plasma Gmbh Anordnung zur Dekontamination einer Oberfläche von Objekten und Verfahren zur Dekontamination einer Oberfläche von Objekten
DE102020100823B4 (de) * 2020-01-15 2021-10-14 Nova Plasma Ltd Vorrichtung zur Erzeugung eines Plasmas und Verfahren zur Durchführung einer Plasmabehandlung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004237135A (ja) * 2003-02-03 2004-08-26 Nissan Motor Co Ltd 触媒素子及びこれを用いた排気ガス浄化装置
DE102005032890A1 (de) * 2005-07-14 2007-01-18 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung von Atmosphärendruck-Plasmen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008018827B4 (de) 2008-04-15 2010-05-12 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004237135A (ja) * 2003-02-03 2004-08-26 Nissan Motor Co Ltd 触媒素子及びこれを用いた排気ガス浄化装置
DE102005032890A1 (de) * 2005-07-14 2007-01-18 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung von Atmosphärendruck-Plasmen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TERANISHI K ET AL: "A novel generation method of dielectric barrier discharge and ozone production using a piezoelectric transformer", JAPANESE JOURNAL OF APPLIED PHYSICS, THE JAPAN SOCIETY OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, TOKYO; JP, vol. 43, no. 9B, 1 September 2004 (2004-09-01), pages 6733 - 6739, XP002432140, ISSN: 0021-4922, DOI: 10.1143/JJAP.43.6733 *

Also Published As

Publication number Publication date
EP2141968A2 (de) 2010-01-06
EP2141968B1 (de) 2016-07-13
PL2141968T3 (pl) 2017-06-30
DE202008008980U1 (de) 2008-09-04

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