EP2140046A1 - Device and process for producing poly-crystalline or multi-crystalline silicon; ingo as well as wafer of poly-crystalline or multi-crystalline... - Google Patents
Device and process for producing poly-crystalline or multi-crystalline silicon; ingo as well as wafer of poly-crystalline or multi-crystalline...Info
- Publication number
- EP2140046A1 EP2140046A1 EP07857085A EP07857085A EP2140046A1 EP 2140046 A1 EP2140046 A1 EP 2140046A1 EP 07857085 A EP07857085 A EP 07857085A EP 07857085 A EP07857085 A EP 07857085A EP 2140046 A1 EP2140046 A1 EP 2140046A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- silicon
- melt
- gas
- oxygen
- ingot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title abstract description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 101
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 101
- 239000010703 silicon Substances 0.000 claims abstract description 101
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000007789 gas Substances 0.000 claims abstract description 52
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 50
- 239000001301 oxygen Substances 0.000 claims abstract description 49
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 44
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 41
- 239000007858 starting material Substances 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 29
- 239000000155 melt Substances 0.000 claims abstract description 26
- 229910021419 crystalline silicon Inorganic materials 0.000 claims abstract description 25
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 20
- 238000001556 precipitation Methods 0.000 claims abstract description 16
- 230000036961 partial effect Effects 0.000 claims abstract description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000007787 solid Substances 0.000 claims abstract description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 5
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 5
- 239000012530 fluid Substances 0.000 claims abstract description 4
- 238000007711 solidification Methods 0.000 claims description 38
- 230000008023 solidification Effects 0.000 claims description 38
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 235000012431 wafers Nutrition 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 238000009833 condensation Methods 0.000 claims description 6
- 230000005494 condensation Effects 0.000 claims description 6
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 6
- 230000002829 reductive effect Effects 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 229910052810 boron oxide Inorganic materials 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229940119177 germanium dioxide Drugs 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 239000012071 phase Substances 0.000 claims 5
- 229910011255 B2O3 Inorganic materials 0.000 claims 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims 2
- 229910052681 coesite Inorganic materials 0.000 claims 2
- 229910052906 cristobalite Inorganic materials 0.000 claims 2
- 229910052682 stishovite Inorganic materials 0.000 claims 2
- 229910052905 tridymite Inorganic materials 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910000019 calcium carbonate Inorganic materials 0.000 claims 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims 1
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 239000007792 gaseous phase Substances 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 25
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 7
- 150000001875 compounds Chemical class 0.000 abstract description 6
- 239000002244 precipitate Substances 0.000 description 18
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 14
- 239000013078 crystal Substances 0.000 description 11
- 230000000875 corresponding effect Effects 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 6
- -1 Si3N4 Chemical class 0.000 description 5
- 229910002090 carbon oxide Inorganic materials 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011010 flushing procedure Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000002939 deleterious effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 102100030187 Diacylglycerol kinase kappa Human genes 0.000 description 1
- 101000864603 Homo sapiens Diacylglycerol kinase kappa Proteins 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910020776 SixNy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000036314 physical performance Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910021422 solar-grade silicon Inorganic materials 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/006—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/04—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt
- C30B11/06—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt at least one but not all components of the crystal composition being added
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a device as well as a process for producing crystalline silicon, in particular poly- or multi-crystalline silicon, by directed solidification, to an ingot (bulk crystal) produced thereby and silicon wafers obtained by separating the ingot, as well as use of the silicon wafers for the manufacture of solar cells.
- Directed (or oriented) solidification of a silicon starting material for producing poly-crystalline or multi-crystalline silicon for use in photovoltaics or for manufacturing solar cells is known and becomes more and more important, in view of the demand for producing solar cells at low costs compared to other more expensive and complex manufacturing techniques.
- a particular problem in the production of poly- or multi- crystalline silicon by directed solidification is the formation of foreign precipitates or inclusions for foreign matter in the obtained ingot of the crystalline silicon. Such precipitates or inclusions form interfering impurities in the silicon wafer produced from the ingot, and correspondingly in the subsequently produced solar cell .
- electrically active precipitates of silicon carbide are interfering, which transforms, for example, to a local heating by short circuits in the regions of the precipitates in the finally used device.
- Precipitates or inclusions based on nitrides, such as Si 3 N 4 , or based on oxides having respectively different compositions, are undesirable, too. In total, the efficiency and the performance of the produced solar cell may be affected.
- Document DE 198 10 019 Al addresses the problem of undesirable, but inevitable impurities such as oxygen or carbon, respectively introduced by the procedural technology (for example oxygen derived from a quartz crucible, or carbon derived from graphite components of the crystallization apparatus) .
- the DE 198 10 019 Al proposes to previously add to the starting material impurities of arsenic and/or antimony by purpose, in order to obtain solar cell efficiencies which are equivalent to a multi-crystalline silicon sample using a highly pure silicon starting material.
- an object of the present invention is to provide a process and a device, by which precipitates or inclusions of foreign matter can be eliminated or avoided in the directed solidification of crystalline, in particular of poly- or multi-crystalline silicon, and to provide corresponding ingots as well as wafers obtained therefrom, made of poly- or multi- crystalline silicon, which wafers are suitable for the manufacture of solar cells.
- a process for producing crystalline silicon comprising the steps: • forming a melt from a silicon starting material,
- the present invention further provides an apparatus or device for producing crystalline silicon, comprising:
- At least one heater (6, 7) for heating the crucible wherein the device is arranged such that a) a concentration of a foreign atom selected from oxygen, carbon and nitrogen within the silicon melt (1) and thus within the solidified crystalline silicon (2) is controllable; and/or b) a partial pressure of a gaseous component in a gas phase arranged above the silicon melt is adjustable and/or controllable, the gaseous component being selected from the group consisting of oxygen gas, carbon gas and nitrogen gas and gaseous species containing at least one element selected from oxygen, carbon and nitrogen.
- the present invention further provides an ingot formed of crystalline silicon through directed solidification of a silicon starting material, wherein the ingot comprises no or essentially no foreign precipitations or inclusions of silicon carbide (SiC) and/or silicon nitride (SiN, Si 3 N 4 ) .
- the present invention provides a silicon wafer made of crystalline silicon, in particular of poly-crystalline or multi-crystalline silicon, obtained by separation or individualization from the aforementioned ingot.
- the silicon wafer according to the present invention is preferably used for the manufacture of a solar cell .
- nitrides such as generally Si x N y (wherein x and y, independently from each other, respectively denote integers ranging e.g. from 1 to 6) or specifically Si 3 N 4 , carbides such as SiC and oxides such as SiO and/or SiO 2 , is based on thermo-chemical or thermo-dynamic considerations.
- foreign matter impurities and especially foreign compounds different from pure silicon is meant. Measures are undertaken or conditions are created such that the formation of precipitations or inclusions are thermo-chemically or thermo-dynamicalIy not favoured, or are even completely suppressed.
- partial pressures of gaseous components containing oxygen (including oxygen- containing gases) , carbon (including carbon-containing gases such as carbon oxide gases) and/or nitrogen (including nitrogen-containing gases such as nitrogen oxide gases) existing above the silicon melt is (are) adjusted.
- a concentration of a foreign atom selected from oxygen, carbon and/or nitrogen within the silicon melt and thus within the solidified poly- or multi- crystalline silicon is controlled.
- An effective aim consists in that an oxygen concentration within the melt is caused not to decrease crizow a critical value or level as long as possible and preferably during the whole period of performing the directed solidification step.
- a concentration of C 3 (C within the Si-lattice) , which is found to be anti-correlated with the oxygen concentration, is compensated in its deleterious effect, or higher values or levels of C s within the melt and then in the solid Si can be tolerated.
- a suitable oxygen concentration within the melt and consequently within the solidified silicon (Si) protects thermo-chemically against formation of inclusions or precipitates of foreign matter and in particular against the formation of highly critical carbide (SiC) .
- Analogous thermo- chemical concentrations apply for the formation or avoidance of nitrides.
- SiO may condensate at relatively cold locations such as, e.g., a cold wall of the production apparatus, or it may disproportionate into SiO 2 and Si.
- the SiO 2 -crucible is subject to being dissolved by the Si -melt under the formation of SiO, which primarily transforms into a certain oxygen concentration in the melt and eventually expresses itself as oxygen being present on interstitial lattice sites or, at higher concentrations, at the grain boundaries/interfaces .
- the molten silicon starting material is solidified in a covered crucible being essentially separated to the outside, preferably being hermetically sealed, with the optional exception that an inlet for delivering inert carrier gas (for example argon) or an inlet for delivering oxygen-, carbon- and/or nitrogen-containing gaseous species (for example CO, CO 2 , NO or NO 2 ) into a gas space above the silicon melt are respectively provided for establishing an equilibrium gas atmosphere in the crucible.
- the crucible is designed in a manner that a limited, closed gas space is provided above the silicon melt. This is realized in a technically particularly effective, yet an easy manner such by sealing the crucible via a cover or a plate.
- the cover or a plate preferably is made of by temperature-resistant graphite or temperature-resistant ceramic.
- all components of a furnace surrounding the silicon melt can be brought to and/or maintained at a temperature during the phase of the solidification of the silicon lying above condensation temperatures of oxide species such as silicon oxide (in particular silicon monoxide and possibly also silicon dioxide) .
- oxide species such as silicon oxide (in particular silicon monoxide and possibly also silicon dioxide) .
- a relatively gas-tight vessel with hot walls surrounding the silicon melt is formed, where SiO can not condensate or disproportionate at the walls, or where CO possibly formed at the furnace wall can not react with the silicon melt.
- the partial pressures of critical gases affecting the thermo-chemical and thermo-dynamic processes as explained above are favourably influenced such that the formation of foreign matter such as compound precipitates is minimized or eliminated.
- a possible further option is to deliver an inert gas and/or gaseous species containing oxygen, carbon and/or nitrogen in a controlled manner into the gas space above the silicon melt via appropriate sources, pipes and valves in order to adjust an equilibrium gas atmosphere that finally inhibits and prevents compound precipitates.
- a cover material overlaying the silicon melt preferably a powdery, a granular or a molten cover material may be used.
- the cover material is preferably selected from the group consisting of pure oxides or pure carbonides of elements of the III. and IV. main group of the periodic table of elements, or mixtures thereof.
- suitable cover materials include silicon dioxide, germanium dioxide, aluminum oxide, boron oxide, or a mixture of the aforementioned oxides. Covering the melt advantageously further contributes to avoiding condensation areas. Furthermore, formed CO can be continuously withdrawn from the silicon melt.
- cover material may contribute to a further advantageous effect, namely by using a cover material overlying the silicon melt and containing a dopant compound, such as, e.g., boron oxide, aluminum oxide and/or germanium oxide.
- a cover material may simply be applied by distributing a powder, pellets or particles on the silicon starting material.
- a chemically inert gas is enclosed within the defined space above the silicon melt and optionally the silicon starting material, preferably in a manner that the chemically inert gas in a heated status represents the only or essentially the only carrier gas in the space separated from the outside.
- the inert gas then can contribute to controlling and maintaining partial pressures of the aforementioned gaseous species within the gas phase above the silicon for inhibiting the formation of foreign matter.
- steady-state equilibrium means allowing a controlled gas atmosphere, distinguished from an uncontrolled flush gas stream.
- the chemically inert gas is argon.
- Another preferred measure is to control and/or reduce residual water or moisture content, and/or to control and/or reduce oxide impurities from starting materials and/or from components of the production device communicating with the silicon melt during the production process.
- residual water or moisture content can be reduced by using a silicon starting material, whose water content had been reduced, or by extracting residual moisture by suction out of the space surrounding the silicon material before crystallization by solidification is started. Therefore, it may preferably be sufficient to seal, or to separate the space surrounding the silicon melt from the outside just for the solidification phase.
- the present invention allows to surely prevent the formation of foreign matter, in particular that of SiC- precipitates or -inclusions, in spite of a certain CO- concentration in the gas phase and/or a C-concentration in the Si-melt.
- controlling the oxygen content in the silicon melt can compensate an anti-correlated presence of carbon in the melt.
- the Si x N 7 of formation e.g. Si 3 N 4
- an ingot based on crystalline silicon in particular mono-crystalline and more preferably poly-crystalline or multi-crystalline silicon, which has been obtained by directed solidification of a silicon starting material and which contains no or essentially no foreign precipitations or inclusions of silicon carbide (SiC) and/or silicon nitride (SiN, Si 3 N 4 , etc.) .
- SiC silicon carbide
- SiN silicon nitride
- "essentially no foreign precipitations or inclusions” means that no short circuits occur during normal operational use of the wafer or the solar cell obtained according to the present invention.
- an ingot can be realized according to the present invention with the feature that the oxygen concentration does not drop below a critical limit "essentially” in the whole ingot, where "essentially” means in relation to ingot sections ranging in the majority from the bottom to the head of a solidified ingot or at least up to almost the tip of a head, e.g.
- the level of the limit, below which the oxygen concentration shall not fall also depends on the carbon concentration C 3 , which should be observed at the same time, because both values relate to each other in an anti-correlation.
- the oxygen concentration should not drop below a limit about 3.5 x 10 17 cm “3 , preferably combined with a maximum carbon concentration of at most about IxIO 18 cm “3 , wherein the concentrations are respectively defined relative to a correspondingly solidified ingot section (i.e.
- the oxygen concentration in at least 90% of the height and preferably in the whole ingot should, on the other hand, lie preferably below about IxIO 19 Cm "3 , more preferably below about lxl ⁇ 18 cm “3 . With respect to the carbon concentration, it is moreover sufficient, if it lies below a limit of about 6xl0 17 cm "3 .
- the mentioned values refer to respectively solidified ingot sections obtained from the process described above, i.e. sections that are usable for the recovery of silicon wafers and subsequently for the manufacture of solar cells.
- the desired silicon wafers made of crystalline, in particular mono-crystalline and preferably poly- or multi -crystalline silicon, may then be- obtained from the ingots described above by separation or individualization.
- a suitable separation process is by sawing.
- the invention offers the highly valuable advantage that, on the one hand, usable silicon wafers can be recovered from a larger region of the ingot, which significantly counteracts material loss. On the other hand, the invention ensures that all usable wafers recovered from a single ingot are defect -free. Physical properties and performance of the obtained wafers as well as system economy as a whole are significantly improved according to the present invention.
- wafers of crystalline, in particular mono- crystalline and preferably poly- or multi-crystalline silicon are therefore particularly suitable for the manufacture of solar cells.
- the steps required for the manufacture of solar cells are well-known to the person skilled in the art.
- epitaxial layers may be deposited and devices other than solar cells can be beneficially manufactured.
- dopants may be incorporated into the silicon crystal, for example including at least one element of group III and/or at least one element of group V of the periodic table of elements, such as, e.g., B, P, Al, Ga and/or In.
- FIG. 1 shows a schematic illustration of an apparatus or device for the production of poly- or multi- crystalline silicon by directed solidification according to an embodiment of the present invention
- Fig. 2 shows a schematic illustration of a further apparatus or device for the production of poly- or multi-crystalline silicon by directed solidification according to another embodiment of the present invention
- Fig. 3 shows a schematic illustration of still another apparatus or device for the production of poly- or multi-crystalline silicon by directed solidification according to still another embodiment of the present invention.
- Fig. 4 shows a schematic scheme and charts with respect to a relationship between the oxygen concentration and the carbon concentration within an ingot made of solidified crystalline silicon, and how this relationship is controllable according to the present invention.
- a silicon starting material is placed in a crucible 5.
- the silicon starting material may be undoped or, if desired, may contain a suitable dopant and correspondingly be, for example, p-doped or n-doped by respectively suitable dopants such as, e.g., boron, phosphorous or the like.
- a suitable material for crucible 5 is quartz (SiO 2 ) or graphite, which may optionally be coated by a chemically and thermally stable material .
- a multiple zone heater 6 circumferentially surrounding the crucible serves here as a heater to impress a temperature gradient such, that solidification is caused from the bottom up for forming multi-crystalline silicon 2.
- a locally fixed heater 6' is provided, and a temperature gradient is generated by moving down the crucible to a desired extend where the crucible is not surrounded by the fixed heater elements.
- a casing 10 for the furnace is schematically shown for illustration purposes, too.
- Reference sign 3 in Figs. 1 to 3 represents the phase boundary interface between the liquid or fluid Si -melt 1 and the solid multi-crystalline Si 2.
- a limited gas space 4 is created (indicated by a hatched region) which is totally separated to the outside, whereby thermo-chemical processes are allowed to be controlled in the gas phase above the melt. Partial pressures of relevant gaseous components are adjusted as well.
- further means for controlling and/or maintaining a defined partial pressure of oxygen-, carbon- and/or nitrogen-containing gaseous components in the gas phase above the melt, such that a formation of precipitations or inclusions of SiC and/or Si x N 7 (e.g. Si 3 N 4 ) in the Si-melt and in the Si -crystal 2 can be prevented further.
- SiC and/or Si x N 7 e.g. Si 3 N 4
- Si 3 N 4 Si 3 N 4
- the cover plate or lid 8 may be formed of temperature- resistant material, for example ceramics or graphite being optionally coated by a suitable chemically and thermally stable material .
- a cover heater 7 is provided above the cover/plate/lid 8, to further contribute to heating the cover/plate/lid 8, and thus to surely avoid condensation of gaseous components such as SiO x (e.g. SiO), thereby favourably influencing thermo-chemical reactions.
- cover material 9 is formed above the Si -melt in the form of a particulate or molten material, thereby further separating the Si-melt present in the crucible to the outside.
- cover material 9 is formed, for example, of Si0 2 -powder or -pieces.
- other cover materials may be used, e.g. those which may serve not only for covering but also for doping the solid silicon, such as for example boron oxide (B 2 O 3 ) for the purpose of covering as well s boron doping.
- a plate 8 ' which is modified in its form compared to the plate shown in Fig. 1
- the coverage of the melt by cover material 9 are combined.
- Fig. 4 represents a schematic scheme and includes graphs, showing a relationship between oxygen concentration and carbon concentration in the ingot formed of the solidified crystalline silicon.
- a comparison ingot 2 ' is shown here from the bottom to the tapered head portion. Referring to this comparison ingot 2' of multi- crystalline silicon, i.e.
- the upper graph (right-handed beside ingot 2 ' ) indicates the respective distributions of oxygen and carbon concentrations in a sectional plane extending from the bottom to the top of crystal 2' (indicated by a correspondingly hatched bottom/top-layer in ingot 2 ' )
- the left-sided graph (above the ingot tip) indicates the respective distributions of oxygen and carbon concentrations in a cross-sectional plane extending between the left-hand and right-hand sides of crystal 2'.
- the ratio of oxygen-to-carbon concentration, and/or the ratio of oxygen-to-nitrogen concentration in the silicon melt and thus in the silicon crystal undergoing solidification is favourably influenced as indicated by the arrows shown in the graphs, such that the oxygen concentration raises and the carbon concentration (or, analogously, the nitrogen concentration) decreases relative to the comparison in the critical section.
- the critical section indicated by hatching the comparison crystal 2' in Fig. 4) can be effectively prevented in the Si-crystal according to the present invention.
- the respective partial pressure of gaseous species comprising oxygen (including oxygen-containing gases) , carbon (including especially carbon oxide gases) and nitrogen (including especially nitrogen oxide gases) , in particular the partial pressures of oxygen and carbon
- the system may be designed such that silicon generally suitable for photovoltaics or solar cells (so-called "Solar Grade Silicon”) can be produced.
- silicon generally suitable for photovoltaics or solar cells (so-called "Solar Grade Silicon”) can be produced.
- Solar Grade Silicon silicon generally suitable for photovoltaics or solar cells
- VVF Vertical Gradient Freeze
- BS Bridgman Solidification
- HEM Heat Exchange Method
- directed, solidifications are, for example, a casting technology and especially Electromagnetic Casting (EMC) .
- EMC Electromagnetic Casting
Abstract
Description
Claims
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EP17151493.8A EP3176290A1 (en) | 2007-04-27 | 2007-12-21 | Poly-crystalline or multi-crystalline silicon ingot and use for the manufacture of solar cells |
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DE102007020006A DE102007020006A1 (en) | 2007-04-27 | 2007-04-27 | Apparatus and method for producing polycrystalline or multicrystalline silicon, ingot produced thereby and wafers of polycrystalline or multicrystalline silicon, and use for the production of solar cells |
PCT/EP2007/011378 WO2008131794A1 (en) | 2007-04-27 | 2007-12-21 | Device and process for producing poly-crystalline or multi-crystalline silicon; ingo as well as wafer of poly-crystalline or multi-crystalline... |
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EP17151493.8A Division EP3176290A1 (en) | 2007-04-27 | 2007-12-21 | Poly-crystalline or multi-crystalline silicon ingot and use for the manufacture of solar cells |
EP17151493.8A Division-Into EP3176290A1 (en) | 2007-04-27 | 2007-12-21 | Poly-crystalline or multi-crystalline silicon ingot and use for the manufacture of solar cells |
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US (1) | US9103048B2 (en) |
EP (2) | EP2140046B1 (en) |
JP (2) | JP5564418B2 (en) |
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CN101597788B (en) * | 2009-06-24 | 2011-12-07 | 浙江大学 | Method for preparing cast nitrogen-doped monocrystalline silicon through melting polycrystalline silicon under nitrogen |
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DE102009044390B4 (en) | 2009-11-02 | 2014-06-26 | Hanwha Q.CELLS GmbH | Manufacturing method and manufacturing apparatus for producing a semiconductor crystal body |
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DE102010023590A1 (en) | 2010-06-12 | 2011-12-15 | Schott Ag | Preparation of silicon-containing compound for manufacture of photovoltaic cell, involves grinding silicon raw material containing silica, ferric oxide, phosphorus pentoxide, alumina and boron trioxide in presence of grinding media |
DE102010023911A1 (en) | 2010-06-16 | 2011-12-22 | Pa-Id Automation & Vermarktung Gmbh | Continuous monitoring of crystallization degree of melt during directional solidification in crystallization oven, comprises detecting electrical output supplied for heating, and comparing with thermal output dissipated via cooling water |
DE102011002599B4 (en) | 2011-01-12 | 2016-06-23 | Solarworld Innovations Gmbh | Process for producing a silicon ingot and silicon ingot |
CN102185017A (en) * | 2011-03-16 | 2011-09-14 | 常州市万阳光伏有限公司 | Method for preparing solar-battery-level polycrystalline silicon product |
JP5518776B2 (en) * | 2011-03-25 | 2014-06-11 | 三菱マテリアル株式会社 | Silicon ingot manufacturing apparatus, silicon ingot manufacturing method, silicon ingot, silicon wafer, solar cell, and silicon part |
EP2530187A1 (en) * | 2011-06-03 | 2012-12-05 | Evonik Solar Norge AS | Refining of silicon by directional solidification in an oxygen-containing atmosphere |
DE102011117411A1 (en) * | 2011-11-02 | 2013-05-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for analyzing the solidification behavior of a silicon column |
US9493357B2 (en) | 2011-11-28 | 2016-11-15 | Sino-American Silicon Products Inc. | Method of fabricating crystalline silicon ingot including nucleation promotion layer |
WO2013115289A1 (en) * | 2012-02-01 | 2013-08-08 | Jx日鉱日石金属株式会社 | Polycrystalline silicon sputtering target |
CN103374746A (en) * | 2012-04-27 | 2013-10-30 | 比亚迪股份有限公司 | Device for producing quasi-single crystal silicon and production method of quasi-single crystal silicon |
TWI499558B (en) * | 2012-08-31 | 2015-09-11 | Silicor Materials Inc | Reactive cover glass over molten silicon during directional solidification |
TWI628145B (en) | 2013-01-29 | 2018-07-01 | 希利柯爾材料股份有限公司 | Cover flux and method for silicon purification |
US9112069B2 (en) * | 2013-04-01 | 2015-08-18 | E I Du Pont De Nemours And Company | Solar cell comprising a p-doped silicon wafer and an aluminum electrode |
FR3010721B1 (en) * | 2013-09-17 | 2017-02-24 | Commissariat Energie Atomique | PROCESS FOR PRODUCING A SILICON INGOT HAVING PHOSPHORIC HOMOGENEOUS CONCENTRATION |
KR101638443B1 (en) * | 2015-01-28 | 2016-07-11 | 영남대학교 산학협력단 | Thin film deposition crucible and method of depositing thin film using the same and vacuum evaporation apparatus |
CN106987901A (en) * | 2017-03-30 | 2017-07-28 | 江西赛维Ldk太阳能高科技有限公司 | A kind of crystalline silicon and preparation method thereof |
AT524605B1 (en) * | 2020-12-29 | 2023-05-15 | Fametec Gmbh | Method of making a single crystal |
CN114540951B (en) * | 2022-02-24 | 2023-04-07 | 安阳工学院 | Method for preparing polycrystalline silicon ingot by recycling silicon mud |
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JP5564418B2 (en) | 2014-07-30 |
CN101680110B (en) | 2014-11-26 |
US9103048B2 (en) | 2015-08-11 |
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CN101680110A (en) | 2010-03-24 |
WO2008131794A1 (en) | 2008-11-06 |
DE102007020006A1 (en) | 2008-10-30 |
JP5815184B2 (en) | 2015-11-17 |
US20100127221A1 (en) | 2010-05-27 |
JP2010524825A (en) | 2010-07-22 |
CN103789830B (en) | 2018-10-02 |
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CN103789830A (en) | 2014-05-14 |
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