EP2135293A2

EP2135293A2 - Photovoltaic device with discontinuous interdigited heterojunction structure

Info

Publication number: EP2135293A2
Application number: EP08735485A
Authority: EP
Inventors: Armand Bettinelli; Thibaut Desrues
Original assignee: Commissariat a lEnergie Atomique CEA
Current assignee: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date: 2007-03-28
Filing date: 2008-03-26
Publication date: 2009-12-23
Also published as: US8723023B2; WO2008125446A2; FR2914501A1; JP2010522976A; JP5270658B2; US20100032014A1; WO2008125446A3; FR2914501B1

Abstract

The invention relates to a photovoltaic device (100) that comprises: a substrate containing a crystalline semi-conducting material; a first electrode comprising at least one heterojunction made on a so-called rear face of the substrate, the heterojunction including a layer (104) containing a doped amorphous semi-conductor material; and a second electrode. The first and second electrodes are provided on the rear surface of the substrate according to an interdigited comb pattern, and the layer (104) includes a plurality of portions of the doped amorphous semi-conductor material that disjointed and spaced from each other.

Description

PHOTOVOLTAIC DEVICE WITH A HETEROJUNCTION STRUCTURE

INTERDIGITEE DISCONTINUE

DESCRIPTION

TECHNICAL FIELD AND PRIOR ART

The invention relates to the production of photovoltaic cells, or solar cells, and more particularly photovoltaic cells with heterojunctions and discontinuous interdigitated structure.

A conventional photovoltaic cell, based on crystalline silicon, comprises a homojunction structure as well as contacts on the front and rear faces of the cell. The conversion efficiency of such a cell is generally between about 14% and 18%. Two other types of photovoltaic cell structure, more complex, make it possible to obtain conversion efficiencies greater than 20%: they are photovoltaic cells with rear-panel contacts (RCC) and heterojunction photovoltaic cells (HJ). .

In the case of a photovoltaic cell RCC, N and P doped zones, as well as metallizations associated with these zones, forming an electrode called emitter and a rear field electrode, are placed on the same face of a substrate (the rear face of the cell, that is to say the opposite side to that receiving the light rays) of this cell, in the form of interdigitated combs. We mean comb, here and throughout the rest of the document, a pattern comprising several fingers, or portions of elongated shape (for example rectangles), substantially parallel to each other and interconnected at one of their side by a finger disposed perpendicularly to the other fingers. In the same way, interdigitated combs, here and throughout the rest of the document, are understood to mean two combs as described above, arranged opposite each other and whose fingers are arranged between the fingers. the other. The doped zone forming the emitter is continuous over the entire length of a cell (for example greater than 100 mm) and its width is generally between 1 mm and a few hundred microns. In addition, the widths of the N and P doped zones are different. The technologies implemented for producing such a cell are similar to those used for producing a conventional photovoltaic cell. Additional steps of masking and lithography are however necessary to perform the localized doping (N and P areas on the same side).

HJ photovoltaic cells use completely different technologies: thin layers of undoped and doped amorphous silicon must first be deposited by CVD (Chemical Vapor Deposition), and for example by PECVD (assisted chemical vapor deposition) by plasma) on the crystalline substrate of such a cell, then thin conductive layers must then be deposited by PVD (Physical Vapor Deposition). These deposits are made on the entire surface of the solar cell.

The combination of these two structures to obtain a photovoltaic cell with back contacts and heterojunctions (HJ + RCC) requires the production of several thin layers in a localized manner, in particular the layers of doped amorphous silicon and the thin conductive layers.

FIG. 1 is a view of a rear face of a photovoltaic cell HJ + RCC 1. This cell 1 comprises a substrate on which is deposited, at a rear face of this substrate, a thin layer of non-amorphous silicon. doped 2, a thin layer of amorphous silicon forming N + 4 doped zones and a thin layer of amorphous silicon forming P + doped zones 6, these doped zones 4 and 6 being arranged in the form of interdigitated combs. These doped zones 4 and 6 are covered with ITO (indium tin oxide). Finally, this structure comprises metallizations 8 and 10 made on the ITO, to contact the doped zones 4 and 6.

The realization of such a cell requires the implementation of binding and expensive steps of masking and photolithography to obtain these doped layers 4 and 6 in the form of interdigitated combs, each doped zone 4 and 6 being continuous, that is, that is to say formed by a single element, as in the case of RCC cells. SUMMARY OF THE INVENTION

An object of the present invention is to provide a new semiconductor device for obtaining photovoltaic cells with back contacts and low cost heterojunctions.

For this, the present invention proposes a photovoltaic device, which can comprise:

a substrate based on a crystalline semiconductor material; at least two heterojunctions made on a face, referred to as the back face, of the substrate and possibly comprising a first layer based on an amorphous semiconductor material doped with a first type of conductivity, and a second layer based on an amorphous semiconductor material doped with a second type of conductivity, the first and the second layer being able to be arranged on the rear face of the substrate in a pattern of interdigital combs at least one of the first and second layers may comprise a plurality of portions, or pads, of the doped amorphous semiconductor material of the first or the second conductivity type, separate or disjoint, and spaced from each other . The present invention also relates to a photovoltaic device comprising:

a substrate based on a crystalline semiconductor material,

a first electrode comprising at least one heterojunction made on a face, called the rear face, of the substrate, this heterojunction having a layer based on a doped amorphous semiconductor material,

a second electrode, the first and the second electrodes being disposed on the rear face of the substrate in a pattern of interdigitated combs, and the layer comprising a plurality of portions of the doped amorphous semi-conductor material which are distinct, or disjointed, and spaced apart others. The device according to the invention makes it possible to obtain a photovoltaic cell with heterojunctions and rear contacts whose production costs are reduced compared with the photovoltaic cells of the prior art, while avoiding costly masking steps. photolithography.

The first electrode can form an emitter of the photovoltaic device.

In one variant, the device may further comprise at least one intrinsic amorphous semiconductor layer disposed between the substrate and the doped amorphous semiconductor layer, the second electrode possibly comprising at least one metallization carried out on the intrinsic amorphous semiconductor base. The layer of the first electrode, called the first layer, may be based on a doped amorphous semiconductor material of a first conductivity type, the second electrode may comprise at least one heterojunction comprising a second layer based on a material. amorphous semiconductor doped with a second type of conductivity. In this case, the device may further comprise at least one intrinsic amorphous semiconductor layer disposed between the substrate and the first and second doped amorphous semiconductor layers.

The second layer may comprise a plurality of portions of the doped semiconductor material of the second distinct conductivity type, or disjoint, and spaced apart from each other. The portions of doped amorphous semiconductor material may be of substantially rectangular shape, the length and width dimensions of the doped semiconductor material portions of the first conductivity type may be different from those of the doped semiconductor material portions of the second type of conductivity.

The portions of amorphous semiconductor material doped with the same type of conductivity may be isolated from each other by portions of insulating material disposed at least between said portions of doped amorphous semiconductor material and possibly partially arranged on the portions of amorphous semiconductor material doped, and / or be electrically connected to each other by metallizations made on said portions of doped amorphous semiconductor material.

The metallizations made on the portions of amorphous semiconductor material doped with the same type of conductivity may be formed by a continuous portion based on a conductive material or comprise portions of a conductive material distinct, or disjointed, and spaced apart from each other.

The device may further comprise at least one layer based on at least one conductive material, for example a transparent conductive oxide such as ITO, and / or a metal, disposed between the portions of doped amorphous semiconductor material. and the metallizations, and which may comprise distinct, or disjointed, and spaced apart portions of the conductive material of substantially similar shape to that of the portions of doped amorphous semiconductor material, and arranged substantially at the level of the portions of semiconductor material doped amorphous. The device may further comprise at least one intrinsic amorphous semiconductor layer disposed between the substrate and the first and second doped amorphous semiconductor layers.

The device may be a photovoltaic cell with heterojunctions and rear contacts.

An object of the present invention is also to provide a method for reducing the cost of producing a solar cell with back contacts and heterojunctions.

For this purpose, the present invention also proposes a process for producing a structure with heterojunctions and with rear contacts which is not made up of long continuous doped zones but of discontinuous short doped zones, the electrical continuity of these aligned zones of the same polarity being only performed at the end of the process during the deposition of a conductive material forming the metallizations of the structure.

The present invention also relates to a method for producing a photovoltaic device, which may comprise at least the steps of:

depositing, on a face called a rear face of a substrate based on a crystalline semiconductor material, a first layer based on an amorphous semiconductor material doped with a first type of conductivity through a first mask whose pattern may comprise discontinuous apertures, being able to form a plurality of portions of the doped amorphous semiconductor material of the first distinct conductivity type, or disjointed, and spaced apart from one another,

- Making a second layer based on an amorphous semiconductor material doped with a second conductivity type on the rear face of the substrate, the first and second layers being able to be arranged in a pattern of interdigitated combs, and capable of forming two heterojunctions.

The present invention also relates to a method for producing a photovoltaic device, comprising at least the steps of:

- Realization of a first electrode, comprising at least one step of depositing, on a face called rear face of a substrate based on a crystalline semiconductor material, a layer based on a semiconductor material amorphous doped through a mask whose pattern has openings discontinuous, forming a plurality of separate doped amorphous semiconductor material portions, or disjointed, and spaced apart from each other,

- Making a second electrode, the first and second electrodes being disposed on the rear face of the substrate in a pattern of interdigitated combs.

Thus, the cost of obtaining localized thin films of heterojunction and back-contact solar cells is reduced by deposition steps through masks having discontinuous apertures, thus replacing costly photolithography steps.

The method may further comprise, prior to the production of the first electrode, a step of depositing an intrinsic amorphous semiconductor layer on the rear face of the substrate, the layer based on the doped amorphous semiconductor material being able to to be deposited on the intrinsic amorphous semiconductor layer, the production of the second electrode comprising a step of depositing at least one metallization on the intrinsic amorphous semiconductor layer.

The layer, called the first layer, may be based on an amorphous semiconductor material doped with a first type of conductivity, the production of the second electrode may comprise a step of depositing a second layer based on a amorphous semiconductor material doped with a second conductivity type on the back side of the substrate. The method may further comprise, prior to the production of the first electrode, a step of depositing an intrinsic amorphous semiconductor layer on the rear face of the substrate. The deposition of the second layer based on the doped amorphous semiconductor material of the second conductivity type can be obtained by depositing the doped amorphous semiconductor material of the second conductivity type through a second mask whose pattern comprises discontinuous openings. , capable of forming a plurality of portions of the doped amorphous semiconductor material of the second conductivity type which are distinct, or disjoint, and spaced from one another.

The method may further comprise, after the production of the first and / or the second electrode, a deposition step, at least between the portions of amorphous semiconductor material doped with the same type of conductivity, through a mask whose pattern comprises discontinuous openings, an insulating material and / or partially on the portions of doped semiconductor material.

In a variant, the method may further comprise, before the first electrode is made, a step of depositing an insulating material through a mask whose pattern comprises discontinuous openings, intended to form portions of at least one insulating material. between said portions of amorphous semiconductor material doped with the same type of conductivity. The method may further comprise, after the realization of the first and / or second electrode, a deposition step on the portions of amorphous semiconductor material doped with the same type of conductivity, through a mask whose pattern comprises discontinuous openings, portions of at least one conductive material, for example metal and / or transparent conductive oxide such as ITO.

These portions of conductive material may be deposited on the portions of amorphous semiconductor material doped through the mask used for the deposition of the doped amorphous semiconductor material layer of the first electrode and, when the second electrode comprises a second layer. of doped amorphous semiconductor material of the second conductivity type deposited through the second mask, the portions of conductive material may be deposited on the portions of doped amorphous semiconductor material of the second conductivity type through the second mask. Thus, the portions of conductive material have a shape and dimensions substantially similar to the portions of doped amorphous semiconductor material.

The method may further comprise, before the deposition of the first layer of doped amorphous semiconductor material of the first conductivity type, a step of depositing an intrinsic amorphous semiconductor layer on the rear face of the substrate.

The method may also comprise a step of producing metallizations on the portions of doped amorphous semiconductor material that can electrically connect the semiconductor material portions. doped amorphous conductor of the same type of conductivity between them. This embodiment of metallizations can be obtained by the deposition of a conductive material through a mask having discontinuous openings, forming separate portions of conductive material, or disjoint, and spaced from each other.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be better understood on reading the description of exemplary embodiments given purely by way of indication and in no way limiting, with reference to the appended drawings in which:

FIG. 1, previously described, shows a view from below of a photovoltaic cell with heterojunctions and rear-panel contacts according to the prior art,

FIG. 2 represents a view from below of a photovoltaic cell with heterojunctions and rear-panel contacts, object of the present invention, according to a first embodiment,

FIGS. 3 to 8B show the steps of a method for producing a photovoltaic cell with heterojunctions and rear-face contacts, also the subject of the present invention,

FIG. 9 represents a view from below of a photovoltaic cell with heterojunctions and rear-panel contacts, object of the present invention, according to a second embodiment. Identical, similar or equivalent parts of the different figures described below bear the same numerical references so as to facilitate the passage from one figure to another. The different parts shown in the figures are not necessarily in a uniform scale, to make the figures more readable.

The different possibilities (variants and embodiments) must be understood as not being exclusive of each other and can be combined with one another.

DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS

Reference is first made to FIG. 2 which shows a photovoltaic cell 100 with heterojunctions and rear-panel contacts according to a first embodiment.

The photovoltaic cell 100 comprises a substrate, not visible in FIG. 2, based on a crystalline semiconductor, for example silicon. A thin layer 102 of undoped amorphous semiconductor, such as silicon, is disposed on a rear face of the substrate. Thin film, here and throughout the rest of the document, means a layer of thickness for example less than or equal to about 10 microns. In this first embodiment, this thin layer 102 has for example a thickness equal to about 15 nm. In addition, the amorphous materials used in the invention may be purely amorphous materials, but also polymorphic, microcrystalline or polycrystalline materials.

The photovoltaic cell 100 comprises two layers, 104 and 106, of doped amorphous semiconductor, here silicon, according to two different types of conductivity, respectively N + and P +, in a pattern of interdigitated combs, forming two heterojunctions. The layer 104 forms the emitting electrodes, the layer 106 forming the rear field electrodes. Unlike photovoltaic cells of the prior art, the pattern of interdigitated combs formed by these two layers is not continuous, but discontinuous. Indeed, each of these layers is formed of portions, or pads, distinct or disjoint, from each other. In this embodiment, the portions of the N + doped amorphous silicon layer 104 have a substantially rectangular shape, for example of width equal to approximately 1 mm, of length equal to approximately 3.5 mm and are spaced from each other by a distance equal to about 150 microns. Likewise, the portions of the P + doped amorphous silicon layer 106 also have a substantially rectangular shape, of width equal to about 0.3 mm, of length equal to about 3.5 mm, and are spaced apart from each other. a distance equal to about 150 microns.

The spaces, here 150 μm, separating the portions of doped amorphous semiconductor material are here filled by an insulating material 108, for example based on silicon dioxide. In this first embodiment, the insulating material 108 overflows on the portions of the doped amorphous silicon layers 104 and 106, thus partially covering these portions.

A conductive layer, not shown in FIG. 2 for the sake of clarity, is disposed on the portions of doped amorphous silicon formed by the layers 104 and 106. The patterns formed by this conductive layer substantially correspond to the patterns formed by the doped layers. 104 and 106, but slightly smaller dimensions (eg less than about 0.1 mm). This layer may be based on a conductive material such as a transparent conductive oxide, for example ITO, ZnO, SnO ₂ , TiO ₂ , or a metal, for example silver or silver. 'aluminum. Finally, the photovoltaic cell 100 comprises metallizations 110 and 112 arranged on the preceding conductive layer, not represented, thus connecting the portions of doped amorphous silicon of the same type of conductivity, via this previous conductive layer. In this FIG. 2, the metallizations 110 connect the portions of the N + layer 104, the metallizations 112 connecting the portions of the P + layer 106. In this figure, for the sake of clarity, the metallizations 110 and 112 are represented as having a width less than that of the doped amorphous silicon portions 104 and 106.

Given the overflow of the insulating material 108 on the portions of the doped amorphous silicon layers 104 and 106 and the fact that the portions of the conductive layer deposited on the portions of doped amorphous silicon and the metallizations 110 and 112 do not have dimensions larger than the portions of doped amorphous silicon, the metallizations 110 and 112 and the conductive layer are not in short circuit with the crystalline silicon substrate covered by the thin layer 102.

Referring now to Figures 3 to 8B showing the steps of a method of producing a photovoltaic cell 200 with heterojunctions and contacts on the back. As shown in FIG. 3, a rear surface 202 of a substrate 204, for example similar to the substrate of the photovoltaic cell 100, is deposited first, a thin layer of amorphous silicon 206, for example similar to the thin layer. 102 of the photovoltaic cell 100.

Then, on the amorphous layer 206, the deposition of a thin layer of amorphous silicon 208 doped with a first type of conductivity, for example N +, through a first mask having discontinuous openings (FIGS. 4A and 4B). The pattern of the mask is therefore transferred to the layer 208, forming separate doped amorphous silicon portions, or disjoint, and spaced from each other. In this embodiment, the openings of the first mask, and thus also the portions of doped amorphous silicon produced, have a substantially rectangular shape, for example of width equal to about 1 mm, of length equal to about 3.5 mm, these openings being spaced from each other by a distance of about 150 microns. As shown in FIGS. 5A and 5B, a thin layer of doped amorphous silicon 210 of a second conductivity type, for example P +, is then deposited through a second mask comprising discontinuous openings and forming portions. separate doped amorphous silicon, or disjoint, and spaced from each other. Here, the apertures of the second mask have a width of about 0.3 mm, a length of about 3.5 mm, and an aperture spacing of about 150 μm.

It can be seen in FIG. 5B that the thin layers 208 and 210 form a pattern of interdigitated combs. These two layers 208 and 210 form the two heterojunctions of the photovoltaic cell 200. It is possible that the thin layer of P + doped amorphous silicon 210 is deposited before the thin layer of amorphous silicon N + doped 208.

As shown in FIG. 6, an insulating thin layer 212, for example based on silicon dioxide, may advantageously be provided: it is deposited at the spaces separating the portions of the doped amorphous silicon layers 208 and 210, by the intermediate of a third mask having discontinuous openings. This insulating layer 212 is formed of a plurality of portions superimposed on the spaces separating the portions of the doped layers 208 and 210. Due to a possible mask shift and / or tolerance on the dimensions of the openings of the masks and / or an overflow during a deposit, for example about +/- 50 μm during the production of the layers 208 or 210, the spacing between the portions of the doped layers 208 and 210 is subject to a double tolerance of the previous dimension, for example about +/- 100 μm. In order to guarantee the overlap of the spaces between the portions by the insulating layer 212, the portions of the insulating layer 212 may be widened to integrate the tolerances mentioned above. They may for example be of a width equal to about 350 microns. Thus, the ends of the portions of the doped layers 208 and 210 are covered by the material of the insulating layer 212, even in the case of a possible mask shift during the production of these doped layers 208 and 210. In a variant of FIG. this method, the insulating layer 212 may be deposited before the deposition of one of the doped amorphous silicon layers 208 or 210, or before the deposition of the two doped amorphous silicon layers 208 and 210. conductive thin film 214, for example based on conductive transparent oxide (TCO) such as ITO and / or ZnO and / or SnO 2 and / or TiO 2, and / or metal such as silver and / or aluminum (FIGS. 7A and 7B). This deposit is made through a fourth mask whose openings correspond to those of the first and the second mask, but of slightly smaller dimensions to prevent overflowing of the conductive material relative to the doped amorphous silicon layers 208 and 210. The conductive material 214 deposited on the portions of the doped layer 208 can form portions of substantially rectangular shape, for example of width equal to about 0.9 mm and length of about 3.4 mm, the conductive material 214 deposited on the portions of the doped layer 210 can also form portions of substantially rectangular shape for example with a width of about 0.2 mm and a length of about 3.4 mm.

Finally, as represented in FIGS. 8A and 8B, a layer with a thickness for example greater than approximately 10 μm, based on a conductor such as aluminum, which may or may not be different from that of layer 214, is deposited on the conductive material 214 to form the metallizations of the cell 200. This layer forms metallizations 216 connecting the amorphous silicon portions N + 208 between them and metallizations 218 connecting the portions of amorphous silicon P + 210 between them. In FIG. 8B, these metallizations 216 and 218 have a width that is substantially similar to that of the conductive material portions 214 on which these metallizations are located: for example, the metallizations 216 here have a width equal to about 0.9 mm and the metallizations 218 here have a width equal to about 0.2 mm. These metallizations 216, 218 are here made by screen printing a low-temperature polymer-based paste loaded with silver and / or any other suitable metal to form metallizations.

In the embodiment described above, the given dimensions have been defined to guarantee the critical overlaps and this, in taking into account possible offsets of about 50 microns with respect to the dimensions of the deposited patterns (offset at masks and alignment, burrs at the deposit, ...). For a photovoltaic cell of size equal to 200 x 200 mm, the masks used for its realization allow the deposition of rectangles of dimensions equal to 170 x 50 microns in the 200 x 70 micron step without burrs, with a dynamic alignment realized by a system of vision.

In this process, intrinsic and doped amorphous silicon deposits are CVD deposits, for example PECVD or HW-CVD (hot wire chemical vapor deposition). The conductive transparent oxide and metal deposits are PVD deposits, for example sputtering or evaporation. Finally, the deposits of insulating materials are CVD deposits, for example PECVD.

Reference is now made to FIG. 9 which shows a photovoltaic cell 300 with heterojunctions and rear-panel contacts according to a second embodiment.

With respect to the first embodiment, the photovoltaic cell 300 comprises metallizations 302 and 304 which are not continuous, that is to say comprising conductive portions, each of these conductive portions connecting two portions of amorphous silicon of a same type of conductivity. These metallizations 302 and 304 are thus not produced by screen printing but by through a mask whose pattern corresponds to the pattern of these metallizations 302 and 304.

In this variant, a conductive layer 214, not represented in this FIG. 9, is advantageously provided with a lower resistivity. For this purpose, it is possible to increase the thickness of the conductive layer 214 when it is based on ITO, to use metal having a lower resistivity than the ITO or an ITO / metal bilayer (for example 40 nm of ITO and 150 nm aluminum).

In addition, unlike the photovoltaic cell 100 of the first embodiment, the photovoltaic cell 300 comprises portions of amorphous silicon doped N + 306 and P + 308 of different lengths. In FIG. 9, the portions of amorphous silicon N + 306 have a length greater than that of the portions of amorphous silicon P + 308. Thus, the openings of the mask used for producing the conductive layer, for example of ITO, deposited on the portions of N + 306 doped amorphous silicon and those for the realization of the ITO layer on the P + 308 doped amorphous silicon portions are not aligned next to each other, which eliminates the constraint on the minimum width of the bridge of material lying between the openings of the mask. The insulating portions separating the portions of amorphous silicon P + 308 are here made as long as possible in order to optimize the passivation at the rear field electrode. In addition, the mask openings used for the deposition of the insulating layer (SiO 2 for example) may be elongated to take advantage also of a lateral overflow, forming for example insulating portions whose width is for example equal to about 1.1 mm (deposited on portions of amorphous silicon whose width is for example equal to about 1 mm ) or 0.4 mm (deposited on portions of amorphous silicon whose width is for example equal to about 0.3 mm).

In addition, the portions of ITO may be deposited in two steps: a first step carrying portions of ITO on the portions of N + doped amorphous silicon, and then a second step carrying portions of ITO on the portions of doped amorphous silicon. P +. In this case, it is also possible for the same mask to be used for the deposition of the doped amorphous silicon layers and the deposition of the conductive portions on the portions of the doped amorphous silicon layers. In this case, the deposition of the N + doped amorphous silicon layer is first performed, then the deposition of the conductive portions intended to be on the portions of the N + doped amorphous silicon layer, the deposition of the silicon layer. doped amorphous P +, the deposition of the conductive portions intended to be on the P + doped amorphous silicon layer portions, the deposition of the insulating layer and finally the realization of the metallizations.

In general, the masks used during the production of a photovoltaic cell are suitably pressed against the cell, using a flat mask very tight on a frame, in order to avoid any overflow of the material applied to the cell. through the mask, to avoid short circuits between areas of different polarity. The masks used may be metal masks.

The spaces and overlaps of the different layers to avoid short circuits impose tolerances in the geometry of the masks and in the alignments between the deposits. This imposes several conditions.

First of all, one of these conditions is to have well defined mask apertures. For this, the masks are preferably made by electrodeposition, offering excellent geometry, or chemical or laser cutting. In addition, if the mask openings have a certain conicity (slightly larger dimensions of one side of the mask than the other), this size difference is taken into account for the choice of the side of the mask in contact with the substrate. Finally, a reduced thickness of the mask (for example equal to about 50 microns) makes it possible to reduce the shading phenomena. Masks of varying thickness can also be envisaged, with reduced thicknesses in the vicinity of the openings relative to the remainder of the mask.

Another of these conditions is to have a good alignment between the different levels of layers made on the substrate. For this purpose, during the production process, the masks are indexed with respect to the substrate via patterns included in the mask. These patterns, or indexing holes, are used either to perform a mechanical positioning substrate / mask (or frame), or to preference for dynamic alignment via a vision system. The differential expansion phenomena caused by the PECVD and PVD deposits produced in the range 150 to 200 ^° C. are also taken into account, in particular by making sure to make the masks with the same materials.

In the methods described, the masks are designed so that the width of the material bridges, that is to say the size of the portions of material of the mask between two openings, is at least equal to the thickness of the mask at the level of the mask. from this area. The longer the bridges of material, the greater the number of bridges per unit length is important to ensure good mechanical strength of these material bridges.

In the examples described above, the two electrodes of the photovoltaic cell are made from disjoint portions of doped amorphous semiconductor material. Alternatively, it is possible that only one electrode is formed in this way. The other electrode can then be formed of a simple conductive track, for example based on metal such as aluminum, deposited directly on the intrinsic amorphous silicon layer. Advantageously, the electrode made from disjoint portions of doped amorphous semiconductor is the electrode forming the emitter of the photovoltaic cell.

Claims

Photovoltaic device (100, 200, 300), comprising: - a substrate (204) based on a crystalline semiconductor material,

a first electrode comprising at least one heterojunction made on a face (202), called the back face, of the substrate (204), this heterojunction having a layer (104, 208, 306) based on a semiconductor material; doped amorphous,

a second electrode, the first and the second electrodes being disposed on the rear face (202) of the substrate (204) in a pattern of interdigitated combs, and the layer

(104, 208, 306) having a plurality of portions of the doped amorphous semiconductor material disjointed and spaced from each other.

2. Device (100, 200, 300) according to claim 1, the first electrode forming an emitter of the photovoltaic device (100, 200, 300).

3. Device (100, 200, 300) according to one of the preceding claims, further comprising at least one layer (102, 206) based on intrinsic amorphous semiconductor disposed between the substrate (204) and the layer (104). , 208, 306) of doped amorphous semiconductor.

4. Device (100, 200, 300) according to claim 3, the second electrode comprising at least one metallization made on the layer (102, 206) based on intrinsic amorphous semiconductor.

5. Device (100, 200, 300) according to one of claims 1 to 4, the portions of doped amorphous semiconductor material being of substantially rectangular shape.

6. Device (100, 200, 300) according to one of claims 1 to 3, the layer (104, 208, 306) of the first electrode, called the first layer, being based on a doped amorphous semiconductor material of a first type of conductivity, the second electrode comprising at least one heterojunction comprising a second layer (106, 210, 308) based on an amorphous semiconductor material doped with a second conductivity type.

The device (100, 200, 300) according to claim 6, further comprising at least one intrinsically amorphous semiconductor layer (102, 206) disposed between the substrate (204) and the first (104, 208, 306) and second (106, 210, 308) doped amorphous semiconductor layers.

8. Device (100, 200, 300) according to one of claims 6 or 7, the second layer (106, 210, 308) comprising a plurality of portions of the material doped semiconductor of the second type of conductivity distinct and spaced from each other.

9. Device (100, 200, 300) according to claim 8, the portions of doped amorphous semiconductor material being of substantially rectangular shape.

10. Device (100, 200, 300) according to claim 9, the length and width dimensions of the doped semiconductor material portions of the first conductivity type being different from those of the doped semiconductor material portions of the second type. conductivity.

11. Device (100, 200, 300) according to one of the preceding claims, the portions of amorphous semiconductor material doped with the same type of conductivity being isolated from each other by portions of insulating material (108, 212 ) disposed at least between said portions of doped amorphous semiconductor material.

12. Device (200) according to claim 11, the portions of insulating material (212) being also partially disposed on the portions of doped amorphous semiconductor material.

13. Device (100, 200, 300) according to one of the preceding claims, the portions of amorphous semiconductor material doped with the same type of conductivity being electrically interconnected by metallizations (110, 112, 216, 218, 302, 304) made on said portions of doped amorphous semiconductor material.

14. Device (100, 200) according to claim 13, the metallizations (110, 112, 216, 218) made on the portions of amorphous semiconductor material doped with the same type of conductivity being formed by a continuous portion based on a conductive material.

15. Device (300) according to claim 13, the metallizations (302, 304) formed on the portions of amorphous semiconductor material doped with the same type of conductivity comprising portions of a conductive material that are distinct and spaced apart from each other. others.

16. Device (100, 200, 300) according to one of claims 13 to 15, further comprising at least one layer (214) based on at least one conductive material disposed between the portions of doped amorphous semiconductor material and the metallizations (110, 112, 216, 218, 302, 304).

17. Device (100, 200, 300) according to claim 16, said conductive material of the layer (214) being a transparent conductive oxide such as ITO, and / or a metal.

18. Device (100, 200, 300) according to one of claims 16 or 17, the conductive layer (214) comprising portions of the conductive material separate and spaced from each other, of substantially similar shape to that of the portions of material doped amorphous semiconductor, and disposed substantially at the portions of doped amorphous semiconductor material.

19. Device (100, 200, 300) according to one of the preceding claims, said device (100, 200, 300) being a photovoltaic cell with heterojunctions and rear contacts.

20. A method of producing a photovoltaic device (100, 200, 300), comprising at least the steps of:

- producing a first electrode, comprising at least one deposition step, on a face (202) called a rear face of a substrate (204) based on a crystalline semiconductor material, a layer (104, 208, 306) based on an amorphous semiconductor material doped through a mask whose pattern includes discontinuous apertures, forming a plurality of portions of the doped amorphous semiconductor material disjointed and spaced apart from each other,

- Making a second electrode, the first (104, 208, 306) and second electrodes being disposed on the rear face (202) of the substrate (204) in a pattern of interdigitated combs.

21. The method of claim 20, further comprising, before the production of the first electrode, a step of deposition of a layer.

(102, 206) based on intrinsic amorphous semiconductor on the rear face (202) of the substrate

(204), the layer (104, 208, 306) based on the doped amorphous semiconductor material being deposited on the intrinsic amorphous semiconductor layer, the production of the second electrode comprising a deposition step of at least one metallization on the layer (102, 206) of intrinsic amorphous semiconductor.

22. The method of claim 20, the layer (104, 208, 306), called the first layer, being based on a doped amorphous semiconductor material of a first conductivity type, the production of the second electrode comprising a deposition step of a second layer (106, 210, 308) based on a doped amorphous semiconductor material of a second conductivity type on the rear face (202) of the substrate

(204).

23. The method of claim 22, further comprising, before the production of the first electrode, a step of depositing a layer (102, 206) based on intrinsic amorphous semiconductor on the rear face (202) of the substrate. (204).

24. The method of claim 23, the deposition of the second layer (106, 210, 308) based on the doped amorphous semiconductor material of the second conductivity type being obtained by depositing the doped amorphous semiconductor material of the second type. conductor through a second mask whose pattern includes discontinuous apertures, forming a plurality of portions of the doped amorphous semiconductor material of the second conductivity type distinct and spaced apart from each other.

25. Method according to one of claims 20 to 24, further comprising, after the production of the first and / or the second electrode, a deposition step, at least between the portions of doped amorphous semiconductor material of the same type of conductivity, through a mask whose pattern comprises discontinuous openings, of an insulating material (108, 212).

26. Method according to one of claims 20 to 24, further comprising, before the production of the first electrode, a step of depositing an insulating material (108, 212) through a mask whose pattern comprises discontinuous openings. , intended to form portions of insulating material (108, 212) at least between said portions of amorphous semiconductor material doped with the same type of conductivity.

27. The method of claim 25, the step of depositing the insulating material (108, 212) between said portions of amorphous semiconductor material doped with the same type of conductivity also producing the deposition of the insulating material partially on the portions of doped semiconductor material.

28. Method according to one of claims 20 to 27, further comprising, after the production of the first and / or the second electrode, a deposition step on the portions of doped amorphous semiconductor material of the same type. conductivity, through a mask whose pattern comprises discontinuous openings, portions of at least one conductive material (214).

29. The method of claim 28, the portions of conductive material (214) being deposited on the portions of amorphous semiconductor material doped through the mask used for the deposition of the layer (104, 208, 306) of semi-conductive material. doped amorphous conductor of the first electrode and, when the second electrode comprises a second layer (106, 210, 308) of doped amorphous semi-conductor material of the second conductivity type deposited through the second mask, the conductive material portions (214 ) being deposited on the portions of doped amorphous semiconductor material of the second conductivity type through the second mask.

30. Method according to one of claims 20 to 29, further comprising a step of producing metallizations (110, 112, 216, 218, 302, 304) on the portions of doped amorphous semiconductor material, electrically connecting the portions of doped amorphous semiconductor material of the same type of conductivity to each other.

31. The method of claim 30, the realization of the metallizations (110, 112, 216, 218, 302, 304) being obtained by the deposition of a conductive material through a mask having discontinuous openings, forming portions of conductive material. separate and spaced from each other.