EP2106546A1 - Chemical and/or biomolecular analysis integrated system and method for manufacturing the same - Google Patents
Chemical and/or biomolecular analysis integrated system and method for manufacturing the sameInfo
- Publication number
- EP2106546A1 EP2106546A1 EP08720191A EP08720191A EP2106546A1 EP 2106546 A1 EP2106546 A1 EP 2106546A1 EP 08720191 A EP08720191 A EP 08720191A EP 08720191 A EP08720191 A EP 08720191A EP 2106546 A1 EP2106546 A1 EP 2106546A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- chemical
- integrated system
- photo sensor
- thin film
- analysed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000000126 substance Substances 0.000 title claims description 51
- 238000004458 analytical method Methods 0.000 title claims description 30
- 239000012491 analyte Substances 0.000 claims abstract description 15
- 238000010521 absorption reaction Methods 0.000 claims abstract description 7
- 238000005259 measurement Methods 0.000 claims abstract description 5
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 3
- 239000010409 thin film Substances 0.000 claims description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 15
- 230000008021 deposition Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000206 photolithography Methods 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 238000005229 chemical vapour deposition Methods 0.000 claims description 8
- 239000011159 matrix material Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 230000003321 amplification Effects 0.000 claims description 4
- 230000029918 bioluminescence Effects 0.000 claims description 4
- 238000005415 bioluminescence Methods 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- 238000002161 passivation Methods 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 238000004809 thin layer chromatography Methods 0.000 claims description 4
- 238000012795 verification Methods 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 238000004377 microelectronic Methods 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 2
- 229910001080 W alloy Inorganic materials 0.000 claims description 2
- 238000001962 electrophoresis Methods 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 102000004190 Enzymes Human genes 0.000 claims 1
- 108090000790 Enzymes Proteins 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 230000001413 cellular effect Effects 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 235000015927 pasta Nutrition 0.000 claims 1
- 108020004414 DNA Proteins 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 229910002027 silica gel Inorganic materials 0.000 description 5
- 239000000741 silica gel Substances 0.000 description 5
- 239000003550 marker Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000004587 chromatography analysis Methods 0.000 description 3
- 239000003599 detergent Substances 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- IKYJCHYORFJFRR-UHFFFAOYSA-N Alexa Fluor 350 Chemical compound O=C1OC=2C=C(N)C(S(O)(=O)=O)=CC=2C(C)=C1CC(=O)ON1C(=O)CCC1=O IKYJCHYORFJFRR-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000009396 hybridization Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 108091028043 Nucleic acid sequence Proteins 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 230000002068 genetic effect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000002110 toxicologic effect Effects 0.000 description 1
- 231100000027 toxicology Toxicity 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/447—Systems using electrophoresis
- G01N27/44704—Details; Accessories
- G01N27/44717—Arrangements for investigating the separated zones, e.g. localising zones
- G01N27/44721—Arrangements for investigating the separated zones, e.g. localising zones by optical means
- G01N27/44726—Arrangements for investigating the separated zones, e.g. localising zones by optical means using specific dyes, markers or binding molecules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/447—Systems using electrophoresis
- G01N27/44756—Apparatus specially adapted therefor
- G01N27/44791—Microapparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/90—Plate chromatography, e.g. thin layer or paper chromatography
- G01N30/95—Detectors specially adapted therefor; Signal analysis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
- H01L31/1055—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type the devices comprising amorphous materials of Group IV of the Periodic Table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0636—Integrated biosensor, microarrays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0654—Lenses; Optical fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/18—Means for temperature control
- B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
- B01L2300/1827—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
- B01L2400/0421—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic electrophoretic flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L7/00—Heating or cooling apparatus; Heat insulating devices
- B01L7/52—Heating or cooling apparatus; Heat insulating devices with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
Definitions
- the present invention relates to a chemical and/or biomolecular analysis integrated system.
- the invention further relates to a method for manufacturing the same system.
- the system suggested according to the present invention permits realising a complete chemical and/or biomolecular analysis system on a single support, which is simple and reliable, and that can be obtained by a manufacturing method that can be carried out at low temperature, thus being reliable and not expensive.
- the suggested invention is included in the specific field of Lab on Chip systems, able carrying out complex analyses in an automatic and quick way, using small amounts of the sample analysed, that can be used for DNA analyses for genetic recognition, for in situ toxicological analysis of substances destined to alimentation, for which strict rules exist for quality control.
- the invention suggests a technology for chemical and/or biomolecular analysis that can be applied in different biotechnology fields.
- the solution suggested according to the present invention permits integrating, on a single support, basic operation of a chemical and/or biomolecular analysis, such as separation of substances to be analysed, movement of substances toward reaction and/or analysis sites, control of reaction mechanism to be eventually carried out on the device for preparation or marking purposes, verification of reactive events course exploiting all the spectroscopic and chromatographic features of analytes, detection for analytical purposes of fluorescence, chemiluminescence and bioluminescence phenomenons that can be referred to analyte (not chemiluminogenogenic compounds can be measured after a suitable marking).
- Manufacturing of the whole system is based on the use of thin film and thick film technologies, usually used in microelectronic field that, as it is well known, permit realisation of micrometric geometry structures on different layers (different material and shape) and having dimensions of different cm 2 ; particularly, it will be possible using them as laboratory slides support on which different materials will be deposited, for deposition of sample and its separation/migration toward active elements.
- Device suggested according to the present invention can be used for structural characterisation of materials deposited by measurement of diffusion though the same of fluorescent molecules having known chemical-physical features.
- a chemical and/or biomolecular analysis integrated system comprising a support, on a face of which a photo sensor is realised, and on the same face, or on the opposite face with respect to said photo sensor, it is positioned sample to be analysed, said photo sensor providing a current proportional to the luminous power emitted by chemiluminescent, bioluminescent or fluorescent samples, reading of photocurrent permitting a quantitative measurement of analysed sample, in case it is a fluorescent sample, or measures carried out by absorption, the system being illuminated by a suitable electromagnetic radiation, being it possible determining substances having intrinsic emission features, or being it possible actuating marking procedures, making it more specific the determination.
- said support can be comprised of a laboratory slide.
- said photo sensor is an amorphous silicon photo sensor, particularly comprised of overlapped layers so as to realise a p-doped/intrinsic/n-doped structure, i.e. a structure with two electric contacts, that, if suitably polarised, make it active diode as photo sensor.
- said system comprises means for separation of substances to be analysed, means fro moving substances toward reaction and/or analysis sites, and means for controlling mechanism of reaction occurring on device for preparation or marking purposes, means for verification of course of reaction events exploiting spectroscopic and chromatographic features of analytes, means for detecting, for analytic purposes, fluorescence, chemiluminescence and bioluminescence, or absorption phenomenons that can be referred to analyte.
- preparation of sample for analysis can be directly carried out on the device by thin layer chromatography and/or by an electrophoretic or dielectrophoretic travel methods and/or by chemical procedures, including the biomolecular amplification with chain polymerase (PCR) induced by thermal cycles.
- PCR chain polymerase
- molecular movement and possible separation of analytes present within the mixture can be carried out according to thin layer chromatography methods using the suitable movable phases, and/or by help of electric fields having suitable intensity and frequency, applied on conductive electrode structures, deposited on the substrate surface by thin film techniques (evaporation, sputtering, ecc.) and suitably conformed by photolithographic techniques.
- thin layer chromatography methods using the suitable movable phases, and/or by help of electric fields having suitable intensity and frequency, applied on conductive electrode structures, deposited on the substrate surface by thin film techniques (evaporation, sputtering, ecc.) and suitably conformed by photolithographic techniques.
- thermal cycles can be carried out in substrate zones on suitable heaters, comprised of thin film resistors manufactured by microelectronic planar techniques, with temperature sensors comprised of metals and/or amorphous semiconductors couplings on thin film.
- verification of course of reactive events can be carried out, by thin film sensors realised on the same substrate that can monitor variation of a chemical-physical parameter, such: absorption or emission, electric conductivity, ecc.
- a chemical-physical parameter such: absorption or emission, electric conductivity, ecc.
- the invention further relates to a method for manufacturing the above system, providing all or some of the following steps: - deep vacuum Physical Vapour Deposition (PVD) of a metallic thin film ( ⁇ 1 micron) (e.g. titanium/tungsten alloy) and conformation, by photolithography and selective chemical attack, of heating resistor and/or of lower contact of diode for measuring temperature, and/or of lower contacts of photodiodes for monitoring electrophoretic travel, and/or column tracks of photodetector matrix;
- PVD Physical Vapour Deposition
- TCO conductive and transparent thin film
- figure 1 shows a basic scheme of a system according to the invention
- figures 2, 3 and 4 show graphs relevant to experiments carried out employing the system of figure 1
- figures 5a and 5b are views of a prototype of a system according to the invention
- figures 6 and 7 show graphs relevant to photocurrent of one of amorphous silicon photosensors of matrix, during chromatographic travel of substances contained within a detergent and an marker ink:
- fixed phase silica gel : movable phase : ethylic alcohol
- figure 8 shows a second embodiment of the system according to the invention.
- FIG. 1 it is shown a scheme of operation of the system according to the invention, providing an amorphous silicon photo sensor Iprovised on a laboratory slide 2, on the opposite face of which, aligned with sensor 1 , is positioned substance 3 to be analysed.
- substances to be analysed are fluorescent substances; illuminating substrate with ultraviolet radiation, excited fluorescent pigment will emit visible light.
- Photodetectors employed for sensor 1 are comprised of amorphous silicon layers, stacked so as to realise a p-doped/intrinsic/n- doped (p-l-n) structure.
- OTA OTA
- FIG. 5a a prototype of a system integrated on glass is shown in figures 5a and 5b, for particular application for chromatographic analysis.
- a silica gel layer (fixed phase) is deposited on a face of a glass substrate, while a row of 16 hydrogenated amorphous silicon (a-Si:H) photosensors is realised on the opposite face (figure 5a).
- a-Si:H hydrogenated amorphous silicon
- TCO conductive and transparent oxide film
- System is electrically connected with outer electronic circuit by a suitable metallic track geometry up to the glass edge, and a "slide" standard connector (figure 5b).
- a small amount of the sample to be analysed is placed on silica gel, close to the edge, from which a mixture of suitably chosen solvents (movable phase) is made flowing by capillarity, determining migration of different components of mixture according to modes determined by molecular features (dimensions and charge).
- Sample components will be each one deposited at a different distance from the starting position, thus individuating a band structure, which is a feature of the analysed sample (figure 5a).
- a real time measure of substance migration through fixed phase can be carried out by the same system, monitoring photocurrent of different sensors. Knowing distance between devices it is possible knowing analyte displacement speed that is a feature of the same analyte and/or of the fixed phase employed.
- a process comprising the following steps is carried out for realisation of prototype of figure 5 (application to thin layer chromatography):
- a-Si:H hydrogenated amorphous silicon
- CVD Chemical Vapour Deposition
- p-doped(intrinsic/n- doped multiplayer structure with a total thickness of 1 micron, and thermal evaporation under vacuum of a metallic thin film.
- Conformation by photolithography and chemical/physical attack in reactive plasma (RIE) of device areas - spin coating deposition of and insulating layer and realisation of electrical interconnection holes (via-holes), by photolithography and selective attack, of a-Si active devices;
- figure 8 shows an example of integrated system on glass, more complete with respect to the previous one, on which all basic operations of a chemical and/or biomolecular analysis can be carried out, and particularly functions necessary to recognition of DNA fragments.
- Substrate 2 can be comprised of a laboratory slide, with dimensions of 2.5 x 7.5 x 0.1 cm 3 , on which structures for the different operations necessary for carrying out the complete analysis are realised.
- a passivation layer is laid down on said structure, insulating the analysed substance from the active part of the system.
- sixteen different known single helix DNA sequences are immobilised by standard "spotting" techniques on 4 sites corresponding to 16 pixels of a matrix of amorphous silicon photodetectors, directly realised on substrate.
- Some fragments of unknown single helix DNA into a solution are inputted on a 1x1 cm 2 area, dedicated to molecular amplification by PCR technique, a thin film metallic resistor 5 (e.g. chrome) being realised on said area, with an amorphous silicon diode temperature sensor 6. Resistor and diode electric contacts arrives on an edge of glass for connection with supply outer circuit 7.
- a thin film metallic resistor 5 e.g. chrome
- molecule electrophoretic travel starts, applying an electric field between at least two metallic electrodes 8 placed above the passivation layer. It is possible real time monitoring, during the travel, along a 1 x 3 cm 2 area, of molecule passage, by reading photocurrent signal provided by amorphous silicon photodetectors 9 having a 1 x 10 mm 2 area.
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Clinical Laboratory Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Hematology (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Steroid Compounds (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITRM20070028 ITRM20070028A1 (en) | 2007-01-22 | 2007-01-22 | INTEGRATED SYSTEM FOR CHEMICAL AND / OR BIOMOLECULAR ANALYSIS, AND RELATIVE PROCESS OF PROCESSING. |
PCT/IT2008/000021 WO2008090578A1 (en) | 2007-01-22 | 2008-01-14 | Chemical and/or biomolecular analysis integrated system and method for manufacturing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2106546A1 true EP2106546A1 (en) | 2009-10-07 |
Family
ID=39495913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08720191A Withdrawn EP2106546A1 (en) | 2007-01-22 | 2008-01-14 | Chemical and/or biomolecular analysis integrated system and method for manufacturing the same |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2106546A1 (en) |
IT (1) | ITRM20070028A1 (en) |
WO (1) | WO2008090578A1 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5605662A (en) * | 1993-11-01 | 1997-02-25 | Nanogen, Inc. | Active programmable electronic devices for molecular biological analysis and diagnostics |
US6875619B2 (en) * | 1999-11-12 | 2005-04-05 | Motorola, Inc. | Microfluidic devices comprising biochannels |
KR100452946B1 (en) * | 2002-11-26 | 2004-10-14 | 한국전자통신연구원 | Low Power Consumption Microfabricated Thermal Cycler and its Fabrication Method |
KR100700126B1 (en) * | 2003-03-10 | 2007-03-28 | 가시오게산키 가부시키가이샤 | Dna analyzing apparatus, dna sensor, and analyzing method |
-
2007
- 2007-01-22 IT ITRM20070028 patent/ITRM20070028A1/en unknown
-
2008
- 2008-01-14 WO PCT/IT2008/000021 patent/WO2008090578A1/en active Application Filing
- 2008-01-14 EP EP08720191A patent/EP2106546A1/en not_active Withdrawn
Non-Patent Citations (1)
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