EP2062287B8 - Buffer station for stocker system - Google Patents

Buffer station for stocker system Download PDF

Info

Publication number
EP2062287B8
EP2062287B8 EP07804779.2A EP07804779A EP2062287B8 EP 2062287 B8 EP2062287 B8 EP 2062287B8 EP 07804779 A EP07804779 A EP 07804779A EP 2062287 B8 EP2062287 B8 EP 2062287B8
Authority
EP
European Patent Office
Prior art keywords
buffer station
stocker system
stocker
station
buffer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP07804779.2A
Other languages
German (de)
French (fr)
Other versions
EP2062287B1 (en
EP2062287A2 (en
Inventor
Lutz Rebstock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks Automation Germany GmbH
Original Assignee
Brooks Automation Germany GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/881,093 external-priority patent/US8868229B2/en
Priority claimed from US11/881,091 external-priority patent/US7751919B2/en
Application filed by Brooks Automation Germany GmbH filed Critical Brooks Automation Germany GmbH
Publication of EP2062287A2 publication Critical patent/EP2062287A2/en
Publication of EP2062287B1 publication Critical patent/EP2062287B1/en
Application granted granted Critical
Publication of EP2062287B8 publication Critical patent/EP2062287B8/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
EP07804779.2A 2006-08-19 2007-08-19 Buffer station for stocker system Active EP2062287B8 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US83859406P 2006-08-19 2006-08-19
US11/881,093 US8868229B2 (en) 2006-08-19 2007-07-25 Buffer station for stocker system
US11/881,091 US7751919B2 (en) 2006-08-19 2007-07-25 Method for operating equipment using buffer station having emergency access
PCT/IB2007/002371 WO2008023232A2 (en) 2006-08-19 2007-08-19 Buffer station for stocker system

Publications (3)

Publication Number Publication Date
EP2062287A2 EP2062287A2 (en) 2009-05-27
EP2062287B1 EP2062287B1 (en) 2020-01-08
EP2062287B8 true EP2062287B8 (en) 2021-03-10

Family

ID=38776246

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07804779.2A Active EP2062287B8 (en) 2006-08-19 2007-08-19 Buffer station for stocker system

Country Status (2)

Country Link
EP (1) EP2062287B8 (en)
WO (1) WO2008023232A2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6516243B2 (en) * 2001-01-16 2003-02-04 Taiwan Semiconductor Manufacturing Co., Ltd Stocker apparatus affording manual access
JP3900923B2 (en) * 2001-12-21 2007-04-04 アシスト シンコー株式会社 Stocker

Also Published As

Publication number Publication date
WO2008023232A2 (en) 2008-02-28
EP2062287B1 (en) 2020-01-08
EP2062287A2 (en) 2009-05-27
WO2008023232A3 (en) 2008-04-17

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