EP2044404A4 - Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration - Google Patents

Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration

Info

Publication number
EP2044404A4
EP2044404A4 EP06786916A EP06786916A EP2044404A4 EP 2044404 A4 EP2044404 A4 EP 2044404A4 EP 06786916 A EP06786916 A EP 06786916A EP 06786916 A EP06786916 A EP 06786916A EP 2044404 A4 EP2044404 A4 EP 2044404A4
Authority
EP
European Patent Office
Prior art keywords
calibration
method
polarization state
spectroscopic ellipsometer
ellipsometer system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06786916A
Other languages
German (de)
French (fr)
Other versions
EP2044404A1 (en
Inventor
Blaine D Johs
Craig M Herzinger
Steven E Green
Jeffrey S Hale
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
J A Woollam Co Inc
Original Assignee
J A Woollam Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by J A Woollam Co Inc filed Critical J A Woollam Co Inc
Priority to PCT/US2006/026928 priority Critical patent/WO2008008058A1/en
Publication of EP2044404A1 publication Critical patent/EP2044404A1/en
Publication of EP2044404A4 publication Critical patent/EP2044404A4/en
Application status is Withdrawn legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N21/211Ellipsometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N21/211Ellipsometry
    • G01N2021/213Spectrometric ellipsometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274Calibration, base line adjustment, drift correction
EP06786916A 2006-07-11 2006-07-11 Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration Withdrawn EP2044404A4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/US2006/026928 WO2008008058A1 (en) 2006-07-11 2006-07-11 Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration

Publications (2)

Publication Number Publication Date
EP2044404A1 EP2044404A1 (en) 2009-04-08
EP2044404A4 true EP2044404A4 (en) 2012-10-24

Family

ID=38923517

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06786916A Withdrawn EP2044404A4 (en) 2006-07-11 2006-07-11 Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration

Country Status (3)

Country Link
EP (1) EP2044404A4 (en)
JP (1) JP2009543092A (en)
WO (1) WO2008008058A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103884659B (en) * 2014-02-20 2016-03-02 南京邮电大学 Angular resolution micro-nano spectral analysis device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6822738B1 (en) * 1995-09-20 2004-11-23 J.A. Woollam Co. Inc. Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system
US20050179897A1 (en) * 2001-01-09 2005-08-18 Synowicki Ronald A. Method of analysis of multiple layer samples

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3285365B2 (en) * 1997-04-04 2002-05-27 ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッド Rotation corrector spectroscopic ellipsometer system according regression calibration with a photo array detector
US6982792B1 (en) * 2000-03-21 2006-01-03 J.A. Woollam Co. Inc Spectrophotometer, ellipsometer, polarimeter and the like systems
JP5248722B2 (en) * 1999-04-22 2013-07-31 ケーエルエー−テンカー コーポレイション Surface characteristic analysis system with self-calibration function
US6859278B1 (en) * 2001-01-16 2005-02-22 J.A. Woollam Co. Inc. Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
US7050162B2 (en) * 2002-01-16 2006-05-23 Therma-Wave, Inc. Optical metrology tool having improved contrast
US7349079B2 (en) * 2004-05-14 2008-03-25 Kla-Tencor Technologies Corp. Methods for measurement or analysis of a nitrogen concentration of a specimen
US7067819B2 (en) * 2004-05-14 2006-06-27 Kla-Tencor Technologies Corp. Systems and methods for measurement or analysis of a specimen using separated spectral peaks in light

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6822738B1 (en) * 1995-09-20 2004-11-23 J.A. Woollam Co. Inc. Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system
US20050179897A1 (en) * 2001-01-09 2005-08-18 Synowicki Ronald A. Method of analysis of multiple layer samples

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
K Y BANG ET AL: "Self-Calibrated Mueller Matrix Spectroscopic Ellipsometry", JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 45, no. 1, 1 July 2004 (2004-07-01), pages 185 - 188, XP055037644 *
See also references of WO2008008058A1 *

Also Published As

Publication number Publication date
JP2009543092A (en) 2009-12-03
WO2008008058A1 (en) 2008-01-17
EP2044404A1 (en) 2009-04-08

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Legal Events

Date Code Title Description
17P Request for examination filed

Effective date: 20090205

AK Designated contracting states:

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent to

Countries concerned: ALBAHRMKRS

RIN1 Inventor (correction)

Inventor name: HALE, JEFFREY S.

Inventor name: HERZINGER, CRAIG M.

Inventor name: GREEN, STEVEN E.

Inventor name: JOHS, BLAINE D.

RIN1 Inventor (correction)

Inventor name: HALE, JEFFREY S.

Inventor name: HERZINGER, CRAIG M.

Inventor name: JOHS, BLAINE D.

Inventor name: GREEN, STEVEN E.

DAX Request for extension of the european patent (to any country) deleted
A4 Despatch of supplementary search report

Effective date: 20120925

RIC1 Classification (correction)

Ipc: G01N 21/21 20060101AFI20120919BHEP

18D Deemed to be withdrawn

Effective date: 20130423