EP2044404A4 - Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration - Google Patents
Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibrationInfo
- Publication number
- EP2044404A4 EP2044404A4 EP06786916A EP06786916A EP2044404A4 EP 2044404 A4 EP2044404 A4 EP 2044404A4 EP 06786916 A EP06786916 A EP 06786916A EP 06786916 A EP06786916 A EP 06786916A EP 2044404 A4 EP2044404 A4 EP 2044404A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- calibration
- polarization state
- spectroscopic ellipsometer
- ellipsometer system
- state rotatable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
- G01N2021/213—Spectrometric ellipsometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2006/026928 WO2008008058A1 (en) | 2006-07-11 | 2006-07-11 | Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2044404A1 EP2044404A1 (en) | 2009-04-08 |
EP2044404A4 true EP2044404A4 (en) | 2012-10-24 |
Family
ID=38923517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06786916A Withdrawn EP2044404A4 (en) | 2006-07-11 | 2006-07-11 | Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2044404A4 (en) |
JP (1) | JP2009543092A (en) |
WO (1) | WO2008008058A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103884659B (en) * | 2014-02-20 | 2016-03-02 | 南京邮电大学 | Angular resolution micro-nano spectral analysis device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6822738B1 (en) * | 1995-09-20 | 2004-11-23 | J.A. Woollam Co. Inc. | Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system |
US20050179897A1 (en) * | 2001-01-09 | 2005-08-18 | Synowicki Ronald A. | Method of analysis of multiple layer samples |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3285365B2 (en) * | 1997-04-04 | 2002-05-27 | ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッド | Rotation compensator-type spectroscopic ellipsometer system with regression calibration with photoarray detector |
US6859278B1 (en) * | 2001-01-16 | 2005-02-22 | J.A. Woollam Co. Inc. | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems |
WO2000065331A2 (en) * | 1999-04-22 | 2000-11-02 | Kla-Tencor Corporation | System for analyzing surface characteristics with self-calibrating capability |
US6982792B1 (en) * | 2000-03-21 | 2006-01-03 | J.A. Woollam Co. Inc | Spectrophotometer, ellipsometer, polarimeter and the like systems |
US7050162B2 (en) * | 2002-01-16 | 2006-05-23 | Therma-Wave, Inc. | Optical metrology tool having improved contrast |
US7067819B2 (en) * | 2004-05-14 | 2006-06-27 | Kla-Tencor Technologies Corp. | Systems and methods for measurement or analysis of a specimen using separated spectral peaks in light |
US7349079B2 (en) * | 2004-05-14 | 2008-03-25 | Kla-Tencor Technologies Corp. | Methods for measurement or analysis of a nitrogen concentration of a specimen |
-
2006
- 2006-07-11 EP EP06786916A patent/EP2044404A4/en not_active Withdrawn
- 2006-07-11 WO PCT/US2006/026928 patent/WO2008008058A1/en active Application Filing
- 2006-07-11 JP JP2009519418A patent/JP2009543092A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6822738B1 (en) * | 1995-09-20 | 2004-11-23 | J.A. Woollam Co. Inc. | Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system |
US20050179897A1 (en) * | 2001-01-09 | 2005-08-18 | Synowicki Ronald A. | Method of analysis of multiple layer samples |
Non-Patent Citations (2)
Title |
---|
K Y BANG ET AL: "Self-Calibrated Mueller Matrix Spectroscopic Ellipsometry", JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 45, no. 1, 1 July 2004 (2004-07-01), pages 185 - 188, XP055037644 * |
See also references of WO2008008058A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2044404A1 (en) | 2009-04-08 |
WO2008008058A1 (en) | 2008-01-17 |
JP2009543092A (en) | 2009-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20090205 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA HR MK RS |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: HALE, JEFFREY S. Inventor name: GREEN, STEVEN E. Inventor name: HERZINGER, CRAIG M. Inventor name: JOHS, BLAINE D. |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: HALE, JEFFREY S. Inventor name: GREEN, STEVEN E. Inventor name: HERZINGER, CRAIG M. Inventor name: JOHS, BLAINE D. |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20120925 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G01N 21/21 20060101AFI20120919BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20130423 |