EP1905057A4 - Arrays of microcavity plasma devices with dielectric encapsulated electrodes - Google Patents

Arrays of microcavity plasma devices with dielectric encapsulated electrodes

Info

Publication number
EP1905057A4
EP1905057A4 EP06787559A EP06787559A EP1905057A4 EP 1905057 A4 EP1905057 A4 EP 1905057A4 EP 06787559 A EP06787559 A EP 06787559A EP 06787559 A EP06787559 A EP 06787559A EP 1905057 A4 EP1905057 A4 EP 1905057A4
Authority
EP
European Patent Office
Prior art keywords
arrays
plasma devices
microcavity plasma
encapsulated electrodes
dielectric encapsulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06787559A
Other languages
German (de)
French (fr)
Other versions
EP1905057A2 (en
EP1905057B1 (en
Inventor
Gary J Eden
Sung-Jin Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Illinois
Original Assignee
University of Illinois
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Illinois filed Critical University of Illinois
Publication of EP1905057A2 publication Critical patent/EP1905057A2/en
Publication of EP1905057A4 publication Critical patent/EP1905057A4/en
Application granted granted Critical
Publication of EP1905057B1 publication Critical patent/EP1905057B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/18—AC-PDPs with at least one main electrode being out of contact with the plasma containing a plurality of independent closed structures for containing the gas, e.g. plasma tube array [PTA] display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Gas-Filled Discharge Tubes (AREA)
EP06787559.1A 2005-07-15 2006-07-17 Arrays of microcavity plasma devices with dielectric encapsulated electrodes Not-in-force EP1905057B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69947505P 2005-07-15 2005-07-15
PCT/US2006/027667 WO2007011865A2 (en) 2005-07-15 2006-07-17 Microcavity plasma devices with dielectric encapsulated electrodes

Publications (3)

Publication Number Publication Date
EP1905057A2 EP1905057A2 (en) 2008-04-02
EP1905057A4 true EP1905057A4 (en) 2012-06-27
EP1905057B1 EP1905057B1 (en) 2016-03-09

Family

ID=37669467

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06787559.1A Not-in-force EP1905057B1 (en) 2005-07-15 2006-07-17 Arrays of microcavity plasma devices with dielectric encapsulated electrodes

Country Status (4)

Country Link
EP (1) EP1905057B1 (en)
JP (1) JP5271080B2 (en)
KR (1) KR20080031957A (en)
WO (1) WO2007011865A2 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2915311B1 (en) * 2007-04-17 2011-01-07 Saint Gobain FLASHLIGHT WITH DISCHARGE.
EP2153454B1 (en) * 2007-05-16 2013-04-24 The Board Of Trustees Of The University Of Illinois Arrays of microcavity plasma devices and electrodes with reduced mechanical stress
EP2203940B1 (en) 2007-10-25 2013-04-03 The Board Of Trustees Of The University Of Illinois Array of microcavity plasma devices with microcavities having curved sidewalls and method of forming such array
US8471471B2 (en) 2007-10-25 2013-06-25 The Board Of Trustees Of The University Of Illinois Electron injection-controlled microcavity plasma device and arrays
US8890409B2 (en) 2008-05-14 2014-11-18 The Board Of Trustees Of The University Of Illnois Microcavity and microchannel plasma device arrays in a single, unitary sheet
US8179032B2 (en) 2008-09-23 2012-05-15 The Board Of Trustees Of The University Of Illinois Ellipsoidal microcavity plasma devices and powder blasting formation
US8541946B2 (en) 2009-12-17 2013-09-24 The Board Of Trustees Of The University Of Illinois Variable electric field strength metal and metal oxide microplasma lamps and fabrication
US8547004B2 (en) 2010-07-27 2013-10-01 The Board Of Trustees Of The University Of Illinois Encapsulated metal microtip microplasma devices, arrays and fabrication methods
US9484621B2 (en) * 2012-11-02 2016-11-01 Nokia Technologies Oy Portable electronic device body having laser perforation apertures and associated fabrication method
IN2012CH05191A (en) * 2012-12-13 2015-07-10 Krupakar Murali Subramanian
US8995658B2 (en) 2013-02-13 2015-03-31 Honeywell International Inc. Physics-based key generation
US9465960B2 (en) 2013-12-04 2016-10-11 Honeywell International Inc. Physics-based authentication
TWI548310B (en) * 2014-11-21 2016-09-01 財團法人工業技術研究院 Modular electrode device for plasma processing
KR101723956B1 (en) 2015-11-26 2017-04-06 한림대학교 산학협력단 Micro plasma device for treating eyeball
DE102017116800B4 (en) 2017-07-25 2024-03-14 Cinogy Gmbh Electrode arrangement for a dielectrically hindered plasma treatment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020030437A1 (en) * 2000-09-13 2002-03-14 Nobuhiro Shimizu Light-emitting device and backlight for flat display
WO2004032176A1 (en) * 2002-10-04 2004-04-15 Kyu-Wang Lee Nanoporous dielectrics for plasma generator
US20040160162A1 (en) * 2001-10-26 2004-08-19 Board Of Trustees Of The University Of Illinois Microdischarge devices and arrays
WO2007011388A2 (en) * 2004-10-04 2007-01-25 The Board Of Trustees Of The University Of Illinois Microdischarge devices with encapsulated electrodes and method of making

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62262360A (en) * 1986-05-07 1987-11-14 Canon Inc Flat light source device
CH676168A5 (en) * 1988-10-10 1990-12-14 Asea Brown Boveri
JP3849735B2 (en) * 1997-04-10 2006-11-22 株式会社日立プラズマパテントライセンシング Plasma display panel and manufacturing method thereof
JP2001118541A (en) * 1999-10-21 2001-04-27 Matsushita Electric Ind Co Ltd Light-emitting device
JP2003208850A (en) * 2002-01-15 2003-07-25 Noritake Co Ltd Flat plate type display device and method of manufacturing the display device
JP2003217519A (en) * 2002-01-25 2003-07-31 Matsushita Electric Ind Co Ltd Gas discharge lamp, and information display system using the same
JP3919714B2 (en) * 2003-07-25 2007-05-30 三菱電機株式会社 Discharge light emitting device and contact image sensor using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020030437A1 (en) * 2000-09-13 2002-03-14 Nobuhiro Shimizu Light-emitting device and backlight for flat display
US20040160162A1 (en) * 2001-10-26 2004-08-19 Board Of Trustees Of The University Of Illinois Microdischarge devices and arrays
WO2004032176A1 (en) * 2002-10-04 2004-04-15 Kyu-Wang Lee Nanoporous dielectrics for plasma generator
WO2007011388A2 (en) * 2004-10-04 2007-01-25 The Board Of Trustees Of The University Of Illinois Microdischarge devices with encapsulated electrodes and method of making

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EDEN J G ET AL: "Microdischarge Devices With a Nanoporous Al<tex>$_2$</tex>O<tex>$_3$< /tex>Dielectric: Operation in Ne and Air", IEEE TRANSACTIONS ON PLASMA SCIENCE, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 33, no. 2, 1 April 2005 (2005-04-01), pages 572 - 573, XP011130303, ISSN: 0093-3813, DOI: 10.1109/TPS.2005.845268 *
See also references of WO2007011865A2 *

Also Published As

Publication number Publication date
EP1905057A2 (en) 2008-04-02
JP2009502010A (en) 2009-01-22
EP1905057B1 (en) 2016-03-09
JP5271080B2 (en) 2013-08-21
WO2007011865A3 (en) 2009-04-02
KR20080031957A (en) 2008-04-11
WO2007011865A2 (en) 2007-01-25

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