EP1877334A1 - Systemes et procedes de pompage de colonnes de liquide continues utilisant des elements de commande d'hydrophobicite dans un microcanal - Google Patents

Systemes et procedes de pompage de colonnes de liquide continues utilisant des elements de commande d'hydrophobicite dans un microcanal

Info

Publication number
EP1877334A1
EP1877334A1 EP05733447A EP05733447A EP1877334A1 EP 1877334 A1 EP1877334 A1 EP 1877334A1 EP 05733447 A EP05733447 A EP 05733447A EP 05733447 A EP05733447 A EP 05733447A EP 1877334 A1 EP1877334 A1 EP 1877334A1
Authority
EP
European Patent Office
Prior art keywords
micropump
electrode
fluid
hydrophobic
fluid channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05733447A
Other languages
German (de)
English (en)
Other versions
EP1877334A4 (fr
Inventor
Liu Hong
Saman Dharmatilleke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agency for Science Technology and Research Singapore
Original Assignee
Agency for Science Technology and Research Singapore
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency for Science Technology and Research Singapore filed Critical Agency for Science Technology and Research Singapore
Publication of EP1877334A1 publication Critical patent/EP1877334A1/fr
Publication of EP1877334A4 publication Critical patent/EP1877334A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Definitions

  • the present invention relates generally to micropumping systems and methods, and more particularly to systems and methods for pumping ultra-small volume continuous liquid columns using controlled hydrophobicity actuation features in a microchannel.
  • micropumps that can deliver ultra-small volumes of fluids.
  • Traditional micropumps utilize piezoelectric, electrostatic, thermopneumatic or electromagnetic actuators to generate a driving force for moving fluid in the pump.
  • piezoelectric and electrostatic actuators typically require a high driving voltage of usually above 100 volts, and thermopneumatic and electromagnetic actuators typically consume a large amount of electric power.
  • pumps which use the above actuation mechanisms are also typically relatively bulky in size and cannot be further miniaturized due to the physical size limitations imposed by the components of the actuators.
  • the smallest quantum of liquid that can be pumped using pumps presently available are in the range of a few nanoliters (nl).
  • micropumps based on such prior actuation mechanisms are undesirable for use in systems requiring low power consumption, small size and controlled delivery of small quanta of liquid volume.
  • micropumps using these actuation mechanisms are undesirable for use in remote environmental' monitoring systems, implantable medical devices, chemical analysis systems and oilier systems which need pumps that are small, consume less power (e.g., operate at a low voltage) and are capable of pumping very small quanta of liquid volume.
  • micropumps that overcome the above and other problems.
  • Such pumps should also provide controlled volumes of liquid in the sub-nanoliter range.
  • the present invention provides micropumps that overcomes the above problems.
  • the present invention provides systems and methods for pumping ultra-small volume continuous liquid columns in a microchannel using controlled hydrophobicity .. actuation features in the microchannel.
  • a micropump includes a microchannel formed in a substrate.
  • the microchannel includes a plurality of electrode ring layers or electrodes with other geometries within the microchannel.
  • Alternating electrode layers are covered with a fluoropolymer or a layer of self assembled monolayer or other hydrophobic substance that changes to a hydrophilic state in response to an applied voltage signal.
  • Electrodes covered by fluoropolymer material or self assembled monolayer define hydrophobic regions interspersed between hydrophilic regions defined by exposed hydrophilic substrate material or electrode ⁇ ring layers or electrodes with other geometries.
  • the covered electrodes in the hydrophobic regions may include the same or different materials as the exposed electrodes in the hydrophilic regions.
  • the micropumps of the present invention advantageously do not employ actuators having physical components that would limit minimum device sizes, and therefore can be miniaturized as desired for the particular application.
  • the limitation to miniaturization is only imposed by the limitations in current lithography techniques (i.e., the ⁇ smallest, feature size that can be defined using current lithography techniques).
  • the lithography process used in making a micropump is capable of defining 100 nanometer (nm) features, then the size of features of the pump will be on the order of a few hundred nanometers.
  • a pump according to the present invention is capable of pumping quanta of liquids as small as a few atto liters.
  • pumps according to the present- invention can be used to pump liquid quanta as large as a few ml or greater.
  • the voltage required to pump liquids using-controlled hydrophobicity actuation features of the present invention is advantageously less than about 20 Volts, e.g.,.5 Volts or less, at an extremely low current (e.g.. on the order of a few 10s' of mA or lower).
  • the controlled hydrophobicity actuation utilizes surface tension as a driving force in the micro-nano scale. Therefore, pumps according to the present invention do not require a dedicated actuator for pumping. Also, in certain aspects, these pumps include an in-built' metering feature that is useful to pump a measured volume of liquid. This measured volume can be selected to be in the range of a few milliliters to a few attoliters.
  • the pump design of the present invention presents a new micro/nano fluidic device design and therefore also presents a variety of new applications. For example, the low power consumption and low voltage requirements of these pumps make them very attractive for applications that require an ultra miniature metering pump which operates at a low voltage.
  • a micropump typically includes a fluid channel having an inner surface and defining an axis of fluid propagation.
  • the micropump also typically includes a first electrode ring disposed on the inner surface of the fluid channel around the axis, a second electrode ring disposed on the inner surface of the fluid channel around the axis, and a layer of hydrophobic material overlaying the second electrode ring. Upon application of a voltage to the second electrode ring, the hydrophobic material becomes hydrophilic.
  • a micropump that typ . ically includes a fluid channel having an inner surface and defining an axis of fluid propagation.
  • the micropump also typically includes a plurality of first electrode rings disposed on the inner surface of the fluid channel around the axis, a plurality of second electrode rings disposed on the inner surface of the fluid channel around the axis and the second electrode rings are interspersed between the plurality of the first electrode rings, and a layer of hydrophobic material overlaying each second electrode ring such that alternating hydrophobic and hydrophilic regions are encountered along the axis.
  • the hydrophobic material overlaying the selected electrode becomes hydrophilic.
  • a hydrophobic layer prevents a meniscus formed by the fluid from propagating along said axis, and when a voltage is applied to a second electrode ring and the hydrophobic material becomes hydrophilic, capillary forces move the meniscus past the region defined by the material overlying that- second ring.
  • the hydrophobic material overlying a second electrode includes a fluorpolymer such as CYTOP or Teflon.
  • the fluid channel is fo ⁇ ned in a substrate material such as silicon, silicon nitride, quartz, glass, or an insulated metal, plastic, dielectric, conductor or semiconductor or other insulated material.
  • a method for delivering controlled amounts of fluid.
  • the method typically includes coupling a fluid source ' to a fluid channel having an inner surface, with the fluid channel defining an axis of fluid propagation.
  • the fluid channel typically includes a plurality of first electrode rings disposed on the inner surface of the channel around the axis, a plurality of second electrode rings disposed on the inner surface of the channel around the axis and the second electrode rings are interspersed between the plurality of the first electrode rings, and a layer of hydrophobic - material overlaying each second electrode ring such that alternating hydrophobic and hydrophilic regions are encountered within the fluid channel along the defined axis.
  • the method also typically includes applying voltages to consecutive selected ones of the second electrode rings so as to cause the hydrophobic material overlaying the selected second electrode rings to become hydrophilic, wherein a meniscus formed by the fluid in the fluid channel is prevented from passing a hydrophobic region, and wherein capillary forces move . ⁇ the meniscus past the regions defined by the selected second electrode rings so as to move a volume of fluid defined by the number of selected second electrode rings.
  • FIG. 1 illustrates various views of a pump design implemented with a circular cross- section microchannel according to one embodiment.
  • FIGS. 2a-h show side cross-sectional views of fluid propagating in a fluid channel including multiple alternating hydrophobic and hydrophilic regions according to the present invention.
  • FIG. 3 is a photograph of side vieAV of a fabricated pump according to the present invention.
  • FIG. 4 shows a series of snapshots taken of the pump in FIG. 3 when actively pumping fluid.
  • FIG. 5 illustrates a process flow for fabricating a pump channel according to the present invention.
  • FIG. 6 sho ⁇ vs a side view of a flat rectangular electrode formed on a substrate and covered with a hydrophobic material.
  • FIG. 1 illustrates various views of a pump design implemented with a circular cross- section microchannel according to one embodiment.
  • the pump includes a channel 10 (fluid channel) formed in a substrate material 15.
  • the fluid channel 10 is in fluid communication with a fluid source (not shown) such as a liquid reservoir; Fluid from the fluid source enters the fluid channel 10 and propagates by capillary force.
  • a fluid source such as a liquid reservoir
  • Fluid from the fluid source enters the fluid channel 10 and propagates by capillary force.
  • FIG. Ia 5 at least a portion of the fluid channel includes alternating rings of hydrophobic and hydrophilic areas, or regions, disposed on the inside wall.
  • FIG. Ib shows a cross-sectional view of a hydrophobic region of fluid channel 10.
  • the hydrophobic region includes a layer of hydrophobic material 20 overlying a conductive electrode 25. e.g., Au or Pt electrodes.
  • a conductive electrode 25 e.g., Au or Pt electrodes.
  • Each hydrophobic region can be made . to become, hydrophilic by applying an electric field across the electrode that lies underneath the hydrophobic material and the fluid in channel 10.
  • One or more conductive electrodes 3O 5 e.g., Au or Pt electrodes, are also positioned in the channel outside the hydrophobic areas.
  • Electrodes 30 will be referred to herein as bare or exposed electrodes 30, and can be in contact with a fluid in the fluid channel unlike the electrodes 25 in the hydrophobic regions, which are preferably completely underneath hydrophobic layers- or firms 20.
  • the electrode 25 underneath the hydrophobic area is connected to the positive terminal of a power supply while the exposed electrode 30 is connected to the negative terminal as shown in FIG. Ic.
  • a hydrophobic region prevents a meniscus formed by the .fluid, and also the fluid column behind it, from propagating past the region.
  • the hydrophobic region remains hydrophobic.
  • a voltage signal is applied between the fluid (via an exposed electrode) and the electrode 25 underlying this hydrophobic region, the hydrophobic material becomes hydrophilic and the fluid column propagates in the fluid channel 10 until it meets the next hydrophobic region, at which point the meniscus is prevented from passing and the fluid column stops propagating.
  • the fluid column propagates primarily due to capillary force, and it automatically- gets rid of any unwanted air bubbles present in the system.
  • FIG. 2 show side cross-sectional views of fluid column 40 propagating in a fluid channel 10 including multiple alternating hydrophobic and hydrophilic regions according to the present invention.
  • Hydrophobic regions are defined by the hydrophobic film 20 overlying an electrode 25 (not shown in FIG. 2), and hydrophilic regions are defined by the regions not covered by a hydrophobic material.
  • Exposed electrodes 30 are located in the hydrophilic regions as shown. In one aspect, only one exposed electrode 3O 1 need be used. ⁇ However, it is preferred that multiple exposed electrodes 30 be positioned throughout the channel and interspersed between the hydrophobic regions to reduce the actuation voltage needed for each hydrophobic region.
  • exposed electrodes 30 are interspersed between hydrophobic regions so as to form exposed-covered electrode pairs.
  • differing numbers of exposed and covered • ⁇ electrodes may be used, such as one exposed electrode for every two (or more) covered electrodes. In such cases, it may be useful to apply different voltages between the covered electrodes and the exposed electrode depending on the distance from the exposed electrode. [0024 ⁇ - As shown in FIG. 2a, the meniscus 45 of a propagating fluid column 40 extends with a contact angle 50 relative to the inner walls of th& fluid channel 10 when propagating in ' a hydropliilic region.
  • the contact angle 50 formed by the meniscus 45 is a function of the interfacial surface tension between the fluid and surface, the surface tension between the fluid and atmosphere (air, gas or liquid in channel surrounding meniscus) and the surface tension between the atmosphere and surface.
  • the meniscus 45 When the meniscus 45 reaches a hydrophobic region 20, the meniscus 45 forms a contact angle 55 relative to the inner walls of the fluid channel 10 as shown in FIG. 2b.
  • This contact angle 55 is formed by the surface tension between the hydrophobic surface, the fluid and the air at the interface between the hydrophobic region and the hydrophilic region.
  • the meniscus 45, and thus the column of fluid 40 behind the meniscus is prevented from propagating in the fluid channel due to the properties of the hydrophobic material in the hydrophobic region.
  • the meniscus changes between a concave and a convex profile depending on whether the fluid is propagating or held by a hydrophobic region.
  • a voltage signal may be applied to the electrodes 25 and 30 as shown in FIG. 2c to change this hydrophobic region to a hydrophilic state.
  • a voltage e.g., 5 V
  • the hydrophobic material overlying the electrode 25 becomes hydrophilic.
  • the meniscus again propagates down the fluid channel.
  • the angle formed at the contact with the inner walls of the fluid channel changes, due to the (now) hydrophilic state of this region as shown in FIG. 2d.
  • a region that was changed to a hydrophilic state may revert back to its natural hydrophobic state.
  • the voltage applied to an electrode 25 may be turned off or reversed after passage of the meniscus. This allows for the fluid flow in channel 10 to be controllably shut off at that hydrophobic region. For example, upon reverting back to a hydrophobic state that region 30 will cut off fluid flow and a new meniscus will form at the hydrophobic-hydrophilic interface. Unless stopped by another hydrophobic region, fluid that has already passed will continue to propagate in channel 10 due to capillary forces.
  • FIGS. 2e-h show the meniscus 45, and fluid column 40, propagating further through the fluid channel 10 (FIG. 2e), encountering the next hydrophobic region (FIG. 2f), which is selectively converted to a hydrophilic state (FIG. 2g) to allow the meniscus and fluid column to pass (FIG. 2h).
  • propagation of a column of fluid can be controlled by selectively controlling the states of interaction of each hydrophobic region encountered by the fluid column in the fluid channel. For example, a continuous flow of fluid can be precisely controlled and pumped. Also, any ionic fluid such as water or a solution of ionic salt desolated in water may be pumped using the pumps of the present invention.
  • a method of pumping or delivering fluid includes coupling a fluid source such as a liquid reservoir to a fluid channel as described above.
  • the fluid channel includes an inner surface that defines an axis of fluid propagation.
  • the fluid channel typically includes one or more exposed electrode rings disposed on the inner surface of the channel around the axis and a plurality of second electrode rings disposed on the inner surface of the channel around the axis with a layer of hydrophobic material overlaying each second electrode ring.
  • the exposed inner surface and the exposed electrode ring(s) on the inner surface are preferably hydrophilic. If multiple exposed electrodes are included, the exposed electrodes are preferably interspersed between the plurality of covered electrode rings (e.g., one exposed electrode between every two covered electrodes).
  • the method also typically includes applying voltages to consecutive selected ones of the second electrode rings, beginning with the electrode ring underlying the first hydrophobic region so as to cause the hydrophobic material overlaying the selected second electrode rings to become hydrophilic. Capillary forces move the meniscus past the regions defined by the selected second electrode rings- so as to move a volume of fluid defined, in part, by the number of selected second electrode rings to which a voltage is applied.
  • the fluid volume delivered can range from one or a few attoliters up to picoliters, nanoliters, milliliters, etc.
  • the fluid flow can be stopped, if desired, by using an integrated valve or by cutting off the source.
  • a fluid channel is formed in a silicon substrate using standard photolithography techniques.
  • Other useful substrate materials include an insulated metal, a insulated non-metal, an insulated semiconductor and an insulator. Specific examples include silicon, silicon nitride, quartz, glass and others. It should be appreciated that other materials . as would be apparent to one skilled in the art may be used.
  • a fluid channel according to the present invention preferably has a circular cross-section as shown, for example in FIG. 1. However, it should be appreciated that a fluid channel may have any cross-sectional geometry such as, for example, oval or elliptical, square, rectangular, triangular, hexagonal, etc. Further, the fluid channel, in certain aspects should have dimensions suitable for the particular application.
  • the fluid channel has a diameter of about 100 ⁇ m or less. It should be appreciated that the diameter (or relevant dimension of other cross sectional geometry channels) can range down to the limits of photolithograpy processing (e.g., currently on the order of 100 nm) up to the mm or cm range.
  • CYTOP Fluoropolymer is used for the hydrophobic layer(s) material and gold (Au) is used for the electrodes.
  • useful materials for the hydrophobic layer(s) include any insulating material that has a sufficiently high dielectric constant, e.g., to allow for the reversal back to a hydrophobic state upon application of an appropriate inverse voltage signal. Examples include a fluoropolyrner such as CYTOP, Teflon, PTFE, PFA, FEP, ETFE, CTEE and others, as well as other materials such as ceramics, oxides, nitrides, oxynitrides, etc.
  • Useful materials for the electrodes include conductive metals, semiconductors and conductive polymers. Examples include Au, Pt 5 A] and other metals, as well as other materials such as Si, polyaniline, polythiopene; polyphenylenevinylene, etc. It should be appreciated that the material used for the electrodes may differ between electrodes. For example, the exposed electrodes may include materials different from the materials used for the covered electrodes. Additionally, the materials used for different covered or exposed electrodes may also vary. It is preferred that the electrodes are made of hydrophilic material to prevent them from affecting fluid flow, although the covered electrodes may be made of a hydrophobic material if desired.
  • the dimensions of electrodes and spacings between electrodes may also vary.
  • the exposed and covered electrodes will have thicknesses ranging from about 100 nm or smaller to about 1 ⁇ m ' or greater, and widths ranging from about 10 nm or smaller to about 1 mm or greater, preferably between about 100 nm and about 10 ⁇ m.
  • the widths and thicknesses may vary from electrode to electrode.
  • ⁇ the exposed and covered electrodes are typically displaced from each other by a distance ranging from about 1 nm to about 10 nm or greater.
  • the distance between exposed - covered electrode pairs is substantially the same throughout the fluid channel, and the distance between an exposed electrode and a covered electrode within an electrode pair is substantially the same for electrode pairs throughout the fluid channel.
  • these . distances may vary between and among electrode pairs throughout a fluid channel.
  • the interspacing distance between electrode pairs or within an electrode pair may , vary depending on the dimensions of an overlying hydrophobic material layer.
  • a hydrophobic layer has a width in the range of about 1 nm (nanometers) or smaller to about 10 mm (millimeters) or greater depending on the dimensions of the fluid channel and the desired pump application. Further, in one aspect, a hydrophobic layer has a thickness of between about 1 nm or smaller and about 100 nm or . greater. In general, the dimensions of a hydrophobic layer required will depend, in part, on the material used, the dimensions of the fluid channel and the desired application of the pump. Likewise, the dimensions and materials of an underlying electrode may depend, in part, on the dimensions and materials of the overlying hydrophobic layer.
  • the width of an , electrode underlying a hydrophobic film layer is preferably smaller than the width of the film layer.
  • the underlying electrodes are about 2 ⁇ m to about 5 ⁇ m shorter (narrower) than the hydrophobic film layer.
  • the dimensions of the electrodes will determine the applied potential, the time it takes for the contact angle of the meniscus to change, and generally the pump performance.
  • useful electrode and hydrophobic region configurations and materials will readily understand useful electrode and hydrophobic region configurations and materials.
  • pumps according to the present invention are able to operate using . applied voltages below about 30 Volts, and preferably below 20 Volts. In certain aspects, voltages around 5 Volts or lower may be applied between an exposed electrode and a covered electrode to convert the overlying hydrophobic material to a hydrophilic state. In genera], a pump according to the present invention can be operated at a lower voltage by optimizing the thickness of the hydrophobic layer. Also, it is preferred that covered and exposed electrodes be positioned in close proximity so as to reduce the needed actuation voltage. However, as above, an exposed electrode may be used with more than one covered electrode. Further, pumps according to the present invention can be used to pump any ionic liquid.-
  • FIG. 5 shows a process for fabricating a rectangular cross section channel. It will be appreciated by one skilled in the art that channels having other cross-sectional geometries can be fabricated using similar techniques with minor modifications.
  • microchannels are used to fabricate the microchannels.
  • silicon and glass wafers are cleaned using standard cleaning techniques.
  • a photoresist is spin coated on the silicon wafer, then exposed with a photomask containing the microchannel pattern.
  • the microchannel pattern is transferred to the photoresist.
  • Etching e.g., BHF etching
  • Etching is used to remove SiO 2 on the patterned area.
  • wet etching e.g., KOH, 40%+60°C
  • the channel is etched to the desired depth, e.g., to be about 100 ⁇ m deep.
  • Electrodes are formed by sputtering Cr (e.g., 100 nm fhick) and Au (e.g., 200 nm thick) onto the wafer. Lift-off is then performed to obtain the patterned electrodes..
  • the hydrophobic material e.g.. CYTOP, may then be deposited, e.g., spin coated, exposed, developed and etched as is well known. For example,.
  • FIG. 6 shows a side view of a flat rectangular electrode formed on a substrate and covered with a hydrophobic material. It should be appreciated that the above is only an example of a possible method to create a fluid channel and that other additional or alternative materials, parameters and process steps may be used as desired.
  • FIG. 3 is a photograph of a side view of a fabricated pump according to the present invention.
  • the pump includes a fluid channel and a plurality of electrode rings covered with CYTOP.
  • a plurality of exposed electrode rings adjacent the covered electrodes are also shown.
  • the channel width, depth and the electrode spacing are in the range of a few nm to a few mm.
  • FIG. 4 shows a series of snapshots taken of the pump in FIG. 3 when actively pumping fluid. As shown, the direction of fluid flow is from left to right in the fluid channel.
  • the meniscus of the fluid passes across the region defined by the CYTOP covered electrode.
  • a hydrophobic coating includes a self assembled monolayer (SAM).
  • SAM self assembled monolayer
  • the SAM coating can be assembled or reassembled to produce the hydrophobic region " .
  • the coatings on the hydrophobic area include a thin film having low dielectric breakdown voltage. When the dielectric breaks down the hydrophobic surface becomes hydrophilic and the liquid propagates through the channel. Tin ' s process is generally not reversible.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Composite Materials (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

La présente invention concerne une micropompe comprenant un microcanal (10) formé dans un substrat (15). Le microcanal comprend une pluralité de couches annulaires d'électrodes (25, 30) à l'intérieur du microcanal. Des couches d'électrodes alternantes sont recouvertes d'un fluoropolymère ou d'une autre substance hydrophobe (20) qui devient hydrophile en réponse à l'application d'un signal de tension. Les électrodes recouvertes d'un matériau fluoropolymère (25) définissent des zones hydrophobes intercalées entre des zones hydrophiles définies par des couches annulaires d'électrodes (30) exposées. Lorsqu'un fluide se propageant à l'intérieur du microcanal approche d'une zone hydrophobe, les propriétés hydrophobes de la surface du microcanal de cette zone empêchent un ménisque formé par le fluide de se propager. L'application d'une tension sur la zone hydrophobe la rend hydrophile, ce qui permet au ménisque, et à la colonne de fluide qui le suit, de se propager dans cette zone sous l'effet des forces capillaires. Lorsqu'il rencontre la zone hydrophobe suivante, le ménisque est à nouveau bloqué. Une application sélective de signaux de tension sur les électrodes dans des zones hydrophobes consécutives permet de commander la vitesse d'écoulement de colonnes de fluide, telle que déterminée par les dimensions du microcanal (telles que le diamètre d'un microcanal présentant une section transversale circulaire) et les propriétés du fluide se propageant (telles que la viscosité).
EP05733447A 2005-04-25 2005-04-25 Systemes et procedes de pompage de colonnes de liquide continues utilisant des elements de commande d'hydrophobicite dans un microcanal Withdrawn EP1877334A4 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SG2005/000130 WO2006115464A1 (fr) 2005-04-25 2005-04-25 Systemes et procedes de pompage de colonnes de liquide continues utilisant des elements de commande d'hydrophobicite dans un microcanal

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EP1877334A1 true EP1877334A1 (fr) 2008-01-16
EP1877334A4 EP1877334A4 (fr) 2011-05-04

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WO (1) WO2006115464A1 (fr)

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CN102094784B (zh) * 2010-12-28 2012-11-21 哈尔滨工业大学 一种毫米级蜂窝毛细管超声微泵
CN105233887B (zh) * 2015-08-31 2017-06-23 中国科学院深圳先进技术研究院 一种基于介电润湿的微液滴驱动器件及其制备方法
CN106130310A (zh) * 2016-08-15 2016-11-16 华南理工大学 一种圆柱形电流体动力微泵及其制造方法
US10508755B2 (en) * 2017-07-21 2019-12-17 International Business Machines Corporation Fluid delivery device with hydrophobic surface
CN109529407B (zh) * 2018-12-29 2020-04-28 四川大学 一种形成稳定环状流的简易型微通道装置
CN111056525B (zh) * 2019-11-12 2023-04-18 重庆大学 交流电浸润效应致微通道沸腾换热强化和流动不稳定性抑制方法

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WO2002007503A1 (fr) * 2000-07-25 2002-01-31 The Regents Of The University Of California Micropompage par electromouillage
US20040031688A1 (en) * 1999-01-25 2004-02-19 Shenderov Alexander David Actuators for microfluidics without moving parts
US20040058450A1 (en) * 2002-09-24 2004-03-25 Pamula Vamsee K. Methods and apparatus for manipulating droplets by electrowetting-based techniques
EP1439064A1 (fr) * 2003-01-15 2004-07-21 Samsung Electronics Co., Ltd. Méthode d'éjection d'encre avec tête d'impression à jet d'encre

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DE602004021624D1 (de) * 2003-11-17 2009-07-30 Koninkl Philips Electronics Nv System zur handhabung einer fluidmenge

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US20040031688A1 (en) * 1999-01-25 2004-02-19 Shenderov Alexander David Actuators for microfluidics without moving parts
WO2002007503A1 (fr) * 2000-07-25 2002-01-31 The Regents Of The University Of California Micropompage par electromouillage
US20040058450A1 (en) * 2002-09-24 2004-03-25 Pamula Vamsee K. Methods and apparatus for manipulating droplets by electrowetting-based techniques
EP1439064A1 (fr) * 2003-01-15 2004-07-21 Samsung Electronics Co., Ltd. Méthode d'éjection d'encre avec tête d'impression à jet d'encre

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Title
See also references of WO2006115464A1 *

Also Published As

Publication number Publication date
WO2006115464A8 (fr) 2007-12-21
CN101208259A (zh) 2008-06-25
CN101208259B (zh) 2011-07-06
WO2006115464A1 (fr) 2006-11-02
EP1877334A4 (fr) 2011-05-04

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