EP1856586A4 - An apparatus for dispensing precise volumes of fluid - Google Patents

An apparatus for dispensing precise volumes of fluid

Info

Publication number
EP1856586A4
EP1856586A4 EP05799707A EP05799707A EP1856586A4 EP 1856586 A4 EP1856586 A4 EP 1856586A4 EP 05799707 A EP05799707 A EP 05799707A EP 05799707 A EP05799707 A EP 05799707A EP 1856586 A4 EP1856586 A4 EP 1856586A4
Authority
EP
European Patent Office
Prior art keywords
fluid
precise volumes
dispensing precise
dispensing
volumes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05799707A
Other languages
German (de)
French (fr)
Other versions
EP1856586A2 (en
Inventor
James P Garcia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of EP1856586A2 publication Critical patent/EP1856586A2/en
Publication of EP1856586A4 publication Critical patent/EP1856586A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/405—Methods of mixing liquids with liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/2201—Control or regulation characterised by the type of control technique used
    • B01F35/2209—Controlling the mixing process as a whole, i.e. involving a complete monitoring and controlling of the mixing process during the whole mixing cycle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/88—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
EP05799707A 2004-09-30 2005-09-22 An apparatus for dispensing precise volumes of fluid Withdrawn EP1856586A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/954,707 US20060074529A1 (en) 2004-09-30 2004-09-30 Apparatus for dispensing precise volumes of fluid
PCT/US2005/034088 WO2006039197A2 (en) 2004-09-30 2005-09-22 An apparatus for dispensing precise volumes of fluid

Publications (2)

Publication Number Publication Date
EP1856586A2 EP1856586A2 (en) 2007-11-21
EP1856586A4 true EP1856586A4 (en) 2010-05-26

Family

ID=36126595

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05799707A Withdrawn EP1856586A4 (en) 2004-09-30 2005-09-22 An apparatus for dispensing precise volumes of fluid

Country Status (4)

Country Link
US (2) US20060074529A1 (en)
EP (1) EP1856586A4 (en)
TW (1) TW200629027A (en)
WO (1) WO2006039197A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7412298B2 (en) * 2004-02-13 2008-08-12 Presswood Ronald G Method and system for morphometric analysis of human dental occlusal function and uses thereof
US8615329B2 (en) * 2006-11-20 2013-12-24 Water Optimizer Llc Control system for regulating liquid flow
KR101900788B1 (en) * 2017-01-03 2018-09-20 에스케이실트론 주식회사 Wafer polishing system
JP6538952B1 (en) * 2018-12-11 2019-07-03 株式会社西村ケミテック Polishing fluid supply device
JP7353923B2 (en) * 2019-11-08 2023-10-02 Ckd株式会社 Temperature control system and integrated temperature control system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2938886A1 (en) * 1979-09-26 1981-04-02 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Metering and mixing liquids in fixed proportions - by magnetic floats rising with liquids in intermediate vessels
US20020148485A1 (en) * 2001-04-17 2002-10-17 International Business Machines Corporation Apparatus and method for wet cleaning
US20020175183A1 (en) * 2001-05-24 2002-11-28 Daniel Schell System and method for accurately blending fluids
US6722779B2 (en) * 2001-10-26 2004-04-20 Polypros Inc. Constant precision volumetric dilution vessel

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5261966A (en) * 1991-01-28 1993-11-16 Kabushiki Kaisha Toshiba Method of cleaning semiconductor wafers using mixer containing a bundle of gas permeable hollow yarns
US5462352A (en) * 1991-05-16 1995-10-31 Mette; Manfred Apparatus and method for homogeneous mixing of fluid components to form a mixed product having a more accurately set mixture ratio
US6406364B1 (en) * 1997-08-12 2002-06-18 Ebara Corporation Polishing solution feeder
US6441322B1 (en) * 1999-11-24 2002-08-27 The Procter & Gamble Company Method for controlling an amount of material delivered during a material transfer
TW541230B (en) * 2000-10-06 2003-07-11 Ebara Corp Method for supplying slurry to polishing apparatus
US6709313B2 (en) * 2000-11-17 2004-03-23 Rion Co., Ltd. Apparatus for producing polishing solution and apparatus for feeding the same
US6706641B2 (en) * 2001-09-13 2004-03-16 Micell Technologies, Inc. Spray member and method for using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2938886A1 (en) * 1979-09-26 1981-04-02 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Metering and mixing liquids in fixed proportions - by magnetic floats rising with liquids in intermediate vessels
US20020148485A1 (en) * 2001-04-17 2002-10-17 International Business Machines Corporation Apparatus and method for wet cleaning
US20020175183A1 (en) * 2001-05-24 2002-11-28 Daniel Schell System and method for accurately blending fluids
US6722779B2 (en) * 2001-10-26 2004-04-20 Polypros Inc. Constant precision volumetric dilution vessel

Also Published As

Publication number Publication date
WO2006039197A3 (en) 2009-09-11
WO2006039197A2 (en) 2006-04-13
US20060074529A1 (en) 2006-04-06
EP1856586A2 (en) 2007-11-21
TW200629027A (en) 2006-08-16
US20070032910A1 (en) 2007-02-08

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Legal Events

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